piezoelectric devices for vibration energy harvesting devices for vibration energy harvesting...
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Piezoelectric Devices for Vibration Energy Harvesting
Vittorio FerrariDip. Ingegneria dell’InformazioneUniversità di Brescia - ITALY
NiPS Summer School 2010Energy Harvesting at micro and nanoscale
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Sensors and Electronic Instrumentation Laboratory
Activity:Sensors and instrumentation systemsAnalog and digital electronic circuits and systems for:
sensor interfacingsensor communication and networking measurement applications
Sensors, MicroSystems and Electronic Interfaces:Piezoelectric transducers, acoustic-wave and resonant microsensorsMEMS sensors and systemsContactless sensorsElectronic interfaces for sensor signalsEnergy harvesting for autonomous sensors
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
8/7/2010
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Sensor Systems
network connectivity
communication capability
electronic board
microsystem/MEMS
sensor element
Sensor elements…into microsystems/MEMS…into packaged electronic modules …with wireless communication capability…and network connectivity
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Systems of Systems
network connectivity
communication capability
electronic board
microsystem/MEMS
sensor element
network connectivity
network connectivity
communication capability
communication capability
electronic boardelectronic board
microsystem/MEMSmicrosystem/MEMS
sensor elementsensor
element
“Pervasive sensing and computing”“Ambient intelligence”“The internet of things”
network connectivity
communication capability
electronic board
microsystem/MEMS
sensor element
network connectivity
network connectivity
communication capability
communication capability
electronic boardelectronic board
microsystem/MEMSmicrosystem/MEMS
sensor elementsensor
element
network connectivity
communication capability
electronic board
microsystem/MEMS
sensor element
network connectivity
network connectivity
communication capability
communication capability
electronic boardelectronic board
microsystem/MEMSmicrosystem/MEMS
sensor elementsensor
element
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
General Architecture of a RF Sensor
Information flow requires exchange of energyAssuming the external readout unit is energeticallyself-sufficient …
the sensor needs power supply
sensor
information
external readout unit
environment/ system/ process
RF link
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
sensor
information
external readout unit
environment/ system/ process
RF link
Power Supply Options: #1
Power supply internal to the sensor (on-board):BatteriesFuel cells…
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
sensor
information
external readout unit
environment/ system/ process
RF link
Power Supply Options: #2
Power supplied by the external readout unit:“Passive” RFId devices (class 1 and 2)Passive telemetric sensorsChipless RFId sensors
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
sensor
information
external readout unit
environment/ system/ process
RF link
Power Supply Options: #3
Power extracted (harvested) from the surrounding ambient
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Present, FreePlay, wind-up radio.
Energy from Ambient: the idea is not new
Water- and windmills. 1770, A.L. Perrelet, self-winding watch.
1930, Jaeger-LeCoultre, Atmos clock powered by thermal fluctuations.
Present, Eolic generators.1956, Zenith, battery-less ultrasound remote.
Present, Motorola PVOT hand-crank phone.
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Energy Harvesting (Scavenging)Principle: Energy is extracted from the surroundings
Surroundings
Energy
CONDITIONING LOADElectrical domain
CONVERSION
The load can be: - Electronic circuits and devices- Sensors with wireless communication
→ Autonomous Sensors- …
EnvironmentHuman body
Radiant KineticThermal
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Radiant Energy
Radiant Energy HarvestingPrinciple: Energy is extracted from the surroundings
Energy
CONDITIONING LOADElectrical domain
CONVERSION
SolarRadio Frequency
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Thermal HarvestingPrinciple: Energy is extracted from the surroundings
Energy
CONDITIONING LOADElectrical domain
CONVERSION
thermal gradients
Thermal Energy
Thermoelectric effectPyroelectric effect
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Mechanical Energy
Mechanical Energy HarvestingPrinciple: Energy is extracted from the surroundings
Energy
CONDITIONING LOADElectrical domain
CONVERSION
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
Magnetic induction conversion:
NightStar flashlamp
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
Magnetic induction conversion:
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
Magnetic induction conversion:
www.enocean.com
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
Electrostatic conversion:
UCB, Berkeley, USA
UCB, Berkeley, USA
MIT, Boston, USA
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
NEC -Tokin, Japan
MechanoElectrical Conversion
Magnetic induction conversion
Electrostatic conversion
Piezoelectric conversion
Piezoelectric conversion:
F
F
31 mode33 mode
q
+
-
q
+
-
MIT, Boston, USA
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Mechanical Energy HarvestingDirect deformation (strain)
E.g. piezoelectric fiber composites
Impact & transient loadsE.g. piezoelectric thin plates
VibrationsSeismic-mass inertial system
THUNDER®, Face International Corp, USA.
