tracer v2.2.1 manual - delft university of...

© 2016 GenISys GmbH

v2.2.1 Manual

5/30/2016 3:44 PM

TRACER

Advancing the Standard in E-Beam Lithography

TRACER Manual

All rights reserved. No parts of this work may be reproduced in any form or by any means - graphic, electronic, ormechanical, including photocopying, recording, taping, or information storage and retrieval systems - without thewritten permission of the publisher.

Products that are referred to in this document may be either trademarks and/or registered trademarks of therespective owners. The publisher and the author make no claim to these trademarks.

While every precaution has been taken in the preparation of this document, the publisher and the author assume noresponsibility for errors or omissions, or for damages resulting from the use of information contained in thisdocument or from the use of programs and source code that may accompany it. In no event shall the publisher andthe author be liable for any loss of profit or any other commercial damage caused or alleged to have been causeddirectly or indirectly by this document.

Printed: May 2016 in Munich, Germany

TRACER v2.2.1 Manual


3Contents


Table of Contents

I Introduction 5

................................................................................................................................... 51 New Features

................................................................................................................................... 52 System Requirements

................................................................................................................................... 63 Installation

......................................................................................................................................................... 7Windows

......................................................................................................................................................... 10Linux

................................................................................................................................... 114 License Overview

II Setting Up and Running aSimulation 11

................................................................................................................................... 141 Stack Description

................................................................................................................................... 162 Parameters

................................................................................................................................... 163 Setting BEAM Size and Blur

III Calibration 18

................................................................................................................................... 191 Data

................................................................................................................................... 202 Base Dose and Blur

................................................................................................................................... 213 Density Dependent Bias

IV Archiving PSFs 23

................................................................................................................................... 241 2D-PSF Archiving

................................................................................................................................... 252 3D-PSF Archiving

V Import Existing Simulation 26

VI Analytic PSF 26

VII Convolving PSFs 28

VIII Averaging PSFs 29

IX Dose Factor Estimation 30

X GUI Overview 31

................................................................................................................................... 321 Program Menu

......................................................................................................................................................... 32File

......................................................................................................................................................... 34Properties

......................................................................................................................................................... 36Edit

......................................................................................................................................................... 37View

.................................................................................................................................................. 38Histograms

......................................................................................................................................................... 38Help

................................................................................................................................... 402 Tool Bar

................................................................................................................................... 413 Navigator

TRACER v2.2.1 Manual4


......................................................................................................................................................... 42Archive

.................................................................................................................................................. 422D-PSF Archive

.................................................................................................................................................. 433D-PSF Archive

.................................................................................................................................................. 44Material Archive

......................................................................................................................................................... 46Project

.................................................................................................................................................. 46Working w ith Active Simulations

.................................................................................................................................................. 48Working w ith 2D-PSFs

.................................................................................................................................................. 49Working w ith 3D-PSFs

................................................................................................................................... 514 2D-Radial View

................................................................................................................................... 525 2D-Z View

................................................................................................................................... 536 3D View

XI Keyboard Shortcuts: QuickReference 54

XII Trajectories 54

................................................................................................................................... 551 Saving Trajectories

................................................................................................................................... 562 Visualizing Trajectories (TRACER)

................................................................................................................................... 573 Visualizing Trajectories (GNUplot)

XIII Advanced 59

................................................................................................................................... 591 Cross Sections

XIV Technical Support 59

................................................................................................................................... 591 License

......................................................................................................................................................... 60License Update

.................................................................................................................................................. 60Creating the RaC File

.................................................................................................................................................. 62Updating the License w ith the RaU File

......................................................................................................................................................... 64License Server Client Configuration

................................................................................................................................... 652 Remote usage

................................................................................................................................... 683 Reporting a problem

................................................................................................................................... 694 Requesting Enhancements

................................................................................................................................... 695 Training

................................................................................................................................... 696 Technical Issues

......................................................................................................................................................... 69FAT32 File System

Index 70

5Introduction


1 Introduction

This manual is intended as a reference for all users of TRACER. TRACER is a front-end graphicaluser interface (GUI) for managing and creating point spread functions (PSFs) for electron scattering.The user should be familiar with the background of PSFs and their representation.

The baseline for this document is TRACER release 2.2.1 running on a Microsoft Windows or Linuxoperating system. This manual will introduce you to the principle operation of TRACER in creationand management of PSFs data.

· GUI Overview· Setting up a PSF Simulation· Managing the Simulation Data· Managing Existing Simulation Data

1.1 New Features

New in version 2.2

A new Calibration section: Blur, base dose and density dependent bias can be calibrated inside ofTRACER.

New Hotkeys and Shortcuts.

Viewing Histograms.

The TRACER Manual can be accessed from the Help Button.

The Material Archive section has been extended.

1.2 System Requirements

TRACER can be installed on either a Windows or Linux based platform. As the processing of layoutdata is typically CPU, memory and hard drive intensive, we suggest using a modern computer witha quad core CPU, adequate RAM and a hard drive with high read and write speeds.

We suggest that your computer has at least

· CPU : 2.5 GHz with 4 cores· 4 GB RAM· 500GB HDD

Supported platforms are:

· Microsoft Windows Vista, 7, 8 or 10· Linux

o RedHat 5,6 or 7

o Ubuntu 1404 or later

Please inquire about the support of other operating system environments.

6 TRACER v2.2.1 Manual


1.3 Installation

To install TRACER, an install package is provided that contains runtime binaries, documentation andexamples. In this install package are also third party software install packages that are needed torun BEAMER.

The TRACER install package consists of:

· Documentation (Manual, Release Notes)· Training videos· Sample layout and PSF files· TRACER runtime files· CodeMeter license manager

Documentation, sample files and training videos are installed in the GenISys program folder bydefault. Under Windows-based systems this documentation can be accessed via the Start menu.

