cleanroom safety orientation uofl micro/nano technology presents

CLEANROOM SAFETY ORIENTATIONCLEANROOM SAFETY ORIENTATION

UofL Micro/Nano Technology presentsUofL Micro/Nano Technology presentsUofL Micro/Nano Technology presentsUofL Micro/Nano Technology presents

INTRODUCTIONINTRODUCTIONAll prospective cleanroom users are required to complete the “Cleanroom Access Training”program consisting of passing each of the following:

1. “General Chemical Lab Safety Training” provided by University Department of Environmental Health and Safety (DEHS). Info available at http://louisville.edu/admin/dehs/LSM/generaltrain.htm

2. “Hazardous Waste Safety Training” provided by University DEHS. Info available online at http://louisville.edu/admin/dehs/haztrain.htm

3. “Cleanroom Orientation” provided by University Cleanroom Staff

4. “Process Specific Training” provided by University Cleanroom Staff

Orientation PurposeOrientation Purpose1. To provide Cleanroom users a background understanding of

the location and how the laboratory operates

2. To cover facility rules and safety procedures

3. To bring user awareness of the potential hazards involved with working in a Cleanroom environment.

4. To educate new users how to avoid accidents and respond to emergency situations.

General Rules and RestrictionsGeneral Rules and RestrictionsThe following Rules are to be observed by all persons qualified to work

in the Microfabrication Laboratory:1. Only Individual qualified through the Cleanroom Access Training

program are allowed to enter the cleanroom.2. No makeup shall be worn inside the cleanroom3. Food and drinks are prohibited in the cleanroom.4. No Smoking is allowed 30 minutes before entering the cleanroom.5. No Chewing Gum allowed in the cleanroom.6. Avoid wearing contacts. Contacts can absorb vapors or trap

chemicals in the space between the lens and the eye. Contacts may thus interfere with flushing the eye with water in case of an accident.

7. Clothing Requirements. Everyone must wear full-length pants, shoes made of leather that completely cover the foot (no sandals, no open-toed shoes).

General Rules and RestrictionsGeneral Rules and Restrictions

8. Only use pens. Pencils are not allowed in the cleanroom.9. Hair nets, shoe covers,safety glasses, mustache/beard nets,

and gloves must be worn at ALL times.10. Nonessential items (tools, books, backpacks etc…) must be

kept outside the lab or in the gowning room lockers.11. Try not to sneeze, cough or breathe directly on a clean

surface or wafer.12. Do not let your skin touch any surface in the cleanroom. Do

not touch your face with your gloved hand. Do not touch the outside of a glove (expect for the wrist edge) with your ungloved hand.

13. Do not enter the service corridor unless there is an emergency evacuation.

14. Always clean up your work area before you leave.

General Rules and RestrictionsGeneral Rules and Restrictions

15. You must have a complete understanding of all the chemicals at the wet benches. Read the went benches SOP before you use them.

16. You must have a complete understanding of equipment operation and become a certified user before you process, read the SOPs and request training sessions @ louisville.edu/research/cleanroom

17. Review the MSDS sheets of chemicals before you use them so you understand the hazards, risks and methods for responding to an incident.

18. ****YOU MUST NEVER WORK ALONE**** You must have a buddy who has been qualified through the Cleanroom Access training program. This person should be qualified to assist you in case of a incident.

Procedures for entering the CleanroomProcedures for entering the Cleanroom

Gowning Procedure

STEP ON STICKY MAT

Blue Shoe Covers

Inside the Cleanroom

STEP ON STIKY MAT

Gloves

White Shoe Covers

Safety Glasses

Beard Cover

Bunny Suit

Hair Cover

STEP ON STICKY MAT

Inside the Gowning Room

Outside the Gowning Room

Procedures for exiting the CleanroomProcedures for exiting the CleanroomGowning Procedure

Outside the Cleanroom

Remove Blue Shoe Covers

STEP ON STICKY MAT

Outside the Gowning Room

STEP ON STICKY MAT

Remove White Shoe Covers

Remove Hair Cover

Remove Bunny Suit

Remove Beard Cover

Remove Safety Glasses

Remove Gloves

STEP ON STICKY MAT

Inside the Gowning Room

Emergency EquipmentEmergency Equipment


Safety Showers Purpose: For chemical

decontamination of a person and their clothing.

