mems vibration energy harvesting applications - uc … vibration energy harvesting applications...
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MEMS Vibration Energy Harvesting Applications
Lindsay Miller, Dr. Beth Reilly, Romy Fain, Prof. Paul Wright
We have developed energy harvesters:
• MEMS fabricated• Low resonance frequency
• Produced 22 mVrms voltage output from HVAC duct vibration
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Wireless sensor nodesInput: vibrations
Output: send signal
Load (sensor, radio)
Regulator
Energy Harvester
Power Conditioning Circuitry
Storage Capacitor Rechargeable Battery
Gen 2: UCB pico cube, BWRC
Gen 1: Mica2
Sensor, Radio, Power Supply
Gen 3:
http://berkeley.edu/news/media/releases/2002/08/05_snsor.html - from Intel Research Lab at Berkeley
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Piezoelectrics Background
Washing machine vibrations: 85 Hz, 0.341 g
Piezoelectric materials produce voltage when deformed
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Humidity sensors
Wireless sensor network in building
Image: M. Seeman, presentation on Feb 20, 2009
• Thousands of nodes • Sensors are low power• No access to wall power
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Energy harvesting for price indicators
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How much energy is in vibrations?
• 200 µW/cm3 for meso scale device driven by ambient vibrations
• 5 µW/cm3 goal in order to power radio
• 0.10 µW/cm3 current MEMS prototype capability when driven by ambient vibrations
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Energy harvesting for current sensor
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Vibration harvester preliminary results
Dies are 1.3 cm square
Physical integration of printed capacitor & energy harvester
The beam output signal is ~22 mVrms at ~30 Hz
Voltage output from beam excited by an HVAC duct
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In summary
• This harvested energy can be used to – Power price indicators on appliances– Power current sensors
• We have developed energy harvesters: – MEMS fabricated– Low resonance frequency– Produced 22 mVrms when mounted on HVAC duct
Thank you. Questions?
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Frequency
Voltage output shows 31 Hz resonance frequency
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Energy harvesting for industrial sensors
Photo credit: Kapp Technologies external gear profile grinding machine
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Vibration Harvester Cost Estimate
• In 1960 1 transistor cost $1Now 1 million transistors cost $1
• Current cost ~ $5/die (6” wafer)
• Expected costY =a X-b =($5/part)(1 mil parts)^(-.2)Y = < $0.50/die after 1 million made
Yelle, L.E. (1979) "The Learning Curve: Historical Review and Comprehensive Survey", Decision Sciences Vol. 10, pp. 302 – 328. http://www.ifm.eng.cam.ac.uk/csp/summaries/learningcurve.html and http://www.nrel.gov/docs/fy06osti/39904.pdf
20% Progress Rates
Solar Photovoltaic Cells
Gas and Wind Turbines
Airframe Manufacture
• Volume potentialMillions of homes in CA~100 million devices in the US