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Company Logo Graphic or Hand-created

Maintenance Manual

97450

Revision A

Date of distribution

(replace current company name with your company name in both locations)

The information furnished herein by ABC Inc. is proprietary and confidential toABC Inc. personnel and is not to be duplicated, published, or disclosed to

any third party in whole or in part without permission from ABC Inc.

Thomas Henry James, 01/03/-1,

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Contents

Contents

1. INTRODUCTION...........................................................................................................................

1.1. Structure of Manual...............................................................................................1.2. Textural Conventions............................................................................................1.3. Nomenclature of Data Entry..................................................................................1.4. Options available but not installed.........................................................................1.5. How to determine if Manual Revision matches software and hardware.................

2. SAFETY.........................................................................................................................................2.1. Alert Boxes............................................................................................................2.2. EMO’s, Interlocks, light stack, and other safety equipment...................................

2.2.1. EMO.............................................................................................................2.2.2. Interlock A - function...................................................................................

2.3. Reproduction of SEMI or CE Warning Labels......................................................2.4. Energized Maintenance Procedure Classifications (Hot Work Levels)...................2.5. Lockout/tagouts.....................................................................................................

2.5.1. Electrical.......................................................................................................2.5.2. Pneumatic.....................................................................................................2.5.3. Hydraulic......................................................................................................2.5.4. Gas...............................................................................................................

2.6. Gas/Liquid Discharge............................................................................................2.7. Consumables used during Maintenance.................................................................

2.7.1. Grease...........................................................................................................2.7.2. Solvent A......................................................................................................

2.8. Environmental Issues.............................................................................................2.8.1. Exhaust - description of specific material.....................................................2.8.2. Hazardous Waste - description of specific material.......................................

3. THEORY OF OPERATION...........................................................................................................3.1. Electrical Theory.................................................................................................

3.1.1. Circuit Board A Functions............................................................................3.1.2. Module A Functions.....................................................................................3.1.3. Functional Block Diagram............................................................................3.1.4. Full Set of Electrical Schematics..................................................................3.1.5. Schematic with EMO’s, interlocks, and safety switches connection..............

3.2. Mechanical Theory..............................................................................................3.2.1. Mechanical Assembly 1................................................................................3.2.2. Mechanical Assembly 2 (and so on).............................................................

3.3. Software Overview..............................................................................................3.3.1. Flow charts and/or written description of major program modules................

ABC Inc. 97450 Revision A Maintenance Manual iii

Introduction

3.3.2. Hierarchy of Maintenance Menu Screens......................................................3.3.3. Parameter Editing.........................................................................................3.3.4. Screen Menu Functions.................................................................................3.3.5. Default Settings............................................................................................3.3.6. Range of Acceptable Values.........................................................................3.3.7. Reserved Words............................................................................................

3.4. Other Systems......................................................................................................3.4.1. Pneumatic System.........................................................................................3.4.2. Vacuum (same as above)..............................................................................3.4.3. Hydraulic......................................................................................................3.4.4. Optical..........................................................................................................

3.5. Controls and Indicators.......................................................................................

4. INSTALLATION............................................................................................................................4.1. Moving of Equipment............................................................................................4.2. Installation.............................................................................................................

4.2.1. Equipment....................................................................................................4.2.2. Software.......................................................................................................4.2.3. Supporting Hardware....................................................................................

4.3. Facility Requirements............................................................................................4.3.1. Dimensions (include floor space required for inspections, service and removal of components, facility connections, and machine footprint).....................4.3.2. Support and Foundations..............................................................................4.3.3. Plumbing......................................................................................................4.3.4. Exhaust.........................................................................................................4.3.5. Electrical Power............................................................................................4.3.6. Power Conditioners.......................................................................................4.3.7. Heat Exchangers...........................................................................................4.3.8. Coolant Water...............................................................................................4.3.9. Vacuum........................................................................................................4.3.10. Gases..........................................................................................................4.3.11. Pressurized Air...........................................................................................4.3.12. Cleanroom Capability.................................................................................

5. POWER UP/DOWN PROCEDURES...........................................................................................5.1. Checks to be performed before turning on machine...............................................

5.1.1. Safety............................................................................................................5.1.2. Mechanical...................................................................................................5.1.3. Electrical.......................................................................................................

5.2. Checks to be performed before turning off machine..............................................5.2.1. Safety............................................................................................................