7Introduction


1.3.1 Windows

Download the TRACER installation executable package and run the installer.

If the version of TRACER is already installed, the following option is available:

Otherwise the TRACER version can be installed as shown below:



Depending on your versionof Windows you mayencounter the followingdialog or similar. Click"Yes" to continue.

9Introduction


The installation will tell you when it is finished. Click "Finish" to exit the installation wizard.After successful installation, connect your USB license key to the PC and start TRACER using

the TRACER icon on your desktop or going through “Start -> Program Files -> TRACER”

You will find the installation folder of TRACER under “C:\Program Files\GenISys\TRACER v2.2.1” (default at installation)

In this directory you will find the sub folders:· bin : contains the binary files for TRACERo Flow_Library : storage for Central Flow library entries

o LayoutEditor : contains the binary files for LayoutEditor

o rc : contains resource files for TRACER

· shareo 3rd_party : third party software runtime files for Visual C and CodeMeter

o doc: this Manual, Training Videos, Release Notes, License agreement

o examples : Sample layouts (used in the Manual/Tutorial), TRACER Archive PSF files (some MC

simulation files for typical stacks)

For the first time user, it is highly recommended that you watch the training videos.



1.3.2 Linux

Be sure that you have downloaded the latest version of TRACER from the GenISys website. If this isyour first time installing TRACER, you will also need to install CodeMeter. CodeMeter can beobtained from the GenISys website through the support page. The CodeMeter binary comes as anRPM package that can be installed by double-clicking the package and allowing the Linux packagemanager to handle the installation. You should have root access to install the package. Once CodeMeter is installed, follow the instructions below to install TRACER.

In the instructions below, ‘$’ signifies a command prompt. Anything following is the command youmust type and hit the ENTER key. To begin, open a new terminal.

To install TRACER onto your Linux box, you will need to login as root. Type the following command;it will ask you for a password:

$ su

We are going install TRACER in a directory called TRACER under /usr/local:

$ cd /usr/local/

$ mkdir TRACER

$ cd TRACER

In the TRACER directory, unzip the entire TRACER installation package. The * indicates thecharacters that would complete the file name; be sure to type the actual file name in its entirety. Theperiod at the end of the command string is part of the command.

$ tar -xzf PATH_TO_LAYOUT_TRACER_INSTALL_PACKAGE/TRACER-*.tar.gz .

Create a soft link to the folder with the most current version of TRACER. The * indicates thecharacters that would complete the directory name; be sure to type the actual directory name in itsentirety:

$ ln -s TRACER-*/ current

Copy the script to the present working directory. You should still be inside /usr/local/TRACER. Theperiod at the end of the command string is part of the command.

$ cp current/set_TRACER_environment.sh .

Using your favorite editor, edit the file you just copied. In the command below, we are using the texteditor called gedit:

$ gedit set_TRACER_environment.sh

In the editor, look for the string `pwd`. Delete this string, including the tick marks and replace it withthe following:

/usr/local/TRACER/current

In the same editor, go the PATH variable and add in between the ‘=’ and ‘$’, the following string,including the colon:

/usr/local/TRACER/current/bin:

Log out of root. Depending on how your system is administrated, you will need to add the followingline at the end of every .bashrc file for each user:

source /usr/local/TRACER/set_TRACER_environment.sh

11Introduction


Your installation should be complete. Open a new terminal and run TRACER:

$ TRACER

1.4 License Overview

GenISys uses the CodeMeter USB hardware key and software rights management solution fromWIBU Systems AG (http://wibu.com). It protects the software from unauthorized use. CodeMeterhardware keys are hardware tokens which, when attached to a computer, monitor and enforce thelicensing of protected applications. The licensee may only use the programs for which he has paid alicense fee (or in the case of an evaluation copy, those programs the Licensee is authorized toevaluate) and for which Licensee has received a valid Software Certificate.

The CodeMeter software will be installed on the PC during the first installation of TRACER. Afterinstallation the CodeMeter USB license stick needs to be connected to run TRACER. TheCodeMeter stick is pre-programmed by GenISys. It contains all the required information such aslicense expiry date, features which are licensed, number of users and the maintenance expiry date.

Important: Do not try to modify the data on the license stick. Any modification will void the license!

The license stick number and the state can be viewed by opening the "CodeMeter Control Center". You can open the Control Center by double clicking on the CodeMeter icon in the status bar, or by“Start -> Program Files -> CodeMeter -> CodeMeter Control Center”.

The Control Center is also used for updating the license (e.g. extending an expiry date, maintenancedate, adding features or additional users) by generating a *. WibuCmRaC file and sending it toGenISys support. GenISys Support will send back a *.WibuCmRaU file, which can be loaded usingthe CodeMeter Control Center. Opening the WebAdmin (button at lower right of CodeMeter ControlCenter) you can get detailed information on the content of your license and control settings for theenvironment (eg. network). Please contact [email protected] for more information.

The TRACER software license offers the user the following:

· Multiple PC usage by utilising the USB license stickTRACER can be installed on multiple PC's and run by connecting the USB license stick to theappropriate PC

· Multi-Platform – run TRACER on both Windows and Linux systems· Multi-User application

The number of users working in parallel depends on the purchased license. The standard is one(1). Please inquire about Multi-User license configurations.

· Workstation or Network AccessThe license can be used in a network by having one computer in the network act as license server;other computers in the network act as clients. Please contact GenISys Support for detailedinformation on setting up network (floating) licenses.

2 Setting Up and Running a Simulation

Running a Monte Carlo simulation is fairly straightforward. Follow the 3 simple steps:

Load TRACER. Use the keyboard shortcut Alt + R or click on the Simulate button in the toolbar toopen the Monte Carlo Simulation dialog.

http://wibu.com

mailto:[email protected]



Enter the simulation parameters starting with the material stack, which includes the resist beingused and the underlying layers with the chosen thicknesses.

