sustainability in semiconductor facilities...sustainability in semiconductor facilities summary...

E n a b l i n g N e w H o r i z o n s

Sustainability inSemiconductor FacilitiesPeter Csatáry, SVP for Technology

SEMICON Taiwan, September 2015

© M+W Group2 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015

Driving Megatrends: Challenges:

Motivation for SustainabilityDriving Megatrends and Challenges

Globalization of Value Chains

Demographic Change

Climate Change

Urbanization

Megatrends and their challenges are shaping the future of our society

Climate Protection

Productivity, Growth and Prosperity

Efficient use of Resources

Infrastructure & Mobility

Technology & Innovation

Information- & Knowledge-Technologies

Healthcare

Renewable Energy Production


Challenges: M+W Group Portfolio:

Motivation for SustainabilityChallenges and M+W Group Portfolio

Megatrends and their challenges for our business

Climate Protection

Productivity, Growth and Prosperity

Efficient use of Resources

Infrastructure & Mobility

Technology & Innovation

Information- & Knowledge-Technologies

Healthcare

Renewable Energy Production


M+W Group at a Glance

Mission Statement:

“M+W creates customer value through a unique combination oflean and sustainable, high-technology engineering and

project management solutions in an injury-free environment.”

Mission Statement

Leading global engineering and construction company Unique skillset in the delivery of complex technology-intensive

factories and facilities Special expertise in cleanroom technology and controlled

environments Established in Germany in 1912 Figures 2014

Order Intake: € 2.7 bnSales: € 2.5 bnEmployees: 7,050


Sustainability – Three Strategic Principlesthat are Implicit in everything we do

As a frontrunner in sustainability, M+W Group aims to challenge the balance ofresponsibility for people, the environment and the value creation

Ecology

SUSTAINABILITYat M+W Group


Challenges

Sustainability in Semiconductor FacilitiesInfluencing Factors, Challenges and Solutions

Fab Complexity

InfluencingFactors

ProcessRequirements

Costs

ScheduleTime to Market

Economy

Waste Water

ExhaustChemical

Special Gases

Ecology Social

Natural Gas

Electrical Power

Raw MaterialsBulk Gases

ProductContamination

EnvironmentalProtection

Operators

SafetyRequirements

Energy EfficiencyWater Efficiency Material EfficiencySolutions

Design ProcessSite Selection Innovations


Sustainability in Semiconductor FacilitiesHigh Complexity and Challenges

Production equipment for a wafer fab require over 200 various facility supply anddisposal systems

Effluents and byproducts of the manufacturing process need appropriateand sophisticated treatment systems

Utility systems as well as the entire fab complex are supported by secondaryfacility systems such as chilled water, hot water, make-up air etc.

Holistic resource management approach is mandatory to optimize thesustainability of a wafer fab

Cleanroom


Sustainability in Semiconductor FacilitiesMaterials in Manufacturing

Source:Article from Dr. Mike Cooke„Semiconductor chemistrycomes to the force „ Fabtech;09/18/2008 , own estimates

New materials need to be evaluated with regard to minimizehazards, environmental impacts (production, discharge) and CO2 footprint

Growing quantityof elements usedin semiconductorindustry


Design Impact on SustainabilityIntegrated Project Delivery (IPD)

OwnerOwnerCMCM

ProcureProcure

SubsSubsDesignDesign

IPD

More efficient project execution= More sustainability – lower demand of energy, material and staff

Enhanced by ourcoordinated range of in

house services


Design Impact on SustainabilityGreen Building Certification Systems

Sustainable Sites(SS Credits)

Site SelectionDevelopment Density & Community ConnectivityBrownfield RedevelopmentAlternative Transportation: Public Transportation AccessSite Development: Maximize Open SpaceStormwater Design: Quantity and Quality ControlHeat Island Effect: Non-Roof / RoofLight Pollution Reduction

Water Efficiency(WE Credits)

Water use reduction, Irrigation etc.Innovative Wastewater Technologies

Energy andAtmosphere(EA Credits)

Minimize Energy PerformanceRefrigerant ManagementOn-Site RenewablesEnhanced CommissioningGreen Power

Materials andResources(MR Credits)

Storage & Collection of RecycleablesBuilding ReuseConstruction Waste ManagementMaterial ReuseRegional MaterialsRapidly Renewable MaterialsCertified Wood

Indoor EnvironmentQuality(EQ Credits)