Safety

Introduction

5.2.2. Mechanical...................................................................................................5.2.3. Electrical.......................................................................................................

5.3. Ways of Performing Emergency Shutdowns..........................................................

6. SET UP..........................................................................................................................................6.1. Following Emergency Shutdown...........................................................................6.2. Following Power Outage etc..................................................................................6.3. Logon/off Procedure..............................................................................................

7. AUTOMATIC OPERATION..........................................................................................................7.1. Procedure for Automatic Operation.......................................................................7.2. Procedure for Pause and Resume...........................................................................

8. DIAGNOSTICS AND TROUBLESHOOTING..............................................................................8.1. Troubleshooting Table...........................................................................................8.2. Test Point Table....................................................................................................8.3. Procedure for Performing System Tests.................................................................8.4. Procedure for Running Diagnostic Programs.........................................................8.5. Production Readiness Verification.........................................................................8.6. Bolt Table..............................................................................................................

9. CORRECTIVE MAINTENANCE...................................................................................................9.1. Maintenance procedure A......................................................................................

9.1.1. Safety Precautions........................................................................................9.1.2. Tools required...............................................................................................9.1.3. Parts required................................................................................................9.1.4. Procedure (for each instruction mention part and tool).................................9.1.5. Estimated Time and # of People Required....................................................9.1.6. Production Readiness Verification................................................................

10. PREVENTIVE MAINTENANCE..................................................................................................10.1. Schedule..............................................................................................................10.2. Item 1 on Schedule..............................................................................................

10.2.1. Safety Precautions.......................................................................................10.2.2. Tools required.............................................................................................10.2.3. Parts required..............................................................................................10.2.4. Procedure (for each instruction mention part and tool)................................10.2.5. Estimated Time and # of People Required..................................................10.2.6. Production Readiness Verification..............................................................

10.3. Item 2 on Schedule(same as above).....................................................................

Safety

Introduction

10.4. Sample Preventive Maintenance Checklist...........................................................

11. CALIBRATION PROCEDURES.................................................................................................11.1. Temperature Calibration......................................................................................

11.1.1. Purpose.......................................................................................................11.1.2. Safety Precautions.......................................................................................11.1.3. Procedure....................................................................................................11.1.4. Effect on General Function.........................................................................11.1.5. Estimated Time Required............................................................................

11.2. Laser Energy Calibration (same as above)...........................................................

12. GLOSSARY.................................................................................................................................

13. PARTS LIST................................................................................................................................

14. APPENDIX A............................................................................................................................... (Place cursor here, then perform Insert, Index and Tables operation, select TOC, ensure you have included all levels to be included here to generate TOC). Check page breaks and include the statement below on a fresh page to make page count even only. If not needed, remove the statement and the page break.

Safety

Theory of Operation

1 INTRODUCTION

1.1 Structure of Manual

1.2 Textural Conventions

1.3 Nomenclature of Data Entry

1.4 Options available but not installed

1.5 How to determine if Manual Revision matches software and hardware

Installation

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Power Up/Down Procedures

2 SAFETY

2.1 Alert Boxes

definitions of the easily distinguishable alert boxes used (WARNING, CAUTION, and NOTE) should be in bold type or otherwise highlighted. The alert boxes should be included in the general maintenance procedures as appropriate.

2.2 EMO’s, Interlocks, light stack, and other safety equipment

circuit description and location of EMOs, interlocks, light stack, and other safety equipment

2.2.1 EMO

2.2.1.1 Circuit Description

2.2.1.2 Location (should refer to picture)

2.2.2 Interlock A - function

2.2.2.1 Circuit Description

2.2.2.2 Location (should refer to picture)

2.3 Reproduction of SEMI or CE Warning Labels

A description of the hazard and full size reproduction of any SEMI or CE pictorial warning label present on the equipment.

2.4 Energized Maintenance Procedure Classifications (Hot Work Levels)

Any maintenance procedure that must be accomplished with the equipment electrically energized, the level of Hot Work (SEMI 1 through 5) must be described.

Electrical Work Type:

Energy Magnitude

Work Specifics Testing/ Metering operations

Typical MinimumSafety Equipment

required **

Set Up

Type # 1 Zero Volt Amps

De-energized, locked and tagged out. Meter and check all sources of power before beginning work.

Meter only to ensure no power.