(approximated for piezoelectric converters) C.B. Williams, R.B. Yates,, Sens. Actuat. A 52, 8-11 (1996).
Unfavorable scaling with reducing dimensions
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
The Piezoelectric EffectDiscovered in 1880-81 by the Curie brothersProperty of certain materials in which:
a mechanical stress induces an electric charge (direct effect)an electric field develops a mechanical strain (converse effect)
The effect is linear, as opposed to electrostriction
Direct effect:detection
Converse effect:generation
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Applications of PiezoelectricitySonic and ultrasonic wave generation and detection:
Sensors and transducersFilters and resonators
ElectroMechanical & MechanoElectrical conversion:ActuatorsTransformersGas ignitersMotors and machining toolsNebulizers and humidifiersEnergy harvesters
Quartz Piezofilm (PVDF)
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Crystal Structure and PropertiesThe degree of structural symmetry affects the piezo and pyro properties of the material
21 non centrosyimmetrical
...
11 centrosymmetrical
32 classes(point groups)
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Crystal Structure and PropertiesThe degree of structural symmetry affects the piezo and pyro properties of the material
11 centrosymmetrical
21 non centrosyimmetrical
20 piezoelectric(stress-induced polarization)
quartz
...turmaline
32 classes(point groups)
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Y
Si
O
X
Z
+
-
+
-
+
-
- - - -X
- - - -
++ +++ + + +
+-
+-
+
-
X
-- - -----
++++++++
+-
+-
+
-
Piezoelectricity in Quartz X axis: electrical axisY axis: mechanical axisZ axis: optical axis
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Crystal Structure and PropertiesThe degree of structural symmetry affects the piezo and pyro properties of the material
11 centrosymmetrical
21 non centrosyimmetrical
20 piezoelectric(stress-induced polarization)
quartz
...turmaline
10 pyroelectric(polar with spontaneous polarization)
AlN
...ZnO
32 classes(point groups)
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Crystal Structure and PropertiesThe degree of structural symmetry affects the piezo and pyro properties of the material
11 centrosymmetrical
21 non centrosyimmetrical
20 piezoelectric(stress-induced polarization)
quartz
...turmaline
10 pyroelectric(polar with spontaneous polarization)
ferroelectric(pyroelectric with electrically-reversible polarization)
AlN
...ZnO
BaTiO3(PZT)
...PbZr/TiO3
32 classes(point groups)
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
FerroelectricsMaterials in this class exhibit the strongest piezo e pyroeffects Monocrystals (e.g. Rochelle salt) or Polycrystals (e.g. PZT ceramics)
Dipoles are arranged in domains Above TCurie the domains are randomly orientedPoling:
an electric field is applied to orient the domains and set up a permanent polarization
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Lead Zirconate Titanate (PZT)Ferroelectric polycrystalline ceramic made by a solid solution of two perovskite type oxides (ABO3):
PbZrO3PbTiO3
Above Curie temperature :cubic, nonpolar
Below Curie temperature :rhombohedral/tetragonal, polar
Large piezoelectric andpyroelectric effectsHigh coupling coefficientVarious compositions (PZT-4, PZT-5, PZT-5H Navy,…)Other commercial name: PXE
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Basics of Piezoelectricity (1)Interaction between Electrical and Mechanical domains described by linear piezoelectric constitutive equationsSeveral options depending on the chosen EM variablesIn the monodimensional simplified hypothesis:
⎩⎨⎧
ε+=
+=
EdTDdETsST
E
⎩⎨⎧
ε+−=
−=S
D
DhSEhDScT
⎩⎨⎧
ε+−=
+=T
D
DgTEgDTsS
⎩⎨⎧
ε+=
−=
EeSDeEScTS
E S = strain [m/m]
T = stress [N/m2]D = dielectric displacement [C/m2]E = electric field [V/m]
d, e, g, h = piezoelectric constants
[ ] [ ][ ] [ ]
[ ] [ ][ ] [ ]
heccdegcehhsdg
dcheesgd
EDST
DS
DT
ES
ET
+=+ε=ε===ε=
===ε====ε=
===ε=
; V/mN/C
Vm/Nm2/C
N/mVC/m2
m/VC/N
11
sX = elastic compliance [m2/N] @ constant X
εX = dielectric permittivity [F/m] @ constant X
cX =1/sX = elastic stiffness [N/m2] @ constant X
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Examples of Piezoelectric Materials
TP238, Matroc Electroceramics.