Minimum IAQ PerformanceEnvironment Tobacco Smoke ControlOutdoor Air MonitoringIncreased VentilatonMaterials (Paints, Sealing's, etc.)Indoor Chemical/Pollution ControlThermal ComfortDaylight Utilization

Innovation & DesignProcess(ID Credits)

Innovation in DesignAccredited Professional

GB certification systems arepredominantly non-process related

20.3%

7.2%

24.6%18.8%

21.7%

7.2% Sustainable Sites

Water Efficiency

Energy and Atmosphere

Materials and Resources

Indoor Environment Quality

Innovation and DesignProcess


UPW4.6% UPS + PowerSystems

1.1%

Equipment40.8%

Administration1.1%

Vacuum1.0%

Exhaust3.5%

FFU Cleanroom2.0%

Other Gases0.6%

Chiller + CHW Pumps18.9%

CDA3.5%

Gas Farm13.3%

Cooling Tower incl Pumps3.3%

PCW Pumps1.8%

Lighting1.6%

Other Fans2.9%

Equipment40.8%

Energy Conservation & Efficiency inGreen Building Certification Systems

GB certification systems focus on component & individual system efficiencies No consideration is given to actual process (specifications) and process-specific

supply & disposal systems

Energy Conservation and Efficiency has to consider the overall concept, system andcomponents, as well as the core process requirements into account

Energy Management complements Green Building Certification Systems

Impact to system capacities and annual energy consumption

Electrical Power ShareProcess Equipment 40%Building <1%

Electrical Power ShareProcess Supply Systems 30%Other Facility Systems 30%


1.Establish TargetEnergy Goals &

Baseline 2.Model Energy

Consumption &Review

3.Identify

Improvements(Measures)

6.Economical

Analysis

5. Evaluation ofEnergy Saving

Potential byEnergy Modeling

4.Design + Budget

Estimation ofMeasures

7.Select Measures

(Decision)

8.ImplementMeasures

Sustainability in Semiconductor FacilitiesEnergy Management

Investment plays an important role on overall project economics Difficult to recover high investments through operational cost savings

But excessively low investment plans result in: „Design to Budget“ Less efficient facility systems Little implementation of energy conservation & efficient concepts Each discipline reduces construction cost without consideration of other systems

How to achieve an optimum ?

ENERGY MANAGEMENT

Low Investment Energy Efficiencyvs.


Alternative Energy Supply Systems(Renewables)

Alternative Energy Supply Systems(Renewables)

Heating and Cooling Generation Systems(Renewables)

Heating and Cooling Generation Systems(Renewables)

Thermal Energy Supply &Distribution System Optimization

Thermal Energy Supply &Distribution System Optimization

HVAC and ProcessSupply Systems (PCW, CDA)

HVAC and ProcessSupply Systems (PCW, CDA)

Energy Management/Efficiency During DesignThe Five Step “Inside – Out” Approach

ProductionEnergy Efficiency

ProductionEnergy Efficiency

Improvement andOptimization fromInside to Outside

Step 5

Step 4

Step 3

Step 2

Step 1


Sustainability in Semiconductor FacilitiesLife Cycle Assessment

Manufacturing of(intermediate)

products

Utility generation,distribution

GlobalWarming

Eutrophication

Acidification

Resource depletion

Wastetreatment

Directimpacts

Indirectimpactsources

TransportationExtraction ofraw materials

LCA is a systematic technique for the evaluation of (potential) environmental impactsassociated with products, processes or services over their entire life cycle.


Sustainability in Semiconductor FacilitiesLCA - Advantages & Results

Calculate, track and benchmark environmental performance Analyze environmental hot-spots in the manufacturing process or supply chain Identify effective measures to reduce environmental footprint Basis for making environmentally sound decisions Involve stakeholders Show your commitment to

sustainable development Reduce risks

Carbon footprint breakdown [%]of a semiconductor R&D site in Europe


Sustainability EnhancementsGeneral Overview & Examples

Abbreviations:MAU = make-up air,GEX= general exhaust, ACEX = acidexhaust,CAEX = caustic exhaustPCW = process cooling water, UPW = ultrapure water, WW = wastewater

