faculty of natural science department of physics
TRANSCRIPT
VYTAUTAS MAGNUS UNIVERSITY
FACULTY OF NATURAL SCIENCE
DEPARTMENT OF PHYSICS
MICHAEL OLUWASEUN IDOWU
“INVESTIGATION OF THE CATALYST MATERIALS DIFFUSION DURINGHYDROGENATION OF Pt-Mg-Ni THIN FILMS”
Master thesis
Energy and Environment Study program, Study code 621F35001Physical Sciences (Physics)
Supervisor: Prof. Dr Darius Milcius _____________ ____________
Defence: Prof. habil. Dr. Algimantas Paulauskas __________ ____________
KAUNAS, 2015
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CONTENTS
SUMMARY................................................................................................................................... 3
SANTRAUKA............................................................................................................................... 4
LIST OF TABLES.......................................................................................................................... 5
LIST OF FIGURES........................................................................................................................ 6
INTRODUCTION.......................................................................................................................... 8
1 MAGNESIUM NICKEL FILMS...........................................................................................10
2 MATERIAL SYNTHESIS BY MAGNETRON SPUTTERING..........................................11
2.1 PRINCIPLES OF MAGNERTON SPUTTERING.........................................................11
3 MATERIAL ANALYSIS .....................................................................................................13
3.1 Scanning Electron Microscopy...................................................................................13
3.2 Energy Dispersive Spectroscopy................................................................................17
3.3 X-ray Photoelectron Spectroscopy.............................................................................20
3.4 X-ray Diffraction........................................................................................................23
4 MATERIAL ANALYSIS METHODS..................................................................................27
4.1 Material Synthesis by Magnetron Sputtering.............................................................27
4.2 Material Analysis by Scanning Electron Microscope................................................28
4.3 Material Analysis using Energy dispersive Spectroscope..........................................29
4.4 Material Analysis using X-ray Photoelectron Spectroscope......................................30
4.5 Bulk Analysis using X-ray Diffraction.......................................................................31
5 MATERIAL ANALYSIS RESULTS....................................................................................34
5.1 Results from Scanning Electron Microscope..............................................................34
5.2 Results from Energy dispersive Spectroscope............................................................35
5.3 Results from X-ray Photoelectron Spectroscope........................................................36
5.4 Results from X-ray Diffraction...................................................................................40
CONCLUSIONS...........................................................................................................................43
REFERENCES...............................................................................................................................44
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SUMMARY
Author of diploma paper: Michael Oluwaseun Idowu
Full title of diploma paper: Investigation of the catalytic material diffusion during
hydrogenation of Pt-Mg-Ni Thin films
Diploma paper advisor: Prof. Dr Darius Milcius
Presented at: Vytautas Magnus University, Faculty of Natural Science, Kaunas,
2015
Number of pages: 46
Number of tables: 3
Number of pictures: 28
Mg-Ni alloy thin films have attracted much attention as hydrogen storage materials . The
achievable high H-storage capacity and the low absorption and desorption pressures are the advantages
of this material. However, because of the high sorption temperature and the relatively slow kinetics the
direct use of magnesium is not common. Using catalysts is one direction to optimize the properties. It is
important to discover the best catalyst for magnesium-based systems to enhance the kinetics of
absorption and desorption. In this thesis work, The aim of the work is to investigate what happens to
the Platinum coating which is the catalyst during hydrogenation process of the Magnesium-Nickel
samples/films.
Three samples of Magnesium and Nickel coatings on Silicon substrate were obtained by
magnetron sputtering. Each sample was divided into two equal parts and one part was covered with a
catalytically active platinum layer. The coating was hydrogenated using the sky hydrogenation under
high hydrogen pressure and temperature technologies. The amount of hydrogen absorption was large
upon exposure to hydrogen gas; the films take up hydrogen and become transparent. The platinum
layer enhanced the kinetics of hydrogen adsorption and desorption, while also protecting the coatings
from further oxidation. It is shown that in spite of all the advantages of platinum after hydrogenation
part of the platinum diffused into the Mg-Ni coating structure and in the future it may stop
hydrogenation process while trying to realize multiple coatings hydrogenating - dehydrogenating. It
was also noted that this diffusion from the Mg-Ni coating initiated the formation of undesirable Mg-
Silicates formation.
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SANTRAUKA
Šiame darbe, panaudojant magnetroninio garinimo metodą buvo gautos Mg-Ni dangos ant
silicio padėklo. Kiekvienas bandinys buvo padalintas į dvi lygias dalis ir viena iš dalių buvo padengtas
katalitiškai aktyviu platinos sluoksniu. Dangos buvo hidrintos panaudojant dangų hidrinimo aukštame
vandenilio slėgyje ir temperatūroje technologijas. Gauti metalų hidridai buvo skaidrūs ir sluoksnis,
kuris buvo padengtas platinos katalizatoriais pademonstravo geresnę hidrinimosi kinetiką. Taigi
platinos sluoksnis pasitarnavo kaip hidrinimo proceso aktyvatorius ir kartu apsaugojo Mg-Ni dangas
nuo papildomos oksidacijos.
Pagrindinis šio darbo tikslas buvo ištirti kas atsitinka su platina Mg-Ni dangų hidrinimo metu.
Darbe parodyta, kad nepaisant visų platinos privalumų po hidrinimosi dalis platinos difundavo
į Mg-Ni dangos struktūrą ir ateityje tai gali sustabdyti hidrinimosi procesą, siekiant realizuoti
daugkartinį dangų hidrinimą – dehidrinimą. Taip pat buvo pastebėta, kad Si difundavo iš padėkliuko į
Mg-Ni dangas taip iniciuodamas nepageidautinų Mg – silicidų formavimąsi.
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LIST OF TABLES
Table 1 showing the variations in quantities of different elements in the sample with and withoutplatinum after hydrogenation for first sample.
Table 2 showing the variations in quantities of different constituent elements in the sample with andwithout platinum after hydrogenation for the second sample.
Table 3 showing the variations in quantities of different constituent elements in the sample with andwithout platinum after hydrogenation for the third sample.
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LIST OF FIGURES
Figure 1 Schematic representation of a magnetron sputtering process
Figure 2 Schematic representation of the scanning electron microscope
Figure 3 Electron beam-specimen interaction diagram and the different signals generated
Figure 4 Interaction volume increases with increasing acceleration voltage and decreases withincreasing atomic number
Figure 5 The Peltier Cooler
Figure 6 Elemental Energy dispersive X-Ray microanalyses, the peaks are labeled with the line of thecorresponding element
Figure 7 Photoelectron by X-ray Photoelectron spectroscopic technique
Figure 8 Kinetic energy of ejected photoelectrons
Figure 9 Schematic representation of the X-ray Photoelectron Spectroscopy
Figure 10 Schematics of the Bragg spectrometer
Figure 11 Braggs Equation describing x-ray diffraction
Figure 12 Magnetron Sputtering System at the Lithuania Energy institute
Figure 13 Scanning Electron Microscope: Model – S-3400N at the Lithuanian Energy Institute.
