qmg quadrupole mass spectrometers qmg 421c control …... «test> «qms» «prg-nr» bg 509...

EBAL2'ERS

Operating Instructions

QMG 421Quadrupole mass spectrometers QMG 421C

Control units QMS 421and QMS 421C

QMS 421

QMS421C

BK 800 170 BE ist edition, 3rd addendum: 09, 92 1

BALZEFt¾

Table of contents

1. Important information 5 4. Description 11

1,1 About these operating instructions 5 4.1 Basic concept 11

1.2 Safety information 5 4.2 Front panel 13

1.3 Protection from static electricity 5 4.2.1 Display 14

4.2.1.1 Measured value output (Measure display) 141.4 Explanation of symbols 5 4.2.1.2 Parameter entry (Setup display) 15

1.5 Validity 54.2.3 Contrast 16

4.2.4 Number pad 16

2. Introduction 65. Operation 17

2,1 Features 6 5.1 Initial start up 17

2.2 System overview 6 5.1.1 Mains power connection 17

2.2.1 System components in the 400 family 6 5.1.2 Configuration entries 17

2.2.2 System components in the 125 family 6 5.1.4 Optimizing the emission current limit values 18

2.2.3 Options 8 5,1.5 Aligning the quadrupole electronics 18

2.2.4 Expansion units 8 5.1.6 After adjustments to the measuring system orcomponent replacement 18

3. Installation 9 5.2 Function groups 19

3 1 Mains power connection 9 5.2.1 <channels> function group 205.2.L1 <select> function 20

3.2 Options to the OC 421 9 5.2,1.2 <detect> function 205.2.1.3 <mass> function 21

3.2.1 Installing / removing optional boards 9 5.2.1.4 <amplif> function 21

3.3 Additional modules 9 5.2.1,5 <aux> function 21

3.3.1 Installing and removing modules 9 5.2.1.6 <output> function 225.2.1,7 <trip> function 22

3.4 Installing the QMS in a 19" rack 10 5.2.1.8 <integ> function 23

3.5 Setting up the OMS as a bench unit 10 5.2.2 <general> function group 245.2.2.1 < dildo> function 24

3.6 Periphery components 10 5.2.2.2 <config> function 24.

5.2.2.3 <error> function 253.7 Cabimg 10 5.2.3 <ion source> function group 26

3.8 Special applications 10 6.2,3,1 <emiss> function 265.2.3.2 < v1...v6> function 26

3.8.1 Test sockets 10 5.2.3.3 <v7...> function 273.8.2 <ctrl> multipoint connector 10 5,2.4 <operation> function group 283,8.3 <AO> connector 10 5.2.4.1 <sem hv> function 283.8.4 <RS232> and<LAN> connectors 10 5.2.4.2 <ionsrc> function 28

5.2.4.3 <cycle> function 295.2.4.4 <sem> function 295.2,4.5 <filam> function 295.2.4.6 <run/halt> function 305.2.5 Parameters 31

2 Table of conten s oMs421eg.opm

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6. Measuring with the QMS 421 63 7. Technical data 85

6.1 Operating modes 63 7.1 General 85

6.1.1 SCAN 63 7.2 Basic unit 856.1.2 SAMPLE 63 7.2.1 Console 866.1.3 PEAK 64 7.2.2 Ouadrupole controller 866.1.4 Integral spectrum 65 7.2.2.1 Measurement operation (Cycle) 866.2 Adjust 65 7,2.2,2 lon detection 86

7,2.2.3 External input 86.2.1 Coarse search 65 7.2.2.4 lon sources SS6.2.2 Fine adjustment 67 7,2.2,5 Measured data collection 89

6.3 Analog measured values 68 7.2.2.6 Integrator 907.2.2.7 Switching functions 90

6.3.1 Connectors 68 7.2.2.8 Interfaces 906.3.2 Overview of the output signals 88 7.2,2.9 Connectors on the QC 421 92

6.3.3 Output format 70 7.2.2,10 Signal description 93

6.3.4 Connecting recording instruments 746.3.4.1 Oscilloscope 74 8. Error messages, Troubleshooting 946,3,4.2 Strip chart recorder 746.3.4.3 x/y oscilloscope 75 8.1 Service and repair 94

6.3.4.4 Plotter 75 8.2 information on operation 946,4 Switching functions 76

6,4.1 Absolute switching functions 768.3 Warnings 94

6.4.2 Hysteresis switching functions 77 8.3.1 Warnings on the CS 421 console 94

8.3.2 Wamings from the QC 421 quadrupole6.5 Integrator 79 controller 946.5.1 Forming the integral value 79 8.4 Error messages 956.5.2 Integrator operation 79

8.4.1 Error messages from the CS 421 console 956.5.3 Integrator background (I-UGND) 79

8.4.2 Error messages from the QC 421 quadrupole6.6 Using the digital output module 79 controller 95

6.7 Measurementoperation 79 8.5 Troubleshooting 96

6.7.1 lon counting operation 79 8.5.1 General malfunctions 96

6.7.1.1 Measured value display 79 8.5.2 Malfunctions in the control unit 101

6,7.1.2 Adjusting CP-LEV 806,7.1.3 lon polarity 806.7.2 Chopper Lock in (CLA) 80 9. Maintenance 103

6.7.2.1 Using the CLA for process gas analysis 80 9.1 Periodic maintenance 1036,7.2.2 Measurement setup 806.7.2.3 Operation and signal processing 80 9.1.1 Control unít 103

6.7.3 Quadrupole multiplexer (QMU) 81 9.1.2 Periphery components 103

6.7.4 External input 82

6,7.5 Degas operation 82 10. Spare parts, accessories 1046.8 Measurement sequence 82 10.1 Control unit 1046,8.1 Halt 62 10.2 Expansion units 1046.8.2 Single channel operation (mono channel) 826.8.3 Multichannel operation (multi channel) 82 10.3 Power connection cable 1056.8.3.1 Settling 83

6.9 Simulation 84

6.9.1 Simulating a troubleshooting operation 84

Table of contents 3

Appendix 106

A: Configurations 106

B: System cabling 107

B1: Electrometer operation 107B2: lon counting operation 108B3: Cable overview 109

C: System cabling 110C1: Electrometer operation 110C2: lon counting operation 113C3: Cable overview 113C4: Using the OMU 112 and QMN 112 114CB: Cable overview 114

D: Default parametervalues 115D1: <channels> -Parameter 115D2: <general> -Parameter 116D3: <ion source> -Parameter 116D4: <operation> -Parameter 117

E: Adjust 118

ET: Status messages for coarse search 118E2: Status messages for fine adjustment 120

F: Installing / removing options in and from theOC 421 121

G: Converting the unit for other mains powers122

H: Glossary 123

J: Bibliography 124

K Stichwortverzeichnis 126

4 Table of contents QMS421gg.opm

BAL2'EFW

1. Important information

1.1 About these operating instructions 1.4 Explanation of symbolsThese operating instructions e×plain basic principles of The brackets surrounding certain terms have theoperation as well as installation, operation, maintenance following meaning:and troubleshooting for the OMG 421. They alsocontains pertinent information on the QMS 421 and < ..... > This is the exact lettering on theQMS 421 C controllelement (key, potentiometer,This manual is based on the information in the color measurement socket, etc.)leaflet [2] and the catalog sheet (3). « .... » Display, reaction (text on screen, display,

illuminated LED, etc.)Information necessary for using the OMS 421 interfaceare contained in a separate manual [6]. » ..... « Operating mode, effect (»run«, etc )

Additional modules and periphery components are also .. ) Literature reference

described in seaparate operating instructions (see This information only pertains to the 400appendix J). familîy of quadrupole mass spectrometers

(OMG 421-4).This information only pertains to the 125

. , familiy of quadrupole mass spectrometers1.2 Safety mformation (OMG 421-1).

AII texts in these operating instructions containinginformation on equipment and personnel safety are

marked with this triangular warning symbol $. This 1.5 Validity

safety information must be communicated to otherusers. These operating instructions apply to units with the

following software versions. The version in your unit canbe taken from the information given in section 5.2.5.

NOTE: Gives information on possible measu-rement errors. for all control units:

<config> «TEST> «QMS» «PRG-NR» BG 509 790 -

CAUTION: Gives information on incorrect hand- <config> «TEST» «DSP» «PRG-NR» BG 509 789 -

ling that could cause damage to the and for control units with consoles;measurement instrument or peripheral <config> «TEST» «CS 421» «PRG-NR» BG 509 787 -

units.If the second-to-last letter is farther into the alphabet

C DANGER: Wams of the danger of injury or fatal than the letter in the above numbers, the module may

injury for the person workinG on the contain added features, but these operating instructions

unit and/or third parties, still apply.

1.3 Protection from static electricity

CAUTION: The individual electronic componentsare delicate, and thus appropriatemeasures must be taken to protectthem from static elect<icity. Storeplug-in pc boards in antistatic bags orcontainers.

Damage resulting from incorrect hand-ling may lead to a revocation of theguarantee,

opm important information 5

ESALZERS

2. Introduction

2.1 Features- Modular system for flexbile adaptation to a wide va-

riety of applications

- 64 measurement channels, with individual parameterprogramming

- Single or multichannel operation

- All parameters can be programmed manually, via theRS-232-C interface, or via the field bus interface

- Each channel can carry out switching functions

- Expansion with a variety of modules possible

2.2 System overview

A basic distinction is made between two families of in-struments (see [2] ):

[_4oo_) The 400 family of quadrupole mass spectrome- The 125 family of quadrupole mass spectrome-ters (OMG 421-4) are suited both for measu- ters (OMG 421-1) is suited for measurements inrements in the lower mass ranges (to 341 amu) the lower mass range to 200 amu. The 6 mmwhen the highly stable 16 mm rod system is rod system is used here,used, and up into the higher mass ranges (to This family of instruments is also described in2048 amu) when the 8 mm rod system is this document.used.

This family of instruments is descibed in thisdocument,

2.2.1 System components in the 400 family 2.2.2 System components in the 125 family

QMS 421 control unit OMS 421 control unitThe basic ver- The basic ver-

' sion control unit sion control unitmust contain

..must contain

the following o the followingmodules, , modules.

Electrometer lon counter Electrometer Ion counterDetector operation operation Detector operation operation

QC 421 QC 421 QC 421 QC 421without option with IC 421 option without option with IC 421 option

iS 420 IS 420Faraday90° SEM HV 420 or HV 420 or

HV 421 HV 42190° CD-SEM HV 421

6 Introduction QMS421gg.opm

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LeJ¯l

QMH 400 / OMH 410 RF generator OME 125 quadrupole electronics

The RF generator produces the The quadrupole electronicsradio frequency voltage re- contain the ion source supplyquired for mass separation. It and the radio frequencymust be selected according to voltage generator required forthe information in Appendix A. mass separation. When an

SEM is used, the OME 125must a(so contain the corre-

Electrometer lon counter sponding high voltage supply,operation operation

× x Electrometer Ion counteroperation operation

× X

OMA 400 analyzer

The analyzer comprises theion source, mass filter and the OMA 125 analyzerion detector. The type of ion The analyzer comprises thesource must be chosen ac ion source, mass filter and the

-- cording to the application i ion detector. The type of ion(compare Appendix A). source must be chosen ac-

Different ion detector systems functioning according to cording to the application

different detection principles are available: (compare Appendix A).

Electrometer lon counterDetector operation operation Electrometer ton counter

Detector operation operationFaraday x

Faraday ×90° SEM x x 90° SEV x x90° CD-SEM × Channeltron ×

EP 112 electrometer preamplifierEP 112 electrometer preamplifier

The electrometer preamplifier hasthe function of amplifying the ion The electrometer preamplifier has

(Faraday) or electron current (SEM) the function of amplifying the ion

and converting it to a voltage. (Faraday) or electron current (SEM)and converting it to a voltage.

Electrometer Ion counter Electrometer Ion counterDetector operation operation

Detector operation operationFaraday maximum 1 unit Faraday maximum 1 unit90° SEM maximum 2 units optionally 1 for ad-

ditional measure-90° SEM maximum 1 unit

ments (Faraday) Channeltron maximum 1 unit90° CD-SEM maximum 2 units

CP 400 counter preamplifier

CP 400 counter preamplifier The counter preamplifier gene-. rates discrete counting pulses

The counter preamplifier gene- from the electron current impul-rates discrete counting pulses

ses coming from the SEM.sreomcohmeirro

thurrSentimpul-

Electrometer Ion counter

Electrometer Ion counter operation operation

operation operation - ×

X

OMS42190.opm introduction 7

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2.2.3 Options 2.2.4 Expansion units

The GC 421 quadrupole controller can be equipped with The quadrupote mass spectrometer functions can be ex-an additional pc board - either the AO 421 or the IC 421 panded with modules and components plugged into free- on request. slots (see section 7.2). Please refer to separate operating

instructions for detailed descriptions of the expansion

AO 421 analog output boardpossibilities (see appendix J),

The AO 421 has 12 channels for Chopper Lock-In operationanalog output of measured values

CLA 400 chopper lock-in-amplifier

Lock-in amplifier with integratedchopper drive, suited for the Bal-zers piezochopper.

Electrometer lon counteroperation operation Electrometer Ion counter

operation operationX

x

1C 421 ion counter boardinputloutput modules

This module contains the circuitsnecessary for ion counting Al 421 analog input moduleoperation plus the same 12 analog DI 420 digital input moduleoutput channels contained in the DO 420 digital output module

AO 421. The analog input module has 16 chan-nels for analog signal inputs.

The digital input module has a maxi-mum of 32 channels for digital signalinputs.

Electrometer Ion counter The digital output module has 32operation operation digital output channels

× ×Electrometer or ion counting operation

Al 421 maximum 1 unit

DI 420 maximum 2 units

DO 420 maximum 3 units

Total pressure measurement

Pi 420 Pirani modulePE 420 Cold cathode module

Pirani measurement card for two gaugeheads. For total pressure measurementin the coarse and medium vacuumrange.Cold cathode measurement card forone gauge head, For total pressuremeasurement in the high vacuumrange.

Electrometer or ion counting operation

Pl 420 maximum 1 unit

PE 420 maximum 1 unit

8 Introduction aMssage.opm

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3. Installation

DANGER: Whenever it is likely that the protec. 3.2 Options to the OC 421tion has been irnpaired, the apparatusshall be made inoperative and be se- The basic OC 421 quadrupole controller comprises the

cured against any unintended opera- processor and the signal processing pc boards. It can

tion. The protection is likely to be im. also be equipped with either an AO 421 analog outputpaired if, for example, the apparatus board or an IC 421 ion counter board as an option.

- shows visible damage,- fails to perform the intended measu- 3.2.1 Installing I removing optional boards

rements.- has been sujected to prolonged The installation and removal of optional boards is descri-

storage under unfavourable condi- bed in Appendix F.tions.

- has been sujected to severe transportstresses.

3.3 Additional modules

3.1 Mains power connection CAUTION: Empty slots must always be coveredwith dummy backplates to assure

CAUTION: Before plugging the OMS 421 intoproper ventilation (see section 10,1).

your local mains power supply, checkthat the local supply agrees with the 3.3.1 Installing and removing modulesmains power voltage data on theOMS 421 nameplate. If it does not, if you want to install or remove accessory modules, pro-

you must convert the operating vot. ceed as follows:tage setting for the unit as described

- Turn off the control unit and wait at least one minute.in Appendix G.

- Disconnect all cables, disconnecting the mains power

DANGER: The mains plug shall only be inserted cable last,in a socket outlet provided with a pro-

- Unscrew the dummy backplate(s) / module(s).tective earth contact. The protectiveaction shall not be negated by the use - Plug in the new module(s) / unplug the old module(s).of an extension cord without a pro- RT NOTE: If you are installing new modules, betective conductor,

sure to set their addresses correctly,To ensure continuous protectivegrounding, connect the mains power Module Address octalcable before connecting any other IS 420 175 540cables, and in the same way discon-nect the mains power cable last after I-fV 420 175 400

all other cables have been disconnec- HV 421 175 404ted· Al 421 174 400

lf you intend to fabricate your own power cable, you will DI 420 1st module 174 600need an Europa apparatus plug (see section 10.3), 2nd module 174 604

Protective ground DO 420 ist module 174 7002nd module 174 704

... 3rd module 174 710

-- Live LPi 420 174 000PE 420 174 100

Neutral line N Refer to the operating instructionsfor the module for instructions on

if the unit is to be installed in a rack, the mains powersetting the address (see appendix JL

supply must be conducted via a switched power dist<ibu- - Secure the module(s) / backplate(s) in place by tighte-tor. ning the fixation screws

CAUT10N: The fixation screws must be cor-rectly tightened to assure properfunctioning.

QMS421gg.opm ÍOStaÌÏatÍOn 9

EIALZERS

- Connecting the mains power cable first, make the cableconnections. 3.8.1 Test sockets

- Turn the unit(s) on again <sync> Signal for triggering a recording instrument

<elm> Output signal from the prefiltered electrometerpreamplifier

3.4 Installing the OMS in a 19" rack<mon> Measured value from the selected measure-

The QMS 421 can be installed in a D1N 41 494 19" ment channel or from the sequential measure-

rack, ment signal output

<scan> Analog signal that is a function of the massDANGER: If the unit is to be installed in a rack' number. Used for recording spectra on a strip

it must not lower the protection level chart recorder.of the rack (protection against foreignobjects and water) e.g.DIN VDE 0113 regulations for switch 3.8.2 <ctrl> multipoint connectorcabinets when in place.

The signals relayed via this connector are:

CAUTION: The temperature inside the rack must 'ELM OUT'not exceed + 40 °C. Take care thatair can freely circulate through the Electrometer preamplifier output signal. This is thebuilt-in fans. same signal that is present at the <elm> test socket.

'EXT IN'

When <detect> «TYPE» : «EXTERN» is entered, an3.5 Setting up the OMS as a bench unit external detector can be connected through here and

When the protective cover available as an option (seeits input signal processed,

section 10.1) is mounted, the QMS 421 can be set up as 'EXT PROT'a bench unit, it has folding legs that allow it to be set at Extemal protection control input for the filament anda slight angle for better viewing and easier access to the SEM supply, Its function is determined by thefront panet <ion src> «CTRL» «SEM+ FIL» sequence entered.

/ CAUTION: When setting the QMS 421 up as a 'INT START'bench unit, be sure that air circulationin through the cooling slots on the When <integ> «TRIG»

:«EXTERN» is entered, the in-

side of the unit and out through the tegrator is started by the trigger signal coming via this

back of the unit is unhindered, pin.

'RUN IN'

Depending on the parameter setting for <cycle>3 Periptiery cornpOnents «TRIG», the measurement cycle is started by the trig-

ger signal coming via this pin,install periphery components such as the analyzer, elec-trometer preamplifier, etc. according to the separate ope Using an appropriate matching connector (refer to sec-

rating instructions for the components (see appendix J). tion 10.1), make a connection cable suited to your appii-cation. Refer to section 7,2.2.9 for the pin assignments.

3.7 Cabling 3.8.3 <AO> connector

if you do not want to use the AB 021 connection boxCable the system as required for your particular OMG available as an accessory, you can fabricate you ownsystem version. Refer to Appendix B or C for the correct connection cable using a matching multipoint connectorcabling for your version' (refer to section 10.1). Refer to section 7.2.2.10 for pin

assignments.

I NOTE: Be sure the <polarity> switch on theOME 125 is set to <+>. 3.8.4 <RS 232> and <LAN> connectors

For the pin assignment for the above connectors, pleaserefer to the separate opeating instructions for the inter-

3.8 Special applications faces (61.

The test sockets and <ctrl> and <AO> connectors areof particular interest for certain applications. See section6.3.

10 Installation QMs421eg.opm

ISAL2"EREi

4. Description

4.1 Basic concept

The QMG 421 quadrupole mass spectrometer is a multi-channel measurement system that operates with se-quential data transfer.

The control unit functions are divided into four groups:

channels general ion source operation

OOOO OOOOOOO OOO OOO OOO:

Definition of the measurement General instrument set- Ion source settings Operation of the measure-task tings ment unit

LaJon source Mass filte lon detection,

SEMlon source

S 420-> 4x0 EP 112

OOOEP CP112 400

channels

.OOOO oc4 4H24H

OOOOoperation

OOOOOO :

general

OOO<ion source>

The ion source parameters are entered here, after which<general> they are stored as a complete parameter set in the ion

The <general> group of functions concerns system source parameter memory. A maximum of four such pa-

configuration and maintenance. rameter sets can be stored per ion source.

<channels> <operation>

This group of functions defines the measurement para- These functions control the measurement unit i.e. turnmeters and stores the parameters channel-by-channel, the ion source (<filam>) and SEM (<sem>) on/off and

control the measurement cycle sequence with<run/halt>.

OMSOMgg.opm DOScri ptiOn 1 1

IiBALZERG

L.L.]lon source Mast filter -lon detection

en source

.. . ... . .... .,i CPi

EP400 i 112

channels '

OOOO _

QC 421 QME 125

OOOOope alion

general

<ion source>

When the OMU 112 quadrupole multiplexer is used, the<general>status of the individual measuring units is shown.

The <general> group of functions concerns system in this family of mass spectrometers, the ion source po-configuration and maintenance. tential is set on the OME 125 quadrupole electronics

(compare [1 2] ).

<channels>

This group of functions defines the measurement para-<operation>

meters and stored the parameters channebby-channel. These functions control the measuring unit i.e. turn theion source (<filam>) and SEM (<sem>) on/off and con-trol the measurement cycle sequence with <run/halt>.

12 Description ûMS421gg,opm

4.2 Front panel

There are two standard versions of the quadrupole massspectrometer control unit:

QMS 421 with CS 421 console (operation from thefront panel or via an interface)

OMS 421 C with dummy panel (operation only via aninterface)

Photo o -O OOOOO

OOOOOOOOOOO OOOOO

OOOO OOOOOOO OOO OOO OOO

CS 421 console:ln «CS 421 » operating mode, all the front panel func-tion are enabled, if the OMG 421 is operated via an in-terface, the front panel functions are disabled, but themeasured value and parameter displays still function,Parameter entry via the front panel is only possible ac-cording to the <config> «CTRL» «MODE» parameterentry privileges.

OMS4210g.opm OSSCriptÍOn 13

ESALIERS

4.2.1 Display

The four-line LCD display shows the data for a singlemeasurement channet The display concept subdividesthe display into measured value output (Measure display)and parameter entry (Setup display).

4.2.1.1 Measured value output (Measure display)

The 'measure display' appears after the each measure-ment cycle start. The measurement channel currently se-lected is always shown,

Selic easure- Measured value as bar graphment channel (mantissa value)

Measured value linewith mass, Mass number Measured value in Field for alarms and

measured value and exponential form error messagesbar graph

Channel informations 128 00 : -O .0027E-07 88IESIEL- -----

CHAHHEL 5' SCAN N ** **MULTI CHAN 3-19

Channel operating mode, TR I P 1 1-18 ^^ ^v--

«^ -- - w^ -- HEX Tstart and finish channel •

Next series of

Switching functions ___ _M switching function

(compare section 6.7.4) Operating mode operation statusesfor the measure-

ment cycle

Switching function statusfor the given channels

Start and finish channel ^ Switching function activefor a measurement cycle - Switching function not active

- Switching function off

14 Description ûMS4219 opm

E3ALZERS

4.2.L2 Parameter entry (Setup display)

When any function key is pressed, the setup display When the unit is being operated in remote control i.e.appears. The measurement channel currently selected is <config> «CTRL» «MODE» : not «CS 421», thealways shown. parameters and their values are shown for approx. 30

seconds, after which the display goes automatically toMeasure display.

Selected measure- Measured value as bar graphment channel - Mantissa value in electrometer operation

- Quasilog. across 10 dec. in ion counter operation

Measured value line Mass number Measured value in Field for alarms and

with mass, e×ponential form error messagesmeasured value and

bar graph

Channel informations 42 . 0 : -0 .0073E108 REEROEBRENiillEL---CHAN / 0: SETUP/MASS ** **

MODE SPEED /FIRST WIDTH RE50LName of parameter for SCRN-N O .5ms O .00 -0 OFF

the given function

Adjustable Changes within Parameter nameparameter values the given function Current (compare section 5.2.5)

parameter value

ûMS42100.opm OSSCTiption 16

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4.2.2 Softkeys

The six softkeys underneath the four-line LCD displayPhoto- are used to select the parameters shown in the displayfor parameter entry. The parameter value corresponding

a o a o o a : to a particular softkey will flash when that key ispressed.

;- o a a e a a If the selected parameter only has two possible statuses9 2 .91..9..E E i (ON/OFF; ×1/×10, etc.) you also have the possibility

of changing the entry from the softkey as well as fromthe number pad.

