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New Mexico Environment Department Air Quality Bureau 1301 Siler Road Building B Santa Fe, NM 87507 Phone (505) 476-4300 Fax (505) 476-4375 Version 1/1/2010 NMED USE ONLY NMED USE ONLY DTS UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND REPORT FORM Staff TEMPO Admin Submit to: [email protected] I. DATABASE HEADER INFORMATION (drop down menus in bold) a. AI# 1103 Test Notification/Protocol Periodic Test (EPA Method) d. Company Name: e. Facility Name: Intel Corporation Intel Rio Rancho Facility f. Emission Unit Numbers: RCTOs g. Emission Unit Description (boiler, Waukesha 7042, etc) Process Scrubbers, RCTO h. Reports - Tracking Number from notification response: CMT i. Proposed Test Date: j. Actual test date: 07/16/14 - 08/24/14 07/16/14 – 08/24/14 k. Reason for test (name permit requirement, NSPS, MACT, consent decree, etc. Indicate here is this notification is a revised test date only) NSR Permit 0325M11R7, Sections A801.B, A802.B, B111.D II. GENERAL COMPANY AND FACILITY INFORMATION a.Company Address: k.. Facility Address: 4100 Sara Road 4100 Sara Road b. City: c. State: d. Zip: l. City: m. State: n. Zip: Rio Rancho NM 87124 Rio Rancho NM 87124 e. Environmental Contact: f. Title: o. Facility Contact: p. Title: Andrew Moen Environmental Engineer Andrew Moen Environmental Engineer g. Phone Number: h. Pager Number: q. Phone Number: r. Pager Number: 505-794-4911 505-991-7664 505-794-4911 505-991-7664 i. Email Address: s. Email Address: [email protected] [email protected] j. Title V Permit Number: t. NSR Permit Number: NA 0325M11R7 u. Detailed driving directions from nearest New Mexico town: From NM Hwy 528 in Rio Rancho, turn into the 19th street entrance and proceed to the main entrance III. TESTING FIRM a. Company: ERM-West, Inc. g. Contact: Kurt Parker b. Address 1: 6455 S. Yosemite St. h. Title: Partner c. Address 2: Suite 900 i. Office Phone: 720-200-7156 j. Cell Phone: 303-324-5211 d. City: Greenwood Village e. State: CO f. Zip: 80111 k. Email Address: [email protected]

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Page 1: UNIVERSAL STACK TEST NOTIFICATION, …exploreintel.com/assets/documents/newmexico/reports/2014 Air... · New Mexico Environment Department Air Quality Bureau 1301 Siler Road Building

New Mexico Environment Department Air Quality Bureau

1301 Siler Road Building B Santa Fe, NM 87507

Phone (505) 476-4300 Fax (505) 476-4375

Version 1/1/2010

NMED USE ONLY NMED USE ONLY

DTS UNIVERSAL STACK TEST

NOTIFICATION, PROTOCOL AND REPORT FORM

Staff

TEMPO Admin

Submit to: [email protected]

I. DATABASE HEADER INFORMATION (drop down menus in bold) a. AI#

1103 Test Notification/Protocol Periodic Test (EPA Method)

d. Company Name: e. Facility Name:

Intel Corporation Intel Rio Rancho Facility f. Emission Unit Numbers:

RCTOs g. Emission Unit Description (boiler, Waukesha 7042, etc)

Process Scrubbers, RCTO

h. Reports - Tracking Number from notification response: CMT

i. Proposed Test Date: j. Actual test date:

07/16/14 - 08/24/14 07/16/14 – 08/24/14

k. Reason for test (name permit requirement, NSPS, MACT, consent decree, etc. Indicate here is this notification is a revised test date only)

NSR Permit 0325M11R7, Sections A801.B, A802.B, B111.D

II. GENERAL COMPANY AND FACILITY INFORMATION

a.Company Address: k.. Facility Address:

4100 Sara Road 4100 Sara Road b. City: c. State: d. Zip: l. City: m. State: n. Zip:

Rio Rancho NM 87124� Rio Rancho NM 87124 e. Environmental Contact: f. Title: o. Facility Contact: p. Title:

Andrew Moen Environmental Engineer Andrew Moen Environmental Engineer g. Phone Number: h. Pager Number: q. Phone Number: r. Pager Number:

505-794-4911 505-991-7664 505-794-4911 505-991-7664 i. Email Address: s. Email Address:

[email protected] [email protected] j. Title V Permit Number: t. NSR Permit Number:

NA 0325M11R7

u. Detailed driving directions from nearest New Mexico town: From NM Hwy 528 in Rio Rancho, turn into the 19th street entrance and proceed to the main entrance

III. TESTING FIRM a. Company: ERM-West, Inc.

g. Contact: Kurt Parker

b. Address 1: 6455 S. Yosemite St.

h. Title: Partner

c. Address 2: Suite 900

i. Office Phone: 720-200-7156

j. Cell Phone: 303-324-5211

d. City: Greenwood Village

e. State: CO

f. Zip: 80111

k. Email Address: [email protected]

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NMED Air Quality Bureau

UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND

REPORT FORM Page 2 of 6

IV CONTROL EQUIPMENT STACK PARAMETERS

a. Emission:

Unit Numbers

b. Make and Model

c. Serial

No

d. Permitted Capacity (acfm)

i. Startup

Date

m. Velocity (ft/sec)

n. Temp (oF)

o. Dia (in)

p. Upstream

Disturbance (in)

p. Downstream Disturbance

(in)

96 Harrington ECV 10 10-5 LB S-021401-01 50,000 Jan-02 34.23 66.8 48 175 118

95 Harrington ECV 10 10-5 LB S-021401-02 50,000 Jan-02 35.02 67.4 48 175 118

1 Harrington ECV 10 10-5 LB S-021401-03 50,000 Jan-02 36.24 67.8 48 175 118

89 Harrington ECV 10 5 9-5 LB S-101504-1 50,000 Nov-05 50.49 66.2 48 183 110

161 Harrington ECV 4-5-5 LB S-061102-1 50,000 Nov-02 OFF OFF OFF OFF OFF

93 Harrington ECV 10 10-5 LB BPC 680-5 10,000 Jan-02 34.9 68.9 48 154 228

85 Harrington ECV 10.5 9-5 LB S-111495-1 55,000 Jun-95 OFF OFF OFF OFF OFF

86 Harrington ECV 10.5 9-5 LB S021494-1 55,000 Jun-95 29.9 62.0 60 262 292

87 Harrington ECV 10.5 9-5 LB S-062795-1 55,000 Jun-95 31.9 60.3 60 262 292

88 Harrington ECV 10.5 9-5 LB S-021494-2 55,000 Jun-95 30.4 62.4 60 262 292

90 Harrington ECV 10.5 9-5 LB S-111495-1 55,000 Jul-09 26.9 62.8 60 262 292

91 Harrington ECV 10.5 9-5 LB S-021494-2 55,000 Jul-09 25.13 62.3 60 262 292

92 Harrington ECV 10.5 9-5 LB S-021494-5 55,000 Jul-09 OFF OFF OFF OFF OFF

94 Harrington ECV 10.5 9-5 LB S-021494-5 55,000 Jun-96 24.4 60.0 60 262 292

97 Harrington ECV 10.5 9-5 LB S-11396-1 55,000 Jun-96 23.6 57.5 60 262 292

37 Harrington ECV 55-5 LB S-021494-9 5,000 Apr-96 21.5 72.5 19.5 16 101

151 Harrington ECV 3 4-5 LB S-072403-1 10,000 Dec-03 31.6 72.2 18 35 126

152 Harrington ECV 3 4-5 LB S-101504-5 5,000 Jun-06 24.3 69.0 19.75 15 105

153 Harrington ECV 3 4-5 LB S-101504-6 10,000 Dec-05 24.6 71.5 18 35 103

46 HarringtonECV 10 10-5 LB S-021401-04 50,000 Dec-01 30.7 66.9 48 124 166

53 HarringtonECV 10 10-5 LB S-021401-05 50,000 Dec-01 31.43 64.9 48 124 166

4 HarringtonECV 10 10-5 LB S-101504-2 35,000 May-05 48.89 66.4 48 175 102

45a/45b Harrington ECV 3 4-5 LB S-112901-1/S-

101504-4 10,000 ea. Nov-

02/May-05 47.1 67.6 18 360 66.6

e. Exceptions: NA

g. Emission Unit Description: 197 Semiconductor Manufacturing Fab

h. Installation Date: 1985

k. Date Reached Max. Capacity: NA

l. Control Equipment Description: Process Scrubbers

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NMED Air Quality Bureau

UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND

REPORT FORM Page 3 of 6

IV EMISSION UNIT STACK PARAMETERS

a. Emission: Unit Numbers

b. Make and Model

c. Serial No

d. Permitted Capacity (acfm)

i. Startup Date

m. Velocity (ft/sec)

n. Temp (oF)

o. Dia (in)

p. Upstream

Disturbance (in)

p. Downstream

Disturbance (in)