Figure 14 Energy Dispersive Spectroscope Model: Quad Detector 5040
Figure 15 XPS Model: PHI 5000 Versaprobe Manufactured by Physical Electronics, Inc. at theLithuania Energy institute
Figure 16 X-ray Diffractometer at the Lithuania Energy institute
Figure 17 Scanning Electron Microscope images of the two sample after hydrogenation with andwithout platinum
Figure 18 Scanning Electron Microscope images of the two sample after hydrogenation with andwithout platinum
Figure 19 Scanning Electron Microscope images of the two sample after hydrogenation with andwithout platinum
Figure 20 XPS graph showing the concentration of the different elements against depth in the thin filmafter Platinum was cleaned off for first sample
Figure 21 XPS graph showing the concentration of the different elements relative to the depth in thethin film for first sample
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Figure 22 XPS graph showing the concentration of the different elements against depth in the thin filmafter Platinum was cleaned off for second sample
Figure 23 XPS graph showing the concentration of the different elements relative to the depth in thethin film for second sample
Figure 24 XPS graph showing the concentration of the different elements against depth in the thin filmafter Platinum was cleaned off for third sample
Figure 25 XPS graph showing the concentration of the different elements relative to the depth in thethin film for third sample
Figure 26 X-ray diffractogram of the first hydrogenated Mg-Ni thin film before and after being coatedwith platinum
Figure 27 X-ray diffractogram of the second hydrogenated Mg-Ni thin film before and after beingcoated with platinum
Figure 28 X-ray diffractogram of the third hydrogenated Mg-Ni thin film before and after being coatedwith platinum
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INTRODUCTION
Hydrogen is very attractive as an energy carrier. To store and transport hydrogen there are
several options, each with its own advantages and problems. Hydrogen metal systems receive a lot of
attention due to the fact that the hydrogen density in a metal-hydride is often higher than in a liquid or
even in a solid hydrogen phase since it has a high diffusion co-efficient in metals [1]. To store
hydrogen, the metallic host needs to have certain properties like high hydrogen volume and weight
density, a good cycling stability, appropriate thermodynamics and low production costs. These
requirements limit the number of possible candidates strongly [2]. For its industrial use many criteria
have to be met. The achievable maximum capacity is determined by the selected storage solution.
However, there are a number of important secondary properties, which should also be considered:
hydrogen absorption-desorption kinetics and temperature, impurity effects, cycling stability, safety, raw
material cost and ease of manufacture [3].
Beside these basic hydriding properties there are other ones that should be put into
consideration like activation, a procedure that is important for hydriding a metal for the first time and
bringing it up to maximum H-capacity and hydriding-dehydriding kinetics. The ease of initial H2
penetration depends on surface structures and barriers, such as dissociation catalytic species and
passivation oxide films [4]. The time required for absorption-desorption is also an important property
[5]. Applications require as fast hydrogenation as possible, and desorption that is also fast enough to
meet the continuous production of energy in demand. Kinetics, the time required for a full absorption
or desorption, can vary on a large scale from alloy to alloy. However, there are some materials with
high hydrogen capacity, which are kinetics limited, especially at low temperature [6]. In cases like
these, enhancement of the hydriding processes is the main objectives.
The first step of all metal-hydrogen reaction is the mass transport of hydrogen molecules onto
the solid-gas interface, the dissociation of the molecules on the surface also called chemisorption at
special dissociation sites, possible migration to such sites, and penetration of hydrogen atoms through
the surface into the bulk metal [7]. At the end of this process, the hydrogen atoms are dissolved in the
bulk metal, near to the solid-gas interface [8].
Hydrogenation of a metal host material is done by hydrogen gas loading or electrolytic
charging. However, hydrogenation and the repeated cycling have a negative effect on the
microstructure of the bulk metal thereby making the material brittle due to expansion upon hydrogen
absorption. Eventually this will lead to a pulverization of the host material [9]. As a result
determination of the physical properties of the metal hydrides is not always easy. The problem is
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prevented by depositing a thin film of the material. Due to the interaction with the substrate, the film
remains intact during hydrogenation. Thin metal hydride films can thus be used as one of the model
systems to study the hydrogen storage properties.
Among the numerous hydrogen storage materials, magnesium and magnesium based alloys
are attractive because of their high theoretical hydrogen storage capacities (7.6 wt.% for MgH2, 3.6
wt.% for Mg2NiH4), lightweight and low cost. Mg-Ni alloy thin films have attracted much attention as
hydrogen storage materials [10], hydrogen sensors [11] and switchable mirrors [12]. But their setback
is the slow kinetics and high hydriding/dehydriding temperature of the Magnesium-based materials
seriously hamper their practical application. Many methods have been used to overcome these
limitations, like the addition of alloying elements and catalysts, surface modifications etc.
Subsequently, scientists became increasingly interested in investigating the relationship between the
microstructure and the hydrogenation properties of Mg based materials.
The achievable high hydrogen-storage capacity and the low absorption and desorption
pressures are the advantages of this material. However, because of the high sorption temperature and
the relatively slow kinetics, the direct use of magnesium is not very common. Making use of catalysts
is one pathway to optimize the properties. It is equally pertinent to find the best catalyst for
magnesium-based systems to enhance the kinetics of absorption and desorption, while the real, physical
role of catalysts in these processes is still not clear [13]. Platinum catalyst helps to split H2 molecules
to H atoms and increases hydrogenation kinetics which is why it is considered here.
MAIN GOAL OF THE WORK:
Investigation of the catalytic material diffusion during hydrogenation of Pt-Mg-Ni thin films.
TASKS OF THE WORK:
(i) Deposition of Mg-Ni thin films on silicon substrate by magnetron sputtering.
(ii) Carrying out the sample analysis with and without platinum using Scanning electron
microscope, Energy dispersive spectroscope and X-ray photoelectron spectroscope.
(iii) Carrying out bulk analysis using the X-ray diffraction.
(iv) Make conclusions on the fate of platinum after analysis using the instruments above.
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1. MAGNESIUM NICKEL FILMS (Mg2NiH4)
This is a semi-conductor and non-metallic hydride derived from metallic Mg2Ni after its
absorption of hydrogen by a relatively important rearrangement of its hexagonal metal substructure.
Four hydrogen atoms bond with single a Ni atom and the two Mg atoms donate two electrons each to
stabilize the high-H transition metal complex [14]. In this hydride two Mg² ions donate two electrons
each to stabilize the NiH4 complex. It is known as the only stable compound known for the Mg-Ni-H
system with a theoretical hydrogen capacity of 3.6 wt%. The structure of consists of tetrahedral NiH4-
complexes in a framework of magnesium ions.
The hydride exhibits a transition at 235 °C. In the low-temperature (LT) phase, magnesium
ions and NiH4-complexes assume an ordered arrangement to form a monoclinic structure, whereas in
the high-temperature (HT) phase, the arrangement becomes disordered to form a cubic anti-fluorite
structure. This phase transformation is, however, known to be severely disturbed by the internal stress.
The HT phase was produced by ball-milling at room temperature and also by static compression to
50MPa during heat treatments. The reverse transition from HT to LT phase was also affected by
introduction of micro twinning, which is characterized by the appearance of a diffraction peak of a
lattice spacing of 3.24 Å [15]. To make Mg2NiH4 less stable and more suitable for hydrogen storage it
is essential to avoid the presence of Mg/MgH2 [16].
Magnesium alloys are promising storage materials as a result of their lightweight, high
specific storage capacity (7.6 wt% for MgH2 and 3.6 wt% for Mg2NiH4) [17], abundant raw materials
and low environmental impact. Due to its low weight and high hydrogen content, it has been
intensively investigated both theoretically and experimentally as a hydrogen storage material and also
for increasing the negative electrode capacity in nickel metal hydride (NiMH) batteries. Nevertheless,
Magnesium is inadequate to be used in hydrogen storage applications due to its high hydrogen
desorption temperature and relatively slow hydrogen absorption/desorption kinetics [18]. Storage
capacity of Mg2NiH4 is smaller; however the kinetic is better and desorption temperature lower
meaning it has more potential for hydrogen storage if more solutions are discovered via effective
experimental investigations.
However, under normal conditions Mg2NiH4 is too stable, i.e. at room temperature the
equilibrium pressure is so low that Mg2NiH4 practically does not desorp hydrogen. Therefore, it is
essential that the stability of Mg2NiH4 be decreased to produce a suitable material for practical
hydrogen storage. To make Mg2NiH4 less stable and more suitable for hydrogen storage it is essential
to avoid the presence of Mg/MgH2 [19].
