nonpolar and semipolar iii-nitride optoelectronic materials and
TRANSCRIPT
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Nonpolar and Semipolar III-Nitride Optoelectronic Materials and Devices
Prof. Daniel Feezell Center for High Technology Materials
Department of Electrical and Computer Engineering
University of New Mexico, Albuquerque, NM – 87131
505-272-7823
D. Feezell
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Group: 3 postdocs, 8 graduate students, 1 undergraduate student, 1 MOCVD research engineer
III-Nitride Materials and Devices Group
D. Feezell
www.feezellgroup.com
MOCVD Nanofabrication
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Outline
• Introduction to III-nitride materials
• Characteristics and advantages of nonpolar/semipolar III-nitrides
• Semipolar (202 1 ) and nonpolar (101 0) InGaN/GaN LEDs
• Nonpolar/semipolar LEDs based on bottom-up selective-area epitaxy
• Polarization-pinned nonpolar vertical-cavity surface-emitting lasers
• Summary
D. Feezell
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Introduction to III-Nitrides
D. Feezell
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III-Nitride Materials
• Direct band gaps ranging from 0.7 eV (InN) to 3.4 eV (GaN) to 6.0 eV (AlN)
• Enable high-performance UV, violet, blue, and green emitters
• Robust against high dislocation densities (108 cm-2), thermally stable, radiation tolerant
• In general, alloys not lattice matched to GaN
D. Feezell
• Solid-state lighting
• Visible and UV lasers
• Power electronics
• Multijunction solar cells
• Radiation hard devices
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• Two interlaced hexagonal close
packed (HCP) lattices
• Horizontal planes of Ga atoms and
N atoms
• Each unit cell contains 2 Ga atoms
and 2 N atoms
• Bonding in GaN is 60% covalent
with 40% ionic character
GaN Crystal Structure (Wurtzite)
D. Feezell
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Select GaN Crystal Planes
D. Feezell
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Polarization in III-Nitrides
• Piezoelectric polarization (PPZ) – due to strain (e.g. – InGaN/GaN or AlGaN/GaN)
• Spontaneous polarization (PSP) – present in unstrained lattices and is due to charge asymmetry
• PPE becomes larger for higher indium contents (i.e. – green and yellow emitters)
Polarizations induce large internal electric fields (~MV/cm) which distort the band diagrams
We can use nonpolar and semipolar orientations to eliminate the effects of polarization
D. Feezell
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Characteristics and Advantages of Nonpolar/Semipolar III-Nitrides
D. Feezell
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Energy Band Diagrams for SQW Blue LEDs
𝐒𝐞𝐦𝐢𝐩𝐨𝐥𝐚𝐫 (𝟐𝟎𝟐 𝟏)
𝐒𝐞𝐦𝐢𝐩𝐨𝐥𝐚𝐫 (𝟐𝟎𝟐 𝟏 )
𝐏𝐨𝐥𝐚𝐫 (𝟎𝟎𝟎𝟏)
𝐍𝐨𝐧𝐩𝐨𝐥𝐚𝐫 (𝟏𝟎𝟏 𝟎) D. Feezell, J. Disp. Technol. 9, 190-198 (2013)
D. Feezell
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Wavefunction Overlaps for SQW Blue LEDs
3 nm In0.23Ga0.77N SQW LEDs ( 450 nm)
simulated using SiLENSe
Wavefunction overlap is strongly affected by direction and magnitude of internal electric fields
D. Feezell
D. Feezell, J. Disp. Technol. 9, 190-198 (2013)
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m-plane:
• High output power for QW widths up to 20 nm
• Pmax for QW widths of 8-12 nm
Violet LEDs: 6x MQW QW-width series
Novel Device Designs
c-plane:
• QWs 3 nm thick
• Polarization-related fields
• Decline in output power for thick QWs
K. C. Kim et al., Appl. Phys. Lett. 91, 181120 (2007).
Reduction of internal electric fields enables novel devices designs
D. Feezell
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Polarized Emission
Band structures after Scheibenzuber, Phys. Rev. B 80, 115320 (2009).