Finally to the right are the simulation parameters for the Beam Energy [kV] (accelerating voltage),number of Electrons (one million electrons should be enough) and Vertical Grid. In IntermediateResults the Update Interval (seconds) value is entered.

When you are finished setting up the simulation, click the Simulate (shown outlined in red above)button. After the Interval Write period has initially passed, TRACER will automatically generate 2DPSFs to map out a 3D-PSF view in the dynamic workspace.

13Setting Up and Running a Simulation


When the simulation is complete, the new 3D-PSF will be updated on the TRACER interface and

the icon should have changed to a icon. Double-click the new 3D-PSF node on the Navigatorpane to view the 3D-PSF in the 3D-PSF viewer. To save any of the generated 3D or 2D-PSFs, to thearchive click on any of the PSFs in the Navigator and click the Store button on the toolbar.

Each of these operations will now be explained in more detail.



2.1 Stack Description

The Stack Description describes the layer type, material and thickness. The layer type can beeither resist or a non-resist layer. left-clicking within this window permits on to choose either Resistor layer as shown below:

These layers are then described in the material section.A list of resist is available in the drop-down menu in the Material window. Shown below PMMA hasbeen selected.



Similarly the required layer can be selected from the layer drop-down menu.

The contents of these lists can be edited by opening the Material Archive as shown below:



2.2 Parameters

Here enter the simulation parameters for the Beam Energy [keV] (accelerating voltage), Number ofElectrons and Vertical Grid [nm] values. In Intermediate Results the Update Interval (seconds) valuein entered.

Set the Beam Energy to the accelerating voltage of your tool for exposure and keep the number ofelectrons at 1 million. You can change the number of electrons to a larger or smaller number, buttypically, one million electrons will suffice. The Vertical Grid is the interval along the depth (z-axis) ofthe resist for which to save absorbed energy data. A default value of 0.0 will produce an automaticinterval for a 2D PSF extraction. Indicating too fine a grid can unnecessarily increase simulationtime. It is recommended to keep the default value at 0.0 (automatic). Finally, the Update Interval canbe kept at its default value. The Update Interval is the interval time for updating the current status ofthe simulation.

2.3 Setting BEAM Size and Blur

It is now possible including the beam diameter during Monte Carlo simulation assuming a Gaussiandistribution. It is also possible to assume a spread of the acceleration energy. This can be done bysimply clicking on the "Beam..." button to access the Beam Definition dialog. This step is optionaland is not required to run a simulation.



When the parameters have been entered, hit the Simulate button st start the simulation.



3 Calibration

To start a calibration pick either one of the provided test pattern or expose a pattern of your own. Besure that the pattern contains an isolated line for Base Dose & Blur determination. Use BEAMER toapply PEC and expose the pattern varying dose. Obtain the CD vs. dose data and Proceed to theCalibration.

19Calibration


3.1 Data

In the Table as shown above add a name and description and select the PSF file that was used inthe exposure. Row 1 shows the target CDs. In Row 2 the layout densities are entered. From Row 4onwards the measured results of the exposure are entered for the corresponding doses anddensities. Note that the Bias for Base Dose/ Blur Calibration obtained from the measured data canbe entered here.

- First 3 rows cannot be deleted- First column cannot be deleted- Insert row/column adds a row/column below/right-of the current selected one - Import/export is a text file interface, with columns separated by „tab“- Cancel just closes this dialog- Next starts the calibration



3.2 Base Dose and Blur

After pressing Next the calibration starts and may take a few minutes to complete

The above image shows the results of the calibration: a Base Dose of 128.8 µC/cm2 and a Blur of47.7 nm is obtained. The range from 0% to + 30% of the base dose shown above is outlined (faintly)below within Column B and Rows 12 - 13.

21Calibration


3.3 Density Dependent Bias

Hitting Next the Density Dependent Bias is determined.



Finally the density Dependent Bias is shown above both graphically and tabular. Hitting the Finishbutton the calibration is saved in the Project directory.

23Archiving PSFs


4 Archiving PSFs

A key strength of TRACER is not only to perform Monte Carlo simulation but to also manage them ina database. The Archive allows the user so centrally store and quickly access any previously donesimulations. This is accomplished by picking a PSF from the Archive and then adding it to aProject.

Select the PSF of interest and use the 'Add to Project' Button - The PSF will be inserted in thatprojectAs now any PSF can be loaded in this manner and it is easy to compare values.Note: The Archive directory must have read/write permissions for those who wish to access it!



4.1 2D-PSF Archiving

Right click the 'Layer' and select the 'Store to Archive' entry

Enter supplementary information for this specific PSF. Most details are taken from the Project.The stored PSF is now available in the archive

25Archiving PSFs


4.2 3D-PSF Archiving

Right click the 'Project' and select the 'Store to Archive' entry

Enter supplementary information for this specific PSF. Most details are taken from the Project.The stored PSF is now available in the archive



5 Import Existing Simulation

To import existing PSF results into the TRACER, go to File and select either Import 2D-PSF... or Import 3D-PSF...; you can also use the keyboard shortcuts Alt + 2 or Alt + 3, respectively. Awizard will then open allowing you to select of the file to be imported. Each of these PSF result fileswill be stored in their respective archive.

Select FILE / Import PSF

Choose the PSF that has to be imported and confirm the choice.

6 Analytic PSF

Analytical PSFs can be created quickly and easily.

Go to the File menu and click "Add Analytic 2D-PSF"

27Analytic PSF


Input the width of the Gaussians in the PSF. The width is a sigma value. Click OK when done.