4.2.3 Contrast

Use the keys to the right of the display to optimize thehoto = = oc = contrast ro, your viewins anoi,

a a a a a "i Higher contrast

J Lower contrast

4.2.4 Number pad

The number pad keys are used to make all parametera a o a a value entries. They comprise the following:

. . aaaaaa a a a a a to number keys for changing parameter00000

valuesdecimal point

change sign digit

exponential entry

cancel a parameter entry that has notL-- yet been closed, or return to the

Measure displayclose a numerical entry by saving thenew value (enter)

and Change the displayed parameter value-J - in short, predefined steps

and Change the displayed parameter value- l-J in longer, predefined steps

The 2,,

and i keys can be used for allparameter value changes. If you hold the key down, thevalues run through continuously.

The modified parameter values are accepted directly l.e.without i .

16 Description QMsA21gg.opm

EIALZggs

5. Operation

The following explains how to operate a control unit witha front panel console, but the functions described alsoapply to control units with dummy panels.

5.1 Initial start up

5 1.1 Mains power connection 5.1.2 Configuration entries

CAUTION: Before switching on the apparatus: Proceed as follows to configure the control unit for your

- make sure that is set to the voltage ofQMG system;

the power supply - Select the <general> function group and the- the unit must be properly grounded <config> function.- all modules, cables and periphery

components (compare section 3) must- Select the «SYSTEM» parameter by pressing the

be properly installed appropnate softkey.- alt the technical data (compare section - Enter the family to which your quadrupole analyzer

7) must be met belongs. If necessary, select the «QMA» submenu by

pressing the appropriate softkey and change theDANGER: Any interruption of the protective parameter value using the or key,

conductor inside or outside theapparatus or disconnection of the - Enter the mass range for which your quadrupoleprotective earth terminal is likely to electronics or RF generator is configured. If necessary,

make the apparatus dangerous, select the «MASS-R» submenu by pressing theIntentional interruption is prohibited, appropriate softkey, and change the parameter value

using the or key.

The main power switch is - Enter the type of ion detector mounted on yourlocated în the lower left-hand powe analyzer. If necessary, sefect the «DETECT» submenusection of the front panel, by pressing the appropriate softkey, and change theWhen the unit.is powered on, it parameter value using the or keyruns through a self-diagnostics e 1

/- Enter the type of ion source mounted on your analyzer.

routine and activates the default /

If necessary, select the «lS-TYP» submenu by pressingparameters (default parameter the appropriate softkey, and change the parameterthe parameters that were active o ,

value using the L or L i key,.when the unit was turned off thelast timet - If you are using an option, select the «OPTION»

submenu and define the option using the o orkey.

- Finalize these configuration entries by pressing the«RETURN» softkey.

OMS42tgg opm Operation 17

EIALKERG . . .

5.1.3 Electrometer offset adjustments e) Turn the emission on.

Adjust the electrometer offset as follows: f) Repeat steps d) and e) until the «Emission error» errormessage appears,

a) Pull the coaxial plug on the electrometer preamplitierand shield the BNC connector with, for example, g) Turn the emission off and increase the limit value by

aluminum foil (do not short circuit). 0.1 A.

b) Set the offset correction on the control unit to zero,<emiss> «E-PROT4 : + 0.1 A

<amplif> «OFFSET» : «O,CO» h) Turn the emission on.

c) Enter the highest filter value, il Repeat steps g) and h) until the «Emission error»message goes out.

<amplif> «FILTER»: 800 ms»

d) Select the mass range.CAUTION: If the limit value resulting from the

above procedure is abnormally<amplif> «RANGE» : «E-6» or «E·7» high, there could be an error in the

ion source, the vacuum conditionse} Adjust the zero point for the electrometer preamplifier or in the control unit itself. You

from the trimmer potentiometer (with screwdriver must troubleshoot the cause of athrough the hole next to the control cable) too-high limit value to prevent the

filament from buming out.

k) If the filament is new, leave it on for several hoursand then adjust the limit value to as low a value as

f) Select a sensitive mass range.

<amplif> «RANGE» :«E-8» or «E-9»

g) Check the zero point and correct if necessary' 5.1.5 Aligning the quadrupoleelectronicsh) Repeat steps f) and g), selecting more sensitive mass

ranges. As vibrations could interfere with the CAUTION: Before starting your measurementadjustment, we recommend removing the screwdriver system, refer to the information givenafter making the adjustment and then checking the in the operating instructions for theoffset quadrupole electronics (12].

a) Set the <filament selection> switch to <remote>and the < polarity> to < + > (see 11 2) ).

ŒOb) Check the <TUNE> setting and ,if necessary

,

5.1.4 Optimizing the emission current limit values optimize it according to section 6.2 in the operating

CAUTION: Before starting your OMG system,instructions {12].

refer to the information given in theoperating instructions for the RF 5.1.6 After adjustments to the measuring systemgenerator (10, 11].

or component replacementOptimize the emission current limit values for normaloperation («E-PROT»). The emission is turned off We recommend carrying out an initial start up routine asimmediately any time this value is exceeded, for described above after the ion source has been realigned,example, as a result of poor vacuum or another error the filament replaced, a component replaced, etc.situation. Choose the limit value as low as possible. Thiswill provide optimum protection for your filament:

a) Tum the emission off.

<filam> (LED <filam> dark)

b) Make sure the vacuum is i10 mbart,

c) Turn the emission on.

<filam> (LED <filam> Ughts)

d) If the «Emission error» message does not appear, tumthe emission off and reduce the limit value by 0.1 A.If the error message appears, continue from step g),

<emiss> «E-PROT» :

- 0,1 A

18 Bedienung aMs42tog opm

BALZERS

5.2 Function groups

This section gives an overview of all the control unitfunctions and the parameters that need to be defined forthem. We will present these are follows:

- The functions are presented in the groups and in thesequence in which they appear on the CS 421 console.

- In most cases the parameters corresponding to thefunctions are given in a table in the section for thatfunction.

- The tables are systematically structured.

Structure:

Name of the functionMass spectrometer family being described

5.2.L3 The <mass> function to which it applies

Defining the scan parameters for the selected measurementchanneL.

Purpose of the function

Any limitations imposed by parametersfor another function / function group Other parameters for

the function

First parameter for the function

<detect> «TYPE* Scitkey 1 Sottkey 2 Softkey 3 So-tkey 4 Softkey 5 Softkey 6

FARAD. sEM MODE SCAN-N. SPEED FIRST WIDTH RESOL(ON CNT SCAN-F.EXTERN STAIR

MODE SAMPLE DWELL MASS AVERAGE RESOL

MODE PEAK L SPEED FIRST WIDTH RESOL THRESHPEAK-F

PAIRAN PEN ING. --- OO 98f8met€fS -----

Current value of the .. .

(imiting parameter Any limitation on other parameters imposedby the current setting of the first parameter.

- A line in the table corresponds to a line on the displaywith the values for the paramters given.

Examples:

<mass> «MODE» : «SCAN-N» <mass> «MODE»:

«SAMPLE»14.03' 8.277 E-96 MMSBRESSEMBEEEERL__- 14.031 8.2779E-86 EBERIMERREEROMERL---

CHAH 9: SETUP MASS ** ** CHAH 0: SETUP MA55 ** **MODE 5PEED FIRST WIDTH RE50L MODE OWELL MASS AUERAGE RE50L

5CAN-H i s 14.03 -1 ON SAMPLE 1 s 14.03 1 ON

- For details on the parameters, refer to section 5.2.5where they are listed in alphabetical order.

OMSUngopm Operation - Functions 19

BALZERS

5.2.1 < channels > function groupThis group contains all the parameters that must be defined accor- channelsding to the measurement that needs to be made for the channel select detect mass amplifchosen under <select>.

128 .OO:-O .0CHRNNEL 5 : aux ou ut inp integ

5.2.1.1 <select> function

|400

Selection of a measurement channel to be displayed on the CS 421console (measure and setup display)

5.2.1.2 <datect> function

Defines the detector for the measurement channel selected.

Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

TYPE FARAo LOCK-IN PHASE

TYPE seM SEM LOCK-IN PHASE

TYPE lON-CNT. SEMEXTERN

TYPE PIRANL

TYPE PENN1NG PE-CTRL

TYPE A-lNPUT AWCH

La]Defines the detector for the measurement channel setected,


TYPE FARAD QMU-CH LOCK-lN PHASE

TYPE SEM SEM QMU-CH LOCK-IN PHASE

TYPE lON-CNT. SEMEXTERN

TYPE PinANI

TYPE PENNING PE-CTRL

TYPE A-INPUT Al-CÑ

20 Operation - Functions aMsA21ga.opm

BALZERE

5.2.1.3 <mass> function

EED ŒODefines the scan parameters for the measurement channel selected.