162-TO Munters 1ZS-3546-TH 3546-038 1,100 Oct-08 34.6 782.8 17.75 514 114

162-RO Munters 1ZS-3546-TH NA 25,000 Oct-08 26.4 93.4 40 126 99

163-TO Munters 1ZS-3546-TH 3546-039 1,100 Oct-08 27.9 711.3 17.75 514 114

163-RO Munters 1ZS-3546-TH NA 25,000 Oct-08 29.1 86.9 40 126 99

164-TO Munters 1ZS-3546-TH 3546-053 1,100 Jan-10 28.7 688.3 17.75 514 107

164-RO Munters 1ZS-3546-TH NA 25,000 Jan-10 29.1 111.3 41.75 99 126

171-TO Munters 1ZS-3546-TH 3546-053 1,100 July-11 30.4 745.1 17.75 156 144

171-RO Munters 1ZS-3546-TH NA 25,000 July-11 18.3 86.8 39.56 25 98

170-TO Munters 1ZS-3546-TH 3546-053 1,100 July-11 29.4 741.3 17.63 166 146

170-RO Munters 1ZS-3546-TH NA 25,000 July-11 18.7 88.8 39.38 27 104

168-TO Munters 1ZS-3546-TH 3546-053 1,100 July-11 28.3 720.1 17.38 166 145

168-RO Munters 1ZS-3546-TH NA 25,000 July-11 13.4 83.4 39.63 27 103

167-TO Munters 1ZS-3546-TH 3546-053 1,100 July-11 28.1 704.9 17.38 166 145

167-RO Munters 1ZS-3546-TH NA 25,000 July-11 13.8 80.8 39.63 27 103

e. Exceptions: NA

g. Emission Unit Description: 197 Semiconductor Manufacturing Fab

h. Installation Date: 1985

k. Date Reached Max. Capacity: NA

l. Control Equipment Description: RCTOs

V. POLLUTANTS AND PROPOSED TEST METHODS

Pollutant or Parameter: Proposed Test Methods (Deviations from approved methods require supporting documentation and prior authorization)

Deviation to Test Method Requested

Portable Analyzer Methods for NOx, CO, SO2

NOx EPA Method 7E

CO EPA Method 10

SO2 EPA Method 6

VOCs (Specify) RM25A (RCTO's)

HAPs (Specify) RM26(A) for Cl2; ASTM D6348-12 for HCl and HF

PM (TSP) EPA Method 5

PM10 EPA Method 201

PM2.5 (Specify)

Opacity EPA Method 9

Visual E. EPA Method 22

Stack Flow EPA Methods 1 – 3

Moisture EPA Method 4

Other (Specify) Moisture by ASTM D6348-12

Other (Specify) CO2 by ASTM D6348-12

Other (Specify)

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NMED Air Quality Bureau

UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND

REPORT FORM Page 4 of 6

List Specific VOC’s and HAP’s: HCl, HF, Cl2

VI. PROPOSED TEST RUN AND TEST LOAD INFORMATION a. Number of Test Runs: b. Run Duration c. Required by (regulation or permit number): d. Specific Condition or Section:

1 (VOC); 1 (HCl, HF) 2 (Cl2) 8 hrs Cl2 2x4hrs 0325M11R7 A801.B; A802.B PLEASE NOTE – Default run duration is 60 minutes, unless otherwise specified by an applicable regulation. e. Expected Load: f. Percent of Permitted Capacity: g. Is this an opacity test? h. If yes, no. of observation pts.:

Normal NA Yes No NA i. If expected load during test is less than 90% of capacity, explain:

NA

NOTE – Failure to test at 90-100% of permitted load will limit unit operation to 110% of tested load until a new initial compliance test is conducted.

PLANT OR UNIT OPERATING PARAMETERS TO BE MONITORED j. List and explain the plant operating parameters that will be monitored and applicable permit conditions or regulatory standards.

Process exhaust scrubbers: recirculation water flow rate (gpm), fan status, bypass status; RCTOs: inlet damper position, thermal oxidizer combustion chamber temperature (F), system bypass damper position

VII. ADDITIONAL DETAILS (where applicable)

SCRUBBER TESTING SCHEDULE

Intel will be operating the system scrubbers under the standard (normal) configuration. In support of continuous operation and redundancy is systems, the following considerations are in place that may affect the specific scrubbers that are tested during the annual program: Only the 2 of 3 NP NH3 scrubbers (40-np2-2s & 40-np2-2s) were tested ; SC-40-np2-1s (#161) was offline; Only 2 of 3 NX NH3 scrubbers (RRFB-SC142-1-00 & RRFB-SC142-1-00);RRFD SC-12-fb1-2s (#92) was offline; Only 5 of 6 Fab NX corrosive scrubbers will be tested; SC-12-fb1-2s (#85) was offline

RATA and INSTRUMENTAL ANALYZER CALIBRATION PROCEDURES

a. Do any of the methods you are proposing utilize instrumental analyzers (i.e.; EPA Methods 3A, 6C, 7E, 10, 18, 25/25A, 320 etc.)? If yes, briefly describe analyzer calibration procedures and/or calibration standard procedures. Enter the highest pollutant concentration expected and the proposed concentrations of calibration gases.

Yes No

ASTM D6348-12 (FT-IR): ASTM D6348-12 uses Calibration Transfer Standards (CTS) for operational verfication. Ethylene will be the CTS for this program at approximately 100 ppm. Exhaust concentations may range from several tenths of a ppm to several ppm. The calibration library has standardized spectra for HCl up to 286 ppm and for HF up to 357 ppm. Instrument operation will follow manufacturers procedures. FT-IR calibration responses are instrument and site independent and will use standard reference spectra generated by the manufacturer (based off of Hitran calibration spectra for HCl and HF). The method detection limits will be calculated following ASTM D6348-12 using the actual sample spectra. RM25A (VOC) for the extended 8 Hour VOC testing pre and post FID calibrations will be supported for each system assessment. During the 8 hour test period, hourly drift checks will not be performed. If the ending instrument drift checks exceed the 3% method limit, a post test calibration will be performed and the results reported using both calibrations.

