microelectronic systems - heim.ifi.uio.noheim.ifi.uio.no/~oddvar/present/mes at ifi_final.pdf ·...

2006

M i c r o e l e c t r o n i c S y s t e m s

Microelectronic Systems

at the

Department of Informatics, University of Oslo

Professor Oddvar Søråsen

October, 2006

2006


Faculty of Theology

Faculty of ArtsFaculty

of LawFaculty of Medicine

Faculty of Dentistry

Faculty of Social Sciences

Faculty of Education

Faculty of Mathematics and Natural Science

Department of Informatics

Department of Mathematics

Department of Physics

Department of Geophysics

Department of Chemistry

Department of Biology

Institute of Theoretical Astrophysics

Department of Biochemistry Department of

Geography

School of Pharmacy

University of Oslo

UoO: 30 000 students, 4600 employees

2006


Department of InformaticsDepartment of Informaticswww.ifi.uio.no

The CS department at UoO

2006


KeyKey figuresfigures800 Bachelor students550 Master students135 PhD students1800-2000 course students110 courses + seminars

6 study programs (3+2)5 years structured Master program directed towards a professionInternational MasterParticipator in “cross disipline”informatics education (faculties of art, soc.sciences, education, law)

200 employees (incl PhD-students)13 research groups>50 partners in industry and governmentProjects funded by theNorwegian Research CouncilIncreasing number of EU projectsInnovation through UoO centre(Birkeland Innovation)

2006


Main research directionsMain research directionsSoftware Technology

Object orientation: SIMULADistributed SystemsInformation SystemsMicroelectronic SystemsComputational Science

Splines

Professors O.J.Dahl andKristen Nygaard:von Neumann medal, Turing awardCommanders of St.Olaf Order

Splines for geometri and radiance rendering

2006


40% 40% ofof activitiesactivities towardstowards medicinemedicine//healthhealth

Texture analysis in cancer research Health Information System Program(developing countries)

Self-adapting systems(interactive arm prosthesis)

2006


Takk for oppmerksomhetenTakk for oppmerksomheten

Participating in the Norwegian Centre of Excellence: Mathematics for Applications

2006


Microelectronic Systems (MES)

One of the main researchdirections at the department

2006


Strategic location of the research fieldStrategic location of the research field

Mikroelektronic

Systems

MEMS Physics

Programming Signal processing

2006


MES MES researchresearch groupsgroups6 faculty

iDag T. WislandiYngvar Berg iOddvar SøråseniBassen LandeiMats HøviniJim Tørresen

2 engineersiHåvard Kolle RiisiHans K. Otnes Berge

5 part time facultyiSigbjørn Næss (Nera)iAlf Olsen (Mikron) iTor Fjeldly (UNIK)iJoar M. Østby (SINTEF)iJørgen Norendal (FINT)

9 PhD studentsiShaomeng LiiJohannes LomsdaleniRene JenseniHenning GunderseniOmid MirmotahariiKyrre GletteiJens Petter AbrahamseniHåkon A. HjortlandiJørgen A. Michaelsen

3 ResearchersiPhilipp HäfligeriSnorre AunetiLena Mariann Garder

EU project: CaviarNFR project: Biol

2006


TheThe NationalNational Organ for Organ for QualityQuality in in EducationEducation

The prize winner 2006: Microelectronic Systems

Close follow-up of studentsExtensive use of laboratory workCompulsory tasks/ problems to be solvedTutorsStudents participate in thedevelopment of the educationStreamlined curriculum

2006


MicroelectronicMicroelectronic SystemsSystemsDeveloping systems based on integrated electronics

VLSI, ASICFrom embedded systems to transistor modeling

Two main directionsA. Robotics and Intelligent SystemsB. Nanoelectronics

2006


A. A. RoboticsRobotics and Intelligent Systemsand Intelligent Systems

Design of digital systems at a high level ofabstraction

Interface towards software and algorithmsEmbedded systemsReconfigurable hardware and self-adapting systems

Implementation in FPGAs – Field Programmable Gate ArraysEvolutionary algorithms for designing hardware

Machine learning

2006


B. B. NanoelectronicsNanoelectronics

Full-custom design of analog, digital and mixed-mode circuits

Requiring a thorough insight in the technology!