<detect> sTYPE• Softkey 1 Softkey 2 Softkey 3 Softkey 4 Soitkey 5 Softkey 6

FARAD, SEM MODE SCAN-N, SPEED FIRST WIDTH RESOLION-CNT SCAN-F,EXTERN STAIR

MODE SAMPLE DWELL MASS AVERAGE RESOL

MODE PEAK.L, SPEED FIRST WIDTH RESOL THRESHPEAK-F

PIRANI, PENNING,A-INPUT

~~~-- 00 98fameters -

5.2.1.4 <amplif> functionl=IlmiDefines the measurement amplifier parameters for the measurementchannel selected.

<detect> nTYPE> Softkey I Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

FARAD. SEM MODE Fix RANGE CALIB FILTER PAUSE 2) OFFSET<detect>«LOCK-IN» «OFF, MODE AUTo CALIB FILTER PAUSE 2) OFFSET

MODE AUTo-o RANGE-L CALIB FILTER PAUSE 2) OFFSET

FARAD, SEM AMP 1) CALIB FlLTER PAUSE 2)

<detect>«LOCK-INw .

«ON»

ioN-cNT CALIB PAUSE 2) CP-LEV

EXTERN GAIN CALIB FILTER PAUSE 2) OFFSET

PIRANL PENNING,A INPUT

------- FIO PStametSTS --

first additional parameter level

1) AMP Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

RANGE AMP1 AMP2 AMP3 RETURN

2) PAUSE Softkey 1 Softkey 2 Softkey 3 Softkey 4 Sottkey 5 Softkey 6

P-CAL RETURN

5.2.1.5 <aux> function

Enables or disables the selected measurement channel (auxiliaryfunctions for parameter entry)

Softkey 1 Softkey 2 Sottkey 3 Softkey 4 Softkey 5 Softkey 6

STATE COPY TO ALL COPY TO CH

OMS421gg.opm Operation - Functions 21

MAt.zmag

5.2.16 <output> function

LeJ EEDDefines the measured value analog signal output for the measure-ment chanenI selected. If your system contains an analog outputoption (AO 421 or IC 421), you have twelve analog output channelsavailable.

<detect> «TYPE> Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

D M AO-CH AO-MODE MONITOR

ION-CNT AO-CH AO-MODE MONITOR LOG-DEC O-RNG *)

PIAANL PENNING.A-INPUT

----- 00 pâfameÍSTS - ----

*) except for «AO-MODE» and «MONITOR»:

«LOG»

5.2.L7 <trip> function

EED EEDEach measurement channel has two switching functions. The swit-ching function status is shown in the Measure-Display. If a digitaloutput module (DO 420) is installed, the status signal can also beassigned to any bit in that module.

<detect> sTYPE* Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

FARAD. SEMION-CNTEXTERN TYPE LEVEL-A LEVEL-8 DO-A DO-8<mass> «MODE>SAMPLE

FARAD, SEMION-CNTEXTERN

<mase> .MoDE.--- no parameters ----

SCAN N, SCAN-FSTAIR

TYPE LEVEL-A LEVE -B DO-A DO-B

NOTE: The switching functions are activated when the measurement cycle is started(<run> is pressedL They are disabled when the unit is in the »halt« state, and theDO bit is set to »LOW«.

If the unît switches to another detector, the corresponding switching function is setto »OFF«,

22 Operation - Functions aMs421ao.opm

BALZERS

5.2.1.8 <integ> function

Integration of the measured value for the selected channel overtime.

<detect> «TYPE* Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

FARAD, SEMION-CNTEXTERN TRIG SETPT DO-I INTEGRATOR<maas> «MODE.SAMPLE

FARAD, SEMION-CNTEXTERN

<mass> «MODE»SCAN-N, SCAN-FSTAIRPEAK-L, PEAK-F

PIRANT, PENNING,A-INPUT

-·-------- no parameters -------

GMS421gg.opm Operation - Functions 23

BAI.ZERE

5.2.2 <general> function group

Function group for the general control system entries such as confi- generalguration data and intiali2ation plus various auxiliary functions formaintenance and service work,

5.2.2.1 <dildo> function

LleJ LLLIin this function sets those DI/DO bits not defined by measurementchannel parameters.


DIG-IN 1) DIG-OUT 2)


1) DIG-IN Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

NEXT RETURN

2) DIG-OUT Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

BIT SET CLEAR NEXT RETURN

5,2.2.2 < config > function

14co ld

Defines the OMG system and control unit configuration.


SYSTEM ) QMS-HW *) INIT 6) CTRL 6) TEST 7) SIMUL


3) SYSTEM Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

OMA MASS-R DETECT IS-TYP OPTION RETURN

4) QMS-HW Sottkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

RETURN

6) INIT Softkey 1 Softkey 2 Softkey 3 Softkey 4 Sottkey 5 Softkey 6

RESET RETURN

24 Operation - Functions civisA2tgo.opm

BALIERS

6) CTRL Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

MODE es 421 SEM + FIL RETURN

MODE AscuBIN, BAUD SEM+ FIL RETURNMODEM

MODE LAN NODE SEM+FIL RETURN

7) TEST Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

QMS 6) DSP ") CS 421 '°) SERVICE 11 RETURN

second additional parameter level

8) QMS Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

RAM-T EPROM-T PRG-NR RETURN

9) DSP Sottkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

RAM-T EPROM-T PRG-NR RETURN

10) CS 421 Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

RAM-T EPROM-T DISP-T KEY-T PRG-NR RETURN

11) SERVICE Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

MODE MAss OFFSET F.S.+ F.S.- RETUAN

MODE MON- OFFSET F.S.+ F.S.- SELF RETURNRESOL

MODE Ao OFFSET F.S,+ F.S.- SELFICH RETURN

MODE Aoc POS NEG FILTER RETURN

MODE PonTs RS-232 LAN OMU/CLA RETURN

ET NOTE: These service test routines require addîtional hardware and are on y for use by

BALZERS service personnel.

5.2.2.3 < error> functionE¯l

LLLIErrors are described in detail. If several errors occur at the sametime, the error messages are stored and the next error message ap-

pears as soon as the previous message has been acknowledged.


|NEXT CLEAR RETURN


BALZERS

5.2.4 <operation> function group

Keys for operating the unit in measurment mode: operation- Control of the ion source sem hv lon arc le

- Control of the SEM- Control of the mass scan

5.2.4.1 <sem hv> function

The SEM voltages not defined by measurement channel parametersare entered under <sem hv> (SEM voltages defined by measure-ment channel parameters are entered under <detect> «SEM»).They are turned on and off with the <sem> function (see section5.2.4.4).

<eonng>«SYSTEM» Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6aDETECT>

FARAD -------- 00 parameterS ----

SEM, CD-SEM, SEM-VOLTAGEH-SEM. CH-TRON

| | I I

5.2.4.2 <ion arc> function

LLJSelection of the ion source operation parameters; the ion sourcesupply parameters are not defined by measurement channet parame-ters. An entire set of parameters must be selected. The ion sourceis started using the <filam> function (see section 5.2.4.5). Thisallows the ion source parameter sets to be reassigned quickly andeasily.


MODE NORMAL TYPE FILAM FIL1 *) FIL2 *) COPY TO SET

MODE DEGAs FILAM D-EMIS D-PROT D-TIME CTRL

*) The individual parameters in the ion source setfor the active filament are displayed under the<ion source> function group.

LleJControl of the ion source supply integrated in the QME 126 quadru-pole electronics.


MODE NORMAL FILAM EMFCUR

MODE DEGAs FILAM EMFCUR D-TIME CTRL

28 Operation - Functions QMS421gg.opm

ISALIERS

5.2.4.3 < cycle> function

L±°°.J L.mJDefines the measurment sequence and the measurement cycle ope-ration.

<detect> •TYPE* Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6

all FUNCTCYCLE MODE MONo CYCLES TRIG

MODE MULTI CYCLES TRIG BEGIN END

FUNCTAcausT MODE MONo ADJ-TYP THRESH *) RANGE **) MASS *)

MODE MutTI ADJ-TYPFAAAD, SEM FUNCTSETTL CYCLES P-CAL **)ION-CNT, EXTERN FUNCTI-voND DWELL *) CLEAR

*) these parameters are also contained under <mass>**) these parameters are also contained under <amplif>

5.2.4.4 <som> function

Tums the SEM high voltage on and off, Limitations (also see section 5.2.5)I

soo1

LED <sem>:- except for <config> «SYSTEM» «DETECT» : «FARAD»

- Lights when the high voltage is on - except for <config> «CTRL» «SEM+ FIL> :«EXTERN»

- Flashes when the high voltage is off and and the - only for <config> «CTRL» «OMS-HW» : HV 420 or HV 421'EXT-PROT' signal is being relayed via the configured<ctrl> connector.

- except for <config> «SYSTEM» «DETECT» : «FARAD»- e×cept for <config> «CTRL» «SEM+ FIL» :

«EXTERN»

A warning message is output.

5.2.4.5 <filam> function

Turns the filament supply on and off (emission Limitations (see section 5.2.5)on / off).. 44, |

CAUTION: Before tuming on the degas - except for <config> «CTRL» «SEM+ FIL» :«EXTERN»

functîon the first time, and af- - only for <config> «CTRL» «QMS-HW»: IS 420 is coniigurated

ter replacing the filament, op-timize the emission current li-mit value according to section - only for <config> «CTRL» «SEM+FIL» : «EXTERN»5.1.4

A warning message is output.

LED <filam>:- Lights when the emission current is on- Flashes when the emission is off and the

'EXT-PROT' signal is being relayed via the<ctrl> connector.

- Flashes when the unit 'EXT-PROT' signal is

being relayed via the <ctrl> connector and theprotection circuit has responded.


BAL"LERS

6.2.4.6 <run/halt> function

Starts / aborts the function (cycle, adjust, setti, Limitations (also see section 5.2.5)l-UGND) defined under <cycle>.

LED <mono>:- only for <cycle> «TRIG» : alNTERN» or «EXT-SNGL»

- Lights when a measurement cycle has beenstarted (cycle, adjust, settling, background - only for <cycle> «TRIG»

:«INTERN» or «EXT-SNGL»

measurement) A waming message is output.- Flashes between the time the <run/halt> key

was pressed (to prepare the control to acceptthe incoming signal) and the time the cycle istriggered by the 'RUN-IN' signal at the <ctrl>connector.

LED <multi>:- Lights when a measurement cycle has been

started (cycle, adjust)- Flashes when the cycle was triggered by an er

temal control and when the measurement cyclestart has been prepared (waits for the 'RUN-IN'signal at the <ctrl> connector).

LED <halt>:- Lights when the measurement cycle has been

stopped.- Flashes when the cycle was triggered by an ex-

ternal control and the measurement cycle wasstopped.

30 Operation - Functions QMS421pg.opm

BAL2ERS

5.2.5 Parameters

The following contains details on the functions outlinedin section 5.2.1 ff. The following parameters are listedalphabetically, and not according to their functiongroups. Please refer to section 6 for basic information onthe correct use of these parameters and on the advanta-ges and disadvantages of certain settings.

The parameters in this section are explained systemati-cally as follows.

Structure:

Name of parameter Any limitations or indication ofadditional parameter level(s)

IFunction to Purpose of the parameter describedwhich it belongs

«ADJ-TYPn <cycle> function only for <cycle> «FUNCT» : «ADJUST»

Type of peak adjustment in SAMPLE measurement

Parameter set Explanations

Possible para. COARSE Faster and less precise scan. A search is made within the search rangemeter values for the mass number (M) entered under «MASS».

FINE Fine search for the peak, based on the mass number (M) entered under«MASS», within a reduced search range. Higher precision than underCOARSE.

Explanation of the parameter

îf the parameter must be subdivided farther, it will have one or moreadditional parameter levels, Parameters on these additional levelswill be presented as follows:

Name of theadditional parameter Purpose of the additional parameter

«RESET» This parameter allows the default parameter set (factory values) to be copied into the OMGsystem configuration data (ion source set and measurement channel parameters) entered under<config> «SYSTEM».


Possible para- FACTORY Copy default parameter setmeter values

SURE 7 Confirm copy function

Explanation of the parameter

QMS gg.opm Operation - ParameterS 31

BALZERG

«ADJ-TYPn <cycle> function - only for <cycle> «FUNCT» :«ADJUST»

Defines the type of peak maximum adjustment for SAMPLE measurements.


COARSE Faster and less precise scan. A search îs made within the search rangefor the mass number (M) entered under «MASS».

FINE Fine search for the peak, based on the mass number (M) entered under«MASS», within a reduced search range. Higher precision than underCOARSE,

Refer to section 6.2 for further information on this topic,

«Al-CH» <detect> function - only for <detect> «TYPE» :«A-INPUT»

Defines the channel on which the signal should be available.

Parameter values Explanations

O ... 15 Analog input channel at which the signal should be available,

«AMPn <amplif> function - only for <detect> «TYPE» : «FARAD» and «SEM»and <detect> «LOCK-IN» :

«ON»

«AMPt»«AMP2» Defînes the post amplificatîon gain factor for the chopper lock-in measurement signal«AMP3» (see section 6.7.2).

Parameter values Explanations×1 ×10 Post amplification gain factor for the chopper lock-in measurement

signal.

lŒ NOTE: An arrow after the parameter name (e.g. «AMP2t») indicates an overrange situa-tion, If this occurs, you must reduce the gain factor until the arrow disappears,

«RANGE» Defines the measurement range


E-10 ... E-6 Measurement range

IŒ NOTE: An arrow after the parameter name (e.g. «RANGE†») indicates an overrange sl-tuation. If this occurs, you must increase the measurement range until the arrowdisappears.

«RETURN» Return to <amplif> function,

«AMP1» <amplif> function refer to «AMP»«AMP2» <amplif> function refer to «AMP»«AMP3» <amplif> function refer to «AMP»

32 Operation - Parameters OMs421ag.opm

BALZERS

«AO-CHn <output> function except for <detect> «TYPE» : «PIRANi», «PENNING» and «A-INPUT»

Either the Analog Output option (AO 421) or the lon Counter option (IC 421) is required for thisparameter. These options allow the measured value for the selected channel to be assigned to oneof the twelve analog outputs.


NONE The signal at the selected channel is not assigned to an analog output.1 ... 12 The signal at the selected channel is assigned to the analog output.

NOTE: When the mass scan is stopped (»halt«L all the analog outputs not containingmeasured data are reset to O V,

«AO-MODEn <output> function , except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Defines the presentation form for the analog signal at the < AO> > connector on the optionalAO 42 I analog output board or the optional IC 421 ion counter board (compare the «MONITOR»parameter).

Electrometer operation <detect> «TYPE» : «FARAD», «SEM» orExtem input <detect> «TYPE» :

«EXTERN»

Parameter set E×planationsLlN The output for the measured values coming under the measurement

range defined under «RANGE» will be linear.

LOG 3D (only for <amplif> «MODE»: «FIX»)

The measured value output will be logarithmic across three decades at3 ½ V per decade.

LOG TOD (only for <amplif> «MODE» : «AUTO»)The measured value output will be logarithmic across ten decades at 1 V

per decade.

Ion counting operation <detect> «TYPE» :«ION-CNT»


LIN The output for the measured values within the measurement range defi-ned under «RANGE» will be linear.

LOG The measured value output will be logarithmic in either three or ten de-cades as a function of the «LOG-DEC» parameter setting (refer to«LOG-DEC» parameter).

«AVERAGE» <mass> function - only for <mass> «MODE»:

«SAMPLE»- except for <detect> «TYPE»

: «PIRANI», «PENNING» and «A-INPUT»

This parameter allows a rnoving average function to be taken across several measurement cycles.When this function is active, a measured value is output by the first cycle, and with continuingcycles the value becomes more and more precise. When the number of measurement cycles rea-ches the «AVERAGE» value, all the other moving averaging functions use this now fixed averagingfactor («AVERAGE»),


1 No averaging across the measurement cycles2 16 128 1024 Number of measurement cycles across which the average is taken4 32 2568 64 512

«BAUD» <config> function refer to <<CTRL»

GMS421gg.opm Operation - Parameters 33

EIAL2'ERS

«BEGINn <cycle> functîon only for <cycle> «FUNCT» : «CYCLE» and <cycle> «MODE» : «MULTl»

Defines the first measurement channel used in the cycle in multichannet operation. In single-chan-net operation this defines the selected channel.


O ... 63 First measurement channel in a measurement cycle

«BlT» <dildo> function refer to «DIG-OUT»

«CALIBn <amplif> function · e×cept for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Assigns a calibration factor to the measured value.

In electrometer operation, only the mantissa value is used as the gain factor in »SCAN« and»PEAK« operation. It functions as a complete floating point factor for all other types of operation.


± (1.00 E-10 ... Calibration factor for a measured value.... 9.99 E + 10)

«CATH» <v1,..v6> function · except for <ion src> «TYPE» : «SPEC+ » and «SPEC-»

lon source voltage (identical to «V2») refer to «V2»

aCLEARn <cycle> function only for <detect> «TYPE»: «FARAD», «SEM», «ION-CNT»

and «EXTERN»only for <cycle> «FUNCT»

:«t-UGND»

Cancels the background value measured for the integrator,

«CLEAR» <di/do> function refer to «DIG-OUT»

«CLEAR» <error> function

Cancels all error messages,

«COPY TO CHu <aux> function

Auxiliary parmeter for copying the parameter set for the selected measurement channel into one ofthe other 63 channels.


O ... 63 Copy the parameter set into a specific channel.SURE 7 Confirm the copy command

34 Operation - Parameters oms421ag.opm

BAL2EFiß

«COPY TO ALLu <aux> function

Auxiliary parameter for copying the parameter set for the selected measurement channel into allthe channels given under <cycle> between «BEGIN» and «END».


SURE 7 Confirm copy command

«COPY TO SET» <ion src> function only for <ion src> «MODE» : «NORMAL»

Command for copying the ion source parameter set for the active ion source defined under<ion arc> «FlL1» or <ion arc> «FIL2» into a selected set.


SET 0 ... SET 3 The active ion source parameter set is copied into a selected set,

«CP-LEV» <amplif> function - only for <detect> «TYPE»:

«lON-CNT»

Definition of the response threshold for the ion counting preamplifier (CP 400) to suppress noise.


0.00 ... 1.00 V Noise suppression in the CP 400

«CS 421» <config> function refer to «TEST»

«CTRLn <config> function

«BAUD» only for <config> «CTRL» «MODE» : «ASCII», «BIN» and «MODEM»

Definition of the data transmission rate for the RS-232-C interface,


300 Bit/s Transmission rate1200 Bît/s2400 Bit/s4800 Bit/s9600 Bit/s

19200 Bit/s

NOTE: When a console is configured, it is always also possible to adjust the Baud ratefrom the console.

«MODE» The system can be controlled via a variety of interfaces, whereby only one interface has accesspermîssion at any one time. However, as all have equal status, each can switch the input controlto itself, thereby interrupting the others.


CS 421 Operation from the front panel console

ASCII Operation via the serial interface (RS-232-C) in ASCII format

BIN Operation via the serial interface (RS-232-C) in binary formatMODEM Operation via the serial interface (RS-232-C) and modem in binary format

(only for systems wíth front panel console)

LAN Operatîon via the field bus interface

OMS421gg.opm Operation - Parameters 35

mAkzans

«NODE» - only for <config> «CTRL» «MODE»:

«LAN»

Node address in network operation (token bus) in the LAN interface.


still open

«RETURN» Return to <config> function,

«SEM+ FIL» The filament and SEM supply can be controlled in several different ways.


INTERN Control from the console (CS 421) or vía an interface.

EXTERN Control by the 'EXT-PROT' signal at the <ctrl> connector. When thecontact is open (»HIGH«), the filament and the SEM high voltage are off,

when the contact is closed (»LOW«l they are on.

This setting has no signficance for <config> «SYSTEM» «OPTION» :

«OMU 112».

EXT-PROT The 'EXT-PROT' signal via the <ctrl> connector can only tum the fila-ment and SEM high voltage off, A closed contact is necessary for this(»LOW«). It can be tomed on from the console (CS 421) or via an inter-face (only possible with 'EXT-PROT' »HIGH«LThe 'EXT-PROT' signal has a common effect on all the measuring unitsconnected when <config> «SYSTEM» «OPTION»

:«QMU 112».

aCTRLo <ion src> function · only for <ion arc> «MODE» :«DEGAS»

Tum on / off Degas.

CAUTION: Optimize the emission current limit value according to section 6.7.5 the firsttime you turn on Degas and each time the filament is replaced.

Parameter set ExplanationsSTOP Tum off DegasSTART Tum on DegasSURE 7 Confirm that degas should be turned on

RUN Degas is on

«CYCLESn <cycle> function - only for <cycle> «FUNCT» : «CYCLE» and «SETTL»

Defines the number of cycles to be carried out.


REPEAT The cycles run through continuously1 ... 10000 Number of cycles to be carried out

«D-EMISn <ion arc> function - only for <ion src> «MODE»;

«DEGAS»

Defines the emission current in Degas operation.

Parameter values Explanations0.0 ... 20.0 mA Emission current in Degas operation

36 Operation - Parameters OMS421gg.opm

BAt.zmRs

LeJ«D-PROTu <ion src> function only for <ion src> «MODE» : «DEGAS»

Defines the ma×imum filament current in Degas operation.


0.00 ... 5.00 A Maximum filament current for Degas

«D-TIMEn <ion src> function only for <ion arc> «MODE»:

«DEGAS»

Defines the required degas time


MANUAL The degas process continues until a manual stop command is issued.

1 ... 39 min Total duration of the degas process. The degas process time is (exceptfor <config> «SYSTEM» «OPTION» : «QMU») constantly decrementedon the console display (CS 421).

«DEF-in <v1...v6> function except for <ion arc> «TYPE» : «SPEC+ » and «SPEC-»


«DETECT» <config> function refer to «SYSTEM»

«DIG-IN» <di/do> function

Overview of the statuses of the digital input bits (DI 420). This parameter is not defined in a

measurement channel.

«NEXT» Continue to the next 32 digital input bits.

«RETURN» Retum to the <dildo> functíon,

«DIG-OUTn <di/do> function

Overview of the statuses while allowing the digital output bits to be manipulated (DO 420). Thisparameter is not defined in a measurement channel.

«BIT» Selection of the digital output bit to be manipulated. The parameter name flashes until the additio-nal parameter level is exited wíth «RETURN».

«CLEAR» Cancels the selected digital output bits.

«NEXT» Continue to the next 32 digital output bits.

«RETURN» Return to the <dildo> function.

«SET» Set the selected digital output bits.

«DISP-Tu <config> function Refer to «TEST» «CS 421»

aMssalog.opm Operation - Parameters 37

BALIERS

«DO-An <trip> function only for <detect> «TYPE» : «FARAD», «SEM», «ION-CNT» and«EXTERN»

- only for <mass> «MODE» :«SAMPLE»

«DO-Bu <trip> function - only for <detect> «TYPE» : «FARAD», «SEM», «lON-CNT» and«EXTERN»

- only for <mass> «MODE»:

«SAMPLE»

The status of measurement channel switching function A and B can be assigned to any digital out-put module (DO 420) bit, if two or more switching functions are assigned to the same bit, they areconnected in an »AND« gate (refer to section 6.7,4). If no switching function is assigned to a par-ticular bit, the status is high ohmic (open).


OFF No assignment to a digital output bit.O ... 95 Assignment of the measurement channel switching function to a particu-

Iar digital output bit (DO 420).

«DO-I» <integ> function - only for <detect> «TYPE» : «FARAD», «SEM», «t0N-CNT» and«EXTERN»

only for <mass> «MODE» : «SAMPLE»

The status of the integrator switching function can be assigned to a digital output module(DO 420) bit. If two or more switching functions are assigned to the same bit, they are connectedin an »AND« gate. If no switching function is assigned to a particular bit, the status is high ohmic(open).


OFF No assignment to a digital output bit.O ... 95 Assignment of the measurement channel switching function to a particu-

1ar digital output bit (DO 420).

«DSPn Function <config> Refer to «TEST»

38 Operation - Parameters GIVIS421gg.opm

ESALZERS

«DWELLn <cycle> function - only for <cycle> «FUNCT» : «l-UGND»and for the limitations described under the <mass> function

<mass> function - only for <mass> «MODE» : «SAMPLE»except for <detect> «TYPE» : «PIRANi», «PENNING» and «A-INPUT»

Time for measuring at the individual mass defined by «MASS»,

Electrometer operation <detect> «TYPE»: «FARAD», «SEM» or

Extem input <detect> «TYPE» : «EXTERN»

Parameter values Explanations0.5 ms 0.2 s Measurement times for <detect> «LOCK-IN» : «ON»

1 ms 0.5 s An average is taken during the «DWELL» time2ms 1s5ms 2s

10ms 5s20 ms 10 s

50 ms 20 s

0,1 s 60 s

Electrometer operation <detect> «TYPE» : «FARAD», «SEM» orExtem Input <detect> «TYPE»

:«EXTERN»


0.1 s ... 60 s Measurement times for <detect> «LOCK-IN» : «ON»An average is taken during the «DWELL» time

lon counting operation <detect> «TYPE» : «ION-CNT»


1 ms .- 60 s Measurement times

LEJ«E-PROTu <emiss> function except for <config> «SYSTEM» «OMA» : «125-x»

Defines the permissible limit values for the filament.


0.00 ... 5,00 A Maximum filament current during emission.

OMS og.opm Operation - Parameters 39

BAL2'ERS

L.sti«EMl-CURn <ion src> function

Defines whether or not to display the emission current both in standard operation and in Degas.


OFF Emission current display off

ON Emission current display on

<ion src> «MODE»:

«NORMAL»E111 0.004 uA

SETUP 10M-5RC ** **MODE FILAM EMI-CUR

NORMAL 1 ON

<ion src> «MODE» : «DEGAS»ENI 0.84 mfl EMMMMUL-....-.. ..

SETUP ION-5RC +>1< **MODE FILAM EMI-CUR D-TIME CTRL

DEGRS 1 ON 15 min RUH

NOTE: The measurement cycle must be stopped intentionally (halt«L When the cycle is

stopped, the electrometer measured value is lost because the unit is then swit-ched to the emission current measurement.

LioJ«EMISSn <emiss> function

Defines the suitable emission current.


OFF Emission turned off0.01 ... 2.00 mA Emission current

«END» <cycle> function only for <cycle> «FUNCT» : «CYCLE» and <cycle> «MODE»:

«MULTI»

Defines the last measurement channel to be included in multi-channel operation. This parameterdoes not apply to single<:hannel operation.


0 ... 63 Last measurement channel in a cycle

ILT NOTE: If the last measurement channel defined is the same as the first channel defined,the operation is considered single-channel.

If the number of the last measurement channel is lower than that of the firstmeasurement channel, the measurement cycle 'rolls over' («START» ... 62, 63,0, 1 ... «END») into a new cycle,

«EPROM-T» <config> function refer to «TEST» «CS 421», «TEST» «DSP» and «TEST» «OMS»