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2. MATERIAL SYNTHESIS BY MAGNETRON SPUTTERING
2.1. MAGNETRON SPUTTERING PRINCIPLES
In the basic sputtering process, a target or cathode plate is bombarded by energetic ions
generated in glow discharge plasma, situated in front of the target. The bombardment process causes
the removal and sputtering of target atoms, which may then condense on a substrate as a thin film.
Secondary electrons are also emitted from the target surface as a result of the ion bombardment, and
these electrons play an important role in maintaining the plasma [20]. While in Magnetron Sputtering,
The magnets produce the magnetic field that makes the electrons go in a curved path which are longer
bringing about more collisions which in turn produces more ions needed to strike plasma.
Fig.1 Schematic representation of a magnetron sputtering process [21]
Magnetrons make use of the fact that a magnetic field configured parallel to the target surface
maintains secondary electron motion to the surroundings of the target. A magnetic field is applied at
right angle to electric field by placing large magnets behind the target; this traps the electrons near the
target surface, causing them to move in spiral motion until they collide with an Argon atom [22].
Trapping the electrons in this way increases the frequency of an ionizing electron-atom collision
occurrence. A dense plasma is the result of the increased ionization efficiency of a magnetron in the
target region resulting into increased ion bombardment of the target resulting in higher sputtering rates
and consequent higher deposition rates at the substrate. In addition, the increased ionization efficiency
achieved in the magnetron mode allows the discharge to be maintained at lower operating pressures (up
to 10~2mbar) and lower operating voltages (typically, -500V, compared to -2 to -3 kV) than is possible
in the basic sputtering mode since lower voltage is needed to strike plasma and deposition rate
11
2. MATERIAL SYNTHESIS BY MAGNETRON SPUTTERING
2.1. MAGNETRON SPUTTERING PRINCIPLES
In the basic sputtering process, a target or cathode plate is bombarded by energetic ions
generated in glow discharge plasma, situated in front of the target. The bombardment process causes
the removal and sputtering of target atoms, which may then condense on a substrate as a thin film.
Secondary electrons are also emitted from the target surface as a result of the ion bombardment, and
these electrons play an important role in maintaining the plasma [20]. While in Magnetron Sputtering,
The magnets produce the magnetic field that makes the electrons go in a curved path which are longer
bringing about more collisions which in turn produces more ions needed to strike plasma.
Fig.1 Schematic representation of a magnetron sputtering process [21]
Magnetrons make use of the fact that a magnetic field configured parallel to the target surface
maintains secondary electron motion to the surroundings of the target. A magnetic field is applied at
right angle to electric field by placing large magnets behind the target; this traps the electrons near the
target surface, causing them to move in spiral motion until they collide with an Argon atom [22].
Trapping the electrons in this way increases the frequency of an ionizing electron-atom collision
occurrence. A dense plasma is the result of the increased ionization efficiency of a magnetron in the
target region resulting into increased ion bombardment of the target resulting in higher sputtering rates
and consequent higher deposition rates at the substrate. In addition, the increased ionization efficiency
achieved in the magnetron mode allows the discharge to be maintained at lower operating pressures (up
to 10~2mbar) and lower operating voltages (typically, -500V, compared to -2 to -3 kV) than is possible
in the basic sputtering mode since lower voltage is needed to strike plasma and deposition rate
11
2. MATERIAL SYNTHESIS BY MAGNETRON SPUTTERING
2.1. MAGNETRON SPUTTERING PRINCIPLES
In the basic sputtering process, a target or cathode plate is bombarded by energetic ions
generated in glow discharge plasma, situated in front of the target. The bombardment process causes
the removal and sputtering of target atoms, which may then condense on a substrate as a thin film.
Secondary electrons are also emitted from the target surface as a result of the ion bombardment, and
these electrons play an important role in maintaining the plasma [20]. While in Magnetron Sputtering,
The magnets produce the magnetic field that makes the electrons go in a curved path which are longer
bringing about more collisions which in turn produces more ions needed to strike plasma.
Fig.1 Schematic representation of a magnetron sputtering process [21]
Magnetrons make use of the fact that a magnetic field configured parallel to the target surface
maintains secondary electron motion to the surroundings of the target. A magnetic field is applied at
right angle to electric field by placing large magnets behind the target; this traps the electrons near the
target surface, causing them to move in spiral motion until they collide with an Argon atom [22].
Trapping the electrons in this way increases the frequency of an ionizing electron-atom collision
occurrence. A dense plasma is the result of the increased ionization efficiency of a magnetron in the
target region resulting into increased ion bombardment of the target resulting in higher sputtering rates
and consequent higher deposition rates at the substrate. In addition, the increased ionization efficiency
achieved in the magnetron mode allows the discharge to be maintained at lower operating pressures (up
to 10~2mbar) and lower operating voltages (typically, -500V, compared to -2 to -3 kV) than is possible
in the basic sputtering mode since lower voltage is needed to strike plasma and deposition rate
12
increases up to 10-100 times faster than without magnetron configuration. The use of the magnets is to
increase the percentage of electrons taking part in the ionization events thereby increasing the
probability of electrons striking Argon, increases electron path length which increases efficiency of
ionization. Another reason why the magnetron sputtering process is more efficient is that it controls
uniformity; electrons paths are more curved near stronger magnetic field. More ions collide with target
in regions of high magnetic field. More ion collisions lead to more target atoms sputtering.
13
3. MATERIAL ANALYSIS
3.1. MATERIAL ANALYSIS USING SCANNING ELECTRON MICROSCOPE
It is an electron microscope that creates images of the sample surface by using an electron
beam that scans the surface of a specimen inside a vacuum chamber. The electrons interact with the
atoms that make up the sample producing secondary electrons, backscattered electrons, x-rays that
contain information The scanning electron microscope provides characteristic information like the;
Topography which are the surface features of the material/sample or “how the sample/s look
like”, texture and the direct relation between these features and the properties of the material/sample.
Morphology which is the size and shape of the particles that makes up the material and the
direct relation between these structures and the properties of the material/sample.
Composition which is the elements and compounds that the material is composed of with their
respective relative amounts; direct relation between composition and the properties of the
material/sample. A scanning electron microscope may be equipped with an energy dispersive
spectroscopic analysis system to enable it to perform compositional analysis on specimens.
3.1.1 WORKING PRINCIPLES OF THE SCANNING ELECTRON MICROSCOPE
The principle is based on interaction between a focused beam of electron and the sample
which eventually produces the signal on the screen. The scanning electron microscope uses electrons
instead of light to form an image. A beam of electrons is produced at the top of the microscope by the
electron gun. The electron beam follows a vertical path through the column of the microscope. It makes
its way through electromagnetic lenses which focus and direct the beam down towards the sample [23].
Once it hits the sample, a large number of signals are generated including other electrons like
backscattered or secondary. Detectors collect the secondary or backscattered electrons, and convert
them to a signal that is sent to a viewing screen similar to the one in an ordinary television, producing
an image. The energy of the primary electrons determines the quantity of secondary electrons collected
during interaction.
The emission of secondary electrons from the specimen increases as the energy of the primary
electron beam increases, until a certain limit is reached. Beyond this limit, the collected secondary
electrons diminish as the energy of the primary beam is increased, because the primary beam is already
activating electrons deep below the surface of the specimen [24]. Electrons coming from such depths
14
usually recombine before reaching the surface for emission. Apart from secondary electrons, the
primary electron beam results in the emission of backscattered electrons from the specimen.
Backscattered electrons possess more energy than secondary electrons, and have a definite direction.
