a discontinuous galerkin solver for boltzmann poisson systems … · 2009. 5. 18. · to those of a...

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A discontinuous Galerkin solver for Boltzmann Poisson systems in nano devices 1 Yingda Cheng 2 , Irene M. Gamba 3 Department of Mathematics and ICES, University of Texas, Austin, TX 78712 Armando Majorana 4 Dipartimento di Matematica e Informatica, Universit` a di Catania, Catania, Italy and Chi-Wang Shu 5 Division of Applied Mathematics, Brown University, Providence, RI 02912 Abstract In this paper, we present results of a discontinuous Galerkin (DG) scheme applied to deterministic computations of the transients for the Boltzmann-Poisson system describing electron transport in semiconductor devices. The collisional term models optical-phonon interactions which become dominant under strong energetic conditions corresponding to nano-scale active regions under applied bias. The proposed numerical technique is a finite element method using discontinuous piecewise polynomials as basis functions on unstructured meshes. It is applied to simulate hot electron transport in bulk silicon, in a silicon n + -n-n + diode and in a double gated 12nm MOSFET. Additionally, the obtained results are compared 1 Support from the Institute of Computational Engineering and Sciences and the University of Texas Austin is gratefully acknowledged. 2 E-mail: [email protected]. 3 E-mail: [email protected]. Research supported by NSF-0807712 and NSF-FRG-0757450. 4 E-mail: [email protected]. Research supported by Italian PRIN 2006: Kinetic and continuum models for particle transport in gases and semiconductors: analytical and computational aspects. 5 E-mail: [email protected]. Research supported by NSF grant DMS-0809086 and DOE grant DE- FG02-08ER25863. 1

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Page 1: A discontinuous Galerkin solver for Boltzmann Poisson systems … · 2009. 5. 18. · to those of a high order WENO scheme simulation and DSMC (Discrete Simulation Monte Carlo) solvers

A discontinuous Galerkin solver for Boltzmann Poisson systems in nano

devices1

Yingda Cheng2, Irene M. Gamba3

Department of Mathematics and ICES, University of Texas, Austin, TX 78712

Armando Majorana4

Dipartimento di Matematica e Informatica, Universita di Catania, Catania, Italy

and

Chi-Wang Shu5

Division of Applied Mathematics, Brown University, Providence, RI 02912

Abstract

In this paper, we present results of a discontinuous Galerkin (DG) scheme applied to

deterministic computations of the transients for the Boltzmann-Poisson system describing

electron transport in semiconductor devices. The collisional term models optical-phonon

interactions which become dominant under strong energetic conditions corresponding to

nano-scale active regions under applied bias. The proposed numerical technique is a finite

element method using discontinuous piecewise polynomials as basis functions on unstructured

meshes. It is applied to simulate hot electron transport in bulk silicon, in a silicon n+-n-n+

diode and in a double gated 12nm MOSFET. Additionally, the obtained results are compared

1Support from the Institute of Computational Engineering and Sciences and the University of TexasAustin is gratefully acknowledged.

2E-mail: [email protected]: [email protected]. Research supported by NSF-0807712 and NSF-FRG-0757450.4E-mail: [email protected]. Research supported by Italian PRIN 2006: Kinetic and continuum

models for particle transport in gases and semiconductors: analytical and computational aspects.5E-mail: [email protected]. Research supported by NSF grant DMS-0809086 and DOE grant DE-

FG02-08ER25863.

1

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to those of a high order WENO scheme simulation and DSMC (Discrete Simulation Monte

Carlo) solvers.

Keywords: Deterministic numerical methods, Discontinuous Galerkin schemes, Boltz-

mann Poisson systems, Statistical hot electron transport, Semiconductor nano scale devices.

2

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1 Introduction

The evolution of the electron distribution function f(t,x,k) in semiconductors in dependence

of time t, position x and electron wave vector k is governed by the Boltzmann transport

equation (BTE) [24, 28, 21]

∂f

∂t+

1

~∇k ε · ∇xf − q

~E · ∇kf = Q(f) , (1.1)

where ~ is the reduced Planck constant, and q denotes the positive elementary charge. The

function ε(k) is the energy of the considered crystal conduction band measured from the

band minimum; according to the Kane dispersion relation, ε is the positive root of

ε(1 + αε) =~2k2

2m∗ , (1.2)

where α is the non-parabolicity factor and m∗ the effective electron mass. The electric field

E is related to the doping density ND and the electron density n, which equals the zero-order

moment of the electron distribution function f , by the Poisson equation

∇x [εr(x)∇xV ] =q

ε0

[n(t,x)−ND(x)] , E = −∇xV , (1.3)

where ε0 is the dielectric constant of the vacuum, εr(x) labels the relative dielectric function

depending on the material and V the electrostatic potential. The collision operator Q(f)

takes into account acoustic deformation potential and optical intervalley scattering [31, 29].

For low electron densities, it reads

Q(f)(t,x,k) =

R3[S(k′,k)f(t,x,k′)− S(k,k′)f(t,x,k)] dk′ (1.4)

with the scattering kernel

S(k,k′) = (nq + 1) K δ(ε(k′)− ε(k) + ~ωp)

+ nq K δ(ε(k′)− ε(k)− ~ωp) + K0 δ(ε(k′)− ε(k)) (1.5)

and K and K0 being constant for silicon. The symbol δ indicates the usual Dirac distribution

and ωp is the constant phonon frequency. Moreover,

nq =

[exp

(~ωp

kBTL

)− 1

]−1

3

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is the occupation number of phonons, kB is the Boltzmann constant and TL is the constant

lattice temperature.

Semiclassical description of electron flow in semiconductors is an equation in six dimen-

sions (plus time if the device is not in steady state) for a truly 3-D device, and four dimensions

for a 1-D device. This heavy computational cost explains why the BP system is traditionally

simulated by the Direct Simulation Monte Carlo (DSMC) methods [23]. In recent years, de-

terministic solvers to the BP system were proposed [20, 27, 3, 2, 4, 5, 6, 22]. These methods

provide accurate results which, in general, agree well with those obtained from Monte Carlo

(DSMC) simulations, often at a fractional computational time. Moreover, they can resolve

transient details for the pdf, which are difficult to compute with DSMC simulators. The

methods proposed in [4, 6] used weighted essentially non-oscillatory (WENO) finite differ-

ence schemes to solve the Boltzmann-Poisson system. The advantage of the WENO scheme

is that it is relatively simple to code and very stable even on coarse meshes for solutions

containing sharp gradient regions. A disadvantage of the WENO finite difference method is

that it requires smooth meshes to achieve high order accuracy, hence it is not very flexible

for adaptive meshes.

On the other hand, motivated by the easy hp-adaptivity and simple communication

pattern of the discontinuous Galerkin (DG) methods for macroscopic (fluid level) models

[7, 8, 25, 26], we proposed in [11, 10] to implement a DG solver to the full Boltzmann

equation, that is capable of capturing transients of the probability density function (pdf ).

The type of DG method that we will discuss here is a class of finite element methods

originally devised to solve hyperbolic conservation laws containing only first order spatial

derivatives, e.g. [16, 15, 14, 13, 17]. Using completely discontinuous polynomial space

for both the test and trial functions in the spatial variables and coupled with explicit and

nonlinearly stable high order Runge-Kutta time discretization, the method has the advantage

of flexibility for arbitrarily unstructured meshes, with a compact stencil, and with the ability

to easily accommodate arbitrary hp-adaptivity. For more details about DG scheme for

4

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convection dominated problems, we refer to the review paper [19]. The DG method was

later generalized to the local DG (LDG) method to solve the convection diffusion equation

[18] and elliptic equations [1]. It is L2 stable and locally conservative, which makes it

particularly suitable to treat the Poisson equation.

In our previous preliminary work [11, 10], we proposed the first DG solver for (1.1) and

showed some numerical calculations for one- and two-dimensional devices. In this paper, we

will carefully formulate the DG-LDG scheme for the Boltzmann-Poisson system and perform

extensive numerical studies to validate our calculation. In addition, using this new scheme,

we are able to implement a solver to full energy bands [9] that no other deterministic solver

has been able to implement so far. It would be more difficult or even unpractical to produce

the full band computation with other transport scheme.

This paper is organized as follows: in Section 2, we review the change of variables in

[27, 5]. In Section 3, we study the DG-BTE solver for 1D diodes. Section 4 is devoted to

the discussion of the 2D double gate MOSFET DG solver. Conclusions and final remarks

are presented in Section 5. Some technical implementations of the DG solver are collected

in the Appendix.

2 Change of variables

In this section, we review the change of variables proposed in [27, 4].

For the numerical treatment of the system (1.1), (1.3), it is convenient to introduce

suitable dimensionless quantities and variables. We assume TL = 300 K. Typical values for

length, time and voltage are `∗ = 10−6 m, t∗ = 10−12 s and V∗ = 1 Volt, respectively. Thus,

we define the dimensionless variables

(x, y) =x

`∗, t =

t

t∗, Ψ =

V

V∗, (Ex, Ey, 0) =

E

E∗

with E∗ = 0.1 V∗ `−1∗ and

Ex = −cv∂Ψ

∂x, Ey = −cv

∂Ψ

∂y, cv =

V∗`∗E∗

.

