Micro/Nano Technology

Center Orientation and

Safety TrainingUniversity of Louisville

This Orientation

• Is meant to be an introduction to the manual

• Is going to teach you basic rules and regulations,

preventative safety measures, and how to respond to

safety incidences.

• Will show you where to get more information about

topics covered in this presentation

The Manual

• Has information about general procedures, rules for

working in the cleanroom and safety procedures in the

cleanroom.

• Should answer most of your questions. If you can’t

find something or have a question let us know!

Responsibilities

• As a cleanroom user, you must follow all of the rules

listed in the manual.

• If you fail to follow these rules, consequences will

happen – including the potential loss of cleanroom

access.

GENERAL RULES AND

REGULATIONS

Cleanroom Access To enter the cleanroom you need to complete:

General Lab Safety Training (DEHS)

Hazardous Waste Safety Training (DEHS)

Cleanroom Access Training followed by a Safety Quiz you

MUST pass

Users must provide speedtype number and complete a

process review with a staff member.

Process Specific Training (Provided by Cleanroom Staff)

○ You must train for specific processes and machines –

instructions on how to set up training sessions are on page 8 in

the manual.

Cleanroom Safety

Only qualified individuals may enter the cleanroom.

All equipment usage must be logged.

In order to use equipment you must be a certified user.

Review Material Safety Data Sheets (MSDS) for any

chemicals you may use.

Check any item used (especially gowns and PPE) for

contamination before use.

Do not bring in nonessential items.

NEVER WORK ALONE!

Cleanroom Integrity

No food, drinks, smoking, chewing gum or pencils.

Only necessary items are allowed in the cleanroom.

Do not enter the HPM room or Service Corridor.

Clean up after yourself.

Appropriate Attire No makeup.

Contacts can be a safety concern.

Full length pants must be worn at all times.

Only closed-toed shoes are allowed.

No muddy shoes.

Bunny suits, safety glasses, boots, hair nets,

mustache/beard nets and gloves must be worn at all

times.

Hours of Operation

• Open 24/7

• Staff hours are 9AM-5PM, Monday through Friday

(with the exception of UofL holidays).

• Remember, you can never work alone!

Laundry

• Wash gowns once every two weeks.

• Wash gowns when contaminated.

• To have gown washed, place in laundry hamper in

gowning room and fill out log on wall. Make sure to

note any contamination.

PREVENTATIVE SAFETY

TRAINING

Basic Gowning Procedure• Put on blue shoe covers before

entering the cleanroom

• Put on a bouffant cap (hair net) and

beard cover if necessary

• Find an appropriate sized bunny

suit off the rack

• Find an appropriate sized pair of

boots (color coded according to

foot size)

• Put on safety glasses and gloves

located near the door

Emergency Equipment

and Locations in the

Cleanroom• Section 10 of the manual (page 17) lists important

safety equipment that you will need to be familiar with.

• This equipment will be referenced throughout the rest

of the presentation and you will be required to label

most of it on your quiz.

Personal Protective

Equipment

For personal protection against chemical spills.

These are chemical resistant – not chemical proof.

Always wear when working with chemicals.

Always inspect Personal Protective Equipment before and after use. Check for holes, stains and other indicators of contamination.

Do not wear PPE outside of the wet bay.

Users need to have Wet Bench training before they are allowed to process in the Wet Etch Bay

How to Wear Personal Protective

Equipment

1. Inspect Apron 2. Tie Apron 3. Use 10% IPA in

Water on towel to

clean Face Shield

4. Put on Face

Shield

5. Adjust Face

Shield

6. Put on

Chemical

Resistant Gloves

over apron sleeves

OR

7. Double Glove

with Nitrile

Gloves.

How to Wear Personal Protective

Equipment

1. Check gloves,

apron and face

shield for

contamination. If

not easily cleaned,

throw away.

2. Wash gloves

3. Dry Gloves

using a towel

4. Remove and

Hang Face Shield

5. Remove and

Hang Apron

Material Safety Data

Sheets

Also known as MSDS’s.

You must thoroughly review a chemical’s MSDS

before using that chemical.

Copies of MSDS’s for all chemicals can be found in:

The Gowning Room

The Loading Dock

The Back Corridor

Online

Rules for Working with

Chemicals (pages 28-29)

MSDS will give you valuable information when

working with chemicals

Know if the chemicals you use must be used in glass

or plastic beakers.

Always wear appropriate protective equipment.

Never wear PPE outside of the wet bench area.

Always stand when working at wet benches.

Only work with chemicals in their designated areas.

Rules for Working with

Chemicals

Assume any liquid is potentially dangerous if you are

not sure what it is.

Only use dedicated tanks/baths as they are labeled.

Uncap only one bottle at a time. Pour chemicals

slowly.

Keep gloves dry and clean.

When using hot plates:

Only heat Pyrex beakers

Constantly monitor temperature

Rules for Working with

Chemicals

• When mixing chemicals:

• Pour acids into water.

• Do not mix acids and solvents.

• Do not mix halogenated solvents with non-halogenated

solvents.

• Label all mixtures.

• Do not leave chemicals unattended without being

clearly labeled.

• Do not pour chemicals back into storage bottle.

Rules for Working with

Chemicals

• Always put the cap back on securely.

• Define new bottles, including Hazardous Waste bottles.

• Clean up your work area.

• Place empty bottles on the bottom shelf of the chemical

cabinet it came from.

• Make sure all PPE is clean and dry before returning it

to storage areas.