c-p
lan
e (
po
lar)
m
-pla
ne (
no
np
ola
r)
𝒀′ → 𝑬 ⊥ 𝒄
𝑿′ → 𝑬 ∥ 𝒄
𝑯𝑯 , 𝑳𝑯 = 𝑿 ± 𝒊𝒀 → 𝒖𝒏𝒑𝒐𝒍𝒂𝒓𝒊𝒛𝒆𝒅 𝒆𝒎𝒊𝒔𝒔𝒊𝒐𝒏
H. Tsujimura et al., Jpn. J. Appl. Phys. 42, L1010 (2007).
Nonpolar VCSELs are polarization pinned with E c
D. Feezell
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• QCSE reduced
• Optical matrix elements increased
• Emission anisotropic
• Optical gain increased
• Hole effective mass reduced
• Transparency carrier density reduced
• Growth and design flexibility improved
Summary of Benefits for Nonpolar/Semipolar
D. Feezell
D. Feezell and S. Nakamura, “Nonpolar and Semipolar Group III-Nitride Lasers,” in Semiconductor Lasers: Fundamentals and Applications, Edited by A. Baranov and E Tournie, Woodhead Publishing, ISBN13: 9780857091215 (2013).
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Semipolar 202 1 and Nonpolar 101 0 InGaN/GaN LEDs
D. Feezell
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Applications for III-Nitride LEDs
Solid-state lighting
Backlighting
Architectural lighting Automotive lighting
Horticulture Street lighting
D. Feezell
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White LEDs vs. Conventional Lighting
• Available >130 lm/W phosphor-converted commercial LED products
• Emerging >200 lm/W LED prototypes
• ~250 lm/W possible for phosphor converted LEDs M. Krames, CLEO (2009)
Nichia (small chip)
249 lm/W
Nichia (power chip)
183 lm/W
D. Feezell
Cree
276 lm/W
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Issues Plaguing GaN-Based LEDs
Green Gap Efficiency Droop
• Auger recombination
• Carrier leakage
• Polarization-related electric fields
• Strain
• Threading dislocations
• Indium inhomogeneity
D. Feezell
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Semipolar (202 1 ) is a promising new orientation:
• Low polarization-related electric fields
• Fields in same direction as c-plane, ¼ the magnitude
• Large wavefunction overlap for LED current densities
• Very small blue shift
• Very narrow FWHM
• Highly polarized emission
• High indium uptake for high growth temperature
Semipolar 202 1 Light-Emitting Diodes
D. Feezell
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Growth on Free-Standing GaN Substrates
• Mitsubishi Chemical Corporation
• Dislocation density < 5x106 cm-2
• MOCVD growth conditions are similar to those for c-plane on sapphire
Nonpolar/semipolar GaN substrates cut from HVPE-grown c-plane GaN boules
MQW LED
K. Fujito et al., MRS Bulletin 34 313 (2009)
D. Feezell
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*TEM image courtesy of Feng Wu
Higher growth temperature results in high-quality InGaN active regions
High Quality Blue InGaN (202 1 ) QWs
D. Feezell
C. Pan et al., Appl. Phys. Express 5 062103 (2012)
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Transparent Package
LED Structure and Process
• Top-emitting ITO-based chip
• 0.1 mm2 active area
• Patterned backside roughening
• ZnO-based transparent LED package
Y. Zhao et. al., Appl. Phys. Express 3 10210 (2010) C. Pan et. al., Jpn. J. Appl. Phys. 49 080210 (2010)
ZnO Stand
ITO-based p-contact
202 1 GaN
n-GaN
n-InGaN/GaN SL
InGaN/GaN QWs
AlGaN EBL
p-GaN
ITO Ti/Au
Ti/Au
Ti/Al/Ni/Au
Simulated Light Extraction Efficiency ~75%