«EXTRACTn <v1...v6> function - only for <ion src> «TYPE» : «CB»

lon source voltage (identical to «VS») refer to «V5»

40 Operation - Parameters QMS42tgg.opm

EIAL2ERS

uF-AXISn <v1...v6> function except for <ion arc> «TYPE» : «SPEC+» and «SPEC-»


LæJ«FILin <ion src> function only for <ion src> «MODE» : «NORMAL»

except for <ion src> «FILAM» : «2»«FIL2» <ion arc> function only for <ion src> «MODE» : «NORMAL»

except for <ion src> «FILAM» : «1»

Assigns an ion source set to the first or second filament. Chosen from the four ion source parame-ter sets.


SET 0 ... SET 3 The selected ion source parameter set is assigned to filament 1.SET 0 ... SET 3 The selected ion source parameter set is assigned to filament 2.

LLJ«FILAMu <ion arc> function except for <config> «SYSTEM» «IS-TYP»

:«AXIAL»

Defines the filament to be used when the configured ion source has two filaments.


1 Filament 1 is selected. No switchover will be made if it fails.2 Filament 2 is selected. No switchover will be made if it falls.1 + 2 Filament 1 is selected while filament 2 is being preheated, if filament 1

fails, a switchover is made to filament 2.

NOTE: There is a short break in the emission during the switchover from filament 1 tofilament 2.

«FILAMn <ion src> function except for <config> «SYSTEM» «lS-TYP» : «AXIAL»

When the ion source has two filaments, and the <filament select> switch on the GME 125 is setto <remote>, this parameter defines which filament is to be used (also refer to the operating in-structions [1 2]L

Parameter values E lanations1 Filament 1 is selected. In standard operation (in contrast to »Degas«), no

switchover is made to filament 2 if filament 1 fails.2 Filament 2 is selected. No switchover is made if it should fail.

NOTE: Allways use filament 1 first. If the second filament is defective, it will not bepossible to degas filament L

NOTE: When the QMU 112 multiplexer is being used, any change in the setting affectsall the measuring units.

OMS4210g.opm Operation - Parameters 41

BALZERS

«FILTER» <amplif> function only for <detect> «TYPE»: «FARAD», «SEM» and <EXTERN»

Defines the filter constant. You can select the default filter constant for the unit or enter your ownfilter constant, depending on the speed and accuracy requirements of the particular measurement.Select a filter value corresponding to the selected measurement speed.

Rule of thumb: Filter value - 0.03 x speed of measurement

For <mass> «MODE»: «SAMPLE» (MID mode), a fast filter setting can result in shorter transient

times, allowing the break time to be shortened. The averaging function during the DWELL time ne-vertheless provides good noise suppression.


AUTO The analog filter is set automatically to a value suited for the selected«SPEED» or «DWELL». The fonowing interrelationships apply:

Filter time «SPEED» «DWELL»constant

18 µs 0.5 mslu 1 malu 0.5 ms 1 ms85 µs 2 mslu 5 mslu 2 ms 5 ms

400 µs 10 mslu 20 mslu 10 ms 20 ms1.7 ms 50 mslo 0.1 s/u 50 ms 0.1 s

8 ms 0.2 s/u 0.5 s/u 0.2 s 0.5 s

40 ms 1 s/u 2 s/u 1 s 2 s

180 ms 5 s/u 10 s/u 5 s 10 s

800 ms 20 s/u 60 s/u 20 s 60 s

18 µs ... 800 ms Manual adjustment of the analog filter.

BŸ NOTE: When the measurement range switchover is on «AUTO» or «AUTO-D», only the«AUTO» setting is possible.

ILY NOTE: When the parameter is set to «AUTO», the minimum filter time constant is a

function of the measurement ranges defined by «RANGE»:

«RANGE» Min. filter time constant

>10 11 18 µs

10-11 8 ms

10-12 40 ms

ELŸ NOTE: Superposed interference of > approx. 10.24 V are limited, which results in in-accurate averaging. In critical situations the electrometer signal must be analyzedusing an oscilloscope and then optimized.

«FILTERu <config> function refer to «TEST» «SERVICE»

42 Operation - Parameters OMs421ag op

EIAL2:Efts

«FIRSTn <mass> function except for <mass> «MODE» :«SAMPLE»

except for <detect> «TYPE»: «PIRANI», «PENNING» and «A-INPUT»

Defines the mass number at which the scan should begin.


0.00 .., max. 2047.99 Mass number, The range from which it can be selected depends on thesystem configuration (<config> «SYSTEM» «MASS-R»)

RŸ NOTE: The mass number is shown as a decimal number, but intemally the system defi-nes it in steps of 1/64. For scans faster than 10 malu, the resolution is reduced asfollowst:

«SPEED» Measurement range to 1024 Measurement range 2048

à 10 mslu 17,4

5 mslu 1

2 mslu1 mslu

1

e1/16

0.5 mslu

«FOCUS» <v1...v6> function only for <ion src> «TYPE» :«AXIAL» and «CB»


«F.S.+ n <config> function refer to «TEST» «SERVICE»«F.S.-n <config> function refer to «TEST» «SERVICE»

«FUNCTn <cycle> function

Defines the operating mode.


CYCLE Measurement operation

AOJUST Peak adjustrnent for SAMPLE measurements (refer to section 6.2)

SETTL Transient behavior when the measurement channel is changed (comparesection 6.8.3.1). This parameter value can only be defined for <detect>«TYPE» : «FARAD», «SEM», «ION-CNT» and «EXTERN»

I-UGND Background measurement for the integrator. This parameter can only bedefined for <detect> «TYPE» : «FARAD», «SEM», «lON-CNT» end«EXTERN»

IET NOTE: This parameter can only be changed when the system is in the »halt« state,

«GAIN» <amplif function> - only for <detect> «TYPE» :«EXTERN»

Defines the gain factor


×1 ×10 Positive post amplification factor for extemal voltages

x -1 ×-10 Negative post amplification factor for extemal voltages

GMS421gg.opm Operation - ParametefS 43

BAL2'EREi

«IN1Tu <config> function

«RESET» This parameter allows the default parameter set (factory values) to be copied into the QMGsystem configuration data (ion source set and measurement channet parameters) entered under<config> «SYSTEM».


FACTORY Copy default parameter setSURE 7 Confirm copy function

«RETURN» Return to the <config> function.

«dNTEGRATORn <integ> function only for <detect> «TYPE» : «FARAD», «SEM», «ION-CNT»and «EXTERN»

only for <mass> «MODE»:

«SAMPLE»

Defines the preparation for and start or stop of the integration process.


START The effect this parameter has is a function of the «TRIG» parameter,INTERN: The integration process is started either from the console or

via an interface.EXTERN: No function; the start is triggered by the 'INT-START' sîgnal

relayed via the <ctrl> connector.STOP The integration process is stopped

CAUTION: Stopping the integration process has an effect on the DO bit assigned to the in-tegrator switching function.

«lONREFn <vl...v6> function - except for <ion src> «TYPE» : «SPEC+» and «SPEC-»

lon source voltage (identical to «Vl ») refer to «Vl »

«IS-TYP» <config> function refer to «SYSTEM»

«KEY-Tu <config> function refer to «TEST» «CS 421»

44 Operation - Parameters QMs421gg.opm

BALZERS

«LEVEL-An <trip> function only for <detect> «TYPE»; «FARAD», «SEM», «ION-CNT»

and «EXTERN»only for <mass> «MODE» : «SAMPLE»

«LEVEL-Bn <trip> function only for <detect> «TYPE» : «FARAD», «SEM», «lON-CNT»and «EXTERN»


«SAMPLE»

Defines the threshold values for the switching functions for the selected measurement channel(compare to the <trip> «TYPE» parameter.

All values within the detector's range of measurement. Threshold values can be entered both fromthe number pad keys and from the B

,and keys. In the latter possibility, the

and i keys affect the mantissa, and the and B keys the exponent.


1.00E-24 ... Threshold value for switching function A (for <trip> «TYPE» : «ABS») or9.99E+ 24 the lower threshold value for the swtiching function (for <trip> «TYPE»

: «HYST»)1.00E-24 ... Threshold value for switching functîon B (for <trip> «TYPE» : «ABS») or

9.99E+ 24 the lower threshold value for the swtiching function (for <trip> «TYPE»: «HYST»)

N' NOTE: Any required hysteresis can be chosen for the «HYST» switching function as longas it is not negative and not less than 10% of the lower threshold value. If this is

not the case, this minimum hysteresis will be set automatically.

«LOCK-IN» <detect> function · only for <config> «SYSTEM» «OPTION» :«CLA»

only for <detect> «TYPE»:

«FARAD» or «SEM»

Turns the CLA 400 chopper lock in amplifier on and off. When this amplifier is off, the unit is inelectrometer operation.

«LOG-DECn <output> function only for <detect> «TYPE» : «lON-CNT»

Defines the logarithmic presentation of the analog output voltage.

Parameter values E×planatíons

3 DEC Logarithmic output across three decades referenced to the measurementrange defined under «RANGE».

10 DEC Logarithmic output across ten decades at 1 V per decade.

ET NOTE: In <mass> «MODE» :«SCAN-x» or «PEAK-x», it is not possible to generate a

logarithmic presentation across ten decades at a scan speed of 20 mslu. The unitswitches to a three-decade presentation with a measurement range of E+ 7

automatically,

«MASS-Rn <config> function refer to «SYSTEM»

oMsongo.wm Operation - Parameters 45

EIALIEFt¾

uMASS» <cycle> function only for <cycle> «FUNCT» :«ADJUST»

and <cycle> «MODE»:

«MONO»except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

<mass> function only for <mass> «MODE»:

«SAMPLE»except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Individual measurements at the selected mass number. In electrometer opeation an average is ta-ken during the time defined under «DWELL».

In contrast to the other operating modes, in electrometer operation a higher measured value reso-lution (24-bit mantissa) is used to calculate the measured value.


0.00 . . max. 2047.99 Mass number. The range from which it can be chosen is defined by thesystem configuration (<config> «SYSTEM» «MASS-R»)

NOTE: The mass number is shown as a decimal number, but iriternally the system defi-

nes it in steps of 1/64. For scans faster than 10 mslu, the resolution is reduced asfollows:

«SPEED» Measurement range to 1024 Measurement range 2048

à 10 mslu 1 ys4 1 2,

5 malu1 ja, i 2,

2 mslu1 mslu 17,

g1;g

0.5 msluAt this speed it is no longer possible to run an adjust.

«MODEn <amplif> function only for <detect> «TYPE» : «FARAD» and «SEM»and <detect> «LOCK4N»

;«OFF»

Defines the type of measurement channel switchover, but the choice is limited in <mass>«MODE» scan mode.


AUTO Automatic measurement range switchover across the entire measure-ment range. This setting can only be made in <mass> «MODE» :

«SAMPLE».AUTO-D Automatic measurement range switchover with limited measurement

range. The value entered under «RANGE-L» defines the lower limit of thisrange. This setting can only be made in <mass> «MODE» : «SAMPLE».

FIX No measurement range switchover. The measurement range covers thepossible resolution (3 decades). This setting is possible in all scanmodes.

«MODE» <config> function refer to «CTRL»

eMODEn <config> function refer to «TEST» «SERVICE»

46 Operation - ParameterS QMS421gg opm

WALZERS

«MODE» <cycle> function - except for <cycle> «FUNCT» : «SETTL» and «I-UGND»

Selection of the type of measurement cycle operation.


MONO CYCLE: In single-channel operation the measurement cycle consists ofthe selected channel. When the measurement cycle is running(»run«), the measurement channel is run through in the definedoperating mode.

ADJUST: The peak adjust is limited to the selected measurement chan-neh When the adjust is running (»run«), the measurementchannel is run through in the defined operating mode.

MULTI CYCLE: in multichannel operation the measurement cycle consists ofall measurement channels between «BEGIN» and «END» withthe exception of any that are set to »SKIP« under <aux>«STATE»,

ADJUST: in multichannel operation a peak adjust is carried out for all thechannels between «BEGIN» and «END» with the exception ofany that are set to »SKIP« under <aux> «STATE».

«MODE» <ion src> function

Selection of the type of ion source operation.


NORMAL Normal operation (Emission) according to the parameters defined in theion source set.

DEGAS Degas operation. The required parameters are entered directly,

«MODEu <mass> function except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Defines the type of mass scan operation


SCAN-N Standard mass spectrum measurement across the measurement rangedefined by «FIRST» and «WIDTH» at the speed defined under «SPEED».

SCANJ¯ Mass spectrum with FIR filter across the range defined by «FIRST» and«WIDTH» at the speed defined under «SPEED».

STAfA Mass spectrum integer to integer mass number with averaging througoutthe measurement time. «FIRST» defines the start of the scan and«WIDTH» is limited to 16 masses. The measurement speed parameter«SPEED» corresponds to the dwell times for the individual masses.

SAMPLE Indívidual measurements of the masses defined under «MASS». An aver-aging function runs during the time defined by «DWELL».

PEAK-L Mass spectrum with peak search (level criterion) across themeasurement range defined by «FIRST» and «WIDTH», To reduce theamount of data, only the intensities for the peaks found are giventogether with their mass numbers.

PEAK-F Mass spectrum with peak search (FIR filter criterion) across the measu-rement range defined by «FIRST» and «WIDTH», To reduce the amountof data, only the intensities for the peaks found are given together withtheir mass numbers.

& NOTE: In »STAIRa operation the first mass must be a full mass number (peak).

QMS421eg.opm Operation - Parameters 47

BALZEFIS

«MONITORn <output> function - except for <detect> «TYPE» : «PIRAN1», «PENNING» and «A-INPUT»

The measurement signals from the selected channel processed in the signal processor are alwaysavailable at the <mon> output on the quadrupole controller (OC 421). This parameter defines howto present this data.


refer to the«AO-MODE»parameter

«NEG» <config> function refer to «TEST» «SERVICE»

«NEXT» <di/do> function refer to «DIG-IN» and «DIG-OUT»

«NEXT» <error> function.

Scroll to the next error description if one is present,

«OFFSETn <amplif> function only for <detect> «TYPE»: «FARAD», «SEM»

and <detect> «LOCK-lN» : «ON»as well as for <detect> «TYPE» : «EXTERN»

Small offset deviations in the electrometer amplifier signal can be compensated. «OFFSET» doesnot affect the <elm> output in the (OC 421) quadrupole controller.

For an offset adjustment, first set «OFFSET» to O and then correctly align the electrometer pre-amplifier (EP 112) from the offset potentiometer (see section 5.1.3).

Parameter values Explanations-1.99 ... + 1,99 %F.S. Electrometer amplifier signal offset correction referenced to «RANGE».

«OFFSET» <config> function refer to «TEST» «SERVICE»

«OPTION» <config> function refer ta «SYSTEM»

«O-RNG» <output> function only for <detect> «TYPE» : «lON-CNT»except for <output> «AO-MODE» and «MONITOR»

:«LOG»

Defines the display range for ion counting operation.


E-1 ... E + 8 Display range for analog output

48 Operation Parameters OMs421gg.opm

BALZERS

«PAUSE» <amplif> function · except for <detect> «TYPE»; «PIRANI», «PENNING» and «A-INPUT»

«P-CAL» Due to the transient behavior of the measurement system in multichannel operation, the systemrequires a delay I break to switch channels before beginning a new measurement job. This time iscalculated intemally and can be influenced by the calibration factor «P-CAL» to optimize themeasurement speed (see section 6.8.3.1).If it is possible to calculate the effective break time in advance (measurement range switchovernot on »AUTO« or »AUTO-D« ), this time wi!I be displayed. Otherwise «AUTO» is output. Howe-ver, the break time calibration factor continues to be present and active.


0,0 ... 9.9 Break time calibration factor

«RETURN» Return to <amplif> function,

«P-CAL» <amplif> function refer to «PAUSE»

UP-CAL» <cycle> function only for <cycle> «FUNCT» : «SETTL»and for the limitations according to the <amplif> function

Due to the transient behavior of the measurement system in multichannel operation, the systemrequires a delay / break to switch channels before beginning a new measurement job. This time iscalcuîated internally and can be influenced by the calibration factor «P-CAL» to optimize themeasurement speed (see section 6.8.3.1).If it is possible to calculate the effective break time in advance (measurement range switchovernot on »AUTO« or »AUTO-D«), this time will be displayed.


0,0 ... 9.9 Break time calibration factor

«PE-CTHLu <detect> function only for <detect> «TYPE» : «PENNING»

Turns the cold cathode measurement circuit for total pressure measurement on / off.


OFF Cold cathode measurement circuit is offON Cold cathode measurement circuit is on

«PHASEn <detect> function - only for <config> «SYSTEM» «OPTION» : «CLA»- only for <detect> «TYPE»

:«FARAD» or «SEM»

Defines the phase position (O° or 180°) for the chopper lock-in amplifíer (CLA 400) sign digital re-versal.

«POS» <config> function refer to «TEST» «SERVICE»

«PRG-NRn <config> function refer to «TEST» «CS 421», «TEST» «DSP» and «TEST» «QMS.

«OMA» <config> function refer to «SYSTEM»

«OMS» <config> function refer to «TEST»

OMS421gg.opm Ûperation - Ÿ8famOterS 49

BALZEilS

«QMS-HWu <config> function

The system checks its own configuration and displays it when the check is finished.

«RETURN» Retum to <config> function.

LELJ«QMU-CH» <detect> function only for <config> «SYSTEM» «OPTION» : «QMU»

- only for <detect> «TYPE» : «FARAD» or «SEM»

When a quadrupole multiplexer is being used (OMU 112L this defines the multiplexer channel.


O ... 7 Defines the multiplexer channel on which the functions in the<channels> and <operation> function groups have an effect.

«OMU/CLA» <config> function refer to «TEST» «SERVICE»

«RAM-Tu <config> function refer to «TEST» «CS421», «TEST» «DSP» and «TEST» «QMS»

«FtANGEn <amplif> function only for <detect> «TYPE» : «FARAD» or «SEM»,for <detect> «LOCK-IN» : «OFF» and <amplif> «MODE» : «FIX»or for <detect> «LOCK-IN» : «ON» under «AMP»

<cycle> function only for <cycle> «FUNCT»:

«ADJUST»and <cycle> «MODE» : «MONO»and for the limitations according to the <amplif> function

Defines the measurement channel for electrometer operation.


E-12 ... E-5 Measurement range for <detect> «LOCK-IN» : «OFF»

E-10 ... E-5 Measurement range for <detect> «LOCK-IN» : «ON»

«RANGE-La <amplif> function only for <detect> «TYPE» :«FARAD» or «SEM»

and <detect> «LOCK-IN» : «OFF»only for <amplif> «MODE» : «AUTO-D»

Defines the tower search range limit for automatic measurement range switchover.


E-12 ... E-5 Measurement range limit

«RESETu <config> function refer to «lNIT»

50 Operation - Parameters QMS421pg.opm

BAL2'ERS

Letl«RESOLu <mass> function except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Adjustment of the mass separation capacity (resolution).

Determine the optimal resolution for your measurement under «SCAN-N» by tracing the peakshape with an oscilloscope or strip chart recorder (refer to section 6.3,4). In many cases you canwork with unit resolution i.e. with the resolution for a neighboring peak.

Reducing the resolution gives wider peaks and a higher system sensitivity.

Good unit resolution can be achieved with «SCAN-F». Compare a small and a neighboring largepeak. They must be presented without distortion.

Parameter values ExplanationsOFF Integral mass spectrum (DC is »off«)

1 ... 255 Resolution. The peak width is approximately proportional to the numberentered. The default value 25 corresponds to the unit resolution for mostRF generators,

«HESOLn <mass> function · except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-INPUT»

Compare the 400 family versions.


OFF Integral mass spectrum (DC is »off«)ON Standard mass spectrum (DC is »on«)

uSELFu <config> refer to «TEST» «SERVICE»

«SELFICHu <config> function refer to «TEST» «SERVICE»

«SEM» <detect> function except for <config> «SYSTEM» «DETECT» : «FARAD»only for <detect> «TYPE» : «SEM», «lON-CNT» and «EXTERN»

Defines the individual SEM high vottage supply for each measurement channel


SEM-HV The generally applicable SEM high voltage is entered under <sem hv>«SEM-VOLTAGE».

1 ... 3500 V Defines an individual SEM high voltage for the selected measurementchannel.

NOTE: When the SEM is potential free (<config> «SYSTEM» «DETECT» : «H-SEM»),the mimimum SEM high voltage is approx, 750 V (for detailed specification referto operating instructions 191). It will not be defined for lower settings.

«SEM+FILn <config> function refer to «CTRL»

QMS421gg.opm Operation - ParameterS 51

BALZERS

«SEM-VOLTAGEn <sem hv> function except for <config> «SYSTEM» «DETECT» :«FARAD»

Defines the generally applicable SEM high voltages, i.e. those not defined in a channel. It applies to

all channels with no individual parameter setting unde< <detect> «SEM» and are thus set to<detect> «SEM» : «SEM-HV».


0 ... 3500 V Common SEM high voltage

NOTE: When the SEM is potential free (<config> «SYSTEM» «DETECT» : «H-SEM»),the mimimum SEM high voltage is approx. 750 V (for detailed specification referto operating instructions 19]). It will not be defined for lower settings.

«SERVICEn <config> function refer to «TEST»

«SETn <di/do> function refer to «DIG-OUT»

«SETPT» <integ> function · only for <detect> «TYPE» : «FARAD», «SEM», «lON-CNT»and «EXTERN»

- only for <mass> «MODE»:

«SAMPLE»

Defines the status of the integrator switching function for cutting off the integration process when

the preset threshold has been exceeded. The assigned DO bit is set when the integration is startedand reset («LOW») when the switching function has responded.


OFF The integrator switching function is disabled. The DO bit assignment is

temporarily voided and the bit is released for other uses.

1.17E-38 ... Cutoff threshold for integrator... 3.40E38 As

«SIMULn <config> function

Simulates a spectrum for testing purposes (also refer to section 6.9).


OFF Simulation turned off

INTERN The simulation is looped through the QC internal measurement path

EXTERN The sîmulation is looped thkough the OC external connection. Thissetting requires additional hardware and is only for use by BALZERSservice personnet.

IŒ NOTE: If no real error message has been output, the warning «SIMULATION» is showncontinuously in the error field.

52 Operation - Parameters oMs421eg.opm

BAt.zERs

«SPEEDn <mass> function · except for <mass> «MODE» :«SAMPLE»

- except for <detect> «TYPE» : «P1RAN1», «PENNING» and «A-INPUT»

Defines the scan speed.

Electrometer operation <detect> «TYPE» : «FARAD», «SEM» oderExtern input <detect> «TYPE» : «EXTERN»


0.5 mslo 0.2 s/u Scan speed for <detect> «LOCK-IN»:

«OFF»1 mslu 0.5 s/u2 mslu 1 s/u5 mslu 2 s/u

10 mslu 5 s/u20 mslu 10 s/u50 malu 20 s/u

0.1 s/u 60 s/u

Electrometer operation <detect> «TYPE» : «FARAD», «SEM» oderExtem Input <detect> «TYPE» : «EXTERN»


1 s/u ... 60 s/u Scan speed for <detect> «LOCK-lN» : «ON»

lon counting operation <detect> «TYPE» : alON-CNT»


2 mslu . 60 s/u Scan speed for <mass> «MODE» : «STAIR»

20 malu . 60 s/u Scan speed for <mass> «MODE» : «SCAN-x» and «PEAK-x»

«STATE» <aux> function

Defines whether the selected measurement channet is enabled or skipped in the scan.


SKIP Selected channel should be skipped.

ENABLE Selected channel is enabled.

omss21ea.opm Operation - Parameters 53

BALZEFIS

«SYSTEMn <config> function

The system hardware must be defined. The system then works out the possible operating modesand parameter sets based on the configuration information entered.

The system detects optional control system modules itself (compare with the «OMS-HW» parame-ter.)

UEJ«DETECT» Defines which signal source (ion detector) should be used.


FARAD Faraday detector

SEM 90° secondary electron multiplier

CD-SEM 90° secondary electron multiplier with high voltage conversion dynodes

H-SEM Potential-free 90° secondary electron multiplier(only for <config> «SYSTEM» «OPTION» : «CP»)

LaJ«DETECT» Defines which signal source (ion detector) should be used.


FARAD Faraday detectorSEM 90° secondary electron multiplier

CH-TRON Channettron

LaJ«IS-TYP» Defines the type of ion source installed in the quadrupole analyzer (OMA)


AXIAL Axial ion source

CB Crossbeam lon source

GAID Grid ion source

SPM Sputter process ion source

SPEC+ Special ion source for positive ions

SPEC- Special ion source for negative ions

LLLI«lS-TYP» Defines the type of ion source installed in the quadrupole analyzer (GMA).


AXIAL Axial ion source

CB Crossbeam ion source

GRID Grid ion source

SPM Sputter process ion source

54 Operation - Parameters QMS421gg.opm

BALZERS

«MASS-R» Defines the measurement range for your system (determined by the RF generator being used)


128 Measurement range 128 (OMH 400-1 and OMA 410)512 Measurement range 512 (OMH 400-5 and OMA 400)

1024 Measurement range 1024 (OMH 410-1 and OMA 400)2048 Measurement range 2048 (OMH 410-2 and OMA 400)

340 Measurement range 340 (OMH 410-3 and OMA 410)300 Measurement range 300 (OMH 400-5 and GMA 430)

ISP NOTE: The firmware does not detect or prevent conflicting entries for the parameters«QMA» and «MASS-R» under <config> «SYSTEM».

«MASS-R» Defines the measurement range for your system {determined by the quadrupole electronics).


100 Measurement range 100 (OME 125-1 and QMA 125)

200 Measurement range 200 (OME 125-2 and QMA 125)

«OPTION» Defines any system expansion options.


NO No expansionsCLA Chopper lock4n amplifier

CP lon counter preamplifier (system recognizes this automatically)

LaJ«OPTION» Defines any system expansîon options.


NO No expansionsQMU Quadrupole multiplexer for systems with two or more analyzers

CLA Chopper lock4n amplifierCP lon counter preamplifier (system recognizes this automatically)

«QMA» Defines the quadrupole famiîy to which your analyzer (OMA) and thus your quadrupole massspectrometer system belong.


125 -> Analy2er with 6 mm rod system (stainless steel)

400 -> Analyzer with 8 mm rod system (molybdenum)

410 -> ÙL.,.$ Anaîyzer with 16 mm rod system (molybdenum)

430 -> Ù°°| Analyzer with 8 mm rod system (stainless steel)

«RETURN» Return to <config> function.