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Making reference, for instance, to the formulation:
Piezoelectricity Modeling
… passing to global variables force F, displacement X, voltage V, and current I, an equivalent-circuit representation can be drawn:
⎩⎨⎧
ε+=
−=
EeSDeEScTS
E
F
jωX
V
I
C S
E 1 / k
l V eA
l jωX eA
l
l
A
F, X
V
I
⎪⎪⎩
⎪⎪⎨
⎧
ω+ω=
−=⇒
⎪⎪⎩
⎪⎪⎨
⎧
ε+=
−=
VCjXjl
eAI
Vl
eAXkF
VlAX
leAQ
Vl
eAXlAcF
S
E
S
E
F
jωX
V
I
C S
E 1 / k
α : 1
l eA l
α =
* DC-responding ideal transformer
*
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
⎪⎪⎩
⎪⎪⎨
⎧
ω+ω=
−=
VCjXjl
eAI
Vl
eAXkF
S
E
V
I
C S
Electrical capacitor
F
jωX E 1 / k
Mechanical spring
F
jωX E 1 / k V
I
C
S
α : 1
Piezoelectric element! Spring constant k(capacitance C) depends on electrical (mechanical) boundary conditions
Spring constant:EDE kkeh
lAk
XF
>=+=EkXF
=Electrically shorted
Electrically opened
Capacitance:STS CCed
lAC
VjI
>=+=ω
SCVj
I=
ωMechanically clamped
Mechanically free
Piezoelectricity Modeling
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Electro-Mechanical Coupling
The energy transfer between the EM domains can be expressed by the electromechanical coupling factor κ:
E
M
M
E
)energysupplied ()energystored (
)energysupplied ()energystored (2 ==κ
F
jωX E 1 / k V
I
C
S
α : 1
By reflecting the corresponding impedance through the transformer ports it results:
TESDSE sd
ce
Ck ε=
ε=
+αα
=κ22
2
22
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Power Conversion from Vibrationsvibrating structure x
A vibrating structure is assumed to move with dynamic displacement x(t)with respect to a fixed reference
vibrating structure x
piezoelectric element
V I
m
A seismic equipment is used to convert the displacement x into an inertia force acting on the proof mass mThis in turn causes a relative displacement y(t) between the structure and the proof mass generating a stress in the piezo
vibrating structure
m
k r z
x
y
piezo
Z L A lumped-element model can be used to describe the system around resonance
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Piezoelectric Power Conversion
vibrating structure
m
k r z
x
y
piezo
Z L jωY
E 1 / k
V
I C
S
α : 1
m
F y r
1 / k
Z L F y mX ω 2 = -
In general, a maximum exists to the power that can be extracted by an ideal converterThis power limit occurs at resonance and for a converter with a purely resistive mechanical impedance adapted to r:
ram
rXmP x
88
2222
lim ==&&
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Piezoelectric Power Conversion
vibrating structure
m
k r z
x
y
piezo
Z L jωY
E 1 / k
V
I C
S
α : 1
m
F y r
1 / k
Z L F y mX ω 2 = -
r
at resonance
In general, a maximum exists to the power that can be extracted by an ideal converterThis power limit occurs at resonance and for a converter with a purely resistive mechanical impedance adapted to r:
ram
rXmP x
88
2222
lim ==&& Same results as in:
C.B. Williams, R.B. Yates,, Sens. Actuat. A 52, 8-11 (1996).
