to study the deflection of mems etm actuator by using 20-sim

E 479/579 Mechatronics Modeling and Simulation

TO STUDY THE DEFLECTION OF MEMS ETM ACTUATOR BY

USING 20-Sim

- CHANDRASEKHARAN SRINIVASAN


IntroductionElectro-Thermo-Mechanical Actuators

FEA Analysis

20-Sim model of an actuator

Actuator array

Simulation results

Validation


INTRODUCTION

An simple one element Electro thermal mechanical actuator was modeled in 20-sim.

Electrical voltage is given as input so as to get the deflection as the output.

Modeled for a 3x2 ETM actuator array. The deflection output is validated with the results

obtained from the reference papers.


Introduction Electro-Thermo-

Mechanical ActuatorsFEA Analysis20-Sim model of an actuatorActuator arraySimulation resultsValidation


Types of ETM actuators

Single ‘hot’ arm ETM actuator

Double ‘hot’ arm ETM actuator

Bi-directional Vertical thermal actuator (BVTA)

ETM ACTUATORS


ETM ACTUATORS

Fig.1. [1] Double ‘hot’ arm Polysilicon Electrothermal microactuator


PRINCIPLE OF OPERATION

Input:Electrical voltage or

current

Heat generation causes

temperature increase

Expansion of heated parts of

actuator

Generation of thermal stresses and mechanical

force

Mechanical force carries out

the required mech. work


Introduction

Electro-Thermo-Mechanical Actuators

FEA Analysis20-Sim model of an actuator

Actuator array

Simulation results

Validation


FEA ANALYSIS


FEA ANALYSIS

The FEA analysis using ABAQUS had to be aborted because of the following reasons:

1. Lots of errors

2. Missing out on few parameters

The research on the FEA analysis will be continued.


Introduction


FEA Analysis

20-Sim model of an actuatorActuator array

Simulation results

Validation


20-Sim BONDGRAPH MODEL OF A SINGLE ACTUATOR

Imass

MSeMSe3

GYGY3

0

Cstiffness

1

Rdamping

Constant1

Integrate1

r


Constant wave generator for voltage input (1-10 volts) MSe, the effort is set to the constant input signal source Gyrator to transform the effort coming in (voltage) into flow

going out. r, Gyrator modulus ( or the multiplying factor to get the

deflection) R, damping C, stiffness I, Moving mass of the element Integrator to get the deflection output


Introduction


FEA Analysis


Actuator arraySimulation results

Validation


ACTUATOR ARRAY

An Integrated ETM device with 3 X 2 arrayRef. paper [ 4 ]

3x2 array of actuators3x2 array of actuators The width of the narrow beam is The width of the narrow beam is

3030μμm-40m-40μμmm Material properties of polysiliconMaterial properties of polysilicon The effective moving massThe effective moving mass

is 6.75eis 6.75e-12 -12 kgkg


20-Sim MODEL OF AN ACTUATOR ARRAY

IMoving_Mass

MSeMSe3

GYGY3

GYGY4

0

MSeMSe4

CStiffness

1

RDamping

MSeMSe5

GYGY5

MSeMSe6

GYGY6

MSeMSe2

GYGY2

MSeMSe1

GYGY1

Voltage_Input

Deflection_Output


Introduction


FEA Analysis


Actuator array

Simulation resultsValidation


Deflection vs Voltage

0 1 2 3 4 5 6 7 8 9 10time {s}

0

5e-007

1e-006

1.5e-006

Deflection

Deflection vs Time

0 1 2 3 4 5 6 7 8 9 10time {s}

-2e-007

0

2e-007

4e-007

6e-007

8e-007Deflection

Voltage Input: 2v

Deflection: 0.5537

Voltage Input: 4v

Deflection: 1.7345

m

m



0 1 2 3 4 5 6 7 8 9 10time {s}

0

1e-006

2e-006

3e-006

4e-006

Deflection


0 1 2 3 4 5 6 7 8 9 10time {s}

0

2e-006

4e-006

6e-006

8e-006

Deflection

Voltage Input: 6v

Deflection: 3.7476

Voltage Input: 8v

Deflection: 7.0330

m

m


Introduction


FEA Analysis


Actuator array

Simulation results

Validation


VALIDATION OF RESULTSVoltage

Input20-Sim Results

Validated result

0 0 0

1 0.2338 -

2 0.5537 0.55

3 1.0401 1.1

4 1.7345 1.76

5 2.5079 2.53

6 3.7476 3.74

7 5.1355 5.17

8 7.033 6.93

9 8.9619 8.8

Deflection vs Voltage plot. Ref. paper [2]

Results validated in reference to the paper [2]


VALIDATION OF RESULTS


0

1

2

3

4

5

6

7

8

9

10

0 1 2 3 4 5 6 7 8 9

Voltage ( Volt )

De

fle

cti

on

( m

icro

me

ter)

20-Sim Results

Validated result

The above plot shows the change in deflection of the actuator at different voltages


CONCLUSION

The simulation results obtained from 20-Sim are in good agreement with the results in the reference paper [2].

The deflection results of a single ETM actuator were similar to that of the actuator array


EXTENSION

Complete the FEA analysis on the ETM actuator and compare it with the 20-Sim results.

To research on the fact that the ETM actuator gets destroyed when the applied voltage reaches 10 volts.


REFERENCES

1. “Design and modeling of a MEMS bidirectional vertical thermal actuator”

-Dong Yan, Amir Khajepour and Raafat Mansour

2. “Experimentally verified procedure for determining dynamical model of the ETM MEMS structures” – Dept. of Engineering, Univ. of Texas, Arlington.

3. “Electrothermal MEMS microengine capable of bi-directional motion” - Dept. of Engineering, Tucker Technology center, Texas

4. “Effect of Thermal Boundary condition and scaling on Electro-Thermal compliant micro devices” – Nilesh Mankane and G.K. Ananthasuresh

5. “System Dynamics: Modeling and Simulation of Mechatronic systems” – Karnopp, Margolis and Rosenberg


THANK YOU

to study the deflection of mems etm actuator by using 20-sim

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mechatronics modeling

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