frt multi sensor metrology for wafer industries semi mil 2012.pdf · the art of metrologytm frt...
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the art of metrologyTM
FRT Multi Sensor Metrology for Wafer Industries
FRT, Fries Research & Technology
…since 1995
the art of metrologyTM
FRT provides a worldwide network for sales and service
FRT stands for reliable technology and premium customer support
Distributors: Around 20 in 18 countries
FRT International Sales and Service Network
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tabletop
fully integrated production tool
Company Introduction FRT‘s Range of Metrology Tools
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FRT MicroScope WLI Lab Metrology Tool
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FRT MicroSpy® Affordable Metrology Tool
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established standard metrology tool
several hundred tools in industrial use
easy to use, high reliability
on site upgradable to TTV setup
on site upgradable to fully automated MHU
measurement according to Semi standards
IR and Film Thickness upgrades optional
adjustable to specific metrology tasks
high performance software and hardware
FRT MicroProf® Semi Automated Metrology Tool
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FRT MicroProf® Wafer Metrology Tool
MicroProf® 200 MHU
Multi Sensor metrology tool
with 200 mm stage and
material handling unit
MicroProf® 300 TTV MHU
Multi Sensor metrology tool with 300 mm
stage, sensor setup for wafer thickness
measurement (TTV), fully automated
SEMI Compliant TTV Measurement
FRT MFE - Metrology for Frontend
Fully automated Multi Sensor metrology
tool with 300 mm stage, bridge tool, class
1 EFEM, SECS/GEM interface, thin wafer
handling optional
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FRT MicroProf® TTV with MHU Fully Automated Material Handling Unit
high throughput, >150 w/h
fully automated
high reliability
sorting capability
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FRT MicroProf® MicroProf® with Thin Wafer Handling
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MEMS Metrology FRT‘s Major Target Industries
One Metrology Tool for All Wafer Tasks !!!
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FRT Multi Sensor Technology Multi Sensor Technology for Flexible Metrology Systems
FRT offers various sensors giving 4 basic combination options:
Multisensor Configuration
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optical measurement,
fast and non contact
down to 6 nm vertical resolution
2 µm lateral resolution
4 kHz measuring frequency 400 nm 540 nm 680 nm blue green red
intensity and wavelength
λ
step height
400 nm 540 nm 680 nm blue green red
I
λ
FRT MicroProf® FRT CWL Sensor Technology
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Data:
Michelson interferometer
85 mm x 85 mm range
170 µm lateral resolution
z-resolution 1.4 nm
image frequency 10 to 30 s/f
FRT MicroProf® FRT Field of View Sensor Technology
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FRT MicroProf® FRT Film Thickness Sensor FTR
Downhill Simplex fit, up to 10 layers
iterative fit with FFT, with one or two variable film thickness values
FFT for thickness bigger 2 µm, 2 layers
database with 40 materials
upgradable
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Applications and Automation Roughness, Topography, Profiles
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Polished side Rough side
FRT MicroProf® TTV Measurements on Wafers
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FRT MicroProf® Acquire Automation XT Software
die layout wizard
define die structure and alignment marks
define sensor and measurement setting
import and export measurement positions
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FRT MicroProf® IR Wafer Thickness Measurement
single side IR measurement
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FRT MicroProf® Nanotopography Measurement
measurement of nanotopography
measurement of dimples
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FRT MicroProf® Measurement of Doped Wafers
up to 150 µm thickness of heavily doped wafers
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TSV measurement
high aspect ratio ( > 1:40)
FRT MicroProf® TSV Measurements
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FRT MicroProf® MEMS Measurements
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FRT Metrology MST / MEMS Measurements
Samples: Danfoss Silicon Power GmbH
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FRT Metrology MST / MEMS Measurements
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FRT MicroProf® Thickness Measurement
measurement of film thickness
interferometry, reflectometry, IR
SU8 measurement
SiO2 on Si
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Company Introduction More than 500 Tools in the Market
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Thank you for your attention!
Headquarters FRT, Fries Research & Technology GmbH Friedrich-Ebert-Strasse 51429 Bergisch Gladbach, Germany Tel.: +49 (0) 2204 - 84 2430 Fax: +49 (0) 2204 - 84 2431 Internet www.frt-gmbh.com E-Mail [email protected]
FRT of America, LLC
1101 South Winchester Blvd.,
Suite L-240
San Jose, CA 95128, USA
Tel. +1 408-261-2632
Fax +1 408-261-1173 Internet www.frtofamerica.com E-Mail [email protected]
FRT Shanghai Co., Ltd.
Room A18, 3rd Floor,
No.475 Fute No. 1 Rd. (W.)
Waigaoqiao Free Trade Zone,
Shanghai, China 200131
Tel +86-21-3876-0907
Fax +86-21-3876-0917 Internet www.frt-china.cn E-Mail [email protected]
FRT Taiwan
2F.-1, No.47, Ln. 223, Sec. 4,
Zhongxiao E. Rd.,
Da-an Dist., Taipei City 106,
Taiwan, Republic Of China
Tel. +886 (0)2 8772 5546
Fax +886 (0)2 8772 5546 Internet www.frt-china.cn E-Mail [email protected]