oms421ag.opm Operation - Pararneters 55

EIALZERS

«TEST» <config> function

Defines the test and adjustment routines for service purposes.

«CS 421» Test for CS 421 console

«DISP-T» Test for the LCD display

The test routine is started by pressing the appropriate softkey. The tests continue to run until

is pressed. When S has been pressed and the tests stopped, the results of the Display-RAM-Tests are shown in the status line for approximately ten seconds.

«EPROM-T» Eprom test

This test is started by pressing the appropriate softkey. During the test the message «BUSY» ap-

pears in the display instead of the parameter value. When the test is finished, the result of the testis shown in the status line, and instead of a parameter value the checksum is shown in hexideci-mat format.

«KEY-T» Input key test

This test is started by pressing the appropriate softkey. It continues to run until the key is

pressed. During the test, each key pressed is shown in the status line,

«PRG-NR» Queries the current firmware version (software version).

The query is started by pressing the appropriate softkey. The programm number is shown in thestatus line for approximately ten seconds.

«RAM-T» RAM test

The test is started by pressing the appropriate softkey. During the test the message «BUSY»appears in the display instead of the parameter value. When the test is finished, the result of the

test is shown in the status line for approximately ten seconds.

«RETURN» Return to <config> «TEST»,

«DSP» Digital signal processor test


This test is started by pressing the appropriate softkey. During the test the message «BUSY» ap-pears in the display instead of the parameter value. When the test is finished, the result of the testis shown in the status line, and instead of a parameter value the checksum is shown in hexideci-mal format.



«RAM-T» RAM test

The test is started by pressing the appropriate softkey. During the test the message «BUSY»appears in the display instead of the parameter value. When the test is finished, the result of thetest is shown in the status line for approximately ten seconds,

«RETURN» Retum to <config> «TEST».

56 Operation - ParameterS OMS421gg.opm

BALIENs

«OMS» Tests the controller (IC)


This test is started by pressing the appropriate softkey. During the test the message «BUSY» ap-pears in the display instead of the parameter value, When the test is finished, the result of the testis shown in the status line, and instead of a parameter value the checksum is shown in hexideci-mal format.



«RAM-T» RAM test

The test is started by pressing the appropriate softkey. During the test the message «BUSY»appears in the display instead of the parameter value. When the test is finished, the result of thetest is shown în the status line for approximately ten seconds.

«RETURN» Return to <config> «TEST».

«RETURN» Retum to <config> function.

«SERVICE» Checks the signal processing

«FILTER»^

«F.S.+»«F.S.-»«LAN» These test routines require additional hardware and are only for use by BAL2ERS service«MODE» - personnel«NEG»«OFFSET»«POS»«OMU/CLA»

«RETURN» Return to <config> «TEST>.

«BS-232»«SELF» These test routines require additional hardware and are only for use by BALZERS service«SELFICH» personnet

OMS421ag.opm Operation - Parameters 57

EIALZERS

«THRESH» <cycle> function - only for <cycle> «FUNCT» :«ADJUST»

and <cycle> «MODE» : «MONO»as well as the limitations according to the <mass> function

<mass> function · only for <mass> «MODE» : «PEAK-L» and «PEAK-F»- except for <detect> «TYPE»

: «PlRANi», «PENNING» and «A-1NPUT»

Level criterion for peak processor and adjust algorithm.

Defines the minimum intensity for a peak to be recognized as a peak (background suppression).

Electrometer operation <detect> «TYPE» : «FARAD», «SEM» orExtem Input <detect> «TYPE» :

«EXTERN»


0,01 %F.S. Minimum peak intensity referenced to «RANGE».0.03 %F.S.

0.1 %F.S.0.3 %F.S.

1 %F.S.3 %F.S.

10 %F.S.30 %F.S.

Ion counting operation <detect> «TYPE» : «lON-CNT>


1 EO cps i E4 cps Minimum peak intensity1E1 cps 1E5 cps1E2 cps 1E6 aps1E3 cps 1E7 cps

«TRIGn <cycle> function - only for <cycle> «FUNCT» :«CYCLE»

Defines the type of measurement cycle start


INTERN The measurement cycle is started and stopped from the console(CS 421) or via an interface.

EXT-AUTO The measurement cycle is started by the positive flank of the 'RUN-IN'signal coming via the <ctrl> connector. The measurement cycle runsuntH it is stopped when the <halt> signal is issued or until a predefinednumber of cycles has been completed. It starts again with the positivetrigget flank,

EXT-NORM The measurement cycle is started by the positive trigger flank of the'RUN-IN' signal coming via the <ctrl> connector. It runs either as longas the trigger level is high, or until the <halt> signal is entered, or until a

predefined number of cycles has been completed.

EXT-SNGL The measurement cycle is started by the positive flank of the 'RUN-IN'signal coming via the <ctrl> connector. However, the operator musthave prepared the system for this by pressing the <run> key on theconsole beforehand. The measurement cycle runs unt11 it is stoppedwhen the <halt> signal is issued or until a predefined number of cycleshas been completed.

58 Operation - Parameters OMS42tgg.opm

BALZERS

«TRIGn <integ> function - only for <detect> «TYPE» : «FARAD», «SEM», «ION-CNT»and «EXTERN»


«SAMPLE»

The integrator function can be started in one of two different ways, either from the front panel orvia an interface. However, the integrator function can only be interrupted by a front panel com-mand (refer to the «lNTEG» parameter).


INTERN The integration process is started from the console or via an interface.EXTERN The integration process is started by the positive flank of the

'INT-START' trigger signal coming via the <ctrl> connector.

«TYPE» <detect> function

Defines the type of detection, which is a function of the hardware configuration.


FARAD Electrometer signal without gainSEM Electrometer signal with secondary electron multiplier

(except for <config> «SYSTEM» «DETECT»: «FARAD»)

ION-CNT lon counter(only for <config> «SYSTEM» «OPTION»

:«CP»

and <config> «SYSTEM» «DETECT»:

«SEM» or «H-SEM»)EXTERN Analog signal from, for example, an external measurement circuit. This

signal is transmitted via the intemai filter and the amplifier circuit in theOC 421 in the same way as an intemal signaL

PIRANI Total pressure measurement with Pirani measurement module(only for <config> «OMS-HW» : «PI 420»)

PENNING Total pressure measurement with cold cathode measurement module(only for <config> «QMS-HW» : «PE 420»)

A-tNPUT Analog signal via the analog input module. This signal is not transmittedvia the intemal filter and the post amplífier in the OC 421.(only for <config> «QMS-HW»

:«AI 421»)

NOTE: The ion source voltages are automatically adapted when the unit is switched from«FARAD» to «SEM». This means that the selected detection method does notfunction immediately,

«TYPEn <ion src> function only for <ion arc> «MODE» :«NORMAL»

To change ion sources, the actual ion source hardware must first be replaced, and then the soft-ware configuration appropriately adapted.


xxxxx Configuration entry under <config> «SYSTEM» «IS-TYP».

SPEC + Detection of positive ions

SPEC- Detection of negative ions

W NOTE: When the «SPEC-» ion source is used, all the IS 420 ion source potentials and, if

the HV 421 is configured, the high voltage supply for the HV 421 when the entryis <config> «SYSTEM» «DETECT» : «H-SEM» are reverse poled.

ûMS421gg.opm Operation - Parameters 59

BALZERS

For the «SPEC+ » and «SPEC-» ion sources, the 'SPEC-SRC-ON' signal at the IS 420 <OMA>connection is active as long as the emission current is O mA (<emiss> «EMISS» .

«OFF»). This is

advantageous, for example, for driving the relay in the 'adapter unit' ( when multiplelense ion optics are being used.

«TYPEn <trip> function only for <detect> «TYPE» ; «FARAD», «SEM», «ION-CNT»and «EXTERN»


«SAMPLE»

Defines the way switching functions A and B will work (also refer to section 6.7.4). The switchingfunctions can also be disabled.


OFF Switching function disabled. The DO bit assignment is temporarilyvoided, and the bits are made available for other functions.

ABS Switching functions A and B are activated as individual, independentfunctions. They have only one threshold, if the pressure exceeds thisthreshold, the switching function status changes.

HYST Switching functions A and 8 are enabled and coupled to a common swit-ching function with two thresholds (hysteresis). When the pressure goesoutside of this range, the switching function status changes.

Absolute switching functions Hysteresis switching function

Schaltfunktion Schaltfunktion

i a Druck p i t a Druck p

Schwedwelt Schweltwerte

Switching function Switching functionPressure p Pressure pThreshold value Threshold values

60 Operation - Parameters OMS421gg,opm

ESALZ ts

MV1n <v1...v6> function only for <ion src> «TYPE» : «SPEC+ » and «SPEC-»«V2n <v1...v6> function only for <ion src> «TYPE»

:«SPEC+ » and «SPEC-»

«V3» <v1...v6> function only for <ion src> «TYPE»: «SPEC+ » and «SPEC-»

«V4» <v1...v6> iunction - only for <ion sic> «TYPE»;

«SPEC+ » and «SPEC-»«V5» <v1...v6> function - only for <ion src> «TYPE»

: «SPEC+ » and «SPEC-»«V6n <vl...v6> function - only for <ion src> «TYPE» : «SPEC+ » and «SPEC-»uV7n <v7...> function only for <ion src> «TYPE» : «SPEC+ » and «SPEC-»«VS» <v7...> function only for <ion src> «TYPE» : «SPEC+» and «SPEC-»«V9» <v7...> function only for <ion src> «TYPE»

:«SPEC+ » and «SPEC-»

lon source voltages

Voltage Reference Parameter values Step sizepotential

V1 IONREF VO O ,,, 150 V 1 VV2 CATH V1 0.0 ... 125.0 V 0.5 VV3 FOCUS V1 -30.0 ... + 30.0 V 0.25 V

V4 F-AXIS V1 0 ... 60 V 0,25 VVS EXTRACT V1 O ... 450 V 2 VV6 DEF-I V1 0 ... 450 V 2 V

V7 V1 0 ... 250 V 1 VVS V1 -125 ... +125 V 1 VV9 WEHNELT V2 0 ... 60 V 0.25 V

V10 ReserveVi l ReserveV12 Reserve

lon source potentials for positive ion polarity-125 V

-30V+150V

-------- --V3-- -------------VBYl V2 V5 Y6 V7

+30V+60V

OND OMA -+259Y

+4TÈV+ÃÑV- All sign digits change

for negative ion polarity- VO may only be set to a maximum extemal polarity of ±200 V- V6 and V7 are switched to OMA GND for <detect> «TYPE» :

«FARAD»

«WEHNELTu <v7..,> · only for <ion src> «TYPE»:

«AXIAL» and «SPM»


QMs421ao,opm Operation - Parameters 61

BALZERS

«WIDTHn <mass> function except for <mass> «MODE»:

«SAMPLE»except for <detect> «TYPE» : «PIRANI», «PENNING» and «A-1NPUT»

Defines the range for the particular measurement channel across which the scan will be made.


max. -2047 . Number of peaks to be measured during a scan in »SCAN« or »PEAK«... max, + 2047 operation as a function of the system configuration (<config>

«SYSTEM» «MASS-R»).

-16 ... + 16 Nurnber of masses to be measured in a scan in »STAIR« operation.

ET NOTE: When the «WIDTH» is defined as negative, the scan runs 'backwards' i.e. fromhigher to lower masses. This can avoid mass discrimination problems when, forexample, in the 'forward' scan a smaller peak follows a larger, possibly overdri-ven peak.

62 Operation - Parameters OMS42

BAL2'ERG

6. Measuring with the OMS 421

6.1 Operating modes The «WIDTH» mass range is only accepted with limitati-ons compared to «SCAN-N» (refer to section 5.2.5).

6.1.1 SCAN Peaks deviating from the ideal mass scale must be takeninto account when entering the value for «FIRST». They

This operating mode allows a scan to be made across a can be found using the Adjust function (refer to sectionspectrum, the range of which is defined by the parame- 6.2).ters «FIRST» and «WIDTH». The number of mass incre- The intensity output after each change to another whole-ments (fractions) is a function of the scan speed number mass is an average of approximately half of the(«SPEED») and the range of measurement for the mass dwell time for the previous mass (accounts for transientspectrometer (<contig> «SYSTEM» «MASS-R») time),

Example: The scan speed is 100 mslamu. Thus theSCAN-N (SCAN Normal) averaging time is - 50 ms.The intensities are multiplied by the «CALIB» value. Theyare averages of two mass increments taken across time. Unproces-

t= averaging timeExample: At a scan speed of 100 mslamu and a mass sed signal

increment of 1/64, the averaging time is <elm>t

100 mslamu × 1/64 amu = 1.56 ms

SCAN-F (SCAN FIR filter)

The intensity values are subjected to a FIR (Finite Im- < AO> or

pulse Response) filter algorithm, The filter is based on <mon>

the theory of an optimal filter i.e. a filter for signals sha- °"

ped like mass peaks (compare section 6.1.3).

Unproces- e,

sed signaf Because the averaging time must have elapsed before<elm> the scan can goe to the next mass, the output of the

measured intensity value is always delayed by one mass.

OffsetThe filtered measured data are subsequently multipliedby the values entered under «CALIBn.

<AO> or<mon> 6.1.2 SAMPLEoutput

The FIR filter clears from the unprocessed signal most ofthe superposed noise and microphonic interference aswell as any offset shifts. This allows even very smallpeaks to be distinguished from the background. <AO> or -

Statistical intensity fluctuations which, because of the new value90° design of the SEM, usually make up the majority ofthe signal noise, are particularly well extracted by the FIR aid valuefilter.

The filtered measured data are multiplied by the factorentered for «CALlB» and subsequently output. <sync>

STAIR (bar graph spectrum) .

DWELL DWELL

A mass spectrum is takens of whole numbered massesacross a range defined by «FIRST» and «WlDTH». The intensity measurement is made at the single mass

entered under «MASS». This is usually set at a peak(refer to section 6.2).

OMS421gg.opm Measuring with the QMS 421 63

BALZEERS

When the «DWELL» time has elapsed, the intensitymeasured during the dwell time is multiplied by the value Unproces-entered under «CALIB» and the resulting signal is subse sed signalheya

va

Upehigher than 1 has been entered for

<elm>

«AVERAGE», a moving average can be taken across se-veral measurement cycles. When the measurement cycleis started, a continuous average is taken across all the <mon> detected intensitiesmeasurement cycles until the average reaches the values °"19"entered under the «AVERAGE» parameter. From thispoint on the moving average is taken according to the«AVERAGE» value.

The following recurrence formulas - in which MV =

measured value and AV = averaged value - apply:<AO>

a) Number of measurement cycles < «AVERAGE» output

MV - AVAV = AV e

°'"Lnew old Number of measurement cycles

b) Number of measurement cycles > «AVERAGE»

MV,,, - AVAV,,, = AVog, + «AVERAGE»

«AVERAGE» determines the time constant for themoving and exponential averaging function as foblows:

7 - «AVERAGE» × time for one cycle

This type of averaging has the advantage that it alreadyprovîdes an 'estimated' intensity value over «DWELL» af- PeakmteosMster the first measurement cycle. This value then beco-mes more and more precise as more measurement cyclesare included, allowing «DWELL» to be shortened (shortertransient times) without having any significant effect onthe filter function.

Mass numbers for peeks

6.1.3 PEAKPeak processing is possible at all scan speeds. The

The peak processing function is an intellegent data te,. search is made in the mass range defined by «FIRST»duction process that automatically searches the spec- and «WIDTH».trum for peaks in real time. Out of all the intensity Two types of peak processing functions are possible:measurement values, only those pairs of values (intensityand mass number) characteristic for peaks are detectedand output.

PEAK-L (Level criterion)

The standard spectrum is used for peak processing here.Similar peak criteria as those that apply for an Adjustcoarse search (refer to section 6.2.1) apply here:

a) I nex > 2 × l

b) imax > 2 x 11

c) 1pg > ILevel

where IPoak = Imax × mantissa value for «CALIB»

64 Measuring with the QMS 421 OMS421gg,opm

ALZEFts

In ion counting operation there is an additional criterion 6.L4 Integral spectrumfor the minimum peak width:

Either a standard spectrum or an integrei spectrum (cand) Ammin 2 ¼ amu at ½ Ima× be used for total pressure measurement [11) can be ta-

ken, depending on the mass separation (resolution) set-ting:

PEAK·F (FIR filter criterion)

The peak process algorithm is used on a measured value <mass> «RESOL» : «1» to «255» --> Standard spectr.

processed in the FIR (Finite Impulse Response) filter <mass> «RESOL» ;«OFF» --> Integral mass spectrum

(such as in the SCAN-F function, refer to section 6.1.1).LuJ

The FlR filter can be used to particular advantage here <mass> «RESOL» : «ON» --> Standard spectrumbecause the measured values are freed of most noiseand other interference signals, allowing a very low level <mass> «RESOL» : «OFF» --> Integral mass spectrumcriterion to be set. It also suppresses peaks that are toowidekto narrow.

a) The 'peak width' must be wider than minimum width

6.2 AdjustmPeak > nlmin - "ht_ When used in «SAMPLE» mode, the Adjust function ab

lows the selected measurement channel to optimi2epeaks automatically when «ENABLE» is set in <aux>

b) The 'peak width' must be narrower than maximum «STATE».width Ammax This possibility is advantageously used, for example, to

optimize the system in general at regular intervals andparticulady after several parameters have been changed.

6.2.1 Coarse search

Am < Am o me A search is made for a peak around mass number MPeak max ---- --

. .within a specified search area,

c) The 'peak heíght' must be higher than the selected Peak criterialeveL

Three criteria must be met for a peak to be recognized asIPeak max × mantíssa value in «CALIB»

a peak:

a) The maximum intensity (peak) must be at least twiceas high as the minimum of the previous valley,

In1ansity

t 4i

Level lam<

Peak Level ----------- •

Imax > 2 x Insin Maso famui

QMS424o.opm Measuring ith the OMS 421 65

EBALZERS

b) After that maximum intensity, the intensity must b) Search range expanded 'downwards'drop again to less than 2/3 of that previous maximum'

11 the intensity at M-½ amu is more than half the in-IMensity tensity at M, a 'flank test' is carried out at M.-½ amLP,

If that flank is rising, the search range is expanded by

-¼ amu.

2/a × l > I

Meno lame; imax 1 ,

c) The maximum intensity (peak) must be higher than ¯¯¯

Ma!4amu M-V2nmu Mthe value entered for Level.

c) Search range expanded 'upwards'

If the intensity at M + ½ amu is in fact less than the

previous maximum value, but higher than 2/s of theintensity at that value, the search range is expandedby + ¼ amu.

- Leve!

Search range

The search range usually covers ± ½ amu of the massentered for M. It can, however, be expanded under cer M-vaamu M M- womu Mtain circumstances (predictive search range expansion)

a) Standard search rangeDuration of an «ADJUSTn «COARSE»

The duration of a search is a function of the parametervalues entered under «DWELL». Because the search

20|= TSOge IS sometimes wider than one 'mass width' (refer toprevious section), the duration of the search can be

estimated using the following equation.

%/ 4 # tygges, -0.5 ... 1.25 x «DWELL» time

MM/2emu M

Procedure for coarse peak search

Stop any scan in <run/hait>:

»halt«.: progress

Change to <mass> «MODE» :«SAMPLE»

\ «SAMPLE» modei Select the <cycle> «FUNCT» :

«ADJUST»«ADJUST» auxiliaryfunction

M-Wamu M Define the type of <cycle> «MODE» :«MONO»

measurment cycle or «MULTI»and the type of <cycle> «ADJ-TYP> :

«COARSE»search

Start the Adjust <run/halt> :»run«

function

66 Measuring with the OMS 421 oM og m

BALTERS

Feedback after successful Adjust When the adjust was successful, the mass number is

updated with the new value. If the adjust was unsuc-

co ector at s Ge fu eaJuSstnumberremains the same.

A search is made for a peak within the fi×ed searchrange of plus / minus seven (four) fractions around mass

<mon>connector

¯ IMjust number M.

(1 fraction = 1/64 amu for mass range to 1024

Peak*/32 amu for mass range 2048)

found

----- Peak criterion

To be recognized as a peak, an intensity must (starting<AO> with the first measurement point) first rise by at leastconnector T.5 % and then drop by L5 % referenced to the ma×i-

no output old value remains mum intensity. in addition, a peak that meets this defini-tion but is below the value entered for Level will not be

accepted, and no overdrive may have occurred.

If the intensity rises again after a peak has been 'found',<sync> once again the definition of the rise not being higher thanconnector .

Pause 1.5 % of the minimum intensity applies. If it is higher,the Adjust is aborted.

When the Adjust has been run through, the following in-formation is available to the user:

- Status

The status report comprises one or more symbols and a ')

status code. The interpretation of these gives informa- ---I «H,5%

tion on which parameters («MASS», «RANGE» or«THRESH»}, if any, must be modified to allow a suc-cessful Adjust (also refer to Appendix E.). Refer to Appendix E for details.

ADJUST RUNNING STATUS CH 29: + 10001

FUNCT MOJnC ETHRESHSANGE Nass" Duration of an «ADJUST» «FINE»

ADJUST MULTI COARSE 0.01¾ 1E-05 13.46 The length of a search process depends on the entryOK The adjust was successful made for the «DWELL» parameter. It determines the

+ Choose a somewhat higher mass number length of the measurement (averaging) made at a particu-

+ Choose a somewhat lower mass number lar mass point. An unaborted Adjust takes:

† Increase the intensity or possibly decrease the Level (Adjust = 15 x «DWELL» timevalueDecrease the intensity

ET NOTE: In the «MULTl» measurement cyclemode, the channels are run through se-quentially and the status messages areshown for the channel being processed atthat particular moment.

ET NOTE: In «MONO» adjust, as well as for the firstchannel in a «MULTI» adjust, the status«OK 00000» is shown during the search(«RUNNING»L

- Mass number

AÑUfT STOP STATUS CH 61: OK 00000CHRN 61: SETUP CŸCLE ** **FUNCT MODE ADJ-TYP THRESH RAHGE MA55AOJUST MONO COARSE 0.01¼ 1E-05 14.00

OMs421ao.opm Measuring with the GMS 421 67

BALZERS

Procedure for fine peak search 6.3 Analog meBSured valueSIf you are not sure if there is a peak inside the definedrange, first run a coarse search. Then proceed as fol- 6,3.1 Connectorslows:

<elm> connectorStop any scans in <run/halt> : »halt«

The <elm> connector on the OC 421 quadrupole con-progress.troller outputs the prefiltered electrometer signal.

Change to <mass> «MODE» : «SAMPLE»«SAMPLE» modeSelect the <cycle> «FUNCT» : «ADJUST» <mon> connector

«ADJUST» auxiliarY The <mon> connector on the OC 421 quadrupole con-function troller outputs the measurement signal from the signalDefine the type of <cycle> «MODE» : «MONO» processor for all measurement channels sequentially. A

measurement cycle or «MULTl» recording instrument connected here can record theoperation and the <cycle> «ADJ-TYP» : «FINE» measurement output signal linearly or logarithmically,type of search depending on the parameter entry for the presentation

Start the Adjust <run/halt> : »run« format (<output> «MONITOR»).

function< AO> connector

Feedback after successful Adjust if you have configured the AO 421 option (or the IC 421option), you can record up to 1 2 measurement channels.<elm>

Pause o 2v Connect your strip chart recorder to the <AO> connec-connector- tot either via a connection cable you have fabricated

DWELL» time yourself for this purpose or (for laboratory use) via theAB 021 connection box available as an option.

If you have configured the AO 421 analog output option,<mon> one or more measurement channels can be assigned toconnector Pause o.2v each of the twelve AO channels (<output> «AO-CH»).

DWELLa time CAUTION: If two or more measured values havePeak found been assigned to one AO channel, they

will be output sequentially.

The interface allows data not defined in measurement< AO> channels to be output via the AO,connector

no output old value temains

6.3.2 Overview of the output signals

The following is a summary of all the signals output at<sync> > the <AO> and <mon> connectors resulting from theconnector Pause

various operating modes.

<mass> «MODE» : «SCAN-Nu and HSCAN-Fu

When the Adjust has been run through, the same infor- <mon>mation is available as for a coarse peak search- and <AO>

connectors

< sync>connector r «FIRST>

«WIDTH»

68 Measuring with the QMS 421 OMs421ao.opm

pgzggs

<mass> «MODE» : «STAIRn <cycle> «FUNCT» : «SETTLn

<elm> <elm>connector --4--/ connector

NW

<mon> <mon>

and <AO> and <AO>connectors connectors

<sync><sync>connector r «FIRST> connector

Pause «DWELL1DTH

<cycle> «FUNCT : «ADJUST coarse<mass> «MODE» «SAMPLEn <elm><mon> connector Pause

and <AO> rold value

i

new valueconnectors

<sync>connector <mon>

«DWELL» connector Miust

Peak >

<mass> «MODE» «PEAK-Lo and «PEAK-Ffound

<elm>connector -

.. Leve co r ectorno output old value temains

<mon>connector

Level

connneccor

- Pause

<AO>connector

Level-

<sync>connector 2 p«FIRST» g

«WIDTH

OMS421gg.opm Measuring with the GMS 421 69

EIALIERS

<cycle> «FUNCT» : «ADJUST» fine <detect> «LOCKBN» : «ON»

<elm><mass> <output> Output format Formulas

connector Pause 0.2V «MODE» «AO-MODE» at <AO> and

<autput> <mon>

DWELL> time «MONITOR> Deca- Vdes dec

SCAN-NSCAN-F LIN 1 10 a}

<mon> STAIRconnector ause 0.2\/

SAMPLEPEAK-L LOG 3D 3 31/3 b), c), d)

DWELL> time PEAK-FPeak found

lon counting operation

<AO> <detect> «TYPE» :«lON-CNT»

connector oculpu oldvalueremains <maas> <output> <output> Outputformat Formu-«MODE> «AO-MODE» «LOG-DEC> st <AO> and las

<output> <mon>-.----- «MONITOR» Deca- _V

des dec

<sync> SCAN-N LIN 1 10 g)

connector Pause SCAN-FAM

LE LOG 3 DEC 331/3 h), i), k)