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Piezoelectric Power Conversion
vibrating structure
m
k r z
x
y
piezo
Z L jωY
E 1 / k
V
I C
S
α : 1
m
F y r
1 / k
Z L F y mX ω 2 = -
Assuming ZL = R, the transfer function between Fy and Y is:
[ ]ES
S
y kkrjmRCjRjRCj
FY
++ω+ω−ω++αωω+
=22 )1(
1
[ ]ESyy kkrjmRCjRj
jYI
FY
FI
++ω+ω−ω++αωωα
==22 )1(
The transfer function between Fy and I is then:
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010R.D’hulst, J.Driesen, IEEE, 2556-2562 (2008).
[ ]
2
22
22
)1(22 ES
yE kkrjmRCjRj
jFRIRP
++ω+ω−ω++αωωα
==
The electrical power PE on a resistive load R is:
Popt is a function of frequency that maximizes at about the “short-circuit” natural frequency:
mkk E
sc+
=ω
PE is a function of R that maximizes to Popt at the optimal resistive load Ropt
Popt tends to Plim with increasing the electromechanical coupling factor κ
Piezoelectric Power Conversion
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Piezoelectric Power Conversion
vibrating structure
m
k r z
x
y
piezo
Z L jωY
E 1 / k
V
I C
S
α : 1
m
F y r
1 / k
Z L F y mX ω 2 = -
The energy balance gives:
dtyVdtyrykkymdtyF Ey &&&& ∫∫∫ α++++= 222 )(
21
21
The transferred energy is in turn:
dtVIVCdtyV S ∫∫ +=α 2
21
&
Elastic energy
Kinetic energy
Dissipated energy
Transferred energy
Electrostatic energy
Load energy
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
8/7/2010
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Mechanical Energy from Vibrations
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nanoscale Energy ConvertersA single piezoelectric nanowire of BaTiO3excited by vibrations generates current
M.F. Yu et al., ScienceDaily, 28 September 2007.
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nanoscale Energy ConvertersPiezoelectric nanowires of ZnO deflected by an AFM tip or excited by ultrasound waves generate current
Z.L. Wang et al., SPIE Newsroom, 25 March 2008.
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nanoscale Energy Converters
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nanoscale Energy Converters
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Microscale Energy ConvertersPiezoelectric MEMS under typical excitations generate in the order of 1 µW
D. Shen et al., Sens. Actuat. A 154, 103-108 (2009). D. Jeon et al., Sens. Actuat. A 122, 16-22 (2005).
Resonant frequency = 13.9 kHz.Resonant frequency = 184 Hz.
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Application to TPMSNext generation Tire-Pressure Monitor Systems (TPMS) will dismiss batteries and rely on energy harvesting MEMS converters can find their way in the field
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Macroscale Energy Converters:commercial devices
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
0.0
0.2
0.4
0.6
0.8
1.0
0 50 100 150 200f [Hz]
acce
lera
tion
[g]
L
T
W
W = 15mmL = 40mmT = 500µm
PZT: Piezokeramika 856d33 = 590pC/Nd31 = -260pC/Nεr = 4000
CP=151pF RP=363MΩ (A = 13.6V)
Resistive load RL
Capacitive load CL
02468
101214
0 1000 2000 3000 4000CL [pF]
VL
[V]
ComputedExperimental
0
0.4
0.8
1.2
1.6
2
0 1000 2000 3000 4000CL [pF]
PL
[ µW
]
ComputedExperimental
0
0.5
1
1.5
2
2.5
0 20 40 60 80RL (MΩ)
PL
[ µW
]
ComputedExperimental
0
2
4
6
8
10
12
0 20 40 60 80RL [MΩ]
VL
[V]
ComputedExperimental
PIEZOELECTRIC LAYER
V i BEAM
F u
Macroscale Energy Converter
M.Ferrari et al., IEEE Trans. Instrum. Meas. 55, 2096-2101 (2006).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
W
LC
LP
W = 5 mmLC = 35 mmLP = 30 mm
L
W
W = 18 mmL = 31 mmFilm Thickness = 125 µm
Film Properties
parameter BULK CERAMIC THICK FILM rel. dielectric const. εΤ/εo 4100 100 ± 10density ρ [g/cm3] 7.5 4 ± 0.1
Alumina substrate Harmonic steel substrate
-3
-2
-1
0
1
2
3
-15 -10 -5 0 5 10 15E [MV/m]
D [ µ
C/c
m2 ] -15
0
15
0 5 10 15 20time [ms]
E [M
V/m
]
@ room temperature
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Limitations with Resonant Converters
This is problematic to guarantee with frequency-varying vibrations and is considerably sub-optimal for wideband noise frequency f 0
frequency f 0
Lowering the converter quality factor increases the bandwidth, but worsens the peak response
Best harvesting effectiveness is when the converter operates at mechanical resonance
frequency f 0
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Frequency Up-ConversionMechanical methods have been proposed to up-shift the vibration frequency where the converter is more responsive
D.G. Lee et al., Proc. Transducers & Eurosensors ‘07, 871-674 (2007).