EnergyEfficiency

WaterEfficiency

Materials / Chemicals / Consumables Efficiency

MAU CoolingOptimization

GEX Recycling

GEX-MAUEnergy Recovery Low Chemistry

Scrubber

ConcreteCooling

DecentralizedRAHU

HighTemperature

PCW

Chilled WaterTemperatureOptimization

Ground(Water)Cooling

Solar Cooling

Photovoltaic

N2 Storage

Heat ExchangerTemperatureOptimization

WT – WWTHeat Recovery

UPWRecycling

Solvent WasteTreatment

Water re- &down cycling

UPWProduction

Drain Segregation

AdvancedHF-Treatment

Cu-WWTreatment

Cu Reclaim

Slurry Treatment

AmmoniaReclaim

TMAH Reclaim

OrganicSanitary WW

Building MaterialsSEMI-ProductMaterials

CogenerationTrigeneration

SolarHeating

BuildingTightness

FreeCooling

Cooling WaterHeat Recovery


UPW Recycling / Re-Claim / Re-use up to 90% realized in existing projects Last rinse recycling Re-claim in facility systems

Waste water supply to cooling tower Waste water from UPW plant

(with low salt concentration)supplied cooling tower

30% make-up water savings

Sustainability EnhancementsWater Efficiency

Last Rinse Recycling

Production FacilitiesWWTWatertreatment

Recycling

TreatmentTreatment type:Reduction of TOC contamination

Non recycleableWaste water

Reduction of Water Consumption up to 40 %

Production- Reduction of

waterconsumption byoptimization orsubstitution ofprocesses

FacilitiesReclaim- Usage of waste

for non processapplications e. g.cooling towermake up

Wastewatertreatment

Watertreatment

ReclaimRecycling

Avoidance


Sustainability EnhancementsEnergy Efficiency & Management - Example

Energy Efficiency Management done for R&D semiconductor facility duringcomplete design phase

Energy (electrical power, natural gas)& water consumption reduction of all facility systems

Operational cost savings

Capacity reduction of changed system & all surrounding and successive systems

Investment cost savingsLower capacity

Operational cost savingsLower power provision fee

Subject ElectricalPowerSaving

in MWh/a

NaturalGas

Savingin MWh/a

WaterSavingin m³/a

Energy +Water Cost

Savingin €/a

AdditionalInvestment

in €

PaybackPeriod

in Years

Distillation + Cogeneration -4,284 305,914 900,000 3.3Heat Recovery 215 11,670 23,018 479,037 1,450,000 3.4Extended Heat Recovery 292 16,097 31,120 658,946 2,770,000 5.0PCW Free Cooling 2,320 0 9,373 200,058 100,000 0.5PCW Generation with 12°C 637 0 22,980 605,000 0 0.0High Temperature PCW 1,516 0 7,309 116,454 250,000 2.4Heat Recovery + Free Cooling 1,731 11,670 30,648 613,271 1,700,000 3.1


Sustainability EnhancementsGeneral Exhaust Recycling & Re-Use

Discharge of risk-free General Exhaust into subfab or support areas(add. system “Recycling Exhaust”)

Reduction of investment & operational costs

Make-up Air

Hot Water System

Water Treatment

Cooling TowerCW System

WWT

Water

Electrical PowerNatural Gas Water

CHW System

Utility Supply

Secondary& TertiarySystems

Chiller

Boiler

Waste Water

GEX

Waste Water

Assumption:25,000 m² Fab (Europe)

GEX-Recycling 290,000 m³/h (30% o total GEX)

Electrical Power Saving 1,970 MWh/a

Natural Gas Savings 284,000 m³/a

CO2 Emission Savings 1,500 t/a

Operation Cost Savings 300,000 €/a

Chiller & Cooling Tower Capacity Savings 3,000 kW = Investment saving


Sustainability EnhancementsAlternative Energy Supply Concept

Electrical power saving 17,000 MWh/a

Higher natural gas demand 49,600,000 m³/a

CO2 emission reduction 26,800 t/a

Energy & Water cost reduction 5,480,000 €/a

Assumption: 25,000 m² Fab (Europe)

Trigeneration Plant:Base load covering of electrical power, hot and chilled water


Sustainability in Semiconductor FacilitiesSummary

Sustainable technologies are becoming more and more important for our clients

“Good design & construction” should include consideration of all green buildingaspects as well as process requirements

Overall knowledge & experience of the process,facility systems and energy supply sourcesis essential

Sustainability = Protection of the Environment

…is our motivation and implicit in everything we do

T H A N K Y O U !

M+W GroupLotterbergstraße 3070499 Stuttgart, Germany www.mwgroup.net

Peter CsatáryPhone: +49 711 8804-1441Mail: [email protected]

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