high performance motorized stages · gsc-01, gsc-02, shot-702, gip-101, shot-302gs, ... hexagon...

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G028 Motion Control Products Guide Controllers/Drivers Softwares AC Servo Motor Cables Piezo Theta Rotation Goniometer Vacuum Options 40mm 85mm 100mm Others Application Systems Optics & Optical Coatings Holders Bases Manual Stages Actuators Motoeized Stages Light Sources Index 120mm 80mm 60mm X Translation Stepping Motor High Performance Motorized Stages HPS Motorized stages with ball screws offering middle/high performance at low price. Specifications Part Number HPS60-20X-M5 HPS80-50X-M5 HPS120-60X-M5 Mechanical Specifications Travel [mm] 20 50 60 Table Size [mm] 60×60 120×80 120×120 Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead Positioning Slide Ball guide Ball guide Ball guide Stage Material Aluminum Aluminum Aluminum Finish Black anodized Black anodized Black anodized Weight [kg] 0.6 1 1.5 Accuracy Specifications Resolution (Full) [μm/pulse] 2 2 2 (Half) [μm/pulse] 1 1 1 MAX Speed [mm/sec] 10 10 10 Positioning Accuracy [μm] 15 25 25 Positional Repeatability [μm] ±1 ±2 ±2 Load Capacity [N] 49 (5kgf) 73.5 (7.5kgf) 98 (10kgf) Moment Stiffness Pitch [/Ncm] 0.4 0.5 0.5 Yaw [/Ncm] 0.4 0.5 0.5 Roll [/Ncm] 0.3 0.2 0.2 Lost Motion [μm] 1 2 2 Backlash [μm] 1 2 2 Parallelism [μm] 30 40 50 Running Parallelism [μm] 10 10 10 Pitch [] / Yaw [] 25/25 30/25 30/25 Sensor Sensor Part Number Micro photo sensor: GP1S097HCZ(Sharp Corporation) Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Proximity Origin Sensor None None None Motor / Sensor Specifications Motor Type 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.) Motor Part Number PK523HPB-C12 (28mm) Step Angle 0.72° Sensor Power Voltage DC5 - 24V ±10% Current Consumption 60mA or lower (20mA or lower per sensor) Control Output NPN open collector output DC30V or lower, 50mA When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V Output Logic In the case of light shielded ,output transistor OFF (No conduction): Limit sensor In the case of light shielded ,output transistor ON (Conduction): Origin sensor Compatible Driver / Controller Control System Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL Compatible Controller GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M HIT-S, PGC-04 Please contact us when assembled into XYZ axis or use in reversion on the ceiling or vertical direction. Opposite model or various motor changes are optionally available. G030 Guide Ball screws with improved durability compared to the existing TSDM series. Our original high precision integrated ball guide used in place of a cross roller guide makes it possible to offer a price lower than the TAMM series.

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Page 1: High Performance Motorized Stages · GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, ... Hexagon socket head cap screw M4×12…4 screws: 70 φ4 70 Travel 25 φ6 Travel 25 6 30 15

G028

Mot ion Cont ro l Products

Guide

Controllers/Drivers

Softwares

AC Servo Motor

Cables

Piezo

Theta Rotation

Goniometer

Vacuum

Options

□40mm

□85mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□120mm

□80mm

□60mm

X Translation

Stepping Motor

High Performance Motorized Stages HPS

Motorized stages with ball screws offering middle/high performance at low price.

SpecificationsPart Number HPS60-20X-M5 HPS80-50X-M5 HPS120-60X-M5

MechanicalSpecifications

Travel [mm] 20 50 60

Table Size [mm] 60×60 120×80 120×120

Feed Screw Ball screw diameter φ6mm, 1mm lead

Ball screw diameter φ6mm, 1mm lead

Ball screw diameter φ6mm, 1mm lead

Positioning Slide Ball guide Ball guide Ball guide

Stage Material Aluminum Aluminum Aluminum

Finish Black anodized Black anodized Black anodized

Weight [kg] 0.6 1 1.5

AccuracySpecifications

Resolution (Full) [μm/pulse] 2 2 2

(Half) [μm/pulse] 1 1 1

MAX Speed [mm/sec] 10 10 10

Positioning Accuracy [μm] 15 25 25

Positional Repeatability [μm] ±1 ±2 ±2

Load Capacity [N] 49 (5kgf) 73.5 (7.5kgf) 98 (10kgf)

Moment Stiffness

Pitch [″/N・cm] 0.4 0.5 0.5

Yaw [″/N・cm] 0.4 0.5 0.5

Roll [″/N・cm] 0.3 0.2 0.2

Lost Motion [μm] 1 2 2

Backlash [μm] 1 2 2

Parallelism [μm] 30 40 50

Running Parallelism [μm] 10 10 10

Pitch [″] / Yaw [″] 25/25 30/25 30/25

Sensor

Sensor Part Number Micro photo sensor: GP1S097HCZ(Sharp Corporation)

Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)

Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)

Proximity Origin Sensor None None None

Motor / Sensor Specifications

Motor

Type 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

Motor Part Number PK523HPB-C12 (□28mm)

Step Angle 0.72°

Sensor

Power Voltage DC5 - 24V ±10%

Current Consumption 60mA or lower (20mA or lower per sensor)

Control Output NPN open collector output DC30V or lower, 50mAWhen load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V

Output Logic In the case of light shielded ,output transistor OFF (No conduction): Limit sensorIn the case of light shielded ,output transistor ON (Conduction): Origin sensor

Compatible Driver / Controller

Control SystemCompatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL

Compatible Controller GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04

▶Please contact us when assembled into XYZ axis or use in reversion on the ceiling or vertical direction.

▶Opposite model or various motor changes are optionally available. G030

Guide

◦Ball screws with improved durability compared to the existing TSDM series.

◦Our original high precision integrated ball guide used in place of a cross roller guide makes it possible to offer a price lower than the TAMM series.

Page 2: High Performance Motorized Stages · GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, ... Hexagon socket head cap screw M4×12…4 screws: 70 φ4 70 Travel 25 φ6 Travel 25 6 30 15

G029WEB http://www.sigma-koki.com/english/ E-mail [email protected] TEL +81-3-5638-8228 FAX +81-3-5638-6550

Guide

Controllers/Drivers

Softwares

AC Servo Motor

Cables

Piezo

Theta Rotation

Goniometer

Vacuum

Options

□40mm

□85mm

□100mm

Others

Application Systems

Optics & Optical Coatings

Holders

Bases

Manual Stages

Actuators

Motoeized Stages

Light Sources

Index

□60mm

□80mm

□120mm

X Translation

Stepping Motor

W9061CatalogCode

Outline Drawing

Hexagon socket head cap screw M4×12…4 screwsHPS80-50X-M5

Hexagon socket head cap screw M6×12…4 screwsHPS120-60X-M5

Hexagon socket head cap screw M4×12…4 screwsHPS60-20X-M5

70φ4

70

φ6 Travel 25Travel 25

630

15(29)

1

4-φ4.5 mounting holeφ8 counterbore

counterbore for attachment pins (mounting side)GOHT-AP

mounting hole for attachment pins (bezel side)

50 70 80(14

.5)

5070100

(199)

φ20

(450)

6-M4×0.7 depth 8

4-M4×0.7 depth 8

2-M4×0.7 depth 4 M4×0.7 depth 5.5

(450)

φ20

(14.

5)

32 50 60

325060

(153)

6-M4×0.7 depth 8

4-M3×0.5 depth 6

M4×0.7 depth 5

2-M4×0.7 depth 4

50φ4

φ6

50

6.5

30

Travel 10Travel 10

1

15(29)

4-φ4.5 mounting holeφ8 counterbore

counterbore for attachment pins (mounting side)GOHT-AP

mounting hole for attachment pins (bezel side)

100

φ4

100

4

30

φ6

1

Travel 30Travel 30

15(29)

4-φ6.5 mounting holeφ11 counterbore

counterbore for attachment pins (mounting side)GOHT-AP

mounting hole for attachment pins (bezel side)

(450)

50 70 100

120

(14.

5)

50

70

100

120

(224)

φ20

4-M6×1 depth 12

4-M4×0.7 depth 8

6-M4×0.7 depth 8 M4×0.7 depth 5.5

2-M4×0.7 depth 4

Stage

Driver

Drivers

Cable

ControllerGSC-01GSC-02SHOT-702GIP-101SHOT-302GSSHOT-304GSHIT-M・HIT-SPGC-14

[1 axis][2 axes][2 axes][1 axis][2 axes][4 axes][8 axes][4 axes]

D15RP-CA

Cable

MINI-CA-SGG020 − G021 G108

G098 − G105G108

HPS60-20X-M5HPS80-50X-M5HPS120-60X-M5

■Compatible Controllers / Drivers and Cables

Motor lead

Motor lead

Motor lead

Motor lead

Motor lead

SensorPower source 12VGND (0V)

LS (+)

LS (−)

ORG

FG

FG

B-PhaseD-Phase

A phase

C-Phase

E-Phase

5-Phase SteppingMotorConnector Pin Number

Hirose Electric Co., Ltd.RP17-13R-12SC

Sharp CorporationMicro photo sensorGP1S097HCZ0F

1

2

3

4

5

6

7

8

9

10

11

12

1

2

3

4

5

6

7

8

9

10

11

12

Originside (ORG)limit sensorON when shaded

■Connection Diagram

Opposite side (−)limit sensor

Motor side (+)limit sensor

ON when light enters

ON when light enters

Note 1

Note 1Note 2

The motor side limit sensor is the + direction limit sensor.Motorized stages are not fitted with proximity origin sensors.Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122

Note 1

Note 2