Safety Glasses as defined by a job hazard analysis

Type # 2 Energized with covers in place less than 600 Volts

Permanent covers in place designed for metering and testing that will prevent any accidental bodily contact with electrical or RF energies

Meter and test only by means of designed testing points with all covers in place.

Safety Glasses as defined by a job hazard analysis

Type # 3 Less than 240 Volt Amps and less than 50 Volts Visual Inspection less than 600Volts

Work involving potential direct physical contact with energized exposed circuits not exceeding 240 Volt Amps and less than 50 volts.

Meter, test, or troubleshoot within voltage and Volt Amp ranges.

Safety Glasses ( non-conductive frames) as defined by a job hazard analysis

Type # 4 50 to 600 Volts

Work involving potential direct physical contact with energized exposed circuits greater than 50 Volts and less than 600 Volts. Ensure the area is properly barricaded. Includes all energized, exposed RF work.

Metering and testing with any covers removed allowing for direct contact within this voltage range. This is considered EEW.

Safety Glasses (non-conductive frames) Properly rated and tested rubber insulated gloves, sleeves and boots or mats. PRT insulated tools. Body Hook as defined by a job hazard analysis

Type # 5Not

Allowed In

CAT/ATD/SECC

Greater than 600 Volts

Work involving potential direct physical contact with energized exposed circuits greater than 600 Volts. Ensure the area is properly barricaded with non-conductive material.

Metering and testing with any covers removed exposing over 600 volts. This is considered EEW.

Safety Glasses (non-conductive frames)Properly rated and tested rubber insulated gloves, sleeves and boots or mats, Body Hook as defined by a job hazard analysis

2.5 Lockout/tagouts

The lockout/tagout location of each facility must be given

2.5.1 Electrical1. Procedure

2.5.2 Pneumatic2. Procedure

Set Up

2.5.3 Hydraulic3. Procedure

2.5.4 Gas4. Procedure

2.6 Gas/Liquid Discharge

If any gases are discharged into the air and/or toxic liquids into sewage systems, procedures for reducing environmental hazards must be included.

2.7 Consumables used during Maintenance

The Material Safety Data Sheets must be included for any recommended consumables (grease, solvents, etc.) used during maintenance procedures, likewise the proper disposal (according to Federal regulations) of any waste material (rags, swabs) generated during maintenance procedures must be stated.

2.7.1 Grease

2.7.1.1 Material Safety Data Sheet

2.7.1.2 Proper Disposal of Generated Waste

2.7.2 Solvent A

2.7.2.1 Material Safety Data Sheet

2.7.2.2 Proper Disposal of Generated Waste

2.8 Environmental Issues

2.8.1 Exhaust - description of specific material

2.8.2 Hazardous Waste - description of specific material

Set Up


Automatic Operation

3 THEORY OF OPERATIONcovers the design, purpose and physical location of all major subassemblies of the machine as well as the location and function of all maintenance personnel accessible controls. Explain in detail how the various machine assemblies work together to provide the general functions of the machine. Use photos, drawings and exploded view drawings wherever practical. Additionally, the following topics should be covered in depth:

3.1 Electrical TheoryDescribe the function of all printed circuit boards and user replaceable modules. Include functional block diagrams that show the relationship between various modules/assemblies and a full set of electrical schematics. A schematic showing the how the EMOs, interlocks, and safety switches are interconnected is required.

3.1.1 Circuit Board A Functions5. function 16. function 2, etc.

3.1.2 Module A Functions7. function 18. function 2

3.1.3 Functional Block Diagram

(if ³ B size referenced to an appendix)

3.1.4 Full Set of Electrical Schematics

(if ³ B size refer to an appendix)

3.1.5 Schematic with EMO’s, interlocks, and safety switches connection

(if ³ B size refer to an appendix)

3.2 Mechanical Theory

Include complete functional descriptions of all major mechanical assemblies. Use photos, drawings and exploded view drawings wherever practical.

3.2.1 Mechanical Assembly 1

(if photos drawings or exploded view drawings are ³ B size refer

Diagnostic and Troubleshooting

them to an appendix)9. function 110. function 2

3.2.2 Mechanical Assembly 2 (and so on)

3.3 Software OverviewFlow charts or written descriptions of the major program modules may be used for this purpose, however a hierarchy of the maintenance menu screens must be provided. Editing the parameters that control the processing of the product, and definition of the screen menu functions, defaults, range of acceptable values, units, and reserved words shall be included.