D. Feezell
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Blue (202 1 ) LEDs: EQE vs. Current Density
• 0.1 mm2 active area
• Thick (12 nm) SQW active region
• ITO-based chip
𝐷𝑟𝑜𝑜𝑝 % =(𝐸𝑄𝐸𝑃𝑒𝑎𝑘−𝐸𝑄𝐸)
𝐸𝑄𝐸𝑃𝑒𝑎𝑘
35 (A/cm2) 100 (A/cm2) 200 (A/cm2) 300 (A/cm2) 400 (A/cm2)
EQE (%) 52.4 50.1 45.3 43.0 41.2
Droop (%) 0.7 5.1 14.1 18.4 21.9
C. Pan et al., Appl. Phys. Express 5 062103 (2012)
D. Feezell
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Blue (202 1 ) LEDs: LOP vs. Current Density
• 0.1 mm2 active area
• Thick (12 nm) SQW active region
• >450 mW peak output power
• ~5 chips needed for 60 W incandescent replacement
35 (A/cm2) 100 (A/cm2) 200 (A/cm2) 300 (A/cm2) 400 (A/cm2)
LOP (mW) 51.2 140.0 253.4 360.9 460.3
D. Feezell
C. Pan et al., Appl. Phys. Express 5 062103 (2012)
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• Studied IQE and carrier lifetimes in three 202 1 structures
• 12 nm total active region thickness (1x12 nm, 2x6 nm, 3x4 nm)
• 450 nm peak wavelength
Blue (202 1 ) LEDs: IQE and Carrier Lifetimes
Epitaxial Structures
Wafer 1 QW 2 QW 3 QW
141127EL 141127FL 141127DL
p/p++ GaN 110 nm (Mg = 2e19 cm-3/1.6e20 cm-3)
AlGaN EBL 10 nm (Mg = 1e19 cm-3)
GaN Barrier 12 nm (uid)
Active region 12 nm InGaN QW
6 nm InGaN QW 4 nm InGaN QW
4 nm GaN barrier
4 nm GaN barrier
4 nm InGaN QW
4 nm GaN barrier
6 nm InGaN QW 4 nm InGaN QW
GaN Barrier 12 nm (uid)
n GaN 2 μm (Si = 3e18 cm-3)
D. Feezell
S. Okur, et al., submitted to Optics Express
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Temperature-dependent and time-resolved photoluminescence
Micro-Photoluminescence (µ-PL) System
D. Feezell
~50 µm spot diameter
Collaboration with Center for Integrated
Nanotechnologies
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• Non-radiative lifetime assumed to be infinite at 10 K
• IQE maximum in the 1 x 12 nm structure
• Excitation power level accesses SRH and radiative regimes
Internal Quantum Efficiency (IQE)
D. Feezell
𝐼𝑄𝐸 = 𝐼295𝐾 𝜆 𝑑𝜆
𝐼10𝐾 𝜆 𝑑𝜆
1x1017
1x1018
102
103
104
105
106
107
LT
Inte
gra
ted
PL
In
t. (
arb
. u
nit)
Carrier Density (cm-3)
RT
X10
0 1x1018
2x1018
3x1018
0.0
0.2
0.4
0.6
0.8
1.0
400 420 440 460 480 500 520 540
0
1
2
3
4
1x12 nm
2x6 nm
3x4 nm
IQE
Carrier Density (cm-3)
Active Region
PL I
nte
nsity (
arb
. unit)
Wavelength (nm)
1x12 nm
2x6 nm
3x4 nm
S. Okur, et al., submitted to Optics Express
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0 10 20 30 4010
-4
10-3
10-2
10-1
100
PL I
nte
nsity (
arb
. u
nit)
Delay Time (ns)
1x12 nm
2x6 nm
3x4 nm
• TRPL decay fit with bi-exponential function (𝐴1𝑒−𝑡 𝜏1 + 𝐴2𝑒−𝑡 𝜏2 ) to extract PL lifetime
• Slower decay associated with carrier lifetime
• PL lifetime longest for 1 x 12 nm structure
Time-Resolved Photoluminescence
D. Feezell
22.5 µJ/cm2 0 1x10
182x10
183x10
1810
-1
100
101
1x12 nm
2x6 nm
3x4 nm
PL
Lifetim
e (
ns)
Carrier Density (cm-3)
S. Okur, et al., submitted to Optics Express
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• Similar radiative lifetime for all structures
• Longer non-radiative lifetime for thicker QWs
• Correlated with higher IQE for thicker QWs
• Related to influence of QW interface defects
Radiative and Non-Radiative Carrier Lifetimes
.