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Frequency TuningAn adjustable axial tension changes the beam resonant frequency
The method is not self adaptiveElectrical automatic tuning can be used, but this requires extra energy
C. Eichhorn, F. Goldschmidtboeing, P. Woias, Proc. PowerMEMS 2008+microEMS2008 (2008).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
MultiFrequency Converter ArrayMultiple converters combined to obtain a wider equivalent bandwidth:
-80
-70
-60
-50
-40
-30
-20
-10
0
0 100 200 300 400f [Hz]
Vo/V
i [dB
]
3 1 2
MFCA on the vibration exciter (shaker).
500 ? m500 ? m500 ? m500 µm
Silicon MEMS with PZT films:Design: University of BresciaFabrication: CNM, Barcelona, SpainIn collaboration with:
M. Ferrari et al., Sens. Actuat. A 142, 329-335 (2008).
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Multi-Frequency Converter ArrayMEMS Implementation
PZT low-curing-temperature filmIDT electrodes (d33 mode)Embedded piezoresistors
M.Guizzetti, PhD Thesis, University of Brescia (2010).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Multiple-Converter System Multiple converters are coupled into a single structure
Z. Chew, L. Li, Sens. Actuat. A 162, 62-92 (2010).
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Nonlinear Approach: TheoryBistability is exploited to amplify displacement induced by random vibrations due to stochastic resonance
M. Ferrari et al., Sens. Actuat. A, in press.
For decreasing values of d:Quasi linearityNonlinearity Bistability
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nonlinear Approach: ExperimentBimorph cantilever beam fabricated with:
Stainless steelLow-curing-temperature PZT films
M. Ferrari et al., Sens. Actuat. A, in press.
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Nonlinear Approach: ResultsBehaviour in agreement with theory:
M. Ferrari et al., Sens. Actuat. A, in press.
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Nonlinear Single-Magnet ConverterA ferromagnetic substrate is coupled to a fixed magnet
M. Ferrari et al., Eurosensors 2010 and Procedia Engineering, in press.
-8-7-6-5-4-3-2-1012
14 14.2 14.4 14.6 14.8 15Time [s]
Tip
disp
lace
men
t x [m
m]
-3-2-101234567
Out
put v
olta
ge V
P [V
]Stable states
x d
Permanentmagnet
Input mechanical excitation
N S
VP
PZT film
FA
FAh
Ferromagnetic cantilever
t
Fel
decreasing d
3xxFAv βα −= kxFel −= 42
42)()( xxkxU βα
−−
=
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Average power into a resistive load RL:Sinusoidal regime at f0
Power Supplied to a Resistive Load
The power spectral density SVP( f ), commonly used as an indicator of signal power, is not sufficient to describe PThe weighting function H ( f ) should be also considered
Broadband between f1 and f2
∫∫ =π+
π=
2
1
2
1
1)()(121
2)( 22 f
f LV
f
f LLP
LPV df
RfHfSdf
RRfCjRfCjfSP
PP
V P
C P R L
I L
V L
L
Popt
CR
L
P
LP
LP
RVP
RV
RCfjRCfjP
PL 421
2 2
1
22
0
0
0
=⎯⎯⎯ →⎯π+
π=
ω=
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
“Usable” Power in ElectronicsA large power into a resistive load does not necessarily mean a correspondingly high usable power
AC/DC converters, i.e. rectifier circuits, are required They in turn introduce nonidealities and losses, and pose requirements on the voltage levels to operate properly
This is because power into a resistive load is associated to AC voltage (current)Electronic circuits and microsystems usually need DC power supply
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
AC/DC Circuits in Sinusoidal StateAC and DC driving of a resistive load:
AC-driven load
DC-driven load
Synchronized Switch Harvesting on Inductor (SSHI) technique:
D.Guyomar et al., IEEE Trans. on UFFC, 52, 584-595 (2005).