Due to this, they cannot be collected by a secondary electron detector, unless the detector is directly in
their path of travel. All emissions above 50 eV are known to be backscattered electrons. Secondary
electrons are generated from the collision between the incoming electrons and the loosely bonded outer
electrons low energy electrons of about 10-50 eV and only secondary electrons generated close to
surface escape which are the source of the topographic information.
Fig. 2 Schematic representation of the scanning electron microscope [25]
These interactions can be divided into two major categories: elastic interactions and inelastic
interactions. Elastic scattering results from the deflection of the incident electron by the specimen
atomic nucleus or by outer shell electrons of similar energy [26]. This kind of Interaction is
characterized by negligible energy loss during the collision and by a wide-angle directional change of
the scattered electron. Incident electrons that are elastically scattered through an angle of more than 90˚
are called backscattered electrons (BSE), and yield a useful signal for imaging the sample. Inelastic
scattering occurs through a variety of interactions between the incident electrons and the electrons and
atoms of the sample, and results in the primary beam electron transferring substantial energy to that
atom [27]. The amount of energy loss is dependent on whether the specimen electrons are excited
independently or collectively and the binding energy of the electron to the atom. As a result, the
15
excitation of the specimen electrons during the ionization of specimen atoms leads to the generation of
secondary electrons (SE), which are defined as possessing energies of less than 50eV which can be
used to image or analyze the sample. In addition to those signals that are utilized to form an image, a
number of other signals are produced when an electron beam strikes a sample, including the emission
of characteristic x-rays, Auger electrons, and cathodaluminescence. The tear drop zone below shows
the regions from which different signals are detected. The combined effect of the elastic and inelastic
interactions is to limit the penetration of the beam into the solid. The region of interaction between the
solid and the beam is known as the interaction volume.
Fig. 3 Electron beam-specimen interaction diagram and the different signals generated [28]
Two major factors control which effects can be detected from the interaction volume.
i) A beam of electrons lose energy as they probe the sample due to interactions with it
and if too much energy is required to produce an effect, it will not be possible to
produce it from deeper portions of the volume due to the increasing loss of energy.
ii) The degree to which an effect, once produced, can be observed is controlled by how
strongly it is diminished by absorption and scattering in the sample. E.g. although
secondary and Auger electrons are produced throughout the interaction volume,
they have very low energies and can only escape from a thin layer near the sample's
surface [29].
16
Fig. 4 Interaction volume increases with increasing acceleration voltage and decreases with increasing atomicnumber [30]
3.1.2 MAIN COMPONENTS OF THE SCANNING ELECTRON MICROSCOPE
These are subdivided into three parts which are the Electron Optical Column consisting of the
electron gun, objective lenses, condenser lenses, apertures and the scanning coils, Vacuum systems
consisting of the chamber and valves and pumps which produce the vacuum while the signal detection
and display comprise of detectors and electronics which produce the images from the signals.
(i) ELECTRON GUN: It is used for producing an intense beam of electrons using either the
thermionic gun (thermal energy) TEG electron emission from heating of a solid e.g. LaB6
or a field emission gun (electric field) where a strong electric field is used to extract
electrons.
(ii) LENSES: Here, we have the condenser lens that reduces the diameter of the electron beam
which is important for good resolution; which is the ability to resolve two closely spaced
points which can be improved by reducing the size of the electron beam that strikes the
sample and also by decreasing the working distance. The condenser lens is used to form the
beam and limit the amount of current in the beam while also helping to eliminate the high-
angle electrons from the beam with the help of the condenser aperture which also prevent
electron spray since the electrons coming from the electron gun have different kinetic
energies and directions of movement, they may not be focused to the same plan to form a
sharp spot, by inserting the aperture, the stray electrons are blocked and the remaining
narrow beam will come to a narrow point of least confusion. The objective lens plays the
role of strictly concentrating the electron beam on the sample by changing the magnetic
field strength.
17
(iii) SCANNING COILS: This raster or sweep the beam across the sample surface by also
moving the beam too.
(iv) SAMPLE CHAMBER: This is where the sample is placed and can also manipulate and
move the sample.
(v) DETECTOR: This is used to detect the secondary and backscattered electrons. Detectors
can be the Backscattered electron detector (Solid- State detector), the secondary electron
detector and the energy dispersive spectroscopy which detects x-rays.
(vi) VACUUM CHAMBER: This holds the vacuum and is very essential because without it the
electron filament will be damaged via burning and oxidation and electrons and sample/s will
collide with other gas molecules.
3.2 MATERIAL ANALYSIS USING THE ENERGY DISPERSIVESPECTROSCOPE
The energy dispersive spectroscopy system determines atomic qualitative and quantitative
information from the specimen. The analysis is useful in identifying materials and contaminants, as
well as estimating their relative concentrations on the surface of the specimen. It relies on the
investigation of sample through interactions between electromagnetic radiation and matter analyzing x-
rays emitted by the matter in response to being hit with charge particles. Its characterization capabilities
are due in large part to the fundamental principle that each element has a unique atomic structure
allowing x-rays that is a characteristic of an element's atomic structure to be identified uniquely from
each other. Using X-rays to produce electron-hole pairs (total summed charge which is proportional to
incident x-ray energy), which are amplified and then “digitized” by voltage, displayed as a histogram
of the number of x-rays pulses (y axis) versus x-ray energy (x axis) [31].
3.2.1 OPERATING PRINCIPLES OF THE ENERGY DISPERSIVE SPECTROSCOPE
Due to interaction between high energy electrons and the sample that is being investigated in
the electron microscope, the atoms of this sample are caused to emit X-rays. Putting the energy
dispersive spectroscope into use confirms that atoms of different chemical elements irradiate X-rays of
different characteristic energy. The evaluation of the energy spectrum collected by energy dispersive Si
(Li) or SDD X-ray detector allows us to determine the qualitative and quantitative chemical
composition of the sample at the current beam position. This technique provides a very high spatial
resolution since the information is obtained from a very small sample volume in the order of only a few
microns. It is therefore also referred to as X-ray microanalysis. When used with scanning electron
18
microscopes, the EDS analyses element distributions along a line (line scan) or within an area of
interest (mapping). Another advantage of the energy dispersive spectroscopy is that all elements from
atomic number 5 (Boron) up to 92 (Uranium) contained in the sample can be detected and analyzed
simultaneously [32].
A Bruker detector which uses Peltier cooler, a solid state cooler is used that has no moving
parts and doesn’t encourage any form of vibration that could degrade the operation of the microscope
and is based on the Peltier effect that occurs whenever electrical current flows through two dissimilar
conductors that is dependent on the direction of current flow, the junction of the two conductors will
either absorb or release heat.
Simply, the cold side of the Peltier will just absorb the heat and the flow of electrons will then
transfer the heat to the hot side to be dissipated. All this is achieved with only electron flow from a DC
source [33].
Fig. 5 The Peltier Cooler [34]
The X Flash detector is an energy dispersive X-ray detector based on the silicon drift chamber
principle (SDD). A monolithically integrated on-chip FET (Flash Emulation Tool) acts a signal
amplifier and supports energy resolution. The X-flash Detectors cope with extremely high count rates
while also maintaining an energy resolution unrivaled by any other energy-dispersive detection system
[35].
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3.2.2 THE SDD WORKING PRINCIPLE
The detector crystal is moderately cooled by vibration free thermo-electric coolers; any
generated heat is dissipated by unforced convection without the need for external cooling means. A
super thin radiation entrance window separates the sensitive detector area from the ambient atmosphere
and guarantees a good transmission for the X-rays of interest [36]. An SDD is an actual semiconductor
device with a greatly reduced anode spot and drift rings (from which the technology gets its name) that
apply a drift field to guide the charge clouds from anywhere within the active area to the designated
anode spot. This eliminates the related anode capacitance while maintaining the original active area of
the detector [37]. With reduced noise levels, the resolution of the detector is better and the required
shaping time is small.
