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Scanning Electron Microscope

FEI INSPECT F50Step by step operation manual

Scanning Electron Microscope, FEI Inspect F50

FE-SEM-F Observation Flow

ESEM FE-SEM-H FE-SEM-JFE-SEM-FE

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Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor

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Mount Specimen on The Stub

Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder

Measure The Height of The Specimen

Holder

Insert The Specimen Holder into The

SEM Chamber

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Switch On Electron Beam

Adjust The Focus at The Present Condition

Select “Home Stage” or

Appropriate WD Select WD=12mm at 250x

of The High Mag Mode

Gently Adjust The Actual Height of (z) Manually,

for Focusing The Image With The WD You Choose

Start Observation With The Low Magnification

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Switch Off Electron Beam

Save Images

BSD,STEM / EDXLow Vacuum / EDX

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Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen

Exchange Position

Set The Stage of SEM to The Specimen

Exchange Position

Take Out Specimen And Data

Leave The Room After Verifying That The Error Message Does Not Appear

Link (Z) to WD

1. Check vacuum level of SEM.

Vacuum indicator (B) should be green

Pressure (D) < 1.56e-4 mbar

2. Make sure the specimen holder will not touch the SEM column by CCD.

How to Observe Your SpecimenSoftware should be always running. Just switch on the monitor switch

① Confirm SEM condition

1. Click Vent(A). Wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray.

2. Open the door gently when the vacuum indicator (B) presented in gray

② Vent Chamber

③ Mount and tighten the stub in the sample Holder using a screw

④ Check the height of stage with specimen using scale Adjust height of the sample holder including the stub. The maximum height must

be below 10 of the scale. It is adjustable by turning the top of screw ② after

loosen a base of sample holder ①, or by using Z knob of the stage controller on

the SEM chamber door.

AC

B

D

⑤ Close the Door1. Close the door with placing your hands and click Pump (C).

2. Waite until pressure (D) reach less than 1.56e-4mbar and the vacuum indicator (B) is presented in green .

Do not Screw Too

Much

【１．Locate your specimen in the SEM chamber】

High vacuum Air conditionMiddle of Evac / Vac

Stage Base

Platform

①

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Stage base

Sample holder

Stub

FE-ESEM-F Observation Flow


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SEM Chamber

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⑥ Stage Preparation

E Activate CCD monitor and make sure the sample holder will never hit the SEM column. Then click “Centre position (E)” in “Stage” tab. The sample holder moves to directly below the column, which is the centre position of SEM.* Confirm X and Y of the control panel (F) are also X=0 and Y=0.

F

【2. Electron Beam And Spot Size Settings】

G

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【3. Rink Z to WD (Working Distance)】

Select appropriate acceleration voltage and spot size using pull down key or adjuster(G) and (H) .

＊acceleration voltage and Spot Size is able to change during observation anytime during observation.

High Voltage : 200 V ～ 30 kVMagnification : 30 x ～ 1,000,000 x

I

J

1. Click “Beam On” (I).The Indicator now should be presented in green. If the indicator is presented in red, the filament may be broken.

2. Increase magnification (J) little by little, while adjusting focus until 1000x. Magnification can be changed by pressing “＋” and “－” on the keyboard;

it can be double by ”＋” key, and make it half by ”－” key.

Also, magnification can be changed in the input directly. A blank column will be appeared after double-click the number above the slider. Enter the magnification of your choice.

Pointer on the screen will become Arrow (⇔) with right click of the mouse. Focus of the image can be adjusted by moving the arrow(⇔) from side to side.

Same as focusing process, Stigma is adjustable by moving the mouse with right click while pressing Shift key.



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Link (Z) to WD

4. After adjust focus, actual height (Z) MUST be linked to WD. Click (K).5. Confirm the indication (K) is now displayed as (L) and WD and Z are also

similar distance.

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【4. Actual Observation, Capture and Saving Images 】A. Search An Area of Interest

Track mode (effective at low magnification) : A yellow ball appears on the monitor by pressing a middle button of the mouse. Move it to any direction by a cursor.

Get mode : An area ( or subject) of interest can be located to the centre of the monitor by left – double click of the mouse.

Arrow in the keyboard : An observation area moves to the direction of arrow for approx. 80 % of a field of view.

Beam Shift Mode / effective at high magnification : a hand mark, which is represented as shift of electron beam, appears on the monitor by pressing a left button of the mouse while pressing [Ctrl]. A field of view can be moved by beam shift, without actual stage moving.