The new analytic PSF will be placed in the project and will be visible in the TRACER viewer.



7 Convolving PSFs

PSFs can be convolved with each other. For example, you may have been able to characterize theprocess PSF from a resist process independent of the substrate. In this case, switching to anothersubstrate is facilitated if you can convolve the process PSF with the new substrate PSF. To do this:Select any PSF to convolve with another PSF by clicking their respective checkbox in the Navigationpanel.Go to the Edit menu and click "Convolve..."A dialog will appear to confirm the convolution operation. Click OK to convolve.

29Convolving PSFs


The newly convolved PSF will be added to the view for your inspection. You may save this new PSFto the 2D archive.

8 Averaging PSFs

PSF averaging is available in TRACER.

Select two or more PSFs to average by clicking their respective checkbox in the Navigation panel. Under the Edit menu, select "Average Checked 2D" to average the selected 2D PSFs.



The result will be shown in the TRACER viewer. You can then select to store this PSF in theTRACER 2D PSF archive if you wish.

9 Dose Factor Estimation

It is not uncommon for users to switch substrates for e-beam exposures. However, the questionarises: "How can I estimate the change in dose needed to expose on another substrate?" InTRACER, dose factor estimation can provide guidance in the change in dose when changing toanother substrate. To do this:Select two or more PSFs to compare dose factors. Under the Edit menu, click "Dose Factor"A dialog will appear, showing the dose factors between different PSFs. Here the reference (selected)PSF is GaAs. If we decide to use Si, we could expect a dose increase of roughly 27% (1.270844).

31Dose Factor Estimation


10 GUI Overview

When opening TRACER for the first time, you will find the following graphical user interface (GUI).The GUI consists of a program menu, toolbar, navigator and a dynamic workspace panel (outlinedbelow in green) that can toggle up to 3 panels for PSF navigation (2D-PSF-Radial viewing, 2D PSF-Zviewing and/or 3D PSF viewing) or for viewing the 2D PSF, 3D PSF and Material Archive. Eachcomponent of the GUI will be described in the following subsections.

When navigating, the dynamic workspace will change views. Here, the GUI with the materialdatabase view has been loaded.



10.1 Program Menu

The program menu has a File, Edit, View and Help menu. Each menu is described in their respectivesubsections.

10.1.1 File

The File menu has the following menu items:

Menu Item Description Keyboard Shortcut

New Simulation... Starts a new simulation togenerate a PSF.

Alt + R

New Project Creates a new TRACERproject, which saves the 2Dand 3D views and PSFsanalyzed in a in the navigator.

Alt + N

Open Project Opens a previously savedTRACER project.

Alt + O

Save Project Saves a currently openTRACER project.

Alt + S

Save Project As... Saves a currently openTRACER project using a Alt + A

33GUI Overview


chosen name.

Close Project Closes the currently openedproject.

Alt + C

Add Analytic 2D-PSF...

Import 2D-PSF... Imports a 2D-PSF for viewing. Alt + 2

Import 3D-PSF... Imports a 3D-PSF for viewing. Alt + 3

Export LPSF... Exports a currently selected2D-PSF as a PSF readable byBEAMER. LPSFs contain aGaussian approximated fit ontop of the numerical PSF. Assuch, LPSFs can be used as anumerical PSF or a Gaussianapproximated PSF inBEAMER.

Alt + L

Properties... Opens the Preferences dialogbox to change settings withinTRACER. This is explained ingreater detail in the nextsection.

Alt + P

Recent Projects The most recently openedprojects are tracked here forconvenience should a userwants to resume a TRACERprojects that was saved todisk.

No shortcut available.

Exit Exits TRACER Alt + X



10.1.2 Properties

To change the properties in TRACER, use the keyboard shortcut Alt + P or select Properties...under the File menu:

In the General tab, you can setup how many recent project path entries are stored in the recentprojects view. This enables the capability of easily loading the last few working projects when startingthe program. Moreover, the last project viewed can be loaded on startup. Lastly, the user can selectto show the Gaussian values as a pop-up for the 2D PSFs.

35GUI Overview


In the Simulation tab, this is where you setup the directory to run all MC simulations. For 3D PSFs,an automatic number of 2D PSFs can be generated for 3D simulation results.

In the Archives tab, this is where you set the directories for the 3D, 2D and Material archives. Usuallyin an initial run of TRACER, your directory archives will have to be setup properly.



10.1.3 Edit

The Edit menu has the following menu items:

Menu Item Description Keyboard Shortcut

Fit... Generate a Gaussian Approximated Fit to a selected2D PSF.

Alt + F

Select 2D... Select a specific 2D-PSF from within a 3D-PSF foranalysis.

Alt + E

Z-Average 2-D... Alt + Z

Convolve... Alt + C

Average Checked 2D

Dose Factor Alt + D

Store to Archive... Store the selected 2D or 3D PSF to the TRACERarchive.

Alt + K

37GUI Overview


10.1.4 View

The View menu has the following menu items. They are described in the table below.

Menu Item Description

2D-Radial Toggles the 2D-Radial PSF viewer.

2D-Z Toggles the 2D-Z PSF viewer.

3D Toggles the 3D-PSF viewer.

2D PSF Archive Toggles the workspace area to show the 3D PSFs in the archive.

Trajectories Toggles the Trajectories Display

Histograms Enables the viewing of electron energy histograms

3D PSF Archive Toggles the workspace area to show the 2D PSFs in the archive.

Material Archive Toggles the workspace area to show the Material archive. Thematerial archive is the database of materials that are available forsimulation.



10.1.4.1 Histograms

Enable the viewing of histograms of electron distribution as a function of energy as shown below byactivating Histograms in the View menu as shown above.

10.1.5 Help

The Help menu item provides access to the TRACER Manual . In addition the About... button givesthe version number of TRACER you are running and credits for libraries used within TRACER.

