measuring tools sensor systems - jsr · 542-172 page p-008 542-173 page p-008 0.001mm (1 ... jsr...

ME

AS

UR

ING

TO

OLS Linear Gages

LGK - Slim type K-006 LGB2 - Slim type K-007 LGF - Economical Design K-008-009 LGF- (with Origin Point Mark) K-010 LG - Long Stroke Type K-011 LGD - ABSOLUTE / Standard Type K-012 LGS-1012P K-013 LGH - High accuracy/resolution Type K-014-015

Display Units EC Counter K-016 EG Counter K-016 EB Counter K-017 EH Counter K-018 EV-16P/Z/D Counter K-019 D-EV Display Units K-020 SENSORPAK K-021

LITEMATIC VL-50-B / 50S-B Litematic K-022

Mu-Checker Lever/Cartridge Probe Heads K-023-024 Analog/digital amplifier/Display K-025 EV-16A Counter (6 channel, No display type) K-026

Laser Scan Micrometers LSM-500S K-027 LSM-501S K-027 LSM-503S K-028 LSM-506S K-028 LSM-512S K-029 LSM-516S K-029 LSM-6902H K-030 LSM-9506 K-031 LSM-5200 K-032 LSM-6200 K-032 Option Accessories K-033-034

SE

NS

OR

SY

ST

EM

S

JSR G

ROUP

Designed by JSR GROUP Copyright © 2019 JSR GROUP, All rights reserved.

ห้ามนำาไปเผยแพร่ก่อนได้รับอนุญาติจากทางบริษัท

SENSOR SYSTEMSระบบเครื่องเซ็นเซอร์

K-002

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages

ลิเนียร์เกจ

Display Units

จอแสดงผล

LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers

เลเซอร์สแกน

Optional

Accessories

อุปกรณ์เสริม

Gage Heads Gage HeadsDisplay unit

Measuring range Measuring range

Resolution 5mm / .2” 10mm / .4” 25mm / .1” 50mm / 2” 100mm / 4” Point measurementCalculation measurement (addition and subtraction)

Multi-point measurement

0.000005mm(0.005 µm)

LGH SeriesPage P-014

542-720542-721(Low measuring force)

Page P-014, P-015

Dedicated counter(sold in sets withGage Head)

SENSORPAK

0.00001mm(0.01 µm)



Page P-014, P-015

EG Counter542-015

Page P-016

EB Counter542-092-2

Page P-017

EH Counter542-075

Page P-018

SENSORPAK

EH Counter542-071

Page P-018

SENSORPAK

EV Counter542-063

Page P-019

SENSORPAK

0.0001mm(0.1 µm)

LGB2 series (nut clamp) Page P-007LGK series Page P-006LGF series Page P-009

542-246Refer to Page P-007

542-158542-181

Page P-006, P-009

542-182

Page P-009

542-312542-316

Page P-011

LG series Long Stroke series(Motor-drive type)Page P-011

0.0005mm(0.5 µm)

LGK series Page P-006LGF series Page P-008

542-171542-157

Page P-006, P-008

542-172

Page P-008

542-173

Page P-008

0.001mm(1 µm)


542-156542-161

Page P-006, P-008

542-162

Page P-008

542-163

Page P-008

Long Stroke series (Motor-drive type)Refer to page P-011

542-312542-316

Page P-011

LGB2 series (nut clamp)Page P-007


542-262542-262H (High accuracy)542-264 (Low measuring force)542-270 (Air drive)Page P-010

0.005mm(5 µm)

LGF seriesPage P-008

542-612

Page P-008

542-613

Page P-008

0.0005mm(0.5 µm)

LGF-Z seriesSeries with reference point markPage P-010

542-174

Page P-010

542-175

Page P-010

542-176

Page P-010

EG Counter542-017

Page P-016EB Counter 542-094-2

Page P-017

EH Counter542-073

Page P-018

SENSORPAK

EV Counter542-067

Page P-019

SENSORPAK0.001mm(1 µm)


542-164

Page P-010

542-165

Page P-010

542-166

PageP-010

JSR G

ROUP

Designed by JSR GROUP Copyright © 2019 JSR GROUP, All rights reserved.ห้ามนำาไปเผยแพร่ก่อนได้รับอนุญาติจากทางบริษัท

K-003


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories






0.000005mm(0.005 µm)



Page P-014, P-015

Dedicated counter(sold in sets withGage Head)

SENSORPAK

0.00001mm(0.01 µm)



Page P-014, P-015

EG Counter542-015

Page P-016

EB Counter542-092-2

Page P-017

EH Counter542-075

Page P-018

SENSORPAK

EH Counter542-071

Page P-018

SENSORPAK

EV Counter542-063

Page P-019

SENSORPAK

0.0001mm(0.1 µm)

LGB2 series (nut clamp) Page P-007LGK series Page P-006LGF series Page P-009


542-158542-181

Page P-006, P-009

542-182

Page P-009

542-312542-316

Page P-011

LG series Long Stroke series(Motor-drive type)Page P-011

0.0005mm(0.5 µm)


542-171542-157

Page P-006, P-008

542-172

Page P-008

542-173

Page P-008

0.001mm(1 µm)


542-156542-161

Page P-006, P-008

542-162

Page P-008

542-163

Page P-008

Long Stroke series (Motor-drive type)Refer to page P-011

542-312542-316

Page P-011

LGB2 series (nut clamp)Page P-007


542-262542-262H (High accuracy)542-264 (Low measuring force)542-270 (Air drive)Page P-010

0.005mm(5 µm)

LGF seriesPage P-008

542-612

Page P-008

542-613

Page P-008

0.0005mm(0.5 µm)


542-174

Page P-010

542-175

Page P-010

542-176

Page P-010

EG Counter542-017

Page P-016EB Counter 542-094-2

Page P-017

EH Counter542-073

Page P-018

SENSORPAK

EV Counter542-067

Page P-019

SENSORPAK0.001mm(1 µm)


542-164

Page P-010

542-165

Page P-010

542-166

PageP-010

JSR G

ROUP




K-004

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories






0.01mm(10 µm)

LGD seriesPage P-012

575-326

Page P-012

575-327

Page P-012

542-328

Page P-012

EC Counter 542-007

Page P-016

EG Counter542-016

Page P-016

EB Counter 542-096-2

Page P-017

EH Counter542-072

Page P-018

SENSORPAK

EV Counter542-064

Page P-019

SENSORPAK

LGS-1012P seriesPage P-013

575-303

Page P-013

SENSORPAK : Compatible with Measurement data loading software SENSORPAK. Refer to page P-021 for detail.

JSR G

ROUP


K-005


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories






0.01mm(10 µm)

LGD seriesPage P-012

575-326

Page P-012

575-327

Page P-012

542-328

Page P-012

EC Counter 542-007

Page P-016

EG Counter542-016

Page P-016

EB Counter 542-096-2

Page P-017

EH Counter542-072

Page P-018

SENSORPAK

EV Counter542-064

Page P-019

SENSORPAK

LGS-1012P seriesPage P-013

575-303

Page P-013

SENSORPAK : Compatible with Measurement data loading software SENSORPAK. Refer to page P-021 for detail.

JSR G

ROUP




K-006

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — Slim typeLGK

FEATURE• Compact model offers the vibration/shock resistance of the proven LGF series. Crosssectional area is approx 1/5 compared to 542-181.• Resolution of each model can be selected from 0.1µm, 0.5µm, or 1µm.

• Excellent Sliding durability improved to remain serviceable for at least 15 million Cycles (in-house testing).• Excellent shock resistance, 100G/11ms (IEC60068-2-27)

542-158 542-157 542 -156

Atta

chm

ent t

hrea

d fo

r th

rust

ste

mM

9.5x

0.5

10.6

or l

onge

r (st

roke

)

Rub

ber b

oot

ø8 –0.0090

146.

573

.1

ø12

125.

5

Atta

chm

ent t

hrea

d fo

r thr

ust s

tem

M9.

5x0.

510

.6 o

r lon

ger (

stro

ke)

Rub

ber b

oot

ø8–0.0090

146.

573

.1

ø12

125.

5

542-158 542-157

Atta

chm

ent t

hrea

d fo

r thr

ust s

tem

M9.

5x0.

510

.6 o

r lon

ger (

stro

ke)

Rub

ber b

oot

ø8–0.0090

146.

573

.1

ø12

125.

5

542-156

DIAMENSIONS

Connector

82.7

30 20.4

Connecting cable (2m)

RM12BPE-6PH (HIROSE)

Optional Accessories• Air lifter 10: 02ADE230 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied.

• Rubber boot: 238772 (spare) Thrust stem set: 02ADB680 Thrust stem: 02ADB681 Clamp nut: 02ADB682 Special spanner: 02ADB683 * A thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.• Extension cable ( 5m) : 902434• Extension cable (10m): 902433• Extension cable (20m): 902432 Connectable up to 3 pieces, 20m at maximum.

Order No. 542-158 542-157 542-156

Measuring range 10mm (.4”)

Resolution 0.1µm 0.5µm 1µm

Measuring accuracy (20˚C) (0.8+L/50) µm (L=mm) (1.5+L/50) µm (L=mm)

Quantizing error ±1 count

MeasuringContact point downwards 0.8N or less

forceContact point horizontal 0.75N or less

Contact point upwards 0.7N or less

Position detection method Photoelectric linear encode

Response speed*1 400mm/s 1500mm/s

Output signal 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals:200ns for 0.1µm model, 200ns for 0.5µm model, 400ns for 1µm model

Output signal pitch 0.4µm 2µm 4µm

Mass Approx. 175g

Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)x5), standard contact point: 901312

Stem dia. ø8mm

Bearing type Linear ball bearing

Output cable length 2m (directly from casing)

Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)

Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation)

Storage temperature (humidity) range –10 to 60°C (RH 20 to 80%, no condensation)

JSR G

ROUP


K-007


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Optional Accessories• Rubber boot (spare) For 5 mm range models: 238773 For 10 mm range models: 238772• Extension cable ( 5 m) : 902434• Extension cable (10 m): 902433• Extension cable (20 m): 902432 Connectable up to 3 pieces, 20m at maximum.• Wrench for tightening nut: 200168

Optional Accessories

20.430

82.7


(HIROSE)RM12BPE-6PH

ลิเนียร์เกจSERIES 542 — Slim TypeLGB2

FEATURE• Slim design, nut clamp type (Stem dia. is ø9.5mm) • The spindle guide uses high precision linear ball bearings for extremely smooth movement and exceptional durability.

542-244 542-262/542-262H542-264

542-270 542-246

Type L-Shaped StraightLow

measuring force

Air-drivencontact point*1

Order No. 542-246 542-244 542-262 542-262H 542-264 542-246

Measuring range 5mm (.2”) 10mm (.4”)

Resolution 0.1µm 1µm

Measuring accuracy (20˚C) 0.8µm 2µm 1µm 2µm


Maximum response speed 380mm/s 900mm/s

Contact point down-wards

0.65N or less 0.8N or less 0.6N or less 0.8N or less

Measuring force

Contact point horizontal0.6N or less 0.75N or less 0.55N or less 0.75N or less

Contact point upwards 0.55N or less 0.7N or less 0.5N or less 0.7N or less

Mass 160g 155g 170g

Contact point ø3 mm carbide tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point: 901312

Stem ø9.5 mm

Bearing type ball bearing

Output cable length 2 m (directly from casing)


erating temperature (humidity) range 0 to 40 °C (RH 20 to 80 %, non-condensing)

Storage temperature (humidity) range –10 to 60 °C (RH 20 to 80 %, non-condensing)

Standard Accessories Wrench for contact point: 538610 *1: Required air pressure: 0.3 to 0.4 MPa*2: Spindle extends when air is supplied.

Example of slim head low measuring force (made to order)• Low measuring force, suitable for measurement of soft-material workpieces (Consult us for other measuring forces).

Model L-shaped model Air-driven contact point model

Measuring range 5µm 10µm

Resolution 1µm 1µm

Contact point downwards 0.5N or less 0.6N or lessMeasuring

Contact point horizontal 0.45N or less 0.55N or lessforce

Contact point upwards 0.4N or less 0.5N or less *Measuring force at the retraction of the spindle.

Depending on the operating method, the spindle forward speed of low measuring force model may become slow compared to the standard model.Please check if this restriction is compatible with the application. Please contact Mitutoyo to verify the application.

ø9

18 ø9

ø14ø9.5 0

-0.009

75

6.3

15.9

25.1

4.9

(thr

ead) Clamp nut

(Parts No.200365)

L

L=11.5~13.0


Rubber boot

ø9.5 0-0.009

ø4.2

ø7.9

ø12

ø14

113 20

.215

.934

.9

4.9

(thr

ead) Clamp nut

(Parts No.200365)

Knurl

L

L=11.5~13.0


Rubber boot


60.1

L

39.3

1024.