PEAK-L 10 DEC 10 1 IL m)PEAK-F

6.3.3 Output format External input

<detect> «TYPE» :«EXTERN»

Analog measured value signals can be output at the <maas> <output> Output format Formulas<mon> and <AO> connectors in various formats: «MoDE» «AO-MODE» at <AO> and

<output> <mon>

Electrometer operation «MONITOR» Deca- Vdes dec

<detect> «TYPE» : «FARAD», «SEM»SCA N-N

<detect> «LOCK-IN» : «OFF» scAN-F LAN 1 10 n)

<mase> <output> <amplif> Output format Formu, STAIR

«MODE» «AO-MODE» «MODE» et <AO> and las SAMPLE

<output> <mon> PEAK-L LOG 3D 3 3 /3 op, p), q}

«MONITOR» Deca- VPEAK-F

des¯Ï¯

SCAN-NSCAN-F LíN FlX 1 10 a)

STAIRPEAK-LPEAK-F LOG 3D FtX 3

31/3 b), c), d)

SAMPLE FIX a)

LIN AUTO \ 10AUTO-D

LOG 30 FIX 331/3 b}, c), d)

LOG 10D AUTO 10 1 e), f)

AUTO-D

70 Measuring with the OMS 421 OMS421gg.opm

ISALZERS

Outputs

The following formulas and charts apply to positive mea-surement signals. The curves are mirrored at the zeropoint according to formulas a) -- f) and n) ... q) for thenegative signal range.

NOTE: log = logio

Electrometer operation: Linear output

10" 10 x-1 10% «Range» 10"-101234567891

-1012345678910Formula al

a) Ugo - MV ×«RA GE» «RANGE» in [A)

Electrometer operation: Logarithmic output across three decades

Formula d) 10"= «Range»x-3 10"¯2 10x-1 10"

011 1 1

68 2 4 88 2 4 88 2 4 88 [Al'"'l I""P'"I""P"'t""I""I""f""P"'l""I""I""I""I""""1""'""I""""1 (V]

-106123456789100.25 Formula c] Formula b)

10 V i «RANGE»b) U -

y × Iog ( «RANGE» x 103) in the range of i > 2 x 103 ; «RANGE» in lA)

0.75 Vx 103 «RANGE» «RANGE>c) Up =

«RANGE» x i -0,5 V in the range of 103 5 i < 2 x10

;

«RANGE» in (Al

0,25 Vx 103. . .

«RANGE»d) UAO "

«RANGE» × I m the range of 0 5 i < 103 ;«RANGE» in [Al

Electrometer operation: Logarithmic output across ten decades

Formula f)

-10 -14 -14 y -13 g -12 g -11 10 ¯'° 10¯*

10 '" 10 ' 10 6 10 '" 10 -4

-1 111111111124 4 24 24 24 24;24¡24|24 24 24

1.L * *I . I f

re . « i a i. L....L.LL ALLL.Lt.I i t i i i . I I i

*I

TI

'I i

't I I I

'I I

"I ""i""I "" I""I""I "" I" """1"" D'"I""U'"i""I""I""I ""l'"'e '"1""I""I"" D '"I (V)

-10612345678910

Formula e)

e) Ugo =1 V × log

ii x 1014

) in the range of i 2 1,07 × 10 A;

«RANGE» in (Al

f) UAo = 3.74 x 1012 ×i in the range of i < 1.07 x 10 A ; «RANGE» in [AI

QMS421gg.opm Measuring with the OMS 421 71

IBALZENE

lon counting operation: Linear output

10 x-1 x- «Range» 10"01234567891

[cpsiI 'U"'I""U"'l""i""I""I""I""i""I""P"'I""D'"I""U "I""I""i (VI0512345678910

Formula g)

Rateg) Ugo = 'IO Vx «RANGE Rate and «RANGE» in icps!

lon counting operation: Logarithmic output across three decades

Formula kl ao": «Range»

10"' 10X¯ 10x-1 10"01 1 1 1

2 4 88 2 4 88 2 4 88|[cpsÎli , , , ,,,,,I ..

I l'"'l""I""I"'9""I'"'I'"'I""""'I""""'I'""""I '" '"I'"'U"'l""""'I IV100612345678910

0.26 Formula il Formula h)

h) Ugo = × log ( «RN E»× 103) in the range of Rate 2 2 × g E_»

;Rate and «RANGE» in [cpsi

. 0.75 V × 103 «RANGE» «RANGE»I) UAO ¯

«RANGE>. x Rate -0,5 V in the range of -10, 5 Rate < 2 x -

103 ;Rate u. «RANGE» in

[cps]

0.25 V × 103 «RANGE»k) Ugo =

«RANGE» × Rate in the range of Of Rate < - --; Rate and «RANGE» in laps!

Ion counting operation: Logarithmic output across ten decades

Formula m)J

10 '2 10 -1 10 0 10 1 10 2 102 10 4 10 10 6 10 7 10

01111111111

00612345678910Formula I)

0 Ugo = 1 V × Iog (Rate x 10 ) in the range of Rate à 10 cps;

Rate and «RANGE» in (cps!

m} UAo = OV in the range of Rate < 10 2 cps;

Rate and «RANGE» in [cps)

72 Measuring with the GMS 421 QMS42tag.opm

BAL2:EFt5

External input: Linear output

-1012345678910

"I""D'" I""I""l'"'1""I"" I""I""1""I""I""I'",""I"'u'"'l""I""I""""'l'"U""I [vl-10612345676910

Fatmula n)

n) Ugo = U x «GAIN»

Extemal input Logarithmic output across three decades

Formula q)

0.010 ) Œ1 1 10

88 , 2 4 68, 2 4 SS 2 4 6B yi

Isi.*I . .! I 1 I tilII i I i illi i I i

lifl

-1006123456789100.25

~

Formula p) Formula o)

10 V UExtern × «GAIN» 10 Vo) UAo IOD I 10 V

× 103) im Bereich UExtern× «GAIN»

0.75 V × 103 × «GAIN» 10 V 10 Vp) U lo v

× UExtem Extem 3

0,25 V × 103 × «GAIN» 10 Vq) Ugo =

10 V× Ug,,,,,, im Bereich 0 1 UExtem 3 × «GAIN»

Accessories

A connection box with 2 mm banana sockets is availableas an accessory (see section 10.1) to allow easier con-tacting of the AO outputs.

QMS421gg opm Measuring with the OMS 421 73

EIALZERS

6.3.4 Connecting recording instruments

The OMS 421 / OMS 421C has the following possibili-ties for connecting instrumertts for recording measuredvalues (such as spectra):

6,3,4.1 Oscinoscope

Basically the same applies as for a strip chart recorder KO QC421with the following points that must be taken into consi- /" O Oderation:

O O- The «WIDTH» value chosen should be somewhat hig-

her than the corresponding range on the oscilloscope(14 mstead of 10). If they corresponded exactly, everysecond scan would be suppressed because of the beam O a sync -+

retum, causing the picture to flimmer. You must find A Trig

out the optimal value through experimentation.- Adjust the triggering level by hand, This gives the best

picture stability. Automatic triggering often causes dif-ficulties, particularly at slower «SPEED» values.

- We recommend using a digital storage oscilloscope forslow «SPEED» and large «WlDTH» entries.

- The 'SYNC' signal triggers the oscillograph each timethe selected measurement channel is started. For stan-dard measurements you should also trigger the positiveflank. To analyze the transient behavior when themeasurement channel is changed, trigger the negativeflank (also refer to the parameter in section 6.8.3.1).

6,3.4.2 Strip chart recorder

<elm> connector Recorder QC 42\

The <elm> output supplies the filtered analog measu-od vraluesigdn from the EP 112 electrometer amplifier

Select a recorder that has a paper feed and scaling cor-responding to the value entered for «SPEED» (such as1 mm/s for 1 slamu). Set the sensitivity in the y direc-tion to 10 V for full scale. mon

If the spectrum is recorded backwards, you can enter a

negative values under <amplif> «CALIB» to repole thesignaL

<AO> connector

if you have configured the AO 421 analog output op-tion, you can assign one or more measured values fromthe measurement channel to each of the twelve chan-nels (<output> «AO-CH»). The measurement signal isoutput either linerly or logarithmically, depending on thehow output format is defined (<output>«AO-MODE»).

CAUTION: If two or more measured data are assi-goed to the same AO channel, they willbe output sequentially.

Connect your strip chart recorder to the <AO> connec-tor either via a connection cable you have fabricatedyourself for this purpose or (for laboratory use) via theAB 021 connection box available as an option.

74 Measuring with the QMS 421 aMs421gg.opm

BALZERE

< mon> connector

The <mon> connector on the OC 421 quadrupole con-troller outputs the measurement signal from the signalprocessor for all measurement channels sequentially. Astrip chart recorder connected here can record the mea-surement output signal linearly or logarithmically, de-pending on the parameter entry for the presentationformat (<output> «MONITORah

6.3.4.3 xly oscilloscope

Basically the same applies as for a strip chart recorder KO QC421with the following points that must be taken into consi-deration:- The mass number assignments are missing in AC coup-

lings, which can result in a nonlinear scale.- Interference at the x signal, as the result of hum for

example, cause unfocussed or even broken peaks.X Y mon

6.3.4.4 Plotter

This type of presentation allows an e×act mass number Plotter QC 421

assignement. A strong offset compensation is requiredfor high mass numbers because the DC coupling shiftsthe picture each time the «FIRST» parameter is changed.Because of the limited paper width, only a low «WIDTH»value is reasonable here.

The resolution of the SCAN signal is a function of themass range. X Y mon

Mass range Voltage per mass SCAN signal scan

I amu1 [

mV / amu! [

VmaxI

128 80 10,24340 30 10.20512 20 10.24

1024 10 10.242048 5 10.24

DaJMass range Voltage per mass SCAN signal

[amu

] [mV / amu ) [

VI

100 100 10.0200 50 10.0

OMS421ao.opm Measuring with the OMS 42 75

BAL2ERE

6.4 Switchingfunctions

6.4.1 Absolute switching functions

The two independent switching functions - A and B --

for each channel can be put to different uses:

a) as a simple vacuum monitorSelect 'Absolute' as the type of switching functíon <trip> «TYPE» : «ABS»

Select switching function A and define the threshold <trip> «LEVEL-A» : «x.xxEs×x»(Level A)

The «DO·A» switching function status will switch to OEF Switching function»ON« when the actual value goes below the threshold status

If you have configured one or more DO 420 modules, <trip> «OO-A»: xx

you can assign the switching function status to a DOchannel

b) als einfacher ÛberdruckwächterSelect 'Absolute' as the type of switching function <trip> «TYPE» : «ABS»

Select switching function B and define the threshold <trip> «LEVEL-B» : «xx Esxx»(Level B)

The «DO-B» switching function status will switch to ON,

Switching function»ON« when the actual value goes above the threshold statusvalue

if you have configured one or more DO 420 modules, <trip> «DO-B» : xxyou can assign the switching function status to a DOchannel

c) as a window monitor

(This application requires a digital output module)Select 'Absolute' as the type of switching function <trip> «TYPE» :

«ABS»

Select switching function A and define the upper <trip> «LEVEL-A» . «x.xxEsxx»threshold (Level A)

Select switching function B and define the lower thres- <trip> «LEVEL-B» : «x.xxEsxx»hold (Level B)

Assign the statuses for both switching functions to the <trip> «DO-A» : xxsame DO channel (automatic AND logic gate) <trip> «DO-B» : ×x

The resulting switching function status at DO bit xx DRE Switching functionwill correspond to the two statuses »ON« and »OFF« Do-A statusstatuses in the drawing to the right ///

Threshold A

76 Measuring with the QMS 421 OMS421gg.opm

ALZERO

6.4.2 Hysteresis switching functions

if a hysteresis is required, the two threshold valuescan be defined to form one common switching func-tion per measurement channel:

d) for monitoringSelect 'Hysteresis' as the type of switching function <trip> «TYPE»

: «HYST»Select switching function A and define the upper <trip> «LEVEL-Aa . «x.xxEsxx»threshold (Level A)

Select switching function B and define the lower thres- <trip> «LEVEL-B» : «x.xxEsxx»hold (Level B)

The «DO-A» switching function status will change to OFF Switching function»OFF« when the upper threshold value is exceeded, DC-A statusand to »ON« if the actual value drops below the lower og DO Athreshold value

in the same way, the «DO-B» switching function status ON Switching functionwill change to »ON« when the upper threshold value is Do.s statusexceeded, and to »OFF« if the actual value drops be- DO-BIow the lower threshold value 0ÑThoshddA B

If you have configured one or more DO 420 modules, <trip> «DO-A» : xxyou can assign this switching function status to a DO <trip> «DO-B» : yychannel

e) As window monitor with hysteresis

(Two measurement channels and a digital output mo-dule are required for this application)Select the first measurement channel x <select>Select 'Hysteresis' as the type of switching function <trip> «TYPE» : «HYST»Select the switching function for measurement channel <trip> «LEVEL-An : «x.xxEsxx»x and define the two threshold values (Levels A and B) <trip> «LEVEL-B»

;«x.xxEsxx»

Assign the switching function status to a DO channel <trip> «DO-A» : x×

Copy the parameters just defined for measurement <au×> «COPY TO CH» : x + 1

channel x into the following meausurement channel

Select the second measurement channel ×+ 1: <select>If you did not copy the parameters, make sure that the <trip> «TYPE» : «HYST»type of switching function and DO channel assign- <trip> «DO-B»

: xxments are the same as those defined for channels x(automatic AND logic gate)Select the switching function for channel x + 1 and de- <trip> «LEVEL-A» : «x.×xEsx×»fine the two threshold values (Levels A and B) <trip> «LEVEL-B»

:«×,xxEsxx»

The resulting switching function status at DO bit ×× smNreuneen DFF Switching functionwill correspond to the »ON« and »OFF« statuses in the mwaem" 00-A statusdrawing to the right

channelsON -

ThoshadA B

ûMS421gg.opm Measuring with the OMS 421 77

BALZENS

Other combinations - including combinations with morethan two switching functions - are possible to allow op-timum adaptation to the monitoring application,

78 Measuring with the QMS 421 OMs421ag.opm

BAI.ZERS

6.5 Integrator 6.5.3 Integrator background (I-UGND)

The Integrator is a special function that works out the in. The integrator background is found out with <cycle>tensity intagral over time for the measured value from a «FUNCT» : «l-UGND». For this, a normal »SAMPLE«quadrupole mass spectrometer measurement channel. rneasurement is made at the selected channel. The back-When a preset threshold (<integ> «SETPT») is reached, ground measurement is started / stopped witha switching process can be triggered. <run/halt>. The system is switched to single channel

operation (mono channel) automatically while this back-The integrator can be used for the following signal ground measurement is being made.source / type of detector (<detect> «TYPE»);

I NOTE: The background value is not changed when«FARAD» or «SEM» integral units = As the measurement channel or type of detec-«ION-CNT» counts tor is changed. The operator must correct«EXTERN» Ys the background value if necessary,

i NOTE: When the control unit is tumed off, the6.5.1 Forming the integral value value measured for the background is lost

and is thus always zero when the unit isThe measured value for the intensity is sampted at con¯

turned back on again.stant intervals T (50 ms) independently of the othermeasurements being made (Cycle), and a partial integralis calculated for the sample period, The previously defi-ned background signal (1-UGND) is subtracted from theintensity measurement for this calculation. 6.6 Using the digital output module

When the control unit is configured with one or moreDO 420 digital output modules, you can assign one ormore switching function levels (<trip> «DO-A», <trip>«DO-B» or <integ> «DO-I») to each of the 32 bits permodule. The DO 420 module also allows the channels tobe manipulated via one the interfaces (refer to separateoperating instructions [6] ).

6.5.2 Integrator operation CAUTION: If several switching function levels areassigned to the same DO bit, these are

The integrator operation is defined with the <inte9> connected in an AND logic gate. Nofunction: warning is given if bits have already

t>een assigned.

URLUE : 4.2633E-15 As TIME . 66.88.53CHAN 20: 5ETUP INTEGRATOR ** **

TRIG 5ETPT 00-I INTEGRRTORINTERN 1.000E 10 OFF START STOP

6.7 Measurement operationThe integrator function is started either from the OMG <cycle> «FUNCT» : «CYCLE» --> Haj (FL 63)system (via console or interface) or externally via the<ctrl> connector.

NOTE: The integrator function can only be startedwhen the measurement cycle is active 6.7,1 lon counting operation(«mono» or «multi»), The integrator cannot 6,7.1.1 Measured value displaybe used when the system is in the »halt«state or during background measurements In contrast to how other measured values are presented,(I-UGND)· the mantissa value is not output as a bar graph in ion

When the switching function is active (<integ> counting operation. In ion counting operation the total

«SETPT» : not «OFF»), the assigned bit (<integ> measured value is output as a quasilogarithmic bar

«DO-l») is set together with the integrator. When the in, across ten decades,

tegral value reaches the predetermined threshold value,i

1 234 56789i

the DO bit is reset and the integrator is stopped. The in-tegrator function can, of course, be stopped by com-mand at any time, uma amman

MMERN BREENBRE-M Hmmmm

779E-06 illissigmiÍREMEREBENILÄ

oms424o.opm Measuring with the OMS 421 79

ISALZERG

6.7,1.2 Adjusting CP-LEV

The control voltage used to determine the discriminator - ¯

threshold for the CP 400 lon counting preamplifier is r

entered under <amplif> «CP-LEV». Refer to the opera- QMA

ting instructions for the CP 400 [14\ for the relationship perobetween the threshold value and the control voltage as chopr.or

well as information on the optimum threshold adjust- ' f>

ment. A control voltage of 200 mV at <sem hv> --

«SEM-VOLTAGE» is an average value.

6.7.1.3 lon polarity 6.7.2.3 Operation and signal processing

The ion polarity switchover is made with the ion source Also refer to separate operating instructions (17Lselection under <ion arc> «TYPE» : «SPEC+ » for de-

. . When the CLA 400 is set to »Remote off«, the unit istecting positive ions or «SPEC-» for detecting negative .

operated from the front panel. When it is set to »Remoteions

on«, the CLA 400 can be operated from the OMS 42 I

as long as the CLA has been configured under <config>«SYSTEM» «OPTION».

6.7.2 ChopperLock in (CLA) The following restrîctions apply when the CLA 400 is

6.7.2.1 Using the CLA for process gas analysis operated from the QMS 421:

- Operating modes »SCAN1« and »PEAK -X«The basic problem in analyzing process gases (such as at «SPEED»

1 slamu ... 60 s/amu.the gas introduced for evaporation processes) is thediscrimination between the process gas and the back- - Operating modes »SAMPLE« and »STAIR«ground for the same gas. at «DWELL» 100 ms ... 60 s.

Modulating the process gas flow using a gas chopper - No AUTORANGE operation(such as the piezo chopper) and the lock-in techniquesolves this problem i.e. the flow of the gas being admit'

For the measurement set up CLA 400 - OMS 421 theted can be analyzed separately from the background.

following signal flow occurs:

6.7.2,2 Measurement setup RANGE is made up of the electrometer range and thefirst amplifier stage (AMPE) for the CLA 400, The two

The CLA 400 is a lock-in amplifier with an integrated subsequent amplifier stages (AMP1 and AMP2) in thechopper drive that functions with the Balzers piezo CLA and the amplifier stage (AMP3) in the OC 421 de-

chopper. When the CLA 400 is used in combination with termine the post amplification (GAIN) for the set up.

an electrometer measurement amplifier and the Each amplifier stage can be set to ×1 or ×10.OMG 421 mass spectrometer, the above measurements Three 'overrange' comparators used in conjunction whhcan be made' a software algorithm detect any electrometer overdrive

and / or if there is are one or several amplification sta-ges. Overdrive at amplifier stage AMP3 is detected so-lely by the software,

with TMS softwareEP 112

iCLA 400 i QC 421

with TMSCMP1 CMP2 CMP3 software

OVRT - OVR2 VR3 + OVR4

ELM AMPE AMP1 AMP2 AMP3

x1/x10 i x1/x10 p= fx x1/x10 fp = vet ×1/x10

10 6/10 /10 -a ret

RANGE GAIN=AMP1×AMP2×AMP310¯5/10¯6/10¯Y/10¯B/10¯ /10-10 xl/×10/x100/x1000

Signal flow for the CLA 400 -- QMS 421 set up

80 Measuring with the OMS 421 QMS421gg.opm

EIALZERS

NOTE: If a stage in the amplification chain is over- Changing the multiplexer channeldriven, this usualy also affects subsequent When the multiplexer channel is changed, the setting de-amplifier stages, fined under <filam> and <ion src> for the original

in the event of an overdrive condition, the parameter channel is stored. After this, the settings for the newname shown on the CS 421 console is marked with an channels are loaded and the multiplexer switches to thearrow (e.g. «AMP2t»). Red LED's on the CLA 400 indi- new measuring unit.cate an overdrive condition,

In the event of an overdrive condition, the QMS 421outputs 'Overrange' for the measured value.

The limit frequency setting for low pass filter LP2 ismade on the QMS 421, the setting for LP1 is fixed.

Bandpass filter BP and the phase fine adjustment is madefrom the front panel of the CLA 400

Lati6,7.3 Quadrupolemultiplexer (OMU)

The QMU 112 quadrupole multiplexer allows up to eightmeasuring units to be operated with a single control unit(refer to Appendix C).

The filaments can be preheated individually (i.e. only theactive filament selected with <detect> «QMU-CH») orin parallel (refer to operating instructions [23]). The pre-heating function allows the filament to be kept hot duringthe time it is not being used for measurement. Thisavoids the type of incorrect measurements made due todegassing when the ion source is tumed on shortly be-fore measurements are made,

BT NOTE: The filament selection cannot be madefor individual measuring units, it mustbe made for all units at the same time.In the same way all other settings suchas «RANGE», «SEM», etc. affect all themeasuring units.

Operation

Refer to the data in the operating instructions for theQMU 112 [23].Set the OMU to re- Switch on QMU to <REMOTE>mote operation

QMS configuration <config> «SYSTEM» «OPTION»:

«OMU»

Select multiplexer <detect> «QMU-CH» :«O» ... «7»

channel (the<channels> and<operation> func-tions affect thismeasuring unit)An overview is <emiss>given of the current (the LED for the active channeltype of filament flashes)operation for all themeasuring units

QMS gg.opm Measuring with the OMS 421 81

ISALIERS

6.7.4 Extemal input 6.8 Measurement sequence<detect> «TYPE» :

«EXTERN» --> as for 420 The GMS 421 / OMS 421C is a sequential multichannet(measured value output as for Fix Bange) measurement unit.

Select the type of measurement cycle suited for yourapplication under <cycle> «MODE» from the

400 <operation> function group.6.7.5 Degas operation The measurement cycle is started I stopped with

<run/halt>. The current operational status is indicatedOptimize the emission current limit value for Degas ope on the <mono>, <multi> and <halt> LED's.ration («D-PROT»). The emission is tumed off immedia-tely if this value is exceeded: You can select various external controis under <cycle>

a) Tum the emission off.«TRIG».

The number of measurement cycle repeats is selected<filam> (LED <filam> dark) under <cycle> «CYCLES».

b) Set the limit to a typical value.

<ion src> «D-PROT» , according to the QMA test 6.8.1 Haftreport

The measurement cycle is stopped. The OMS 421c) Tum on the Degas function. measures in »SAMPLE« mode at the selected channel, at

<ion src> «CTRL»:

«START» the selected mass (<mass> «MASS» or «FIRST») and atthe selected speed (<mass> «DWELL» or «SPEED»).

and acknowledge this step by pressing the L key.The switching functions are inactive in the »halt« state

d) If the «Emission error» message appears, increase the (off).limit in steps of 0.1 A. Turn the Degas function offand on again after each step. The measured value output at test socket <mon> and

any AO channel assigned to the selected measurement

CAUTION: If the limit value is abnormally high, channel continue to function normally,

there could be an error situation inthe ion source, vacuum or in the 6.8.2 Single channel operation (mono channel)control unit. Find out and correct thereason for the high current to pre- Selecting single channel operationvent damage to the filament.

<cycle> «FUNCT» : «CYCLE» andNOTE: During Degas operation, the RF signal (RF <cycle> «MODE» : «MONO»

and DC) in the RF generator is set to O V.

n this type of operation, the QMS 421 only measuresaccording to the channel indicated under <select>. Ameasurement is started I stopped with <run/halt>.

This type of operation has the advantage that differentmeasurement jobs can be carried out as required. It is

not necessary to constantly enter parameters when theyare stored in various channels according to the appiica-tion.

6.8.3 Multichannel operation (multi channel)

Selecting multichannel operation

<cycle> «FUNCT» : «CYCLE» and<cycle> «MODE»

:«MULTl»

82 Measuring with the OMS 421 OMS421gg.opm

E9ALZERS

The OMS 421 has 64 measurement channels which can CAUTION: Group together the measurement jobsbe programmed with different parameters and for diffe" with the same range of measurementrent types of operation as required. In multichannel ope and program them in sequential measu-ration, all those channels between <cycle> «BEGIN» rement channels. This will increase theand «END» are worked through sequentially. lifetime of your electrometer preampli-It is a good idea to check each measurement channel in. fler,tended for multichannel operation in single channel ope-ration before beginning cycle measurements. After this 6.8.3.1 Settlinghas been done, all that is left is to optimize the measu-rement cycle speed (cycle time). When the detector type is not defined as either

«PIRANI», «PENNING» or «A-lNPUT», <cycle>The measurement cycle time comprises the measure- «FUNCT» :«SETTL» can be used to call the auxiliaryment and transient times (pause) for all the measurement

. function for investigating the transient behavior for achannels mcluded in the cycle.channel switchover in multichannel operation. This car-ries the transient process from the previous channel over

Working out the pause time irtto the selected channel so it influences the transient.

behavior of that channel. This visualization allows you toThe pause time is calculated by the control unit takmg. ,

optimize the pause time I calibration factor <amplif>the following critena mto consideration: «PAUSE» «P-CAL».- Electrometer range of measurement- Filter time constant- Transient time for the RF generator -- previous ---++---selected channel

channel- Voltage changes for the SEM- Detector switchover

(Faraday - SEM, Chopper Lock-in on -off, changing <mon> a,

the QMU channelL and <AO>connectorsThe calculated pause time is displayed under <amplif>

«PAUSE». It can be adjusted individually by the userfrom the same menu under the «P-CAL» parameter.

IElP NOTE: The minimum pause time is 1 ms. It cannotbe set lower than that with calibration fac, <sync> A