39GUI Overview




10.2 Tool Bar

The tool bar contains 5 buttons for quick access: Save current Project, Simulate new PSF, Storeto Archive, Calibrate and LPSF Export

Tool Bar Button Description

Save current Project This will enable the user to save the currentproject to a TRACER project file. If theproject has not yet been saved, a projectname will be requested, otherwise, theproject will be saved to disk. This is thesame as:

1. Using the keyboard shortcut Alt + S or2. Going through the File Menu and

selecting "Save Project".

Simulate new PSF A new simulation dialog will be opened torun another MC simulation based on thedefined material stack. This is same as:

1. Using the keyboard shortcut Alt + R or 2. Going through the File Menu to start a

new simulation.

To setup a simulation go to the section on Setting Up and Running a Simulation.

Store to Archive Pressing this button stores a highlighted3D or 2D PSF to the respective archive.This is same as:

1. Using the keyboard shortcut Alt + K or2. Right-clicking on either a 2D or 3D PSF

and selecting "Store to Archive..." or 3. Going through the Edit Menu and

selecting "Store to Archive..."

LPSF Export This button will generate an LPSF file touse with BEAMER for a 2D PSF only.LPSFs cannot be used for 3D PSFs. Thisis the same as:

1. Using the keyboard shortcut Alt + L or2. Going through the File Menu and

selecting "Export LPSF..." or3. Right-clicking on a 2D PSF and

selecting "Export LPSF..."

Calibrate is described above.

41GUI Overview


10.3 Navigator

The Navigator panel provides immediate access to the PSF/Material archives and the current project.Interacting with the tree in the Navigator panel will dynamically change the workspace panel to theright. For example, clicking 3D-PSF Archive will change the workspace panel to show the list of 3D-PSFs saved in the database. The same happens for 2D-PSF Archive and Material Archive.

Clicking Project will toggle the 2D/3D views back into the workspace.



10.3.1 Archive

2D-PSFs, 3D-PSFs and material information used in simulation are stored in the archive. The archiveallows for quick retrieval and review of the PSFs and Materials in the database.

10.3.1.1 2D-PSF Archive

Selecting 2D-PSF Archive will toggle the list of 2D-PSFs stored in TRACER. Here you can select aPSF by clicking a row in the table and apply any of the 5 operations by clicking of the buttons abovethe table.

The 5 operations that you can perform are:

Button Description

Add to Project Adds the selected PSF to the current project.

Edit ... Opens a dialog that allows the user to change the parameters of thePSF and to add additional comments.

Export to PSF ... Exports the selected PSF to an LPSF for use in BEAMER.

Delete Deletes the selected PSF. A prompt will confirm your decision shouldyou trigger this operation by accident.

Refresh Index Reads the PSF files stored in the Archive folder and re-builds the list

43GUI Overview


10.3.1.2 3D-PSF Archive

Selecting 3D-PSF Archive will toggle the list of 3D-PSFs stored in TRACER. Here you can select aPSF by clicking a row in the table and apply any of the 4 operations by clicking of the buttons belowthe table.

The 4 operations that you can perform are:

Button Description

Details ... Opens a dialog that provides the details of the simulation run suchas the time/date, number of electrons, etc.

Delete Deletes the selected PSF. A prompt will confirm your decisionshould you trigger this operation by accident.

Add to Project Adds the selected PSF to the current project.

Export 3D Data ... Exports the selected PSF to a file.



10.3.1.3 Material Archive

Selecting Material Archive will toggle the list of material stored in TRACER. There are two tabs inthe material archive: Normal and Resists. Normal materials are typically metals and oxides, Resistsare self-explanatory. Here you can select a material by clicking a row in the table and apply any ofthe 2 operations by clicking of the buttons below the table.

The 2 operations that you can perform on a selected material are:

Button Description

Edit Opens a dialog that allows the user to add the parameters of the material. In the imagebelow, the details of PMMA are given and can be changed by the user if desired.

Remove Deletes the selected material. A prompt will confirm your decision should you triggerthis operation by accident.

45GUI Overview


Other operations available are:

Button Description

New Opens a dialog that allows the user to change the parameters of new material:

Restore Restores a database from a flat file with a *.mda extension. Backup files are createdwhen material settings are edited.

To edit a table either use the Edit button or do a right-click on the selected entry. Distinguishbetween Non-Resist Materials and Resists by activating the Resist box shown above.

Material Name When adding an entry, use a suitable name to describe the material

Mass density [g/cm3] Density of the material

Excitation Energy [eV] Excitation energy (mean) is the amount of energy needed to put electronsinto a higher energy state. See http://physics.nist.gov/cgi-bin/Star/compos.pl to obtain values. If the (mean) excitation energy is set to 0, thenthe chemical composition will be used to estimate the (mean) excitationenergy.

Stoichiometry Select an element from the pop-up menu. Add the number of atoms permolecule (Count). use Add Constituent to completely describe the material.

Optional Parameters (Currently these settings may be ignored)

Dielectric Constant

Conductivity [%IACS)

Epsilon [eV] The parameters epsilon and lambda are used to obtain a secondary electronyield curve.

Lambda [nm]

Scatter Rate

Fermi Level [eV]

Workfunction (eV]

Save these parameters with OK, otherwise Cancel.

http://physics.nist.gov/cgi-bin/Star/compos.pl

http://physics.nist.gov/cgi-bin/Star/compos.pl



10.3.2 Project

The Project node is the current project in progress. TRACER will typically open with an emptyproject. PSF simulations are run within a project. PSFs generated outside of TRACER or PSFs inthe TRACER archive can also be imported into a project. A project will list as many 2D and 3D-PSFsas required. 3D-PSFs are composed of 2D PSFs; however 2D-PSFs can be imported without beinginside a 3D-PSF.

