e data standard hardwar ee hardwar defective simulation figure … · 2002. 7. 3. · experimental...

20
Figure Format Simulation Hardware data Defect-free Defective Hardware data } } } Standard } Waveform 999 nano secs DF#1 DF#2 DF#3 OD#1 OD#2 OD#3 OD#4 STD Pre Post 5V 0 500 0 0 500 0 500 0 500 0 500 0 500 0 500 0 500 0V m i l l i v o l t s 0 10 20 30 40 50 60 70 80 90 100 ICs data ICs

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Page 1: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Fig

ure

For

mat

Sim

ulat

ion

Har

dwar

e da

taD

efec

t-fr

ee

Def

ecti

ve

Har

dwar

e da

ta

} }}Stan

dard

}W

avef

orm

999

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

5V 0500

0 0500

0500

0500

0500

0500

0500

0500

0Vm i l l i v o l t s

010

2030

4050

6070

8090

100

ICs

data

ICs

Page 2: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

❏E

xper

imen

ts to

det

erm

ine

rela

tive

cont

ribut

ion

of p

ower

sup

ply

,in

tern

odal

, wel

l and

sub

stra

te c

oupl

ing

mec

hani

sms

to o

ff-pa

thS

igna

ture

Wav

efor

ms.

➥R

esul

ts to

be

used

to d

eter

min

e th

e nu

mbe

r an

d po

sitio

n of

the

test

poi

nts.

❏F

requ

ency

dom

ain

Sig

natu

re W

avef

orm

s to

be

com

pare

d w

ithtim

e do

mai

n S

igna

ture

Wav

efor

ms.

❏C

ore

logi

c pr

obin

g ex

perim

ents

to d

eter

min

e fil

terin

g ef

fect

s of

pad

driv

ers.

❏O

ther

har

dwar

e ex

perim

ents

to d

eter

min

e de

tect

abili

ty o

f oth

erty

pes

of b

ridge

s an

d op

ens.

Fut

ure

Wor

k

Oth

er E

xper

imen

ts

Fre

quen

cy D

omai

n A

naly

sis

Mod

elin

g E

xper

imen

ts

Page 3: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

✔V

aria

tions

are

mea

sura

ble

both

on

and

off t

he s

ensi

tized

pat

hs.

✔F

or b

ridgi

ng d

efec

ts, r

egio

nal v

aria

tion

in S

igna

ture

Wav

efor

ms

can

be u

sed

to d

istin

guis

h be

twee

n de

fect

-fre

e an

d de

fect

ive

devi

ces.

✘O

pen

drai

n de

fect

s ar

e m

ore

diffi

cult

to d

etec

t bec

ause

varia

tions

are

sm

alle

r an

d m

ay b

e m

aske

d by

pro

cess

varia

tions

.

✔E

xper

imen

ts s

how

cor

rela

tion

of S

igna

ture

Wav

efor

ms

due

topr

oces

s va

riatio

n an

d th

e re

latio

nshi

p be

twee

n th

e m

agni

tude

of th

is v

aria

tion

and

the

leng

th o

f the

sen

sitiz

ed p

ath.

✔T

SA

is a

ble

to d

etec

t del

ay fa

ults

of a

ny s

ize

and

does

not

requ

ire r

obus

t tes

t seq

uenc

es.

Con

clus

ions

Page 4: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Ope

n D

rain

Exp

erim

ent #

210 0

3.750 0

3.75 0

3.75 0

3.75 0

3.75 0

3.75 0

3.750

-10

010

2030

4050

6070

8090

100

I DD m i l l i a m p s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

SIM

nano

sec

s

370

421 m i l l i v o l t s

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

329

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

m i l l i v o l t s

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

m i l l i v o l t s0

1020

3040

5060

7080

9010

0

Page 5: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Ope

n D

rain

Exp

erim

ent #

2

329

370

69 0/1/

0

A BC

D

223

...42

1...

431

...

430

...0

432

...

PIs

not s

how

n ar

ehe

ld lo

w

Vdd

A B

D COut

4 in

put

NA

ND

gat

e

Ope

n D

rain

Page 6: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Ope

n D

rain

Exp

erim

ent #

1I D

D

431

421

223 v o l t s

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

tna

no s

ecs

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

nano

sec

s

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

Pre

Pos

t

DF

#1D

F#2

DF

#3O

D#1

OD

#2O

D#3

OD

#4

ST

D

SIM

nano

sec

s

10 03.