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NMED Air Quality Bureau

UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND

REPORT FORM Page 5 of 6

PROPOSED METHOD DEVIATIONS

EPA RM3/RM3A: Molecular weight for the scrubber tests will be assumed to be ambient air as there is no combustion as part of the process or abatement. A molecular weight of 28.8 will be assumed (20.9 % O2, 79.1 % N2, 0% CO2). CO2 values will be monitored by the FT-IR used for the HCl and HF measurements for confirmation of this determination method. For the RCTO exhaust streams, the molecular weight will be determined using CO2 measurements, made by FT-IR verification for a one-hour period. Oxygen will be derived by subtracting the measured CO2 concentration from 20.9% for the thermal oxidizer exhaust streams. The recuperative outlet exhaust streams are anticipated to have ambient concentratins of CO2 present and a molecular weight of 28.8 will be assumed and verified by the FT-IR for CO2 concentration. EPA RM4 (or equivalent). For the scrubbers, moisture will be measured using the FT-IR method ASTM D6348-12 in tandem with the HCl and HF measurements. For the RCTO exhaust streams, moisture concentrations will be verified by FT-IR analysis for a period of no less than one hour during each 8 hour period of FID assessment. RM25A (VOC) for the 8 Hour VOC testing, initial and or final instrument calibrations will be conducted. During the 8 hour test period, hourly drift checks will not be performed. If the ending instrument drift checks exceed the 3% method limit, a post test calibration will be performed and the results reported using both calibrations. RM26A. Chlorine sampling will be conducted using RM26A using a constant rate sampling approach. Test runs will be supported in duplicate with each test run four (4) hours in duration. Sampling will be conducted at a single point located a the nearest practical location to the median velocity as measured by a preliminary Pitot traverse. The sampling rate will be approximately 0.75 cubic feet per minute (cfm) with a total test volume of approximately 150-200 cubic feet, dependent on dH setting.

SAMPLING TRAIN LEAK CHECK PROCEDURES

b. Do any of the methods you are proposing utilize the EPA Method 5 sampling train (i.e.; EPA Methods 1-4, 5, 17, 26/26A, 29, etc.)? If yes, briefly describe sampling train and pitot tube leak check procedures: Yes No

For RM26(A), Pre-test leak checks will be performed to to ensure proper train setup and operation. Post Test leak checks will be performed at the maximum sample train vacuum encounterd during the test run as per EPA RM5 procedures.

EPA METHOD 19 IN LIEU OF EPA METHODS 1-4

c. Are you proposing to utilize EPA Method 19 in lieu of EPA Methods 1-4? If yes, explain why you believe this proposal is justified: Yes No

NA

PLEASE NOTE – EPA Method 19 may be utilized in lieu of EPA Methods 1-4, subject to the approval of the Department. If you are proposing to utilize EPA Method 19 in lieu of EPA Methods 1-4, you MUST include a recent fuel gas heating value analysis as well as a recent fuel flow meter calibration certificate, preferably conducted on the day of the test, but no earlier than three months prior to the test date. If the analyses have been conducted prior to the test date, you MUST append the certificates to the protocol. If conducted on the day of the test, you MUST append the certificates to the final test report.

VIII. ATTACHMENTS (as needed to support proposed test; check all that apply)

NOTIFICATION/PROTOCOL ATTACHMENTS

Road Map Indicating Directions from Nearest New Mexico Town to Facility

Schematic of process being tested showing emission points, sampling sites and stack cross-section

Copy of proposed test methods (except for those promulgated test methods found in 40 CFR 51, 60, 61 and 63)

Fuel Heating Value Analysis

Fuel Flow Meter Calibration Certificate

Other:

Other:

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NMED Air Quality Bureau

UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND

REPORT FORM Page 6 of 6

TEST REPORT ATTACHMENTS

Section 2. Tables of Results

Supporting Documents (Specify)

Retain Report Section 3 - Test Procedures, Data, Calculations, Appendices – 2 years NSR permits, 5 years TV

IX. CERTIFICATION

This document has been prepared under my supervision and is accurate and complete to the best of my knowledge. I understand that acceptance of this protocol does not waive the requirements of any permit or regulation. I understand that any procedural errors or omissions are the sole responsibility of the permit holder. Signature: Print Name and Title:

Andrew Moen / Environmental Engineer

Date:

09/22/2014

Responsible Official for Title V? Yes No (R.O signature not required for routine periodic testing)

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INTEL CORPORATION 

4100 SARA ROAD 

RIO RANCHO, NEW MEXICO  87124 

TEST REPORT  

Air Quality Permit #325‐M11‐R7  ANNUAL NSR TESTING Intel Rio Rancho Facility 

ERM Reference 0114780‐2000‐0000  

September 22, 2014

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 Section 2 ‐ Page i 

TABLE OF CONTENTS SECTION 1 UNIVERSAL STACK TEST NOTIFICATION, PROTOCOL AND REPORT FORM 

DATABASE HEADER INFORMATION GENERAL COMPANY AND FACILITY INFORMATION TESTING FIRM INFORMATION  EMISSION UNIT IDENTIFICATION TARGET POLLUTANTS AND PROPOSED TEST METHODS PROPOSED TEST RUN AND TEST LOAD INFORMATION ADDITIONAL DETAILS (where applicable) 

List of Acronyms/Abbreviations ................................................................................................................ ii

SECTION 2 ..................................................................................................................................................... 1

Summary of Test Results ........................................................................................................................... 1

A. Scrubber Measurement Results ...................................................................................................... 3

B.  RCTO FID Measurement Results ..................................................................................................... 7 

C.  Unit Operating Parameters ........................................................................................................... 11 

D.  Control Equipment Operating Parameters ................................................................................... 11 

E.  Comparison of Measured and Modeled Parameters .................................................................... 12 

F.  Relative Detection Limits of Measured Compounds..................................................................... 12  

LIST OF TABLES 

Table 1; Summary Results – Estimated Site Total Tons per Year .................................................................. 1 Table 2; Scrubber Test Chronology ............................................................................................................... 2 Table 3; RCTO Overall Test Chronology ........................................................................................................ 2 Table 4; Scrubber HCl and HF Results Summary ........................................................................................... 3 Table 5; Scrubber Chlorine (Cl2) Results Summary ....................................................................................... 4 Table 6; Scrubber Flow Rate Results Summary ............................................................................................ 5 Table 7; RCTO Annual Emissions Estimate Summary ................................................................................... 7 Table 8; RCTO Permit ID 162 (RRNP‐VOC138‐1‐120) Emission Results;  07/23/2014 .................................. 7 Table 9; RCTO Permit ID 163 (RRNP‐VOC138‐2‐120) Emissions Results 07/23/2014 .................................. 8 Table 10; RCTO Permit ID 164 (RRNP‐VOC138‐3‐120) Emissions Results 07/23/2014 ................................ 8 Table 11; RCTO Permit ID 167 (F11B‐VOC138‐2‐120) Emissions Results 08/15/2014 ................................. 8 Table 12; RCTO Permit ID 168 (F11B‐VOC138‐1‐120) Emissions Results 08/15/2014 ................................. 9 Table 13; RCTO Permit ID 170 (F11F‐VOC138‐2‐120) Emissions Results 08/18/2014.................................. 9 Table 14; RCTO Permit ID 171 (F11F‐VOC138‐1‐120) Emissions Results 08/18/2014.................................. 9 Table 15; RCTO Flow Rate Summary Results .............................................................................................. 10 Table 16; Scrubber Control Parameters ...................................................................................................... 11 Table 17; RCTO Control Parameters ........................................................................................................... 12 Table 18; Overall HAP and Target Detection Limits for Measurement Program........................................ 12    

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 Section 2 ‐ Page ii 

List of Acronyms/Abbreviations 

ACFM  Unit of Flow; Actual Cubic Feet Per Minute ASTM  American Society for Testing and Materials 

C  Unit of Temperature; degrees Celsius CFR  Code of Federal Register C3H8  Propane (calibration standard for FID) Cl2  Chloride CO2  Carbon Dioxide Conc.  Concentration DAS  Data Acquisition System DSCFM  Unit of Flow; Dry Standard Cubic Feet Per Minute (corr. To 29.92” Hg & 25°C) F11F  Fab 11X Fab Side location designation F11B  Fab 11X West Bridge Side location designation 

