probe card metrology for mixed signal probe cardssouthwest test workshop june 2001 integrated...
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Southwest Test Workshop June 2001
Integrated Technology Integrated Technology CorporationCorporation Productivity Solutions For ProbeProductivity Solutions For Probe
Probe Card Metrology ForMixed Signal Probe Cards
How do I test this probe card with all these #@! relays and components?
ByByRod Schwartz, Daniel Kosecki & Russ AllredRod Schwartz, Daniel Kosecki & Russ Allred
Integrated Technology CorporationIntegrated Technology Corporation
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Introduction
Testing Mixed Signal & Other Types of Testing Mixed Signal & Other Types of CardsCardsAny Card with Components or RelaysAny Card with Components or RelaysDefinitions & ExamplesDefinitions & ExamplesTest Methods & Techniques Available NowTest Methods & Techniques Available NowWorkWork--Arounds for Untestable Circuits Arounds for Untestable Circuits FuturesFutures
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Definition of Mixed Signal
Multiple Technologies on One CardMultiple Technologies on One CardMany & Varied Components on CardMany & Varied Components on CardMay Have Linear, RF, Digital, Etc.May Have Linear, RF, Digital, Etc.R, C, L, Networks, Diodes, Active CircuitsR, C, L, Networks, Diodes, Active CircuitsRelaysRelays
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RF Probe Card – Courtesy Artest
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RF Probe Card – Courtesy Artest
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Memory Card – Courtesy Agilent
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Reasons for Testing ComponentsPresence/Absence of Component Presence/Absence of Component Value of ComponentValue of ComponentCircuit may work without itCircuit may work without it
May not work correctlyMay not work correctlyPerformance may degradePerformance may degrade
Oscillator at wrong frequencyOscillator at wrong frequencyBinning to wrong speed categoryBinning to wrong speed categoryFilters at wrong frequencyFilters at wrong frequencyRise time control wrongRise time control wrong
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Resistor Test
Series Series –– In series with probeIn series with probeParallel Parallel –– Between probes (Edges/Pogo’s)Between probes (Edges/Pogo’s)Value Value -- +/+/-- tolerancetolerance
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Capacitance Test
Parallel Parallel –– Between Probes (Edges/Pogo’s)Between Probes (Edges/Pogo’s)Series Series –– In series with probeIn series with probe
Requires AC measurement techniquesRequires AC measurement techniquesPolar Polar –– Applied voltage polarity specifiedApplied voltage polarity specifiedNonNon--Polar Polar –– Polarity not criticalPolarity not criticalValue Value -- +/+/-- ToleranceToleranceLeakage Leakage –– Maximum LimitMaximum LimitImportant to Test Each Component not EquivalentImportant to Test Each Component not Equivalent
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Relay Functional TestBasic operationBasic operationContacts Open/CloseContacts Open/CloseFunction of associated ComponentsFunction of associated Components
TypeTypeForm A N/OForm A N/OForm B N/CForm B N/CForm CForm C
FlybackFlyback DiodesDiodes
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Relay Parametric Test
PullPull--In/Drop Out VoltageIn/Drop Out VoltageCoil CurrentCoil CurrentTurn On/Off TimesTurn On/Off TimesClosed Contact ResistanceClosed Contact ResistanceOpen Contact LeakageOpen Contact LeakageIntermittent OperationIntermittent Operation
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More Complex Tests
Resistor NetworksResistor NetworksRC NetworksRC NetworksInductorsInductorsDiodesDiodesCrystalsCrystalsActive DevicesActive Devices
DigitalDigitalLinearLinear
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Basic Electronic Measurement System
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RESISTORSWide range of valuesWide range of valuesMilliohms to MegohmsMilliohms to MegohmsKelvin measurements requiredKelvin measurements requiredLow valuesLow valuesIntegrity checkIntegrity checkSeries & Parallel casesSeries & Parallel casesProbe to ProbeProbe to ProbeSeries with probeSeries with probeNetworksNetworks
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RESISTOR TEST METHODS
Low ValuesLow ValuesFI/MVFI/MVKelvin requiredKelvin required
High ValuesHigh ValuesFV/MIFV/MILow current measurementsLow current measurements
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Series Resistor Test
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Resistor NetworkPrimary Test Path
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Resistor Voltage Divider Network
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CAPACITOR TEST METHODSCharge/Slope MethodCharge/Slope Method
Works well for large capacitorsWorks well for large capacitorsLimitations at low valuesLimitations at low valuesFinds some problems AC will notFinds some problems AC will not
AC Impedance MethodAC Impedance MethodWorks better on small capacitorsWorks better on small capacitorsEasier to compensate for stray capacitanceEasier to compensate for stray capacitanceLimitations at high valuesLimitations at high valuesCorrelates with Capacitance MeterCorrelates with Capacitance Meter
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Capacitance Measurement System
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Capacitor Calculations
C=I/(C=I/(∆∆VV//∆∆TT))
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Capacitance Error SourcesStray CapacitanceStray Capacitance
Adds to Capacitor ValueAdds to Capacitor ValueMultiplexer (Fixed)Multiplexer (Fixed)Wiring (Variable)Wiring (Variable)
LeakageLeakageMakes Capacitor Look LargerMakes Capacitor Look Larger
Series ResistanceSeries ResistanceMakes Capacitor Look SmallerMakes Capacitor Look SmallerKelvin Connection CriticalKelvin Connection Critical
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Cap Measurement Errors
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TIME
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LEAKAGE EFFECT
Series Resistor
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Capacitor LeakageCritical parameterCritical parameterDC TestDC TestMakes Capacitor Value Look HigherMakes Capacitor Value Look HigherDielectric AbsorptionDielectric Absorption
Makes Leakage Hard to MeasureMakes Leakage Hard to MeasureIncreases Settling Time ConsiderablyIncreases Settling Time ConsiderablyCauses Problems with DischargingCauses Problems with Discharging
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Dielectric Absoption
A measure of the reluctance of a capacitor’s A measure of the reluctance of a capacitor’s dielectric to discharge completely dielectric to discharge completely –– usually usually measured in percent of original charge.measured in percent of original charge.
