research of dynamic detection optical probe based on ... ·...

学校编码：10384 密级

学号：19920081152951

硕士学位论文

基于差动离焦原理的动态检测光学测

头的研究

Research of Dynamic Detection Optical Probe based

on Principle of Differential Defocus

洪盈传

指导教师姓名：张建寰教授

专业名称：精密仪器及机械

论文提交日期： 2011 年 5 月

论文答辩日期： 2011 年 6 月

学位授予日期 2011 年月

2011 年 6 月

厦门大学博硕士论文摘要库

基于差动离焦原理的动态检测光学测头的研究

洪盈传

指导教师

张建寰

教授

厦门大学


摘要

I

摘要

随着现代工业生产、航空航天等技术的发展，对光学、电子等器件表面形貌

质量控制、关键机械零件表面的精确测量要求越来越高，要求测量传感器及其仪

器的精度越来越高，结构也要求越来越小。由于现有测量精密物体表面形貌的方

法存在着各种缺陷，在实际生产检测中，急需一种能测量非连续表面且集表面微

观形貌和小尺寸测量于一体的实时、精密的非接触测量系统。

本课题采用差动离焦动态检测的方法，在光学测头的光路中引入调焦机构，

达到自身调焦的目的。这种动态调焦光学测头解决了测量范围小的问题，且能实

现实时、快速、精密的非接触测量，在实际生产的表面微观形貌和小尺寸检测中，

可大大提高企业生产的自动化水平和生产效率。本文具体的研究内容包括以下几

个方面：

(1)介绍了差动像散光学原理以及动态检测光学测头的工作原理，推导了聚

焦误差信号的数学模型；对动态检测光学测头的调焦系统进行分析，确定调焦系

统的组成及总体控制方案，为后面的设计奠定基础。

(2)开发了动态检测光学测头的硬件模块，具体介绍了各个模块的电路原理、

电路组成、电路设计过程的关键技术，为光学测头的集成、测试提供硬件基础。

(3)以音圈直线电机作为调焦机构，对音圈电机的工作原理进行阐述，建立

运动数学模型，对其结构及参数的设计进行了详细的讨论，并通过 Simulink 仿

真软件对音圈电机性能进行仿真，分析了参数对电机性能的影响。确定电机外形

尺寸并完成了音圈电机的外形加工，得到光学测头所需的调焦驱动机构。

(4)开发动态检测光学测头的应用软件，对增量式 PID 控制算法进行参数的

整定。基于 LabVIEW 的软件平台开发了人机友好界面，方便系统的调试和观察分

析。后对光学测头进行测试和调焦系统的仿真分析。

(5) 后对动态光学测头及控制系统进行调试实验，并对实验结果进行分析。

音圈电机具有响应时间短、加速度大、运动平稳且能实现微小位移的特性；控制

系统具有较好的动态响应的精确性和快速性，基本达到动态调焦的功能要求。

关键词：差动离焦；动态；音圈电机；DSP；


摘要

II


Abstract

III

Abstract

With modern industrial production, aerospace and other technology development,

the optical and electronic devices surface morphology quality control, key mechanical

parts surface accurate measurement requirements more and more high, request the

accuracy of measuring sensor and instrument is higher and higher, structure becomes

smaller and smaller. Due to the existing methods of measuring precision object

surface exist various defects,in actual production testing, we need a real-time,

precision non-contact measuring system to measure non-continuous surface and set

surface microstructure and small size measurement in the integration .

This subject adopts differential dynamic detection methods ,introduce the

convergence organization to the optical path,achieve to focus automatic.The dynamic

detection optical probe solved the problem of the small measuring range,and can

realize real-time,fast and precise non-contact measurement, in actual production

surface microstructure and small size detection, can greatly improve the level of

automation production and production efficiency.

The specifically research contents of this article have the following respects:

(1) Introduces the principle of differential astigmatic optical and dynamic

detection optical probe, deduce the mathematical model of focus error signals;analyze

the dynamic detection optical probe convergence system,determine its composition

and overall control scheme, lay the foundation for the design.

(2)Design the hardware system of dynamic detection optical probe.Introduce

concretely each module circuit principle, circuit composition, circuit design process

critical technologies, provide hardware foundation for optical probe integration and

testing.

