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mems-micropumps: a review

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Page 1: MEMS-Micropumps: A Review
Page 2: MEMS-Micropumps: A Review
Page 3: MEMS-Micropumps: A Review
Page 4: MEMS-Micropumps: A Review
Page 5: MEMS-Micropumps: A Review
Page 6: MEMS-Micropumps: A Review
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Page 9: MEMS-Micropumps: A Review

A Fully-Integrated MEMS Preconcentrator for Rapid Gas Sampling

CMOS-MEMS Resonators and Oscillators: A Review

Wideband MEMS energy harvesters utilizing nonlinear springs

MEMS-based Universal Fatigue-Test Technique

A CMOS-MEMS cantilever sensor for capnometric applications

Ultra-Low Resonant Piezoelectric MEMS Energy Harvester

MEMS GYROSCOPES AND THEIR APPLICATIONS

MEMS for Environmental and Bioterrorism Applications - ATE

A robust MEMS probe card with vertical guide for a fine pitch test

On-Chip Pseudorandom MEMS Testing

A Monolithic Phased Array Using 3-bit Distributed RF MEMS Phase Shifters

Foundations of MEMS

Why MEMS Accelerometers Are Becoming the Designer's

Performance evaluation of MEMS accelerometers

A MEMS reconfigurable DGS resonator for K-band applications

MEMS/MOEMS Packaging : Concepts, Designs, Materials

Behavioral Modeling and Simulation of MEMS Electrostatic

Introduction to MEMS

Development of CMOS-MEMS/ NEMS Devices

m&nems : a generic platform for mems manufacturing - CEA-Leti

A Dive into the Latest MEMS Pressure Sensors

E&I_M.E (MEMS)_1Y_2S_RF MEMS.pdf - Annamalai University

Development of MEMS-based Piezoresistive Three

CMOS-MEMS Acoustic Devices

Scalable Flat-Panel NanoParticle MEMS/NEMS Thruster

Wafer-level SLID bonding for MEMS encapsulation

Mexico US collaboration in Mems Nems

MEMS 411: Compact Sewing Pin Dispenser

Quantitative Accelerated Life Testing of MEMS Accelerometers

Mems built-in-self-test using MLS

Bio-MEMS: Technologies and Applications

Using Multiple MEMS IMUs to form a Distributed Inertial

Millipede-a MEMS-based scanning-probe data-storage system

An analytical electrothermal model of a 1-D electrothermal MEMS micromirror

Parametrically Excited MEMS-Based Filters