Def. Def. –– Illinois Capacitor, Inc.Illinois Capacitor, Inc.
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Leakage Test
Source: Vishay Sprague Tantalum Capacitors Data Book Pg 23.
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CAPACITOR TEST LIMITATIONS
Background CapacitanceBackground CapacitanceLimits low end accuracyLimits low end accuracy
LeakageLeakageCauses errors in valueCauses errors in valueTest Times are LongTest Times are Long
Polar CapacitorsPolar CapacitorsMust be properly biasedMust be properly biased
Dielectric AbsorptionDielectric AbsorptionCapacitor Exhibits “Memory”Capacitor Exhibits “Memory”Makes Complete Discharging DifficultMakes Complete Discharging DifficultLooks like leakageLooks like leakage
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Discharging CapacitorsMust discharge for other testsMust discharge for other tests
Prevent “PumpedPrevent “Pumped--Up” VoltagesUp” VoltagesMay Cause Errors in Wire CheckMay Cause Errors in Wire Check
Damage to probes or testerDamage to probes or testerArcing at Probe TipsArcing at Probe Tips
Dielectric AbsorptionDielectric AbsorptionMay retain residual chargeMay retain residual chargeIncreases required discharge timeIncreases required discharge time
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Leakage Versus TimeCap Leakage in Nano Amps
0.0
20.0
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0 100 500 1000 5000 10000 15000 20000 30000 50000 75000 100000
Time in Miliseconds
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ps1
mf C
apac
itor
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kage
in N
ano
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ps10
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acito
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1 mf Cap1000 mf Cap
\
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RELAYSConnect alternate componentsConnect alternate componentsChange test pathChange test pathMay be higher voltage than circuitMay be higher voltage than circuitCoil shorts to test circuit are BAD!Coil shorts to test circuit are BAD!Catch diodes requiredCatch diodes requiredPerformance may be critical to testPerformance may be critical to testFunctional test mandatoryFunctional test mandatoryParametric test desirableParametric test desirableIntermittent function test desirable & UsefulIntermittent function test desirable & UsefulRelays added to prevent probe damageRelays added to prevent probe damage
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RELAY TEST METHODS
Test associated components or pathsTest associated components or pathsTest open/closed casesTest open/closed casesFunctional testFunctional testTest relay function directlyTest relay function directlyContactsContactsParametric TestParametric Test
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Relay Parametric Tests
Coil resistanceCoil resistanceCoil currentCoil currentCatch diode presenceCatch diode presencePullPull--In/DropIn/Drop--Out VoltageOut VoltageContact resistanceContact resistanceTurnTurn--On/TurnOn/Turn--Off TimesOff Times
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Relay MUX - One Channel
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Relay MUX
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Relay MUX - Logic Driver
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Logic Drive - Probilt™ MUX
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Logic Drive - Probilt™ MUX
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Futures
More Complex Component NetworksMore Complex Component NetworksNew Programming TechniquesNew Programming Techniques
Logic & Linear IC’s on Probe CardLogic & Linear IC’s on Probe CardNew Programming TechniquesNew Programming TechniquesMultiple Supply VoltagesMultiple Supply Voltages“Full” Logic Testing“Full” Logic Testing
Ultra Low LeakageUltra Low Leakage
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Acknowledgements
Rex Lewis, TIRex Lewis, TIAli Ali JafariJafari, Agilent, AgilentJerry Jerry PilkayPilkay, , ArtestArtestNick Sporck, Form FactorNick Sporck, Form Factor