on the growth of rare earth doped liyf4 thin film by pulsed laser
TRANSCRIPT
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Dr. M.Anwar-ul-Haq
On the growth of rare earth doped LiYF4thin films by pulsed laser deposition
Prof. Paola BicchiDr. Stefano Barsanti
Department of Physics,University of Siena, Italy
Department of Physics, University of Sargodha,
Pakistan
International Scientific Spring at NCP from March 01-06, 2010
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Layout of the presentationIntroduction
Experimental setup
Conclusions
Thin filmsPulsed Laser Deposition (PLD)
ResultsNd3+:LiYF4 thin films
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Development of rare earth (RE) ions-doped LiYF4
(YLF) fluoride thin films with characteristics suitable for their use as active medium in micro-lasers sources in the 1-2 μm, via Pulsed Laser Deposition (PLD)
Materials used
Aim of the research workIntroduction
SubstratesSubstrates Pure mono-crystalline YLF
TargetsTargets RE ions- doped mono-crystalline YLF
Nd3+ or Tm3+
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Why thin film in micro-laser area? [1,2]Introduction
[2] C. L. Bonner, A. A. Anderson, R. W. Eason, D. P. Shepherd, D. S. Gill, C. Grivas and N. Vainos, Opt. Lett. 22 (1997) 988[1] D. B. Chrisey and G. K. Hubler, (Eds.), Pulsed laser deposition of thin films, John Wiley, New York (1994)
The removal of the heat in excess from the active media
Maximizes the interaction zone between pump and active media
Enhancement of the confinement of the radiations
Reduction of the lasing threshold
The realization of active optical devices in film shape would magnifies all advantages of the micro-lasers systems by favoring;
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Thin Films [3]
Growth Mechanism [4]
on a suitable substrate or on previously deposited layers
Dimensions from fractions of a nanometer to several micrometers in thickness
Realization
[3] K. Wasa, M. Kitabatake and H. Adachi, Thin film materials technology: sputtering of compound materials, Springer, Heidelberg (2004)[4] A. Rockett, The materials science of semiconductors, Springer, New York (2007)
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Major ways of thin films growth [5]Thin films
Volmer-Weber growth(Island growth)
Stranski-Krastinov growth(mixed growth)
Frank-van de Merwe growth(layer by layer growth)
[5] J. A. Venables, G. D. T. Spiller and M. Hanbucken, Rep. Prog. Sci. 47 (1984) 399
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Liquid Phase EpitaxyThermal EvaporationSputtering
Molecular Beam EpitaxyChemical Vapour DepositionIon Implantation
Pulsed laser deposition
Ejection of materials from the target by highly energetic laser pulses, with subsequent deposition/condensation on a suitable substrate
[1] D. B. Chrisey and G. K. Hubler, (Eds.), Pulsed laser deposition of thin films, John Wiley, New York (1994)
Thin film growth techniques [1]Thin films
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Typical PLD experimental setup
Interaction of the photons with the target causes material ejection via a thermal and / or electronic process
The ablated plume is a mixture of energetic particles such as atoms, molecules, electrons, ions, sub-microns or micron-sized solid particles and molten globules
[6] P. R. Willmott and J. R. Huber, Rev. Mod. Phys. 72 (2000) 315
Pulsed Laser Deposition (PLD) [1,6]Thin films
[1] D. B. Chrisey and G. K. Hubler, (Eds.), Pulsed laser deposition of thin films, John Wiley, New York (1994)
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laser external to the ablation/deposition chamber,
flexibility of the experimental set-up,
possibility of getting thin films of almost any kind of material,
deposition can be performed either in vacuum or in presence
of a controlled background atmosphere
stoichiometry in the film can be maintained,
films growth rates can be controlled,
multiple layer films can be grown,
deposition on substrates kept at any temperature, is possible
[7] J. Schou, Appl. Surf. Sci. 255 (2009) 5191
[6] P. R. Willmott and J. R. Huber, Rev. Mod. Phys. 72 (2000) 315
Advantages of PLD [6,7]Thin filmsPLD
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Crystals doped with rare earth Laser sources in IR
