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Luxtera, Inc. OIDA
The Luxtera EPIC ProgramThe Luxtera EPIC Program
““Electronic and Photonic Electronic and Photonic Integrated CircuitsIntegrated Circuits””
March 5, 2007
Cary GunnCTO, Co-founder
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1. REPORT DATE 05 MAR 2007
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4. TITLE AND SUBTITLE Electronic and Photonic Integrated Circuits
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7. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) Luxtera, Inc.
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12. DISTRIBUTION/AVAILABILITY STATEMENT Approved for public release, distribution unlimited
13. SUPPLEMENTARY NOTES DARPA Microsystems Technology Symposium held in San Jose, California on March 5-7, 2007.Presentations, The original document contains color images.
14. ABSTRACT
15. SUBJECT TERMS
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Standard Form 298 (Rev. 8-98) Prescribed by ANSI Std Z39-18
2Luxtera, Inc. Luxtera Confidential
Luxtera CMOS Photonics TechnologyLuxtera CMOS Photonics TechnologyFlip-chip bonded lasers
wavelength 1550nmpassive alignmentnon-modulated = low cost/reliable
Silicon Optical Filters - DWDMelectrically tunableintegrated w/ control circuitryenables >100Gb in single mode fiber
Complete 10G Receive PathGe photodetectorstrans-impedance amplifiersoutput driver circuitry
Ceramic Package
Fiber cable plugs here
Silicon 10G Modulatorsdriven with on-chip circuitryhighest quality signallow loss, low power consumption
The Toolkit is Complete10Gb modulators and receiversIntegration with CMOS electronicsCost effective, reliable light sourceStandard packaging technology
3Luxtera, Inc. Luxtera Confidential
Trailblazer in Silicon PhotonicsTrailblazer in Silicon PhotonicsMission:
• Deliver photonic solutions manufactured in a mainstream CMOS fabrication, test and assembly processes to provide customers with high performance optical solutions at price points traditionally associated with copper
Funded: November 2001
Location: Carlsbad, CA
Staff: 57
Top Tier Investors:• August Capital
• New Enterprise associates
• Sevin Rosen Funds
• Three Corporate Investors
Intellectual Property:• >100 Patents Filed For
• 40 Issued
4Luxtera, Inc. Luxtera Confidential
Unbroken String of IndustryUnbroken String of Industry’’s Firstss Firsts
2001 – The first CMOS waveguide and
Fiber-to-the-Chip Coupler
2002 – The first CMOS photonics in standard
130 nm SOI-CMOS process
2003 – The first CMOS 10G Modulator
2004 – First Laser bonded to a CMOS die
2005 – First wafer scale optical probing
2005 – First single chip dual XFP transceiver
2006 – First monolithic CMOS 4x10G WDM
2007 – Major announcements coming… ?
5Luxtera, Inc. Luxtera Confidential
CMOS Photonics FoundryCMOS Photonics FoundryLuxtera uses FSL’s 0.13µm SOI process
• Same process used to construct their PowerPC™ embedded microprocessors
• Very high yield, high volume, mature process
Design environment is Cadence at the system/subsystem level
• Device design done on 200 node cluster running 3D FDTD
• Can perform LVS, DRC on optical circuits
Philosophy: Started with existing electronics design manual, and make the optics fit – requires extensive characterization, simulation, compromise
• ~80 films in a CMOS process, need to understand optical properties of ALL of them
6Luxtera, Inc. Luxtera Confidential
Example CMOS Photonics Chips:
Two independent 10Gb transceivers
on a single die(contains
complete PHY circuitry)
A single 40Gb WDM transceiver4λ x 10Gb
(PMD circuits only)
Aurora Pulsar
8Luxtera, Inc. Luxtera Confidential
The fiber coupling problemThe fiber coupling problem
Single mode fiber has 10µm diameter core, cross section of 80µm²
A “good” SOI waveguide has cross sectional area of 0.1µm²
Coupling efficiency is approx. the ratio of the areas: 0.1/80 = 0.1% (-30dB)
Better than 50% (-3dB) desired
fiber
waveguide
10Luxtera, Inc. Luxtera Confidential
Holographic Lens EvolutionHolographic Lens Evolution
Wavelength (µm)
Inse
rtion
Los
s (d
B) Today’s
D.O.R.