5

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In correspondence to [27] and [5], we perform a coordinate transformation for k according

to

k =

√2m∗kBTL

~√

w(1 + αKw)(µ,

√1− µ2 cos ϕ,

√1− µ2 sin ϕ

), (2.6)

where the new independent variables are the dimensionless energy w =ε

kBTL

, the cosine of

the polar angle µ and the azimuth angle ϕ with αK = kBTLα. The main advantage of the

generalized spherical coordinates (2.6) is the easy treatment of the Dirac distribution in the

kernel (1.5) of the collision term. In fact, this procedure enables us to transform the integral

operator (1.4) with the nonregular kernel S into an integral-difference operator, as shown in

the following.

We are interested in studying problems that are two-dimensional in real space and three-

dimensional in k-space. It would be useful to consider the new unknown function Φ related

to the electron distribution function via

Φ(t, x, y, w, µ, ϕ) = s(w)f(t,x,k) ,

where

s(w) =√

w(1 + αKw)(1 + 2αKw), (2.7)

is proportional to the Jacobian of the change of variables (2.6) and, apart from a dimensional

constant factor, to the density of states. This allows us to write the free streaming operator

of the dimensionless Boltzmann equation in a conservative form, which is appropriate for

applying standard numerical schemes used for hyperbolic partial differential equations. Due

to the symmetry of the problem and of the collision operator, we have

Φ(t, x, y, w, µ, 2π − ϕ) = Φ(t, x, y, w, µ, ϕ) . (2.8)

Straightforward but cumbersome calculations end in the following transport equation for Φ:

∂Φ

∂t+

∂x(g1Φ) +

∂y(g2Φ) +

∂w(g3Φ) +

∂µ(g4Φ) +

∂ϕ(g5Φ) = C(Φ) . (2.9)

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The functions gi (i = 1, 2, .., 5) in the advection terms depend on the independent variables

w, µ, ϕ as well as on time and position via the electric field. They are given by

g1(·) = cx

µ√

w(1 + αKw)

1 + 2αKw,

g2(·) = cx

√1− µ2

√w(1 + αKw) cos ϕ

1 + 2αKw,

g3(·) = − 2ck

√w(1 + αKw)

1 + 2αKw

[µEx(t, x, y) +

√1− µ2 cos ϕEy(t, x, y)

],

g4(·) = − ck

√1− µ2

√w(1 + αKw)

[√1− µ2 Ex(t, x, y)− µ cos ϕEy(t, x, y)

],

g5(·) = cksin ϕ√

w(1 + αKw)√

1− µ2Ey(t, x, y)

with

cx =t∗`∗

√2 kBTL

m∗ and ck =t∗qE∗√

2m∗kBTL

.

The right hand side of (2.9) is the integral-difference operator

C(Φ)(t, x, y, w, µ, ϕ) = s(w)

c0

∫ π

0

dϕ′∫ 1

−1

dµ′ Φ(t, x, y, w, µ′, ϕ′)

+

∫ π

0

dϕ′∫ 1

−1

dµ′ [c+Φ(t, x, y, w + γ, µ′, ϕ′) + c−Φ(t, x, y, w − γ, µ′, ϕ′)]

− 2π[c0s(w) + c+s(w − γ) + c−s(w + γ)]Φ(t, x, y, w, µ, ϕ) ,

where

(c0, c+, c−) =2m∗ t∗~3

√2 m∗ kBTL (K0, (nq + 1)K, nqK) , γ =

~ωp

kBTL

are dimensionless parameters. We remark that the δ distributions in the kernel S have been

eliminated which leads to the shifted arguments of Φ. The parameter γ represents the jump

constant corresponding to the quantum of energy ~ωp. We have also taken into account (2.8)

in the integration with respect to ϕ′. Since the energy variable ω is not negative, we must

consider null Φ and the function s, if the argument ω − γ is negative.

In terms of the new variables the electron density becomes

n(t∗t, `∗x, `∗y) =

R3f(t∗t, `∗x, `∗y,k) dk =

(√2 m∗kBTL

~

)3

ρ(t, x, y) ,

7

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where

ρ(t, x, y) =

∫ +∞

0

dw

∫ 1

−1

∫ π

0

dϕ Φ(t, x, y, w, µ, ϕ) . (2.10)

Hence, the dimensionless Poisson equation is

∂x

(εr

∂Ψ

∂x

)+

∂y

(εr

∂Ψ

∂y

)= cp [ρ(t, x, y)−ND(x, y)] (2.11)

with

ND(x, y) =

(√2 m∗kBTL

~

)−3

ND(`∗x, `∗y) and cp =

(√2 m∗kBTL

~

)3`2∗qε0

.

Choosing the same values of the physical parameters as in [27], we obtain

c0 ≈ 0.26531 cx ≈ 0.16857 cp ≈ 1830349.

c+ ≈ 0.50705 ck ≈ 0.32606 cv = 10.

c− ≈ 0.04432 γ ≈ 2.43723 αK ≈ 0.01292

εr = 11.7

Moreover, the dimensional x-component of the velocity is given by

∫ +∞

0

dw

∫ 1

−1

∫ π

0

dϕ g1(w, µ) Φ(t, x, y, w, µ, ϕ)

ρ(t, x, y),

the dimensional density by

1.0115× 1026 × ρ(t, x, y) ,

and the energy by

0.025849×

∫ +∞

0

dw

∫ 1

−1

∫ π

0

dϕ w Φ(t, x, y, w, µ, ϕ)

ρ(t, x, y).

In a simplified model, we consider our device in the x−direction by assuming that the

doping profile, the potential and thus the force field are only x−dependent. By cylindri-

cal symmetry, the resulting distribution function does not depend on ϕ. In this case, the

Boltzmann transport equation is reduced to

∂Φ

∂t+

∂x(g1Φ) +

∂w(g3Φ) +

∂µ(g4Φ) = C(Φ) . (2.12)

8

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with

g1(·) = cx

µ√

w(1 + αKw)

1 + 2αKw,

g3(·) = − 2ck

√w(1 + αKw)

1 + 2αKwµE(t, x) ,

g4(·) = − ck1− µ2

√w(1 + αKw)

E(t, x)

and

C(Φ)(t, x, w, µ) = s(w)

c0π

∫ 1

−1

dµ′ Φ(t, x, w, µ′)

∫ 1

−1

dµ′ [c+Φ(t, x, w + γ, µ′) + c−Φ(t, x, w − γ, µ′)]

− 2π[c0s(w) + c+s(w − γ) + c−s(w + γ)]Φ(t, x, w, µ) ,

In terms of the new variables the electron density becomes

n(t∗t, `∗x) =

R3f(t∗t, `∗x,k) dk =

(√2 m∗kBTL

~

)3

ρ(t, x) ,

where

ρ(t, x) = π

∫ +∞

0

dw

∫ 1

−1

dµ Φ(t, x, w, µ) . (2.13)

Hence, the dimensionless Poisson equation writes

∂x

(εr

∂Ψ

∂x

)= cp [ρ(t, x)−ND(x)] (2.14)

and

E = −cv∂Ψ

∂x.

3 DG-BTE solver for 1D diodes simulation

3.1 Algorithm description

We begin with formulating the DG-BTE solver for 1D diodes. These examples have been

thoroughly studied and tested by WENO in [4].

9

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The Boltzmann-Poisson system (2.12) and (2.14) will be solved on the domain

x ∈ [0, L], w ∈ [0, wmax], µ ∈ [−1, 1],

where L is the dimensionless length of the device and wmax is the maximum value of the

energy, which is adjusted in the numerical experiments such that

Φ(t, x, w, µ) ≈ 0 for w ≥ wmax and every t, x, µ.

In (2.12), g1 and g3 are completely smooth in the variable w and µ, assuming E is given

and smooth. However, g4 is singular for the energy w = 0, although it is compensated by

the s(w) factor in the definition of Φ.

The initial value of f is a locally Maxwellian distribution at the temperature TL,

Φ(0, x, w, µ) = s(w)ND(x)e−wM

with the numerical parameter M chosen so that the initial value for the density is equal to

the doping ND(x).

We choose to perform our calculations on the following rectangular grid,

Ωikm =[xi− 1

2, xi+ 1

2

[wk− 1

2, wk+ 1

2

[µm− 1

2, µm+ 1

2

](3.15)

where i = 1, . . . Nx, k = 1, . . . Nw, m = 1, . . . Nµ, and

xi± 12

= xi ± ∆xi

2, wk± 1

2= wk ± ∆wk

2, µm± 1

2= µm ± ∆µm

2.

It is useful that we pick Nµ to be even, so the function g1 will assume a constant sign in each

cell Ωikm.

The approximation space is thus defined as

V `h = v : v|Ωikm

∈ P `(Ωikm), (3.16)

where P `(Ωikm) is the set of all polynomials of degree at most ` on Ωikm. The DG formulation

10

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for the Boltzmann equation (2.12) would be: to find Φh ∈ V `h , such that

Ωikm

(Φh)t vh dΩ−∫

Ωikm

g1Φh (vh)x dΩ−∫

Ωikm

g3Φh (vh)w dΩ

−∫

Ωikm

g4Φh (vh)µ dΩ + F+x − F−

x + F+w − F−

w + F+µ − F−

µ (3.17)

=

Ωikm

C(Φh) vh dΩ.

for any test function vh ∈ V `h . In (3.17),

F+x =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g1 Φ v−h (xi+ 12, w, µ)dw dµ,

F−x =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g1 Φ v+h (xi− 1

2, w, µ)dw dµ,

F+w =

∫ xi+1

2

xi− 1

2

∫ µm+1

2

µm− 1

2

g3 Φ v−h (x,wk+ 12, µ)dx dµ,

F−w =

∫ xi+1

2

xi− 1

2

∫ µm+1

2

µm− 1

2

g3 Φ v+h (x,wk− 1

2, µ)dx dµ,

F+µ =

∫ xi+1

2

xi− 1

2

∫ wk+1

2

wk− 1

2

g4 Φ v−h (x,w, µm+ 12)dx dw,

F−µ =

∫ xi+1

2

xi− 1

2

∫ wk+1

2

wk− 1

2

g4 Φ v+h (x,w, µm− 1

2)dx dw,

where the upwind numerical fluxes Φ, Φ, Φ are chosen according to the following rules,

• The sign of g1 only depends on µ, if µm > 0, Φ = Φ−; otherwise, Φ = Φ+.