515

.9ø9.5 0-0.009

Compatible air hose

(ID: ø2.5)

Str

oke

10.4

mm

or

mor

eClamp nut

(Parts No.200365)

Knurl

L=11.5~13.0

ø9

18 ø9

ø14ø9.5 0

-0.009

75

6.3

15.9

25.1

4.9

(thr

ead) Clamp nut

(Parts No.200365)Rubber boot

L

L=11.5~13.0


DIMENSIONSJSR G

ROUP




K-008

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — Economical DesignLGF

Connector

ø18

41

ø11.8

Optional Accessories• Air drive unit For 10 mm range models: 02ADE230 For 25 mm range models: 02ADE250 For 50 mm range models: 02ADE270Required air pressure: 0.2 to 0.4 MPaSpindle extends when air is supplied.

• Rubber boot (spare) For 10mm range models: 238772 For 25mm range models: 962504 For 50mm range models: 962505• Thrust stem set For 10mm range models: 02ADB680 Thrust stem: 02ADB681 Clamp nut: 02ADB682 For 25/50mm range models: 02ADN370 Thrust stem: 02ADN371 Clamp nut: 02ADB692 External dimensions are described in the dimensional drawing of the product.• Special spanner For 10mm range models: 02ADB683 For 25/50mm range models: 02ADB693* Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.• Extension cable ( 5m) : 902434• Extension cable (10m): 902433• Extension cable (20m): 902432 Connectable up to 3 pieces, 20m at maximum.

FEATURE• Excellent vibration/shock resistance due to the design of the spindle guide.• Sliding durability improved to remain serviceable for at least 15 million cycles (inhouse testing).

• Shock resistance, 100 G / 11 ms (IEC 60068-2-27)• The LGF-Z series, which is equipped with a reference point mark on the linear encoder (refer to page P-010), and includes a 0.1 µm resolution type (refer to page P-009) is also available.

542-171, -161 542-172, -162 542-173, -163 542-612, -613

M18 x 1

Rubber boot

Thrust stem

Clamp nut

02ADN371

02ADB692

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

(screw top height)

Cable length, 2m

51.5

or

long

er

(str

oke)

M14 x 0.5

Attachment thread for thrust stem

142

34

13.8

(316

)

0.6

ø15-0.015 0

61.720.6

56.1

8.6

41

ø18

18.5

9 5

ø18-0.018 0

(24.2)

21

4.5

124.

9

174

629

.6

20

Unit: mm

*With thrust stem set (optional accessory)



542-171, -161

542-172, -162, -612

542-173, -163, -613

M9.5x0.5


Clamp nut

02ADB682

Thrust stem

02ADB681

(screw top height)

10.6

or

long

er (

stro

ke)

Cable length, 2m

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

12

(13.8)

ø9.5 -0.015 0

414.5

9.5

6

17.3

ø8 -0.009 0

12.3

34

()

15.4 61.5

46.9

ø18

41

14.80.6

75.7

14

129.

56.

9

545

.9

Rubber boot

Cable length, 2m

(screw top height)

M14 x 0.5


Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

M18 x 1

Thrust stem

Clamp nut

02ADN371

02ADB692

21

(24.2)

ø18-0.018 0

5918.5

ø18

41

20.6

30.7

61.7

ø15-0.015 0

13.8

26 o

r lo

nger

(s

trok

e)

(208

.3)

34

8.6

93.6

114.

7

6.5

22

200.6

4.5

84.1

Rubber boot

M9.5x0.5

DIAMENSIONS

Order No. 542-171 542-161 542-172 542-162 542-612 542-173 542-163 542-613

Measuring range 10mm (.4”) 25mm (1”) 50mm (2”)Resolution 0.5µm 1µm 0.5µm 1µm 5µm 0.5µm 1µm 5µmMeasuring accuracy (20˚C)L= arbitrary measuring length (mm)

(1.5+L/50) µm(7.5+L/50)

µm(1.5+L/50) µm

(7.5+L/50) µm


Measuring

Contact point downwards

1.2N or less 4.6N or less 5.7N or less

forceContact point horizontal


Contact point upwards


Position detection method Photoelectric linear encoderResponse speed*1 1500mm/sOutput 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals:

1000ns for 5µm model, 500ns for 1µm model, 250ns for 0.5µm modelOutput square wave pitch 2 µm 4 µm 2 µm 4 µm 20 µm 2 µm 4 µm 20 µmMass Approx. 260g Approx. 300g Approx. 400gDust/water resistance Equivalent to IP66 (only gage head)Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)x5), standard contact point: 901312Stem dia. ø8mm ø15mmBearing type Linear ball bearingOutput cable length 2m (directly from casing)Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)Operating temperature (humidity) range

0 to 40°C (RH 20 to 80%, no condensation)

Storage temperature (humidity) range

–10 to 60°C (RH 20 to 80%, no condensation)

JSR G

ROUP


K-009


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — Economical DesignLGF (0.1 µm resolution)

Connector

30

82.7

20.4

RM12BPE-6PH (HIROSE) Unit: mm

Optional Accessories• Rubber boot (spare) For 10 mm range models: 238772 For 25 mm range models: 962504 For 50 mm range models: 962505• Thrust stem set For 10 mm range models: 02ADB680 Thrust stem: 02ADB681 Clamp nut: 02ADB682 For 25 mm range models: 02ADN370 Thrust stem: 02ADN371 Clamp nut: 02ADB692 External dimensions are described in the dimensional drawing of the product.• Special spanner For 10 mm range models: 02ADB683 For 25 mm range models: 02ADB693* Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.• Extension cable (5 m): 902434• Extension cable (10 m): 902433• Extension cable (20 m): 902432 Connectable up to 3 pieces, 20m at maximum.

542-181 542-182

FEATURE• 0.1 µm resolution type from the reliable LGF Linear Gage series.

(screw top height)

10.6

or l

onge

r (s

troke

)

Cable length, 2m

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

M9.5 ×0.5


M9.x0.5

Clamp nut02ADB682

Thrust stem02ADB681

6

17.3

ø8-0.009 0

12.3

34

( 129

.5)

61.5

46.9

15.4

82.7

12

(13.8 )

ø9.5-0.015 0

414.5

9.5

14.80.6

75.7

14

6.95

45.9

20.4 30

Rubber boot

542-181

*With thrust stem set

(optional accessory)

Unit: mm

26 o

r lo

nger

(s

trok

e)

Cable length, 2m

(screw top height)

M14 x 0.5Attachment thread for thrust stem

Dim

ensi

ons

with

a t

hrus

t st

em in

stal

led

M18x1

Thrust stem

Clamp nut

02ADN371

02ADB692

21

(24.2)

ø18-0.018 0

5918.5

20.6

30.7

61.7

15-0.015 0

13.8

(208

.3)

34

8.6

93.6

82.7

114.

76.

522

200.6

4.5

84.1

20.4 30

Rubber boot

542-182



Order No. 542-181 542-182

Measuring range 10mm (.4”) 25mm (1”)

Resolution 0.1µm

Measuring accuracy (20˚C) (0.8+L/50)µm (L=arbitrary measuring length (mm))


MeasuringContact point downwards 1.2N or less 4.6N or less

forceContact point horizontal 1.1N or less 4.3N or less

Contact point upwards 1.0N or less 4.0N or less

Position detection method Photoelectric linear encode

Response speed*1 400mm/s

Output signal 90° phase difference, differential squarewave (RS-422A equivalent)Minimum edge-to-edge interval, 200 ns

Output signal pitch 0.4µm

Mass Approx. 310g Approx. 350g

Contact point ø3 mm carbide tipped (fixing screw: M2.5 (P=0.45)x5), standard contact point: 901312

Stem dia. ø8mm ø15mm


Output cable length 2m (directly from casing)




JSR G

ROUP




K-010

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — Linear Gage Head with Origin Point MarkLGF-Z

FEATURE• LGF series with reference point signal output function.• The master setting to use it, incorporated in the unit, is easy to operate. The origin point can be easily detected even when a fault, such as over-speed error, etc. occurs.

• Sliding durability improved to remain serviceable for at least 15 million Cycles (inhouse testing).• Shock resistance, 100g/11ms (IEC 60068-2-27)• Resolutions are available in 0.5µm or 1µm.

Connector

Sleeve

ø16.

7

34.0

Unit: mm

Optional Accessories• Air drive unit For 10mm range models: 02ADE230 For 25mm range models: 02ADE250 For 50mm range models: 02ADE270 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied.

• Rubber boot (spare) For 10 mm range models: 238772 For 25 mm range models: 962504 For 50 mm range models: 962505• Thrust stem set* For 10 mm range models: 02ADB680 Thrust stem: 02ADB681 Clamp nut: 02ADB682 For 25/50 mm range models: 02ADN370 Thrust stem: 02ADN371 Clamp nut: 02ADB692 External dimensions are described in the dimensional drawing of the product.• Special spanner For 10 mm range models: 02ADB683 For 25/50 mm range models: 02ADB693* Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.• Extension cable ( 5 m) : 02ADF260• Extension cable (10 m): 02ADF280• Extension cable (20 m): 02ADF300 Connectable up to 3 pieces, 20m at maximum.

542-174, -164 542-175, -165 542-176, -166

DIAMENSIONS

542-174, -164

542-175, -165

(screw top height)

10.6

or l

onge

r (s

troke

)

Cable length, 2m

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

M9.5x0.5


M9.5x0.5

Clamp nut02ADB682

Thrust stem02ADB681

6

17.3

ø8-0.009 0

12.3

3461.5

46.9

15.4

ø16.7

34

12

(13.8)

ø9.5-0.015 0

414.5

9.5

14.80.6

75.7

14

6.9

(129

.5)

545

.9

Rubber boot


M14x0.5

(screw top height)

Cable length, 2m

26 o

r lo

nger

(s

trok

e)

02ADB692

02ADN371

Clamp nut

Thrust stem

M18x1

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

18.5

9 5

ø18-0.018 0

(24.2)

21

34

ø16.7

93.6

8.6

34

(208.

3 )

13.8

ø15-0.015 0

61.7

30.7

20.6

4.5

84.1

200.6

114.

76.

522

Rubber boot

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led

(screw top height)

Cable length, 2m

51.5

or

long

er

(str

oke)

M14x0.5

Attachment thread for thrust stemM18x1

Thrust stem

Clamp nut

02ADN371

02ADN371

18.5

9 5

ø18-0.018 0

(24.2)

21

34

ø16.7

142

34

13.8

(316

)

0.6

ø15-0.015 0

61.720.6

56.1

8.6

4.5

124.

9

174

629

.6

20

Rubber boot

542-176, -166 Unit: mm




Order No. 542-174 542-164 542-175 542-165 542-176 542-166

Measuring range 10mm (.4”) 25mm (1”) 50mm (2”)

Resolution 0.5µm 1µm 0.5µm 1µm 0.5µm 1µm

Measuring accuracy (20˚C) (1.5+L/50)µm (L=arbitrary measuring length (mm))


MeasuringContact point downwards 1.2N or less 4.6N or less 5.7N or less

forceContact point horizontal 1.1N or less 4.3N or less 5.3N or less

Contact point upwards 1.0N or less 4.0N or less 4.9N or less

Position detection method Photoelectric linear encoder

Reference mark position3mm from contact point tip

(lowest rest point)5mm from contact point tip (lowest rest point)

Reference mark repeatability (20°C): ≤0.5µm (at a constant reference point passing speed less than 300mm/s in the same direction)

Response speed 1500mm/s

Output signal 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals: 250ns for 0.5µm model, 500ns for 1µm model

Output signal pitch 2µm 4µm 2µm 4µm 2µm 4µm

Mass Approx. 260g Approx. 300g Approx. 400g

Dust/water resistance*2 Equivalent to IP66 (only gage head)

Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point: 901312

Stem dia. ø8mm ø15mm


Output cable length 2m (directly extended from the main unit)

Connector Plug: PRC05-P8M (TAJIMI), Compatible receptacle: PRC05-R8F (TAJIMI)


Storage temperature (humidity) range –10 to 60°°C (RH 20 to 80%, no condensation)

JSR G

ROUP


K-011


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Lifting lever attachment

Lifting lever

Optional Accessories• Rubber boot: 02ADA004 (for rubber boot type)• Extension cable ( 5 m) : 902434• Extension cable (10 m): 902433• Extension cable (20 m): 902432Connectable up to 3 pieces, 20m at maximum.

Lifting lever attachment

φ18

41

φ11

.8

RM12BPE-6PH (HIROSE) Unit: mm

ลิเนียร์เกจSERIES 542 — Long Stroke TypeLG

FEATURE• A series to cover maximum measuring range, 100mm.• Three versions are available; standard model, low measuring force model, and rubber boot type (made to order).• The resolution of each model can be selected from 0.1µm and 1µm.