3.3.1 Flow charts and/or written description of major program modules

A functional description of the control software/firmware for computer controlled equipment.

3.3.2 Hierarchy of Maintenance Menu Screens

3.3.3 Parameter Editing

3.3.4 Screen Menu Functions

3.3.5 Default Settings

3.3.6 Range of Acceptable Values

3.3.7 Reserved Words

3.4 Other SystemsIf the equipment uses pneumatic, vacuum, hydraulic, or optical systems, the maintenance guide must contain functional descriptions of each of these systems. Include plumbing diagrams, wire list, and any other information that will help maintenance personnel understand the function of the systems.

3.4.1 Pneumatic System

3.4.1.1 Function List1. Function 12. Function 2

3.4.1.2 Diagrams (if ³ B size refer to an appendix)


3. Plumbing 4. Wiring

3.4.2 Vacuum (same as above)

3.4.3 Hydraulic

3.4.4 Optical

3.5 Controls and IndicatorsInclude the description, function, and location of controls (by color) and indicators normally used only by maintenance personnel.

Location and Color Function Descriptionrefer to a photo or diagram for simplicity

Preventive Maintenance

4 INSTALLATION

4.1 Moving of Equipment

detailed instructions for moving and unpacking11. Step 112. Step 2

4.2 Installation

installation of the equipment and the software, written so that any competent technician(s) can install the product without extensive special training.

4.2.1 Equipment13. Step 114. Step 2

4.2.2 Software

Software installation instructions must address installing the software on all applicable host systems.15. Step 116. Step 2

4.2.3 Supporting Hardware

Interconnection diagrams and set-up procedures for printers, modems, and any other supporting hardware must be included.

4.2.3.1 Procedure5. Steps

4.2.3.2 Interconnection Diagrams (refer to an appendix if ³ B size)

4.3 Facility Requirements

Include a complete listing of facility requirements and specify the dimensions and information required for design or support and foundations, EQUIPMENT WEIGHT, floor space required for inspections, service and removal of components, facility connections, and machine footprint. Specify the location and value (must include all pertinent information) of any required plumbing, exhaust requirements, electrical power requirements, power conditioners, heat exchangers, coolant water, vacuum, gases, or pressurized air, and cleanroom compatibility.


4.3.1 Dimensions (include floor space required for inspections, service and removal of components, facility connections, and machine footprint)

4.3.2 Support and Foundations

For equipment to be installed in California, the technique of seismic tiedown, leveling feet detail, and center of gravity of the equipment (or each module if assembled on-site) must be included. Equipment weight should also be mentioned.

4.3.3 Plumbing

4.3.4 Exhaust

4.3.5 Electrical Power17. all voltage, phase, and frequency combinations possible.18. details on how the above is implemented such as transformer taps,

etc., different tool configuration? - should be able to see how to switch from one to another.

19. Line configuration such as phase to phase vs phase to neutral. Intel needs to know if the tool requires a neutral.

20. Voltage tolerances.21. Power consumption in terms of connected load versus steady state

load stated in KVA not to include efficiency factors.22. Fuse requirements on Intel's supply for available voltage

configurations.23. Method for connecting power supply (basically the electrician's stuff

such as lug connector, conduit, etc.24. Detailed electrical schematics that show the above.

4.3.6 Power Conditioners

4.3.7 Heat Exchangers

4.3.8 Coolant Water

4.3.9 Vacuum

4.3.10 Gases


4.3.11 Pressurized Air

4.3.12 Cleanroom Capability

Calibration Procedures

5 POWER UP/DOWN PROCEDURESany safety, mechanical, or electrical checks that should be done before turning on/off the machine and how to perform emergency shutdowns.

5.1 Checks to be performed before turning on machine

5.1.1 Safety25. check that …….26. check that ……

5.1.2 Mechanical

5.1.3 Electrical

5.2 Checks to be performed before turning off machine

5.2.1 Safety

5.2.2 Mechanical

5.2.3 Electrical

5.3 Ways of Performing Emergency Shutdowns

27. first28. second

Glossary


Parts List

6 SET UPadjustments or set-up procedures the maintenance personnel must do to prepare the machine for production under abnormal circumstances including emergency shutdown, etc. Instructions explaining how to log onto and off of the system should be included.