Micro effect circuitsData conversion circuitsBio-inspired microelectronicsUltra Wideband RadioRF MEMS – co-integration of MEMS and CMOS

2006


MicroMicro effecteffect circuitscircuitsInvestigating methods for reducing power consumption

Varios transistor structuresDecreased supply voltageMultiple Valued LogicThreshold logicIntegrated redundancy

2006


Data Data conversionconversion circuitscircuits

Effective methods and circuits for data conversion

DAC, ADCDelta-Sigma methodsInterface to MEMS sensors

Integrated pressure sensor

2006


BioBio--inspiredinspired microelectronicsmicroelectronics”Neuromorph engineering”

Coclea implantNew ways of coding signal for transmission (pulse coding)

2006


Ultra Ultra WidebandWideband radioradioWireless shorthold communication

Impuls radioRadar for medical detection

2006


RF MEMS RF MEMS Integrated filters and resonators with high Q-factors

Co-integration of MEMS and CMOS

3D model of H-filter, O.P Arhaug

2006


MEMS a MEMS a newnew activityactivity at MESat MESNational initiative to establish micro and nanotechnology in Norway

Norwegian Research CounselMiNaLab in neighbouring building (SINTEF and UiO)

on sabattical leave 03/04

MEMS a new degree of freedom to implementintegrated systems

microelectronics can use micromechanical componentsMEMS structures would need an electronic framework

Suitable competence at MESmodeling, analysis, implementation of VLSI from transistors to complex systems

2006


SelectingSelecting a a focusfocusMEMS is a broad field

focusing om RF MEMS”RF MEMS refers to the design and fabrication ofdedicated MEMS for RF (integrated) circuits”

1a) The components operate by micromechanicsand/or

1b) The components are fabricated by micromachining

2) The components are used in RF systems

A new course established, 2005: INF5490 RF MEMS

2006


WhyWhy RF MEMS?RF MEMS?Challenging, promising and exciting field!Close connection to circuit technique

An increasing number of applications of MEMS in RFLarge market: wireless communication

telecommunication, mobile phonesdistributed intelligence (observation, activation)environmental surveillance

IFI/MES strategic activity Wireless Sensor Nets

2006


AppealingAppealing advantagesadvantages given by RF MEMSgiven by RF MEMS

Circuit and system miniaturizationmonolithic integration with IC or by packaging!

Lower costbatch processing

Lower power dissipationHigher performance

increased selectivityhigher Q-factorreduced lossbetter isolationlow distortionincreased bandwidth

2006


Basic RF MEMS Basic RF MEMS componentscomponentsSwitchesVariable capacitorsInductorsPhase shifters

ResonatorsMicromechanical filters

focusing on real vibrating structures

Can be used to implementoscillators

filtersmixer with filter

2006


Master Master projectproject ((finishedfinished))Micromechanical filter by resonating beams

H structures

Master student Ole-Petter ArhaugModeling

analytical, FEMSimulations with CoventorWare, CadenceDesign according to a specific process: QinetiQ

QinetiQ INTEGRAM processes, a part of Europractice

O.-P. Arhaug and O. Søråsen, "Designing H-shaped MicromechanicalFilters", International MEMS Conference 2006, iMEMS2006, Singapore, 9 -12 May, 2006. Journal of Physics: Conference Series, Institute of Physics(IOP), (http://www.iop.org/EJ/journal/conf).

2006


MeshedMeshed 3D 3D modelmodel for FEM for FEM analysisanalysis

O-P Arhaug

2006


Filter Filter operationoperation: 2 : 2 identicalidentical resonatorsresonators

In phase Out of phase

2006


CoventorWare simulations for 6 resonating modes (O-P Arhaug)

2006


HarmonicHarmonic responseresponse for given dampingsfor given dampings

O-P Arhaug

2006


OnOn--goinggoing projectprojectIntegrated MEMS/CMOS oscillator

based on a resonating cantilever beam

Master student Jan Erik Ramstad (Bachelor HiVe)MEMS resonator with CMOS feedback amplifierTo be used as a ”resonant detector”

a mechanical resonating structure where physicalmeasurement parameters modify the resonant frequencye.g. sensing acceleration

Investigate possibilities for monolithic integrationpost CMOS micromachining

2006


2006


UsingUsing RF MEMSRF MEMSTodays RF systems need off-chip components to obtain required performance

matching networks, filters, resonators etc.

RF MEMS components can be used asA) Replacement for discrete passive components

B) New integrated functionalitynew system architectures

reconfigurable RF ICs by using switches

2006


OnOn--goinggoing projectprojectRF transceiver for a Wireless Sensor Node

Medical applicationBrain pressure sensor

Built-in intelligenceRobustLow-power

Design and demonstration of critical RF MEMS partsInterfacing and implementation issues

2006


Personal Personal researchresearch goalsgoals1) Designing RF MEMS and investigating how to usehigh performance micromechanical replacement parts in RF systems instead of todays bulky and powerconsuming off-chip components

2) Investigating effective methods for integration of theMEMS with microelectronic subsystems, preferably as a monolithic Si chip (SoC)

Critical technology and realistic implementations ofWireless Sensor Nodes

microelectronic systems - heim.ifi.uio.noheim.ifi.uio.no/~oddvar/present/mes at ifi_final.pdf ·...

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