542-312

TypeStandard spar type

Low measuring force

Rubber boot typeStandard spar

typeLow measuring

forceRubber boot type

Order No. 542-312 542-316 542-314 542-332 542-336 542-334

Measuring range 100mm (.4”)

Resolution 0.1µm 1µm

Measuring accuracy (20˚C)

(2+L/100)µm≤2.5µm L=arbitrary measuring length (mm)

(2+L/100)µm≤2.5µm L=arbitrary measuring length (mm)


Contact point downwards

8.0N or less 3.0N or less 8.0N or less 8.0N or less 3.0N or less 8.0N or less

Measuring force

Contact point horizontal

6.5N or lessNot

applicable6.5N or less 6.5N or less

Not applicable

6.5N or less

Contact point upwards

5.0N or lessNot

applicable5.0N or less 5.0N or less

Not applicable

5.0N or less

Position detection method Photoelectric linear encoder

Response speed*1 (max. electrical response speed)

Approx. 400mm/s Approx. 800mm/s

Output signal 90° phase difference, differential squarewave (RS-422A equivalent)

Spindle drive Helical extension spring

Spindle guide Bearing guide

Stem diameter ø20


Shock resistance 60g (in-house testing)

Cable length Approx. 2m (directly extended from the gage unit)

Spindle Sealing method Scraper typeRubber boot

typeScraper type

Rubber boot type

Dust/water resistance*2 Equivalent to IP54Equivalent to

IP66Equivalent to IP54

Equivalent to IP66

Operating temperature (humidity) range

0 to 40°C (RH 20 to 80%, no condensation)

Storage temperature (humidity) range

–10 to 60°C (RH 20 to 80%, no condensation)

Input/output connectorFor calculation: RM12BPE-6PH (HIROSE)

Compatible receptacle: RM12BRD-6S (HIROSE)

Mass (including cables) Approx. 750g Approx. 780g Approx. 750g Approx. 780g

RM

12B

PE

-6P

H (

HIR

OS

E)

Out

put c

able

leng

th, 2

m

2-ø

4.5,

ø9

dept

h 4

33

34

17

ø6

49

50

13

429

Stro

ke 1

02 o

r lon

ger

191.

56

-0.0130ø20

736

243.

568

49 33

34

17

50ø200

-0.013

36 7

20

Str

oke

102

or lo

nger

Rub

ber

boot

6724

3.5

473.

5

236

6R

M12

BP

E-6

PH

(H

IRO

SE

)

Out

put c

able

leng

th, 2

m

2-ø

4.5,

ø9

dept

h 4

Unit: mm

542-312, -316, -332, -336 542-314, -334

DIMENSION

JSR G

ROUP




K-012

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Connector

37

8.6

20

Unit: mm

Optional Accessories• Air drive unit For 10 mm range models: 02ADE230 For 25 mm range models: 02ADE250 For 50 mm range models: 02ADE270 Required air pressure: 0.2 to 0.4 MPa Spindle extends when air is supplied.• Rubber boot (spare) For 10 mm range models: 238772 For 25 mm range models: 962504 For 50 mm range models: 962505• Extension cable SPC cable extension adapter: 02ADF640 Extension cable (0.5 m): 02ADD950 Extension cable (1 m): 936937 Extension cable (2 m): 965014 When connecting an extension cable, an SPC cable extension adapter is required.• Thrust stem set* For 10 mm range models: 02ADB680 Thrust stem: 02ADB681 Clamp nut: 02ADB682 For 25/50 mm range models: 02ADN370 Thrust stem: 02ADN371 Clamp nut: 02ADB692 External dimensions are described in the dimensional drawing of the product.• Special spanner For 10 mm range models: 02ADB683 For 25/50 mm range models: 02ADB693* The thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.

ลิเนียร์เกจSERIES 542 — ABSOLUTE / Standard TypeLGD

FEATURE• Absolute position detection makes it possible to maintain the reference point even when the power is switched off.• Excellent protection against dust and splashing water (IP66) in the factory floor.

• The spindle guide uses high precision linear ball bearings for extremely smooth movement and exceptional durability.• Sliding durability improved to remain serviceable for at least 15 million cycles (inhouse testing).• Shock resistance, 100g/11ms (IEC 60068-2-27)

Order No.*1 575-326 575-326-5 575-327 575-327-5 575-328 575-328-5

Measuring range 10mm 25mm 50mm

Resolution 10 µm

Measuring accuracy (20˚C) 20 µm 30 µm


Contact point downwards 1.2N or less 4.6N or less 5.7N or lessMeasuring

Contact point horizontal 1.1N or less 4.3N or less 5.3N or lessforce

Contact point upwards 1.0N or less 4.0N or less 4.9N or less

Position detection method ABSOLUTE electrostatic capacitance type linear encoder

Response speed Unlimited (not applicable to scanning measurement)

Output Digimatic code

External input Reference-setting signal (Absolute reference position*2 can be changed externally.)

Mass*3 Approx. 260 g Approx. 300 g Approx. 400 g

Contact point ø3 mm carbide tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point: 901312

Stem dia. ø8 mm ø15 mm


Output cable length (directly ectended from the main unit)

2m 5m 2m 5m 2m 5m

Operating temperature (humidity) range 0 to 40 °C (RH 20 to 80 %, non-condensing)

Storage temperature (humidity) range –10 to 60 °C (RH 20 to 80 %, non-condensing) *1: The last digit of the Code No. represents a special cable length in meters.*2: The absolute reference point is near the lowest rest point at shipment.*3: Mass including 2 m cable.

Unit: mm575-327, 575-327-3/5/7LGD®-1025L-B, -1025L/3-B, -1025L/5-B, -1025L/7-B


M14 x 0.5

(screw top height)

Cable length =2, 3, 5, 7m

26 o

r lo

nger

(s

trok

e)

02ADB692

02ADN371

Clamp nut

Thrust stem

M18 x 1

Dim

ensi

ons

with

a th

rust

st

em in

stal

led

18.5

9 5

ø18 -0.018 0

(24.2)

21

93.6

8.6

34

(208

.3)

13.8

ø15 -0.015 0

20

37

8.6

61.7

30.7

20.6

4.5

84.1

200.6

114.

76.

522

Rubber boot



575-326, 575-326-3/5/7

Dim

ensi

ons

with

a th

rust

ste

m in

stal

led


(screw top height)

02ADB681

Thrust stem

02ADB682Clamp nut

M9.5 x 0.5


M9.5 x 0.5

46.9

61.515.4

(129

.5)

34

10.6

or

long

er

(str

oke)

12.3

ø8 -0.009 0

17.3

20

37

8.6

6

9.5

14.5

4

ø9.5 -0.015 0

(13.8 )

12

545

.9

75.7

14

6.9

14.80.6

Rubber boot



575-328, 575-328-3/5/7

Dim

ensi

ons

with

a th

rust

st

em in

stal

led

(screw top height)


51.5

or

long

er

(str

oke)

M14 x 0.5


M18 x 1

Thrust stem

Clamp nut

02ADN371

02ADB692

18.5

9 5

ø18 -0.018 0

(24.2)

21

142

34

13.8

(316

)

0.6

ø15 -0.015 0

37

208.6

61.720.6

56.1

8.6

4.5

124.

9

174

629

.6

20

Rubber boot



DIMENSION

575-326, 575-326-5

575-327, 575-327-5

575-328, 575-328-5

JSR G

ROUP


K-013


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — 0.01 mm Resolution TypeLGS-1012P

FEATURE• ABSOLUTE electrostatic capacitance type encoder makes it possible to maintain the reference point evenwhen the power is switched off.• Excellent protection against dust and splashing water (IP66) on the factory floor.

Connector

37

8.6

20

Unit: mm

Optional Accessories• Rubber boot: 238774 (spare)• Air drive unit (metric): 903594• Air drive unit (inch): 903598• SPC cable extension adapter: 02ADF640• Extension cable (0.5m): 02ADD950• Extension cable (1m): 936937• Extension cable (2m): 965014 * When connecting an extension cable, an SPC cable extension adapter is required.

575-303

Order No. 575-303

Measuring range 12.7mm

Resolution 10µm

Measuring accuracy (20˚C) 15µm


Contact point downwards 2N or lessMeasuring

Contact point horizontal 1.8N or lessforce

Contact point upwards 1.6N or less

Position detection method ABSOLUTE electrostatic capacitance type linear encoder

Response speed Unlimited (not applicable to scanning measurement)

Output Digimatic output

Mass Approx. 190g


Stem dia. ø8mm

Bearing type Slide bearing

Output cable length 2m (directly extended from the main unit)


Storage temperature (humidity) range –10 to 60°C (RH 20 to 80%, no condensation) * IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid.

Unit: mm35

7.617.425

7.3

(146

.1)

26(5

3.9)

66.2

6.2

15.2

38.7

ø8 0-0.008

DIMENSION

JSR G

ROUP




K-014

Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ลิเนียร์เกจSERIES 542 — High-accuracy/resolution TypeLGH (0.01/0.005 µm resolution)

FEATURE• This series has achieved the outstanding accuracy of 0.2 µm combined with a resolution of 0.01/0.005 µm (according to model), practically equivalent to that of a laser interferometer, and a wide measuring range of 10 mm.• A compact body design makes a significant contribution to a downsizing of this gage itself, which is best suited for calibration/ evaluation of master gages as well as measurement of high- precision parts and as a length measuring sensor incorporated into high-precision positioning/control units.

• A low measuring force model is available for those applications where measurement of easily deformed or damaged workpieces is required.• Every LGH series gage is bundled with a dedicated counter.

Optional Accessories• LGH stand: 971750

Gage mounting holeø15H7

25

（35

0）

100

250

ø50

34～

175

300

110

8027

0

• Spindle lifting cable: 971753

(Return-speed adjustment knob)

504

ø 24

12 (stroke)43

• I/O connector: 02ADB440

• SENSORPAK

Refer to page P-021 for more details.• Rubber boot: 238772 (Spare for 542-715 and 542-720)

• This model is equipped with a newly developed photoelectric reflection-type linear encoder, achieving an excellent resolution of 0.01 µm, a measuring accuracy of 0.2 µm and a measuring range of 10 mm at a low price.• Responsivity has been improved by 2.8 times (250 mm/s => 700 mm/s) compared to the previous model.

Gage head: 542-715

• This model is equipped with a newly developed ultra-high precision transmission type linear encoder, achieving the outstanding resolution of 0.005 µm (5 nm).• A measuring accuracy of 0.1 µm has been attained over the wide measuring rangeof 10 mm. This series is most suited for calibration/evaluation of master gages where its wide measuring range is a great advantage.

Gage head: 542-720

Dedicated counter

APPLICATION Master gage calibration/evaluation Inspection of high-precision parts

* Needle contact-point mounting example

Fixation of power cord

(Tilt angle when stand equipped)144

148.

2

11.2

137

7.5

138

68

156 (Stand equipped)

72 97(S

tand

equ

ippe

d)

75.1

(Rubber

boot eq

uipped)

Approx.10°

Cable Assy

(2m)

Connector (detachable)

Stem dia for �xation

Carbied-tipped, Sø3

901312

Connector for lifting cable

542-716 (low measuring force)LGH-1010C-B-EHRubber boot not equipped

542-715 (standard)LGH-1010-B-EH

(37.6) (25*)

ø4.8

ø10.

4

10.563

.3

ø15h6 0-0.011

4018

20

10

148.

3

(14)

8525

R20* �

542-720 (standard)LGH-0510-B-EH

Connector for lifting cable

Carbide sphere SR5

120058

Cable (2m)

542-721 (low measuring force)LGH-0510C-B-EHRubber boot not equipped

(str

oke)

Stem dia for �xation

1040

18

20

145.

9

(st

em) 2

510

.5

60.9

85

45.4 19.4

ø15h6 0-0.011

542-716 542-721 Dedicated counter (set)

Dedicated counter

* Minimum bending radius or minimum dressed dimension

DIMENSIONS

JSR G

ROUP


K-015


Line

ar G

ages

ลิเนีย

ร์เกจ

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Linear gauge Resolution 0.01 µm / Accuracy 0.2 µm model

Order No. 542-715 (Standard) 542-716 (Low measuring force)

Measuring range 10mm

Resolution 0.01µm (0.05µm, 0.1µm, 0.5µm, 1µm can be selected from the counter)

Measuring accuracy (20˚C)*1 0.2µm

Repeatability (20˚C)*1 0.1µm (2σσ)

Retrace error (20˚C)*1 1µm

Contact point downwards 0.65N or less Approx. 0.12NMeasuring

Contact point horizontal 0.55N or less Not applicableforce

Contact point upwards 0.45N or less Not applicable

Position detection method Photoelectric reflection type linear encoder

Detectable operation speed In normal measurement: 700mm/sec; for peak detection: 120mm/sec

Mass of gage head Approx. 370 g

Contact point Carbide tipped, Sø3 mm (M2.5 (P=0.45)x5 mm), standard contact point: 901312

Stem ø15mm

Bearing Linear ball type

Output cable length Approx. 2m

Operating temperature/humidity 0 to 40°C/RH 20 to 80% (no condensation)

Storage temperature -10 to 60°C/RH 20 to 80% (no condensation)

Counter Specifications

Display range ±999.99999mm

Functions Zero-setting, presetting, direction changeover, tolerance judgment (3 steps/5 steps), RS-RINK

Peak hold function Yes

Inerface RS-232C, USB (only for SENSORPAK), Digimatic (Printer: DP-1VA LOGGER)*3, I/O Connector

External output •RS-232C: counting data •Digimatic output: counting data*3

• I/O connector: counting data (simplified BCD), tolerance judgment result, simplified analog output

External control Zero-setting, presetting, data hold, peak measurement mode selection, peak clear

Power supply Supplied AC Adapter, or +12 to 24 V DC, max. 700mA

Current Consumption 8.4 W (MAX 700 mA), Ensure at least 1 A power supply per unit.