Voltage has the same sign of velocity
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
SSHI for AC load driving:
SSHI for DC load driving:
AC/DC Circuits in Sinusoidal State
D.Guyomar et al., IEEE Trans. on UFFC, 52, 584-595 (2005).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Power comparison under weak EM coupling
AC/DC Circuits in Sinusoidal State
D.Guyomar et al., IEEE Trans. on UFFC, 52, 584-595 (2005).
Power comparison versus the EM coupling
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Intermittent Operation
Surroundings
Energy
CONDITIONING LOADElectrical domain
CONVERSION
CONVERSION STORAGE SWITCHING LOAD
Intermittent operation
If available power is insufficient for continuous supply of the system
Differences with respect to load driven under sinusoidal steady state arise when energy must be accumulated
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
8/7/2010
37
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
RF Receiver
VR+
VR-
VP VC
PiezoelectricConverter
Rectifier andstorage capacitor
Sensing andswitching
Voltage regulator
Cb
RF Transmitter
DC
Autonomous Module with RF LinkThe converted energy is stored and intermittently used to trigger a radio-frequency (RF) transmitter
vibrations
How a sensor can be inserted into the system ? ...considering that:
the power budget is quite restrictivevoltage and current levels are poorly definedsuitable resolution should be granted
! No battery, no internal power sources !
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Autonomous Sensor ModuleThe converted energy is stored and intermittently used to trigger a radio-frequency (RF) transmitter
vibrations
sensor
The sensor (R or C) is inserted into an oscillatorThe oscillator frequency modulates the envelope of the RF carrierThe measurement information is carried in the time domain
RF Receiver
VR+
VR-
VP VC
PiezoelectricConverter
Rectifier andstorage capacitor
Sensing andswitching
Voltage regulator
Cb
Oscillator
RF Transmitter
DC
8/7/2010
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
SSOSC CRR
f)2(
44.1
1 +=
RF Receiver
VR+
VR-
VP VC
PiezoelectricConverter
Rectifier andstorage capacitor
Sensing andswitching
Voltage regulator
Cb
Oscillator
RF Transmitter
DC
vibrationssensor
Resolution: CCkHz
HzS
RT
T °=°
== 023.03.1303σ
Sensitivity: CkHzST °≈ 3.1
Hz10≈σStandard deviation (30 repetitions):
NTC Epcos K164/10k
Thermistor response curve
Autonomous Temperature Sensor
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Autonomous Temperature Sensor
Piezo bimorphSignal conditioning and RF transmission
Energy conditioning and storage
Piezoelectric vibration-powered module for temperature sensing and transmission of the reading over a RF link
vibrations
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Autonomous Multi-Sensor ModuleThe piezo harvester powers a module comprising 2 sensorsEnergy is sequentially switched between the sensorsSignals are transmitted in time multiplexing
Cb
RF Transmitter
VC
Piezoelectric converter
Rectifier and storage capacitor
Sensing and switching
Voltage regulator
Mechanical Vibrations
SENSOR 2 Impedance Controlled Oscillator 2
SENSOR 1 Monostable
DC
RF Receiver
Impedance Controlled Oscillator 1
SPDT switch
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
The piezo harvester powers a module comprising 2 sensorsEnergy is sequentially switched between the sensorsSignals are transmitted in time multiplexing
Cb
RF Transmitter
VC
Piezoelectric converter
Rectifier and storage capacitor
Sensing and switching
Voltage regulator
Mechanical Vibrations
SENSOR 2 Impedance Controlled Oscillator 2
SENSOR 1 Monostable
DC
RF Receiver
Impedance Controlled Oscillator 1
SPDT switch
0
1
2
3
4
5
6
7
8
0 2 4 6 8 10
Time [ms]
Vc,V
RX
[V]
-1.6
-1.3
-1
-0.7
-0.4
-0.1
0.2
0.5
0.8
A.U
.