Location: On the windowed wall next to the fire extinguishers. (5 total)


Eye Wash Station Purpose: For mitigating a

chemical splash in the eye. Location: In the pull-out

drawer in the wall under the safety shower.


Fire Alarms Use: Lift Cover and pull in

case of a fire if alarm does not start on its own.

Speaker Location: In the gowning room, thermal chase, service corridor and HPM room.

Pulls Location: Outside the gowning room door, in the service corridor by emergency exit, loading dock and BRB lobby.

HAZMAT Alarms Purpose: Toxic Gas

Monitoring System Alarm. Will detect a hazardous concentration of a gas or leak. Lift cover and push if an emergency hazardous material situation arises.

Speakers Location: Gowning room, HPM room, service corridor and inside the cleanroom.

Push Buttons Location: Gowning room, HPM room, service corridor and by exit doors inside the cleanroom.



Carbon Dioxide Alarms Purpose:CO2 fire suppression

system. Use: You must vacate the area

during and after a discharge. Activate in case of a fire contained in a wet bench /spinners hood if alarm does not start on its own.

Location: On the solvent wet benches and hotplate/spinner combo hood (3 total).


Fire Extinguishers Use: For fires smaller than a

waste paper basket by those who are trained to use them.

Location: Along the windowed wall of the cleanroom, in the gowning room, HPM and service corridor.


First Aid Kit Use: For minor injuries and

minor burns pain relief Location: In the gowning room

and wet etch hallway.


MSDS Book Use: All users seeking

information on chemical hazards and precautions.

Location: In the gowning room, HPM and service corridor. You may also access the MSDS library online.


Telephone Use: For contacting help in

case of emergency (Dial 852-6111) or use speed dial

Location: In the gowning room on the table.


Calcium Gluconate Use: For HF Burns Location: In the gowning

room on the table, in the gowning room inside the First Aid Kit, in the wet etch bay on the table by the windowed wall.

Safety EquipmentSafety Equipment

Name: Personal Protective Equipment (PPE).

Purpose: For personal protection against chemical spills.

Use: You must wear the following items (in addition to cleanroom apparel) when working with chemicals:1. Full-sleeved aprons2. Face Shields3. Chemical Resistant gloves

Location: By the wet benches at the wet etch bay and lithography room hanged on the wall.

WARNING: These items are chemical resistant, NOT chemical proof. Do not immerse gloves in chemicals!

Specific Rules When Working with ChemicalsSpecific Rules When Working with Chemicals

1. DO NOT use a chemical without first reading its MSDS.2. Use the dedicated beakers only and label the chemicals and

processes used on the beaker.3. Wear personal protective equipment in addition to required

cleanroom apparel.4. Do not work with acids or bases in the solvent hoods.5. Do not work with solvents in the acid or base hoods.6. Use only one bottle of chemical at a time and store it back in its

chemical cabinet when not in use.7. Do not pour used chemicals back into a new bottle. For

chemical waste disposal rules read the Wet Benches SOP8. Make sure that gloves are clean and dry before transferring

chemicals to or from the bench.

Specific Rules When Working with ChemicalsSpecific Rules When Working with Chemicals

9. Put the cap back on each chemical bottle securely. Clean the outside of the bottle of residual chemicals (clean and dry) before returning to storage.

10. Do not wear safety apparel outside of wet bench areas unless working under emergency or HAZMAT cleanup conditions

11. Make sure that all PPE is clean and dry before returning to storage areas

How to Wear Personal Protective EquipmentHow to Wear Personal Protective Equipment

1.Inspect Apron 2. Tie apron 3. Use 10%IPA in water on a towel to clean face shield

4. Wipe Face Shield

5.Put on Face Shield 6.Adjust Face Shield 7 8. Put on gloves over apron sleeves

How to Remove Protective EquipmentHow to Remove Protective Equipment

1.Wash Gloves 2. Dry gloves using cleanroom wipes.

3. Hang Gloves

4, Remove face shield 5. Hang Face Shield 6. Hang Apron

EMERGENCY RESPONSESEMERGENCY RESPONSES

Emergency Response: Chemical Spill Clean-UpEmergency Response: Chemical Spill Clean-Up

A Minor Spill (excluding HF)A minor spill is one that is not toxic and does not spread rapidly or poses a health, fire or property risk, and is less than 1/2 gallon of liquid.

