the pmt (trikon) mØri source
DESCRIPTION
Commercial helicon sources need heavy magnets and cannot cover large substrates. The PMT (Trikon) MØRI source. Solution 1: Use distributed sources. Experiment at PMT, ca 1995. However, still need a large electromagnet. Solution 2: Use permanent magnets. Material: NdFeB Bmax = 12 kG. - PowerPoint PPT PresentationTRANSCRIPT
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The PMT (Trikon) MØRI source
Commercial helicon sources need heavy magnetsand cannot cover large substrates
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Solution 1: Use distributed sources
ROTATING PROBE ARRAY
PERMANENT MAGNETS
3"
DC MAGNET COIL
18"
However, still need a large electromagnet
Power scan at z = 7 cm, 5 mT A, 20 G, 13.56 MHz,
0.0
0.5
1.0
1.5
2.0
0 5 10 15 20 25 30R (cm)
N (
101
2 cm
-3) 3.0
2.5
2.0
1.5
1.0
P(kW)
7-tube m=0 array
ARGON
Experiment at PMT,ca 1995
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UCLA
12.7 cm
7.6 cm
PLASMA
Material: NdFeB
Bmax = 12 kG
The magnets are dangerous!
Solution 2: Use permanent magnets
The innovation involves two parts:
1. Novel use of PMs2. Use of the low-field peak effect.
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The field reverses at a stagnation point very close to the magnet.
Plasma created inside the rings follows the field lines and cannot be ejected.
Internal field
External field
The field of annular permanent magnets
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Proof of principle on 3” diam tube
Gate Valve
To Turbo Pump
34 cm
36 cm
D
Z1
Z2
-300
-250
-200
-150
-100
-50
0
50
100
150
0 5 10 15 20 25 30
z (cm)
Bz
(G)
Calculated
Measured
External field
Internal field
0
1
2
3
4
5
6
7
-5 0 5 10 15 20r (cm)
n (
101
0cm
-3)
Z2, 40
Z2, 35
Z2, 30
Z2, 21
Z2, 1
D (cm)
500W, 1 mTorr
The bottom curve is when the tube is INSIDE the magnet
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Mechanism of the Low Field Peak
UCLA
0 1,r
z
ne nk
k B a k B
Basic helicon relations
Constructive interference of reflected wave
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Design of discharge tube: maximize the loading resistance
Calculations are done using the HELIC code of D. Arnush
0.0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
1E+11 1E+12 1E+13n (cm-3)
R (
oh
ms)
100.0
63.1
39.8
25.1
15.8
10.0
B(G) L=2", 1mTorr, conducting
Low-field peak
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2.120.25
4.00
2.25
Lesker QF50 cover plate
Lesker QF50 centering ringParker 2-330 Viton O-ring
Corning #237580 tubing, 63.5 mm OD, 4.8 mm wall
Parker 2-239 Viton O-ring
Dimensions are in inches
Final design of “stubby” discharge tube
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Medusa 2: An 8-tube linear test array
UCLA
165 cm
53.3 cm
17.8
17.8
17.8
17.8 cm73.7 cm
8.9 cm
x
y
Top view
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The array source is vertically compact
UCLA
The magnets can be made in two pieces so that they hold each other on an aluminum sheet.
Once placed, the magnets cannot easily be moved, so for testing we use a wooden support.
165 cm
30 cm
15 cm
Side view
Probe ports
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Wooden frame for safe storage
UCLA
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The wooden magnet frame is used in testing
UCLA
64"
21"
3.5"
12"
Wooden magnet support
2.00
5.00
3.75
2.5
24 ea. 2.5 x 5.5 x 1/2"4 ea. 2.5 x 64 x ¾”
1 ea. 21 x 64 x 1/2”16 ea. 1/4” diam dowels
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Antenna connections
UCLA
For CW operation, all connections were solidly soldered, and RG/393 teflon-insulated cable was used. Cable
connectors cannot take the startup voltage.
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Matching circuit for N tubes in parallel
UCLA
R, L
R, L
R, L
R, L
PS
N loads
Z2 - short cables
Distributor
Z1Z2
Z1 - long cable
C1C2
Matching ckt. 50W
The problem with array sources is that the cable lengths cannot be short. The match circuit cannot be
close to all the tubes.
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C1, C2 for N=8, L = 0.8H, Z1 = 110 cm, Z2 = 90 cm
0
200
400
600
800
1000
1200
1400
1600
0 50 100 150 200Z2 (cm)
C (
pF)
C1(S)
C2(S)
0
200
400
600
800
1000
1200
1400
1600
0 0.5 1 1.5 2 2.5 3L (uH)
C (
pF)
C1(S)
C2(S)
Matching sets limits on antenna inductance and cable lengths.There is a “sweet spot” for tube design when RF is considered.
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A water-cooled, 50-W, low resistance,rectangular transmission line
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Medusa 2 in operation
UCLA
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UCLA
0
2
4
6
8
10
-8 -6 -4 -2 0 2 4 6 8y (in)
n (1
011 cm
-3)
Z1, x = 0Z1, x = 3.5Z2, x = 0Z2, x = 3.5
Compact 3kW, D=7", 20mTorr
0 3.5
Compact configuration, 3kW
Side Langmuir probe
Density profiles across the chamber
<< 4” below tubes
<< 7” below tubes
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UCLA
0
1
2
3
4
5
-8 -6 -4 -2 0 2 4 6 8y(in)
n (1
011 c
m-
- 70714
x (in)Staggered3kW, D=7", 20mTorr
Density profiles across the chamber
0 7-7 14
Staggered configuration, 3kW
Bottom probe array
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UCLA
0
1
2
3
4
5
-8 -6 -4 -2 0 2 4 6 8 10 12 14 16x(in)
n (
10
11 c
m-
-3.503.5
Staggered, 3kW, D=7", 20mTorr y (in)
Density profiles along the chamber
Staggered configuration, 3kW
Bottom probe array
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UCLA
Density profiles along the chamber
Compact configuration, 3kW
Bottom probe array
0
2
4
6
8
10
-8 -6 -4 -2 0 2 4 6 8 10 12 14 16
x(in)
n (1
011 c
m-
-3.503.5
Compact, 3kW, D=7", 20mTorr y (in)
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A compact, stackable module
The match circuit fits on top of the array
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