tor 0.0. connector Pause

When the measurement channel is changed, the unpro-cessed signal for that channel not set to »SKIP« thatimmediately preceeded the current selected channel is

output as the measured value. During the pause time,the measurement signal is sampled periodically (ma×.every 0.1 ms) and output. This allows the transient be-havior to be observed on an oscilloscope via the monitor

An auxiliary function is available under <cycle> output or recorded via the analog output.«FUNCT»

:«SETTL» to optimize the pause time (refer to The <sync> output signal for the quadrupole controller

the following section). (OC 421) triggers the oscilloscope each time the selec-ted channel is started. Trigger the negative flank to ana-The time for the entire measurement cycle is also calcu-lyze the transient behavior at a channel change.lated by the control unit and indicated under <cycle>.The pause time can be adapted to the transient behavior

---- by modifying the value for the «P-CAL» parameter(optimization).

When the pause time has elapsed, further measurementsare made and the results filtered by the moving averagefunction before the values are output. It is best to triggerthe positive flank to show the DWELL values on the

-------- oscilloscope. The measurement results are presented inthis way during the measurement, allowing the time

ET NOTE: To keep the measurement cycle time as entered for «DWELL» to be analyzed and optimized.

short as possible, program those channelswith the same type of detector, the sameSEM voltage and identical measurernentrange sequentially in groups,

OMS421gg.opm Measuring with the QMS 421 83

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6.9 Simulation

A simulated spectrum for air (see illustration below) isavailable to allow you to run a function test of your con-trol unit. When this function is activated with the<config> «SIMUL»

: «INTERN» entries, the entire signalpath can be checked (e×ample),

This simulation can be used for all types of scan, but theend user is restricted in the types of detectors that canbe used. Only «FARAD» and «SEM» can be used with<config> «SIMUL» : «lNTERN».

6.9.1 Simulating a troubleshooting operation

Some tests can be carried out very easily using theSimulation function:

- Test of the entire signal path from Mass-DAC to ADC- Test of the switchover ×1/×10 by simulating a small

peak (such as mass 17) at «RANGE» 10 6 and 10

Simulated spectrum for air IE1P NOTE: The spectrum is repeated periodically from mass 64whereby the peaks at mass 800, for example, are alsosimulated.

84 Measuring with the OMS 421 GMS421gg.opm

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7. Technical data

7.1 General

When nothing is indicated to the contrary, the followingapplies for ali OMS 421 / OMS 421C assemblies.

Permissible temperatureStorage -40 °C

... + 65 °C

Operation + 5 °C... + 40 °C

Relative humidity max. 80% up to + 31 °C,dropping to 50% at + 40 °C

Use only indoorsRoom height up to 2000 m NN

7.2 Basic unitChassis slots

total 17free max. 9

max. 14

Possible expansion At 421 16 channels max. 1 (1 slot)modules Di 420 32 bits max, 2 (1 slot)

(refer to sections DO 420 32 bits max. 3 (1 slot}2.2.1 to 2.2.4) HV 420 max. 1

(2 SI°16)HV 421 (3 slots)

Pi 42O 2 measurement max. 1 (1 slot)channels

PE 420 1 measurement max. 1 (1 slot)channel

Power

Voltage 110 / 220 VAC ±20%Frequency 50 to 60 Hz

Power consumption max. 480 VA

Fuses F1, F2 110 VAC: 8.0 A slow blowing, 250 V,e5×20 mm

220 VAC: 4.0 A slow blowing, 260 V,ø5 × 20 mm

Type of protection IP 30 (protection from foreign bodies > 2.5 mmno protection against water)

Safety *) built according toIEC 348 / DIN VDE 0411 Part 1 / 10.73DIN VDE 0411 Part 1a / 2.80Protection class 1

Interference protection *) according to VDE 0843 Part 4

Noise protection *) according to VDE 0871 Limit value class B

according to FCC Rules Part 15 Subpart J

Class 8*) when test has been passed

OMS421gg.opm Technical data 85

BALZERS

Dimensions 19" rack module, 4 heigh units,365 mm installation depth

------400 mm ---

177 mm

482 4 mm

Weight 9.8 kg (with console and quadrupole control-ler, without any expansion pc boards)

7.2.1 Console

DisplaysMain display 4-line LCD, 40 characters per line, supertwisted,

LED background lighting

Status displays 5 LED's, green

7.2.2 Quadrupolecorttroller

7.2.2.1 Measurementoperation (Cycle)

Number of measurement 64channelsOperating modes 2 (mono, multi)Measurement cycles 1 ... 10'000, repeat

Time to change measurement min, 0.5 mscycles (in single and multi- typ, 0.8 mschannel operation) max. 2 ms

Transient time (pause time) min. 1 ms

Mass scale resolution(Fractions I mass)

Mass range ... 1024 '/16 u at «SPEED» 0.5 ms/amu and 1 malamu*/32 u at «SPEED» 2 mslamu and 5 mslamuIles u at «SPEED» 2 10 ms/amu

Mass range 2048 1/16 u at «SPEED» 0.5 malamu and 1 ms/amu1/32 u at «SPEED» 2 2 mslamu

7.2.2.2 lon detection

Electrometer operation

Measurement speed

<mass> «MODE» : «SAMPLE» O,5 ms ... 60 s

<mass> «MODE» : «STAIR»<mass> «MODE» : «SCAN-x» 0.5 mslamu ... 60 slamu<mass> «MODE» :

«PEAK-x»

Range of measurement

10 6... 10 12 A (F.S.R) with EP 112 electrometer preamplifier

86 Technical data OMS4210g.opm

Measured value resolutionRange of measurement

<mass> «MODE» : «SAMPLE»1 ×10 ... 1×10 " A

<mass> «MODE»;

«STAIR»<mass> «MODE»

: «SCAN-x»1 ×10 ... 1

×10-16 A<mass> «MODE» : «PEAK-x»

Measured value resolutionreferenced to<detect> «TYPE»

:«FARAD»

<mass> «MODE»:

«SAMPLE» 9,9999 . , 0.0001 (5-place)<mass> «MODE» : «STAIR»<mass> «MODE» : «SCAN-x» 9.999 ... 0.001 (4-place)<mass> «MODE»

:«PEAK-x»

Analog measured value filterType Two-stage lowpass filterFilter time constant automatic (compare «FILTER» parameter

in section 5.2,5), or

fixed in one of the following possiblesteps18 µs, 85 µs, 400 µs,1, I ms, 8 ms, 40 ms, 180 ms, 800 ms

Filter step response

Tea 'fes : Filter time constant (83% of Vatati

t, - 4 x7 : Filter transient time for

±1%o of Vstat

lon counting operation

Measurement speed

Like the measurement value resolution, the measurement speed is a

function of the type of operation:<mass> «MODE» : «SAMPLE» 1 ms ... 60 s

<mass> «MODE» : «STAIR» 2 mslamu ... 80 slamu (bar graph scan)

<mass> «MODE» : «SCAN-x» 20 ms/amu ... 60 slamu<mass> «MODE» : «PEAK-x»

Range of measurement

1.0×10" ... 1.0×10-2 counts/s

QMs421ag.opm Technical data 87

WAL2'ERS

Measured value resolution

The measured value resolution (in counts/s) is the reciprocal valueof the measu ement time at that particular mass number.

«SPEED» <mass> «MODE» :

or «DWELL» «SAMPLE» «STAIR» «SCAN-x», «PEAK-x»

1 ms 1.0×103

2ms 6.0×102 1gygg3

5 ms 2.0 x 102 4.0 ×102

10 ms 1.0×102 2.O x102

20 ms5.0x101 1.Ox10' 3.20×103

60 ms 2.0×10' 4,0×101 1.28×103

100 ms 1,0×101 2.0×101 6.40×102

200 ms 5.0×10° 1.Ox101 3.20x102

500 ms2.0×10° 4.0×10° 1,28 x 102

1 s 1.0×10 2.0×10 6.40×101

2 s 5.0×10 1.0×10 3,20×101

Ss 2.0×10 4,0×10 1.28×10'10 s 1.O x 10 2.0 ×10 6.40 ×100

20 s 5.0×10 1,0×10 3.20×10°

60 s 1.6×10 3.3×10 1,28×10°

7.2.2.3 External input

Measurement speed

as for electrometer operation (refer to section 7.2.2 2)

Measurement range

<amplif> «GAIN» : «×1» 0 .., +10.240 V IF,S.R.)<amplif> «GAIN» : «×-1» 0 ... - 10.240 V (F.S.R.)<amplif> «GAIN» : «×10» 0 ,,, +1.024 V (F.S.R.)<amplif> «GAIN» : «×-10» O ... - 1.024 V (F.S.R.)

Measured value resolution<mass> «MODE» : «SAMPLE» 9.9999 . 0.0001 (5-place)<mass> «MODE» : «SCAN-x»<mass> «MODE»

:«STAlR» 9.999 ... 0.001 (4-place)

<mass> «MODE» : «PEAK-x»

Analog measured value filteras for electrometer operation (refer to section 7.2.2.2)

88 Technical data OMs42tag.opm

EIALZERG

7.2.2.4 lon sources

Isoo

I

Types Axial, cross beam, grid, SPM, Spec +,

Spec-

Parameter sets 4 per ion source

Potentiale V1 ... V9

EmissionStandard 0 ... 2 mADegas O , , 20 mA, 500 ... 600 V

Filament Single filament for preheat operation on «1 + 2»setting)

further data refer to operating instructions (71

LEL1Types Axial, cross beam, grid, SPMEmission

Standard 0 ... 2 mADegas O ... 20 mA, 500 ... 600 V

Filament Single filamentfurther data refer to operating instructions (1 2)

7.2.2.5 Measured data collection

Detectors, signal sources yFARAD ElectrometerSEM Secondary electron multiplierCD-SEM Secondary electron multiplier with

high voltage conversion dynodeH-SEM Potential free secondary electron

multiplierlON-CNT lon counterEXTERN Extemal analog voltagePl PiraniPE Cold cathode (Penning)Al Analog signal via Al module

FARAD ElectrometerSEM Secondary electron multiplierCH-TRON Channeltron(ON-CNT lon counterEX TERN Extemal analog voltagePI PiraniPE Cold cathode (Penning)Al Analog signal via Al module

Scan operation SCANSTAIR Bar graph scanSAMPLEPEAK Peak processing scan

Digital filter Normal Low passFIR Finite impulse ResponseAVERAGE Averaging

ûMS421gg.opm Technical data 89

ISALTERS

7.2.2.6 IntegratorIntegration range 1.17×10 ... 3.4×10Mass unit «FARAD» or «SEM» : As

«ION-CNT» : counts«EXTERN» Vs

Integration interval 50 ms

Integration time unlimited

Switching function<integ> «SETPT» i absolute switching function

Cutoff threshold range same as integration range

Cutoff reaction time <1 ms after measurement is finished(via DO 420)

7.2.2.7 Switching functionsMeasurement channels

<trip> «TYPE»:

«ABS» 2 absolute switching functionsper measurement channel

<trip> «TYPE» : «HYST» 1 hysteresis switching functionper measurement channel

Cut off reaction time <1 ms after measurement is completed(via DO 420)

Integrator refer to section 7.2.2.6

7.2.2.8 InterfacesGeneral

Measured data buffer 256 kB

RS-232-C general

Pin assignments Zeromodem connection(refer to section 7.2.2.9 and the operating in-structions (61 )

Data transmission rate 300, 1 200, 2400, 4800, 9600, 19200 bit/s,(Baud rate selectable

Transmission distance 30 m

RS-232-C ASCil formatData format ASCII, 1 start bit, 8 data bits, 1 stop bit,

no parity bit

RS-232-C binary format

Data format Binary, 'SECS-1' standard

Delay times'Time out T1' 0,5 s

'Time out T2' 1.0 s

Number of repeats'Retry count' 1 5

90 Technical data OMS421gg.opm

BALZERG

LAN interfaceProtocol ARCNETTransmission Fiber optics link

PCF fiber (glass) Type TOFC 200 OAPF fiber (plastic) Type TOFC 200

ConnectorPCF fiber Type TOCP 200 OKAPF fiber Type TOCP 200 K or TOCP 255 K

Wavelength 800 nm

Data transmission rate 2.5 MBit/s, fixBaud rate)

Transmission distancePCF fiber 1000 m max.APF fiber 5 m max.

Initialization at power on

When the OMS 421 is turned on, it sets the following interface pa-rameters:

MODE = CS 421BAUD = 2400NODE = 0

Both interfaces (RS-232-C and LAN) are open for the reception ofconfiguration data independent of the format in which they work(ASCII or binaryL

NOTE: When the control unit is operated via the interface,the interface must be the first unit to be configured.

<config> «CTRL» «MODE» : «ASCil», «BIN», «MODEM» or «LAN»<config> «CTRL» «BAUD» : required Baud rate<config> «CTRL» «NODE»

: required note for «LAN»

OMS421gg.opm Technicat data 91

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7.2.2.9 Connectorson the OC 421

<ctrl> connectorD subminiature <OMU/CLA> connector

connector, Pin assignments HD subminiature connector,9-pole, female Pin 1 GND D 15-pole, female <CP> connector

Pin 2 EXT PROT'

Pin 3 RUN IND subminiature

5Pin 4 EXT IN_ connector,

S- Pin 5 ELM OUT +1 5-pole, temale

Pin 6 GND D1 Pin 7 INT START

Pin 8 EXT IN+Pin 9 ELM OUT¯ < RS 232> connector

View to OCD subminiature

connector, Pin assignments9-poîe, male Pin i Carrier Detect

Pin 2 Received DataPin 3 Transmitted Data

<sync>, <elm>, --1 Pin 4 Data Terminal Ready<mon> and <scan> S- Pin 5 Signal Ground

connectors Pin 6 Data Set Ready

Ø 2 mm sockets- -5 Pin 7 Request To Send

Pin 8 Clear To Send- + Pin 9 Ring Indicator

view to oc

view to oc

< AO> connectorPin assignments

<OMH/ONIE> connector Pin 1 CHANNEL 1 +

D subminiature connector, Pin 2 CHANNEL 2 +

25-pole, female Pin 3 CHANNEL 3+Pin 4 CHANNEL 4 +

D subminiature Pin 5 CHANNEL 5 +connector Pin 6 CHANNEL 6+

25-pole, male Pin 7 CHANNEL 7 +

Pin 8 CHANNEL 8 +

<key> connector Pin 9 CHANNEL 9+female multipoint

1

Pin 10 CHANNEL 10 +

2.54 mm, 5-point14 Pin 11 CHANNEL 11 +

Pin 12 CHANNEL 12+Pin 13 n.c.Pin 14 CHANNEL 1--Fn 15 CHANNEL 2-Pin 16 CHANNEL 3-

<LAN> connector Pin 17 CHANNEL 4-TOSLINK TODX 294, duplex 25 13 Pin 18 CHANNEL 5-

Pin 19 CHANNEL 6-Pin 20 CHANNEL 7-

-T Pin assignment view to oc Pin 21 CHANNEL 8-T transmit Pin 22 CHANNEL 9-

R R receive Pin 23 CHANNEL 10-Pin 24 CHANNEL 11--

view to oc Pin 25 CHANNEL 12-

92 Technical data oMss21ag.opm

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7.2.2.10 Signal description

< ctrl> connector

'ELM OUT' signal Type: Analog outputSignal range: O ... ±10.24 V

Output impedance: 2 × 200 Oshort circuit proof

'EXT IN' signal Type: Analog inputSignal range: ± 10.24 VCommon mode suppression: ± 2 Vinput impedance: 2× 50 ko

'EXT PROT' Type: Digital input'INT START' Signal levet: TTL'RUN IN' signals Pull up resistor: 4.7 kO to + 5 V

<sync>, <etm>, <mon> and <scan> connectors

<sync> connector Type: Digital outputSignal level: TTLOutput impedance: >1 kO

<scan> connector Type: Analog outputSignal range: 0 . . + 10.24 V

Output impedance: 2 × 200 O

short circuit proof<elm> Type: Analog output<mon> connectors Signal range: O ... ±10.24 V

Output impedance: 2 x 200 O

short circuit proof

< AO> connector

Signal 'CHANNEL xx' Type: Analog outputSignal range: O ... ±10,24 V

Output impedance: 2× 200 O

short circuit proof

OMS421gg.opm Technical data 93

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8. Error messages, Troubleshooting

8.1 Service and repair

If maFfunctions occurring in either in the QMG or its in-dividual components cannot be corrected using the fol-Iowing information and the troubleshooting tables in theoperating instructions, you must contact your nearestBalzers Service organization or send your unit to their of-fices for repair, giving exact details on the malfunction.

8.2 Information on operation

Some manipulations cause messages to be displayedwhich do not allow the requested operation because cer-tain conditions have not met,

8,3 WamingsWarnings have top priority in the status fields. They aredisplayed there for for approx, ten seconds.

8.3.1 Wamings on the CS 421 console

Nr. Warning Meaning, comments

1 ** OP ERROR ** Operator error, illegal entry2 ** † ONL Y A ** Parameter can only be changed with

, ,and i

3 ** > MAX ** Entry higher than the maximum value4 ** < MIN ** Entry lower than minimum value

5 ** SYNTGIX !** Incorrect format

6 ** REMOTE !** Unit set to remote operation

7 ** CH SKIP ** Selected channel under <aux> «STATE» set to «SKIP»

8 ** EXTERN !** Control by external signal

9 ** HflROWARE ** Necessary hardware not configured

10 **ENTER DHLY** Confirmation only possible with

8.3.2 Wamings from the OC 421 quadrupole controiterO¯¯l

Lut)Nr. Warning Meaning, comments

17 ** NO HU ** No HV 420 or HV 421 high voltage supply configured

18 ** NO IS ** No IS 420 ion source supply configured

19 **CAHNOT DEG** <ion src> «MODE»:

«DEGAS» not possible for <ion src> «FILAM»:

«1 + 2»

20 ** NO AUTO ** <ion src> «FILAM» : «1 + 2» not possible for <ion src> «MODE»:

«DEGAS»

21 ** DHLŸ F1 ** Only one filament available

22 ** BUFFER ** Buffer management not ok

94 Error messages QMs421eo.opm

ALZERS

8.4 Error messages

The message «ERROR ll» is shown in the display when anerror occurs. The type of error can be queried in the ¯ ¯¯¯¯ ¯

<general> function group using the <error> function,

8.4.1 Error messages from the CS 421 console

Nr. Error Meaning, comments

2 Comm. error from CS to QC No answer from QC

3 Console stack overflow4 Console idle error Console operating system overloaded

7 Console watchdog error Watchdog timer overflow14 Display RAM defect15 Console EPROM defect Check sum <> set point16 Console RAM defect

8.4,2 Error messages from the QC 421 quadrupole controner

LELJ LaJNr. Error Meaning, comments

17 GMS Contr. stack overflow1 8 Beset error Reset circuit defective

19 GMS Contr, watchdog error Watchdog timer overflow20 OMS Contr. EPROM defect Check sum <> set point

21 GMS Contr. NOVRAM defect Parameter memory defective

22 OMS Contr. dual port RAM defect Access malfunction to OMS controller

23 OMS Contr. buffer RAM defect Measured data memory defective24 DSP EPROM defect Check sum < > set point

25 DSP dual port RAM defect Access malfunction to signal processor

26 Monitor-DAC error For testing purposes only

27 Resolution-DAC error For testing purposes only

28 AO-DAC error For testing purposes only

29 ADC error For testing purposes only

33 OMS Contr. idle error QMS controller operating system overloaded

34 SEM error HV 420 / HV 421 SEM high voltage supply overloaded ordefective

35 CD error HV 421 CD high voltage overloaded or defective36 lon source error IS 420 voltage vi ... v9 <> set point

37 Filament 1 defect Only possible with IS 420

38 Filament 2 defect Only possible with IS 42039 Emission error Emission < > set point

40 CAN error CAN controller malfunction

41 Parameter lost Wrong values in NOVRAM (dead battery)

QMS421aa.opm Error messages 95

ISAI.ZERS

Nr. Error Meaning, comments

42 Comm. error from OC to CS No response from console43 Comm. error OMS Contr. - DSP Dual Port RAM communication44 Comm, error on LAN LAN interface communication error

45 Comm. error on RS-232-C RS-232-C interface communication error

4.6 RF error QMH 400 / QMH 410 warrn up phase or malfunction

47 Integrator, Intensity < I-UGND integrator value < measured background

8.5 TroubleshootingOPM = operating instructions

8.5.1 General malfunctions

!-ILaaJProblem Possible cause Correction

ERR 36: fon source error 1S 420 lon source supply ovedoaded or Proceed according to the OPM for thedefective 1S 420 lon source supply [7]

ERR 46: RF error QMH 400 / OMH 410 warm-up phase Wait until the generator has had time towarm up (10, 11]

RF generator malfunction Proceed according to the OPM for the RF

generator [10, 11]

ERB 34: SEM error HV 420 / HV 421 SEM high voltage sup- Proceed according to the OPM for theply overloaded or defective HV 420 [81 or HV 421 (9|

ERR 35: CD error HV 421 CD high voltage unit overloaded Proceed according to the OPM for theor defective HV 421 [9]

ERR 37: Filament 1 defect Filament defective Proceed according to the OPM for the

ERR 38: Filament 2 defect IS 420 [7]

Break in the connection Proceed according to the OPM for theIS 420 [7]

ERR 47: Integrator: Intensity is lower than the current back- Retecord background according to sec-Intensity < I-UGND ground value tion 5.2.5

(<cycle> «FUNCT»: «FUGND»L

96 Error meSSages OMS421gg.opm

E9ALZERS

Problem Possible cause Correction

ERR 39: Emission error Protection responded Restart emission (py,,,, <10 mbar)

If the protection responds again, adjustis according to section 5.1.4.

Cabling not ok Check according to Appendix B

Analyzer filament burned out (an intact fi- Replace filament according to the OPMlament has approx. 1 O at its contacts) for the OMA 400 [15)

losulation error in the analyzer (good fila- Kurzschluss gemess BAL des Analysa-ment insulation has >100 MO compared tors OMA 400 beheben [15]to the other connectors)

No electrometer signal în spite Cabling not ok Check according to Appendix B

of the scan and sensitive No ion signal from analyzer Jiggle the electrometer cable.measuring range

If the display reacts, the error is in theanalyzer. If not, troubleshoot for othercauses.

Emission too low Increase emission current(<emiss> «EMISS»)

For analyzers with SEM: No high voltage Turn on the high voltage(<sem>)

For analyzers with SEM: High voltage too Increase the high voltagelow (<detect> «SEM» for high voltages de-

fined by measurement channels,<sem hv> «SEM-VOLTAGE» for highvoltages not defined by measurementchannels)

Field a×is voltage too low Increase the field axis voltage(<vi...v6> «F-AXIS» or «V4»)

Resolution too high <mass> «RESOL» :«OFF».

It there is now an electrometer signal,decrease the resolution according to theOPM for the RF generator [10, 11]

Wrong parameter set for this ion source Correct the ion source parameters ac-cording to the test report and the re-commendations in the OPM for theQMA 400 (15](<vl. .v6> und <v¯/...>)

No measurement value signal Response threshold too high Decreae the response thresholdin ion counting operation (<amplif> «CP-LEV»)

QMS421eo,opm Troubleshooting 97

BALZERS

|400

Problem Possible cause CorrectionElectrometer signal is negative EP1 and EP 2 electrometer cables are mi- Make correct cable connections accor-

xed up ding to Appendix B

Electrometer offset is depen- Loose ground connection (coaxial cable, Correct ground connectiondent on the mass number connector plate)

RF shielding in the analyzer under the pconnector plate is not connected o' DANGER: Turn off mains power

Attach shielding according to the OPMfor the OMA 400 analyzer 115]

The electrometer signal is not The electrometer offset has not been ad- Adjust offset as described in sectionzero although the emission and justed (offset for sensitive measurement 5.1.3the high voltage are turned off ranges)

High level of interference in the analyzer Protect analyzer and electrometer from(zero point rises with sensitive measure- heatment ranges and low filter time constants)

Increase the filter time constant(<amplif> «FILTER»}

Leakage current in the analy2er (well insu- Clean connector and feedthroughs ac-lated collector to ilange is >>1 GO) cording to the OPM for the OMA 400

analyzer [15]

Correct insulation error according to theOPMfortheOMA400 [15]

Condensed water in the electrometer or Carefully dry the electrometer and ana-the analyzer connector lyzer flange with hot air (not over 60 °C)

The electrometer offset can only be adju-sted for less sensitive ranges

Unsatisfactory peak shapes Poor ion source insulation in the analyzer Clear or replace the ion source insulators

Unsatisfactory sensitivity (good insulation is >100 MO) according to the OPM for the OMA 400analyzer [1 5]

lon source or rod system in analyzer dirty Clean according to the OPM for theor defective QMA 400 analyzer [15)

SEM dirty or defective Replace SEM

Peaks become wider / narrower incorrect setting <RESOLUTION coarse> according toas the mass number increases the recommendations in the OPM for the

OMH 400 or OMH 410 RF generator110, 11\

The QMH 400 / OMH 410 The cable is litted with an old-version Use an adapter (see section 10.1)cable cannot be plugged into connector (interlock}the OC 421

98 Troubleshooting OMS421o.opm

ESALZERS

Problem Possible cause CorrectionERR 39: Emission error The protection has responded Restart the emission (pTotal <104 mber)

If the protection responds again, adjustit according to the OPM for theOME 125 l12)

Cablingnot ok Check according to Appendix C

Filament in the analyzer bumed out (good Replace filament according to the OPMfilament has approx. 1 O at the connec- for the OMA 125 analyzer (161tors)

Insulation error in the analyzer (good fila- Correct short circuit according to thement insulation >100 MO to the other OPM for the OMA 126 analyzers (16)connectors)

No electrometer signal in spite Cabling not ok Check according to Appendix C

of scan and sensitive measu¯No ion signal from analyzer Jiggle the electrometer cable

ring rangeIf the display reacts, the error is in theanaly2er. If it does not react, continuetroubleshooting.

Emission too low Adjust emission current according to theOPM for the QME 125 quadrupole elec-tronics [1 21

For analyzers wíth SEM: No high voltage Turn on the high voltage(<sem>)

For analyzers with SEM: High voltage too increase the high voltagelow (<detect> «SEM» for high voltages de-

fined by the measurement channel;<sern hv> «SEM-VOLTAGE» for highvoltages not defined by the measure-ment channel)

Fuse F1 on the HV board has blown Replace fuse [12]

Field axis voltage too low Increase the field axis voltage accordingto the OPM for the OME 125 quadrupoleelectronics [12] and the OMA 125analyzer (16]

Resolution too high <mass> «RESOL»:

«OFF».If there is now an electrometer signal,adjust the resolution according to the re-commendations in the OPM for theQME 125 quadruple electronics !121. If

there is no signal, continue troubleshoo-ting.

No measured value is output in Response level set too high Reduce response levellon counting operation (<amplif> «CP-LEV»)

Electrometer signal is negative The <polarity> switch on the OME 125 Set the <polarity> switch to < + >

quadrupole electronics is set to <-> [12]

The electrometer zero point is Loose ground connection (coaxial cable, Make correct ground connectiondependent on the mass number connector plate)

RF shielding in the analyzer undemeath /the connector plate is not connected L... DANGER: Tum off mains power

Attach shielding according to the OPMfor the OMA 125 analyzer [16)

QMS421gg.opm TrOUbleshooting 99

IBALZERE


The electrometer signal is not The electrometer offset has not been ad- Adjust offset as described in 5.1.3zero although the emission and justed (offset for sensitive measurementthe high voltage are tumed off ranges)

High levet of interference in the analyzer Protect analyzer and electrometer from(zero point rises with sensitive measure- heatment ranges and low filter time constants)

increase the filter time constant(<amplif> «FiLTER»)

Leakage current in the analyzer (good Clean connector and feedthroughs ac-irisulation collector-to-flange is >>1 GO) cording to the OPM for the OMA 125

analyzer [16]

Correct insulation error according to theOPM for the QMA 125 (16]

Condensed water in the electrometer or Carefully dry the electrometer and ana-the analyzer connector lyzer flange with hot air (not over 60 °C)