10.3.2.1 Working with Active Simulations

Active simulations in TRACER are shown as a node under the Project node and are annotated with

a icon. A simulation can be started by clicking Simulate in the toolbar. The icon will change

to a icon when the simulation is complete. During a simulation when there are enough electronstraced, TRACER will automatically generate 2D PSFs to map out a 3D-PSF view in the dynamicworkspace.

To stop an active simulation properly, right-click on the simulation node and click Stop Simulation.

47GUI Overview


You may also view the properties of the simulation by click properties in the context menu that popsup when right-clicking on the active simulation.



10.3.2.2 Working with 2D-PSFs

2D-PSFs are denoted in the Navigator with

a icon. They can be imported intoTRACER via the 2D-PSF archive or directlythrough the File menu. Also, 2D-PSFsmake up 3D-PSFs and are found under 3D-PSF node as highlighted to the right:

Right-clicking on a 2D PSF generates acontext menu with the following optionsalso shown to the right. A description ofeach option is described in the followingtable.

Option Description

Select for 2D-View Selects PSF to be in the 2D-View

Show Only Selected for 2D-View This selects the 2D PSF to be the only PSF shown inthe 2D-View.

Fit... Generate a Gaussian Approximated Fit to a selected2D PSF.

Convolve...

Average Checked 2D

Dose Factor

Export to LPSF ... Exports the selected PSF to an LPSF for use inBEAMER.

Store to Archive... Store the selected 2D or 3D PSF to the TRACERarchive.

Color... Select the color of the PSF curve in the 2D-View forthe selected 2D-PSF.

Remove Remove this PSF from the project.

Properties... Retrieve the properties of the selected PSF.

49GUI Overview


10.3.2.3 Working with 3D-PSFs

3D-PSFs are added to a project byrunning a simulation to completion or byimporting a 3D-PSF from the 3D-PSFarchive or through the File menu. Afterimporting a 3D-PSF, it will be denoted

with a icon. Right-clicking on a 3D-PSF generates a context menu with thefollowing options as shown to the right.A description of each option isdescribed in the following table.

Option Description

New Simulation A new simulation window opens in which the parameters of thecurrent simulation can be edited.

Select for 3D-View Selects PSF to be in the 3D-View

Check All Checks all the child nodes of the selected node. For example ifmultiple 2D-PSFs generated for the selected 3D-PSF, then all the2D-PSFs would be checked and displayed in the 2D-View in theworkspace.

Uncheck All Unchecks all the child nodes of the selected node. For example ifmultiple fits are made for a 2D-PSF, then all fit curves would beunchecked and taken away from the 2D-View in the workspace.

Select 2D... This option will open a dialog to generate 2D-PSFs not alreadylisted under the current 2D-PSF.



Z-Average 2D...

Store to Archive... Store the selected 2D or 3D PSF to the TRACER archive.

Remove Remove this PSF from the project.

Expand All This option expands the sub-trees that are below the selectednode.

Collapse All This option collapses the sub-trees that are below the selectednode.

Properties... Retrieve the properties of the selected PSF.

51GUI Overview


10.4 2D-Radial View

In the Program menu, View tab, the 2D radial and/or 2R Z view can be actuated.

The 2D-Radial View provides a visual representation of the absorbed energy at a particular depthwithin a material (typically a resist). The magnitude of absorbed energy is the Y-axis and thedistance from the incidence of exposure is the X-axis. In this panel, several parameters can betoggled.

To begin, the scale type for the X and Y-axis can be set to Logarithmic or Linear. In addition the Xand Y-axis min and max values can be set directly in the viewer. The 2D-PSFs selected in theNavigator will be shown all together in this view when this view is enabled.

The X-axis indicates either the Radius or the Depth (Z) in µm, depending on the context. The Y-axisshows the energy deposited.

The above composite graphic shows on the hand side the energy density distribution curves for allthe 2D values shown on the left.

Density – The energy density distribution (eV/um 3̂) at specific location. The volume is considering the cell size in radial direction, the radius of cell, and the thickness ofresist cell.

The total energy distribution shown above is the integrated energy from 0 to The portion from 0



to the first inflection point (left arrow) indicates the short range region. The mid range region is shownbetween the first inflection and second inflection point (center arrow). Finally the third arrow on theright shows the limit of the long range energy.

Finally the cumulative energy, shown above, indicates the inverse of the total energy. For energy at X= 0 is the limiting energy value.

10.5 2D-Z View

The 2D-Z View provides a visual representation of the absorbed energy at a user defined radius. Themagnitude of absorbed energy is the Y-axis and the change for a radius is plotted on the X-axis. Tobegin, the scale type for the X and Y-axis can be set to Logarithmic or Linear. In addition the Xand Y-axis min and max values can be set directly in the viewer. This plot uses the 3D data of thesimulation and selecting / deselecting 2D PSF's doesn't influence the plot.

53GUI Overview


10.6 3D View

The 3D View provides a visualization of the spread of the energy within a material (usually resist).The Z-axis shows the depth of the resist as the energy spreads from the incidence of exposure out toa radius determined by the simulated electrons. In the 3D View panel, several parameters can betoggled. To begin, the scale type for the color and radius can be set to Logarithmic or Linear. Inaddition the color and radius min and max values can be set directly in the viewer. The Z Min and ZMax parameters serve as the minimum depth (typically a Z-min of 0 is the top of the resist) and themaximum depth, respectively. Both the Locator (just below the color map) and the Legend (to theright of the color map) can be toggled on or off using the check boxes.



11 Keyboard Shortcuts: Quick Reference

Keyboard shortcuts streamlines the ease of use in TRACER and are listed below. You may want toprint this page to provide you a quick reference if you prefer using keyboard shortcuts in TRACER.