F  Unit of Temperature; degrees Fahrenheit FT‐IR  Fourier Transform Infrared Spectroscopy GPM  Gallon per minute HF  Hydrogen Fluoride HCl  Hydrochloric Acid Lbs/hr  Pounds per hour (unit of emissions per unit time) MW  Molecular Weight NA  Not Applicable ND  Non‐Detected (value below the analytical/instrument limit of detection) NIST  National Institute of Standards and Technology NMED  New Mexico Environmental Department NSR  New Source Review O2  Oxygen TPY  Unit of emissions; Tons per Year ppb  Unit of concentration; parts per billion ppm  Unit of concentration; parts per million PSEL  Plant Site Emission Limit  RM  Reference Method RCTO  Recuperative Thermal Oxidizer ‐RO  Rotor Outlet, synonymous with Wheel Exhaust of the Munters Systems.  Exhaust 

measurement point prior to common wheel exhaust manifold and stacks RRNP  Fab 11X Bridge Side location designation SCFM  Unit of Flow; Std. Cubic Feet Per Minute (corr. To 29.92” Hg & 25°C) SOP  Standard Operating Procedure SS  Stainless Steel THC  Total Hydrocarbon Concentration (synonomus with VOC) ‐TO  Thermal Oxidizer Outlet.  Exhaust measurement point after combustion in the Oxidizer 

Chamber TPY  Tons Per Year (unit of emissions per unit time) QA  Quality Assurance QC  Quality Control VOC  Volatile Organic Compound   

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 Section 2 ‐ Page 1 

SECTION 2 

Summary of Test Results 

Emission monitoring was conducted at Intel Corporation’s Rio Rancho, New Mexico facility supporting 

specific annual testing requirements defined in the facility’s air permit.  This 2014 annual test program 

consisted of monitoring the emissions from the seven (7) operating MUNTERS concentrator/thermal 

oxidizer systems (referred to as RCTO’s) supporting the site.  Continuous total hydrocarbon (THC) 

monitoring for volatile organic compounds (VOC’s), using calibrated flame ionization detectors (FID’s), 

was supported for monitoring each of the seven operational RCTOs.  Additionally, the twenty‐one 

operational wet scrubbers supporting all Fab operations were measured for hydrogen chloride (HCl), 

hydrogen fluoride (HF), and chlorine (Cl2) emissions as part of the program.  Fourier Transform Infrared 

Spectroscopy (FT‐IR) measurements were supported for HCl and HF at each of the scrubber exhaust 

streams.  Batch measurements for Cl2 using EPA Reference Method 26A (RM26A) was also conducted on 

each of the scrubbers.  All scrubber and RCTO tests were conducted for a minimum of eight (8) hours; 

with the batch EPA RM26A chlorine measurements conducted in duplicate for 4 hours each concurrent 

with the continuous scrubber measurements. 

The program was conducted to satisfy the testing requirements of Air Quality Permit #325‐M11‐R7 

Conditions A801.B, A802.B, and B111.D.  Condition A801.B requires Intel to conduct annual 8‐hour tests 

of the RCTO exhaust stacks for VOCs in terms of pounds per hour as propane.  Conditions A802.B 

requires Intel to conduct annual 8‐hour tests of all operational wet scrubber exhaust stacks for HCl, HF, 

and Cl2 in terms of pounds per hour.   

In support of the RCTO and scrubber measurements, exhaust gas flow rates were measured for 

converting the measured pollutant concentration data to mass emissions.  The methods used in the test 

program followed the test plan submitted and approved by NMED.  The summary of results is provided 

in Section 2, which is being submitted along with the Universal Stack Test Notification Protocol and 

Report Form to NMED.  Section 3 supports the raw data and certification documentation, as well as 

additional documentation developed from this program.  This is retained on file at the Intel site.   

The facility has a plant site emission limit (PSEL) for VOCs and individual HAPs.  In assessment of annual 

HAP emissions, the annual emissions were developed from the measured and calculated hourly 

emissions applied to a 24 hours/day x 7 days/week x 365 days/year operations.  The pollutant emissions 

are totaled and compared to the permitted PSEL's.  This comparison is for illustrative purposes only, as it 

is not the permit defined mechanism for compliance determination.  Results are reported in Table 1.   

Table 1; Summary Results – Estimated Site Total Tons per Year 

Pollutant  Scrubbers (tpy) RCTOs (tpy) Permitted PSEL (tpy)

HCl  < 0.16  ‐  *   HF  1.49 ‐ *   Cl2  ≤ 0.07 ‐ *   

  VOC  ‐ 2.34 96.5   

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 Section 2 ‐ Page 2 

The overall chronology for the test program for all sources is provided in Table 2 for the scrubbers and 

Table 3 for the RCTO's. 

Table 2; Scrubber Test Chronology 

Scrubber 

Permit # 

Scrubber Equipment 

Number  Date  Test Period 

89  SC‐12‐np2‐4s  07/25/14  08:06 ‐ 17:09 

1  SC‐40‐np2‐3s  07/25/14  08:06 ‐ 17:08 

95  SC‐12‐np2‐2s  07/26/14  07:28 – 15:49 

96  SC‐12‐np2‐1s  07/26/14  07:30 – 15:50 

161  SC‐40‐np2‐1s   OFFLINE  ‐ 

160  SC‐40‐np2‐2s  07/28/14  08:16 ‐ 16:47 

93  SC‐12‐np2‐3s  07/29/14  08:03 ‐ 16:26 

85  SC‐12‐fb1‐2s   OFFLINE  ‐ 

86  SC‐12‐fb1‐3s  07/31/14  08:22 ‐ 17:03 

87  SC‐12‐fb1‐4s  07/31/14  08:22 ‐ 18:04 

88  SC‐12‐fb1‐5s  08/02/14  08:22 ‐ 16:47 

91  RRFB‐SC142‐2‐00s  08/02/14  08:19 ‐ 16:44 

90  RRFB‐SC142‐1‐00s  08/06/14  06:15 ‐ 14:29 

92  RRFD‐SC142‐1‐00s  OFFLINE  ‐ 

94  SC‐12‐fd1‐3s  08/05/14  06:44 ‐ 14:55 

97  SC‐12‐fd1‐6s  08/07/14  06:35 ‐ 15:08 

37  RRGC‐SC‐12‐GC1‐1s  08/09/14  07:00 ‐ 15:23 

151  RRGC‐SC‐133‐3‐100s  08/09/14  06:59 ‐ 15:24 

152  RRGC‐SC‐12‐GC1‐2s  08/11/14  07:31 ‐ 16:34 

153  RRGC‐SC‐133‐4‐100s  08/11/14  07:32 ‐ 16:35 

46  SC‐12‐lt2‐1s  08/20/14  07:52 ‐ 16:36 

53  SC‐12‐lt2‐2s  08/21/14  07:16 ‐ 15:38 

4  SC‐12‐lt2‐3s  08/20/14  07:52 ‐ 16:35 

Table 3; RCTO Overall Test Chronology 

RCTO 

Permit #  RCTO Equipment Number Date  Test Period 

171  F11F VOC138‐1‐120  08/18/2014  06:00 ‐ 15:00 

170  F11F VOC138‐2‐120  08/18/2014  07:00 ‐ 15:00 

168  F11B VOC138‐1‐120  08/15/2014  06:50 ‐ 14:50 

167  F11B VOC138‐2‐120  08/15/2014  06:30 ‐ 14:30 

163  RRNPVOC‐138‐2‐120  07/23/2014  08:40 ‐ 16:40 

164  RRNPVOC‐138‐3‐120  07/23/2014  09:15 ‐ 17:15 

162  RRNPVOC‐138‐1‐120  07/23/2014  07:45 ‐ 15:45 

   

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 Section 2 ‐ Page 3 

A.  Scrubber Measurement Results 

The Scrubber HCl and HF emission results from the 8‐hour FT‐IR measurements are provided in Table 4.  

Scrubber Cl2 results from the duplicate 4‐hour measurements are provided in Table 5.  Scrubber flow 

rate results are provided in Table 6. 

Table 4; Scrubber HCl and HF Results Summary 

Permit No. 