Bruker X-Flash SD detectors go one step further than other SDD devices by integrating the
FET monolithically into the detector chip. This eliminates noise introduced by an external FET with
wiring connection to the crystal. This gives unprecedented energy resolution enables fast signal
processing, resulting to a significant increase in throughput count rate at a given resolution. Optimum
resolution can be achieved with count rates exceeding 100,000 cps [38].
A side effect of the fast filtering is a strongly reduced sensitivity of SDDs to thermally
generated noise, relaxing the requirement on cooling. The moderate SDD operating temperatures
(around -20°C) can easily be achieved by thermoelectric coolers (Petier). This vibration free cooling
method excludes any need for cooling agents like liquid nitrogen or other external cooling means [39].
Fig.6 Elemental Energy dispersive X-Ray microanalyses, the peaks are labeled with the line of thecorresponding element [40]
20
Peak intensity gives information about the element composition to find the changes in
concentration of the elements; a quantitative information while Peak energy gives qualitative
information about the constituent elements.
3.3 MATERIAL ANALYSIS USING X-RAY PHOTOELECTRONSPECTROSCOPE
It was developed in Sweden by Kai Siegbahn and his research group in the mid-1960s. The
technique was initially called ESCA (Electron Spectroscopy for Chemical Analysis). Examination of
elemental and chemical state information of a wide range of inorganic and organic solid materials,
films, powders is possible using this technique. Sample is irradiated with mono-energetic x-rays
resulting in emission of photoelectrons from the sample surface. An electron energy analyzer
determines the binding energy of the photoelectrons. From the binding energy and intensity of a
photoelectron peak, the elemental identity, chemical state, and quantity of an element are determined
which is an important advantage of the technique since the number of photoelectron of an element is
dependent upon the atomic concentration of that element in the sample. Identification of the elements
in the sample can be determined directly from the kinetic energies of the ejected photoelectrons which
are measured by the electron energy analyzer and a photoelectric spectrum is then recorded [41].
3.3.1 WORKING PRINCIPLE OF XPS
It is based on the photoelectric effect. Each atom in the surface has core electron with its
characteristic binding energy. When an x-ray beam is irradiated on the sample surface, the photon is
absorbed by an atom in the sample, resulting in ionization and the emission of an inner shell electron
from the surface of the sample after the photon energy is adsorped by the electron only if the photon
energy is large enough to cause the emission otherwise photoelectrons from deep within the material
will be reabsorbed. While the x-rays may penetrate deep into the sample, there is a limit to the depth at
which the ejected electron can escape e.g. for energies around 1400eV, ejected electrons from depths
greater than 10nm have a low possibility of leaving the surface without undergoing an energy loss
occurrence, and therefore contribute to the background signal rather than well defined primary
photoelectric peaks [42]. The emitted electron with the kinetic energy Ek is the photoelectron.
The relationship governing the interaction of the photon with the core level is; KE = hν - BE –
Eφ where KE is the kinetic energy of the ejected photoelectron, hv is the X-ray photon characteristic
energy (for monochromatic Al Ka, h = 1486.6 eV since the photon is energy specified), BE is Binding
21
Energy of the atomic orbital from which the electron originates while eΦ is the spectrometer work
function also work function induced by the analyzer about 4-5 eV. XPS spectral lines are identified by
the shell from which the electron was ejected (1s, 2s, 2p, etc.). Binding energy (BE) denotes the
strength of interaction between electron (n, l,m, s) and nuclear charge [43]. In principle, the energies of
the photoelectric lines are defined in terms of the binding energy of the electronic states of atoms. Well
defined energy shifts to the peak energies as a result of the chemical environment of the atoms at the
surface. In the case of conducting samples, for which the detected electron energies can be referenced
to the Fermi energy of the spectrometer, an absolute energy scale can be established, thereby making
identification of species possible. However, for non-conducting samples the problem of energy
calibration is important due to the fact that electrons leaving the sample surface cause a potential
difference to exist between the sample and the spectrometer resulting in a retarding field acting on the
electrons escaping the surface because a positive charge zone will form on the surface of the sample
which brings about shift in the XPS peaks to higher binding energy [44]. To neutralize the surface
charge for data acquisition, we use the electron flood gun to re inject electrons to the sample surface
which then provide the right current to push the XPS to its original position.
Fig.7 Photoelectron by X-ray Photoelectronspectroscopic technique [45]
Fig. 8 Kinetic energy of ejected photoelectrons [46]
The core electron of an element has a distinct binding energy, something like a "fingerprint"
[47]. Thus almost all elements except for hydrogen and helium can be identified by the measurement of
the binding energy of its core electron which is also sensitive to the chemical set-up of the element. The
same atom is bonded to the different chemical species meaning variations in the binding energies of its
core electron resulting in shift of its corresponding XPS peaks ranging from 0.1 eV to 10 eV, an effect
called the chemical shift which can be applied to studying the chemical status of element in the surface.
22
Fig. 9 Schematic representation of the X-ray Photoelectron Spectroscopy [48]
Photoemission process can be summarized into three steps:
(i) Absorption and ionization, an initial effect stage.
(ii) Response of atom and creation of photoelectron, the final effect stage
(iii) Transport of electron to surface and escape (extrinsic losses) with both the first
and second having a significant effect on the binding energy.
XPS spectra show a distinct stepped background as intensity of background to high BE of
photoemission peak is always greater than low BE. Due to inelastic processes (extrinsic losses) from
deep in bulk, only electrons close to surface can, on average, escape without energy loss electrons
deeper in surface loose energy and emerge with reduced KE, increased BE Electrons very deep in
surface loose all energy and cannot escape. XPS is a quantitative technique in the sense that the number
of electrons recorded for a given transition is proportional to the number of atoms at the surface. The
chemical shifts reflect the influence of chemical bond with neighbouring atoms and it’s as a result of
varying binding energies of electrons. It is seen in XPS data as a valuable source of information about
the sample. “Tilting the sample with respect to the axis of the analyzer results in changing the sampling
depth for a given transition and therefore data collected at different angles vary due to the differing
composition with depth” [49].
3.3.2 COMPONENTS OF THE XPS
ELECTRON ENERGY ANALYZER: It is of two different types which are hemispherical and
cylindrical. It determines the binding energy of the photoelectrons.
X-ray source which is the x-ray monochromatic source e.g. twin anode (Mg/Al) source.
23
ELECTRON GUN: This is used to produce the low energy x-ray that is aimed at the target.
ARGON ION GUN: This allows the depth profiling of the surface of the sample which helps
to determine if contaminants are of the surface of the sample or inside the bulk.
VACUUM SYSTEM: Since XPS is a surface sensitive technique; there is tendency of
incorrect analysis of the surface composition if it encounters contaminants. The vacuum is helps in
removing contaminations and sample surface bombarded with argon ions.
ELECTRONIC CONTROLS.
3.3 BULK ANALYSIS USING X-RAY DIFFRACTION
X-ray diffraction is a tool for the investigation of the structure of matter. X -rays are scattered
by interaction with the electrons of the atoms in the material being investigated. Analysis of crystalline
structures and In-situ heating/cooling and phase change are done using the instrument. For
electromagnetic radiation to be diffracted the spacing in the grating should be of the same order as the
wavelength. In crystals the typical inter-atomic spacing ~ 2-3 Å so the suitable radiation is X-rays
therefore Hence, X-rays can be used for the study of crystal structures [50]. A number of concepts
should be understood about X-Rays and diffraction to get the most out of an X-Ray diffraction
machine. The main concepts include: X-ray, Crystals and diffraction.