Mass Approx. 900g (AC Adapter excluded)

Standard accessories Wrench for contact point, rubber boot, stand, washer (for counter), AC Adapter, AC cord, DC plug, user’s manual, inspection certificate

Linear gauge Resolution 0.005 µm / Accuracy 0.1 µm model

Order No. 542-720 (Standard) 542-721 (Low measuring force)

Measuring range 10mm

Resolution 0.005 µm (0.01 µm, 0.05 µm, 0.1 µm can be selected from the counter)

Measuring accuracy (20˚C)*1 0.1µm

Repeatability (20˚C)*1 0.02 µm (2σσ)

Retrace error (20˚C)*1 0.05µm

Contact point downwards 0.65N or less Approx. 0.1NMeasuring

Contact point horizontal 0.55N or less Not applicableforce

Contact point upwards 0.45N or less Not applicable

Position detection method Ultra-high accuracy transmission type linear encoder

Detectable operation speed In normal measurement: 250 mm/sec

Mass of gage head Approx. 370 g

Contact point Carbide sphere SR5 (M2.5 (P=0.45)×5 mm), standard contact point: 120058

Stem ø15mm

Bearing Linear ball type

Output cable length Approx. 2m

Operating temperature/humidity 15 to 25 °C (Reference temperature 20 °C) / 30 to 60 %RH (non-condensing)

Storage temperature -10 to 60 °C / 20 to 80 % (non-condensing) *2

Counter Specifications

Display range ±99.999995mm

Functions Zero-setting, presetting, direction changeover, tolerance judgment (3 steps/5 steps), RS-RINK

Peak hold function No

Inerface RS-232C, USB (only for SENSORPAK), Digimatic (Printer: DP-1VA LOGGER)*3, I/O Connector

External output •RS-232C: counting data •Digimatic output: counting data*3

• I/O connector: counting data (simplified BCD), tolerance judgment result, simplified analog output

External control Zero-setting, presetting, data hold

Power supply Suppplied AC Adapter, or +12 to 24 V DC, max 700 mA

Current Consumption 8.4 W (MAX 700 mA), Ensure at least 1 A power supply per unit.

Mass Approx. 900 g (AC Adapter excluded)

Standard accessories Wrench for contact point, rubber boot, stand, washer (for counter), AC Adapter, AC cord, DC plug, user’s manual, inspection certificate *1: Applies when used with counter (excluding quantizing error).*2: The storage temperature/humidity range after unpacking is the same as the operating temperature/humidity range.*3: Digimatic output shall be up to 6 digits of data. For data of 7 digits or more, all digits will not be output to the display.

JSR G

ROUP




K-016

Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


จอแสดงผลSERIES 542 — Panel mount, Single function TypeEC Counter

Function• Preset• Tolerance judgment (3 steps, 3 kinds)• Digimatic output


• Connecting cable for digimatic mini-processor: 936937 (1 m), 965014 (2 m)• DC plug: 214938• I/O cable (2 m): C162-155

Function

000001EC-101D542-007

Serial No.ModelCode No.

48

96

6.6 67 （11）

44.4

91.4

44.

4

FEATURE• This Digimatic display can be connected to Linear gages with Digimatic output (LGD and LGS).• Employs DIN size (96x48 mm) and mount-on-panel configuration to facilitate system integration. • It has a data output and tolerance evaluation function.

542-007

Order No. 542-007*


Resolution( ) indicates maximum display range

0.01 mm (±9999.99) / 0.0005 in (±99.9995 in) / 0.001 in (±999.999 in)0.001 mm (±9999.999) / 0.00005 in (±9.99995 in) / 0.0001 in (±99.999 in)

[Automatic setting by gage]

Display Sign plus 6 digits (Green LED)

Tolerance judgment display LED display (3 steps: Amber, Green, Red)

External output Tolerance judgment output –NG, OK, +NG (open-collector)

(switching type) Data output Digimatic output

Control input External PRESET, external HOLD

RatingPower supply voltage Supplied AC adapter, or 9 - 12V DC

Power consumption 4.8W (max. 400mA) Ensure at least 1A is available per unit.

Operation temperature range 0 - 40°C (RH 20 to 80%, no condensation)

External dimensions 96 (W) × 48 (H) × 84.6 (D) mm

AC adpter / AC cable AC adapter: (Japan/North America)06AEG302JA / (EU)06AEG302D /(UK)06AEG302E / (Korea)06AEG302K / (China)06AEG302DC

Applicable head LGD, LGS, ID

Mass 220g * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.

จอแสดงผลSERIES 542 — Panel mount, Single function TypeEG Counter

542-015 542-017 542-016

Order No. 542-015 542-017 542-016


Maximum input frequency 1.25MHz, response speed depends on gage specification. —


0.01 mm (±9999.99 mm) / 0.0005 in (±99.9995 in) / 0.001 in (±999.999 in)0.005 mm (±9999.995 mm) / 0.00005 in (±9.99995 in) / 0.0001 in (±99.999 in)0.001 mm (±999.999 mm) / 0.00005 in (±9.99995 in) / 0.0001 in(±99.999 in)

0.0005 mm (±99.9995 mm) / 0.000005 in (±0.999995 in) / 0.00001 in (±9.99999 in)0.0001 mm (±99.9999 mm) / 0.000005 in (±0.999995 in) / 0.00001 in (±9.99999 in)

0.01 mm (±9999.99 mm) / 0.0005 in(±99.9995 in) / 0.001 in (±999.999 in)0.001 mm (±999.999 mm) / 0.00005 in(±9.99995 in) / 0.0001 in (±99.999 in)

[Automatic setting by gage]

Tolerance judgment display LED display (3 steps: Amber, Green, Red/ 5 steps: Amber, Amber flashing, Green, Red flashing, Red)Tolerance judgment output L1 to L5 (Open-collector / Switchover between L1 to L5 and BCD output with parameter)Control output Normal operation signal (NOM): open-collectorBCD output Open-collector / Switchover between 6-digit (positive/negative-true logic) and tolerance judgment output with parameterControl input Presetting, display hold, peak value clear, tolerance judgment BANK switch

RatingPower supply voltage 12 - 24V DCPower consumption 6W or less (500mA max.) Ensure at least 1A is available per unit.

Operating temperature range 0 to 40°C (RH 20 to 80%, no condensation)Storage temperature range –10 to 50°C (RH 20 to 80%, no condensation)External dimensions 96 (W) × 48 (H) × 156 (D) mm

Applicable gage head

LGE, LGF, LGK, LGB, LGM, LG, LGH(LGH110 excluded)

Models with reference point mark, sine wave output type are excluded.

LGF with reference point mark LGD, LGS, ID, SD

Number of gage inputs 1Mass Approx. 400g

*1: When a gage of 0.1µm resolution is connected, the maximum display range will be ±99.9999.

FEATURE• Produces 3-step/5-step, 3 kinds of tolerance output and BCD output.• A smoothing function reduces display digit fluctuations (542-015 and 542-017)• Employs DIN size (96x48 mm) and mount-on-panel configuration to facilitate system integration.

Function• Preset• Direction switch• Tolerance judgment (3/5-step, 3 kinds)• Peak (max., min., runout) measurement• Constant number• Smoothing• Error display/output• Key protection


• I/O output connector (with cover): 02ADB440• AC adapter: 357651• AC cable (Japan): 02ZAA000*• AC cable (USA): 02ZAA010*• AC cable (EU): 02ZAA020*• AC cable (UK): 02ZAA030*• AC cable (China): 02ZAA040*• AC cable (Korea): 02ZAA050*• Terminal connecting cable: 02ADD930** Required when using AC adapter.

Function542-015

+V

DC IN 12-24V 500mA

-V OUTPUT

INPUT

154.

6

48

96966.

613

7（

11）

91.4

44.4

JSR G

ROUP


K-017


Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


จอแสดงผลSERIES 542 — Panel mount, Multi-function TypeEB Counter

Function• Preset• Tolerance judgment output (3/5-step, 7 kinds)• Limit value output (2 kinds independently for each of the 7 channels)• Peak (max., min., runout) measurement• Diverse data output (Serial BCD, Simplified analog, Digimatic)


Optional Accessories• I/O output connector (with cover): 02ADB440• AC adapter: 357651• AC cable (Japan): 02ZAA000*• AC cable (USA): 02ZAA010*• AC cable (EU): 02ZAA020*• AC cable (UK): 02ZAA030*• AC cable (China): 02ZAA040*• AC cable (Korea): 02ZAA050*• Terminal connecting cable: 02ADD930*• External switch box The tolerance values or preset values can be easily input. 02ADF180 (with 2 m cable)

* Required when using AC adapter.

FEATURE• Produces 3-step/5-step, 7 kinds of tolerance output and limit value output independently for each of 7 channels.• Comes with serial BCD output capability, for connection to a programmable controller or personal computer, etc.

• Dynamic measurement possible with simplified analog output.• Employs DIN size (96x48mm) and mounton-panel configuration to facilitate system integration.

542-092-2 542-094-2 542-093-2

DIMENSION

Order No. 542-092-2 542-094-2 542-093-2


Maximum input frequency1.25 MHz (2-phase square wave), response speed depends on

gage specification.Response speed depends on gage

specification.


0.01 mm (±9999.99 mm) / 0.0005 in (±99.9995 in)0.005 mm (±9999.995 mm) / 0.00005 in (±9.99995 in)0.001 mm (±999.999 mm) / 0.00005 in (±9.99995 in)

0.0005 mm (±99.9995 mm) / 0.000005 in (±0.999995 in)0.0001 mm (±99.9999 mm) / 0.000005 in (±0.999995 in)

0.01 mm (±9999.99 mm) / 0.0005 in (±99.9995 in)0.005 mm (±9999.995 mm) / 0.00005 in (±9.99995 in)0.001 mm (±999.999 mm) / 0.00005 in (±9.99995 in)


[Automatic setting by gage]Tolerance judgment display LED display (3 steps: Amber, Green, Red / 5 steps: Amber, Amber flashing, Green, Red flashing, Red)

Input/Tolerance judgment output L1 to L5, open-collector

outputControl output Normal operation signal (NOM), open-collector

Control inputPresetting, display hold, peak value clear, tolerance judgment BANK switch, open-collector or novoltage

contact signal (with/without contact point)Serial BCD Bit serial format, open-collector

Interface

Analog output 2.5V+Counting value× Voltage resolution (25 mV / 2.5 mV): Full-scale 0 to 5V

Digimatic input/ output• Connecting to the external switch box (02ADF180) makes it easy to enter tolerance limits and preset values. Note) This function is not available when the gage is connected to Digimatic Mini-Processor DP-1VA LOGGER (264-505).• It can be connected to DP-1VA LOGGER (264-505) and to IT-016U.

RatingPower supply voltage 12 to 24 V DC, terminal block (M3 screw)Power consumption 6 W or less (500 mA max.)

Ensure at least 1 A is available per unit.Operating temperature range 0 to 40 °C (RH 20 to 80 %, non-condensing) / –10 to 50 °C (RH 20 to 80 %, non-condensing)

Applicable gage headLGF, LGK, LGE, LGB

Models with reference point mark,sine wave output type are excluded.

LGF with reference point mark LGS, LGD, LGD-M

Mass Approx. 400g Approx. 400g Approx. 400g *1: When a gage of 0.1µm resolution is connected, the maximum display range will be ±99.9999.

542-092-2

137

（11）

6.6

91.4

44.4

96

154.

6

48

96

BANK Fn

EB-�

P.SETMODE

******INPUT

+V

DC IN 12-24V 500mA

-V OUTPUT

UNIT MAX MINTIR

L1

L7＋/－

BANK

JSR G

ROUP




K-018

Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


จอแสดงผลSERIES 542 — Panel mount, Multi-function TypeEH Counter

Optional Accessories• I/O output connector (with cover): 02ADB440• SPC cable (0.5 m): 02ADD950• SPC cable (1 m): 936937• SPC cable (2 m): 965014• Measurement data loading software: SENSORPAK The Digimatic connecting cable doubles as a RS Link cable.