Equipment ID HCl  HF 

(ppb)  (lb/hr)  (tpy)  (ppb)  (lb/hr)  (tpy) 

89  SC‐12‐np2‐4s  ND  ND  ND  489  4.70E‐02  0.206 

1  SC‐40‐np2‐3s  ND  ND  ND  536  3.69E‐02  0.162 

95  SC‐12‐np2‐2s  ND  ND  ND  491  3.27E‐02  0.143 

96  SC‐12‐np2‐1s  ND  ND  ND  525  3.42E‐02  0.150 

161  SC‐40‐np2‐1s  ‐  ‐  ‐  ‐  ‐  ‐ 

160  SC‐40‐np2‐2s  ND  ND  ND  ND  ND  ND 

93  SC‐12‐np2‐3s  ND  ND  ND  ND  ND  ND 

85  SC‐12‐fb1‐2s  ‐  ‐  ‐  ‐  ‐  ‐ 

86  SC‐12‐fb1‐3s  ND  ND  ND  81  7.17E‐03  0.031 

87  SC‐12‐fb1‐4s  ND  ND  ND  367  3.49E‐02  0.153 

88  SC‐12‐fb1‐5s  ND  ND  ND  754  6.81E‐02  0.298 

91  RRFB‐SC142‐2‐00s  ND  ND  ND  ND  ND  ND 

90  RRFB‐SC142‐1‐00s  ND  ND  ND  ND  ND  ND 

92  RRFD‐SC142‐1‐00s  ‐  ‐  ‐  ‐  ‐  ‐ 

94*  SC‐12‐fd1‐3s  <253  <3.41E‐02  <0.149  113  8.35E‐03  0.037 

97  SC‐12‐fd1‐6s  ND  ND  ND  ND  ND  ND 

37  RRGC‐SC‐12‐GC1‐1s  ND  ND  ND  71  4.72E‐04  0.002 

151  RRGC‐SC‐133‐3‐100s  ND  ND  ND  ND  ND  ND 

152*  RRGC‐SC‐12‐GC1‐2s  <241  <3.43E‐03  <0.015  83  6.45E‐04  0.003 

153  RRGC‐SC‐133‐4‐100s  ND  ND  ND  ND  ND  ND 

46  SC‐12‐lt2‐1s  ND  ND  ND  379  2.20E‐02  0.096 

53  SC‐12‐lt2‐2s  ND  ND  ND  384  2.30E‐02  0.101 

4  SC‐12‐lt2‐3s  ND  ND  ND  267  2.47E‐02  0.108 

45a/45b  SC‐40‐lt2‐1s/2s  ND  ND  ND  ND  ND  ND 

‐ ‐ ‐ ‐Total  0.04  0.16  ‐  0.34  1.49 

   (*)  In the source specific measurements, there were a combination of detected and ND values within the eight (8) hour FTIR measurement period.  Under the approach of sources that result in a mix of detectable and non‐detectable concentrations for 

the test period, the stack average concentration for the test was determined by treating the ND readings as ½ MDL.  Sources that report an “ND” for the test run average did not have any pollutant detection (HCL or HF) through the entire 8 hour run period. 

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 Section 2 ‐ Page 4 

Table 5; Scrubber Chlorine (Cl2) Results Summary 

Permit  Equipment  Concentration  Emissions  Emissions 

Number  ID  ppb  ppb  avg  lb/hr  lb/hr  avg  tpy  tpy  avg 

89  11XB‐SC‐12‐np2‐4s  < 5.7  < 6.3  < 6.0  < 1.95E‐03  < 2.12E‐03  < 2.03E‐03  < 8.55E‐03  < 9.27E‐03  < 8.91E‐03 

1  11XB‐SC‐40‐np2‐3s  < 5.2  < 5.4  < 5.3  < 1.30E‐03  < 1.29E‐03  < 1.29E‐03  < 5.67E‐03  < 5.66E‐03  < 5.67E‐03 

95  11XB‐SC‐12‐np2‐2s  < 5.6  < 5.4  < 5.5  < 1.32E‐03  < 1.27E‐03  < 1.30E‐03  < 5.78E‐03  < 5.57E‐03  < 5.68E‐03 

96  11XB‐SC‐12‐np2‐1s  < 5.3  < 5.5  < 5.4  < 1.24E‐03  < 1.26E‐03  < 1.25E‐03  < 5.42E‐03  < 5.51E‐03  < 5.46E‐03 

160  11XB‐SC‐40‐np2‐2s  < 2.1  < 2.1  < 2.1  < 1.01E‐04  < 1.01E‐04  < 1.01E‐04  < 4.43E‐04  < 4.42E‐04  < 4.43E‐04 

93  11XB‐SC‐12‐np2‐3s  < 2.1  < 2.1  < 2.1  < 8.28E‐05  < 8.81E‐05  < 8.55E‐05  < 3.63E‐04  < 3.86E‐04  < 3.74E‐04 

86  11NX‐SC‐12‐fb1‐3s  < 5.4  < 5.4  < 5.4  < 1.70E‐03  < 1.71E‐03  < 1.70E‐03  < 7.45E‐03  < 7.49E‐03  < 7.47E‐03 

87  11NX‐SC‐12‐fb1‐4s  < 5.3  < 5.5  < 5.4  < 1.82E‐03  < 1.85E‐03  < 1.83E‐03  < 7.97E‐03  < 8.09E‐03  < 8.03E‐03 

88  11NX‐SC‐12‐fb1‐5s  < 5.3  < 5.3  < 5.3  < 1.66E‐03  < 1.75E‐03  < 1.71E‐03  < 7.29E‐03  < 7.67E‐03  < 7.48E‐03 

90  11NX RRFB‐SC142‐1‐00s  < 1.1  < 1.1  < 1.1  < 2.99E‐04  < 3.03E‐04  < 3.01E‐04  < 1.31E‐03  < 1.33E‐03  < 1.32E‐03 

91  11NX‐RRFB‐SC142‐2‐00s  < 1.1  < 1.0  < 1.1  < 2.82E‐04  < 2.72E‐04  < 2.77E‐04  < 1.23E‐03  < 1.19E‐03  < 1.21E‐03 

94  sc‐12‐fd1‐3s  3.1  3.3  3.2  7.90E‐04  8.89E‐04  8.39E‐04  3.46E‐03  3.89E‐03  3.68E‐03 

97  sc‐12‐fd1‐6s  < 5.3  < 5.2  < 5.2  < 1.32E‐03  < 1.30E‐03  < 1.31E‐03  < 5.78E‐03  < 5.70E‐03  < 5.74E‐03 

37  RRGC‐sc‐12‐gc1‐1s  < 2.2  < 2.2  < 2.2  < 5.07E‐05  < 5.26E‐05  < 5.17E‐05  < 2.22E‐04  < 2.30E‐04  < 2.26E‐04 

151  RRGC‐sc‐133‐3‐100s  < 1.1  1.4  ≤ 1.2  < 3.15E‐05  4.23E‐05  ≤ 3.69E‐05  < 1.38E‐04  1.85E‐04  ≤ 1.62E‐04 

152  RRGC‐SC‐12‐GC1‐2  < 5.4  < 5.4  < 5.4  < 1.56E‐04  < 1.44E‐04  < 1.50E‐04  < 6.85E‐04  < 6.30E‐04  < 6.58E‐04 

153  RRGC‐SC‐133‐4‐100  < 2.1  < 2.2  < 2.2  < 4.89E‐05  < 5.10E‐05  < 4.99E‐05  < 2.14E‐04  < 2.23E‐04  < 2.19E‐04 

46  11XF‐SC‐12‐lt2‐1s  5.1  2.4  3.8  1.03E‐03  5.05E‐04  7.70E‐04  4.53E‐03  2.21E‐03  3.37E‐03 

53  11XF‐SC‐12‐lt2‐2s  1.5  1.2  1.4  3.12E‐04  2.68E‐04  2.90E‐04  1.37E‐03  1.17E‐03  1.27E‐03 

4  SC‐12‐lt2‐3s  3.5  3.2  3.4  1.16E‐03  1.07E‐03  1.11E‐03  5.09E‐03  4.67E‐03  4.88E‐03 

45a  11XF‐SC‐40‐lt2‐1s_2s  < 1.0  < 1.1  < 1.1  < 4.46E‐05  < 4.97E‐05  < 4.71E‐05  < 1.95E‐04  < 2.18E‐04  < 2.06E‐04 = =