The electrometer offset can only be adju-sted for less sensitive ranges

Unsatisfactory peak shapes Low Emission (0.1 mA), emission cannot Clean or replace the insulators according

Unsatisfactory sensitivity be adjusted on the OME 12S to the OPM for the QMA 125 analyzer[16]

Poor ion source insulation in the analyzer Clean or replace the ion source insula-(good insulation is >100 MO) tors according to the OPM for the

OMA 125 analyzer [16]

lon source or rod system in analyzer dirty Clean according to the OPM for theor defective OMA 125 analyzer [16]

SEM dirty or defective Replace SEM

Peaks become wider / narrower Do fine adjustment Adjust <resolution> according to theas the mass number increases recommendations in the OPM for the

QMA 125 [12]

100 Troubleshooting OMS42100,opm

BALZEFm

8.5.2 Malfunctions in the control unit

L±eJ LeJGeneral malfunctionsProblem Possible cause Correction

The unit doesn't work: The The system is set to a different mains Convert the control unit according to Ap-fans aren't running and there power than the local power supply pendix G

is no display

Apparatus fuses F1, F2 responded Replace fuses (4,0 AT for 220 VAC, 8,0AT for 110 VAC)

Power cable defective Replace power cable

Power supply defective Contact Balzers Service

Short circuit caused by extemal unit Unplug external unit and repair short cir-cult

Fans are running but there is The display contrast is out of adjustment Adjust the contrast with the Ñ andno display keys

The fans are running but there The CS 421 was not properly retrofitted Convert using the conversion set and itsis no reaction when keys are enclosed installation instructionspressed

The OC 421 quadrupole controller was Install the quadrupole controller accordingnot propedy installed to section 3.3.1

There is a display on the con- The system control is set to interface Switch the system control to consolesole, but no reaction when operation operationkeys are pressed (<config> «CTRL» «MODE» . «CS 421»)

ERR 41; Parameter lost Battery in parameter memory is dead Contact Balzers Service for replacement

ERR 26: Monitor-DAC error

ERR 27: Resolution-DAC error These test routines require additional hardware and are only for use by BALZERS

ERR 28: AO-DAC error service personnel

ERR 29: ADC error

L±~ J La.]Communication errors


ERR 2: from CS to OC GC 421 quadrupole controller defective Contact Balzers Servîce for replacement

CS 421 console was not properly retrofit- Convert using the conversion set and itsted enclosed installation instructions

ERR 42: from OC to CS There is no CS 421 console configured Retrofit console (see section 10.1 forconversion set)

CS 421 console defective Contact Balzers Service for replacement

CS 421 console was not property retrofit- OC 421 quadrupole controller defectiveted

ERR 43: OMS Contr. - DSP OC 421 quadrupote controller defective Contact Balzers Service for replacement

ERR 44: on LAN Data transmission error Check interface connection and interface

ERR 45: on RS-232-C parameters and correct if necessary

OMs421eg.opm Troubleshooting 101

BALZERS

OMS ControllerProblem Possible cause Correction

ERR 17: stack overflow OC 421 quadrupole controller defective Contact Balzers Service for replacement

ERR 18: Reset error

ERR 19: watchdog errot

ERR 33: idle errorERR 40: CAN error

ERR 20: EPROM defect <config> «TEST» «QMS»:

«EPROM-T» Contact Balzers Service for replacement

ERR 23: NOVRAM defect <config> «TEST» «QMS» : «RAM-T»ERR 22: dual port RAM defect <config> «TEST» «OMS» : «RAM T»

ERR 23: buffer RAM defect <config> «TEST» «OMS» :«RAM-T»

\4coldConsole


ERR 3: stack overflow CS 421 console defective Contact Balzers Service for replacement

ERR 4: idle error

ERR 7: watchdog error

ERR 14: Display RAM defect Contact Balzers Service for replacement

ERR 15: EPROM defect <config> «TEST» «CS»:

«EPROM-T»

ERR 16: RAM defect <config> «TEST» «CS» :«RAM-T»

EL La]Signal processor


ERR 24: EPROM defect <config> «TEST» «DSP»:

«EPROM-T» Contact Balzers Service for replacement

ERR 25: dual port RAM defect <config> «TEST» «DSP» :«RAM-T»

fon source supplyProblem Possible cause CorrectÍon

ERR 36: lon source error The IS 420 ion source supply is over- Correct according to the OPM for theloaded or defective iS 420 [7]

102 TrLb slooting OMs421oa.opm

BALZERS

9. Maintenance

9.1 Periodic maintenance

9.1.1 Control unit

The OMS 421 / OMS 421C has lateral openings for ven-ting purposes. When the unit is not housed in a controlcabinet, the filters must be cleaned from time to time.The interval must be determined according to the opera-ting conditions.

9.1.2 Periphery components

Note the information on maintenance given in the opera-ting instructions for the particular unit (see Appendix J).

OMS42100.opm Maintenance 103

BALZERS

10. Spare parts, accessories

10.1 Control unitOrder number

QMS 421 basic unitChassis, bus, 220 VAC power supply BG 442 350 -TChassis, bus, 110 VAC power supply

QC 421 quadrupole controllerwithout options BG 442 290 -Twith AO 421 analog output BG 442 280 -Wwith JC 421 lon counter and analog output BG 442 281 -W

OptionsAO 421 analog output BG 442 328 -TIC 421 ion counter with analog output BG 442 320 -T

D subminiature connector, complet, 9-pole, female(supplied with the OC 421) BG 442 377 -T

D subminiature connector, complet, 25-pole, female(supplied with the AO 421 and IC 421) BG 442 378 -T

Gold plated laboratory connector, ø2 mm B 4711 152 MAInsulator for laboratory connector, red B 4711 152 N2Insulator for laboratory connector, black B 4711 152 NZ

AB 021 connection box for AO 421 analog output option BG 442 360 -T

CS 421 console BG 442 340 -TCS 421 C dummy front panel BG 442 345 -TConversion set OMS 421C --> OMS 421 (without CS 421 console) BG __ _

-T

Dummy backplate for one slot position BG 544 776 -T

Apparatus fuse F1, F24,0 AT, 250 V, e5 x 20 mm (for 220 VAC) B 4666 4488,0 AT, 250 V, ø5 x 20 mm (for 110 VAC) B 4666 454

O subminiature adapter, 25-pole,male (screw coupling) - female (sliding coupling) B 4720 787 CD

Cover, legs (pair) BG 544 054 -T

10 2 Expansion unitsOrder number

lon source supply IS 420 BG 512 900 -T

SEM high voltage supply HV 420 BG 546 040 -T

SEM tpigh voltage supply HV 421 BG 442 250 -T

Analog Input At 421 BG 442 240 -T

Digital input DI 420 BG 512 830 -T

Digital Output DO 420 BG 512 840 -T

Pirani module PI 420 BG 512 715 -T

Cold cathode module PE 420 BG 512 726 -T

Adapter for StMS applications AS 420 BG 574 695 -T

Adapter for PLASMAapplications AP 420 BG 574 577 -T

Please refer to the appropriate operating manual for the order numbers for additio-naf components (see Appendi× J)

104 Spare parts, accessories QMS421gg.opm

BALZERS

10.3 Power connection cableOrder number

5 M Power cableSwiss standard Type 432 2,5 m B 4564 309 YPSchuko DIN Type 436 2,5 m B 4564 309 YTUSA Type 439.1 2,5 m B 4564 309 YWUK, GB Type UD 13 Al 2,5 m B 4564 309 YZ

Europa apparatus connector (for fabricating individual power cables) B 4707 193 AA

oMss21ag.opm Spare parts, accessories 105

BALZERE

Appendix

A: ConfigurationsFirst determine the measurement range required, thenselect the analyzer accordingly. The following table tellsyou which RF generator is suited for your analyzer.

EBOMass Analyzer RF generatorrange

OMA 400 OMA 410 OMA 430 OMH 400-1 OMH 400-5 OMH 410-1 OMH 410-2 OMH 410-30 ... 128 * *

O ... 3000 ... 340 *

O ... 512 *

O ... 1024 * *

O ... 2048

Mass Analyzer Quadrupole electronicsrange

OMA 125 OME 125-1 OME 125-2

O ... 200 * *

Analyzers can be equipped with different ion sources anddetectors. The combination of ion source and detectordetermines the types of operation possible, Control unitsfor analyzers equipped with an SEM must contain an HVmodule.

ISAL2'ERG

LeJB: System cabling81: Electrometer operation

Analyzer with Faraday detector

A

1

Analyzer with Faraday and standard SEM

QC421 IS420 HV420 ------

NOTE: When an HV 421 is used instead of an HV 420, *) see test reportthe <HV+ > connector must be fitted with a

shorting plug. The <CD> connector remains open.

BAUCERS

Analy2er with standard SEM with high vokage conversion dynodes (CD-SEM)

2 20 ---

H .> FA

EP

CD

*) see test report* *) when no electrometer is connected

B2: lon counting operation

with standard SEM for positive ions (possible also with Faraday)

QC421 IS420 HV42(I ,---QMH

MA.

QC

HV+

6

EP112

EP FA

£3P NOTE: When an HV 421 is used instead of an HV 420, *) see test reportthe <HV+ > connector must be fitted with a **) when no electrometer is connectedshorting plug. The < CD> connector remains open.

BALIERS

with potenial free SEM for positive and negative ion detection (possibley also with Faraday)

2 HV

HV-QC

/ 2 HV+HV-

6

EP 112

EP'

FA

*) see test report**) when no electrometer is connected

B3: Cable overviewConnection nr. Purpose Cable length Order number

1 lon source supply 3 m BG 548 082 -T

lon source supply 10 m BG 548 083 -T

2 SEM high voltage 3 m BG 541 978 -T

SEM high voltage 10 m BG 541 979 -T

3 Control cable 3 m

4 Control cable extension 7 m BG 448 175 -T

5 RF line 0,7 m BG 541 960 -T6 Field axis 0,7 m BG 541 962 -T7 Electrometer signal 0,8 m

8 Electrometer input 0,1 m BG 548 152 -T

Electrometer input 0,5 m BG 548 153 -T

9 lon counter cable 3 m BG 448 134 -T

10 Shorting plug - 8 4728 891 BS

AOS

EIALZERG

EOc: System cablingC1: Electrometer operation

Analyzer with Faraday

CIC 421

QME 125

l-

- en HV-

EP 112

QMA 125

Analyzer with Channeltron

CIC 421

HV

EP112

110 Appendix QMS421gg.opm

mAt.zget

Analyzer with 90° SEM

a) Faraday operation

QC421

QME 125

QME

4

3EP112

EP

QMED

QMS421gg.opm Appendix 111

EIALZERS

C4: Using the QMU 112 and QMN 112

For long cable distances; several measuring units

QC 421 QMtJ 112

QME

CS: Cable overview

Connection no. Purpose Cable length Order number

1 )Communicati cable 100 m BG 448 171 -T

2, 3 )Control cable (cable set) 1,5 m BG S74 688 -T

4 Communication cable 30-200 m on request5 Control cable 3 m BG 548 729 -T

") Use connections 2 and 3 instead of connection 1 in conjunctionwith the QMU 112.

114 AppendiX QMS421ggspm

EIALZERS

D: Default parameter values

D1: <channels> -Parameter

Parameter Function Default value Your settingsAl-CH <detect> 0

AMP1 <amplif> x1

AMP2 <amplif> ×1AMP3 <amplif> x 1

AO-CH <output> NONEAO-MODE <output> LINAVERAGE <mass> 1

CALIB <amplif> 1,000 EO

CHECK <aux>COPY TO ALL <au×>COPYTOXX <aux> 0

CP-LEV <amplif> 0,00 V

DO-A <trip> OFF

DO-B <trip> OFF

DO-I <integ> OFF

DWELL <mass> 1 slamuFILTER <amplif> AUTOFIRST <mass> 0,00GAIN <amplif> x1

INTEGRATOR <ioteg>LEVEL-A <trip> 1,00 E-6

LEVEL-B <trip> 1,00 E-5

LOCK-IN <detect> OFF

LOG-DEC <output> 3 DECMASS <mass> 18,00MODE <amplif> FIXMODE <mass> SCAN-NMONITOR <output> LINOFFSET <amplif> 0,00O-RNG <output> E-1

P-CAL <amplif> 1,0PE-CTRL <detect> OFF

PHASE <detect> 0°

PFCH <detect> 0

QMU-CH <detect> 0

RANGE <amplif> E-5

RANGE-L <amplif> E-9

RESOL <mass> 50SEM <detect> SEM-HVSETPT <integ> OFF

SPEED <mass> 1 slamuSTATE <aux> ENABLE

THRESH <mass> 10 %F.S.TRIG <integ> INTERN

TYPE <detect> SEMTYPE <trip> OFF

WIDTH <mass> +16

QMsongo,opm Appendix 115

EIALZERS

D2: <general> -Parameter

Parameter Function Default value Your settings

BAUD <config> 2400 Bit/sDETECT <config> SEMOlG-IN <di/do>DIG-OUT <di/do>IS-TYP <config> CB

MASS-R <config> 512MODE <config> CS 421NODE <config> O

OPTlON <config> NO

OMA <config> 400SEM+ FIL <config> INTERN

D3: <ion source> -Parameter

Parameter Function Default valle Your settirgsAxial CB Grid SPM Spec+ I-

E-PROT <emiss> 4,00 A 4,00 A 4,00 A 4,00 A 4,00 A

EMISS <emiss> 1,00 mA 1,00 mA 1,00 mA O,SO mA 1,00 mA

V1 <vi...v6> 90 V 90 V 90 V 40 V OVV2 <v1...v6> 70,0 V 70,0 V 70,0 V 40,0 V 0,0 V

V3 <v1...v6> + 20,0 V + 20,0 V 0,0 V 0,0 V 0,0 V

V4 <vl...v6> 15 V 15 V 15 V 3 V OVV5 <vt..v6> 0 V 250 V OV 0 V OVV6 <vi...v6> 300 V 300 V 300 V 110 V OVV7 <v7...> 0 V OV OV 0 V OVV8 <v7...> 0 V 0 V 0 V OV 0 V

VS < v7...> 30 V 0 V 0 V 30 V 0 V

116 AppendiX OMS421gg.opm

D4: <operation> -ParameterParameter Function Default value Your settingsADJ-TYP <cycle> COARSEBEGIN <cycle> 0

COPY TO SET <ion src> SET 0

CYCLES <cycle> REPEATD-EMIS <ion src> 10,0 mAD-PROT <ion arc> 3,00 A

D-TIME <ion src> 10 minEND <cycle> 63FILAM <ion src>

1

FIL1 <ion arc> O

FIL2 <ion arc> 0

FUNCT <cycle> CYCLEMODE <cycle> MONOMODE <ion arc> NORMALSEM-VOLTAGE <sem hv> 1500 V

TRIG <cycle> INTERNTYPE <ion src> xxxxx

OMs421eo opm Appendix 117

EilALZERS

E: AdjustE1: Status messages for coarse search

The status message consists of five bits with thefollowing significance:

Intensity Mass number entered for «MASS»

Bit 4 Bit 3 Bit 2 Bit 1 Bit O

11111I I i

O = mass number entered is ok1 = «MASS» is too low +

0 = mass number entered is ok1 = «MASS» is too high +

0 mass number entered is ok1 = Intensity not reduced to 2/a, «MASS» too low +

O = Intensity inside the allowed range1 = Intensity out-of-range (higher or lower than F.S.) 4·

O = Intensity inside the allowed range1

= Intensity lower than selected level †

118 Appendix OMes21eo

BALZERE

Examples of status messages with corresponding intensity/mass number

Status: OK 00000 Status: + 00001 Status: + 00010 Status: + 00100Peak intensity --- imes -

I I

«MASS» «MASS» «MASS»Peak mass

Correction; increase Correction: Decrease Correction: Increase«MASS» «MASS» «MASS»

Status: 4 01000 Status: 4 + 01001 Status + + 01010 Status: 4 + 01100F.S. - F.S - - F.S. F.S. -

«MASS» «MASS» «MASS» «MASS»

Correction: Increase Correction: Increase Correction: Increase Correction; lacrease«RANGE» «RANGE», «RANGE», «RANGE»,

increase decrease increase«MASS» «MASS» «MASS»

Status: † 10000 Status: + 10001 Status: + 10010 Status: † + 10100

Level--------- Level--------- -------- Levd Level--- ----

Imax -- Imax --

%Imax -- ------ -- ¾lmax -

II

I I

«MASS» «MAss» «MASS» «MASS»

Correction: Decrease Correction: Increase Correction: Decrease Correction: Decrease«RANGE» or «MASS» «MASS» «RANGE» or«THRESH» «THRESH»,

increase«MASS»

QMs421eg.opm Appendi× 119

EIALZERE

E2: Status messages for fine adjustment

The status messages also consist of five bits, in contrastto the coarse search, no statement can be made aboutthe selection of the mass number entered. Thus Bits 1

and 2 are always zero:

Intensity Mass number entered for «MASS»

Bit 4 Bit 3 Bit 2 Bit 1 Bit O

I I

O = Peak recognized1 = no Peak found within the defined search range + +

0 = Intensity within the allowed range1 = intensity out-of-range (higher or equivalent than F.S.) &

O = Intensity within the allowed range1 = Intensity lower than the selected level †

Examples of unsuccesful Adjust runs(Status: + + 00001)

Status: OK 00000Peak found, Adjust successful

Status: + + 00001No peak found, but intensity ok

Status: & 01000Peak found, but intensity out-of-range

Status: 4 + + 01001No peak found, intensity out-of-range

Status: † 10000Peak found, but intensity lower than selectedlevel

Status: † + + 10001No peak found, intensity lower than selected LB

Ievel /

120 Appendix OMS421gg.opm

BAL EERS

F: Installing / removing options in and from theQC 421

Proceed as follows to add an option to your OC 421, orto change the option already in it:

- Be sure the unit has been disconnected from the powersupply

- Disconnect the cable from the OC 421- Loosen the fixation screws and pull out the QC 421- Depending on the type of option being installed,

remove the appropriate connector cover on the OC 421- Mount the option as shown in Figure 1

- Plug in the ribbon cable

- Push the OC 421 back into the chassis and tighten thefixation screws

- Reconnect the cable to the OC 421 Fig 1

OMs42toa.opm Appendix 121

ESALZERG

G: Converting the unit for other mainspowers

FiglIf your control unit is set for operation at a power ratingother than that of your local power supply (information 2

on the nameplate), convert the unit for your powersupply as follows:

- Make sure that the unit is disconnected from the powersupply

- Unscrew the cover and floor panels (Fig. 1)

- Unscrew the front panel and unplug the ribbon cable(Fig. 2)

- Remove the terminal cover in the power supply (Fig. 3)

- To convert 220 V --> 110 V: Insert jumperTo convert 110 V --> 220 V: Remove jumper (Fig. 4)

- Remount terminal covern

- Plug in the ribbon cable, remount the front panel andscrew it down Fig 2

- Remount and screw ín the cover and floor panels

- Replace fuses F1 and F2220 V -> 110 V: 4.0 A slow blowing ->

8,0 A slow blowing110 V -> 220 V: 8.0 A slow blowing ->

4.0 A slow blowing

- Change the safety labels on the back panel † †2.

- Change the nameplate on the back panel

press

Fíg.4

122 Appendix oMs421gg.opm

E3ALZERE

H: GlossaryFunction: Grouping together of several

parameters. Called directly withkey command.

Function group: Grouping of several parameters.Fraction: Smallest resolvable subunit for a

mass. Dependent on the massrange and it 1/64 amu.

Mass range: Measurement of all massesdefined for the selectedmeasurement channel,

Measurement cycle Mass scan across all the(Cycle): measurement channels defined

for <cycle>.Parameter: Characteristic element or factor.Parameter set: As used in the colored sections

of these operating instructions:The possible settings forparameters defined as settings.

Parameter values: As used in the calored sectionsof these operating instructions.The values that can be assignedto parameters that can bedefined with values. Called witha softkey after a function hasbeen selected.

Selected measurementchannel (selectedchannel}:Softkey: A key whose function changes

according to the definition in themenu currently shown.

Unprocessed signal,unprocessed data:

OMemog.opm Appendix 123

ISALZERS

J: Bibliography

[1] Technological information (10] Operating instructionsPartial pressure measurement in vacuum technology OMH 400-1 / -5 RF GeneratorBG 800 169 PE Edition: 8907 BG 800 273 BE T st edition: î 1.1986Bal2ers Limited, 9496 Balzers, Balzers Limited, 9496 Balzers,Principality of Liechtenstein Principality of Liechtenstein

[2] Product leaflet [11\ Operating instructionsOMG 421 Ouadrupole mass spectrometer QMH 410-1 / -2 / -3 RF GeneratorBG 800 256 PE Edition: 9203 Preliminary editionBalzers Limited, 9496 Balzers, Balzers Limited, 9496 Balzers,Principality of Liechtenstein Principailty of Liechtenstein

EBO Eäil E20[3] Catalog sheet [12l Operating instructíons

OMG 421 Ouadrupole mass spectrometer QME 125 Quadrupole electronicBK 800 ### PE Edition: 92## BG 800 325 BE Edition: 2,1990Balzers Limited, 9496 Balzers, Balzers Limited, 9496 Balzers,Principality of Liechtenstein Principality of Liechtenstein

(4 Operating Instructions [13\ Operating InstructionsOMG 421, OMG 421C Quadrupole mass EP112 Electrometer preamplifierspectrometer BG 800 239 BE 1st edition: 7.1986BK 800 170 BE 1st edition: 4.1992 Balzers Limited, 9496 Balzers,Balzers Limited, 9496 Balzers, Principality of LiechtensteinPrincipality of Liechtenstein

EBO EBO400 i (14) Operating instructions

(6] Operating instructions CP 400 lon counter preemplifierOMG 421, OMG 421C, OMG 4211 Ouadrupole BG 800 354 BE 1st edition: 8.1990mass spectrometer Interfaces Balzers Limited, 9496 Balzers,BK 800 173 BE 1st edition: 2,1992 Principality of LiechtensteinBalzers Limited, 9496 Balzers, 400Pancipality of Liechtenstein

(1 5] Operating instructionsQMA 400 / 410 / 430 Analyzer

(7) Operating instructions BK 800 127 BE 2nd edition: 6.1989IS 420 lon source supply Balzers Limited, 9496 Balzers,

BG 800 269 BE 1st edition: 10.1986 Principality of LiechtensteinBalzers Limited, 9496 Balzers,Principality of Liechtenstein

[16] Operating instructionsOMA 125 Analyzer

[8] Operating Instructions BK 800 153 BE 2nd edition: 12.1991HV 420 SEM High voltage supply Balzers Limited, 9496 Balzers,BG 800 230 BE 2nd edition: 11.1985 Principality of LiechtensteinBalzers Limited, 9496 BalzersPancipality of Liechtenstein

[17] Operating InstructionsCLA 400 Chopper Lock in amplifier

(9) Operating Instructions BK 800 162 BE 1st edition: #.1992HV 421 SEM High voltage supply Balzers Limited, 9496 Balzers,BK 800 177 BE 1st edition: 2,1992 Principality of LiechtensteinBalzers Limited, 9496 Balzers,Principality of Liechtenstein

(18) Operating InstructionsAt 421 Analog loputBK 800 178 BE 1st edition: 1.1992Balzers Limited, 9496 Balzers,Principality of Liechtenstein

124 Appendix OMS g

BALZERG

ŒO LeJ[19] Operating Instructions

DI 420 Digital loputBG 800 186 BE 4th edition: 12.1991Balzers Limited, 9496 Balzers,Principality of Liechtenstein

[20] Operating InstructionsDO 42O Digital OutputBG 800 187 BE 3rd edition: 12.1991Balzers Limited, 9496 Balzers,Principality of Liechtenstein

ULJ LaJ[2]

IOperating instructionsPl 420 Pirani moduleBG 800 182 BE 2nd edition: 1.1990Balzers Limited, 9496 Balzers,Principality of Liechtenstein

LEJE¯±]

[22] Operating InstructionsPE 420 Cold cathode moduleBG 800 183 BE 2nd edition: 1.1986Balzers Limited, 3496 Balzers,Principality of Liechtenstein

Oil[23] Operating instructions

OMU 112 Ouadrupole multiple×erBG 800 208 BE 3rd edition: 1.1988Balzers Limited, 9496 Balzers,Principality of Liechtenstein

GMs421gg.opm Appendix 125

BALZERS

K Stichwortverzeichnis<mass> 23

A <output> 22<run/halt> 30

Accessories 104 <select> 20Additional modules see EXPANSIONUNITS 2gAdjustments < sem>

Electrometer offset 18 <trip> 22Emission current limit value 18 <v1..,v6> 26

Aligning < v7,..> 27Ouadrupole electronics 18 Function groups 11, 19

<channels> 20, 115<general> 24, 116

Bibliography 124 <ion source> 26, 116<operation> 28, 117

C Fuses 85

Cable see SYsTEM CABLINGI

Cabling see SYSTEM CABLING

CAUTION see SAFETY INFORMATION Information on operation 94

Configuration 17, 106 Initial start up 17

Connector Installation

<AO> 10, 92, 93 Expansions 9

<ctrl> 10, 92, 93 Installing in a rack 10

<elm> 92, 93 Options 121

<LAN> 10, 92 Periphery components 10

<mon> 92,93<RS 232> TO, 92 N<scan> 92, 93 Mains power connection 9, 17, 85<sync> 92, 93 Maintenance 103Mains power see MAINS POWER CONNECTION Malfunctions

Contrast 16 general 96

DMeasure-Display seeDisPLAYModules see EXPANSlONUNITS

DANGER see SAFETY INFORMATIONDetault parameter values 115 NDisplay 14, 86 NOTE see SAFETY INFORMATION

E O

Error messages 95 Operating modeExpansion units 9, 85, 104 PEAK 64Explanation of symbols 5 SAMPLE 63

SCAN 63

Options 9, 104

Function<amplif> 21<aux> 21 Parameter 115<config> 24 «ADJ-TYP» 32<cycle> 29 «Al-CH» 32<detect> 20 «AMP» 32<di/do> 24 «AMP1» . «AMP3» Parameter «AMP» 32<emiss> 26 «AO-CH» 33<error> 2S «AO-MODE» 33<filam> 29 «AVERAGE> 33<integ> 23 «BAUD» Parameter «CTRL» 35<ion src> 28 «BEGIN» 34

126 AppendiX OMS421pg.opm

EIALZEREi

«BIT» Parameter «DIG-OUT» 37 «NEXT» Parameter «DIGAN» 37«CALIB» 34 «NEXT» Parameter «DIG-OUT» 37«CATH» see «V2» «NODE» Parameter «CTRL» 36«CLEAR» 34 «O-RNG» 48«CLEAR» Parameter «OlG-OUT» 37 «OFFSET» 48«COPY TO ALL» 35 «OFFSET» Parameter «TEST» «SERVICE» 57«COPY TO CH» 34 «OPTION» Parameter «SYSTEM» SS«COPY TO SET» 35 «P-CAL» 49«CP-LEV 35 «P-CAL» Parameter «PAUSE» 49«CS 421» Parameter «TEST» 56 «PAUSE» 49«CTRL» 35, 36 «PE-CTRL» 49«CYCLES» 36 «PHASE» 49«D-EMIS» 36 «POS» Parameter «TEST» «SERVICE» 57«D-PROT» 37 «PRG-NR» Parameter «TEST» «CS 421» 56«D-TIME» 37 «PRG-NR» Parameter «TEST» «DSP» 56«DEF-l» see «V6» «PRG-NR» Parameter «TEST» «QMS» 57«DETECT» Parameter «SYSTEM» 54 «QMA» Parameter «SYSTEM» 55«DIG-IN» 37 «OMS-HW» 50«DIG-OUT» 37 «OMS» Parameter «TEST» 57«DISP-T» Parameter «TEST» «CS 421» 56 «OMU-CH» 50«DO-A», «DO-B> 38 «OMU/CLA» Parameter «TEST» «SERVICE» 57«DO-I» 38 «RAM-T» Parameter «TEST» «CS 421» 56«DSP» Parameter «TEST» «RAŒtT» Parameter «TEST» «DSP» 56«DWELL» 39 «RAM-T» Parameter «TEST» «OMS» 57«E-PROT» 39 «RANGE-L» 50«EMI-CUR» 40 «RANGE» 50«EMISS» 40 «RANGE» Parameter «AMP» 32«END» 40 «RESET» Parameter «lNlT 44«EPROM-Tu Parameter «TEST» «CS 421» 56 «RESOL» 51«EPROM-T» Parameter «TEST» «DSP» 66 «RS-232» Parameter «TEST» «SERVICE» 57«EPROM-To Parameter «TEST» «QMS» 57 «SELF», «SELF/CH» Parameter «TEST» «SERVICE»57«EXTRACT» see «VS» «SEM+ FIL» Parameter «CTRL» 36«F-AXIS» see «V4» «SEM-VOLTAGE» 52

«F.S.+», «F.S. -» Parameter «TEST» «SERVICE»57 «SEM» 51

«FIL1», «FIL2» 41 «SERVICE» Parameter «TEST» 57«FILAM» 41 «SET» Parameter «DlG-OUT» 37«FILTER» 42 «SETPT» 52«FILTER» Parameter «TEST» «SERVICE» 57 «SIMUL» 52«FIRST» 43 «SPEED» 53«FOCUS» see «V3» «STATE» 53«FUNCT» 43 «SYSTEM» 54«GAIN» 43 «TEST» 56«INIT» 44 «THRESH» 58«INTEGRATOR» 44 «TRIG» 58, 59«lONSEF» see «V1» «TYPE» 59, 60«lS-TYP» Parameter «SYSTEM» 54 «V3» ... «V9» 61

«KEY-T» Parameter «TEST» «CS 421» 56 «WEHNELT» see «V9»«LAN» Parameter «TEST» «SERVICE» 57 «WIDTH» 62«LEVEL-A», «LEVEL-B> 45 Parameters 31«LOCK-IN» 45 Periphery components 10«LOG-DEC» 46

Power connection cable 105«MASS-R» Parameter «SYSTEM» 55«MASS» 46 Program version 56, 57

«MODE» 46, 47S«MODE» Parameter «CTRL» 35

«MODE» Parameter «TEST» «SERVICE» 57 Safety information«MONITOR» 48 NOTE, CAUTION, DANGER S

«NEG» Parameter «TEST» «SERVICE» 57 Setup-Display see BlSPLAY«NEXT» 48 Slots 85

QMS421gg.opm Appendix 127

ERALTERS

Softkeys 16

Spare parts 104Standard parameters see DEFAULT PARAMETER VALUES

System cablingCable overview 109, 113, 114Electrometer operation 107, 110lon counting operation 108, 113Using the QMU 112 and QMN 112 114

System overviewExpansion units 8Options 8

System components 6

T

Technical data 85Test sockets

<elm>, <mon>, <scan>, <sync> 10Troubleshooting

control unit 101

V

Version of programm 5

W

Warnings 94

128 Appendix OMs421go,opm

EBALZERS

Balmora AkilongemellschaftFL-0498 BolrorsFùtslentum LiochtonsteinTalO75}44\11Tolox089786bvailTolofn|O75)427S1

Printed in Machtensmin Products et (Meers AG. DettereSpecifËcations subloci to ¢hango without notice

qmg quadrupole mass spectrometers qmg 421c control …... «test> «qms» «prg-nr» bg 509...

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