xyz piezo positioning flexure piezo positioning flexure stages ... compact manipulation tool for...
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XYZ Piezo Positioning Flexure StagesNanometer and Picometer Resolution, High Speed & Stability
IND IV IDUAL
W W W . P I . W S
XYZ / XY Piezo Stage Systems
PInano microscope scanner stage for Super Resolution-microscopy applications. Sub-nanometer resolution Optional slide holder & accessories for microscopes.
P-562 PIMars multi-axis, parallel-kinematics piezo nanopositioning stage. Travel to 340 m/axis. Capacitive parallel metrology.
P-363 PicoCube multi-axis planar scanner. For AFM/STM and nanomanipulation applications. Picometer resolution.
P-611 NanoCube low-cost XYZ-nanopositioning system, 100m open-loop and closed-loop versions.
P-615 Long-Travel NanoCube XYZ nanopositioning stage with aperture. Up to 420m travel, capacitive feedback
P -733 piezo scanning stages provide travel to 100m / axis. Very high accuracy and fast response, ideal for STED microscopy
P-915KLVS lar ge aperture, high-dynamics piezo s canner
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PIHera XYZ combination.
P-313 PicoCube XY(Z) Piezo ScannerPicometer Precision, High Bandwidth, No Servo Lag, for Scanning Probe Microscopy
Ultra-High-Performance Scanner for AFM/SPM 20 Picometers Resolution,
Low-Profile, Low-Cost Nanopositioning Systems for Super-Resolution Microscopy
P-545 PI nano XYZ / PI nano XY Piezo Stage Systems
Long Travel, Low Profile,Optimized for MicroscopyPI nano XY and XYZ low-pro-file piezo scanning stages areoptimized for easy integrationinto high-resolution micro-
scopes. They feature a very lowprofile of 20 mm (0.8") and alarge aperture designed to holdPetri dishes and standard slideholders. The long travel rangesof up to 200 x 200 x 200 m withnanometer closed-loop resolu-tion are ideal for leading-edge
microscopy and imaging appli-cations.
Cost Effective Design,High Performance
PI nano series piezo position-ing stages are designed to pro-vide high performance atminimum cost. For highly-sta-ble, closed loop operation,piezoresistive sensors are ap-plied directly to the movingstructure and precisely meas-ure the displacement of thestage platform. The very highsensitivity of these sensors pro-vides optimum position stabil-ity and responsiveness as wellas nanometer resolution. A pro-prietary servo controller signifi-cantly improves the motionlinearity compared to conven-tional piezoresistive sensorcontrollers.
High Reliability andLong Lifetime
The compact P-545 systems areequipped with preloaded PIC-MA high-performance piezoactuators which are integratedinto a sophisticated, FEA-mod-eled, flexure guiding system.The PICMA actuators featurecofired ceramic encapsulationand provide better performanceand reliability than conven-tional piezo actuators. Actua-tors, guidance and sensors aremaintenance-free, not subjectto wear and offer extraordinaryreliability.
Low Profile for Easy Integration: 20 mm (0.8'') Up to 200 x 200 x 200 m Travel Ranges Large Clear Aperture for 3 x 1'' Slides Recessed Sample Holders for Maximized Utility Available Outstanding Lifetime Due to PICMAPiezo Actuators Cost-Effective Design due to Piezoresistive Sensors Compatible w/ Leading Image Acquisition Software Package Closed-Loop Control for High Repeatability and Accuracy Millisecond Step Time, Ideal for Super-Resolution Microscopy 24-Bit Controller w/ USB, Ethernet, RS-232 Interface
and Analog Control Available Manual Long-Travel Stage with Motor
PI nanoseries nanopositioning stages feature a very low profile of 20 mm (0.8),a large aperture for 3 x 1'' slides and deliver highly accurate motion with
sub-nanometer resolution in up to 3 axes. Slide / petri dish holders optional
P-545.2R7PInano XY Piezo Stage, Slide-SizeAperture, 200 x 200 m, Piezoresis-tive Sensors, with USB Controller
P-545.3R7PInano XYZ Piezo Stage, Slide-Size Aperture, 200 x 200 x 200 m,Piezoresistive Sensors, with USBController
E-545.3RDPInano Multi-Channel PiezoController with High-Speed DigitalInterface, 3 Channels, PiezoresistiveSensors, Sub-D Connectors
M-545.2MOXY Microscope Stage, 25 x 25 mm,Micrometer-Driven, High Stability,Compatible with PI Piezo Stages,for Olympus Microscopes
M-545.2MNXY Microscope Stage, 25 x 25 mm,Micrometer-Driven, High Stability,Compatible with PI Piezo Stages,for Nikon Microscopes
M-545.2MLXY Microscope Stage, 25 x 25 mm,Micrometer-Driven, High Stability,Compatible with PI Piezo Stages,for Leica Microscopes
M-545.2MZXY Microscope Stage, 25 x 25 mm,Micrometer-Driven, High Stability,Compatible with PI Piezo Stages,for Zeiss Microscope
P-545.PD335mm Petri Dish Holder for P-545PInano Piezo Stages
P-545.SH3Microscope Slide Holder forPInano Piezo Stages
P-545.PP3Plain Plate for Accessories forPInano Piezo Stages
Additional accessories on request.