Total  ≤ 1.65E‐02  ≤ 7.25E‐02 

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 Section 2 ‐ Page 5 

Table 6; Scrubber Flow Rate Results Summary 

    Run  Stack Press.  Moisture  Stack Gas Velocity  Flow Rate Flow RatePermit No.  Equipment ID  No.  (in. Hg)  (%)  Temp (oF) (fps)  (acfm)  (dscfm) 

89  SC‐12‐np2‐4s 1  24.78  2.24  64.1  50.70  38,228.2  31,182.2 

2  24.75  2.29  68.4  50.27  37,906.1  30,618.9 

Avg.  24.76  2.26  66.2  50.49  38,067.1  30,900.5 

                 

1  SC‐40‐np2‐3s 

1  24.78  2.21  64.5  36.65  27,634.1  22,533.3 

2  24.76  2.26  71.0  35.84  27,021.1  21,729.1 

Avg.  24.77  2.24  67.8  36.24  27,327.6  22,131.2 

                 

95  SC‐12‐np2‐2s 

1  24.75  2.29  65.0  35.16  26,512.3  21,551.1 

2  24.75  2.28  69.8  34.89  26,303.7  21,191.6 

Avg.  24.75  2.28  67.4  35.02  26,408.0  21,371.4 

                 

96  SC‐12‐np2‐1s 

1  24.75  2.28  64.9  34.19  25,779.7  20,958.8 

2  24.75  2.28  68.6  34.26  25,832.8  20,862.3 

Avg.  24.75  2.28  66.8  34.23  25,806.3  20,910.6 

                 

160  SC‐40‐np2‐2s 

1  24.98  2.43  68.3  41.06  5,374.9  4,377.1 

2  24.96  2.46  73.2  41.96  5,492.5  4,426.8 

Avg.  24.97  2.44  70.7  41.51  5,433.7  4,401.9 

                 

93  SC‐12‐np2‐3s 

1  24.91  2.56  66.0  34.12  4,466.5  3,637.4 

2  24.86  2.62  70.3  35.67  4,669.6  3,761.7 

Avg.  24.88  2.59  68.1  34.90  4,568.0  3,699.5 

                 

86  SC‐12‐fb1‐3s 

1  24.50  2.20  60.3  29.66  34,937.8  28,395.7 

2  24.44  2.19  63.7  30.14  35,509.1  28,606.3 

Avg.  24.47  2.20  62.0  29.90  35,223.4  28,501.0 

                 

87  SC‐12‐fb1‐4s 

1  24.50  2.15  60.2  32.31  38,065.0  30,951.0 

2  24.49  2.17  60.4  31.51  37,119.6  30,153.7 

Avg.  24.49  2.16  60.3  31.91  37,592.3  30,552.4 

                 

88  SC‐12‐fb1‐5s 

1  24.51  2.21  61.3  29.51  34,762.4  28,211.1 

2  24.51  2.19  63.6  31.34  36,918.9  29,822.7 

Avg.  24.51  2.20  62.4  30.42  35,840.6  29,016.9 

   1  24.29  2.38  62.5  26.77  31,542.9  25,258.9 

90  RRFB‐SC142‐1‐00s  2  24.32  2.45  63.0  27.04  31,851.6  25,492.1 

    Avg.  24.30  2.41  62.8  26.91  31,697.2  25,375.5 

   

 

 

 

 

 

 

 

       

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 Section 2 ‐ Page 6 

Table 6; Scrubber Flow Rate Results Summary  (Continued) 

 

    Run  Stack Press.  Moisture  Stack Gas Velocity  Flow Rate Flow RatePermit No.  Equipment ID  No.  (in. Hg)  (%)  Temp (oF) (fps)  (acfm)  (dscfm) 

91  RRFB‐SC142‐2‐00s 

1  24.38  2.39  62.5  25.40  29,920.4  24,051.3 

2  24.38  2.36  62.0  24.86  29,285.0  23,566.2 

Avg.  24.38  2.37  62.3  25.13  29,602.7  23,808.8 

                 

94  SC‐12‐fd1‐3s 

1  25.21  2.15  59.1  23.27  27,418.0  22,993.4 

2  24.52  2.18  61.0  25.50  30,046.0  24,412.4 

Avg.  24.87  2.16  60.0  24.39  28,732.0  23,702.9 

                 

97  SC‐12‐fd1‐6s 

1  24.39  2.13  57.0  23.37  27,535.8  22,434.9 

2  24.44  2.16  58.0  23.79  28,031.9  22,832.6 

Avg.  24.41  2.15  57.5  23.58  27,783.8  22,633.8 

                 

37  RRGC‐SC‐12‐GC1‐1s 

1  24.74  3.29  69.0  21.27  2,646.6  2,112.5 

2  24.80  3.25  76.1  21.75  2,706.2  2,137.1 

Avg.  24.77  3.27  72.5  21.51  2,676.4  2,124.8 

                 

151  RRGC‐SC‐133‐3‐100s 

1  24.74  2.56  69.0  31.03  3,290.6  2,645.7 

2  24.80  2.67  75.4  32.22  3,416.4  2,717.7 

Avg.  24.77  2.62  72.2  31.63  3,353.5  2,681.7 

                 

152  RRGC‐SC‐12‐GC1‐2s 

1  24.91  2.86  66.0  25.11  3,205.8  2,602.8 

2  24.92  2.86  72.0  23.53  3,003.6  2,412.0 

Avg.  24.92  2.86  69.0  24.32  3,104.7  2,507.4 

                 

153  RRGC‐SC‐133‐4‐100s 

1  24.92  2.58  66.0  23.97  2,541.2  2,069.5 

2  24.93  2.78  77.0  25.18  2,670.1  2,126.7 

Avg.  24.92  2.68  71.5  24.57  2,605.6  2,098.1 

                 

46  sc‐12‐lt2‐1s 

1  24.65  2.65  63.8  30.40  22,921.8  18,534.6 

2  24.65  2.65  70.0  31.02  23,386.0  18,686.8 

Avg.  24.65  2.65  66.9  30.71  23,153.9  18,610.7 

53  sc‐12‐lt2‐2s 1  24.70  2.18  62.8  30.93  23,319.9  19,019.5 

2  24.72  2.22  67.1  31.93  24,078.2  19,486.9 

Avg.  24.71  2.20  64.9  31.43  23,699.1  19,253.2 

                 

4  sc‐12‐lt2‐3s 

1  24.65  2.24  63.3  48.66  36,688.5  29,820.5 

2  24.65  2.20  69.5  49.12  37,034.5  29,756.9 

Avg.  24.65  2.22  66.4  48.89  36,861.5  29,788.7 

                 

45a/45b sc‐40‐lt2‐1s/sc‐40‐lt2‐

2s 

1  24.72  2.08  71.0  45.43  4,817.4  3,874.9 

2  24.77  2.25  64.1  48.83  5,177.0  4,219.7 

Avg.  24.74  2.17  67.6  47.13  4,997.2  4,047.3 

                 

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 Section 2 ‐ Page 7 

B.  RCTO FID Measurement Results 

The RCTO emissions summary in terms of tons per year is provided in Table 7.  Individual RCTO emission 

rate results are provided in Table 8 through Table 14.  RCTO flow rates results are provided in Table 15.  

All RCTO abatement systems have separate concentrator rotor (RO) and thermal oxidizer (TO) exhausts.  

Concurrent measurements of TO and RO exhaust stacks were conducted to quantify emissions for each 

Unit.  The VOC (FID measured)  overall averages reported in the individual RCTO emission rate tables, 

used the documented one minute measured concentration values derived from the entire monitoring 

period and not the one hour block average values for each RCTO test run reported in the Table.  Hourly 

values are reported to demonstrate variability over the 8 hour test run for each system. 

