micro- and nano-technologyand... · 2013-04-17 · nano-structures with anti-reflection properties...

INSTITUTE of APPLIED PHYSICSFriedrich-Schiller University Jena

U.D. U.D. ZeitnerZeitnerFraunhofer Institut fFraunhofer Institut füür Angewandte Optik und Feinmechanikr Angewandte Optik und Feinmechanik

JenaJena

Micro- and Nano-Technology...... for Optics

1. Introduction

Micro- and Nano-Technology...... for Optics

1. Introduction


Micro-Structured Optics in Nature

2µm

Nano-structures with anti-reflection properties on moth‘s-eyes

Lens-arrays as insects eyes

100µm

Colors of butterflies by diffraction gratings

4µm


Different Approaches

Nature Technology

!?!?

“Bottom-Up” “Top-Down”

Lithography


The field of micro-structured optics


1mm

1µm

10nm

10µm

100µm

100nm

characteristic feature size

micro-lenses, micro-prisms

lens-arrays,refractive beam-shaper

diffractive beam-shaper,Fresnel-lenses,diffraction gratings

effective media,sub-λ-gratings,photonic crystals,meta-materials

hybride elements

Size scale of micro-optical effects


Effects of Size-Scaling

1mm 100µm 10µm 1µm 100nm

refraction diffraction

influence of physical effects on optical functionsis changing if characteristic feature sizes are sca led

focus:f=5mm

125µm

Strukturgröße

artificial dichroiticmaterials

physical effect:effective material-properties

disturbing useful !

diffractive beam splitter

2µm

wire-grid-polarizer


Size-Scale of Optical Structures

1Å

1nm

1µm

1mm

1m

law of refraction and reflection

light diffraction

effective medium

spontaneous and stimulated emission

astronomic mirrors

lenses

micro-lenses

antireflection pattern, polarizers, phase retarder photonic crystals

miniaturized lenses

paraxial beam splitters

non paraxial beam splitter

spectroscopic gratings

mic

ro o

ptic

sλλλλλλλλ

(atomic size) light sources

optical elementsoptical elementsoptical effectsoptical effects


Micro-optics Challenge

1mm

10mm

100µm

10µm

1µm

100nm

highly efficient illuminationconcentrator structures

characteristic feature size

light homogenizationlens arrays / diffusors

specific light distributionsbeam shapers

high transmissionmoth-eyestructures

Control of optical effects on the whole size-scale


Milestones of optical engineering

Maxwell

1831 - 1879

electromagnetic wave theory

Fresnel

1788 - 1827

wave theory of the light

Hertz

1857 - 1894

exp. confirm. of Maxwell

Fourier

1768 - 1830

Fourier expansion

Zuse

1910 - 1995

1941 1st calculator

Abbe

1840 - 1905

theory of opt. image

Basics in physics and mathematicsAnalytical and numerical

evaluation of physical optics

Personal Computer

Demands on micro- and

nanomachining

1800

1900

2000

Fundamental understanding

of optics


Lithography Roadmap


Typical Optical Surfaces and Contours

Contours Profileslens prism beam shaper

binary grating blazed grating

subwavelength gratings

complex surface profiles

>> λλλλ

< λλλλ

> λλλλ

>> λλλλ> λλλλ< λλλλ

characteristic detail

Courtesy of E.-B. Kley


Fabrication Technologies for Micro-Optics

common micro-optics fabrication methods are

• lithography (photo-, e-beam-, laser-)

• ultra precision micro-machining

• melting / reflow technology

• more elaborated technologies

different size and functionalitydifferent fabrication methods

for micro-optical components compared to classical (macro) optics


Lithography for Optical Applications

Lithography tools are developed for micro-electronics fabrication!

special demands of optics on lithography justify development of lithography tools especially for optical applications

Demands of optics on lithography:• arbitrary lateral contours (often radially symmetric)• several 100mm size of single elements with sub-micron features• thick substrates for elements with low wave-front error• non-planar substrates possible• …

steady development along semiconductor road-map☺☺☺☺

vanishing versatility for other applications ��

micro- and nano-technologyand... · 2013-04-17 · nano-structures with anti-reflection properties...

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