Action Keyboard Shortcut

F8 Help/About

Ctrl-F4 File/Close project

Ctrl-Alt-S File/Save Project As ...

Ctrl-Y File/Add Analytic 2D-PSF ...

Ctrl-Q File/Exit

Action Keyboard Shortcut

Start a New Simulation Alt + R

Start New Project Alt + N

Open an Existing Project Alt + O

Save Currently Opened Project Alt + S

Save Currently Opened Project As... Alt + A

Close the Currently Opened Project Alt + C

Import a 2D-PSF Alt + 2

Import a 3D-PSF Alt + 3

Export a 2D-PSF to an LPSF File Alt + L

Edit the TRACER Program Properties Alt + P

Exit TRACER Alt + X

Perform a fit to a selected PSF Alt + F

Select a 2D PSF Alt + E

Store the Currently Highlighted PSF to the TRACER Archive Alt + K

Z-Average 2-D Alt + Z

12 Trajectories

In this chapter, we show you how to save electron trajectories and to display them.

55Trajectories


12.1 Saving Trajectories

In the Simulation Dialog of TRACER you have the option to save trajectories and interactions of arepresentative amount of electrons into a Tracer Trajectory File (*.tra).

The file contains positions (x,y,z) and energy states (in eV) of primary electrons as well as ofsubsequently generated secondary electrons. All interactions are calculated within the Resists, Layers and Substrate only. The tracing ends oncethe electron exits the plane of the stack or its’ energy is consumed. The expansion of the stack is infinite into x and y direction. The electron beam enters the stack frombelow at entry point z=0 and moves along into the direction of the positive z-axis unless scattered or



reflected.

This file is being saved into the folder you have set in the TRACER properties ( File -> Properties ->Simulation Tab) as illustrated in the following image.

12.2 Visualizing Trajectories (TRACER)

Electron trajectories can be viewed directly in TRACER. To do this, you will need to save trajectoriesto file as described in the previous section. Once the simulation is complete, under the View menu,you can enable the Trajectories view to see the electrons that were traced in the simulation. Inaddition the 2D-Radial and 3D views have been disabled.

Note that the trajectories display requires a few seconds to refresh. During this period other functionsare blocked.

57Trajectories


Be sure to choose the planeof interest, as shown on theright as well as the otherdisplay parameters.

12.3 Visualizing Trajectories (GNUplot)

IInstead of viewing trajectories from within TRACER, you may choose to visualize them

using a 3rd party tool. In this section, we provide the instructions on how to use gnuplot to

plot the trajectories.

Prerequisites:



- A contemporary version of gnuplot (4.0 and higher)

- A standard computer (Dual-Core CPU with 4 GB RAM or better)

- Access to the folder containing the trajectory files

Procedure:

Open gnuplot and the following console should appear:

Once your console opened up you need to enter the following commands:

gnuplot> set parametric [enter]

Then you should change the directory to the directory in which the *.tra files are located.

Use the "" around the directory names.

gnuplot> cd ‘[exact path to the directory]’

After this command the base directory of gnuplot will change to the named one above.

To view the trajectories you need to enter the following line:

gnuplot> splot ‘[filename]’ every [X] using 1 : 2 : ($3*(-1)) : 4 w lines lc palette

Legend:

[filename] is the exact name of the file you exported from Tracer ending in .tra

59Trajectories


[X] is the definition of the gap between the points it will show

Comment:

($3*(-1))

For a more natural viewing experience we recommend turning the z-axis so the electrons

enter the stack from above and move into negative z-axis direction unless scattered or

reflected.

Every [X]:

You may ask why you want to leave out points for a proper graph. The answer is quite

simple:

Tracer logs every change to the energy state of the electron. Therefore we will have a file

containing several millions of changes. For graphical purposes it is not necessary to

reproduce every point and its’ energy state since

a) Gnuplot can trace and view up to 8 million points ‘only’

b) The usual resolution of monitors does barely exceed 2 million pixels

(Full HD with 1920x1080px is exactly 2,073,600 px)

Choosing a value between 50-100 for [X] to start with is reasonable. If the view is not to

your satisfaction or has to little detail you can slowly approach values below 50.

ATTENTION:

out of memory for iso curve points

If you encounter this error gnuplot has exceeded the maximum amount of points

traceable. You should increase the gap between shown points to resume working on the

graph.

Should gnuplot not work properly after this error occurred you need to restart gnuplot.

13 Advanced

13.1 Cross Sections

For the electron scattering computation TRACER uses a cross section model provided byCzyzewski for lower acceleration voltages (below 30 keV) and Rutherford for the higher voltages.

These cross section tables are located in the install path of TRACER for reference.

14 Technical Support

14.1 License

GenISys uses the WIBU license software solution CodeMeter. The license is tied to a physicaldongle with advanced security systems inside. To program the license a so called RaC file isused. These files are actually an encrypted image of the CodeMeter license sticks. The licensesprovided by GenISys are always concurrent by default, meaning you can initialize a license serverand access from any computer to that license server and run the software products provided by



GenISys.

The following sections describe how to:· Prepare and execute a license update · How to setup a CodeMeter license server/client

14.1.1 License Update

All GenISys products require a license update to keep your product running to the current release.As part of this process the RaC file is needed from the license stick. It must be sent to GenISys.Once processed, the RaU is returned to update the license server.