D. Feezell
𝜏𝑅 = 𝜏𝑃𝐿 𝐼𝑄𝐸 , 1 𝜏𝑃𝐿 = 1 𝜏𝑅 + 1 𝜏𝑁𝑅
100
101
102
103
0 1x1018
2x1018
3x1018
10-1
100
101
102
103
1x12 nm
2x6 nm
3x4 nm
Ra
d (
ns)
No
nR
ad (
ns)
Carrier Density (cm-3)
S. Okur, et al., submitted to Optics Express
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The Second Wave: Smart Lighting
Translational Research Testbeds
Goal: Plenoptic light field sensing • Color quality • Intensity • Direction (Light Flow) • Data
Goal: Maximize light quality and minimize energy use
Goal: Communications with Illumination (Dual Use)
Goal: Luminaires with dynamic • Brightness control • Spectral control • Beam shaping capability • Integrated data communications
Slide courtesy of Prof. R. Karlicek, RPI
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• Short carrier lifetime on nonpolar
• Micro-LEDs for large RC bandwidth
• 3 x 6 nm QWs, 15 nm barriers
• RF bandwidth characterized
High-Speed Nonpolar 101 0 LEDs
0 1 2 3 4 5 6 7 8 9 100
2
4
6
8
10
12
300 400 500 600 700
453 nm
EL
In
ten
sit
y (
a. u
.)
Wavelength (nm)
Vo
ltag
e (
V)
Current density (kA/cm2)
Lig
ht
Po
we
r (a
. u
.)
0
200
400
600
800
1000
D. Feezell
A. Rashidi, et al., submitted to Photon. Technol. Lett.
32
• Maximum 3 dB bandwidth is 524 MHz at 10 kA/cm2
• Bandwidth increases with current density but saturates due to heating and carrier escape
• Among the highest bandwidths reported for GaN-based LEDs
RF Bandwidth Characterization
10 100 1000-18
-16
-14
-12
-10
-8
-6
-4
-2
0
2
No
rma
lize
d p
ow
er
(dB
)
Frequency (MHz)
1 kA/cm2
3 kA/cm2
5 kA/cm2
8 kA/cm2
10 kA/cm2
3-dB line
(a)
0 1 2 3 4 5 6 7 8 9 10 11
300
350
400
450
500
550
3-d
B b
an
dw
idth
(M
Hz)
Current density (kA/cm3)
(b)
D. Feezell
𝑓3𝑑𝐵 ≈ 1
2𝜋
1
(𝜏𝑠𝑝2 + 𝜏𝑅𝐶
2 )1/2
60 µm diameter
A. Rashidi, et al., submitted to Photon. Technol. Lett.
33
Equivalent Circuit Model
200 400 600 800 1000
15
20
25
30
35
40
45
Re
(Z)
(Oh
ms
)
Frequency (MHz)
Real (Z)
fit
Value Standard Error
R 29.49127 0.01882
C 1.39642E-11 2.37634E-14
Rs 11.44454 0.01912
200 400 600 800 1000-14
-12
-10
-8
-6
-4
-2
0
Im(Z
)(O
hm
s)
Frequency (MHz)
Imaginary (Z)
fit
Value Standard Error
R 29.49 0
C 1.39E-11 0
L 7.87816E-10 1.83447E-12
2
2 2 2 2s
( )(1 R C )(R j L)
