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The Berkeley common-multi-gate (BSIMMG) model is developed to meet the present and future needs of circuit designers employ- ing advanced nano field-effect transistors (nano-FETs), such as FinFETs, with a potential to extend the technology roadmap into sub-25nm region. The BSIMMG model provides maximum versa- tility regarding multi-gate device geometry, novel materials and fabrication technology without compromising the ease of use and simulation efficiency characteristic for the previous generations of BSIM compact models. Versatility in choosing double, triple, quadruple or cylindrical multi-gate FET structures realized either in bulk silicon or SOI technology Based on physical surface potential formulations, the BSIMMG model is continuous, symmetric, scalable and predictive over wide range of device parameters The BSIMMG model captures almost all the important physical phenomena specific for nano-FETs Parameters for non-silicon channel devices and high-k metal- gate stack structures Adjustable complexity of the extrinsic RC network and surface potential solution to the required model accuracy and simulation efficiency Possibility to switch between the BSIM and PSP based channel mobility models. Surface potential based model with extra electrostatic control from the end-gates Optional simplified surface potential solution for further improvements of the computational efficiency Quantum mechanical effects Corner-induced effective width reduction Short channel effects including threshold voltage roll-off, DIBL, sub-threshold slope effects and channel length modulation Poly-silicon gate depletion effects Mobility degradation Hybrid-surface-orientation mobility Velocity saturation Velocity overshoot with source end velocity limit The internal and external, bias dependent, series resistance model Gate tunneling current Gate induced drain and source leakage currents (GIDL, GISL) Impact ionization Non-quasi-static effects Parasitic capacitances Junction capacitances and currents Temperature effects and self-heating Thermal/flicker/shot noise Geometry scaling and binning of the model parameters Different multi-gate architectures in BSIMMG. BSIMMG Berkeley Common-Multi-Gate Transistor Model An Advanced Physical Compact Model for Nano-FETs Model Features Benefits of Using BSIMMG

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The Berkeley common-multi-gate (BSIMMG) model is developed to meet the present and future needs of circuit designers employ-ing advanced nano field-effect transistors (nano-FETs), such as FinFETs, with a potential to extend the technology roadmap into sub-25nm region. The BSIMMG model provides maximum versa-tility regarding multi-gate device geometry, novel materials and fabrication technology without compromising the ease of use and simulation efficiency characteristic for the previous generations of BSIM compact models.

• Versatility inchoosingdouble, triple, quadrupleorcylindricalmulti-gate FET structures realized either in bulk silicon or SOI technology

• Basedonphysicalsurfacepotentialformulations,theBSIMMGmodel is continuous, symmetric, scalable and predictive over wide range of device parameters

• TheBSIMMGmodelcapturesalmostall the importantphysicalphenomena specific for nano-FETs

• Parametersfornon-siliconchanneldevicesandhigh-kmetal-gate stack structures

• AdjustablecomplexityoftheextrinsicRCnetworkandsurfacepotentialsolutiontotherequiredmodelaccuracyandsimulationefficiency

• PossibilitytoswitchbetweentheBSIMandPSPbasedchannelmobility models.

• Surfacepotentialbasedmodelwithextraelectrostaticcontrolfrom the end-gates

• Optional simplified surface potential solution for furtherimprovements of the computational efficiency

• Quantummechanicaleffects• Corner-inducedeffectivewidthreduction• Shortchanneleffectsincludingthresholdvoltageroll-off,DIBL,

sub-threshold slope effects and channel length modulation• Poly-silicongatedepletioneffects• Mobilitydegradation• Hybrid-surface-orientationmobility• Velocitysaturation• Velocityovershootwithsourceendvelocitylimit• The internal and external, bias dependent, series resistance

model• Gatetunnelingcurrent• Gateinduceddrainandsourceleakagecurrents(GIDL,GISL)• Impactionization• Non-quasi-staticeffects• Parasiticcapacitances• Junctioncapacitancesandcurrents• Temperatureeffectsandself-heating• Thermal/flicker/shotnoise• Geometryscalingandbinningofthemodelparameters

Different multi-gate architectures in BSIMMG.

BSIMMGBerkeley Common-Multi-Gate Transistor Model

An Advanced Physical Compact Model for Nano-FETs

Model Features

Benefits of Using BSIMMG

Surface potential in BSIMMG in comparison to 3-D simulation.

The third derivative of the BSIMMG drain-source current in the Gummel symmetry test for different gate voltages.

The choice of SOI or silicon bulk multi-gate technologies in BSIMMG.

Normalized capacitance from BSIMMG model (lines) and TCAD (symbols).

The transient response of the 17-stage ring oscillator test case .

1. M.V.Dunga,C.-H.Lin,M.Niknejad,andC.Hu,“BSIMMG:ACompactModel forMulti-GateTransistors” inPlanarDouble-GateTransistor,A.Amara,O.Rozeau,eds.,Springer,2009.

2. M. V.Dunga, Ph.D.Dissertation:NanoscaleCMOSModeling. UCBerkeley,2007.

3. B.Yu,H.Lu,M.Liu,andY.Taur,“Explicitcontinuousmodelsfordouble-gateandsurrounding-gateMosfets,”IEEETransactiononElectronDevices,vol.54,no.10,pp.2715–2722,October2007.

• TheBSIMMGmodelisimplementedinSmartSpiceasBSIM-CMGLevel=105-BerkeleyreleaseJune2011version105.03

• Silvaco’simplementationisfullycomplianttotheoriginalBerkeleyVerilog-AcodefortheBSIMMGmodelversion105.03.

• The node collapsing scheme is selected by combination of theBSIMMG control parameters specified in model and instance device statements

• Print, plot, save or measure the most important device internalvariables during and after simulation

• Silvaco’s implementation iscompatiblewithVZEROandBYPASSoptions and parallel architecture algorithms to achieve greater speedperformanceaswellasDCGMINoptionforimprovedcon-vergence

WWW.SILVACO.COM Rev.012014_04

References

Silvaco Implementation