FEATURE• Two types are available for this model: a 1-axis display and a 2-axis display, both of which enable addition or subtraction calculations between two gages.• Multifunctional counter equipped with zerosetting, presetting, tolerance judgment.• RS-232C and USB are equipped as standard. Data transfer to a PC is possible. (USB is supported only by Mitutoyo SENSORPAK.)

• A multi-point (max. 20 points) measuring system can easily be configured with the builtin RS Link networking function. • Employs DIN size (144x72 mm) and mounton- panel configuration to facilitate system integration.

DIMENSION

Order No. 542-075* 572-071* 542-073* 542-072*

Number of axes to be displayed 1 axis 2 axes


Maximum input frequency 2.5MHz (2-phase square wave) —



0.0001 mm (±99.9999 mm) / 0.000005 in (±0.999995 in) [Parameter set]Automatic setting by gage

Tolerance judgment display LED display (3 steps: Amber, Green, Red/ 5 steps: Amber, Amber flashing, Green, Red flashing, Red)

Interface

RS-232C/USB/parameter selection via digimatic (only DP-1VA LOGGER, digimatic mini-processorcan be connected) (USB used only with SENSORPAK.)

Selection by parameter from 3-step, 5-step, or simple BCDTotal tolerance judgment output (when tolerance function is enabled)

Analog output (1 V to 4 V)

Input/Control output Open-collector

output Control inputDisplay BANK switching, peak mode, presetting, display hold, hold per axis:

open-collector or no-voltage contact signal (with/without contact point)

RatingPower supply voltage Supplied AC adapter, or 12 to 24 V DC

Power consumption8.4 W (max. 700 mA)

Ensure at least 1 A is available per unit.Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation)

Storage temperature(humidity) range –10 to 50°C (RH 20 to 80%, no condensation)

AC adpter / AC cableAC adapter: 357651 /

AC cable: 02ZAA000, AC cable (Japan): 02ZAA000*, AC cable (USA): 02ZAA010*, AC cable (EU): 02ZAA020*,AC cable (UK): 02ZAA030*, AC cable (China): 02ZAA040*, AC cable (Korea): 02ZAA050*

Applicable gage headLGF, LGK, LGB, LG

Models with reference point mark, sine waveoutput type are excluded.

LGF with referencepoint mark

LGD, LGS, ID

Mass Approx. 760g Approx. 800g Approx. 800g Approx. 800g * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE. For those models of the Order No. with Suffix “1”, AC adapter is not attached as a standard accessory.

542-075 542-071 542-073 542-072

Unit: mm

542-07527

11.2

137

5.1

137

156.7

144

72(3

.1)

148.2Indicates AC adapter installation

(Approx 10°)

DC12-24V

RS LINK

IN OUT

RS-232C I/O

700mA

DC IN

Code No.ModelSerial No.

MADE IN JAPAN

********************

Kawasaki, Japan

Code No.ModelSerial No.

MADE IN JAPAN

RS-232C

B AINPUTRS LINK

68

138

138

JSR G

ROUP


K-019


Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


จอแสดงผลSERIES 542 — 6-channel, No-display TypeEV-16P/Z/D Counter

Function• External Control (Zero-set, Preset etc.)• Direction switch• Error display• Tolerance judgment output• Diverse data output (RS-232C, BCD, Segment)• Peak measurement Maximum value, minimum value, runout, and differential measurement between two gages Addition, averaging, maximum value, minimum value, and maximum width


• I/O output connector (with cover): 02ADB440• ID-EV External display unit: 02ADD400• SPC cable (0.5 m): 02ADD950• SPC cable (1 m): 936937• SPC cable (2 m): 965014• AC adapter: 357651• AC cable (Japan): 02ZAA000*• AC cable (USA): 02ZAA010*• AC cable (EU): 02ZAA020*• AC cable (UK): 02ZAA030*• AC cable (China): 02ZAA040*• AC cable (Korea): 02ZAA050*• Terminal connecting cable: 02ADD930** Required when using AC adapter.

• SENSORPAK

FEATURE• Up to six gages can be connected to one unit, extendable up to 10 units (60 gages at maximum) using the RS Link function* to facilitate the configuration of a multi-point measurement system.

• A range of output modes to choose from: I/O output for tolerance judgment and segment output, BCD data output and RS-232C output are available.• Other than normal measurement, peak measurement or differential measurement between gages can be performed.

542-063 542-067 542-064

Order No. 542-063 542-067 542-064

Number of input channels 6

Maximum inputfrequency

1.25MHz (2-phase square wave),response speed depends on gage

specification.Max. counting speed: 5MHz

1.25MHz (2-phase square wave),response speed depends on gage

specification.Max. counting speed: 5MHz

Response speed dependson gage specification.


Resolution( ) indicates maximumdisplay range

10 µm (±999999.99 mm) / 0.0005 in (±9999.9995 in)5 µm (±999999.995 mm) / 0.00005 in (±999.99995 in)0.5 µm (±9999.9995 mm) / 0.000005 in (±99.999995

in)*1[Parameter set]

10 µm (±999999.99 mm) / 0.0005 in (±9999.9995 in)5 µm (±999999.995 mm) / 0.00005 in (±999.99995 in)1 µm (±99999.999 mm) / 0.00005 in (±999.99995 in)

0.5 µm (±9999.9995 mm) / 0.000005 in (±99.999995 in)[Parameter set]

Depends on gagespecification.

Error message Overspeed, gage error etc.External display Dedicated external display unit D-EV (optional) can be connected.Number of input switches 4Function of input switches Measurement mode switching, parameter setting

Tolerance judgment output 1 to 6 channels (L1, L2, L3), open-collectorBCD output Parallel BCD output (positive/negative-true logic), open-collector

Input/output Segment output Function to set on only the terminals corresponding to the counting values, open-collectorControl output Normal operation signal (NOM), open-collector

Control inputOutput channel designation (segment, in the BCD mode), presetting, peak value clear,

range changeover (at segment output), holding counting valueopen-collector or no-voltage contact signal (with/without contact point)

InterfaceRS-232C

Measurement data output and control inputEIA RS-232C-compatible

Use cross cables for home position, DTE (terminal definition).

RS linkMax. connecting unit: 10

Connecting cable length: Max. 10 m (sum of link cable length)Data transfer time: 1sec./60ch (when transmission rate is 19200 bps)

RatingPower supply voltage 12 to 24 V DC, terminal block (M3 screw)

Power consumption8.4 W or less (700 mA max.)

Ensure at least 1 A is available per unit.Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation)


Mass Approx. 910g Approx. 910g Approx. 830gStandard Accessories Fixing foot (4), connecting bracket (4), fixing screw M4x12 (8)Applicable gage head LGF, LGK, LGB, LG

Models with reference point mark,sine wave output type are excluded.

LGF with reference point mark LGD, LGS

*1: Available when using D-EV.

Unit: mm

144

6.5

4.54 4136

672

5 5161

16 16139

44

64

Code No.***-*** Model EV-16PCode No.***-***

RS LINKErr.OUTIN

LOAD 8 7 MODE 65 4

3 SEL. 2 1 DATA

F E D INPUT C B A

RS-232CIO/BCD

+V -V

DC12-24V700mA

542-063

DIMENSION

JSR G

ROUP




K-020

Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


จอแสดงผลDisplay unit for the EV counterD-EV Display Unit


• SPC cable (0.5 m): 02ADD950*1• SPC cable (1 mm): 936937*1• SPC cable (2 m): 965014*1• AC adapter: 357651• AC cable (Japan): 02ZAA000*2• AC cable (USA): 02ZAA010*2• AC cable (EU): 02ZAA020*2• AC cable (UK): 02ZAA030*2• AC cable (China): 02ZAA040*2• AC cable (Korea): 02ZAA050*2• Terminal connecting cable: 02ADD930*2*1: Required when connecting with EV-16P/D/Z.*2: Required when using AC adapter.

FEATURE• Allows set-up of EV counter without a personal computer or other equipment.

• Able to display each gage measurement value and GO/NG judgment result, total GO/NG judgment result for all gages, setting details, and errors.

02ADD400

DIMENSION

-V+V

-V+V

96 6.6 67 (11) 91.4

44.4

48

OUT000001EV-I02ADD400

MADE IN JAPANSerial No.ModelCode No.

200mADC12-24V

INRS LIN

K

MODE P.SETFnDISP

GAGE

MAX MINTIR

UNIT +NG

GO

-NG

000001EV-I02ADD400

MADE IN JAPAN

Serial No.ModelCode No.

200mADC12-24V

OUTIN RS LINK

Unit: mm

Order No. 02ADD400

Number of connections 1 EV counter per unit

Number of digits Sign plus 6 digits (8 digits internal to EV counter)

LED displayChannel display (also for judgment result display): 3 (3-color LED)

Measurement mode display (current data, maximum value, minimum value, runout): 2Status display: 1 (2 colors)

Operation switches 4

Function of operation switchChannel switching, measurement mode switching (current data, maximum value,

minimum value, runout), parameter setting, presetting, tolerance setting

Input/output RS Link connectors: 1 each for IN, OUT

Error message Overspeed, gage error etc.

Power supply Terminal block (M3 screw), 12 to 24 V DC, 200 mA


Storage temperature(humidity) range –10 to 50°C (RH 20 to 80%, no condensation)

External dimensions 96(W)x48(H)x84.6(D)mm

Mass 150g

JSR G

ROUP


K-021


Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


โปรแกรมMeasurement data loading software for EH, EV, VLSENSORPAK

Measurement screen

Meter screen

Chart screen

Order No. 02NGB072

Product Configuration Program disk (CD), license key, operation manual

Compatible devices

Mitutoyo RS_LINK compatible devices • LGH Series (USB, RS-232C) • EH counter (USB, RS-232C) • EV counter (RS-232C) • Litematic VL (RS-232C)

Connecting cable

Separately prepare the cable with the following specifications: Accessory • RS-232C connection: I/O cable (21HZA137)*1Commercial product • USB connection: USB cable (type A - type B) • RS-232C connection: RS-232C cross cable*1

Number of connectable gages Max. 60 units (when 10 units of EV counter for linear gage are connected via RS-Link)

Display*2 Display format: counting, bar graph, indicator, chart, and tableDisplay cycle: 1s (when 60 gage units are connected, 1-window display, and no Excel output)

CalculationCalculation (up to 30 items) between designated gages is available.Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum–minimum), calculation with a constant

Functions Tolerance judgmentPer item: Displays the result in colors (3-step tolerance: red/green/red; 5-step tolerance: red/yellow/green/yellow/red)Total judgment: Displays in colors (red/green) by monitoring the multiple gages and calculation result

Recording*2

Items: channel values, calculation result, tolerance judgment, total tolerance judgment, timestampMax. number of records: 60000 for software recording (with 6 gages connected); up to 9000 (with 60 gages connected)Output function: Direct output to Excel, CSV file output (compatible with MeasurLink)Recording trigger: key, timer, external TRG

Input/output*3 Input: TRG for recording (HOLD)Output: Total tolerance judgment result

System EnvironmentDOS/V compatible PC environmentCPU: Pentium4 2 GHz or more, Memory: 2 GB or more, Hard disk: 2 GB or more free spaceOS: Windows7 (32bit/64bit), Windows 8.1 (32bit/64bit), Windows 10 (64bit)

*1: If the PC is not equipped with an RS-232C port, please contact the nearest Mitutoyo sales office / service center.*2: Display cycle and the maximum number of records differ depending on the environment (specification of PC, number of connected gages, display format and communication setting).*3: With use of the I/O cable (accessory). When an I/O cable is not used, the I/O connector of the counter alternatively functions. (Refer to the user’s manual of the counter in use.)

FEATURE• This software facilitates loading measurement data onto a personal computer from a linear gage counter with RS-232C output (EH, EV), with USB output (EH), or from a Litematic display (VL).

• 60 channels (max.) of measurement data can be processed.• Arithmetical calculations and maximum width calculations can be performed using the measurement data.• Exporting measurement data into MS-Excel format is supported.• Real time graphical display by means of bargraph or meter is provided.


• I/O cable: 21HZA137

60

D-SUB 9pin

DIN connector 5pin

DIN connector 5pin

D-SUB 9pin

2000

1000

Communication cable (1 pc.)

Connection between PC and counter: 2 mInput/output cable: 1m

Input/output connector (1 pc.)