• The sign of g3 only depends on µE(t, x), if µmE(t, xi) < 0, Φ = Φ−; otherwise, Φ = Φ+.

• The sign of g4 only depends on E(t, x), if E(t, xi) < 0, Φ = Φ−; otherwise, Φ = Φ+.

At the source and drain contacts, we implement the same boundary condition as proposed

in [6] to realize neutral charges. In the (w, µ)-space, no boundary condition is necessary, since

• at w = 0, g3 = 0. At w = wmax, Φ is machine zero.

11

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• At µ = ±1, g4 = 0,

F+w , F−

w , F+µ , F−

µ are always zero. This saves us the effort of constructing ghost elements in

comparison with WENO.

The Poisson equation (2.14) is solved by the LDG method on a consistent grid of (3.15)

in the x−direction. It involves rewriting the equation into the following form,

q =∂Ψ

∂x∂

∂x(εrq) = R(t, x)

(3.18)

where R(t, x) = cp [ρ(t, x)−ND(x)] is a known function that can be computed at each time

step once Φ is solved from (3.17), and the coefficient εr here is a constant. The grid we use

is Ii =[xi− 1

2, xi+ 1

2

], with i = 1, . . . , Nx. The approximation space is

W `h = v : v|Ii

∈ P `(Ii),

with P `(Ii) denoting the set of all polynomials of degree at most ` on Ii. The LDG scheme

for (3.18) is given by: to find qh, Ψh ∈ V `h , such that

Ii

qhvhdx +

Ii

Ψh(vh)xdx− Ψhv−h (xi+ 1

2) + Ψhv

+h (xi− 1

2) = 0,

−∫

Ii

εrqh(ph)xdx + εrqhp−h (xi+ 1

2)− εrqhp

+h (xi− 1

2) =

Ii

R(t, x)phdx (3.19)

hold true for any vh, ph ∈ W `h. In the above formulation, the flux is chosen as follows,

Ψh = Ψ−h , εrqh = εrq

+h − [Ψh], where [Ψh] = Ψ+

h − Ψ−h . At x = L we need to flip the flux

to Ψh = Ψ+h , εrqh = εrq

−h − [Ψh] to adapt to the Dirichlet boundary conditions. Solving

(3.19), we can obtain the numerical approximation of the electric potential Ψh and electric

field Eh = −cvqh on each cell Ii.

We include some of the technical details of the implementations for a 2D device in the

Appendix. 1D diodes simulation carries similar steps and is simpler. We start with an initial

value for Φh described in Section A.5. The DG-LDG algorithm advances from tn to tn+1 in

the following steps:

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Step 1 Compute ρh(t, x) = π∫ +∞

0dw

∫ 1

−1dµ Φh(t, x, w, µ) as described in Section A.6.

Step 2 Use ρh(t, x) to solve from (3.19) the electric field, and compute gi, i = 1, 3, 4 on each

computational element.

Step 3 Solve (3.17) and get a method of line ODE for Φh, see Sections A.2, A.3 and A.4.

Step 4 Evolve this ODE by proper time stepping from tn to tn+1, if partial time step is

necessary, then repeat Step 1 to 3 as needed.

Finally, the hydrodynamic moments can be computed at any time step by the method in

Section A.6.

We want to remark that, unlike WENO, the DG formulation above has no restriction on

the mesh size. In fact, nonuniform meshes are more desirable in practice. For small semicon-

ductor devices with highly doped, non-smooth regions, strong relative electric fields give high

energy to charged particles, so it is expected to create states whose distribution functions

f have high densities in some regions but low densities in others. Only a nonuniform grid

can guarantee accurate results without using a large number of grid points. In particular

the evolving distribution function f(t, x, k) has, at some regions points in the physical do-

main corresponding to strong force fields, a shape that is very different from a Maxwellian

distribution (the expected equilibrium statistical state in the absence of electric field), see

for example Figure 3.11. Moreover, taking into account the rapid decay of f for large value

of |k|, a nonuniform grid is more computational efficient without sacrificing accuracy of the

calculation.

In the following simulations, we have implemented, without self-adaptivity, a nonuniform

mesh that refines locally near the regions where most of the interesting phenomena happen,

that is the junctions of the channel, addressing one of the main difficulties in solving the

Boltzmann-Poisson system with the presence of the doping, which creates strong gradients

of the solution near its jumps, and the polar angle direction µ = 1, corresponding to the

alignment with the force electric field.

13

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Consequently, for this first computational implementations of the DG solver, using the

ansatz that the doping profile function ND(x) in the Poisson equation does not depend on

time, we have the advantage to know where we need a fine grid in space to guarantee a

reasonable accuracy.

Even in the simplest test problem of the bulk case, the electric field is constant and

the solution is spatially homogeneous. If the initial condition is a Maxwellian distribution

function, then, for high constant electric field, one observes the overshoot velocity problem

which stabilizes in time. This fact implies that the final state distribution tails change with

respect to the initial one, and the distribution has also a shift proportional to the potential

energy Φ, therefore a simple choice a fixed mesh in (w, µ) works for a given constant electric

field that depends on a potential bias at contacts. In general, due to the stabilization

nature of the Boltzmann-Poisson system, the choice of a fixed non-uniform mesh works for

this preliminary implementation. However, the magnitude of the gradient variation of the

solutions depends on the applied bias, ultimately adaptivity will be the most efficient way

to calculate the solution, and so self adaptive DG schemes will be studied in our future

work. Nevertheless, we anticipate that a self adaptive scheme has the advantage of a smaller

number of cells, but the overhead for the adjustment of the solution to a new grid might be

CPU time consuming.

3.2 Discussions on benchmark test problems

We consider two benchmark test examples: Si n+ − n − n+ diodes of a total length of 1

and 0.25µm, with 400 and 50nm channels located in the middle of the device, respectively.

For the 400nm channel device, the dimensional doping is given by ND = 5 × 1017cm−3 in

the n+ region and ND = 2 × 1015cm−3 in the n− region. For the 50nm channel device, the

dimensional doping is given by ND = 5× 1018cm−3 in the n+ region and ND = 1× 1015cm−3

in the n− region. Both examples were computed by WENO in [5].

In our simulation, we use piecewise linear polynomials, i.e. ` = 1, and second-order

14

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Runge-Kutta time discretization. The doping ND is smoothed in the following way near

the channel junctions to obtain non-oscillatory solutions. Suppose ND = N+D in the n+

region, ND = N−D in the n− region and the length of the transition region is 2 cells, then the

smoothed function is (N+D − N−

D )(1 − y3)3 + N−D , where y = (x − x0 +4x)/(24x + 10−20)

is the coordinate transformation that makes the transition region (x0−4x, x0 +4x) varies

from 0 to 1 in y.

The nonuniform mesh we use for 400nm channels is defined as follows. In the x-direction, if

x < 0.2µm or x > 0.4µm, 4x = 0.01µm. In the region 0.2µm < x < 0.4µm, 4x = 0.005µm.

Thus, the total number of cells in x direction is 120. In the w-direction, we use 60 uniform

cells. In the µ-direction, we use 24 cells, 12 in the region µ < 0.7, 12 in µ > 0.7. Thus, the

grid consists of 120× 60× 24 cells, compared to the WENO grid of 180× 60× 24 uniform

cells. We should remark that there are more degrees of freedom per cell for DG than for

WENO, hence a more adequate comparison is the CPU cost to obtain the same level of

errors, see for example [30] in which such a comparison is made for some simple examples

indicating the advantage of DG in certain situations.

We plot the evolution of density, mean velocity, energy and momentum in Figure 3.1.

Due to the conservation of mass, which the DG scheme satisfies for our boundary condition,

one can see that when the momentum becomes constant, the solution is stable. The solution

has already stabilized at t = 5.0ps from the momentum plots. The macroscopic quantities at

steady state are plotted in Figure 3.2. The results are compared with the WENO calculation.

They agree with each other in general, with DG offering more resolution and a higher peak

in energy near the junctions. This is crucial to obtain a more agreeable kinetic energy with

experiments and DSMC simulations. Figures 3.3 and 3.4 show comparisons for the pdf at

transient and steady state. We plot at different positions of the device, namely, the left,

center and right of the channel. We notice a larger value of pdf especially at the center of

the channel, where the pdf is no longer Maxwellian. Moreover, at t = 0.5ps, x0 = 0.5µm,

the pdf shows a double hump structure, which is not captured by the WENO solver. All of

15

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these advantages come from the fact that we are refining more near µ = 1. To have a better

idea of the shape of the pdf, we plot Φ(t = 5.0ps, x = 0.5µm) in the cartesian coordinates in

Figure 3.9. The coordinate V 1 in the plot is the momentum parallel to the force field k1, V 2

is the modulus of the orthogonal component. The peak is captured very sharply compared

to WENO, see Figures 3 and 4 in [5].

x

00.2

0.40.6

0.81t

1

2

3

4

5

dens

ity

0

2E+17

4E+17

x0

0.20.4

0.60.8

1t

1

2

3

4

5

velo

city

0

1E+07

x0

0.20.4

0.60.8

1t

1

2

3

4

5

ener

gy

0.1

0.2

x

00.2

0.40.6

0.81

t

1

2

3

4

5

mom

entu

m-2E+23

0

2E+23

Figure 3.1: Time evolution of macroscopic quantities using DG method for 400nm channelat Vbias = 1.0V . Top left: density in cm−3 ; top right: mean velocity in cm/s; bottom left:energy in eV ; bottom right: momentum in cm−2 s−1.