B. Adjusting Focus and Stigma Use the “Selected area frame”(M) to adjust focus and stigma. The selected area

frame allows changing magnification within the frame area only. Therefore, focus and stigma can make a fine adjustment while minimizing beam irradiation damage on the surface.

M

1. Adjust focus precisely.

2. Adjust stigma if required. Cross-type arrow appears after right -click of the mouse while pressing “Shift key”. Move mouse in left and right for X-axis stigma while pressing “Shift key”, and then, move it in top and bottom for y-axis stigma.

3. Adjust focus again. Repeat process 1 and 2, until obtaining the finely adjusted image.

K

Before LinkHeight (z) and WD are different

After Link Height (z) and WD are similar

L

WD(Working Distance) is distance between a just – focus position on the specimen and SEM Column.



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Link (Z) to WD

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D. Changing Scan Speed

Slow scan ：Turtle (P) / Fast scan ：Rabbit (Q)Scan speed can be changed by clicking Turtle or Rabbit. Setting of scanning speed can be changed following, Scan (R) → Preference (S) → Scanning (T)

P Q

R

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E. Filter for imaging

Select Live, Average, Integrate

Live : Real-time imaging

Average : Default setting / Fast scan will be useful during observation. However, in order to capture a fine image, Number of Flame should be set up four to 16.

Integrate : The integrate mode is effective if materials are easily affected by the electrostatic charge. Scanning will be paused once automatically after integrated the set number of times.

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C. Adjusting Contrast and Brightness Click Auto contrast (N)

Or, use sliding bar(O) of the user interface. Arrows (o-2) can change current condition finely, but knob at the centre (o-1) can change it coarsely.

O-1

O-2



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F. Capture images

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1. Adjust focus and stigma with appropriate scan speed and magnification.

2. Click Camera (U), or Press F2 button. Camera mode allows capturing images with the fixed scan

speed, which is set up in Scan Preference. After each capturing, image on the monitor will be frozen. Pixel size of captured image is 1024 x 884; appropriate exposure time is 30 to 90 seconds.

3. After capturing process, “Save as” menu (V) appeared automatically. For image saving, you must create your own holder in the ESEM datastation (W). And then, save images. Do not create a holder in the SEM PC except the ESEM datastation.

4. Take out your data with your USB. and remove your date from the ESEM datastation immediately.

Please make sure you saved all of your data in your USB.Data in the ESEM datastation will be deleted without prior notice.

V

W

*Make sure those checkbox were selected



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【5. Closing Procedure】

1. Click “Beam On”① button to switch off the electron beam.2. Confirm the stage height of SEM that will never hit the SEM column

by CCD.

2. Click “Vent”② and, wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray.

3. Gently open the door and take out the specimen4. Close the door and then click ”Pump” ④. Wait until the chamber becomes the

high vacuum condition, such as ＜1.56e¯ mbar.

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③

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• PC monitor is showing inside of the chamber by CCD• Vacuum indicator should be presented in green • Keep running the SEM software• Switch off the PC monitor only• No error message or alarm are appeared

It is compulsory that confirming following conditions before you leave the room.

FE-SEM-F Observation Flow - BSD, STEM and EDX

BSD STEM EDX

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Confirm The SEM Chamber by CCD



Error check

Specimen preparation

Start Observation

Saving images and data

Need to Change Detector* Contact us

Analyze your Specimen

FE-SEM-F Observation Flow - BSD, STEM and EDX

BSD STEM

EDX

To attach detector is necessary. Please contact our staff. Both detectors fix to the bottom of the SEM column. So, you have to be seriously

careful because you may give serious damages to both detectors if your specimen are not flat. Therefore, you have to confirm the actual position of stage through the CCD camera often, especially, when you want to change the stage position.

Cautionary note

BSD STEM

Aperture Size 6 6

Acceleration Voltage Higher than normal observation. You must find out the appropriate condition depending on your material, whichthe BSD and the STEM detectors are able to detect sufficient signals.

Spot Size Same as normal observation

WD 10 10

Recommended observation condition

EDX

Detector SDD(Silicon Drift Detector)

Aperture Size 6

Acceleration voltage Theoretically, an appropriate acceleration voltage, which is 2-3 times higher than the energies of K-shell or L-shell of elements of interests, should be selected.

Spot Size Same as normal observation

WD 10

Cooling the detector is necessary before starting analysis. It is very important to extend the detector’s service life, cooling must be switched

off. life

Please contact our staff when you are not able to obtain sufficient signals during your experiments.

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