Disadvantages Sensitive to thermal shocks even for slow thermal gradient and to OH¯ radical contamination during growth even a few ppm
OxidesFluorides
Lower phonon energy
Stronger emission cross sectionsAdvantages of fluorides over oxides [8, 9]
Films of RE ions-doped fluorides
Excellent optical properties + Benefits of thin film[8] A. A. Kaminskii, Laser Crystals, Springer-Verlag, New York (1981)
[9] C. Garapon, S. Guy, S. Skasasian, A. Bensalah, C. Champeaux and R. Brenier, Appl. Phys. A 91 (2008) 493
Why fluorides?Thin filmsPLD
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Weight
Chemical Formula
Properties of YLF crystal [11]
Monoaxis (a, c)Crystallographic axis
no = 1.4485ne = 1.4708Refractive Indexes
3.99 g/cm3Density
0.12- 7.3 µmTransparency
5.07 MohsHardness
819°CMelting Point
TetragonalCrystal Structure
171.8 amu
LiYF4
Unit cell of YLF [10]
Substrate mono-crystalline YLF
Radius ~ 4.7 – 7.2 mm
Thickness ~ 2 mm
[11] R. L. Aggarwal, D. J. Ripin, J. R. Ochoa and T. Y. Fan, J. Appl. Phys. 98 (2005) 103514
[10] E. Garcia and R. R. Ryan, Acta Crystallogr., Sect C 49 (1993) 2053
Substrate materialExperimental
setup
YLF Crystal
Experimental setup
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2.1 x10201.5
1.4 x10201
Nd3+
N (cm-3)Concentration (at. %)Dopant
Target crystals
NdNd3+3+:LiYF:LiYF44 (Nd:YLF)(Nd:YLF)
Radius ~ 4.7 – 7.2 mm, Thickness ~ 3 mm
Target materialsExperimental
setup
The YLF and Nd:YLF mono-crystals used during our PLD experiments were either grown by the NEST growth facility in Pisa or provided by a commercial supplier (VLOC, USA).
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Ablation setup Deposition setup
Film growth systemExperimental
setup
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LaserLaser
PlumePlume
ShutterShutter
Rotating Rotating target holdertarget holder
Substrate heaterSubstrate heater//holderholder
Heater Heater ConnectionsConnections
Photos of the UHV chamberExperimental
setup
Auxiliary Auxiliary viewportsviewportsVacuum gaugesVacuum gaugesGas valveGas valve
Laser entrance Laser entrance windowwindow
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Knudsen layerAdiabatic expansion
Heated substrate
PLD processExperimental setup
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Film in-situ analysisExperimental setup
Realization of the film growth
To verify the presence of the rare earth ions in the film
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CCD camera photo of the Nd:YLF films Experimental
setup
The film was deposited with laser fluency of 10 J/cm2 in 1 Pa of He atmosphere at a substrate temperature of 650 °C.
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Determining the kind of film deposited
To determine if the orientation from the substrate to the film has been transferred
Surface quality
Concentration of Nd³+ ions present
Film ex-situ characterisationsExperimental setup
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Simplified level scheme Absorption curve
Simplified level scheme and absorption curve for Nd:YLF [12,13]Experimental
setup
[13] J. R. Ryan and R. Beach, J. Opt. Soc. Am. B:Opt. Phys. 9 (1992) 1883
[12] A. A. S. da Gama, G. F. de Sa, P. Porcher and P. Caro, J. Chem. Phys. 75 (1981) 2583
• The fluorescence profiles of Nd3+-doped YLF crystals depend on they being recorded with E || or E ⊥ to the crystal c-axis [13].
• The Nd3+ 4F3/2 manifold lifetime is concentration dependent in such a way that lower concentrated samples manifest a higher lifetime and vice versa [13].
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Setup for the ex-situ characterizationExperimental
setup
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Results
Ablation in vacuum
Ablation in 1 Pa of He
Plume analysisResults
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Plume analysisResults
• The expansion velocities of the plume species were found reduced in presence of 1 Pa of He.
• Both in vacuum and in 1 Pa of He, the expansion velocity of most of the plume components saturates beyond 8 J/cm2.
• In vacuum, all the plume species were focused along the target normal except lightest neutral Li, which was found to point preferentially at 16° to the target normal.