Background: the piezo controlleris included and comes with a 24-bit
resolution USB port as well as ethernet,RS-232 and analog interface.
Foreground: The optional M-545 manualXY stage provides a stable
platform for the PI nano piezo stages.Custom stage version shown
Model P-545.2R7 P-545.3R7 Unit Tolerance
Active axes X, Y X, Y, Z
Motion and positioning
Integrated sensor piezoresistive piezoresistive
Closed-loop travel 200 x 200 200 x 200 x 200 m
Closed-loop resolution* 1 1 nm typ.
Linearity 0.1 0.1 % typ.
Repeatability < 5 < 5 nm typ.
Push/pull force capacity 100 / 30 100 / 30 N max.
Load 50 50 N max.
Ceramic type PICMA P-885 PICMA P-885
Electrical capacitance 6 6 (X, Y), 12 (Z) F 20%
Operating temperature range -20 to 80 -20 to 80 C
Material Aluminum Aluminum
Mass 1 1.2 kg 5%
Cable length 1.5 1.5 m 10 mm
Sensor / voltage connection Sub-D, 25 pin Sub-D, 25 pin
Piezo controller (included in delivery) E-545 E-545
* Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion measured with interferometer.
Accessories: Slide holder (above) and Petri dishholder (below), dimensions in mm P-545 dimensions in mm
Capacitive Sensor Version and High Speed Tracking Version also Available
PIMars open-frame piezostages are fast and highly accu-rate multi-axis scanning andnanopositioning systems withflatness and straightness in thenanometer range.
The 66 x 66 mm clear apertureis ideal for transmitted-lightapplications such as near-fieldscanning or confocal micro-scopy and mask positioning.
Large Variety of Models
PIMars multi-axis nanoposi-tioners are offered in a large
variety of configurations.Standard models include long-travel systems (to 300 x 300 x300 m), high-speed and vacu-um versions. Custom six-axisdesigns with rotation to 6 mradare available on request.
PI offers versions speciallydesigned for applications inultra-high vacuum with vacu-um-qualified components only.The integrated ceramic-encap-sulated PICMA actuatorsallow high bakeout tempera-tures and assure minimal out-gassing rates. A non-magnetiza-ble version is available onrequest.
Direct Drive for Ultra-FastScanning and Positioning
The P-561.3DD versions haveresonant frequencies to1.0 kHz, enabling millisecondscanning rates with sub-nanometer resolution.
Capacitive Sensors for HighestAccuracy and PositionStability
PI's proprietary capacitive sen-sors measure position directlyand without physical contact.They are free of friction andhysteresis, a fact which, incombination with the position-ing resolution of well under1 nm, makes it possible toachieve very high levels of lin-earity. A further advantage ofdirect metrology with capaci-tive sensors is the high phasefidelity and the high bandwidthof up to 10 kHz.
Active and Passive Guidancefor Nanometer Flatness andStraightness
Wire-cut flexures optimizedwith Finite Element Analysis(FEA) are used to guide thestage. The FEA techniques givethe design the highest possiblestiffness and minimize linearand angular runout. Furtherenhancement is achieved byactive trajectory control: mult