Firstdesign
Seconddesign
Thirddesign
Bestdesign
11Luxtera, Inc. Luxtera Confidential
Wafer-scale testing
Low cost Fiber to the Chip attachFlip-chip mounted lasers
Vertical optical coupling enables…
LuxteraLuxtera’’s key to Fibers key to Fiber--toto--thethe--chip: chip: connecting the micro and connecting the micro and nanonano scalesscales
12Luxtera, Inc. Luxtera Confidential
Routing Routing -- Waveguide LossWaveguide Loss
-0.10
-0.05
0.00
0.05
0.10
0.15
0.20
0.25
0.30
Passive split double SOI Passive split DPS deep
Wav
egui
de L
oss
(dB
/cm
)
Process 2Process 1
Waveguide Loss no longer a major issue
13Luxtera, Inc. Luxtera Confidential
Electrically Tunable Arrayed Waveguide Grating (AWG)Electrically Tunable Arrayed Waveguide Grating (AWG)
calibrationlight in
light out (more taps to the right)
DAC array
opticalAWG
14Luxtera, Inc. Luxtera Confidential
Electrically tunable AWG resultsElectrically tunable AWG results
BEFORE TUNING AFTER TUNING
1550 1551 1552 1553 1554 1555 1556-45
-40
-35
-30
-25
-20
-15
Wavelength (nm)
Rec
eive
d po
wer
(dB
m)
1550 1551 1552 1553 1554 1555 1556-45
-40
-35
-30
-25
-20
-15
Wavelength (nm)
Rec
eive
d po
wer
(dB
m)
15Luxtera, Inc. Luxtera Confidential
Modulator with integrated driverModulator with integrated driver
CMOS Optical Modulator with Differential DriverISSCC 2006, A Huang, et al.
16Luxtera, Inc. Luxtera Confidential
CMOS Optical Modulator PerformanceCMOS Optical Modulator Performance
10G Eye
10G
Rolloff >20GHz
18Luxtera, Inc. Luxtera Confidential
Ring modulators = high density/bandwidth Ring modulators = high density/bandwidth
30 um radius ring
Many Tb per mm²
2000x smaller than electronic PHY
Bus Waveguide
Ring Waveguide
High-speed modulation region(pn diode)
High-speed electrical signalGround Ground
CW light in
27 1527.5 1528 1528.5 1529 1529.5
A B Transmission A-> B
Wavelength (nm)
LASER
NOTCH FILTER
19Luxtera, Inc. Luxtera Confidential
Ring Modulators Work at 10GRing Modulators Work at 10G
0 5 10 15 20-6
-5
-4
-3
-2
-1
0
1
Frequency (GHz)
12GHz rolloff
EO
Res
pons
e (d
B)
10G
20Luxtera, Inc. Luxtera Confidential
Small Tunable Optical Filter for WDMSmall Tunable Optical Filter for WDM
InputDropThru
Filter occupies 30x30µm area
Tunable filters allow:Dynamic reconfigurationOperation over wide temperature range Tuning Current (mA)
21Luxtera, Inc. Luxtera Confidential
GeGe detectors at 10Gbpsdetectors at 10Gbps
Eye diagram at 10Gb/s, 1550nm, 3V reverse bias, no TIA
Ge
Si
High speed deviceTypical performance @ 50C, 1550nm, 3V reverse biasResponsivity 0.5A/WDark current 30uACapacitance 30fFBandwidth 14 GHz
Low speed deviceTypical performance @ 50C, 1550nm, 3V reverse biasResponsivity 0.4A/WDark current 3nABandwidth 5 GHz
Heterojunctionwaveguide photodetector
Luxtera, Inc. OIDA
Commercial Commercial Applications of Applications of
Luxtera TechnologyLuxtera Technology
23Luxtera, Inc. Luxtera Confidential