16

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x

den

sity

0.2 0.4 0.6 0.8

2E+17

4E+17

x

velo

city

0.2 0.4 0.6 0.80

4E+06

8E+06

x

ener

gy

0.2 0.4 0.6 0.8

0.05

0.1

0.15

x

E

0.2 0.4 0.6 0.8-60

-40

-20

0

20

x

pot

entia

l

0.2 0.4 0.6 0.8

0

0.2

0.4

0.6

0.8

1

x

mom

entu

m

0.2 0.4 0.6 0.8

1E+23

Figure 3.2: Comparison of macroscopic quantities using DG (symbols) and WENO (solidline) for 400nm channel at t = 5.0ps, Vbias = 1.0V . Top left: density in cm−3; top right:mean velocity in cm/s; middle left: energy in eV ; middle right: electric field in kV/cm;bottom left: potential in V ; bottom right: momentum in cm−2 s−1. Solution has reachedsteady state.

17

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w0 10 20 30

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

w0 10 20 30

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

w0 10 20 30

µ

-1

0

1

Φ

0

4E-07

8E-07

w0 10 20 30

µ

-1

0

1

Φ

0

4E-07

8E-07

w0 10 20 30

µ

-1

0

1

Φ

0

0.0002

0.0004

w0 10 20 30

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

0.0004

0.0005

Figure 3.3: Comparison of the snapshot for Φ(x0, w, µ) using DG (left) and WENO (right)for 400nm channel at t = 0.5ps, Vbias = 1.0V . Top: x0 = 0.3µm; middle: x0 = 0.5µm;bottom: x0 = 0.7µm. Solution has not yet reached steady state.

18

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w0 10 20 30

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

w0 10 20 30

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

w0 10 20 30

µ

-1

0

1

Φ

0

2E-06

4E-06

6E-06

8E-06

w0 10 20 30

µ

-1

0

1

Φ

0

2E-06

4E-06

6E-06

8E-06

w0 10 20 30

µ

-1

0

1

Φ

0

5E-05

0.0001

0.00015

0.0002

0.00025

w0 10 20 30

µ

-1

0

1

Φ

0

5E-05

0.0001

0.00015

0.0002

0.00025

Figure 3.4: Comparison of the snapshot for Φ(x0, w, µ) using DG (left) and WENO (right)for 400nm channel at t = 5.0ps, Vbias = 1.0V . Top: x0 = 0.3µm; middle: x0 = 0.5µm;bottom: x0 = 0.7µm. Solution has reached steady state.

19

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The nonuniform mesh we use for 50nm channels is defined as follows. In the x-direction,

near the junctions, in 0.09µm < x < 0.11µm and 0.14µm < x < 0.16µm , 4x = 0.001µm;

in center of the channel 0.11µm < x < 0.14µm, 4x = 0.005µm; at everywhere else, 4x =

0.01µm. Thus, the total number of cells in x direction is 64. In the w-direction, we use 60

uniform cells. In the µ-direction, we use 20 cells, 10 in the region µ < 0.7, 10 in µ > 0.7. Thus,

the grid consists of 64× 60× 20 cells, compared to the WENO calculation of 150× 120× 16

uniform cells. The evolution and steady state plots are listed in Figures 3.5 to 3.8. The

conclusions are similar with 400nm, that we obtain better resolutions near the channel

junctions and the peak for pdf is much higher. Figure 3.10 plots Φ(t = 5.0ps, x = 0.125µm)

in the cartesian coordinates. The peak is twice the height of WENO and is very sharp.

Figure 3.11 plots the pdf near x = 0.15µm, the drain junction. We obtain distributions

far away from statistical equilibrium, that reflects the lack of suitability of the classical

hydrodynamical models for the drain region of a small gated device under even moderate

voltage bias.

3.3 Comparisons with DSMC simulations

We compare the results from DG-BTE solver with those obtained from DSMC simulations

(see Figures 3.12, 3.13). Both simulations show good agreement except for the kinetic energy

near the boundaries.

This mismatch is due to the modeling of the contact boundary conditions in DSMC

simulations, which require the knowledge of the distribution function f (or the corresponding

energy-band transform Φ) for entering particles. A classical way to solve this problem for

DSMC simulations is done by the inclusion of a transport kinetic equation for the dynamic

of the electron at the metal junctions. However, this is not realistic due to the complexity

of this new kinetic equation, where the importance of electron-electron interaction requires

a nonlinear collisional operator, similar to the classical one of the Boltzmann equation for a

rarefied perfect gas.

20

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Nevertheless, traditionally, boundary conditions associated with these DSMC models

for charge electron transport have been implemented by the following two simplistic rules

consisting on the assumption that the distribution function f , near the contact but outside

the computational domain is, either proportional to a Maxwellian equilibrium distribution

function for incoming velocities, or related to f evaluated near the contact and inside the

computational domain. (For strong electric fields near the boundaries, these choices are not

correct, as they may required a shift Maxwellian or a condition that generates momentum

in the direction of the field. )

The first option is well accepted when a high doping concentration near the boundaries

yields a very small electric field: so, the electron gas, in these zones, is almost in the thermal

equilibrium and has a constant velocity approximately. That is, we could use the ansatz that

the distribution function Φ, in the outer side of the boundary is taken to be proportional to a

energy-band spherically transformed Maxwellian equilibrium distribution function centered

at zero energy, whose average matches the doping profile function ND(x) at the boundary.

However this approach will create boundary layers of the mean free path order and so the

condition do not secure an absolute charge neutrality.

Hence, we rather use the second option which imposes that f = fout, near the contact

and outside the computational domain (k ·ηxb< 0) where xb is a boundary point and ηxb

the

outer normal, is related to f = fin evaluated near the contact and inside the computational

domain (k · ηxb> 0). This approach allow us to get an exact neutral charge at the source

and drain contact boundaries, which imposes that the probability and doping density must

coincide, as well as continuity in velocity space. Then the simple formula,

Φout(t, xb, w, µ) =ND(xb)

ρ(t, xb)Φin(t, xb, w, µ) (3.20)

is assumed in our simulations, where Φout is the band-energy spherically coordinated trans-

formed fout, in the corresponding transform domain.

This very same boundary type condition (3.20) at the gate and drain contacts has been

used in the deterministic simulations of Boltzmann Poison systems for semiconductor devices

21

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by WENO schemes (see [6]) and are use here for the DG schemes to approximate the same

boundary value problem. So the agreement of lower moments is very good, even though at

the computational level, (3.20) is approximated in different ways depending on the numerical

scheme.

For example, in the case of DSMC simulations, particles must be created or destroyed.

However in the case of finite difference WENO schemes, we introduced suitable ghost points

[4, 6]; and in the case of DG schemes it is enough to give values of Φ at boundaries according

to condition (3.20).

Hence, we can not have a unique exact boundary conditions in the computational experi-

ments, which makes it clear that these differences in the numerical boundary treatment have

an influence for the solutions at the stationary regime, which explains the discrepancies of

the numerical comparisons of moments near the boundaries. Nevertheless, we stress that, as

the figures 3.5 and 3.6 show in all cases, there is a very good agreement of the comparisons

inside the device.

3.4 Summary

We have benchmarked the DG algorithm on two test cases: Si n+ − n− n+ diodes with 400

and 50nm channels. The DG scheme has the ability to quickly stabilize to the steady state

and accurately resolve transient details. In particular, the pdf along the direction of the

electric field is captured sharply due to the nonuniform mesh we use. For the more energetic

device with 50nm channel, DG computes a much higher peak and a ”donut” shaped tail

in the pdf near the drain junction, thus resulting in an accurate description of higher order

moments in those regions.

22

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x0

0.050.1

0.150.2

0.25t

1

2

3

dens

ity

2E+18

4E+18

x0

0.050.1

0.150.2

0.25t

1

2

3

velo

city

1E+07

x0

0.050.1

0.150.2

0.25t

1

2

3

ener

gy

0

0.2

0.4

0.6

0.8

x

00.05

0.10.15

0.20.25

t

1

2

3m

omen

tum

6E+24

9E+24

1.2E+25

Figure 3.5: Time evolution of macroscopic quantities using DG method for 50nm channelat Vbias = 1.0V . Top left: density in cm−3; top right: mean velocity in cm/s; bottom left:energy in eV ; bottom right: momentum in cm−2 s−1.

