vibration energy harvesting

Characteristics of Various Vibration Sources Vibrations to Electricity Conversion Methods Work Done Results

Mems Based Energy Harvesting

Guided byDr. M.R. BaijuProfessorDept. of ECECET

Presented byVISAKH.V

M4 AEI,ROLL NO:12

Energy Harvesting College of Engineering, Trivandrum


Overview

1 Characteristics of Various Vibration Sources

2 Vibrations to Electricity Conversion MethodsPiezoelectric Power Conversion

3 Work Done

4 ResultsModal AnalysisTip displacementVoltage Output



Characteristics of Various Vibration Sources

According to the study only the first 500 Hz of the spectra is important.

First, there is a sharp peak in magnitude at a fairly low frequency with a few higherfrequency harmonics.

Another observation is that the fundamental vibration frequency for almost allsources is between 70 and 125 Hz.



Vibration to Electricity Conversion Model

Figure: Generic vibration converter



Vibrations to Electricity Conversion Methods

There are mainly three main methods for converting the energy from vibrations toelectrical energy. They are

Electromagnetic Power Conversion

Elecrostatic Power Conversion

Piezoelectric Power Conversion





The constitutive equations for a piezoelectric material are given in equations 1 and 2 .

δ =σ

Y+ dE (1)

D = εE + dσ (2)

where:δ is mechanical strainσ is mechanical stressY is the modulus of elasticity (Young’s Modulus)d is the piezoelectric strain coefficientE is the electric fieldD is the electrical displacement (charge density)ε is the dielectric constant of the piezoelectric material




Comparison of Various EH Methods

Figure: Comparison



Energy Harvester Structure

Figure: Energy Harvester



Layout

Figure: Energy Harvester



Process Flow

Figure: Anchor and Proofmass

Figure: Substrate Mask



Figure: Thin layer of Silicon deposition

Figure: Mask for thin Silicon layer



Figure: SiO2 deposition

Figure: Mask for SiO2 layer



Figure: Aluminium Lower Electrode deposition

Figure: Mask for Lower Electrode



Figure: Piezoelectric(PZT) deposition

Figure: Mask for PZT deposition



Figure: Upper Electrode(Platinum deposition)

Figure: Mask for Upper Electrode



Meshing

The entire region is partitioned into two.

Meshing element used is Manhattan bricks

Mesh size in beam region: 20um-4um-1um

Mesh size in other parts: 20um-20um-20um

Figure: Meshed Model



Modal Analysis

Modal Analysis

Figure: Boundary Condition



Modal Analysis

Figure: Results



Tip displacement

Tip Displacement

Figure: Boundary Condtition



Tip displacement

Figure: Acceleration Input



Tip displacement

Figure: Tip displacement at 1g acceleration



Voltage Output

Voltage Output




Voltage Output




Voltage Output

Figure: Voltage Output at 1g acceleration



Voltage Output

Report Overview

Abstract

Introduction to Mems

Energy HarvestingPiezoelectric Energy Harvesting

About CoventorwareDesigned StructureProcess FlowMeshed Model

Simulation ResultsModal AnalysisTip DisplacementVoltage Output

Conclusion



Voltage Output

THANK YOU



Voltage Output

P. D. Mitcheson, E. M. Yeatman, G. Rao, A. S. Holmes, and T. C. Green, “Energyharvesting from human and machine motion for wireless electronic devices,”vol. 96, no. 9. IEEE Proceedings, September 2008.

S. J. Roundy, “Energy scavenging for wireless sensor nodes with a focus onvibration to electricity conversion,” Ph.D. dissertation, THE UNIVERSITY OFCALIFORNIA, BERKELEY, 2003.

C. B. Williams and R. B. Yates, “Analysis of a microelectric generator formicrosystems.” Transducers 95 / Eurosensors , 1995, pp. 369 – 372.

R. Amritharajah and A. P. Chandrakasan, “Self-powered signal processing usingvibration-based power generation,” IEEE Journal of Solid State Circuits, vol. 33,pp. 687–695, 1998.

P. D. Mitcheson, T. Sterken, C. He, M. Kiziroglou, E. M. Yeatman, and R. Puers,“Electrostatic microgenerators,” Control and Measurements, vol. 41, pp. 114–119,May 2008.

B. Morgan and R. Ghodssi, “Vertically-shaped tunable mems resonators,” JMEMS,vol. 17, pp. 85–92, February 2008.



Voltage Output

E. S. Leland and P. K. Wright, “Resonance tuning of piezoelectric vibration energyscavenging generators using compressive axial preload,” Smart Materials andStructures, vol. 15, pp. 1413–1420, September 2006.

S. Shahruz, “Design of mechanical band-pass filters for energy scavenging,”Sound Vib., vol. 292, pp. 987–998, May 2006.

A. Hajati, S. P. Bathurst, H. J. Lee, and S. G. Kim, “Design and fabrication of anonlinear resonator for ultra wide-bandwidth energy harvesting applications.”Cancun, Mexico: IEEE MEMS CONFERENCE, January 2011.

Z. Wang, S. Matova, R. Elfrink, M. Jambunathan, C. de Nooijer, R. van Schaijk,and R. J. M. Vullers, “A piezoelectric vibration harvester based on clamped guidedbeams.” IEEE MEMS CONFERENCE, February 2012.

Using Coventorware. COVENTOR, 2012, pp. 11–16, user Manual forCoventorWare.



Voltage Output

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vibration energy harvesting

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