JSR G

ROUP




K-022

LITE

MAT

ICLI

TEM

ATIC

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


ไลเมติคSERIES 318 — High-accuracy/resolution Measuring MachineVL-50-B/50S-B Litematic

Optional Stand for VL-50S-B

15

250

80

270

ø50

300

48 80

56

157

Clamp screw

365

Column

Height adjustment nut

Base

Bracket

Hex socket set screw

(4-M4x0.7)

Litematic head

Unit: mm957460


• Foot switch: 937179T• Dedicated stand: 957460*4• SPC cable (1 mm): 936937*5• SPC cable (2 m): 965014*5• VL weight part: 02AZE375*6• Recommended spare contact points: Shell type: 101118 (Approx. 0.02 N) Carbide tipped spherical contact point, ø7.5: 120059 (Approx. 0.03 N) Carbide tipped spherical contact point, ø10.5: 120060 (Approx. 0.06 N) Carbide tipped needle contact point, ø0.45: 120066 (Approx. 0.01 N)*4: Only VL-50S is available.*5: Refer to page G-23 for details of the RS link.*6: Not applicable to 318-223 and 318-228

FEATURE• The Litematic is primarily designed for measuring easily-deformed workpieces and high-precision parts using an extra-low measuring force of 0.01 N.• 0.15 N and 1 N models are available as factory-installed options if a greater measuring force is required.• The motor-driven spindle moves up/down and stops when the contact point touches the workpiece. Then the maximum, minimum and runout values are measured under a constant force.

• High resolution of 0.01 µm, and wide measuring range of 50 mm.• Measuring system VL-50-B, integrated display type, and VL-50S-B, a separate display type, are available.• The measuring table supplied with VL-50-B is ceramic, which is corrosion free, for easier maintenance and storage.• The spindle is made of low thermal expansion material.• Motor life is approximately 100,000 operations, after which replacement is advisable. This machine is not suitable for continuous use, such as on a production line.

318-226318-221

Order No. 318-221* 318-222* 318-223* 318-226* 318-227* 318-228*

Model VL-50-B VL-50-15-B VL-50-100-B VL-50S-B VL-50S-15-B VL-50S-100-B

Measuring range 0 to 50 mm (0 to 2 in)Resolution 0.01/0.1/1.0 µm (0.0000005 in/0.000005 in/0.00005 in)Display unit 8 digits / 14 mm (0.6 in) character height (without signs)Scale type Reflection type linear encoderStroke 51.5 mm (2 in) (when using a standard contact point)Indication accuracy (20°C)*1 (0.5+L/100)µm L=arbitrary measuring length (mm)Accuracy guaranteed temperature*2 20 ± 1°CRepeatability*1 σ =0.05µmMeasuring force*1 0.01N 0.15N*3 1N*3 0.01N 0.15N*3 1N*3

Feed Measurement Approx. 2 mm/s (0.08 in/s) or 4 mm/s (0.16 in/s) (changeable by parameter)Speed Fast feed Approx. 8 mm/s (0.3 in/s)Contact point ø3 mm carbide tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point: 901312Measuring table ø100 (ceramic, grooved, removable) —Input Foot switch input (when optional foot switch is used) External ControlOutput Digimatic output / RS-232C output (changeable by parameter)

RatingPower supply 85 to 264 V AC (depends on AC adapter)Power consumption Max. 12 W (12 V, 1 A)

Standard Accessories

AC adapter: 357651, Power cable: 02ZAA000, Grounding wire: 934626,AC cable (Japan): 02ZAA000*, AC cable (USA): 02ZAA010*, AC cable (EU): 02ZAA020*,AC cable (UK): 02ZAA030*, AC cable (China): 02ZAA040*, AC cable (Korea): 02ZAA050*

Hex wrench (2 pcs, for fixing contact point and for removing fixing bracket) *1: Normal measurement using standard contact point.*2: Under less temperature change, and hot or cold direct air flow should be avoided.*3: 0.15 N, 1 N types are factory-installed option.Note: To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.

85 150

170

82.9

5 ø32

12.5

29 80 14.8

172

186.4 50.2

80.2

(11°)

4-M4×0.7 depth 10

56

Scale unit

Display unit

Connecting cable 2m

Unit: mm

202 300

103.2

56

380

.2

Measuring table ø100

Clamp screw for measuring table

Stylus

Display

Operation switch

318-221 318-226

DIMENSIONJSR G

ROUP


K-023


Mu-

Chec

ker

Mu-

Chec

ker

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Mu-CheckerSERIES 519 — Electronic micrometerLever/Cartridge Probe Heads

Common specifications• Connection: Half-bridge• Cable length: 2m• Connector type: MAS-5100 (DIN5P) or equivalent

Order No. 519-521 519-522 519-326 519-327

Measuring range (mm) ±0.5

Stroke (mm) ±0.6 ±0.65

Measuring force (N) Approx. 0.2 Approx. 0.02 Approx. 0.15

Linearity (%) ±0.3 ±0.5

Stylus support Pivot bearing Pivot bearing Parallel-leaf spring Pivot bearing Note: A ø2 mm ball-ended stylus is supplied as standard with all probes.

519-521 • Interchangeable styli: ø1: 520940 (Standard accessory) ø2: 520939 (Standard equipment) ø3: 520938 (Standard accessory)

519-522 • Interchangeable styli: ø1: 520940 (Standard accessory) ø2: 520939 (Standard equipment) ø3: 520938 (Standard accessory)

35

145

5.824.9

7

17

261.7

5

（27

.75）

19 21.3

4

1330.7 52.3

9.2

φ 6.6

φ 6.5 φ 14

35

145

5.824.97

17 261.7

5（

27.75）

19 21.3

4

1330.7 52.3

9.2

φ 6.6

φ 6.5 φ 14

519-326 • Interchangeable styli: ø1: 102824 (Option) ø2: 102825 (Standard equipment) ø3: 102826 (Option)

519-327 • Interchangeable styli: ø1: 102824 (Option) ø2: 102825 (Standard equipment) ø3: 102826 (Option)

φ6.5

R7

φ2

43

67.6

22.5 5.5

76.5

144.

5

26

8

9

13

φ 6.5

R7

16

25.3

32.36.5 15.8

56

24

13

7

247

3.5

Transfer Stand

Platen

Parallelism: 1.3 µm or less

Stem mounting hole

without Bush: ø9.53with Bush: ø8

ø30

5038

545

430

ø58

80

168

Unit: mm

Main Specifications

Order No.Effective transfer range

[mm]Fine adjustment range

[mm]Mounting hole

[mm]

519-109-10 0 - 320 1Without Bush: ø9.53

With Bush: ø8

519-109-10(with a serrated plate)

Note on stylus angleIf the stylus of a pivot bearing type probe makesan angle with a workpiece surface, as in the figure,calibration should be performed for accuratemeasurement. Alternatively, the displayed value maybe corrected by multiplying it by the appropriatecorrection factor as given in the table.Model 519-326 does not need correction.

Angle (θ)

Correction factor

0° 1.00

10° 0.98

20° 0.94

30° 0.87

40° 0.77

50° 0.64

60° 0.50 Display value x Correction factor = Corrected value

60゜15

1.5

（5.934）

θ

Unit: mm

Dimensions ofdovetail plate onprobe bodyEnables mounting ona lever head mountingbracket or stem.JS

R GROUP




K-024

Mu-

Chec

ker

Mu-

Chec

ker

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


SPECIFICATIONSCartridge heads (special order only)

Order No. 519-331 519-332 519-346 519-347 519-385 519-341 519-348

Measuring range (mm)

±0.5 ±0.5 ±0.25 ±0.5 ±1.5 ±2.5 ±1.0

Stroke (mm) ±0.65 ±0.65+0.34-0.26

+0.85-0.65

+2.35-1.65

+3.2-2.8

+1.35-1.15

Measuring force (N) Approx. 0.25 Approx 0.25 Approx 0.7 Approx 0.7 Approx 0.7 Approx 0.9 Approx 0.7

Stem Dia. (mm) ø8 ø9.52 ø8 ø8 ø8 ø8 ø8

Linearity (%) ±0.5 ±0.5 ±0.3 ±0.3 ±0.3 ±0.5 ±0.3

Plunger support Plain bearing Linear ball-bearing

519-331 M2.5x5 interchangeablecontact points for dialindicators can be used.

Unit: mm

519-346 Unit: mm

8.1 (zero point) 71

5 15 4.5

7.3

R 1.5

φ12

φ8h

6

1.3

0 -0.0

09

3.5 (zero point)

φ8h

6

0.26 0.34

0 -0.0

09R1.25

φ 3.5

2512

519-347 Unit: mm 519-385

• M2.5x5 interchangeable contact points for dial indicators can be used.

Unit: mm

6.8 (zero point) 22.534.5

φ8h

6

0.65 0.85

0 -0.0

09

R1.5

112.358 31

1.65 2.35

SR1.5

21.65 (zero point)

φ8h

6 0 -0.0

09

519-341 • M2.5x5 interchangeable contact points for dial indicators can be used.

Unit: mm

519-348 • M2.5x5 interchangeable contact points for dial indicators can be used.

Unit: mm

14.75 (zero point) 712

84.5

φ8h

6

2.83.2

0 -0.0

09

R1.515.25 (zero point) 48 31φ

8h6

1.15 1.35

0 -0.0

09

R1.5

Lever-head mounting brackets(optional)Optional accessories for Mitutoyo test indicatorscan be used.

Stems

ø4 dovetail-grooved

stem902802


stem902803


stem902804

ø9.5 dovetail-grooved

stem902805

Clamp

Clamp for ø6/8

dovetail-grooved stem902053

Unit:mm

ø18

ø6 ø8

ø6

16.227.5

5.8

12.2

6

10.9

902053

Clamp for ø6/9.5 dovetail-grooved stem

900320

Holder

ø6

Holding arm A (Square 9x9, Length 100)900209

ø6

Holding arm B (ø8, Length 115)900211

JSR G

ROUP


K-025


Mu-

Chec

ker

Mu-

Chec

ker

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Mu-CheckerSERIES 519 — Electronic micrometerAnalog/digital amplifier/displays

Optional Accessories• Vertical stand (271214) Attached to the bottom surface of the Mu-checker, it can be vertically mounted on the base.• SPC Cable for connecting digital Mu-checker (936937) Used for connecting to the Digimatic mini-processor.• Output cable A (934795) Used for connecting to external devices, such as data recorders, etc.

1m

7PBanana chips

• Analog, limit out (7P) connector (529035) Used for output to external data recorders, sequencers, etc.

FEATURE• Single touch zero-set function is standard.• Switchable measurement ranges make the Muchecker suitable for a range of applications, especially those that involve

moderately fastchanging measurement values which suit the use of analog readout.• Two types of analog display are available and one digital type.

Analog Mu-checker

Standard type519-551

Differential type519-553

Order No. 519-551* 519-553*

Type Standard type (one probe required) Differential type (one/two probes required)

Display range ±5µm/±15µm/±50µm/±150µm/±500µm/±1500µm

Graduation 0.1µm/0.5µm/1µm/5µm/10µm/50µm

Differential mode ±A ±A, ±B, ±A±B

Display accuracy (linearity) ±1% of full-scale reading

Analog output ±1V at full-scale reading

Analog output accuracy Within ±0.1% of full-scale reading (excluding probe)

Zero-setting adjustment range Manual Instant zero setting: 1/3 of full scale for each range

External dimensions 134(W) x 183(D) x 208(H) mm

Mass 2.4kg

Power input AC adapter 100, 120, 220, 240 VAC 50/60 Hz

Probe Various probes (refer to pages G-25 and G-26) * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.

Digital Mu-checker 519-561

Digital Mu-checker

Order No. 519-561*

Type Differential type digital Mu-Checker (2 connecting heads)

Display range ±2.000mm/±0.2000mm

Resolution 0.001 mm/0.0001 mm

Differential mode ±A, ±B, ±A±B

Measurement mode ABS/CMP

Analog output ±1V at full-scale reading

Digital output Digimatic code out

External dimension 134(W) x 183(D) x 208(H) mm

Mass Approx. 2.6kg

Power input AC adapter 100, 120, 220, 240 VAC 50/60 Hz

Probe Various probes (refer to pages G-25 and G-26) * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.

JSR G

ROUP




K-026

Mu-

Chec

ker

Mu-

Chec

ker

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Mu-CheckerSERIES 519 — 6-channel, No-display TypeEV-16A Counter

Main features• External control (Zero-set, Preset etc.)• Direction switching• Error messaging• Tolerance judgment output• Each data output (RS-232C, BCD, segment)• Peak measurement (maximum value, minimum value, runout) and arithmetic operation (addition, average, maximum value, minimum value, maximum width) between axes

Optional Accessories• I/O output connector: 02ADB440• D-EV external unit: 02ADD400• SPC cable, 0.5m: 02ADD950• SPC cable, 1m: 936937• SPC cable, 2m: 965014

Note 1: To perform calibration a D-EV display unit is required. At least one D-EV unit is required when using multiple EV-16A.Note 2: As a power supply is not supplied as standard, an appropriate power supply with a current capacity of 1A or more must be provided for each EV-16A.

• SENSORPAK

Refer to page G-20 for more details.

519-355

FEATURE• Up to six probes can be connected to one unit. Up to ten counters can be connected to one personal computer using the RS Link function to enable the configuration of a multi-point measurement system comprising a maximum of 60 gages.• I/O outputs for RS-232C, BCD, tolerance judgment and segment output are available.• Maximum, minimum and runout measurement between channels (in the same unit) is possible in addition to normal measurement on individual channels.