• In presence of 1 Pa of He, Li and all other plume species were focused along the target normal.
• The FWHM of the angular distribution curves of the plume components was found reduced in 1 Pa of He compared to the similar measurements done in vacuum and gave indication of the confinement of the plume in the presence of 1 Pa of He.
• Ablation threshold in vacuum for all the species was found to be 1.7 ± 0.3 J/cm2 with exception of Li for which 0.7 ± 0.3 J/cm2.
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Plume shape
(a) Vacuum (b) 1 Pa of He
Results
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Nd:YLF thin filmsResults
PLD in vacuum
PLD in 1 Pa of He
Low (4 J/cm2) and high (10 J/cm2) laser fluency
Deposition at Ts = 650°C
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High fluency (10 J/cm2)
Deposition conditionsLaser wavelength 355 nm
Laser fluency 10 J/cm²Ablation time 20’
Repetition rate 10 Hz
Laser Pulse duration 13 ns
Target Nd:YLF 1.5% at.
Substrate YLF
Vacuum 1 1 ××1010--44 PaPa
Target-substrate distance 35 mm
Temperature of the substrate 650°C
Results• Vacuum - Ts=650°C
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Heating/cooling cycle of the substrate for film depositionResults• Vacuum - Ts=650°C
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Films in-situ analysis
Realization of the film
Presence of Nd3+ ions in the film
Portion of the LIF spectrum following 355 nm excitation, recorded in the Nd:YLF bulk crystal and from a film grown in vacuum with 10J/cm2 laser fluency.
Example of interference pattern producedby a film deposited in vacuum
Results• Vacuum - Ts=650°C
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Films ex-situ characterizations
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4F3/2 → 4I11/2
Unpolarized, normalized, fluorescence spectra
λλexcexc = 806.6 nm= 806.6 nm
4F3/2 → 4I9/2
Crystalline Nd:YF film
Results• Vacuum - Ts=650°C
[14] S. Barsanti, F. Comacchia, A. Di Lieto, A. Toncelli, M. Tonelli and P. Bicchi, Thin Solid Films 516 (2008) 2009
From Ref. [14]
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Life time measurement of the 4F3/2 manifold
Film deposited at Ts=650°C in vacuum with Fl = 4 J/cm2 [14]
Film deposited at Ts=650°Cin vacuum with Fl = 10 J/cm2
τFilm = 242 ± 5 μs
τTarget = 464 ± 2 μs
[14] S. Barsanti, F. Comacchia, A. Di Lieto, A. Toncelli, M. Tonelli and P. Bicchi, Thin Solid Films 516 (2008) 2009
Results• Vacuum - Ts=650°C
Nd:YF film
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Deposition in presence of 1 Pa of He
Deposition parameters
85’Ablation time4 J/cm²Laser fluency
355 nmLaser wavelength
10 HzRepetition rate
13 nsLaser Pulse duration
35 mmTarget-substrate distance
650°CTemperature of the substrate
1 Pa of He1 Pa of HeBack ground atmosphere
YLFSubstrate
Nd:YLF 1.5% at.Target
Results• 1 Pa of He - Ts=650°C
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Unpolarized, normalized, fluorescence spectra
λλexcexc = 806.6 nm= 806.6 nm
4F3/2 → 4I11/24F3/2 → 4I9/2
Crystalline Nd:YLF film
Inhomogeneous
Results• 1 Pa of He - Ts=650°C
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Average Nd3+ ion concentration in the film greater than in the target
Concentration of Nd3+ ions in the film
Single exponential decay
τFilm average = 437 μs
τTarget = 464 ± 2 μs
4F3/2 manifold lifetime
λλexc exc = 806.6 nm
Variation from point to point ~ ± 10%
Results• 1 Pa of He - Ts=650°C
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Volmer-Weber growth
Morphological analysisResults• 1 Pa of He - Ts=650°C
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Deposition conditionsLaser wavelength 355 nm
Laser fluency 10 J/cm²Ablation time 20’
Repetition rate 10 Hz
Laser Pulse duration 13 ns
Target Nd:YLF 1.5% at.