The lab occupant responsible for the spill is expected to clean up simple spills. Please read the Chemical Spills & Injuries SOP available online at www.louisville.edu/research/cleanroom


A Minor Spill (excluding HF)To clean up minor spills:

1. Wear proper Personal Protective Equipment (PPE) in addition to cleanroom apparel: PPE may include full-sleeved apron, face shield, a respirator and chemical resistant gloves.

2. Review the MSDS sheet for the chemical hazards.Contain spill following instructions listed on the “Chemical Spills and Injuries SOP”.

3. Minor spills may be contained and absorbed using the appropriate absorbents available in the cleanroom. Refer to SOP

4. If unsure how to clean the spill, call a cleanroom staff member and ask your cleanroom buddy to stay by the spill and alert others while you go seek assistance.


A Major SpillA large or toxic spill is a high hazard emergency. A spill is considered hazardous if it is more than a 1/2 gallon of liquid or if it includes any amount of HF. A toxic spill is one that spreads rapidly and poses an immediate health, fire, or property risk.

Push the HAZMAT Alarm Alert others of the need to evacuate the cleanroom DO NOT De-gown Meet cleanroom staff in the Belknap Research Building lobby.

Mercury ReleaseMercury Release

When a high pressure mercury lamp explodes toxic gas is released; this is an extremely high hazardous situation. (Mercury lamps are located in all mask aligners and steppers)

Evacuate the building as quickly as possible and activate a HAZMAT alarm (push blue button) on your way out.

DO NOT try to finish an experiment. DO alert others DO-NOT De-gown Call 852-6111 to send an ambulance if someone is injured. Meet at the designated evacuation spot and inform staff of the

incident.

Emergency Response: Chemical Exposure Emergency Response: Chemical Exposure

For a Minor Chemical Exposure on Skin (Other than HF):

1. Immediately place affected area under running water for 15 minutes.

2. Remove any jewelry or clothes that may contain the residue.

3. After washing DO NOT dry skin.

FOR PERSON HELPING THE VICTIM: 1. Be sure you are wearing appropriate protective apparel

before helping the chemical contact victim.2. Call Poison Control (589-8222) and Cleanroom Staff to

inform them of the incident and ask for advice on how to treat it. Seek medical assistance if recommended.

3. Obtain the MSDS and hand it to the ER team.

For a Major Chemical Exposure on Skin (Other than HF):Definition: This exposure is Life threatening, a health hazard, poses long term health risks or disfigurement. 1. While standing under a safety shower, immediately remove all contaminated clothing, including shoes, undergarments, and jewelry. Be careful not to get any chemicals contaminating the shirt into your eyes. Clothing may be cut off to prevent eye exposure. You should stay under the shower until emergency help arrives.

FOR PERSON HELPING THE VICTIM: 1. Be sure you are wearing appropriate protective apparel before helping the chemical contact victim.2. Call 852-6111 to request an ambulance for the victim 3. Obtain the MSDS and hand it to the ER team.

Emergency Response: Chemical ExposureEmergency Response: Chemical Exposure

For Flammable Solids on Skin: Brush off as much of the solid as possible, then treat as a minor/major liquid spill on skin.

For Chemical Splash In Eyes:1. Flush eyes with eye wash fountain for 15 minutes or until ER ambulance

arrives. 2. While flushing, hold eyelids open with hands and rotate eyeball up, down,

and side to side to ensure all areas are rinsed.

FOR PERSON HELPING THE VICTIM: 1. Be sure you are wearing appropriate protective apparel before helping the

chemical contact victim.2. Help victim get to the eye wash station and activate the eye wash fountain

for him/her. 3. Call 852-6111 to request an ambulance for the victim 4. Get the MSDS and hand it to the ER team.

Emergency Response: Chemical Exposure Emergency Response: Chemical Exposure

Chemical Inhalation: 1. Close containers and attempt to move worker to an area where

fresh air is available.2. Call poison control and seek medical attention if advised by

Poison Control. * In extreme situations resuscitate with rescue breathing, shock prevention treatment (victim lying down, lightly covered to preserve body heat and comforted to reduce anxiety).

3. If symptoms such as headaches, nose or throat irritation, dizziness, or drowsiness persist, seek medical attention.

Emergency Response: Other Incidences Emergency Response: Other Incidences

Chemical Ingestion:Immediately go to the emergency room and/or call the Poison Control Center (589-8222) for advice about poisoning and chemical toxicity. Call for an ambulance if suggested by Poison Control Center.Do not induce vomiting unless directed to do so by a health care provider.