Autonomous Multi-Sensor Module
A digital ID-code can also be transmitted for module tagging and tracking
M. Ferrari et al., Smart Mater. Struct., 18, 085023 (2009).
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Multi-Frequency Converter ArrayMultiple differently-tuned converters combined to obtain a wider equivalent bandwidth:
Cb
C
C
C
Rp1
Cp1
D
D
D
D
D
D
Rp3
Cp3
Rp2
Cp2
Vp2
Vp1
Vp3
D1
D2
D3
V1
V2
V3
-80
-70
-60
-50
-40
-30
-20
-10
0
0 100 200 300 400f [Hz]
Vo/V
i [dB
]
31 2
Measured frequency response.
m3
m2
m1 V2
V3
Conductive base
V1
M. Ferrari et al., Sens. Actuat. A 142, 329-335 (2008).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Multi-Frequency Converter Array:experimental results
Wideband excitation:
0
5
10
15
20
25
0 10 20 30 40t [s]
V Cb
[V] 0
0.5
1
1 2 3Cantilever
3
1
ALL
2
fa
fb
-15
-10
-5
0
5
10
0 20 40 60 80 100t [ms]
V [V
]
3
2
1
Measured open circuit voltagesof the three converters.
Measured voltage across the storage capacitor.
M. Ferrari et al., Sens. Actuat. A 142, 329-335 (2008).
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Multi-Frequency Converter Array:experimental results
Wideband excitation:
Mechanical Vibrations
SENSOR
Switched-Supply
Unit
MultiFrequency Converter Array
Impedance-Controlled Oscillator RF Transmitter
VOSC
Measured voltage across the storage capacitor.
0123456789
0 10 20 30t [s]
V Cb [
V]
2 ALL
tswitching
tswitching
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Output Combinations in a MFCAParallel-like combination:
Rectified currents are fed to a single capacitor
m3
m2
m1 V2
V3
Conductive base
V1
I1 ICb
VP1
CP1
RP1 D
D C
VP2 D
D C
VP3 D
D C
Cb
CP2
RP2
CP3
RP3
VCb
V1
V2
V3
I2
I3
M. Ferrari et al., Proc. SENSORDEVICES-2010, (2010).
8/7/2010
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V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Output Combinations in a MFCASeries-like combination:
Rectified voltages on different capacitors are summed
m3
m2
m1 V2
V3
Conductive base
V1
VP1
CP1
RP1 D
D C
VP2 D
D C
VP3 D
D C
Cb2
CP2
RP2
CP3
RP3 Cb3
Cb1
VCb
V1
V2
V3
VCb1
VCb2
VCb3
M. Ferrari et al., Proc. SENSORDEVICES-2010, (2010).
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Output Combinations in a MFCAExperimental results:
M. Ferrari et al., Proc. SENSORDEVICES-2010, (2010).
Converter 1 Converter 2 Converter 3
VP (V
)
Series-like configuration
Parallel-like configuration
The series-like configuration reaches the threshold to trigger the RF transmissionIt is especially suitable for arrays of low-voltage MEMS converters
8/7/2010
43
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
ContentsIntroductionPiezoelectric effect for energy harvestingExamples of piezoelectric energy harvestersFrom “raw” harvested energy to “usable” power supplyPrototypes of battery-less autonomous sensor modulesConclusions
V.Ferrari Summer School: Energy Harvesting at micro and nanoscale, Aug. 1-6, 2010
Final CommentsEnergy harvesting for sensors is a fast-growing area evolving from gadgets to enabling technology in such fields as:
Industrial control and automationTransport, automotive, avionicsPower plants & distributionStructural monitoringMedical and healthcareSecurity and military
University of Brescia is active in the field with: Applied research programsProjects in cooperation with industrial Partners
Università di Brescia:Acknowledgments
Michele GuizzettiDaniele MarioliEmanuele TonoliStefano Zaiba
Marco BaùSimone DalolaMarco DemoriMarco Ferrari