750 03.

75 03.

75 03.

75 03.

75 03.

75 03.

750-1

0

010

2030

4050

6070

8090

100

m i l l i v o l t s

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

5 02.50 02.5 02.5 02.5 02.5 02.5 02.5 02.50 2.5

010

2030

4050

6070

8090

100

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

m i l l i a m p s m i l l i v o l t s

Page 7: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Ope

n D

rain

Exp

erim

ent #

1

✷01/

0/1

0

10/1/

0

0/1/

0

0/1/

0S

tatic

1/0

/1 h

azar

d

421

430

432

A B C D

Vdd

A B

D COut

4 in

put N

AN

D g

ate

Op

en D

rain

223

...32

9...

370

...43

1...

0

Stat

ic37 43

PIs

not

sho

wn

are

held

low

Logi

c no

t sho

wn

sign

als

haza

rd

Page 8: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Brid

ging

Exp

erim

ent #

2I D

D

nano

sec

s

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

t

431

nano

sec

s

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

t

nano

sec

s

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

t

223

432

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

SIM

nano

sec

s

v o l t sm i l l i v o l t s

m i l l i a m p s

10 03.

750 03.

75 03.

75 03.

75 03.

75 03.

75 03.

750-1

0

010

2030

4050

6070

8090

100

m i l l i v o l t s

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

5 02.50 02.5 02.5 02.5 02.5 02.5 02.5 02.50 2.5

010

2030

4050

6070

8090

100

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

Page 9: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Brid

ging

Exp

erim

ent #

2

421

69 0/1/

0

0

431

1

Brid

ge

0

432

1

223

...1

329

...1

370

...1

430

...0

82...

1

69

223

329

421

370

430

432

431

Ext

ra p

iece

of s

econ

d-le

vel m

etal

crea

tes

a br

idge

PIs

not

sho

wn

are

held

low

Page 10: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Brid

ging

Exp

erim

ent #

1

nano

sec

s

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

SIM

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

t

223

nano

sec

s

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

tna

no s

ecs

DF

#1D

F#2

DF

#3B

R#1

BR

#2B

R#3

BR

#4

ST

D

Pre

Pos

t

421

370

I DD

nano

sec

s

v o l t sm i l l i v o l t s

m i l l i a m p s m i l l i v o l t s

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

5 02.50 02.5 02.5 02.5 02.5 02.5 02.5 02.50 2.5

010

2030

4050

6070

8090

100

5V 0500

0 0500

0500

0500

0500

0500

0500 0500

0V

010

2030

4050

6070

8090

100

10 03.

750 03.

75 03.

75 03.

75 03.

75 03.

75 03.

750-1

0

010

2030

4050

6070

8090

100

Page 11: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Exp

erim

enta

l Res

ults

Brid

ging

Exp

erim

ent #

1

421

370

Sta

tic h

azar

d pu

lses

Brid

ge

in d

efec

t-fr

ee c

ircui

t

223

...1

329

...1

431

...0

432

...0

6656 1 0/1/

0

66

223

329

4213

7043

043

243

1

56

Ext

raco

ntac

t cre

ates

brid

ge

430

PIs

not

sho

wn

are

held

low

Page 12: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

• IS

CA

S’8

5 c4

32 b

ench

mar

k ci

rcui

t.•

Firs

t sim

ulat

ed th

en fa

bric

ated

12

devi

ces

thro

ugh

MO

SIS

.•

3 v

ersi

ons:

4 d

efec

t-fr

ee d

evic

es, 4

dev

ices

with

2 b

ridgi

ng d

efec

ts(B

R),

4 d

evic

es w

ith 2

ope

n dr

ain

defe

cts

(OD

).

• T

est s

eque

nces

sel

ecte

d su

ch th

at n

o lo

gic

erro

rs w

ere

gene

rate

dor

pro

paga

ted

to th

e pr

imar

y ou

tput

s.•

Exp

erim

ents

con

duct

ed a

t 11M

Hz.

• T

est p

oint

s lo

cate

d at

7 p

rimar

y ou

tput

s an

d on

Vdd

.

• E

ach

expe

rimen

t inv

olve

d 8

devi

ces:

4 d

efec

t-fr

ee +

4 d

efec

tive.

• S

ame

defe

ct-f

ree

devi

ce u

sed

as th

e st

anda

rd fo

r al

l exp

erim

ents

.