Bleeding: Hold a clean pad directly on the wound and apply hand pressure. If necessary, elevate the bleeding extremity and apply pressure to a pressure point to reduce blood flow.

Emergency Response: Other Incidences Emergency Response: Other Incidences

For an HF Spill On Skin: 1. Immediately place affected area under running water for 2 minutes.2. Remove any jewelry or clothes exposed to HF while rinsing under a safety

shower.3. After washing DO NOT dry skin.4. Apply Calcium Gluconate Gel

FOR PERSON HELPING THE VICTIM: 1. Be sure you are wearing appropriate protective apparel before helping the

chemical contact victim.2. With clean double-gloved hands help the victim cover the entire affected are with

Calcium Gluconate, continuously apply fresh gel while on the way to the ER.3. Call 852-6111 to request an ambulance for the victim and demand a HAZMAT

team be sent to the area. 4. Obtain the MSDS and hand it to the ER team.

Emergency Response: HF Exposure Emergency Response: HF Exposure

If the Fire Alarm Sounds YOU MUST exit the building immediately through the nearest door. DO NOT try to finish an experiment. DO NOT try to figure out why the alarm is sounding. DO NOT attempt to de-gown. DO warn others in you vicinity of the need to evacuate the building. After evacuation all cleanroom users and staff must meet at the

designated evacuation spot, located in the large circular driveway at the southwest corner of the building. (The driveway is located to your right when exiting the building through the main entrance,).

IF the CO2 Alarm Sounds First Pull the CO2 Alarm and evacuate. Also activate the fire alarm on your way out. Treat as a Fire Alarm (Follow all steps described above)

Emergency Response: Fire Alarm Emergency Response: Fire Alarm

Emergency Responses: HAZMAT AlarmsEmergency Responses: HAZMAT Alarms

If the Toxic gas Monitoring System Alarm Sounds (No Fire Alarm) A sounding HAZMAT speaker indicates that exhaust failure or a

chemical gas leak has been detected is not a high enough concentration to cause serious harm. However the alarm should still be taken seriously. If an alarm 1 sounds, there will be blue HAZMAT lights flashing and a horn will be enabled. No fire alarm activation occurs.

If you hear a HAZMAT alarm and not the fire alarm. YOU MUST exit the cleanroom immediately through the nearest

door. DO NOT try to finish an experiment. DO NOT try to figure out why the alarm is sounding. De-gown only if possible DO warn others in you vicinity of the need to evacuate the

cleanroom.


If the Toxic gas Monitoring System Alarm Sounds (No Fire Alarm) (cont.)

After evacuation all cleanroom users and staff must meet at the atrium (BRB lobby)

If the Toxic gas Monitoring System Alarm and the FIRE Alarm Sounds

Both Fire and HAZMAT Alarms sounding indicate a potentially dangerous gas leak or a fire. Treat as a FIRE alarm (follow steps on previous slide)


If the Toxic gas Monitoring System Alarm and the FIRE Alarm Sounds Both Fire and HAZMAT Alarms sounding indicate a potentially

dangerous gas leak or a fire. Treat as a FIRE alarm (follow steps on previous slide)

ResponsibilitiesResponsibilities The procedures and precautions outlined in this presentation are

for the purpose of protecting cleanroom workers and equipment. Anyone found in violation of the aforementioned procedures will suffer consequences, which may include a loss of privileges or even a complete loss of access to the cleanroom. In order to prevent such consequences, it is your responsibility to review the procedure manual accessible @ www.louisville.edu/research/cleanroom (Remember this presentation is just an overview of the Safety Manual)

If you see workers in violation of protocol in the manual, please inform them of their mistake in order to prevent minor or catastrophic accidents from occurring.

When do I get my access?When do I get my access?

Before your safety training is completed you need to:

1. Take the Cleanroom tour

2. Complete a cleanroom layout sketch (to familiarize yourself with different safety features inside cleanroom)

3. Take the Cleanroom Safety Orientation Quiz and return it to your safety trainer (BRB 213) for review. (After passing your Quiz your access will be granted automatically)

THANK YOU!THANK YOU!

Please FAB Safely!Please FAB Safely!

cleanroom safety orientation uofl micro/nano technology presents

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