R j R CH
R j R C
D. Feezell
Fitting real and imaginary parts of the transfer function yields R and C
A. Rashidi, et al., submitted to Photon. Technol. Lett.
34
• LEDs are currently carrier lifetime limited since 𝑓𝑅𝐶 > 𝑓3𝑑𝐵
• Reduce active region volume to increase carrier density (𝑅𝑠𝑝 ∝ 𝑁2)
• Reduce barrier widths to increase tunneling
RC Bandwidth
0 1 2 3 4 5 6 7 8 9 10 111.0
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8
1.9
R
C b
an
dw
idth
(G
Hz)
Current density (kA/cm2)
D. Feezell
𝑓𝑅𝐶 = 1
2𝜋
1
𝜏𝑅𝐶
Frequency response of equivalent circuit plotted and RC limited 3 dB bandwidth determined
A. Rashidi, et al., submitted to Photon. Technol. Lett.
35
Bottom-Up Selective-Area Growth
D. Feezell
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Core-Shell Nanostructure LEDs
Potential Advantages of Nanowall LEDs:
• Polarization-free, nonpolar (m-plane) active regions will help reduce droop
• Large effective active region area will reduce carrier density for a given current density and
mitigate droop
• Elimination of threading dislocations (TDs) will reduce non-radiative recombination and improve
lifetime
• Strain relaxed structures may allow for higher indium contents without defect generation
(potential green gap solution)
• Cost effective nonpolar/semipolar structures in patterned dielectric apertures on sapphire or
silicon
nonpolar
InGaN active
region
SiNx
Al2O3 or Si substrate
buffer/template
n-GaN p-G
aN
ITO
transparent
electrode
D. Feezell
37
• Threading dislocations bend 90°near free surface
Large areas of defect-free nanostructures
Dislocation free regions
Threading dislocations
A. Rishinaramangalam et al., EMC (2010)
Core-Shell Advantages
• Larger effective active region area for the same planar footprint Lower carrier density for a given current
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Nanostructure Template Processing
Sapphire
n-GaN
SiNx
Sapphire
n-GaN
SiNx PR
Sapphire
n-GaN
SiNx PR
Sapphire
n-GaN
SiNx Ni
Sapphire
n-GaN
SiNx Ni
Sapphire
n-GaN
SiNx
1) Starting wafer 2) Spin ARC and PR 3) Interferometric lithography
4) Ni deposition and lift-off 5) Secondary photolithography
and RIE of SiNx
6) Liftoff and piranha clean
PR
D. Feezell
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• Nanoscale light-emitting diodes
• Nanoscale lasers
• Nanoscale transistors
• Solar cells
• Intersubband detectors
• Hydrogen generation
Core-Shell Nanostructures - Applications
3 µm
3 µm 3 µm
3 µm
D. Feezell
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Pulsed Mode MOCVD Technique
• Pulsed mode technique → locally
low V/III ratio
• Temperature from 900oC to 950oC
• Pressure 100 Torr
• TMGa flow 26.7 µmol/min
• V/III ratio of 100
• H2 flow of 3000 sccm
• N2 flow of 1000 sccm
Y. T. Lin et.al. Nanotechnology. 23 (46) (2012)
D. Feezell
A. Rishinaramangalam et al., J. Electron. Mat. 44, 1255 (2015)
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GaN Cores with 3X InGaN Quantum Wells