Substrate YLF
Back ground atmosphere 1 Pa of He1 Pa of He
Target-substrate distance 35 mm
Temperature of the substrate 650°C
High fluency (10 J/cm2)Results• 1 Pa of He - Ts=650°C
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Unpolarized, normalized, fluorescence spectra
λλexcexc = 806.6 nm= 806.6 nm
Crystalline Nd:YLF film
4F3/2 → 4I9/24F3/2 → 4I11/2
Homogeneous
Results• 1 Pa of He - Ts=650°C
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Optical analysis Optical analysis ⎪⎪⎪⎪ and and ⊥⊥ to to cc--axisaxis
4F3/2 → 4I9/24F3/2 → 4I11/2
The transition of interest for the possible lasing action was favored in the film as much as in the bulk.
Results• 1 Pa of He - Ts=650°C
4F3/2 → 4I9/24F3/2 → 4I11/2
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Optical analysis Optical analysis ⎪⎪⎪⎪ and and ⊥⊥ to to cc--axisaxis
The global spectral intensity, in both the emissions is higher when E || to c-axis with only exception of
2//
867863
867||863|| ≈⎟⎟⎠
⎞⎜⎜⎝
⎛
⊥⊥ FilmIIII
3//
arg867863
867||863|| ≈⎟⎟⎠
⎞⎜⎜⎝
⎛
⊥⊥ etTIIII
Transition 4F3/2→ 4I9/2
The spectral profile in the film and in the bulk changes in the same way in shifting the polarization from E || to E ⊥to the c-axis.
Results• 1 Pa of He - Ts=650°C
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Optical analysis Optical analysis ⎪⎪⎪⎪ and and ⊥⊥ to to cc--axisaxis
The only mismatch
( ) 2.1arg10471053 ≈etTII
Transition 4F3/2→ 4I11/2
The spectral profile in the film and in the bulk remains the same in shifting the polarization from E || to E ⊥ to the c-axis.
( ) 2.110531047 ≈FilmII
Some features compatible with a considerable if not complete transfer of orientation from the substrate
to the film
Results• 1 Pa of He - Ts=650°C
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Concentration of Nd3+ ions in the film
Single exponential decay
τFilm = 468 ± 5 μs
τTarget = 464 ± 2 μs
4F3/2 manifold lifetime
τTarget = τFilm
λλexc exc = 806.6 nm
Same Nd3+ ion concentration in the film and the target
Results• 1 Pa of He - Ts=650°C
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Morphological analysis
Mixed growth
Results• 1 Pa of He - Ts=650°C
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Conclusions
In fact in this case:
• The grown film was a crystalline Nd:YLF film.
• It was homogeneous.
• It showed some spectral features compatible with a consistent, even if not complete, transfer of the substrate orientation to the film.
• The concentration of the dopant ions was transferred from the bulk to the film.
• It had a rather good surface quality
The best film produced which showed promising optical qualities to reach the goal of this project was the Nd:YLF one obtained in 1 Pa of He with a laser fluency of 10 J/cm2, when Ts was 650°C.
We succeeded to deposit crystalline YLF films doped with Nd3+.
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Publications1. P. Bicchi, M. Anwar-ul-Haq and S. Barsanti In: A. N. Camilleri (Ed.),
Radiation Physics Research Progress, ISBN: 978-1-60021-988-8, Nova Science Publishers, Inc., Hauppauge, NY (2008), pg. 193-217.
2. S. Barsanti, M. Anwar-Ul-Haq and R. Bicchi, Thin Solid Films 517 (2009) 2029-2034.
3. M. Anwar-ul-Haq, S. Barsanti, A. Bogi and P. Bicchi, Opt. Mat. 31 (2009) 1860-1863.
4. M. Anwar-ul-Haq, S. Barsanti and P. Bicchi, IEEE NANO 2009, ISBN:978-981-08-3694-8, (2009) 373-376.
5. M. Anwar-ul-Haq, S. Barsanti and P. Bicchi, DGaO Proceedings 2009-Http://www.dgao-proceedings.de, ISSN:1614-8436, (2009) P35.
6. A. Bogi, S. Barsanti, M. Anwar-ul-Haq, P. Bicchi, Appl. Phys. A 98 (2010) 153-159