(i) X-RAY: The typical wavelength of x-rays is 10-10m, whereas the wavelength of visible
light is typically 10-6m. X-rays are produced when any electrically charged particle of
sufficient kinetic energy is rapidly decelerated. Electrons are used as the particles in x-ray
tubes along with two metal electrodes. A high voltage (typically tens of thousands of volts)
is maintained across these electrodes, which draws electrons to the anode or target. X-rays
are produced at the point of impact and radiate in all directions [51]. A continuous spectrum
is produced when electrons hit the target, which is referred to as ‘bremsstrahlung’ or
German for ‘braking radiation’ as it is produced by stopping electrons. However, when the
applied voltage is raised above a critical value, characteristic of the target metal, sharp
intensity maxima appear in the spectrum [52]. These are the ‘characteristic lines’ and they
are produced by exciting an electron out of its shell (only K lines are used in x-ray
diffraction due to absorption).
The Kα lines are produced as an electron from one of the outer shells falling into the vacancy
created in the K shell, thereby emitting energy in the process as x-rays [53]. Many techniques,
including powder x-ray diffraction require the use of monochromatic radiation (single wavelength x-
24
rays). Hence the high intensity and monochromatic nature of characteristic lines make them ideal for
XRD analysis. For Cu radiation, the Kα x-ray is 90 times the intensity of the bremsstrahlung x-rays
[54].
(ii) CRYSTAL: There are 7 crystal systems: cubic, tetragonal, hexagonal (hexagonal and
trigonal), orthorhombic, monoclinic and triclinic. These are defined according to the axial
system used to describe their lattice.
(iii) DIFFRACTION: When a monochromatic X-ray comes into contact with a crystal lattice,
interference patterns are produced by each atom hit by the beam. Many of these patterns
will interfere with each other and cancel each other out. However, at the right distance and
angle these patterns can be in-phase with one another and cause constructive interference.
This is known as diffraction. This type of waveform interaction can be seen in all wave
systems. The image to the right shows a simulated wave pattern where the lattice is placed
on its side and two slits are present. The interfering wave propagation can be seen
amplifying three waves. A crystal lattice can be thought of as a source of multiple tiny slits,
where the X-ray beam is acting like the waveform in the image [55]. A beam of X-rays
directed at a crystal interacts with the electrons of the atoms in the crystal.
The electrons oscillate under the influence of the incoming x-rays and become secondary
sources of EM radiation. The secondary radiation is in all directions. The waves emitted by the
electrons have the same frequency as the incoming X-rays coherent. The emission will undergo
constructive or destructive interference with waves scattered from other atoms.
Fig. 10 Bragg spectrometer schematics [56]
In 1912 W. L. Bragg noticed there was a relationship between the wavelength of radiation, the
angle of the X-rays and the internal spacing in the crystal, which is expressed in the form: nλ = 2dsinθ
where n is an integer, λ is the wavelength of the x-rays (in our case 1.54Å for a copper tube
25
source), d is the spacing between planes in the atomic lattice of the sample, and θ is the diffraction
angle in degrees [57]. This is known as Bragg’s law. Although Bragg's law was used to explain the
interference pattern of X-rays scattered by crystals, diffraction has been developed to study the
structure of all states of matter with any beam, e.g., ions, electrons, neutrons, and protons, with a
wavelength similar to the distance between the atomic or molecular structures of interest. For
constructive interference: n = 2d Sin, The path difference between the 2 rays is = 2d Sin. There are
two important things to note about Bragg’s Law are the smaller the distance d, the larger the diffraction
angle θ. The bigger the wavelength λ, the larger the diffraction angle θ. i.e. sinθ = nλ/ 2d.
Fig. 11 Braggs Equation describing x-ray diffraction [58]
3.4.1 PARTS OF THE X-RAY DIFFRACTOMETER
THE SOURCE: The source produces the X-rays used for analyzing samples with X-
ray diffraction. Typically the source is an X-Ray tube. It consist of an evacuated ceramic or glass vessel
that contains a tungsten filament as cathode which emits electrons, and an anode onto which these
electrons are accelerated with a potential of several ten thousands of volts.
PRIMARY OPTICS: The primary optics controls the beam produced by the X-ray source, and
manipulates it into forms more useful for diffraction experiments.
SAMPLE HOLDER AND STAGE: Most diffractometers are supplied with several kinds of
sample holders for different types of specimens such as powders, bulk samples and thin films. The best
results are obtained with rotating sample holders which considerably improve the measurement
statistics, but they are not available for all machines. The most severe error during sample preparation
is to fill the sample holder too high or low.
SECONDARY OPTICS: The secondary optics retrieve the diffracted X-rays from the sample.
DETECTOR: The detector allows the diffracted X-rays to be detected. It consists of a
scintillator, a material that emits visible light on exposure to X-rays. This fluorescent radiation causes a
26
photocathode to emit photoelectrons which are amplified by a photoelectron multiplier. This is then
counted by electronic equipment to quantify the amplitude of the signals.
27
4. MATERIAL ANALYSIS METHODS
4.1 MATERIAL SYNTHESIS BY MAGNETRON SPUTTERING
It was implemented using the equipment PVD-75 with specifications below:
(i) 1500 L/s cryopump, base pressure < 8 x 10-8 mbar;
(ii) Three 400 W 3” magnetrons equipped with DC, pulsed-DC and RF power sources;
(iii) 2 MFC gas inlet channels;
(iv) 1-200 a.m.u. residual gas analysis (RGA);
(v) Heating up to 300 °C.
The task ranges from thin and thick film deposition to plasma treatment for surface
modification or activation.
Fig. 12 Magnetron Sputtering System at the Lithuania Energy institute
The two elements used for the thin film formation are Magnesium and Nickel. The used
substrate is Silicon. The magnetron sputtering method was used for the formation of vapor phase. The
formation of Mg-Ni alloys was realized by co-deposition of the elements arriving from two
independent magnetron sources while the control of the microstructure of films has been done by
changing the substrate temperature during deposition and the ratio of the flux of incident ions to the
flux of neutral atoms. Mg–Ni alloy thin films were prepared on Silicon substrates using direct-current
magnetron co-sputtering of Mg and Ni targets. The base pressure of the deposition chamber
28
was 5×10−5 Pa and the working pressure during deposition was kept at ∼1.0 Pa using a mass-flow
controller of Ar.
4.2 MATERIAL ANALYSIS BY SCANNING ELECTRON MICROSCOPE
Fig. 13 Scanning Electron Microscope: Model – S-3400N at the Lithuanian Energy Institute
Manufacturer – Hitachi. The main parameters are:
(i) SE resolution of 3nm at 30 kV, 10nm at 3kV, BSE resolution of 4 nm at 30 kV;
(ii) Low vacuum mode (6-270 Pa) allows to measure dielectrics without any pretreatment;
(iii) Sample diameter up to 200 mm, height - 80 mm;
(iv) 3D imaging and quantitative analysis;
(v) EDS elemental composition analysis.
4.2.1 PROCEDURE
SAMPLES: Mg-Ni thin films on Silicon substrate
PURPOSE: To produce a clear image of the samples and to determine the elements present in
them using the EDS attached to it.
EXPERIMENTAL: The provided sample was anchored on the sample hold and inserted in a
Hitachi S-3400N SEM (Scanning Electron Microscope). Attached to the SEM is the Energy Dispersive
Spectroscope (EDS). This technique can detect all elements heavier than and including boron (atomic
number 5). Detection limits are on the order of 0.5 to 1 % by weight if the peaks are isolated; however,
in practice the minimum detection limit will typically be 1-2 % by weight due to spectral overlaps,
29
which can make some elements present in minor concentrations e.g. Sulphur and Molybdenum
undetectable. Working voltage of 3 to 15 keV was used to analyze the residue. The analytical volume
is estimated to be approximately 1-micron deep and 1-micron across [18]. Different results for different
magnification ranging from better clarity to size of grain from finer to coarser with decreased and
increased magnification respectively from 100 keV to 10.0 keV with adjustment in Sigma X and Y axis
relative to focus. Three different Mg-Ni samples images from the scanning electron microscope was
viewed and analyzed as the first set of samples by the left are hydrogenated Mg-Ni samples without
Platinum while the ones at the right are hydrogenated with Platinum.
