20-04-23

Challenge the future

DelftUniversity ofTechnology

Design of the actuator for the EUV full flex illuminatorIn cooperation with ASML

Ruipan Chen, MSc. Department: PME , Specialisation: MSD

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Contents

• Introduction: full flex illuminator

• What is a flex illuminator ?

• What is a full flex illuminator ?

• Actuator design: linear hybrid actuator

• Actuator requirements & building volume

• Actuator configuration

• Working principle

• Simulation results

• Stiffness analyses: parallel guiding

• Summary

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Contents

• Introduction: full flex illuminator

• Actuator design: linear hybrid actuator

• Stiffness analyses: parallel guiding

• Summary

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What is a Flex illuminator ?

Tiltable mirror elements

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FlexRay changes illumination modes

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A Full Flex illuminator is made to generate unlimited patterns

Conventional

Annular

Dipole

Quadrupole

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Flexures

Full flex illuminator

EUV light

Approx. 45

cm

Mirror surface

Actuators

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A mirror stack and its manipulatorsfull flex illuminator

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A single element and its manipulator

• Mirror can tilt around two axes Z and Y.

• This is realized by manipulating the two vertical rods.

• The actuator mover is connected to these rods

• Driving force: ±2 [N] (for the illuminator)

• Stroke ： ±2 [mm]

full flex illuminator

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Contents

• Introduction: full flex illuminator

• Actuator design: linear hybrid actuator

• Stiffness analyses: parallel guiding

• Summary

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Actuator requirements

• Building volume: 60mm×36mm×6mm per actuator

• Linear actuator for mechatronic feedback system

• Driving force: ±2 [N]

• Stroke: ±2 [mm]

• Dissipation < 5 Watts per actuator

The design goal

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Actuator configurationLinear hybrid actuator

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Actuator locationLinear hybrid actuator

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Reluctance force of a iron pole-pairLinear hybrid actuator

Virtual work principle to determine the tangent force Fx. It is proportional to the flux squared.

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Working principleLinear hybrid actuator

Flux increased in airgap 1 and 3, decreased in 2 and 4. A net force is generated.

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Analytical modellingLinear hybrid actuator

Permanent magnet Voltage source + resistanceCurrent-carrying coils Voltage sourceAirgap reluctances Resistance.

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Analytical modelingLinear hybrid actuator

Assumptions: - No saturation - simplified 2-D airgap reluctance (no leakage flux, no fringing flux). Iron reluctance is neglected.

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Analytical resultsMATLAB

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2-D FEM resultsOersted

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Displacement x [mm]

Full Flex Actuator (config b) Drive Force

Coil current [Aturn]

Driv

ing

For

ce F

x [N

]

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3-D FEM resultsANSYS workbench

With an input current of 150 [A*turn] (corresponding to a dissipation of 4.3 [W]), the actuator is able to give a driving force of 2.3 [N] at the neutral position and 2.1 [N] at the end of the stroke.

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Contents

• Introduction: full flex illuminator

• Actuator design: linear hybrid actuator

• Stiffness analyses: parallel guiding

• Summary

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Three stiffnesses of the mechanismStiffness analyses

• Stiffness of the illuminator: positive• Stiffness of the parallel guiding: positive• Normal force on parallel guiding: negative

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The negative stiffness lower the total driving stiffness! The required driving force becomes 1.58 [N] with the help of the normal force.

Energy method

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Contents

• Introduction: full flex illuminator

• Actuator design: linear hybrid actuator

• Stiffness analyses: parallel guiding

• Summary

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Summary

• Linear

• low inherent stiffness

• Low driving stiffness

• Easy water cooling

- stator is equipped with coils and magnet.

Cooling facility can be made easy.

• No contamination to the vacuum

- clear mechanical clearance

- magnets and coils are in one enclosure

Merits of the actuator

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Thank you for your attentions !Please feel free to ask questions.

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Backup slides

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Backup slides

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0

50

100

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0

1

2

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Displacement x [mm]

Full Flex Actuator (config b) Drive Force

Coil current [Aturn]

Driv

ing

For

ce F

x [N

]

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Backup slides

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Displacement x [mm]

Full Flex Actuator (config b) Normal Force

Coil current [Aturn]

Nor

mal

For

ce F

y [N

]

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Backup slides

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Backup slides

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Backup slides

Rotation angle: 5 degrees

Deflection : 1mm

Normal force Vs Euler formula:

Normal force increased by 0.1 %

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