23

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x

den

sity

0.05 0.1 0.15 0.2

2E+18

4E+18

x

velo

city

0.05 0.1 0.15 0.2

1E+07

x

ener

gy

0.05 0.1 0.15 0.2

0.1

0.2

0.3

0.4

x

E

0.05 0.1 0.15 0.2-400

-300

-200

-100

0

x

pot

entia

l

0.05 0.1 0.15 0.20

0.2

0.4

0.6

0.8

1

x

mom

entu

m

0.05 0.1 0.15 0.26E+24

8E+24

Figure 3.6: Comparison of macroscopic quantities using DG (symbols) and WENO (solidline) for 50nm channel at t = 3.0ps, Vbias = 1.0V . Top left: density in cm−3; top right:mean velocity in cm/s; middle left: energy in eV ; middle right: electric field in kV/cm;bottom left: potential in V ; bottom right: momentum in cm−2 s−1. Solution has reachedsteady state.

24

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w0 20 40 60

µ

-1

0

1

Φ

0

0.001

0.002

0.003

0.004

0.005

w0 20 40 60

µ

-1

0

1

Φ

0

0.001

0.002

0.003

0.004

0.005

w0 20 40 60

µ

-1

0

1

Φ

0

0.0005

0.001

w0 20 40 60

µ

-1

0

1

Φ

0

0.0005

0.001

w0 20 40 60

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

0.0004

0.0005

w0 20 40 60

µ

-1

0

1

Φ

0

0.0001

0.0002

0.0003

0.0004

0.0005

Figure 3.7: Comparison of the snapshot for Φ(x0, w, µ) using DG (left) and WENO (right)for 50nm channel at t = 0.5ps, Vbias = 1.0V . Top: x0 = 0.1µm ; middle: x0 = 0.125µm;bottom: x0 = 0.15µm. Solution has not yet reached steady state.

25

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w0 20 40 60

µ

-1

0

1

Φ

0

0.001

0.002

0.003

0.004

0.005

w0 20 40 60

µ

-1

0

1

Φ

0

0.001

0.002

0.003

0.004

0.005

w0 20 40 60

µ

-1

0

1

Φ

0

0.0005

0.001

0.0015

w0 20 40 60

µ

-1

0

1

Φ

0

0.0005

0.001

0.0015

w0 20 40 60

µ

-1

0

1

Φ

0

0.0002

0.0004

0.0006

w0 20 40 60

µ

-1

0

1

Φ

0

0.0002

0.0004

0.0006

Figure 3.8: Comparison of the snapshot for Φ(x0, w, µ) using DG (left) and WENO (right)solution for 50nm channel at t = 3.0ps, Vbias = 1.0. Top: x0 = 0.1µm; middle: x0 =0.125µm; bottom: x0 = 0.15µm. Solution has reached steady state.

26

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V1

-5

0

5

V2-5

0

5

pdf

0

2E-06

4E-06

6E-06

8E-06

1E-05

Figure 3.9: PDF for 400nm channel at t = 5.0ps, x = 0.5µm. Center of the channel.

V1

-10

-5

0

5

10

V2

-10-5

05

10

pdf

0

0.0002

0.0004

Figure 3.10: PDF for 50nm channel at t = 3.0ps, x = 0.125µm. Center of the channel.

27

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V1

-10-5

05

10

V2

-10-5

05

10

pdf

0

2E-05

4E-05

6E-05

8E-05

0.0001

V1

-10-5

05

10

V2

-10-5

05

10

pdf

0

4E-05

8E-05

0.00012

V1

-10-5

05

10

V2

-10-5

05

10

pdf

0

0.0002

0.0004

V1

-10-5

05

10

V2

-10-5

05

10pd

f0

0.003

0.006

0.009

Figure 3.11: Non equilibrium PDF states near the drain junction for 50nm channel att = 3.0ps. They exhibit the large deviation from classical statistical states even at placescorresponding to highly doped region. This is a signature of hot electron transport. Topleft: x = 0.149µm. Top right: x = 0.15µm. Bottom left: x = 0.152µm. Bottom right:x = 0.16µm.

28

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x

den

sity

0.2 0.4 0.6 0.80

2E+17

4E+17

x

velo

city

0 0.2 0.4 0.6 0.8 10

4E+06

8E+06

x

ener

gy

0 0.2 0.4 0.6 0.8 1

0.05

0.1

0.15

x

E

0 0.2 0.4 0.6 0.8 1

-40

-20

0

20

x

pote

ntia

l

0 0.2 0.4 0.6 0.8 1

0

0.4

0.8

x

mo

men

tum

0.2 0.4 0.6 0.8 1

1E+23

Figure 3.12: Comparison of macroscopic quantities using DG (dashed line) and DSMC (solidline) for 400nm channel at t = 5.0ps, Vbias = 1.0V . Top left: density in cm−3; top right:mean velocity in cm/s; middle left: energy in eV ; middle right: electric field in kV/cm;bottom left: potential in V ; bottom right: momentum in cm−2 s−1. Solution has reachedsteady state.

29

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x

den

sity

0 0.05 0.1 0.15 0.2 0.25

1E+18

2E+18

3E+18

4E+18

5E+18

x

velo

city

0 0.05 0.1 0.15 0.2 0.25

6E+06

1.2E+07

1.8E+07

x

ener

gy

0 0.05 0.1 0.15 0.2 0.25

0.1

0.2

0.3

0.4

x

E

0 0.05 0.1 0.15 0.2 0.25-400

-300

-200

-100

0

100

x

pot

entia

l

0 0.05 0.1 0.15 0.2 0.25

0

0.2

0.4

0.6

0.8

1

x

mom

entu

m

0 0.05 0.1 0.15 0.2 0.25

6E+24

7.5E+24

9E+24

Figure 3.13: Comparison of macroscopic quantities using DG (dashed line) and DSMC (solidline) for 50nm channel at t = 3.0ps, Vbias = 1.0V . Top left: density in cm−3; top right:mean velocity in cm/s; middle left: energy in eV ; middle right: electric field in kV/cm;bottom left: potential in V ; bottom right: momentum in cm−2 s−1. Solution has reachedsteady state.

30

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4 DG-BTE solver for 2D double gate MOSFET simu-

lation

In this section, we turn to a 2D double gate MOSFET device. The algorithm is similar to

those described in the previous section. For the benefit of the reader, we repeat some of the

procedures in Section 3. We will use a simple rectangular grid and let

Ωijkmn =[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

[wk− 1

2, wk+ 1

2

[µm− 1

2, µm+ 1

2

[ϕn− 1

2, ϕn+ 1

2

]

where i = 1, . . . Nx, j = 1, . . . Ny, k = 1, . . . Nw, m = 1, . . . Nµ, n = 1, . . . Nϕ, and

xi± 12

= xi ± ∆xi

2, yj± 1

2= yj ± ∆yj

2, wk± 1

2= wk ± ∆wk

2

µm± 12

= µm ± ∆µm

2, ϕn± 1

2= ϕn ± ∆ϕn

2.

The approximation space is defined as

V `h = v : v|Ωijkmn

∈ P `(Ωijkmn). (4.21)

Here, P `(Ωijkmn) is the set of all polynomials of degree at most ` on Ωijkmn. The DG

formulation for the Boltzmann equation (2.9) would be: to find Φh ∈ V `h , such that

Ωijkmn

(Φh)t vh dΩ−∫

Ωijkmn

g1Φh (vh)x dΩ−∫

Ωijkmn

g2Φh (vh)y dΩ

−∫

Ωijkmn

g3Φh (vh)w dΩ−∫

Ωijkmn

g4Φh (vh)µ dΩ−∫

Ωijkmn

g5Φh (vh)ϕ dΩ (4.22)

+ F+x − F−

x + F+y − F−

y + F+w − F−

w + F+µ − F−

µ + F+ϕ − F−

ϕ =

Ωijkmn

C(Φh) vh dΩ.

for any test function vh ∈ V `h . In (4.22),

F±x =

∫ yj+1

2

yj− 1

2

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g1 Φ v∓h (xi± 12, y, w, µ, ϕ)dy dw dµ dϕ,

F±y =

∫ xi+1

2

xi− 1

2

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g2 Φ v∓h (x, yj± 12, w, µ, ϕ)dx dw dµ dϕ,

31

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F±w =

∫ xi+1

2

xi− 1

2

∫ yj+1

2

yj− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g3 Φ v∓h (x, y, wk± 12, µ, ϕ)dx dy dµ dϕ,

F±µ =

∫ xi+1

2

xi− 1

2

∫ yj+1

2

yj− 1

2

∫ wk+1

2

wk− 1

2

∫ ϕn+1

2

ϕn− 1

2

g4 Φ v∓h (x, y, w, µm± 12, ϕ)dx dy dw dϕ,

F±ϕ =

∫ xi+1

2

xi− 1

2

∫ yj+1

2

yj− 1

2

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g5 Φ v∓h (x, y, w, µ, ϕn± 12)dx dy dw dµ,

where the upwind numerical fluxes Φ, Φ, g3 Φ, g4 Φ, Φ are defined in the following way,

• The sign of g1 only depends on µ, if µm > 0, then Φ = Φ−; otherwise, Φ = Φ+.

• The sign of g2 only depends on cos ϕ, if cos ϕn > 0, then Φ = Φ−; otherwise, Φ = Φ+.

Note that in our simulation, Nϕ is always even.

• For g3 Φ, we let

g3 Φ = −2ck

√w(1 + αKw)

1 + 2αKw

[µEx(t, x, y)Φ +

√1− µ2 cos ϕEy(t, x, y)Φ

],

If µmEx(t, xi, yj) < 0, then Φ = Φ−; otherwise, Φ = Φ+.

If (cos ϕn)Ey(t, xi, yj) < 0, then Φ = Φ−; otherwise, Φ = Φ+.