Table 7; RCTO Annual Emissions Estimate Summary 

Permit No.   Equipment ID VOC (tpy) 

162  RRNP VOC138‐1‐120  0.59 

163  RRNP VOC138‐2‐120  0.35 

164  RRNP VOC138‐3‐120  0.42 

167  F11B VOC138‐2‐120  0.16 

168  F11B VOC138‐1‐120  0.64 

170  F11B VOC138‐2‐120  0.07 

171  F11B VOC138‐1‐120  0.11 

  Total  2.34 

  

Table 8; RCTO Permit ID 162 (RRNP‐VOC138‐1‐120) Emission Results;  07/23/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  07:45  08:45  0.12  1.81  0.001  0.13  0.13 

2  08:45  09:45  0.10  1.94  0.001  0.14  0.14 

3  09:45  10:45  0.21  1.91  0.002  0.13   0.14 

4  10:45  11:45  0.21  1.82  0.002  0.13  0.13 

5  11:45  12:45  0.27  2.14  0.002  0.15  0.15 

6  12:45  13:45  0.25  1.98  0.002  0.14  0.14 

7  13:45  14:45  0.23  1.69  0.002  0.12  0.12 

8  14:45  15:45  0.20  1.80  0.002  0.13  0.13 

Average      0.20  1.89  0.002  0.13  0.14 

    

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 Section 2 ‐ Page 8 

Table 9; RCTO Permit ID 163 (RRNP‐VOC138‐2‐120) Emissions Results 07/23/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  08:40  09:40  0.26  0.97  0.002  0.08  0.08 

2  09:40  10:40  0.25  0.96  0.002  0.08  0.08 

3  10:40  11:40  0.25  0.93  0.002  0.08  0.08 

4  11:40  12:40  0.28  1.08  0.002  0.09  0.09 

5  12:40  13:40  0.30  1.01  0.002  0.08  0.09 

6  13:40  14:40  0.23  0.85  0.002  0.07  0.07 

7  14:40  15:40  0.24  0.84  0.002  0.07  0.07 

8  15:40  16:40  0.27  0.80  0.002  0.07  0.07 

Average      0.26  0.93  0.002  0.08  0.08 

Table 10; RCTO Permit ID 164 (RRNP‐VOC138‐3‐120) Emissions Results 07/23/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  09:15  10:15  0.00  1.26  0.000  0.10  0.10 

2  10:15  11:15  0.00  1.33  0.000  0.10  0.10 

3  11:15  12:15  0.00  1.25  0.000  0.10  0.10 

4  12:15  13:15  0.00  1.47  0.000  0.11  0.11 

5  13:15  14:15  0.00  1.05  0.000  0.08  0.08 

6  14:15  15:15  0.00  1.20  0.000  0.09  0.09 

7  15:15  16:15  0.00  1.28  0.000  0.10  0.10 

8  16:15  17:15  0.00  1.02  0.000  0.08  0.08 

Average      0.00  1.23  0.000  0.10  0.10 

 

Table 11; RCTO Permit ID 167 (F11B‐VOC138‐2‐120) Emissions Results 08/15/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  06:30  07:30  0.63  0.34  0.004  0.01  0.02 

2  07:30  08:30  0.57  0.25  0.004  0.01  0.01 

3  08:30  09:30  0.46  2.29  0.003  0.09  0.09 

4  9:30  10:30  0.49  0.31  0.003  0.01  0.02 

5  10:30  11:30  0.53  0.85  0.004  0.03  0.04 

6  11:30  12:30  0.38  0.91  0.003  0.03  0.04 

7  12:30  13:30  0.33  0.85  0.002  0.03  0.03 

8  13:30  14:31  0.28  1.01  0.002  0.04  0.04 

Average      0.46  0.85  0.003  0.03  0.04 

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 Section 2 ‐ Page 9 

Table 12; RCTO Permit ID 168(F11B‐VOC138‐1‐120)   Emissions Results 08/15/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  06:51  07:51  0.04  0.68  0.000  0.03  0.03 

2  07:51  08:51  0.03  0.68  0.000  0.03  0.03 

3  08:51  09:51  0.03  2.82  0.000  0.10  0.10 

4  09:51  10:51  0.01  0.66  0.000  0.02  0.02 

5  10:51  11:51  0.00  0.64  0.000  0.02  0.02 

6  11:51  12:51  0.00  0.60  0.000  0.02  0.02 

7  12:51  13:51  0.00  0.54  0.000  0.02  0.02 

8  13:51  14:51  0.00  0.54  0.000  0.02  0.02 

Average      0.00  0.90  0.113  0.03  0.15 

Table 13; RCTO Permit ID 170 (F11F‐VOC138‐2‐120)       Emissions Results 08/18/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  07:04  08:04  0.05  0.54  0.000  0.03  0.03 

2  08:04  09:04  0.03  0.49  0.000  0.03  0.03 

3  09:04  10:04  0.00  0.40  0.000  0.02  0.02 

4  10:04  11:04  0.00  0.34  0.000  0.02  0.02 

5  11:04  12:04  0.00  0.27  0.000  0.01  0.01 

6  12:04  13:04  0.00  0.21  0.000  0.01  0.01 

7  13:04  14:04  0.00  0.13  0.000  0.01  0.01 

8  14:04  15:05  0.00  0.08  0.000  0.00  0.00 

Average      0.00  0.31  0.000  0.02  0.02 

  

Table 14; RCTO Permit ID 171 (F11F‐VOC138‐1‐120) Emissions Results 08/18/2014 

Test              Total RCTO Running      TO VOC  RO VOC  TO Emissions  RO Emissions  Emissions Hour  Start Time  Ending Time  (ppm as C3H8)  (ppm as C3H8) (lbs/hr)  (lbs/hr)  (lbs/hr) 

1  06:40  07:40  0.05  0.63  0.000  0.03  0.03 

2  07:40  08:40  0.05  0.59  0.000  0.03  0.03 

3  08:40  09:40  0.05  0.55  0.000  0.03  0.03 

4  09:40  10:40  0.06  0.50  0.000  0.03  0.03 

5  10:40  11:40  0.05  0.47  0.000  0.02  0.02 

6  11:40  12:40  0.05  0.47  0.000  0.02  0.02 

7  12:40  13:40  0.04  0.39  0.000  0.02  0.02 

8  13:40  14:41  0.05  0.39  0.000  0.02  0.02 

Average      0.05  0.50  0.000  0.03  0.03 

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Table 15; RCTO Flow Rate Summary Results 

Permit  Equipment ID  Stack Press.  Moisture  Stack Gas  Velocity  Flow Rate  Flow Rate No.  (in. Hg)  (%)  Temp (oF)  (fps)  (acfm)  (dscfm) 

               

162 

RRNP‐VOC138‐1‐120‐TO  24.82  5.56%  782.8  34.63  3,570  1,188 

RRNP‐VOC138‐1‐120‐RO  24.27  1.26%  93.4  26.40  13,311  10,170 

Total  ‐  ‐  ‐  ‐  16,881  11,358 

               

163 

RRNP‐VOC138‐2‐120‐TO  24.83  4.98%  711.3  27.85  2,871  1,021 

RRNP‐VOC138‐2‐120‐RO  24.27  1.24%  86.9  29.13  15,541  12,018 

Total  ‐  ‐  ‐  ‐  18,412  13,309 

               

164 

RRNP‐VOC138‐3‐120‐TO  24.83  4.87%  688.3  28.67  2,955  1,073 

RRNP‐VOC138‐3‐120‐RO  24.27  1.23%  111.3  29.13  14,920  11,047 

Total  ‐  ‐  ‐  ‐  17,875  12,120 

               

167 

F11B VOC138‐2‐120‐TO  24.77  6.27%  704.9  28.07  2,853  1,004 

F11B VOC138‐2‐120‐RO  24.29  1.24%  80.8  13.79  6,999  5,478 

Total  ‐  ‐  ‐  ‐  9,852  6,482 

               

168 

F11B VOC138‐1‐120‐TO  24.77  5.98%  720.1  28.26  2,873  1,001 

F11B VOC138‐1‐120‐RO  24.29  1.27%  83.4  13.36  6,777  6,278 

Total  ‐  ‐  ‐  ‐  9,650  7,279 

               

170 

F11F VOC138‐2‐120‐TO  24.65  5.78%  741.3  29.44  3,035  1,036 

F11F VOC138‐2‐120‐RO  24.20  1.17%  88.8  18.71  9,583  7,371 

Total  ‐  ‐  ‐  ‐  12,618  8,407 

               

171 

F11F VOC138‐1‐120‐TO  24.66  5.74%  745.1  30.43  3,138  1,068 

F11F VOC138‐1‐120‐RO  24.20  1.23%  86.8  18.34  9,392  7,243 

Total  ‐  ‐  ‐  ‐  12,530  8,311 

 

   

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 Section 2 ‐ Page 11 

/. Unit Operating Parameters 

Specific operating parameters are company business confidential information (CBI) and are being 

submitted under separate cover. 