6.1 Following Emergency Shutdown

29. Step 1

6.2 Following Power Outage etc.

6.3 Logon/off Procedure

Appendix A


Parts List

7 AUTOMATIC OPERATIONhow to place the machine into automatic production and pause machine.

7.1 Procedure for Automatic Operation

7.2 Procedure for Pause and Resume

Parts List

8 DIAGNOSTICS AND TROUBLESHOOTINGinstructions for using all system tests and/or diagnostic programs. Include a chart in Response Flow Checklist format that relates test failures and malfunction symptoms to the circuit board or assembly most likely causing the problem. This section should also contain tables that identify all test points and describe the voltages/waveforms associated with them as well as the number, type and size of bolt(s) removed and the torque of the replaced bolt(s). Specify how to verify production readiness.

8.1 Troubleshooting Table

Error Possible Cause RemedyProblem or symptom Possible cause(s) of problem Suggested procedure to fix the

problem

The conveyor system runs at erratic speeds.

Physical obstruction in the process chamber or edges catching on sides.

Check process chamber for obstructions. Check belt path. Make sure the conveyor system does not ride against any obstructions. (see Drive System Maintenance in Section 10.3 - System Maintenance).

8.2 Test Point Table

Test Point Waveform Voltagerefer them to diagram, drawing, or photo

Triangular, sinusoidal, etc. acceptable voltage range or exact value

8.3 Procedure for Performing System Tests

8.4 Procedure for Running Diagnostic Programs

8.5 Production Readiness Verification

8.6 Bolt Table

Location and Type Number - Size Torquerefer them to diagram, drawing , or photo

Number - length and width pound feet

Parts List

9 CORRECTIVE MAINTENANCE

9.1 Maintenance procedure A

List all parts by name and quantity, e.g., remove the four 16mm socket head screws, that are to be replaced or removed and the tools required to safely perform the procedure. Specify how long the procedure should take a competent technician to perform and how to verify production readiness.

9.1.1 Safety Precautions

9.1.2 Tools required30. screwdriver31. hammer, etc.

9.1.3 Parts required

9.1.4 Procedure (for each instruction mention part and tool)32. Instruction 133. Instruction 2

9.1.5 Estimated Time and # of People Required

9.1.6 Production Readiness Verification

Parts List

10 PREVENTIVE MAINTENANCE. Include a sample PM checklist.

10.1 Schedule

include a schedule (in time order) and procedures for performing any recommended preventive maintenance

10.2 Item 1 on Schedule

List all parts by name and quantity, e.g., remove the four 16mm socket head screws, that are to be replaced or removed and the tools required to safely perform the procedure. Specify how long the procedure should take a competent technician to perform and how to verify production readiness.


10.2.2 Tools required34. screwdriver35. hammer, etc.

10.2.3 Parts required

10.2.4 Procedure (for each instruction mention part and tool)36. Instruction 137. Instruction 2

10.2.5 Estimated Time and # of People Required

10.2.6 Production Readiness Verification

10.3 Item 2 on Schedule(same as above)

10.4 Sample Preventive Maintenance Checklist

Parts List

11 CALIBRATION PROCEDURESdocument all mechanical or electrical calibration procedures, explain the purpose of each adjustment, and describe the effect the adjustment will have on the general function of the machine.

11.1 Temperature Calibration

11.1.1 Purpose


11.1.3 Procedure38. steps

11.1.4 Effect on General Function

11.1.5 Estimated Time Required

11.2 Laser Energy Calibration (same as above)

Parts List

12 GLOSSARYalphabetized definitions of commonly used words.

Term DefinitionTerm DefinitionTerm Definition

Parts List

13 PARTS LISTinclude a listing of all field replaceable parts only. Give the part number, OEM or second source supplier, recommended stocking level, and any other pertinent ordering information. List the procedure required to order spare and emergency parts, and the Service escalation procedure. Drawings will be included where required to accurately locate and identify the respective parts. Is microfiche or electronic media documentation available?

Part Number OEM or supplier Stocking Level

Ordering Info

if needed refer to drawing

Parts List

14 APPENDIX AA photo, drawing or diagram should be referred to whenever a part of the machine is mentioned in this manual. Both the parts in the display and the display itself should be labeled so there is no ambiguity. If these displays are ³ B Size the section should refer you to an appendix. Pamphlets and/or manuals of the OEM’s alos belong in these appendices.

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