Rules for Working with

Chemicals

• HAZARDOUS SOLID WASTE CANNOT BE

THROWN IN TRASH

• Wipes, cotton swabs, etc must be placed in Hazardous

waste bucket if it has been exposed to solvents or

photoresists

• Common solvents include: acetone, methanol, IPA, or

MF319

• Hazardous waste buckets are located in wet etch and

photolithography bays

RESPONDING TO SAFETY

INCIDENTS

Fire Extinguisher / Safety

Shower / Eye Wash Station

• This station is located at the end of

every bay

• Pull down the handle to engage the

safety shower

• Pull out the shelf to engage the eye

wash station

Responding to Safety

Incidents

• The following slides detail basic steps to follow in case

of emergency

• An emergency poster is placed in the gowning room

for quick reference.

• Two important phone numbers:

• 911 – Emergency Services

• 502-589-8222 – Poison Control

Fire or Carbon Dioxide Alarm

You Hear: The Fire Alarm

You See: Flashing White Lights

You DO: Evacuate the Building Immediately – Meet

in Lutz Hall Lobby

Warn others as you exit

Do not attempt to de-gown

Do not try to finish an experiment or figure out why

an alarm is sounding

HAZMAT Alarm

You Hear: The HAZMAT Alarm

You See: Flashing Blue Lights

You DO: Evacuate the Building Immediately – Meet

in Lutz Hall Lobby

Warn others as you exit

Do not attempt to de-gown

Do not try to finish an experiment or figure out why

the alarm is sounding

Fire and HAZMAT Alarm

You Hear: The Fire Alarm AND the HAZMAT Alarm

You See: Flashing White and Blue Lights

You DO: Evacuate the Building Immediately – Meet in Lutz Hall Lobby

Warn others as you exit

Do not attempt to de-gown

Do not try to finish an experiment or figure out why the alarm is sounding

Minor Chemical Spill on a

Person

Minor chemical spills are not life threatening, are not

a health hazard and do not pose long-term health risks

or risks of disfigurement.

Call Poison Control and Staff.

Place affected skin under running water for 15

minutes.

Remove any contaminated clothes or jewelry.

If ER trip is needed, call 911 and bring MSDS with

you.

Major Chemical Spill on a

Person

Major spills are immediately life threatening, a health

hazard or pose long-term health risks or risk of

disfigurement.

Call 911 and demand an ambulance.

Get under a running safety shower.

Remove all contaminated garments and jewelry.

Bring MSDS with you to the ER.

Flammable Solids on Skin

• Brush off as much as possible.

• Treat as small spill on skin.

• Check the MSDS before using any chemical – some

flammable solids react with water!

Chemical Splash in Eyes

• Have a buddy call 911.

• If you are wearing contacts – take them out!

• Flush eyes in eyewash fountain for 15 minutes.

• Go to ER and bring MSDS.

Safety Buddies

• If you see someone who is in distress, you

automatically become their safety buddy.

• Call 911.

• Be sure you are wearing proper protective apparel

before helping the victim.

• Take MSDS to the ER.

First Aid for Other (Minor)

Incidents

Chemical Inhalation

Check area for safety.

Close open containers.

Move victim to safety.

Call 911.

Chemical Ingestion

Go to ER or call Poison Control.

First Aid for Other (Minor)

Incidents Thermal Burn

Immerse burned area in cold water.

Cover with sterile dressing.

Call 911 if severe.

Bleeding Place clean pad and pressure on the wound.

If excessive get medical attention.

Clothing Fire Douse victim with safety shower or smother with fire

blanket.

If unsure - CALL 911!

Hydrofluoric Acid (HF)

HF is a very dangerous chemical.

If contact occurs:

Immediately rinse affected skin with water.

Remove all jewelry or clothing exposed to HF.

Have a buddy CALL 911.

After washing for 5 minutes, do not dry the skin.

Cover entire affected area with calcium gluconate gel (Calgonate).

Continuously apply fresh gel while on the way to the ER and while waiting.

HF in Eyes

• Have a buddy call 911 and request an ambulance

• Flush eyes at eyewash station for 5 minutes

• After 5 minutes, switch to calcium gluconate

(Calgonate) eyewash

• Continue flushing until told to stop in ER

• Get MSDS

Chemical Spills Simple Spill:

Does not spread rapidly

Is not toxic

Does not endanger people or property (except by direct contact)

Does not endanger environment outside of building

Less than ½ a gallon of liquid

Large Spill Spreads rapidly

Toxic

Endangers people or property

Endangers outside environment

More than ½ a gallon of liquid

Any amount of HF

Simple Spill

• Check self for contamination.

• Check bench and floor for contamination.

• Label the spill.

• Contact cleanroom staff for supervision of cleanup.

Large Spill

• Check self for contamination.

• Push HAZMAT alarm.

• Evacuate the cleanroom.

• Call 911.

Mercury Spills

• If a Mercury Lamp explodes:

• Activate the HAZMAT alarm and evacuate the cleanroom.

• Warn others as you exit.

• Do not attempt to de-gown.

• Do not try to finish an experiment.

• Call 911 and alert them if anyone is injured.

EQUIPMENT USAGE

Facility Online

Management• View user applications

• Arrange training sessions

• Activate user accounts

• Manage instrument schedule

• Communicate with users and supervisors

• Generate financial and usage reports

• Create an account at www.louisville.edu/micronano/users

FOM Registration

FOM Reservation

More Information

We encourage you to read through the manual again

at your own pace.

Also, check out our website for more information:

http://louisville.edu/micronano/users/lab-safety

You can access MSDS’s, SOP’s, copies of the safety quiz

and safety manual, request equipment training and new

chemicals and schedule use of equipment.

So… When do I get my

access?

• Take the cleanroom tour.

• Read your manual on your own.

• Complete your safety quiz and return it to 232.

• Make sure to provide your advisor’s speedtype on your

quiz!

• Go through a process review with a staff member.