semicon backend tools cleaning solutions · magazine is one of the widely used carriers in semicon...

Magazine is one of the widely used carriers in semicon backend industry. The growth of automotive industry and the stringent cleanliness requirement led to the increase of awareness in tools particle cleanliness.

JKS has developed Precision Particle Cleaning solutions for Semicon Backend Tools which complies to industrial standards. The system is capable of meeting the requirement of 98% particles reduction after the first cleaning, which leads to higher yield in the manufacturing process.

CT-AQ SERIES CLEANING SYSTEMSEMICON BACKEND TOOLS CLEANING SOLUTIONS

JKS ENGINEERING (M) SDN. BHD.

Surface Treatment Technology Solutions Partner

SEMICON BACKENDINDUSTRY

Semiconductor backend process is the packaging process that includes assembly and testing. It is important to remove particle contamination of the semicon backend carriers to improve the production yield.

WAFER FRAMECASSETTE

MAGAZINE BASKETMAGAZINE COVER

MAGAZINE

STACK MAGAZINE

TUBE



SEMICON BACKEND | MARKET FOCUS

SINGLE LAYER BASKET

Non-obstructive basket design allows effective ultrasonic

cavitation exposure.

BASKET REST

ULTRASONICTRANSDUCERULTRASONIC

TRANSDUCER

Located above immersion area which reduces blockage for recirculation & ultrasonic cleaning.



SEMICON BACKEND | CT-AQ-SERIES | HANDLING | BASKET CONSTRUCTION

CLEANBASIC

CLEANXCEL

TRACEABILITYMANAGEMENT

SCHEDULEOPTIMIZER

RECOVERYCONTROL DASHBOARD 3RD PARTY SOFTWAREREMOTE SUPPORT

PASSWORDACCESS CONTROL

Able to track recipe & process parameters involved. Barcode

& QR technology for basket tracibility is available as

optional.

REPORTING& DOWNLOADS

Alarm history & reports consisting of process recipe & parameters are downloadable

in .csv and .pdf format.

DATAANALYTICS

Enable data collection & provide business decisions

based on data.

RECIPEMANAGEMENT

Able to store up to 20 program recipes & has auto preparation capabilities. *

ALARM MANAGEMENT

Display of alarm warnings with unlimited history

records. *

* CLEANBASIC SUPPORTS UPTO 10 PROGRAM RECIPES.** LIMITED NUMBER OF ALARM HISTORY RECORDS FOR CLEANBASIC.

NOTE

Optimization of throughput for mix recipe loading while

ensuring no process overtime through scheduling.

Able to identify basket status & recover the process even

after e-stop.

Monitors & controls the system through various sensors and

indicators.

Integration with Indusoft & SECS/GEM are

available as optional.

Remote online debugging & support using

TeamViewer software.

Multi-level password access to manage different process

functions.

SEGS/GEM

Communication protocol between the system and a

host computer.



SEMICON BACKEND | CT-AQ-SERIES | CONTROL | SOFTWARE FEATURES

FULLY ENCLOSED SYSTEM

EASY MAINTENANCE ACCESS

The enclosure coupled with positive pressure and continous exhaust ensures process and handling environment are not exposed to external contamination from the environment.

COMPARTMENTAL ISOLATION

The system is designed in a way that it completely isolates process, handling and maintenance area for effective access and reduced contamination.

Provides easy access to robotics arm and process equipments for safe and routine maintenance.

VIEWING WINDOW

The well sealed and easy removal viewing window renders handling area to be fully visible during the operation.



SEMICON BACKEND | CT-AQ-SERIES | ENCLOSURE | DESIGN FEATURES

REPORTINGVERIFICATIONCLEANING TEST

Lab test report & process design are proposed by

analysing particle counts & particle classification based on

customer’s requirement.

PARTS STUDY

Shape complexity of customer parts are studied to share the

right technology & cleaning solutions.

Parts cleanliness are verified by conducting particle

extraction analysis, which complies with VDA19.1 &

ISO16232 standards.

In-lab cleaning systems allow parts testing & optimisation of

process design to achieve customer’s requirement.

JKS Application R&D Center conducts customer parts testing with our in-lab cleaning systems, mainly using XCEL FE01-FS and XCEL CT12-HY. Our experienced engineers would focus on process selection and optimization on key elements of chemistry, mechanics, temperature and time.



SEMICON BACKEND | CT-AQ-SERIES | APPLICATION R&D CENTER | PROCESS VERIFICATION

* TO HIGHLIGHT THE PART’S CLEANLINESS REQUIREMENTSNOTE

PARTICLEEXTRACTION

1

INSPECTION

3

ANALYSIS

4

DRYING

2

VDA 19.1 VERIFICATION PROCEDURES PARTICLE COUNT REPORT

Particle Count Report specifies the cleanliness level of extracted part within controlled test method. The report is automatically generated by the Mitani Contami Analyzer software. The report generated is in compliance with VDA19.1 and ISO16232 standards.

CLASS RANGE BASELINE TP01

NUMBER OF PARTICLESCOMPONENT CLEANLINESSCODE, CCC : N ( D-K00 ) *

3,765

1,490

1,779

391

201

5

7,631

1,572.52

116

102

14

0

0

0

0

182.97

100 ≤ x < 150

150 ≤ x < 200

200 ≤ x < 400

400 ≤ x < 600

600 ≤ x < 1000

x ≥ 1000

F

G

H

I

J

K

TOTAL PARTICLES

PARTICLE REDUCTION RATE

MAX. PARTICLE SIZE ( µm )

- 98.48%



SEMICON BACKEND | CT-AQ-SERIES | APPLICATION R&D CENTER | TECHNICAL CLEANLINESS RESULT

semicon backend tools cleaning solutions · magazine is one of the widely used carriers in semicon...

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