5. Control  Equipment Operating Parameters 

The recap of the abatement device control parameters identified in the Test Protocol is summarized for 

the scrubber systems in Table 16.  To demonstrate continuous scrubber operation,  the permittee is 

required to monitor the recirculation water flow rate (gallons per minute) and the fan status.  The 

average scrubber control parameters for recirculation water flow, fan status, and bypass status defined 

during each test period are detailed below. 

Table 16; Scrubber Control Parameters 

Permit  Equipment  Start  End  Recirculation Flow rate (gpm)  Bypass  Fan 

No.   ID  Time  Time  Avg   Max  Min  Status  Status 

                 

96  SC‐12‐np2‐1s  7/26/14 7:00  7/26/14 16:00  709.9  724.6  698.4  Off  On 

95  SC‐12‐np2‐2s  7/26/14 7:00  7/26/14 16:00  603.8  616.9  584.5  Off  On 

1  SC‐40‐np2‐3s  7/25/14 8:00  7/25/14 18:00  565.0  634.9  460.5  Off  On 

89  SC‐12‐np2‐4s  7/25/14 8:00  7/25/14 18:00  646.5  683.0  562.8  Off  On 

161*  SC‐40‐np2‐1s  7/28/14 8:00  7/29/14 17:00  96.8  97.4  95.2  Off  On 

160  SC‐40‐np2‐2s  7/28/14 8:00  7/28/14 17:00  68.9  72.5  65.5  Off  On 

93  SC‐12‐np2‐3s  7/29/14 8:00  7/29/14 17:00  112.7  124.4  98.7  Off  On 

85  SC‐12‐fb1‐2s  7/31/14 8:00  7/31/14 19:00  0.0  0.0  0.0  Off  Off 

86  SC‐12‐fb1‐3s  7/31/14 8:00  7/31/14 18:00  495.6  506.8  480.8  Off  On 

87  SC‐12‐fb1‐4s  7/31/14 8:00  7/31/14 19:00  521.1  546.0  491.1  Off  On 

88  SC‐12‐fb1‐5s  8/02/14 8:00  8/02/14 17:00  606.3  675.0  382.1  Off  On 

94  SC‐12‐fd1‐3s  8/05/14 6:00  8/05/14 15:00  595.3  603.1  588.8  Off  On 

97  SC‐12‐fd1‐6s  8/07/14 6:00  8/07/14 16:00  580.2  596.4  561.7  Off  On 

90  RRFB‐SC142‐1‐00s  8/02/14 8:00  8/06/14 15:00  481.5  497.1  468.3  Off  On 

91  RRFB‐SC142‐2‐00s  8/02/14 8:00  8/02/14 17:00  454.5  481.9  435.5  Off  On 

92  RRFD‐SC142‐1‐00s  8/02/14 8:00  8/06/14 15:00  0.2  0.2  0.2  Off  Off 

37  RRGC‐SC‐12‐GC1‐1s  8/09/14 7:00  8/09/14 16:00  160.8  171.4  149.2  Off  On 

152  RRGC‐SC‐12‐GC1‐2s  8/11/14 7:00  8/11/14 17:00  80.7  81.7  80.0  Off  On 

151  RRGC‐SC‐133‐3‐100s  8/09/14 6:00  8/09/14 16:00  85.0  93.6  71.3  Off  On 

153  RRGC‐SC‐133‐4‐100s  8/11/14 7:00  8/11/14 17:00  83.6  88.6  75.7  Off  On 

46  SC‐12‐lt2‐1s  8/20/14 7:00  8/20/14 17:00  698.9  772.3  618.3  Off  On 

4  SC‐12‐lt2‐3s  8/20/14 7:00  8/20/14 17:00  508.5  589.2  587.8  Off  On 

53  SC‐12‐lt2‐2s  8/21/14 7:00  8/21/14 16:00  588.4  543.1  472.0  Off  On 

45a  SC‐40‐lt2‐1s  8/22/14 7:00  8/22/14 16:00  95.4  99.8  86.5  Off  On 

45b  SC‐40‐lt2‐2s  8/22/14 7:00  8/22/14 16:00  77.2  82.4  66.2  Off  On 

 *Scrubber 161 was in a redundant readiness state, Fan at 20% RPM setpoint to keep motor turning  but not move air against the closed dampers.  Recirc flow was kept active to support water quality and readiness for redundancy.    

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 Section 2 ‐ Page 12 

The RCTO control parameters TO chamber temperature, inlet damper positions, and system bypass 

damper position are provided in Table 17.  The TO chamber temperature is used to confirm compliance 

with Permit 0325‐M11‐R5 Condition A801.A, that defines that the …”permittee shall ensure that the 

combustion chamber remains at 1385°F plus or minus 50°F on a 24 hour block average when the unit is 

in operation”…, further the inlet damper position, bypass damper position, and temperature are 

required to be documented to demonstrate that a unit is in operation.   All data recorded demonstrated 

the systems met these permit conditions. 

Table 17; RCTO Control Parameters 

                Bypass Permit  Equipment  Start  Stop  TO Chamber Temperature  Fan  Damper No.  No.  Time  Time  Avg(°F)  Max(°F)  Min(°F)  Status  Position 

162  RRNP‐VOC138‐1‐120  7/23/14 7:00  7/23/14 16:00  1384.0  1385.6  1382.3  Normal  Off 

163  RRNP‐VOC138‐2‐120  7/23/14 8:00  7/23/14 17:00  1385.0  1386.9  1383.6  Normal  Off 

164  RRNP‐VOC138‐3‐120  7/23/14 9:00  7/23/14 18:00  1385.1  1386.3  1383.4  Normal  Off 

167  F11B VOC138‐2‐120  8/15/14 6:00  8/15/14 15:00  1375.0  1376.2  1373.9  Normal  Off 

168  F11B VOC138‐1‐120  8/15/14 6:00  8/15/14 15:00  1375.2  1376.9  1373.8  Normal  Off 

170  F11F VOC138‐2‐120  8/18/14 6:00  8/18/14 15:00  1375.1  1375.7  1374.3  Normal  Off 

171  F11F VOC138‐1‐120  8/18/14 6:00  8/18/14 15:00  1374.8  1375.5  1375.5  Normal  Off 

E.  Comparison of Measured and Modeled Parameters 

The comparison of modeled versus measured parameters is not applicable to this test program 

F. Relative Detection Limits of Measured Compounds 

Detection limits for the scrubber FT‐IR measurement system used in support of the quantification and 

reporting of the compounds of interest is provided in Table 18.   The FT‐IR process supports spectral 

residual analyses that resolves (quantifies) the identified compounds. 

Table 18; HAP and Target Detection Limits for Measurement Program 

COMPOUND  MDL (*).  Units 

HCl  417  ppb 

HF  145  ppb 

  (*)  In the source specific measurements, if the measurements result in a combination of detected and ND values within the eight (8) hour FTIR measurement period, the stack average concentration for the test is reported by treating the ND readings as ½ MDL.  Sources that report an “ND” for the test run average did not have any pollutant detection (HCL or HF) through the entire 8 hour run period for that source. 

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 Section 2 ‐ Page 13 

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