(3)With voice coil linear motor as convergence institution,introduce the principle

of the voice coil motor and establish motion mathematical model, the structure and

parameters design is discussed in detail;simulation the voice coil motor performance

through Simulink, analyzes the performance of motor influenced by

parameters.Determine motor shape dimension and completed processing, get optical

probe convergence drive institution.

(4) Develop the software system of dynamic detection optical probe. Set the


Abstract

IV

parameters of incremental PID control algorithm. Based on the LabVIEW software

platform developed man-machine friendly interface, convenient system debugging

and observation analysis.Finally on the optical probe test and convergence system

simulation analysis.

(5)Conduct the dynamic detection optical probe testing experiment and analyze

the experimental results.Voice coil motor have a short response time, high

acceleration, the movement smooth and can achieve small displacement

characteristics; Control system has good dynamic response of the accuracy and

quickness, basic achieve the function requirements of dynamic focus.

Keywords: differential defocus；dynamic；voice coil motor；DSP


目录

V

目录

中文摘要 .........................................................Ⅰ

英文摘要 .........................................................Ⅲ

第一章绪论.............................................. 1

1.1 课题背景 ......................................................1

1.1.1 课题来源...................................................1

1.1.2 研究的目的和意义...........................................1

1.2 离焦误差检测技术简介 .........................................2

1.3 自动调焦技术及其应用 .........................................3

1.3.1 自动调焦技术的基本方法.....................................4

1.3.2 各种调焦技术的比较.........................................4

1.3.3 自动调焦技术的应用.........................................5

1.4 本课题的主要研究内容 .........................................5

第二章动态检测光学测头系统的整体设计 ........................9

2.1 引言 .........................................................9

2.2 动态检测光学测头系统的理论分析 ...............................9

2.2.1 差动像散法基本原理.........................................9

2.2.2 动态检测光学测头的工作原理................................12

2.2.3 光学测头的光学元器件分析..................................14

2.3 动态检测光学测头调焦系统的设计 ..............................15

2.3.1 调焦系统的组成............................................15

2.3.2 调焦系统伺服机构的选择 ....................................15

2.3.3 调焦系统控制方案的设计....................................17

2.4 本章小结 ....................................................21

第三章动态检测光学测头硬件系统的开发与设计 ............. 23

3.1 引言 ........................................................23


目录

VI

3.2 动态检测光学测头硬件系统的组成 ..............................23

3.3 光电检测模块................................................ 24

3.3.1 光电转换电路..............................................24

3.3.2 前置放大电路的设计 ........................................25

3.4 DSP 小应用系统.............................................29

3.4.1 数字信号处理器(digital singnal processor DSP) ...................29

3.4.2 TMS320LF2407A DSP 的结构和特点 ..........................30

3.4.3 DSP 小应用系统的整体结构................................31

3.4.4 DSP 小系统电路设计......................................32

3.5 A/D 转换模块.................................................37

3.5.1 AD7865 概述...............................................37

3.5.2 AD7865 的工作原理.........................................38

3.5.3 AD7865 电路原理图及采样过程...............................38

3.6 功率驱动模块 ................................................39

3.6.1 PWM 控制原理.............................................40

3.6.2 H 型双极性 PWM 控制原理 ..................................40

3.6.3 功率驱动电路设计..........................................41

3.7 电源模块 ....................................................43

3.8 本章小结 ....................................................43

第四章动态检测光学测头调焦执行机构的设计...................45

4.1 引言 ........................................................45

4.2 调焦执行机构的选择 ..........................................45

4.3 音圈电机的工作原理和数学模型 ................................46

4.3.1 音圈电机的工作原理........................................46

4.3.2 音圈电机的数学模型........................................46

4.4 音圈电机的设计 ..............................................48

4.4.1 音圈电机的结构设计........................................49

4.4.2 音圈电机设计参数的计算....................................50

4.5 音圈电机设计参数对电机性能影响的仿真分析 ....................51

4.5.1 Simulink 仿真模型的基本结构................................52


目录

VII

4.5.2 动子质量的影响............................................53

4.5.3 磁钢磁密的影响 ............................................54

4.5.4 其他结构参数的影响........................................54

4.6 音圈电机的制作 ..............................................55

4.7 本章小结 ....................................................57

第五章动态检测光学测头软件系统的研究与开发 ............. 59

5.1 引言 ........................................................59

5.2 光学测头软件系统的整体设计 ..................................59

5.3 光学测头软件系统各部分的实现 ................................60

5.3.1 DSP 软件系统的设计........................................60

5.3.2 DSP 芯片初始化设置........................................61

5.3.3 数据采集的实现 ............................................62

5.3.4 增量式 PID 控制算法程序....................................62

5.3.5 SCI 串口通讯的实现 ........................................67

5.4 人机交互界面的实现 ..........................................68

5.4.1 虚拟仪器简介..............................................68

5.4.2 图形化开发平台 LABVIEW ..................................69

5.4.4 Labview 的 VISA 串口通讯模块...............................70