• For g4 Φ, we let

g4 Φ = −ck

√1− µ2

√w(1 + αKw)

[√1− µ2 Ex(t, x, y)Φ− µ cos ϕEy(t, x, y)Φ

],

If Ex(t, xi, yj) < 0, then Φ = Φ−; otherwise, Φ = Φ+.

If µm cos(ϕn)Ey(t, xi, yj) > 0, then Φ = Φ−; otherwise, Φ = Φ+.

• The sign of g5 only depends on Ey(t, x, y), if Ey(t, xi, yj) > 0, then Φ = Φ−; otherwise,

Φ = Φ+.

32

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The schematic plot of the double gate MOSFET device is given in Figure 4.14. The

shadowed region denotes the oxide-silicon region, whereas the rest is the silicon region.

Since the problem is symmetric about the x-axis, we will only need to compute for y > 0.

At the source and drain contacts, we implement the same boundary condition as proposed

in [6] to realize neutral charges. A buffer layer of ghost points of i = 0 and i = Nx + 1 is

used to make

Φ(i = 0) = Φ(i = 1)ND(i = 1)

ρ(i = 1),

and

Φ(i = Nx + 1) = Φ(i = Nx)ND(i = Nx)

ρ(i = Nx).

At the top and bottom of the computational domain (the silicon region), we impose the

classical elastic specular boundary reflection.

In the (w, µ, ϕ)-space, no boundary condition is necessary because of similar reason as in

the 1D case,

• at w = 0, g3 = 0. At w = wmax, Φ is machine zero;

• at µ = ±1, g4 = 0;

• at ϕ = 0, π, g5 = 0,

so at those boundaries, the numerical flux always vanishes, hence no ghost point is necessary.

For the boundary condition of the Poisson equation, Ψ = 0.52354 at source, Ψ = 1.5235

at drain and Ψ = 1.06 at gate. For the rest of boundaries, we impose homogeneous Neumann

boundary condition, i.e., ∂Ψ∂n

= 0. The relative dielectric constant in the oxide-silicon region

is εr = 3.9, in the silicon region is εr = 11.7.

The Poisson equation (2.11) is solved by the LDG method. It involves rewriting the

equation into the following form,

q =∂Ψ

∂x, s =

∂Ψ

∂y∂

∂x(εrq) +

∂y(εrs) = R(t, x, y)

(4.23)

33

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150nm

12nm

1nm

xdrai

nsource

top gate

bottom gate

y 50nm 50nm

Figure 4.14: Schematic representation of a 2D double gate MOSFET device

where R(t, x, y) = cp [ρ(t, x, y)−ND(x, y)] is a known function that can be computed at each

time step once Φ is solved from (4.22), and the coefficient εr depends on x, y. The Poisson

system is only on the (x, y) domain. Hence, we use the grid Iij =[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

],

with i = 1, . . . , Nx, j = 1, . . . , Ny + My, where j = Ny + 1, . . . , Ny + My denotes the oxide-

silicon region, and the grid in j = 1, . . . , Ny is consistent with the five-dimensional rectangular

grid for the Boltzmann equation in the silicon region. The approximation space is defined

as

W `h = v : v|Iij

∈ P `(Iij). (4.24)

Here P `(Iij) denotes the set of all polynomials of degree at most ` on Iij. The LDG scheme

34

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for (4.23) is: to find qh, sh, Ψh ∈ V `h , such that

Ii,j

qhvhdxdy +

Ii,j

Ψh(vh)xdxdy −∫ y

j+12

yj− 1

2

Ψhv−h (xi+ 1

2, y)dy +

∫ yj+1

2

yj− 1

2

Ψhv+h (xi− 1

2, y)dy = 0,

Ii,j

shwhdxdy +

Ii,j

Ψh(wh)ydxdy −∫ x

i+12

xi− 1

2

Ψhw−h (x, yj+ 1

2)dx +

∫ xi+1

2

xi− 1

2

Ψhw+h (x, yj− 1

2)dx = 0,

−∫

Ii,j

εrqh(ph)xdxdy +

∫ yj+1

2

yj− 1

2

εrqhp−h (xi+ 1

2, y)dy −

∫ yj+1

2

yj− 1

2

εrqhp+h (xi− 1

2, y)dy

−∫

Ii,j

εrsh(ph)ydxdy +

∫ xi+1

2

xi− 1

2

εrshp−h (x, yj+ 1

2)dx−

∫ xi+1

2

xi− 1

2

εrshp+h (x, yj− 1

2)dx

=

Ii,j

R(t, x, y)phdxdy (4.25)

hold true for any vh, wh, ph ∈ W `h. In the above formulation, we choose the flux as follows,

in the x-direction, we use Ψh = Ψ−h , εrqh = εrq

+h − [Ψh]. In the y-direction, we use Ψh = Ψ−

h ,

εrsh = εrs+h − [Ψh]. On some part of the domain boundary, the above flux needs to be

changed to accommodate various boundary conditions [12]. Near the drain, we are given

Dirichlet boundary condition, so we need to flip the flux in x−direction: let Ψh(xi+ 12, y) =

Ψ+h (xi+ 1

2, y) and εrqh(xi+ 1

2, y) = εrq

−h (xi+ 1

2, y)− [Ψh](xi+ 1

2, y), if the point (xi+ 1

2, y) is at the

drain. For the gate, we need to flip the flux in y−direction: let Ψh(x, yj+ 12) = Ψ+

h (x, yj+ 12)

and εrsh(x, yj+ 12) = εrs

−h (x, yj+ 1

2) − [Ψh](x, yj+ 1

2), if the point (x, yj+ 1

2) is at the gate. For

the bottom, we need to use the Neumann condition, and flip the flux in y-direction, i.e.,

Ψh = Ψ+h , εrsh = εrs

−h . This scheme described above will enforce the continuity of Ψ and

εr∂Ψ∂n

across the interface of silicon and oxide-silicon interface. The solution of (4.25) gives us

approximations to both the potential Ψh and the electric field (Ex)h = −cvqh, (Ey)h = −cvsh.

To summarize, start with an initial condition for Φh (Section A.5), the DG-LDG algo-

rithm for the 2D double gate MOSFET advances from tn to tn+1 in the following steps similar

to the 1D diodes simulation:

Step 1 Compute ρh(t, x, y) =∫ +∞

0dw

∫ 1

−1dµ

∫ π

0dϕ Φh(t, x, y, w, µ, ϕ) as described in Section

A.6.

Step 2 Use ρh(t, x, y) to solve from (4.25) the electric field (Ex)h and (Ey)h, and compute

35

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gi, i = 1, . . . , 5.

Step 3 Solve (4.22) and get a method of line ODE for Φh, see Sections A.2, A.3 and A.4.

Step 4 Evolve this ODE by proper time stepping from tn to tn+1, if partial time step is

necessary, then repeat Step 1 to 3 as needed.

Finally, the hydrodynamic moments can be computed at any time step by the method in

Section A.6.

All numerical results are obtained with a piecewise linear approximation space and first

order Euler time stepping. The dissipative nature of the the collision term makes the Euler

forward time stepping stable. We use a 24 × 14 grid in space, 120 points in w, 8 points

in µ and 6 points in ϕ. In Figures 4.15 and 4.16, we show the results of the macroscopic

quantities. We also show the pdf at six different locations in the device in Figure 4.17. These

pdf ’s have been computed by averaging the values of Φh over ϕ. In Figure 4.18, we present

the cartesian plot for pdf at (x, y) = (0.125µm, 0.012µm), where a very non-equilibrium pdf

is observed.

36

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0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012

0 2e+24 4e+24 6e+24 8e+24 1e+25

1.2e+25

xy 0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012

0.1 0.15 0.2

0.25 0.3

0.35 0.4

xy

0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012

0 2e+06 4e+06 6e+06 8e+06 1e+07

1.2e+07 1.4e+07 1.6e+07 1.8e+07

xy 0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012

-1e+06

-500000

0

500000

1e+06

1.5e+06

xy

Figure 4.15: Macroscopic quantities of double gate MOSFET device at t = 0.5ps. Top left:density in cm−3; top right: energy in eV ; bottom left: x-component of velocity in cm/s;bottom right: y-component of velocity in cm/s. Solution reached steady state.

37

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0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012-150

-100

-50

0

xy 0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012-800

-600

-400

-200

0

xy

0.00 0.03 0.06 0.09 0.12 0.15

0.0030.006

0.0090.012

0 0.2 0.4 0.6 0.8

1 1.2 1.4 1.6

xy

Figure 4.16: Macroscopic quantities of double gate MOSFET device at t = 0.5ps. Top left:x-component of electric field in kV/cm; top right: y-component of electric field in kV/cm;bottom: electric potential in V . Solution has reached steady state.

38

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w

0

20

40

60

µ-0.5

0

0.5

0

0.0002

0.0004

0.0006

0.0008

0.001

0.0012

0.0014

0.0016

w

0

20

40

60

µ-0.5

0

0.5

0

0.0005

0.001

0.0015

0.002

w

0

20

40

60

µ-0.5

0

0.5

0

0.0002

0.0004

0.0006

0.0008

0.001

w

0

20

40

60

µ-0.5

0

0.5

0

0.0005

0.001

0.0015

0.002

w

0

20

40

60

µ-0.5

0

0.5

0

0.0005

0.001

0.0015

w

0

20

40

60

µ-0.5

0

0.5

0

0.0002

0.0004

0.0006

0.0008

0.001

Figure 4.17: PDF of double gate MOSFET device at t = 0.5ps. Top left: at(0.025µm, 0.012µm); top right: at (0.075µm, 0.012µm); middle left: at (0.125µm, 0.012µm); middle right: at (0.1375µm, 0.006µm); bottom left: at (0.09375µm, 0.010µm) ; bottomright: at (0.09375µm, 0µm.) . Solution reached steady state.