4.3 MATERIAL ANALYSIS BY ENERGY DISPERSIVE SPECTROSCOPE
The EDS data output of EDS system is just atomic ratios of the elements. For a specific thin
film on a substrate, the system gives only the elemental ratio of coating element and the substrate. The
interaction volume of the electrons increases with the energy of the electron so that, by increasing the
energy of the electrons, it is possible to increase the interaction volume resulting, deeper data
collection. Deeper data collection means that electrons can reach substrate and x-rays from the
substrate can be observed. For constant electron energy, for different thicknesses of thin films, EDS
gives different ratios. From this point of view, for different thicknesses of films, by using different
energies of electrons, EDS Atomic Ratio & Electron Energy graphs of thin films can be constructed.
Fig.14 Energy Dispersive Spectroscope Model: Quad Detector 5040
The manufacturer is Bruker AXS. Elemental mapping and compositional analysis is
determined with the aid of the EDS with key features like elemental composition analysis. EDS
30
analysis is useful in identifying materials and contaminants, as well as estimating their relative
concentrations on the surface of the specimen.
4.3.1 PROCEDURE
SAMPLE: Mg-Ni Samples on Silicon substrate
PURPOSE: Determination of the elemental composition of the samples using the Energy
Dispersive Spectroscope attached to the Scanning Electron Microscope.
EXPERIMENTAL: Attached to the SEM is the Energy Dispersive Spectroscope (EDS). This
technique can detect all elements heavier than and including boron (atomic number 5). Detection limits
are on the order of 0.5 to 1% by weight if the peaks are isolated; however, in practice the minimum
detection limit will typically be 1-2% by weight due to spectral overlaps, which can make some
elements present in minor concentrations e.g. Sulphur and Molybdenum undetectable. Working voltage
of 3 to 15KeV was used to analyze the residue. The analytical volume is estimated to be approximately
1-micron deep and 1-micron across [18]. Different results for different magnification ranging from
better clarity to size of grain from finer to coarser with decreased and increased magnification
respectively from 100k SE to 10.0kSE with adjustment in Sigma X and Y axis relative to focus. Three
different Mg-Ni samples images from the scanning electron microscope was viewed and analyzed as
the first set of samples by the left are hydrogenated Mg-Ni samples without Platinum while the ones at
the right are hydrogenated with Platinum.
4.4 MATERIAL ANALYSIS BY X-RAY PHOTOELECTRON SPECTROSCOPE
Identification of the elements in the sample can be determined directly from the kinetic
energies of the ejected photoelectrons which are measured by the electron energy analyzer and a
photoelectric spectrum is then recorded [35].
Key features:
(i) Monochromatic Al radiation;
(ii) Energy resolution on Ag - FWHM < 0.50 eV (Ag 3d5/2), on PET - FWHM < 0.85 (O=C*-
O);
(iii) Large and micro-area XPS, AR-XPS, UPS;
(iv) Dual beam charge neutralization;
(v) Chemical and secondary electron imaging with a raster scanned 10 µm diameter beams.
31
Fig. 15 XPS Model: PHI 5000 Versaprobe Manufactured by Physical Electronics, Inc. at the Lithuania Energyinstitute
4.4.1 PROCEDURE
SAMPLES: Three Mg-Ni thin films on Silicon Substrate with and without Platinum coating.
PURPOSE: Determination of the elemental composition and chemical state of the samples.
EXPERIMENTAL PROCEDURE: Since the technique is a surface sensitive one, we have to
avoid surface reactions and contaminations therefore the surface of the samples are bombarded with
Argon ions of 2KeV and introduced through a chamber that is in contact with the outside environment
where it is closed and pumped to low vacuum. After the first chamber is at low vacuum the sample will
be introduced into the second chamber in which a UHV environment exists. The ultra high vacuum
environment eliminates excessive surface contamination. The Electron Energy Analyzer which is also
located in a high vacuum chamber measures the kinetic energy of the emitted electrons while useful e-
signal is obtained only from a depth of around 10 to 100 Å on the surface. The spectrum plotted by the
computer is from the analyzer signal while computer system controls the x-ray type (AlK) and
prepares the instrument for analysis. The binding energies can be determined from the peak positions
and the elements present in the sample identified.
4.5 BULK ANALYSIS USING X-RAY DIFFRACTION
X-ray diffraction is a tool for the investigation of the structure of matter. X -rays are scattered
by interaction with the electrons of the atoms in the material being investigated. Analysis of crystalline
32
structures and In-situ heating/cooling and phase change are done using the instrument which has key
features like:
Configurations: Theta/Theta;
Smallest step size (theta/2theta): 0.0001°, reproducibility (Theta/2Theta): +-0.0001°;
Motorized divergence and anti-scatter slits, fixed slits, 60 mm Göbel mirror and 0.12° long
soller slit for parallel beam operation;
MRI heating/cooling chamber: temperature range: -190–1400 °C, pressure: 10-11– 2 bar;
3 detectors: Scintillator, Li-drifted Silicon, PSD.
Fig. 16 X-ray Diffractometer at the Lithuania Energy institute
4.5.1 PROCEDURE FOR X-RAY DIFFRACTION
This technique widely applied for the characterization of crystalline materials. XRD can be
used to look at single crystal or polycrystalline materials. A beam of x-rays is sent into the sample and
the way the beam is scattered by the atoms in the path of the x-ray is studied. The scattered x-rays
constructively interfere with each other. This interference can be looked at using Bragg’s Law to
determine various characteristics of the crystal or polycrystalline material. X-rays focused on a sample
fixed on the axis of the spectrometer are diffracted by the sample. The changes in the diffracted X-ray
intensities are measured, recorded and plotted against the rotation angles of the sample. The result is
referred to as the X-ray diffraction pattern of the sample. Computer analysis of the peak positions and
intensities associated with this pattern enables qualitative analysis, lattice constant determination and/or
33
stress determination of the sample. Qualitative analysis may be conducted on the basis of peak height
or peak area. The peak angles and profiles may be used to determine particle diameters and degree of
crystallization, and are useful in conducting precise X-ray structural analysis since every crystalline
substance gives a specific pattern constantly even when in a mixture of other substances giving the
chemical elemental composition. The phase identification of 3 MgNi thin films before and after
hydrogen absorption was carried out by X-ray diffraction (XRD) using an apparatus equipped with Cu-
Ka radiation source. Also we analyzed each relative to influence of Platinum in the aforementioned
process.
34
5. RESULTS
5.1 SCANNING ELECTRON MICROSCOPE ANALYSIS RESULTS
These are the images of each of the samples after hydrogenation with and without Platinum
with the same magnification and depth.
a) b)
Fig. 17 SEM images of the first sample with (a) after hydrogenation without platinum and (b) afterhydrogenation with platinum
a) b)
Fig 18 SEM images of the second sample with (a) after hydrogenation without platinum and (b) afterhydrogenation with platinum
35
a) b)
Fig. 19 SEM images of the third sample with (a) after hydrogenation without platinum and (b) afterhydrogenation with platinum
The pictures above here before introduction of Platinum shows a relatively fine-grained
orientation of the film before only to become coarser after hydrogenation with Platinum where there
seem to be more interaction with the surface bringing about possibility of Platinum diffusing from the
surface during the hydrogenation/dehydrogenation into the bulk of the film.