5.4.5 人机交互界面的设计........................................71

5.5 本章小结 ....................................................72

第六章动态检测光学测头系统的测试与分析 ................. 75

6.1 引言 ........................................................75

6.2 光学测头光学实验系统的搭建...................................75

6.2.1 光学测头系统的组成框图....................................75

6.2.2 光学实验平台..............................................76

6.2.3 实验数据采集与分析........................................77

6.3 动态检测光学测头调焦系统测试的分析 ..........................78

6.3.1 音圈电机动态特性的分析....................................78

6.3.2 控制系统位置响应分析......................................80


目录

VIII

6.4 本章小结 ....................................................82

结论与展望.......................................................83

参考文献 .........................................................85

致谢..............................................................91

硕士期间发表的论文 .................................................................................................93


Table of Contents

IX

Table of Contents

Abstract in chinese.........................................Ⅰ

Abstract in English ...............................................Ⅲ

Chapter 1 Introduction ..................................... 1

1.1 Research background ............................................1

1.1.1 Topic source.................................................1

1.1.2 Objects and significance of the project resarch ......................1

1.2 Defocus error detection technology Introduction .....................2

1.3 Automatic focusing technology introduction and application ...........3

1.3.1 Automatic fousing technology basic methods.......................4

1.3.2 Comparison of various methods .................................4

1.3.3 The application of the Automatic focusing technology................5

1.4 Main research contents...........................................5

Chapter 2 Dynamic detection optical probe integral design .........9

2.1 Introduction....................................................9

2.2 Dynamic detection optical probe theoretical analysis ..................9

2.2.1 Principle of astigmatic method ..................................9

2.2.2 Principle of dynamic detection optical probe ......................12

2.2.3 Optical components analysis ...................................14

2.3 Design of the convergence system .................................15

2.3.1 Composition of the convergence system ..........................15

2.3.2 Choose of the servo mechanism ................................15

2.3.3 Design of the control scheme...................................17

2.4 Chapter summary..............................................21

Chapter 3 Hardware system of dynamic detection optical probe

design and develop........................................ 23

3.1 Introduction...................................................23

3.2 Composition of hardware system .................................23

3.3 Photo-electric measure module................................... 24


Table of Contents

X

3.3.1 Photo-electric measure circuit ..................................24

3.3.2 Preamplifier circuit design.....................................25

3.4 DSP minimum application system.................................29

3.4.1 Digital singnal processor ......................................29

3.4.2 TMS320LF2407A structure and characteristics ....................30

3.4.3 DSP minimum application system overall structure .................31

3.4.4 DSP minimum system circuit design.............................32

3.5 A/D Conversion module .........................................37

3.5.1 AD7865 introduction .........................................37

3.5.2 Principle of AD7865 .........................................38

3.5.3 AD7865 circuit principle diagram and sample process ...............38

3.6 Power drive module ............................................39

3.6.1 PWM control principle .......................................40

3.6.2 H dual polarity PWM control principle ...........................40

3.6.3 Power drive circuit design .....................................41

3.7 Power source module ...........................................43

3.8 Chapter summary..............................................43

Chapter 4 Dynamic detection optical probe convergence actuator

design ............................................................45

4.1 Introduction...................................................45

4.2 Choose of convergence actuator ..................................45

4.3 Voice coil motor principle and mathematical model..................46

4.3.1 Vocie coil motor principle .....................................46

4.3.2 Vocie coil motor model .......................................46

4.4 Vocie coil motor design..........................................48

4.4.1 Vocie coil motor structuer design ...............................49

4.4.2 Vocie coil motor design parameters calculate ......................50

4.5 Simulation analysis of the design parameters effect on the motor

performance......................................................51

4.5.1 Simulink simulation model basic structuer ........................52

4.5.2 Quality of motor sports part influence............................53

4.5.3 Magnets flux density influence .................................54

4.5.4 Other structure parameters influence.............................54


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