InGaN quantum wells on nanowires, nanowalls, and triangular stripes
D. Feezell
A. Rishinaramangalam et al., J. Electron. Mat. 44, 1255 (2015)
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Triangular Nanostripes
• Higher indium uptake on {101 1} family of planes
• Low polarization-related electric fields compared to c-plane
• High light extraction efficiency
• Continuous flow MOCVD
• Key challenge is current leakage in the diode
5 µm
10 µm
0.5 µm
n GaN
InGaN/GaN
QWs
D. Feezell
43
• Addition of n-AlGaN underlayer significantly reduces leakage current
• Addition of p-AlGaN electron blocking layer (EBL) has smaller effect
• Poly-AlGaN grows on dielectric mask, covering the mask and filling voids
• Effect on impurity concentration shown with SIMS
Leakage Current Reduction with AlGaN
D. Feezell
A. Rishinaramangalam, et al., submitted to Appl. Phys. Mat.
44
• Silicon and oxygen impurities significantly reduced in sample with AlGaN underlayer
• Mg incorporation increased in sample with AlGaN underlayer
• Leakage current eliminated by addition of AlGaN underlayer
SIMS Profiles Without and With Underlayer
D. Feezell
Without underlayer With underlayer
A. Rishinaramangalam, et al., submitted to Appl. Phys. Mat.
45
Electrically Injected Triangular Nanostripe LEDs
D. Feezell
A. Rishinaramangalam, et al., Appl. Phys. Express 9, 032101 (2016)
• Spectra exhibit multiple evolving peaks
• Initial blue shift evolves to stable wavelength at higher current
• Broad spectrum related to QW non-uniformities and poor current spreading
*Unpackaged, on-wafer measurement
46
• Single growth of arrays with different pitches
• Red shift as pitch increases
• Potential for monolithic multi-color LEDs
Electrically Injected Nanowire LEDs
-6 -4 -2 0 2 4 6
-3
0
3
6
9
12
Cu
rre
nt
De
ns
ity
(A
/cm
2)
Voltage (V)
D. Feezell
M. Nami, et al., submitted to Nanotechnology (2016)
47
• EL spectra show broad emission and evolving dominant wavelength
• PL spectra show broad emission but no change in shape
Room-Temperature PL and EL
PL: 405 nm excitation EL
D. Feezell
360 400 440 480 520 560 600 640 680
102
103
104
105
106
EL
Inte
nsity (
arb
. un
its)
Wavelength (nm)
3.40
6.80
10.2
13.6
17.0
20.4
23.8
27.2
30.6
34.0
51.0
68.0
Current
Density
(A/cm2)
400 440 480 520 560 600 640 680
100
101
102
103
104
105
PL Inte
nsity (
arb
. units)
Wavelength (nm)
0.04
0.18
0.35
1.75
3.50
8.75
17.5
26.3
35.0
43.8
52.5
63.0
Energy
Density
(J/cm2)
n-GaN
S. Okur et al., submitted to Appl. Phys. Letters
48
• Indium composition higher near the apex
• QWs thicker near the apex
• Poor current spreading leads to non-uniform injection, causing change in wavelength with current
• Longer wavelengths from the apex, shorter wavelengths from the sidewalls
TEM and EDS Show QW Non-Uniformities
D. Feezell
A. Rishinaramangalam, et al., Appl. Phys. Express 9, 032101 (2016)
3.3 V 6.5 V
S. Okur et al., submitted to Appl. Phys. Letters
49
• TEM, EDS, and current spreading simulations indicate longer wavelength emission from the apex and shorter wavelength emission from the sidewalls
• Spectrally resolved integrated PL gives an indication of the IQE in different regions of the stripe (e.g., apex vs. sidewalls)
• IQE is higher in the longer wavelength portion of the spectrum!
Spectrally Resolved Internal Quantum Efficiency
S. Okur et al., submitted to Appl. Phys. Letters
D. Feezell
0 20 40 600.0
0.2
0.4
0.6
0.8
1.0
Below 450 nm
Above 450 nm
IQE
Energy Density (J/cm2)
10-2
10-1
100
101
102
101
102
103
104
105
106
107
108
IQE = 100% line
Below 450 nm RT
Above 450 nm RT
Below 450 nm LT
Above 450 nm LT
Inte
gra
ted
PL
In
ten
sity (
arb
. u
nits)
Energy Density (J/cm2)
IQE 100% line
𝐼𝑄𝐸 = 𝜂 ∗𝐼𝑃𝐿 (𝑅𝑇)
𝐼𝑃𝐿 (𝐿𝑇)