5.2 EDS RESULTS
The result here shows the differentiation of elements and their relative quantities in the sample
after the analysis with the energy dispersive spectroscope.
Table 1 showing the variations in quantities of different elements in the sample with and without platinum after
hydrogenation.
Elements Hydrogenation without Platinum Hydrogenation with PlatinumMagnesium (%) 80 11Nickel (%) 20 -Platinum (%) - 89
Table 2 showing the variations in quantities of different constituent elements in the sample with and without
platinum after hydrogenation.
Elements Hydrogenation without Platinum Hydrogenation with PlatinumMagnesium (%) 71 5Nickel (%) 29 -Platinum (%) - 95
36
Table 3 showing the variations in quantities of different constituent elements in the sample with and without
platinum after hydrogenation.
Elements Hydrogenation without Platinum Hydrogenation with PlatinumMagnesium (%) 71 4Nickel (%) 29 -Platinum (%) - 96
The tables above show similarities in that the weight of Magnesium and Nickel changed
significantly after coating with Platinum. As observed, there was much diffusion of platinum into the
bulk which led to the reduction in weight of the elements especially Nickel which was virtually unseen.
5.3 X-RAY PHOTOELECTRON SPECTROSCOPY ANALYSIS RESULTS
Fig. 20 XPS graph showing the concentration of the different elements against depth in the thin film afterPlatinum was cleaned off
XPS profile of carbon, oxygen, magnesium, nickel and silicon across the thickness (200 nm)
of Mg-Ni film are presented in this figure. Carbon and oxygen concentration was observed on the very
top surface and equals to 80 at.% and 20 at.%, respectively. At the depth of 15 nm concentrations of
magnesium and nickel increase and reach 55 at.% and 40 at.% respectively. Further, distribution of Mg
and Ni slightly varies across the film thickness and sharply decrease at 170 nm approximately. Worth
to mention that oxygen is distributed from 5 at.% to 10 at.% (red curve) across the Mg-Ni film.
Moreover, some amount of silicon diffuse into the Mg-Ni layer from the substrate. This might be the
reason for silicon oxides formation identified in the XRD graph.
37
Fig. 21 XPS graph showing the concentration of the different elements relative to the depth in the thin film
In the XPS graph above for Mg-Ni thin film with thickness of 300nm, concentration of carbon
and oxygen are observed at 65 at.% and 25 at.% respectively on the surface while at depth of 100nm,
concentration of Nickel and magnesium increase to 55 at.% and 40 at.% respectively while a sharp
decrease is observed at depth of 200 nm. Oxygen remains distributed across the thin film at
concentration not higher than10 at.% while significant amount of Silicon diffused into the layer of the
film which could result in the formation of its oxides.
Fig. 22 XPS graph showing the concentration of the different elements against depth in the thin film afterPlatinum was cleaned off
This XPS profile of Mg-Ni thin film of 1600nm shows carbon and oxygen concentration at 70
at.% and 25 at.% respectively on the very top surface while they are distributed across the film at a
38
very high depth. Magnesium concentration threshold is 65 at.% at depth of 500 nm alternated by steady
increase and decrease in its distribution across the film. The distribution of Nickel is across high depth
with relatively lower concentration of not more than 20 at.% at depth of 800 nm. There is total
distribution of both elements across the film meaning diffusion with silicon is inevitable.
Fig. 23 XPS graph showing the concentration of the different elements against depth in the thin film
In this XPS profile of an Mg-Ni thin film with depth 1100nm, carbon and oxygen
concentration on the top surface is 60 at.% and 30 at.% respectively as oxygen is distributed across the
film to depth of 900 nm. At depth of 100nm, magnesium and nickel concentrations increase to
approximately 75 at.% and 18 at.% respectively while their distribution varies across the thin film with
sharp decrease in their concentration observed at about 1000 nm. Some amounts of silicon diffused into
the layer from the substrate.
39
Fig. 24 XPS graph showing the concentration of the different elements against depth in the thin film afterplatinum was cleaned off
The XPS profile of the various elements here across an Mg-Ni film thickness of over 1200 nm
shows that carbon and oxygen concentration of 80 at.% and 18 at.% respectively at the surface while
oxygen is distributed across the film at no more than 10 at.%. There are variations in the distribution of
Magnesium and Nickel across the film starting from 60 at.% and about 40 at.% at depth of 100 nm and
a sharp decrease at 1100 nm depth. Silicon diffusion into the film layer is observed too which is the
reason for the formation of the Silicon oxides.
Fig. 25 XPS graph showing the concentration of the different elements against depth in the thin film
In the XPS profile above, oxygen and carbon are observed on the surface with 30 at.% and 60
at.% concentration respectively while their distribution was no more at 100 nm depth of the layer.
40
While distribution of Nickel gradually increased especially at depth of 900 nm with 55 at.%
concentration being the threshold where it decreased sharply. Magnesium increases until depth 200nm
at approximately 80 at.% then decreased steadily in its distribution while diffusion of Silicon into the
layer is observed.
5.4 XRD ANALYSIS RESULTS
Fig. 26 X-ray diffractogram of hydrogenated Mg-Ni thin film before and after being coated with platinum
In the above diagram, Platinum peaks are dominant after coating which acts as the catalyst
layer after with a noticeable peak of Mg2SiO4 observed before coating with platinum there are many
observed peaks of Magnesium compounds like MgH2, Mg2Ni and Mg2NiH4. High intensity peak of
Mg2SiO4 and SiO2 was observed before the addition of Platinum while it became very negligible after
introduction of Platinum and no SiO2 seen meaning problem of oxidation was curbed by the addition of
the catalyst though less peak of the Magnesium Nickel Hydrides were observed which is due to the
thickness of the Platinum layer on the film.
41
Fig. 27 X-ray diffractogram of hydrogenated Mg-Ni thin film before and after coated with platinum
Platinum peaks were observed after the platinum coating onto the sample. Small additional
peaks of Mg2SiO4 and Mg2NiH4 also were identified after platinum layer formation. Peaks of different
Magnesium compounds like MgH2, Mg2Ni, MgH2 and oxides like Mg2SiO4 and SiO2 were observed
before the coating with Platinum. Oxide peaks were not seen which the effect of the Platinum is but for
the hydrides is the effect of the higher thickness of the platinum layer.
Fig. 28 X-ray diffractogram of hydrogenated Mg-Ni thin film before and after coated with platinum
Here similar to the first sample, peaks of Magnesium compounds are observed being coated
with Platinum. Silicon peak with very high intensity and Platinum peaks with different crystallographic
orientation were observed after its introduction. We can identify different phases of Magnesium
42
compounds like MgH2, and Mg2Ni while Mg2SiO4 before Platinum was introduced. A small peak of
Mg2NiH4 is observed after hydrogenation with Platinum which is not the case before it was coated with
Platinum.
43
CONCLUSIONS
(i) The Mg-Ni thin films absorb hydrogen very easily, while in bulk samples, the
hydrogenation requires a temperature of about 500 K – 600 K. For thin films, it occurs at
room temperature with low pressure when capped with Platinum layer while Magnesium
alloy forming elements like Platinum and Nickel increase hydrogen absorption.
(ii) During experimental activities Mg-Ni thin films on silicon substrates were successfully
deposited using magnetron sputtering technique.
(iii) Every sample was divided into two parts: one of it covered with platinum as catalyst and
other left as deposited. According XRD measurements, parts with platinum showed better
hydrogenation kinetics.
(iv) XPS profiling measurements confirmed suspicions that part of platinum diffuses into Mg-Ni
film during high temperature and pressure hydrogenation.
(v) Silicon also diffused from the substrate into Mg-Ni film causing formation of Mg-silicates
which prevent further hydrogenation of Mg-Ni thin films during the diffusion of Platinum.
This makes silicon non-useful substrate for the further investigations.
44
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