Test station for ALICE pixel chip

COMMENT by Y. Kwon

• Strategy : make sure commitment can be achieved before main commitment to company (= offering conditional purchase).

• Chip test can be achieved with 50 laterally, 50 overdrive vertically.

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Test station for ALICE pixel chip

COMMENT by Y. Kwon

• Mechanically achievable accuracy better than 30 .

• Current vision & robot accuracy within 30 , z < 30 (at max).

• For target accuracy ( 5 , z < 5 ), new vision and robot is needed (claim by EC3).

Note) Numbers quoted here are not Gaussian or FWHM resolution, but any smearing fits within the ranges.

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Test station for ALICE pixel chip

COMMENT by Y. Kwon

• Do we really want to go to the final specification?• Use current version? Cheaper & ready for chip

test (~1-2 month).• Conditional order? ~120 kCHF

Note) Two WorldSkills medalists in EC3. WorldSkills is an international skills competition for youth ( 기능올림픽 / 國際技能 - 大會 ).

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Test station for ALICE pixel chip

EC3 R&D Division

June.2015

Test station for ALICE pixel chip5

https://drive.google.com/file/d/0B6EVlprPvkkUcjdnYUNrcm5zdkE/view?usp=sharing

Test station for ALICE pixel chip

1. Concept

2. Status

3. Plan

Contents

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Test station for ALICE pixel chip7

Pick & place scheme

X axis robot

Y axis robot

Z1 axis robot

Z2 axis robot(Probe contact)

Stone plate

Test station for ALICE pixel chip

Z2

Top view

8

X Y

θZ1

V

350mm 300mm

Stroke 800 mm

Stroke 450 mm

300mm

350 mm

Test station for ALICE pixel chip

Z2

Side view

9

P&P head: θ + Vision

10kg less

θ

700mm

50mm

Stone plate 100~150mm

Stroke 350 mmStroke 100 mm

V

Test box

Test station for ALICE pixel chip

Test box

10

30mm

100~150mm

Test box

Stone plate

310mm

350mm

340mm

Level adjust bolt

Fixed bolt 300mm

340mm

Crystal chuck

Vacuum line

Test station for ALICE pixel chip

Detail

11

Vacuum chuck

Vacuum pass line

15.2mm

30.2mm

Test station for ALICE pixel chip

Chip tray

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Tray for 20x10 chips

15.2mm 2mm

2mm

30.2mm

350mm

350mm

4mm

1. Tray material: Teflon coated metal

2. Hole depth: 150~200 ㎛

3. 20 by 10 array: Total 200 chips

4. 1chip 3min: 1 tray 10 hours

Test station for ALICE pixel chip

Probe card

13

114mm

141mm

Needles

<90mm

101mm

Cable

Connector

Test station for ALICE pixel chip

Target spec

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No Model No. Description Accuracy Unit Remark

1 - Motion movement for repeatability ±5 µm X,Y,Z1,Z2

2Rotation movement for repeatability

±0.01 deg Θ

3 Transfer accuracy ±10 µm Target goal

4 Surface flatness ±20 µm -

5 Vision camera accuracy ±5 µm Target goal

Test station for ALICE pixel chip

1. Mechanical alignment ±30 ㎛ (X, Y).

2. Space between sensor and grip 30 ㎛ at

pick up & place (Vacuum grip).

3. Improvement in mechanics and vision in

progress (High performance robot and

vision device will make it).

4. A detailed plan exists.

Current status

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Test station for ALICE pixel chip16

Pick & place

Y axis movement X axis movement

Z axis movement

Test station for ALICE pixel chip17

Robot mechanics

NoModel

No.Description Accuracy Unit Remark

1 - Motion movement for repeatability ±25 µm X,Y,Z

2 Rotation movement for repeatability ±0.1 deg Θ

3 Transfer accuracy ±30 µmWith vision

Measure accuracy

4 Surface flatness ±30 µmTray edge to chuck center

5 Vision camera measure accuracy ±5 µmContinuous

measure

Crystal chuckTray

X axis gantry robot

Y axis cartesian robot

Z axis cartesian robot

Test station for ALICE pixel chip18

Vision measurement

Before measurement After measurement

End compensation

1. After measurement X, Y distance- X axis : + direction, 1680 micron- Y axis : - direction, 2537 micron

2. End compensation X, Y distance- X axis : + direction, 1 micron- Y axis : no direction, 0 micron

Test station for ALICE pixel chip19

P&P head implementation

Theta angle adjust

Tension adjust

Vacuum grip

Test station for ALICE pixel chip20

P&P vacuum grip

Material : Teflon

Vacuum hole

Test station for ALICE pixel chip21

Crystal chuck

Material : Quartz

Vacuum line

Air blow line

30.05 + (2 x 0.03) mm

15.05 + (2 x 0.03) mm

Shallow hole(sensor slot)

Test station for ALICE pixel chip22

Tray

Material : Teflon-coated metal

30.05 + (2 x 0.03) mm

15.05 + (2 x 0.03) mm

Shallow hole(sensor slot)

Test station for ALICE pixel chip

Test result

1. Multiple transport into sensor slots in the tray and

the chuck ( 100 times) -> The whole system fits

better than 30 ㎛ .

2. However we believe the achieved level is

the limit of the current vision and robot

system. Proposed upgrade in the next

page is desirable (Main spending is

required).

Test station for ALICE pixel chip

Desired upgrade

1. Vision system upgrade : 50k CHF

Current equipment

Fact’ Target spec.

Camera CCD 5M pixelFOV : 9 mm

Lens Magnification : 2X, Working distance : 110 mm

Light White ring type lightWorking distance : 20 mm

Measureaccuracy

∂X, ∂Y : ±5 ㎛Θ : ±0.01 degree

Upgrade equipment

Fact’ Target spec.

Camera CCD 2M pixelFOV : 37 mm

Lens Magnification : 1X, Working distance : 250 mm

Light White bar type lightWorking distance : 10 mm

Measureaccuracy

∂X, ∂Y : ±30 ㎛Θ : ±0.1 degree

Test station for ALICE pixel chip

Desired upgrade

2. Robot system upgrade : 50k CHF

Current equipment Upgrade equipment

Fact’ Target spec.

X axis Gantry type : stroke 1200 ㎜Belt : max speed 1.5m/sMoving accuracy : ±20 ㎛

Y axis Cartesian type : stroke 300 ㎜Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛

Z axis Cartesian type : stroke 100 ㎜Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛

Θ axis Rotary type : stroke 270degreeBelt : max speed 90degree/sMoving accuracy : ±0.1degree

Fact’ Target spec.

X axis Gantry with LM type : stroke 800 ㎜Ball screw : C5, max speed 0.5m/sMoving accuracy : ±5 ㎛

Y axis Cartesian type : stroke 450 ㎜Ball screw : C5, max speed 0.5 m/s Moving accuracy : ±5 ㎛

Z1 axis Cartesian type : stroke 100 ㎜Ball screw : C5, max speed 0.1 m/s Moving accuracy : ±5 ㎛

Θ axis Rotary type : stroke 10degreeBelt : max speed 10degree/sMoving accuracy : ±0.01degree