Y. Iwata et. al, J. Appl. Phys. 117, 075701 (2015).
50
0 200 400 600 800 1000 1200
420 nm
440 nm
PL
In
ten
sity (
arb
. u
nits)
460 nm
Delay Time (ps)
480 nm
D. Feezell
S. Okur et al., submitted to Appl. Phys. Letters
420 430 440 450 460 470 480100
120
140
160
180
200
220
240
0.04 J/cm2
0.35 J/cm2
3.50 J/cm2
35.0 J/cm2
PL L
ifetim
e (
ps)
Wavelength (nm)
PL Lifetimes
• PL transients measured within a 5 nm linewidth around central wavelengths of 420, 440, 460, 480 nm at different excitation levels
• PL lifetime (𝜏) generally increases as wavelength increases and as injection level increases
35 μJ/cm2
𝐴𝑒−𝑡 𝜏
51 D. Feezell
S. Okur et al., submitted to Appl. Phys. Letters
10-2
10-1
100
101
102
200
400
600
800
1000
420 nm nonrad. rec. lifetime
480 nm nonrad. rec. lifetime
420 nm rad. rec. lifetime
480 nm rad. rec. lifetime
Life
tim
e (
ps)
Energy Density (J/cm2)
Radiative and Non-Radiative Carrier Lifetimes
• Radiative recombination lifetimes for the two central wavelengths are very similar in magnitude
• Non-radiative recombination lifetimes around 480 nm are at least two times larger than those around 420 nm lower density of defects near the apex, reduced strain near the apex, inhomogeneous indium composition near the apex
I. Tischer et. al, J. Mater. Res. 2, 7 (2015).
Weng et al., Nanoscale Research Letters (2015)
52
Nonpolar 101 0 GaN-Based VCSELs
D. Feezell
53
VCSEL Geometry and Characteristics
Invented by Kenichi Iga at the Tokyo Institute of Technology (1977)
S.O. Kasap, Optoelectronics and Photonics (2013)
D. Feezell
• Low power consumption
• Small device footprint
• Circular output beam
• Single-longitudinal-mode operation
• Densely-packed, two-dimensional arrays
• Wafer-level characterization
One challenge is achieving stable and predictable polarization of the output
54
Applications for GaN-Based VCSELs
Optical data storage
Head-up displays
High-resolution printing Projectors
Bio-sensing
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Chip-scale atomic clocks
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Nonpolar GaN-Based VCSELs
Nonpolar GaN Flip-Chip Process
III-Nitrides VCSELs
Small footprint, low power consumption,
single-mode operation
Large optical gain and emission with polarization stability Overcomes key materials challenges
Nonpolar GaN enables polarization-pinned VCSELs
Access to UV wavelengths
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Polarization-Pinned Emission
Angle-resolved emission intensity nonpolar VCSEL
• Polarization of the light output pinned with E c
• Confirmed on multiple devices and multiple wavelengths under a range of injection levels
• Polarization ratio of ~100% measured
• Advantageous for polarization-sensitive optical systems: spectroscopy, atomic clocks, data storage, backlighting
C. Holder, et al., Appl. Phys. Lett. 105, 031111 (2014)
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• Nonpolar/semipolar III-nitrides eliminate effects from polarization-related electric fields
– High optical efficiency and gain
– Fast carrier lifetime
– Polarized emission
– Lower QCSE - design flexibility
• Demonstrated high-efficiency LEDs with low droop, high IQE, and large modulation bandwidth on free-standing GaN substrates
• Nanostructures exhibit unique properties that may be beneficial for solving some long-standing III-nitride materials issues
• Demonstrated electrically injected nanostructure LEDs and analyzed the QW properties in core-shell structures
• Higher efficiency green emitters may be enabled by growth on strain-relaxed 3D structures
• Nonpolar GaN enables polarization pinned UV and visible VCSELs
Summary
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Funding Sources
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Thank You!
D. Feezell