Exp

erim

ent D

esig

nO

bjec

tive:

Em

phas

is o

f exp

erim

ents

on

smal

l sig

nal v

aria

tions

that

occ

ur b

oth

on a

nd o

ff th

e se

nsiti

zed

path

s.

Page 13: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

✔T

SA

use

s b

oth

th

e lo

gic

an

d s

mal

l sig

nal

tra

nsi

ent

beh

avio

r at

eac

h o

f th

e te

st p

oin

ts.

✔T

SA

use

s in

form

atio

n f

rom

tes

t p

oin

ts t

hat

are

no

tse

nsi

tize

d.

✔T

SA

use

s m

ult

iple

tes

t p

oin

ts t

o d

isti

ng

uis

h b

etw

een

sig

nal

var

iati

on

s ca

use

d b

y d

efec

ts a

nd

th

ose

cau

sed

by

chan

ges

in p

roce

ss p

aram

eter

s.

✔T

SA

acc

ura

tely

mea

sure

s th

e d

elay

ch

arac

teri

stic

s o

f th

ed

evic

e an

d d

oes

no

t re

qu

ire

rob

ust

tes

t se

qu

ence

s.

Uni

que

Cha

ract

eris

tics

of T

SA

Ho

w is

TS

A d

iffe

ren

t ?

Page 14: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Met

hods

that

ana

lyze

the

dyna

mic

sup

ply

curr

ent.

☞F

renz

el a

nd M

arin

os, I

TC

’87

☞H

ashi

zum

e, Y

amad

a, T

ames

ada

and

Kaw

akam

i, IT

C’8

8☞

Dor

ey, J

ones

, Ric

hard

son,

Rus

sel a

nd Z

u, IT

C’8

8☞

Bea

sley

, Ram

amur

thy

, Ram

irez-

Ang

ulo

and

DeY

ong,

ITC

’93

☞M

akki

, Su

and

Nag

le, I

TC

’95

Met

hods

that

ana

lyze

the

dyna

mic

vol

tage

beh

avio

r.

☞W

u, L

in, T

seng

and

Mea

dor

, VT

S’9

1☞

Thi

beau

lt, V

TS

’95

☞F

ranc

o an

d M

cClu

skey

, IT

C’9

1☞

Cha

tterje

e, J

ayab

hara

thi,

Pan

t and

Abr

aham

, VT

S’9

6

Rel

ated

Par

amet

ric M

etho

dsI D

D-b

ased

Met

hods

Del

ay F

ault

Tes

t ext

ensi

ons

Page 15: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

Why

use

mul

tiple

test

poi

nts

?

PO

#1P

O#2

PO

#3P

O#4

PO

#5P

O#6

PO

#7

075 075 075 075 075 075 02V015

0

0150

0150

0150

0150

0150

02V

➥M

ult

iple

tes

t si

gn

als

allo

w u

s to

dis

tin

gu

ish

bet

wee

n p

roce

ss v

aria

tio

nef

fect

s an

d r

egio

nal

def

ect

vari

atio

ns.

Def

ectiv

e de

vice

Kno

wn

defe

ct-f

ree

mV

mVKno

wn

defe

ct-f

ree

stan

dard

dev

ice

test

dev

ice

fabr

icat

ed u

nder

diffe

rent

pro

cess

para

met

ers

fabr

icat

ed u

nder

a th

ird s

et o

fpr

oces

s pa

ram

eter

s

075 075 075 075 075 075 02VmV 0

1020

3040

5060

7080

9010

0

010

2030

4050

6070

8090

100

010

2030

4050

6070

8090

100

Page 16: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

•Le

ft fig

ure

show

s ra

w w

avef

orm

s m

easu

red

at te

st p

oint

s.

•R

ight

figu

re s

how

s di

ffere

nce

wav

efor

ms

shad

ed a

long

a z

ero

base

line.

Sig

natu

re W

avef

orm

s

nano

sec

nano

sec

45V 3 2 01 .05 0.1V

45V 3 2 01 .05V 0 -.

05-1

010

2030

4050

6070

8090

100

010

2030

4050

6070

8090

100

Sta

ndar

d de

vice

wav

efor

mTe

st d

evic

e w

avef

orm

Raw

Vol

tage

Wav

efor

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Page 17: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

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Page 18: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

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Page 19: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

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Page 20: e data Standard Hardwar ee Hardwar Defective Simulation Figure … · 2002. 7. 3. · Experimental Results Open Drain Experiment #2 10 0 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75 0 3.75

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