Sampling Now:Sampling Now:
TwoTwo 10G transceivers on a 10G transceivers on a
single diesingle die
24Luxtera, Inc. Luxtera Confidential
XFPXFP
Aurora Aurora –– the First Productthe First Product2 2 XFP Modules in a single ChipXFP Modules in a single Chip
AuroraAurora ¼¼ size of XFPsize of XFP
Over 50% lower costOver 50% lower cost
Up to 2,000m reachUp to 2,000m reach
XFP compliant XFP compliant managementmanagement
XFPXFP
25Luxtera, Inc. Luxtera Confidential
Flipchip Bonded Non-Modulated
Lasers
Integrated Photodetectors
Silicon Modulators and Drivers
Complete Receiver, TIA,
CDR
Optical Fiber to the Chip Coupling
Fiber Connects Here
26Luxtera, Inc. Luxtera Confidential
EPIC Program Progress EPIC Program Progress ––MultiwavelengthMultiwavelength TransceiversTransceivers
27Luxtera, Inc. Luxtera Confidential
100Gb Transceiver 100Gb Transceiver –– Prototypes Oct 2008Prototypes Oct 2008
Mux
10G Mod10G Mod
10G ModD
emux
10G Ge10G Ge
10G Ge
Mod Drivers
TIAs
λ1
I/O
I/O
100Gb Data In
100Gb Data Out
TX Fiber – 100Gb
RX Fiber – 100Gb
Bias and Control
...
...
......
...
λ2
λ10
PH
Y
PH
Y
PH
Y
PH
Y
PH
Y
PH
Y
≤ 4W≤ 40 mm2
0-70 C
28Luxtera, Inc. Luxtera Confidential
Snapshot of fabricated Snapshot of fabricated Pulsar diePulsar die
Low speed PDs
For control system
4-ch Optical mux
Optical demuxes
High speed PDs
Holographic lenses
One TX/RX channel
Single-chip 40 Gb/stransceiver
29Luxtera, Inc. Luxtera Confidential
WDM WDM mux/demuxmux/demux
IL = 1.5dB
Crosstalk ~20dB
Bias and Control algorithm implemented off-chip
λ1 λ2 λ3 λ4
Ch 1 Ch 3 Ch 2 Ch 4
31Luxtera, Inc. Luxtera Confidential
Can we do a 10Tb transceiver in a 1cm die? Can we do a 10Tb transceiver in a 1cm die? (That(That’’s 1000 10Gb s 1000 10Gb TRXsTRXs, each 316x316, each 316x316µµm!)m!)
Total Area (mm²): 0.1000
Modulator 0.0036 (3.6%)
Demux: 0.0009 (1%)
Mux: 0.0009 (1%)
Detector: 0.0001 (.1%)
Optical Routing: 0.0050 (5%)
----------------------------------------------------
Area remaining for 0.0886 (89%)
transceiver electronics
Luxtera has demonstrated the optics for a 10Tb transceiver in a 1cm² die
32Luxtera, Inc. Luxtera Confidential
Conclusion: CMOS Photonics Chips Are Working
Two independent 10Gb transceivers
on a single die(contains
complete PHY circuitry)
A single 40Gb WDM transceiver4λ x 10Gb
(PMD circuits only)
Aurora Pulsar
33Luxtera, Inc. Luxtera Confidential
ConclusionsConclusionsDARPA EPIC Program has already been a success -- Silicon Photonics Technology is working – currently sampling to customers
Technology offers the performance of optics, at the price of copper
There are many technical advantages for silicon photonics to achieve low cost
• CMOS Manufacturing
• Wafer scale testability of optics and electronics
• Built-In Self Test
• Simplified packaging approach
• Many channels can be put in a single package
Longwave (1300-1600nm), single-mode fiber will become the lowest cost alternative