39

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V1

-10

-5

0

5

10

V2

-10

-5

0

5

10

pdf

0

0.0001

0.0002

0.0003

Figure 4.18: PDF for 2D double gate MOSFET at t = 0.5ps, (x, y) = (0.9375µm, 0.10µm).

40

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5 Conclusions and final remarks

We have developed a DG scheme for BTEs of type (1.1), which takes into account optical-

phonon interactions that become dominant under strong energetic conditions. We used the

coordinate transformation proposed in [27, 4] and changed the collision into an integral-

difference operator by using energy band as one of the variables. The Poisson equation is

treated by LDG on a mesh that is consistent with the mesh of the DG-BTE scheme. The

results are compared to those obtained from a high order WENO scheme simulation. By a

local refinement in mesh, we were able to capture the subtle kinetic effects including very

non-equilibrium distributions without a great increase of memory allocation and CPU time.

The advantage of the DG scheme lies in its potential for implementation on unstructured

meshes and for full hp-adaptivity. The simple communication pattern of the DG method

also makes it a good candidate for the domain decomposition method for the coupled kinetic

and macroscopic models.

References

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Galerkin methods for elliptic problems, SIAM Journal on Numerical Analysis, 39 (2002),

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[2] M.J. Caceres, J.A. Carrillo, I.M. Gamba, A. Majorana and C.-W. Shu, Deterministic

kinetic solvers for charged particle transport in semiconductor devices, in Transport Phe-

nomena and Kinetic Theory Applications to Gases, Semiconductors, Photons, and Bio-

logical Systems. C. Cercignani and E. Gabetta (Eds.), Birkhauser (2006), pp. 151-171.

[3] J.A. Carrillo, I.M. Gamba, A. Majorana and C.-W. Shu, A WENO-solver for 1D non-

stationary Boltzmann-Poisson system for semiconductor devices, Journal of Computa-

tional Electronics, 1 (2002), pp. 365-375.

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A Appendix

In this appendix, we collect some technical details for the implementation of the 2D DG-BTE

solver. The discussion for 1D solver is similar and omitted here.

A.1 The basis of the finite dimensional function space.

In every cell Ωijkmn, we use piecewise linear polynomials and assume

Φh(t, x, y, w, µ, ϕ) = Tijkmn(t) + Xijkmn(t)2(x− xi)

∆xi

+ Yijkmn(t)2(y − yj)

∆yj

+ Wijkmn(t)2(w − wk)

∆wk

+ Mijkmn(t)2(µ− µm)

∆µm

+ Pijkmn(t)2(ϕ− ϕn)

∆ϕn

. (A.1)

It will be useful to note that

Φh(t, x, y, w, µ, ϕ) =Nw∑

k=1

[Tijkmn(t) + Xijkmn(t)

2(x− xi)

∆xi

+ Yijkmn(t)2(y − yj)

∆yj

+ Wijkmn(t)2(w − wk)

∆wk

+ Mijkmn(t)2(µ− µm)

∆µm

+ Pijkmn(t)2(ϕ− ϕn)

∆ϕn

]χk(w) ,

for every (x, y, w, µ, ϕ) ∈Nw⋃

k=1

Ωijkmn. Here, χk(w) is the characteristic function in the interval

[wk− 1

2, wk+ 1

2

].

A.2 Treatment of the collision operator

The gain term of the collisional operator is

G(Φh)(t, x, y, w) = s(w)

c0

∫ π

0

dϕ′∫ 1

−1

dµ′ Φh(t, x, y, w, µ′, ϕ′)

+

∫ π

0

dϕ′∫ 1

−1

dµ′ [c+Φh(t, x, y, w + γ, µ′, ϕ′) + c−Φh(t, x, y, w − γ, µ′, ϕ′)]

. (A.2)

Now, we define

(vh)mn(x, y, w) :=

∫ ϕn+1

2

ϕn− 1

2

∫ µm+1

2

µm− 1

2

dµ vh(x, y, w, µ, ϕ) ,

46

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and, for σ = −γ, 0, γ, we have∫

Ωijkmn

vh(x, y, w, µ, ϕ)

[s(w)

∫ π

0

dϕ′∫ 1

−1

dµ′ Φ(t, x, y, w + σ, µ′, ϕ′)]

dx dy dw dµ dϕ

=

∫ π

0

dϕ′∫ 1

−1

dµ′∫ x

i+12

xi− 1

2

dx

∫ yj+1

2

yj− 1

2

dy

∫ wk+1

2

wk− 1

2

dw s(w) Φ(t, x, y, w + σ, µ′, ϕ′) (vh)mn(x, y, w)

=

Nµ∑

m′=1

Nϕ∑

n′=1

Ωijkm′n′s(w) Φh(t, x, y, w + σ, µ′, ϕ′) (vh)mn(x, y, w) dx dy dw dµ′ dϕ′ .

Now we discuss the following integral for different test function vh,

I =

Ωijkmn

vh(x, y, w, µ, ϕ)

[s(w)

∫ π

0

dϕ′∫ 1

−1

dµ′ Φh(t, x, y, w + σ, µ′, ϕ′)]

dx dy dw dµ dϕ .

• For vh(x, y, w, µ, ϕ) = 1,

I =

Nµ∑

m′=1

Nϕ∑

n′=1

Nw∑

k′=1

∆µm′ ∆ϕn′

Tijk′m′n′(t)

∫ wk+1

2

wk− 1

2

s(w) χk′(w + σ) dw

+ Wijk′m′n′(t)

∫ wk+1

2

wk− 1

2

s(w)2(w + σ − wk′)

∆wk′χk′(w + σ) dw

∆xi ∆yj ∆µm ∆ϕn .

• For vh(x, y, w, µ, ϕ) = 2(x−xi)∆xi

,

I =1

3∆xi ∆yj ∆µm ∆ϕn

Nµ∑

m′=1

Nϕ∑

n′=1

Nw∑

k′=1

∆µm′ ∆ϕn′ Xijk′m′n′(t)

×∫ w

k+12

wk− 1

2

s(w) χk′(w + σ) dw .

• For vh(x, y, w, µ, ϕ) =2(y−yj)

∆yj,

I =1

3∆xi ∆yj ∆µm ∆ϕn

Nµ∑

m′=1

Nϕ∑

n′=1

Nw∑

k′=1

∆µm′ ∆ϕn′ Yijk′m′n′(t)

×∫ w

k+12

wk− 1

2

s(w) χk′(w + σ) dw .

47

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• For vh(x, y, w, µ, ϕ) = 2(w−wk)∆wk

,

I =

Nµ∑

m′=1

Nϕ∑

n′=1

Nw∑

k′=1

∆µm′ ∆ϕn′

Tijk′m′n′(t)

∫ wk+1

2

wk− 1

2

s(w)2(w − wk)

∆wk

χk′(w + σ) dw

+ Wijk′m′n′(t)

∫ wk+1

2

wk− 1

2

s(w)4(w + σ − wk′)(w − wk)

∆wk′ ∆wk

χk′(w + σ) dw

∆xi ∆yj ∆µm ∆ϕn .

• For vh(x, y, w, µ, ϕ) = 2(µ−µm)∆µm

, I = 0.

• For vh(x, y, w, µ, ϕ) = 2(ϕ−ϕn)∆ϕn

, I = 0.

The lost term in the collision operator is

2π[c0s(w) + c+s(w − γ) + c−s(w + γ)]Φ(t, x, y, w, µ, ϕ) . (A.3)

Let

ν(w) = 2π[c0s(w) + c+s(w − γ) + c−s(w + γ)] ,

then we need to evaluate numerically,

I ′ =∫

Ωijkmn

ν(w) Φh(t, x, y, w, µ, ϕ) vh(x, y, w, µ, ϕ) dx dy dw dµ dϕ .

• For vh(x, y, w, µ, ϕ) = 1,

I ′ = ∆xi ∆yj ∆µm ∆ϕn

×Tijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w) dw + Wijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w)2(w − wk)

∆wk

dw

.

• For vh(x, y, w, µ, ϕ) = 2(x−xi)∆xi

,

I ′ =1

3∆xi ∆yj ∆µm ∆ϕn Xijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w) dw .

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• For vh(x, y, w, µ, ϕ) =2(y−yj)

∆yj,

I ′ =1

3∆xi ∆yj ∆µm ∆ϕn Yijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w) dw .

• For vh(x, y, w, µ, ϕ) = 2(w−wk)∆wk

,

I ′ = ∆xi ∆yj ∆µm ∆ϕn

Tijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w)2(w − wk)

∆wk

dw

+ Wijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w)4(w − wk)

2

(∆wk)2 dw

.

• For vh(x, y, w, µ, ϕ) = 2(µ−µm)∆µm

,

I ′ =1

3∆xi ∆yj ∆µm ∆ϕn Mijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w) dw .

• For vh(x, y, w, µ, ϕ) = 2(ϕ−ϕn)∆ϕn

,

I ′ =1

3∆xi ∆yj ∆µm ∆ϕn Pijkmn(t)

∫ wk+1

2

wk− 1

2

ν(w) dw .