This section provides simple instructions on:· Creating the RaC File· Updating the CodeMeter License Server

Please note that a license update shuts down the license server

14.1.1.1 Creating the RaC File

1. Start the Codemeter Control Center:a. In Linux, run the command CodeMeterCCb. In Windows, go to All Programs and then CodeMeter

2. Click the License Update button:

3. Click Next to start the Field Activation Service:

61Technical Support


4. Select Create license request and click Next:

5. Select Extend existing license and click Next:

6. Select FirmCode 100550 (100550) and click Next:



7. Click Finish:

8. E-mail the RaC file to your GenISys support engineer for processing and wait for the RaU file inour response.

14.1.1.2 Updating the License with the RaU File

You will receive a “*.WibuCmRaU” file from GenIsys. We refer to this as the RaU file.1. Start the Codemeter Control Center:

a. In Linux, run the command CodeMeterCCb. In Windows, go to All Programs and then CodeMeter

2. Click the License Update button:

63Technical Support


3. Click Next to start the Field Activation Service:

4. Select Import license update and click Next:

5. Click Commit and wait until the execution of the update is complete. It may take a few minutes



to update.

6. Once executed, you will get a confirmation dialog stating that the update was successful. Thelicense server update is complete.

Your license update should now be complete. Thank you for keeping your license current. If you haveany questions, comments or concerns, please contact support at [email protected].

14.1.2 License Server Client Configuration

The configuration of the license server and client environment is done via the WebAdmin interface.This interface is started from within the CodeMeter Control Center using the WebAdmin button at thelower right. Execute the WebAdmin respectively on the server or client and complete the stepslisted below.

65Technical Support


14.2 Remote usage

Using VNC through an SSH tunnel To use VNC to access the Unix machines remotely, you will need to access an SSH tunnel usingPuTTY:

Start to make a connection as shown in the following picture (in this example galaxy.--.cnf..edu isthe remote system name):

Next click [X11] and select „Enable X11 forwarding“ and „localhost:0“ as the X displaylocation:



Next, click on [Tunnels] in the left-hand side of the Putty control screen, and fill in the Sourceport and Destination host:port descriptor, as shown below:

Next, click on the [Add] button to add this new tunnel. Putty will look like this:

67Technical Support


Next, click on the [Open] button, and log in to the remote system. Your tunnel is now active.You do not need to run anything else in this putty terminal window. Make sure that your xsessionis :1, that you can use this connection to start the vncserver!

Finally, run VNCVIEWER on your windows host, and enter "localhost:1" as the server toconnect to. VNC maps display 1 to port 5901, which SSH is tunneling through its own port(port 22).

[OK]



[OK]

When you are done do not log out of the session, rather just quit the vncveiwer on the local hostand then kill the server (from the putty window):

host$ vncserver -kill :1

Modifications:The default window manager is twm. If you want something else, e.g. gnome/metacity edit ~/.vnc/xstartup: replace twm with gnome-session

To speed up things even more you can change the cipher algorithm to from SSH-2 to Blowfish:

14.3 Reporting a problem

Should a problem occur while using the software, please report this to GenISys. It would behelpful if the information below can be given to quickly identify and reproduce the problemsobserved:

· Description of the problem· How it can be reproduced · Files needed to reproduce the problem

69Technical Support


· Version of the operating system and available HDD space and physical memory· Version of TRACER (Available in the Help Menu selection)

Please send this information to our support team at [email protected]. Should the filesbe very big, please use our ftp server for the transfer.

14.4 Requesting Enhancements

We are always glad to enhance our software based on your requests.

Please contact Support or our local sales manager for a discussion on how we can best meetyour needs.

14.5 Training

To give you the best usage of the software we offer training either on site or via a remotecomputer connection.

Please contact our local sales manager to arrange the details.

14.6 Technical Issues

14.6.1 FAT32 File System

The FAT32 file system doesn't support a file size larger than 4GB. You can run into this issue whenexporting larger machine format files or during processing large temp files need to be created.

Try to avoid this file system type if possible. As an alternative, please use NTFS for your Windowsplatform. NTFS will allow file sizes larger than 4GB.



Index

- 2 -

51 2D-Radial View

52 2D-Z View

- 3 -

53 3D View

- A -

59 Advanced

Cross Sections 59

26 Analytic PSF

42 Archive

23 Archiving PSFs

2D-PSF Archiving 24

3D PSF Archiving 25

29 Averaging PSFs

- B -

16 Beam Setting

16 Blur Setting

- C -

18 Calibration

Base Dose and Blur 20

Data 19

Density Dependent Bias 21

28 Convolving PSFs

59 Cross Sections

Index 71


- D -

34 Directories

30 Dose Factor Estimation

- E -

36 Edit Menu

- F -

69 FAT32 File System

32 File Menu

- G -

31 GUI Overview

- H -

38 Help Menu

- I -

26 Import Existing Simulations

6 Installation

Linux 10

Windows 7

5 Introduction

System Requirements 5

- K -

54 Keyboard Shortcuts

- L -

License

Creating the RaC File 60



License

License 59

License Server Client Configuration 64

License Update 60

Updating the License with the RaU File 62

10 Linux Installation

- M -

44 Material Archive

- N -

41 Navigator

2D-PSF Archive 42

3D-PSF Archive 43

Archive 42

Material Archive 44

Working with 2D-PSFs 48


Working with Active Simulations 46

- O -

34 Options

- P -

32 Program Menu

Edit 36

File 32

Help 38

Properties 34

View 37

46 Project



Index 73


46 Project

Working with Active Simulations 46

34 Properties

- R -

60 RaC File

62 RaU File

65 Remote Usage

68 Reporting a Problem

69 Requesting Enhancements

- S -

55 Saving Trajectories

11 Setting Up and Running a Simulation

Setting BEAM Size and Blur 16

5 System Requirements

- T -

59 Technical Support

40 Tool Bar

69 Training

54 Trajectories

Saving Trajectories 55

Visualizing Trajectories (GNUplot) 57

Visualizing Trajectories (TRACER) 56

- V -

37 View Menu

56 Visualizing Trajectories (TRACER)

- W -

7 Windows Installation

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