49

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A.3 Integrals related to the collisional operator

We need to evaluate (some numerically) the following integrals

∫ wk+1

2

wk− 1

2

s(w) χk′(w + σ) dw

∫ wk+1

2

wk− 1

2

s(w)2(w + σ − wk′)

∆wk′χk′(w + σ) dw

∫ wk+1

2

wk− 1

2

s(w)2(w − wk)

∆wk

χk′(w + σ) dw

∫ wk+1

2

wk− 1

2

s(w)4(w + σ − wk′)(w − wk)

∆wk′ ∆wk

χk′(w + σ) dw

∫ wk+1

2

wk− 1

2

ν(w) dw

∫ wk+1

2

wk− 1

2

ν(w)2(w − wk)

∆wk

dw

∫ wk+1

2

wk− 1

2

ν(w)

[2(w − wk)

∆wk

]2

dw .

If we evaluate these integrals by means of numerical quadrature formulas, then it is appro-

priate to eliminate the singularity of the function s(w) at w = 0 by change of variables.

∫ b

a

s(w) dw =

∫ b

a

√w(1 + αKw)(1 + 2αKw) dw

=

∫ √b

√a

√1 + αKr2 (1 + 2αKr2) 2 r2 dr , (w = r2)

∫ b

a

s(w − γ) dw =

∫ b−γ

a−γ

s(w) dw

=

∫ √b−γ

√a−γ

√1 + αKr2 (1 + 2αKr2) 2 r2 dr , (w = r2 + γ)

∫ b

a

s(w + γ) dw =

∫ b+γ

a+γ

s(w) dw

=

∫ √b+γ

√a+γ

√1 + αKr2 (1 + 2αKr2) 2 r2 dr . (w = r2 − γ)

50

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A.4 Integrals related to the free streaming operator

We recall that

g1(·) = cx

µ√

w(1 + αKw)

1 + 2αKw,

g2(·) = cx

√1− µ2

√w(1 + αKw) cos ϕ

1 + 2αKw,

g3(·) = − 2ck

√w(1 + αKw)

1 + 2αKw

[µEx(t, x, y) +

√1− µ2 cos ϕEy(t, x, y)

],

g4(·) = − ck

√1− µ2

√w(1 + αKw)

[√1− µ2 Ex(t, x, y)− µ cos ϕEy(t, x, y)

],

g5(·) = cksin ϕ√

w(1 + αKw)√

1− µ2Ey(t, x, y) .

Now, we define:

s1(w) =

√w(1 + αKw)

1 + 2αKw, s2(w) =

1√w(1 + αKw)

.

We need to evaluate the integrals.

∫ b

a

s1(w) dw =

∫ b

a

√w(1 + αKw)

1 + 2αKwdw =

∫ √b

√a

√1 + αKr2

1 + 2αKr22 r2 dr ,

∫ b

a

s2(w) dw =

∫ b

a

1√w(1 + αKw)

dw =

∫ √b

√a

2√1 + αKr2

dr ,

∫ b

a

s1(w)2(w − wk)

∆wk

dw =

∫ b

a

√w(1 + αKw)

1 + 2αKw

2(w − wk)

∆wk

dw

=

∫ √b

√a

√1 + αKr2

1 + 2αKr2

2(r2 − wk)

∆wk

2 r2 dr ,

∫ b

a

s2(w)2(w − wk)

∆wk

dw =

∫ b

a

1√w(1 + αKw)

2(w − wk)

∆wk

dw

=

∫ √b

√a

2√1 + αKr2

2(r2 − wk)

∆wk

dr

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∫ b

a

s1(w)

[2(w − wk)

∆wk

]2

dw =

∫ b

a

√w(1 + αKw)

1 + 2αKw

[2(w − wk)

∆wk

]2

dw

=

∫ √b

√a

√1 + αKr2

1 + 2αKr2

[2(r2 − wk)

∆wk

]2

2 r2 dr ,

∫ b

a

s2(w)

[2(w − wk)

∆wk

]2

dw =

∫ b

a

1√w(1 + αKw)

[2(w − wk)

∆wk

]2

dw

=

∫ √b

√a

2√1 + αKr2

[2(r2 − wk)

∆wk

]2

dr .

A.5 Initial condition

Since measure(Ωijkmn) = ∆xi ∆yj ∆wk ∆µm ∆ϕn, we have

Ωijkmn

Φh(0, x, y, w, µ, ϕ) dx dy dw dµ dϕ = measure(Ωijkmn) Tijkmn(0) ,

Ωijkmn

Φh(0, x, y, w, µ, ϕ)2(x− xi)

∆xi

dx dy dw dµ dϕ =1

3measure(Ωijkmn) Xijkmn(0) ,

Ωijkmn

Φh(0, x, y, w, µ, ϕ)2(y − yj)

∆yj

dx dy dw dµ dϕ =1

3measure(Ωijkmn) Yijkmn(0) ,

Ωijkmn

Φh(0, x, y, w, µ, ϕ)2(w − wk)

∆wk

dx dy dw dµ dϕ =1

3measure(Ωijkmn) Wijkmn(0) ,

Ωijkmn

Φh(0, x, y, w, µ, ϕ)2(µ− µm)

∆µm

dx dy dw dµ dϕ =1

3measure(Ωijkmn) Mijkmn(0) ,

Ωijkmn

Φh(0, x, y, w, µ, ϕ)2(ϕ− ϕn)

∆ϕn

dx dy dw dµ dϕ =1

3measure(Ωijkmn) Pijkmn(0) .

If, for each (x, y) and (µ, ϕ),

Φh(0, x, y, w, µ, ϕ) =

F (x, y) s(w) e−w for w < wNw+ 1

2

0 otherwise

and

F (x, y) = Fij (constant) ∀(x, y) ∈[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

],

52

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then it is reasonable to assume

Tijkmn(0) =Fij

∆wk

∫ wk+1

2

wk− 1

2

s(w) e−w dw , (A.4)

Xijkmn(0) = Yijkmn(0) = 0 , (A.5)

Wijkmn(0) = 3Fij

∆wk

∫ wk+1

2

wk− 1

2

s(w) e−w 2(w − wk)

∆wk

dw , (A.6)

Mijkmn(0) = Pijkmn(0) = 0 . (A.7)

Recalling the definition (2.10) of the dimensionless charge density, we have

ρ(0, x, y) = 2 π F (x, y)Nw∑

k=1

∫ wk+1

2

wk− 1

2

s(w) e−w dw ,

which gives a relationship between F (x, y) and the initial charge density ρ.

A.6 Hydrodynamical variables

If (x, y) ∈[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

], then

ρh(t, x, y) =Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

[Tijkmn(t) + Xijkmn(t)

2(x− xi)

∆xi

+ Yijkmn(t)2(y − yj)

∆yj

]∆wk∆µm ∆ϕn . (A.8)

We define

Tij(t) =Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

Tijkmn(t) ∆wk∆µm ∆ϕn

Xij(t) =Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

Xijkmn(t) ∆wk∆µm ∆ϕn

Yij(t) =Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

Yijkmn(t) ∆wk∆µm ∆ϕn .

Therefore, for every (x, y) ∈[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

],

ρh(t, x, y) = Tij(t) + Xij(t)2(x− xi)

∆xi

+ Yij(t)2(y − yj)

∆yj

. (A.9)

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For every (x, y) ∈[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

], the approximate momentum in x-direction is

Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn [g1,km Tijkmn(t) + g1w,km Wijkmn(t) + g1µ,km Mijkmn(t)]

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn g1,km Xijkmn(t)

]2(x− xi)

∆xi

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn g1,km Yijkmn(t)

]2(y − yj)

∆yj

, (A.10)

and the approximate momentum in y-direction is

Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

[g2,kmn Tijkmn(t) + g2w,kmn Wijkmn(t) + g2µ,kmn Mijkmn(t) + g2ϕ,kmn Pijkmn(t)]

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

g2,kmn Xijkmn(t)

]2(x− xi)

∆xi

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

g2,kmn Yijkmn(t)

]2(y − yj)

∆yj

, (A.11)

where

g1,km =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g1(w, µ) dw dµ

g1w,km =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g1(w, µ)2(w − wk)

∆wk

dw dµ

g1µ,km =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

g1(w, µ)2(µ− µm)

∆µm

dw dµ

g2,kmn =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g2(w, µ, ϕ) dw dµ dϕ

g2w,kmn =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g2(w, µ, ϕ)2(w − wk)

∆wk

dw dµ dϕ

g2µ,kmn =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g2(w, µ, ϕ)2(µ− µm)

∆µm

dw dµ dϕ

g2ϕ,kmn =

∫ wk+1

2

wk− 1

2

∫ µm+1

2

µm− 1

2

∫ ϕn+1

2

ϕn− 1

2

g2(w, µ, ϕ)2(ϕ− ϕn)

∆ϕn

dw dµ dϕ .

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Analogously, the energy multiplied by the charge density ρh(t, x, y) is

Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn ∆µm

[wk ∆wk Tijkmn(t) +

(∆wk)2

6Wijkmn(t)

]

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn ∆µm wk ∆wk Xijkmn(t)

]2(x− xi)

∆xi

+

[Nw∑

k=1

Nµ∑m=1

Nϕ∑n=1

∆ϕn ∆µm wk ∆wk Yijkmn(t)

]2(y − yj)

∆yj

, (A.12)

for every (x, y) ∈[xi− 1

2, xi+ 1

2

[yj− 1

2, yj+ 1

2

].

55