SYSTEM CONFIGURATIONMitutoyo probes, EV-16A counters and D-EV display units combined with commercial controllers and personal computers enable construction of a powerful, multi-channel system that can be built to meet the needs of almost any measurement application.

Probe forMu-checker

Personal com puter (commercially available product)

Program m able cont roller(commercially available product)

Tolerance judgment output / BCD outputSegment output / RS-232C output

RS-232C output

EV-16A

D-EV

Calibration meter

DIMENSIONUnit: mm

Pan head screw (M4, 8 pcs. standard accessories)Connecting bracket (4 pcs., standard accessories)

464

4

144136 44 5

165

16139161

6.5

4.5

Fixing foot (4 pcs., standard accessories)

Order No. 519-335

Number of gage inputs Six

Quantizing error ±1 LSD

Display range (mm) ±2.000, ±0.200

Resolution (mm) 0.001, 0.0001

Display processing 8 digits for parameters (display setting), 1 for error display

Error messaging Power supply voltage error, Gage error, etc.

External display Dedicated external display unit D-EV (optional) can be connected

Number of input switches 4

Input switch function Measurement mode switching, Parameter settings

Tolerance judgment output 1 to 6 gages (L1, L2, L3), open-collector

BCD output Parallel BCD output (positive/negative-true logic), open-collector

I/O Segment output A function to enable only output from the terminal corresponding to the counting values, open-collector

Control output Normal operation signal (NOM), open-collector

Control inputOutput channel designation (segment, in BCD mode), presetting, peak value clear, range changeover (at segment output),

holding counting value, open-collector or no-voltage contact signal (with/without contact point)

RS-232CMeasurement data output and control input, EIA RS-232C-compatible

Use cross cables for home position DTE (terminal definition)Interface

RS linkMax. connected units: 10 (6 when using EF counter)

Connecting cable length: Max. 10 m (sum of link cable length)Data transfer time: 1.1 sec./60 ch (when transmission rate is 19200 bps)

RatingPower supply voltage Terminal (M3 screw), 12-24VDC

Current consumption 1A

Operating temperature (humidity) range 0 to 40 ºC (RH 20 to 80%, no condensation)

Storage temperature (humidity) range -10 to 50 ºC (RH 20 to 80%, no condensation)

External dimensions 144(W) x 72(H) x 139(D) mm

Mass Approx. 1000 g

Standard accessories Fixing foot (4), connecting bracket (4), fixing screw M4×8 (8)

Applicable probes For probes, refer to pages G-25 and G-26.

JSR G

ROUP


K-027


LASE

R SC

AN M

ICRO

METE

RSเล

เซอร

์สแกน

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 5 µm to 2 mm Measuring UnitLSM-500S Measuring Unit

Optional Accessories• Multifunctional display unit, LSM-6200:

Order No. Display type Remarks544-071 Japanese mm/E Japanese user’s manual544-071* English mm/E

English user’s manual544-072* English mm/inch

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.”

• Easy-to-operate display unit, LSM-5200:

Order No. Remarks544-046 Japanese user’s manual544-047 English user’s manual

• Standard calibration gage set (ø0.1, ø2.0) : 02AGD110• Guide pulley : 02AGD200• Air blower : 02AGD220

Order No. Cable length02AGN780A 5m02AGN780B 10m02AGN780C 15m

DIMENSIONS

Cable space

Measuring range

(Measuring position)

M3, depth 6 (×4)ø3.1, depth 6

55126181

2

1

34324610370min

2532

.5

8440

15.5

10.5 17

.5

1111

Working distance

40

Unit: mm

FEATURE• Capable of measuring down to 5 µm outside diameter*1.• Provides ultra-high accuracy of ±0.3 µm over the entire measuring range (5 µm to 2 mm).

Order No. 544-531 544-532

Applicable laser standards JIS IEC, FDA

User’s Manual Japanese version English version

Measuring range 0.005 to 2mm*1

Resolution 0.01 to 10µm (selectable)

Repeatability*2 ±0.03µm

Accuracy (20°C)*3 ±0.3µm

Positional error*4 ±0.4µm

Measuring range*5 1x2mm (0.005 to 2mm)

Scanning rate 3200 scans/s

Laser wavelength 650nm (Visible)

Laser scanning speed 76m/s

Operating Temperature 0 to 40°C

environment Humidity RH 35 to 85% (no condensation)

Protection Level IP64*6

*1: The measuring range for a transparent object is 0.05 mm to 2 mm. Please consult your local Mitutoyo office for objects smaller than 0.05 mm. The measuring range is 0.1 mm to 2 mm in the 1 to 255 edge measurement mode or when activating automatic workpiece detection. If using the optional dual connection unit for LSM-6200, the measuring range will be 0.05 mm to 2 mm.*2: Determined at the level of ±2 ( : standard deviation) when measuring ø2 mm at the interval of 0.32 sec. (average 1024 times).*3: Applies at the center of the measuring range when measuring outside diameters.*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction]×[scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.Note: When using the extra-fine line measurement function (FINE), guide messages for setting the following will not be displayed: dual-measurement, segment designation, automatic workpiece detection, and group judgment.

เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 50 µm to 10 mm Measuring UnitLSM-501S Measuring Unit






Order No. Remarks

544-046 Japanese user’s manual544-047 English user’s manual

• Standard calibration gage set (ø0.1, ø10.0) : 02AGD120 • Wire guiding pulley : 02AGD210• Adjustable workstage : 02AGD400• Air blower : 02AGD230 • Workstage : 02AGD270• Extension signal cable

Order No. Cable length02AGN780A 5m02AGN780B 10m02AGN780C 15m

• Extension relay cable

Order No. Cable length

02AGC150A 1m

DIMENSIONS

8-M3

42 6453

10.5

15.5

2250

2084

104

57.5

23070min

123 3968

34 34* 7

10

48 8

18.5

4040

110 40.5 38.5 30

9.5

9.5

14.5

9.5

150

6

40 40

157 73

ø3.1 hole, depth 6


Signal cable

Cable space

Relay cable

Emission Unit Base

Max. 100

Measuring range

Reception Unit

Measuring position

M4, depth 8 (x3)M4, depth 8 (x3)

To Reception Unit(Cable length 0.6m)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

Dimension when disconnected (bottom view)

<Mass>Emission Unit: 0.7kgReception Unit: 0.4kgBase: 0.3kgSignal cable (5m): 0.5kg*7: Extendable up to 66mm.

Unit: mm

Order No. 544-533 544-534



Measuring range 0.05 to 10mm



Accuracy Whole range ±0.5µm

(20°C)*2 Small range ±(0.3+0.1∆D)µm*3


Measuring range*5 2x10mm (ø0.05 to ø0.1mm) 4x10mm (ø0.1 to ø10mm)







*1: Determined at the level of ±2σ(σ: standard deviation) when measuring ø10 mm at the interval of 0.32 sec. (average 1024 times).*2: Applies at the center of the measuring range when measuring outside diameters.*3: ∆D=Difference in diameter between the master gage and workpiece. (Unit: mm)*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction]×[scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.

FEATURE• Provides ultra-high accuracy of ±0.5 µm over the entire measuring range (0.05 to 10 mm).• Narrow range accuracy of ±(0.3+0.1∆D) µm for high-precision measurement.

JSR G

ROUP




K-028

LASE

R SC

AN M

ICRO

METE

RSเล

เซอร

์สแกน

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 0.3 mm to 30 mm Measuring UnitLSM-503S Measuring Unit







• Standard calibration gage set (ø0.1, ø30.0) : 02AGD130 • Adjustable workstage : 02AGD490• Air blower : 02AGD240 • Workstage : 02AGD270• Extension signal cable

Order No. Cable length02AGN780A 5m02AGN780B 10m02AGN780C 15m02AGN780D 20m


02AGC150A 1m02AGC150B 3m02AGC150C 5m

DIMENSIONSø3.1

8-M3

805.

5

10525054.584.5

42 42

70 min

170 5580 50*7

88

482594857202

6

18.5

5022

10.5

15.5

9.5

9.5

14.5

9.5

415790

12 11090

20

10

30

355

46

53 6842

95.5 65.5

150

57.5

130


Signal cable

Cable space

Relay cable

Emission Unit

Max. 350

Measuring range

Measuring range

Reception Unit

Base

M4, depth 8, ø3.3 through hole (x3)

For mounting side plate (same in the back)M4, depth 8, ø3.3 through hole (x2)

For mounting side plate (same in the back)

To Reception Unit

(Cable length 1.4m)

ø3.1, depth 6 (Reference hole)

M4, depth 8 (x3)For mounting base




<Mass>

Emission Unit: 1.1kg

Reception Unit: 0.6kg

Base: 0.5kg

Signal cable (5m): 0.5kg

*7: Extendable up to 270mm

Unit: mm

FEATURE• Ensures ±1.0 µm accuracy over the entire measuring range (0.3 to 30 mm).• Narrow range accuracy of ±(0.6+0.1∆D) µm for high-precision measurement.

Order No. 544-535 544-536



Measuring range 0.3 to 30mm



Accuracy Whole range ±1.0µm

(20°C)*2 Small range ±(0.6+0.1∆D)µm*3


Measuring range*5 10x30mm (0.3 to 30mm)







*1: Determined at the level of ±2σ (σ: standard deviation) when measuring ø30 mm at the interval of 0.32 sec. (average 1024 times).*2: Applies at the center of the measuring range when measuring outside diameters.*3: ∆D=Difference in diameter between the master gage and workpiece (Unit: mm)*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction]×[scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.

เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 1 mm to 60 mm Measuring UnitLSM-506S Measuring Unit







• Standard calibration gage set (ø1.0, ø60.0) : 02AGD140 • Adjustable workstage : 02AGD520• Air blower : 02AGD250 • Extension signal cable



02AGC150A 1m02AGC150B 3m02AGC150C 5m

DIMENSIONS

12-M3

ø3.1

15.5

10.5

110*716388

192348

66

20

60

42

4218

.5

90 360 90

2250

100

58 70

7

258 102

540

185 82

70min

2011

013

0

12

115.5 71

797

168.587 87

42

14.5

9.5

162 174.5 121 63

9.5

9.5

273


Signal cable

Cable space

Relay cable

Emission Unit

Max. 700

Measuring range

Measuring range

Reception Unit

Base

M5, depth 10, ø4.2 through hole (x3)

For mounting side plate (same in the back)M5, depth 10, ø4.2 through hole (x2)


To Reception Unit

(Cable length 1.4m) ø3.1, depth 6 (Reference hole)





<Mass>



Base: 0.8kg



Unit: mm

Order No. 544-537 544-538



Measuring range 1 to 60mm



Accuracy Whole range ±3µm

(20°C)*2 Small range ±(1.5+0.5∆D)µm*3

Positional error*4 ±4µm

Measuring range*5 20x60mm (1 to 60mm)







*1: Determined at the level of ±2σ (σ: standard deviation) when measuring ø60 mm at the interval of 0.32 sec. (average 1024 times).*2: Applies at the center of the measuring range when measuring outside diameters.*3: ∆D=Difference in diameter between the master gage and workpiece (Unit: mm)*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction]×[scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.

FEATURE• Ensures ±3 µm accuracy over the entire measuring range (1 to 60 mm).• Narrow range accuracy of ±(1.5+0.5∆D) µm for high-precision measurement.

JSR G

ROUP


K-029


LASE

R SC

AN M

ICRO

METE

RSเล

เซอร

์สแกน

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories






* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.”• Easy-to-operate display unit, LSM-5200:


• Standard calibration gage set (ø20.0, ø120.0) : 02AGD150 • Air blower : 02AGD260 • Extension signal cable


• Extension signal cable

Order No. Cable length02AGC150A 1m02AGC150B 3m02AGC150C 5m

DIMENSIONS

8-M4

ø3.1

312 88

48

7

48

146

9

146

9

200100

521379696 263

8068

18.5

4816

230

192

84

99131*7190

700107321272

238462

70 min

19

819

8

85144256192

198

150400150

120

30


Signal cable

Cable space

Relay cable

Emission Unit

Max. 700

Measuring range

Measuring range

Reception Unit

Base

M6, depth 12, ø5 through hole (x3)


M6, depth 12, ø5 through hole (x3)




To Reception Unit

(Cable length 1.4m)

ø3.1, depth 6

(Reference hole)ø3.1, depth 6

(Reference hole)


<Mass>



Base: 1.8kg



Unit: mm


Order No. 544-539 544-540







(20°C)*2 Small range ±(4.0+0.5∆D)µm*3









*1: Determined at the level of ±2σ(σ: standard deviation) when measuring ø120 mm at the interval of 0.32 sec. (average 1024 times).*2: Applies at the center of the measuring range when measuring outside diameters.*3: ∆D=Difference in diameter between the master gage and workpiece (Unit: mm)*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction]×[scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.





* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffixare required for PSE.”



• Standard calibration gage set (ø20.0, ø160.0) : 02AGM300 • Extension signal cable


• Extension signal cable

Order No. Cable length02AGC150A 1m02AGC150B 3m02AGC150C 5m

DIMENSIONSø3.1 (Measuring position)

8-M4

84110 10

841

9 9

378

170 110600350 250

9

200100

120

100

7420

.5

880320 160400

8.7200 200

8.7

224

2524

9

206 87.5360520

306107100

40

200400 13 13688218

160

208

208

Min. 70Cable space

Measuring range

M6, depth 12, ø5 through hole (x3)For mounting side plate (same in the back)

M6, depth 12, ø5 through hole (x3)For mounting side plate (same in the back)



Measuring position ø3.1 hole, depth 6(Reference hole)

Note1: Distance between emission unit and reception unit: 400mm to 800mm

Note1

Unit: mm

Order No. 544-541 544-542







(20°C)*2 Small range ±(4.0+2.0∆D)µm*3









*1: Determined by the value of ±2σ (σ : standard deviation) when measuring ø160mm at the interval of 0.32 sec. (average 1024 times).*2: Center of the measuring range for cylindrical workpieces outside diameter.*3: ∆D=Difference in diameter between the master gage and workpiece (Unit: mm)*4: An error of the outside diameter due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: The area given by [optical axis direction] x [scanning direction].*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.


JSR G

ROUP




K-030

LASE

R SC

AN M

ICRO

METE

RSเล

เซอร

์สแกน

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 0.1 mm to 25 mm High AccuracyLSM-6902H Measuring Unit and 6900 Display

Optional Accessories (Refer to page G-36 for details.)• Standard calibration gage set (ø1.0, ø25.0) : 02AGD180• Workstage : 02AGD270• Adjustable workstage : 02AGD280• Digimatic code output unit (2-ch) : 02AGC840

Measuring Unit External Dimensions

ø3.1

70minCablespace

10.5 7

705635

25

58

5017

0

15.5

90

200

190420

70

70

70 90

74

11 3 11

Measuring range

10012060 60

50228× M3

15(Measuring position)

Unit: mm

FEATURE• Demonstrates the best repeatability available in the 25 mm class.• The ultra-precise scanning motor enables the highest measurement accuracy to be realized.• Thanks to excellent linearity, an accuracy of ±0.5 µm over the entire measuring range and a higher accuracy of ±(0.3+0.1∆D) over a narrow range are guaranteed.• The optimal solution for measuring the outside diameter of pin gages or plug gages.

6900 LSM-6902H

Order No. 544-497 544-498 544-499Measuring unitType mm mm inch/mmApplicable standards JIS IEC, FDA

Measuring range 0.1 to 25 mm (0.004 to 1.0 in)

Resolution 0.01 to 10 µm (selectable) (0.000001 to 0.0005 in)

Repeatability*1Whole range ±0.045 µm (±0.0000018 in) (ø25 mm)Narrow range ±0.03 µm (±0.0000012 in) (ø10 mm)

Accuracy*2

(20 °C)

Whole range ±0.5 µm (±0.000020 in)

Narrow range±(0.3+0.1∆D) [D: mm]

±(0.000012+0.01∆D) [D: inch]*5Positional error*3 ±0.5 µm (±0.000020 in)Measuring range*4 ±1.5 mm x 25 mm (±0.006x1.0 in)Scanning rate 1600 scans/sLaser wavelength 650 nm (Visible)Laser scanning speed

112 m/s

Operatingenvironment

Temperature 0 to 40 °CHumidity RH 35 to 85 % (non-condensing)

*1: At the 2 level in the case where ø25 mm and ø10 mm diameters are measured using a measurement time of 1.28 seconds (2048 scans on average).*2: The value at the center of the measuring range.*3: The additional error (in outside diameter) caused by workpiece movement within the measuring envelope during the measuring cycle.*4: Length along optical axis x Scanning length (Measuring range)*5: ∆D is the difference in outside diameter between the master gage and workpiece.Note: To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.

Display unit

Display16-digit plus 11-digit fluorescent display, and

guide message LEDSegment 1 to 7 (1 to 3, transparent) or 1 to 255 edgesAveragingtimes

Arithmetic average: 1 to 2048 scans.Moving average: 32 to 2048 scans.

JudgmentSelection from “target value + tolerance”,

“lower tolerance + upper tolerance”,or “7 classes multilimit tolerance zone”.

Measurementmode

Standby, Single measurement, Continuous measurement

Statisticalanalysis

Maximum, Minimum, Average, Dispersion, (S.D)

Externaldimensions

335(W)x134(H)x250(D) mm

Power supply 100 to 240 VAC ±10 % 50W 50/60 HzStandard I/F RS-232C, Analog I/O

Optional I/FDigimatic code output unit (2-ch),

2nd I/O analog I/F, BCD I/FOperatingenvironment

0 to 40 °C, RH 35 to 85 % (non-condensing)

Others

Nominal setting, sample setting, suppression ofunnecessary digits, transparent object measurement, automatic measurement in edge mode, output timer, abnormal data elimination, SHL change, group judgment, simultaneous measurement, statistical processing, mastering, buzzer function, automatic work-piece detection (dimension/position), zero-set/offsetNote: In the case of dual measuring-unit connection, extra-fine line measurement and some of the communication commands are not available

เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — 0.5 mm to 60 mm High AccuracyLSM-9506 Integrated Display/Measuring Unit

Order No. 544-115* 544-116**

Type mm inch/mm

Measuring range 0.5 to 60mm 0.02 in to 2.36 in/0.5 to 60 mm

Resolution 0.05 to 100µm (selectable) 0.000002 in to 0.005/0.00005 to 0.1 mm

Repeatability*1 ±0.6µm (±.00003”)

Accuracy*2 (20°C) ±2.5µm (±.0001”)

Positional error*3(optical axis/scanning direction)

±2.5µm (±.0001”)L: Displacement between workpiece center and optical axis center

Measuring range*4 ±5x60mm (±.2x2.36”)


Laser wavelength 650nm (Visible)*5

Laser scanning speed 226m/s (8900” / s)

Display unit 16-digit dot matrix (upper column) + 7 segment 11-digit (lower column) ,guidance LEDs

Standard interface RS-232C, Digimatic code output unit (1ch)

Optional interface No

Power supply AC100V-240V ±10%, 40VA, 50/60Hz

Operating environment 0 to 40°C, RH 35 to 85% (no condensation) *1: Determined at the level of ±2σ(σ: standard deviation) when measuring ø10 mm at the interval of 0.32 sec. (average 512 times).*2: Applies at the center of the measuring range when measuring outside diameters.*3: ∆D=Difference in diameter between the master gage and workpiece (Unit: mm)*4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction.*5: FDA Class II (544-116-1A)/IEC Class 2 (Allmodels except 544-116-1A) semiconductor laser for scanning (Maximum power: 1.0 mW)* To denote your AC power cable add the following suffixes to the order No.: D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.** To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.

Optional Accessories• Standard calibration gage set (ø1, ø60): 02AGD170

DIMENSIONS

ø3.1 (Measuring position)

12-M3

Measuring range

80Ca

ble sp

ace

180

11

25

60

98

1005022

647

60

120

1011 882365

52.540

382 85180

528

202

11

10.5

15.5

1010

0

10150

83 97

100 100

172 13.5

Unit: mm

FEATURE• High accuracy of ±2.5 µm, integrated display unit with many functions equivalent to the multifunction display unit.

JSR G

ROUP


K-031


Disp

lay

Units

จอแส

ดงผล

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — Panel-mount TypeLSM-5200 Display Unit

FEATURE• A compact controller which could be used for multi-unit system configurations.• A panel-mount type display unit designed for the LSM-S series.• Analog I/O and RS-232C is standard.• Measurement of odd fluted parts, and simultaneous measurement / 2-program function are equipped.

DIMENSIONS

138 0+1

72

144

140.4

68

138 (Aluminum case)

197.1 (20.5 )

Rear view

68+0

.70

Dimensions of panel mounting slot (DIN 43 700-144×76)

Panel thickness: 1.6mm to 6mm

Mass: 1.4kg

Support for mounting plate

Bottom view

Panel thickness: 1.6mm to 6mm

*240

.3 +

(t－

0.6)

(4.4

)

(Alu

min

um c

ase)

Side view

Unit: mm

Front view

Order No. 544-047

Display 9 digits plus 8 digits LED, guide message LED

Segment 1 to 7 (1 to 3, transparent) or 1 to 255 edges*1

Averaging timesArithmetic average: from 4 to 2048; Moving average: from 32 to 2048

(Arithmetic average is from 16 to 2048 when using LSM-500S.)

Judgment Selecting from “target value ± tolerance value” or “lower limit/upper limit”.

Measurement mode Standby, Single measurement, Continuous measurement

Statistical analysis Calculation result is output via USB or RS-232C.

External dimensions 144 (W)x72 (H)x197.1 (D)mm

Power supply*3 24V DC±10%, 1.3A or more

Standard I/F USB2.0, RS-232C, I/O analog

Operating environment 0 to 40°C, RH 35 to 85% (no condensation)

Preservation environments −20 to 70°C, RH 35 to 85% (no condensation)

Others

Measurement of odd fluted parts, simultaneous measurement, nominal setting, sample setting, selection of unneces-sary digits, transparent object measurement*2

Automatic workpiece detection (dimension/position detected)*1, abnormal data elimination, mastering, statistical processing (when using USB, RS-232C), output timer, automatic measurement in edge mode, presetting

Note that every function is limited in its combination possibilities. See the user manual for details.

Mass 1.4 kg *1: The measuring range will be 0.1mm to 2mm in the 1 to 255 edge measurement mode or when activating the automatic workpiece detection with 544-531, 544-532. Each function has its combination limit.*2: The measuring range is 50µm to 2mm when using 544-531, 544-532. For smaller ranges, contact your local Mitutoyo sales office.*3: DC24V external power supply (commercial item) is required separately.Note 1: Cannot be connected to 544-495, 544-496.Note 2: Previous models such as 544-451 cannot be connected.Note 3: For USB communication with a PC, a dedicated device driver is required. For details, contact your local Mitutoyo sales office.

เลเซอร์สแกนไมโครมิเตอร์SERIES 544 — Multi-function TypeLSM-6200 Display Unit

DIMENSIONS

Cabl

e sp

ace

キーロック CAL オフセット統計処理同時測定

BUSYRUN+NGGO-NG

LD2 ON

LD1 ON 0 ＋/－

1 2 3

654

7 8 9

L.CAL

H.CAL

読込み

シフト測定設定

C

合否判定

基準値

入力単位

葦字

統計処理

PROG.

SW.FOOT

I/O ANALOG RS-232C REMOTE INTERLOCK

SCAN SIG.-1

TRANSMITTER-1

ID ROM 1

A1A6

B1B6DI

335

80

125

1313

428

1.4

121

13.5

250

12°

Unit: mm

FEATURE• 2-axis display unit enables 2 items be displayed simultaneously.• Capable of statistical analysis such as: average, maximum value, minimum value, range (max. to min.).• Segment measurement (7 points) or edge measurement (1 to 255 edges) can be selected.• A function to eliminate abnormal values is standard.• 100 tolerance values, preset values, or settings can be stored.

Order No. 544-071* 544-072*

Type mm inch/mm

Display 16-digit plus 11-digit fluorescent display, and guide message LED

Segment 1 to 7 (1 to 3, transparent) or 1 to 255 edges*1

Averaging timesArithmetic average: per 2 to 2048/ Moving average: per 32 to 2048 (Arithmetic average is per 16 to

2048 when using 544-531, 544-532)

JudgmentSelection from “target value + tolerance”, “lower tolerance + upper tolerance”, or “7 classes multi-limit

tolerance zone”.

Measurement mode Standby, Single measurement, Continuous measurement

Statistical analysis Maximum, Minimum, Average, Dispersion, σ(S.D)

Size 335 (W)x134 (H)x250 (D)mm

Power supply 100 - 240 V AC ±10%, 40VA, 50/60Hz

Standard I/F RS-232C, Analog I/O

Optional I/F Digimatic code output unit (2-ch), 2nd I/O analog I/F, BCD I/F

Operating environment 0 to +40°C, RH 35 to 85% (no condensation)

Others

Nominal setting, sample setting, selection of unnecessary digits, transparent object measurement*2, measurement of odd fluted parts, automatic measurement in edge mode, output timer, abnormal data elimination, SHL change, group judgment,

simultaneous measurement, statistical processing, mastering, buzzer function, automatic workpiece detection (dimension/position)*1, zero-set/offset, dual measurement (optional)

*1: The measuring range will be 0.1mm to 2mm in the 1 to 255 edge measurement mode or when activating the automatic workpiece detection with 544-531, 544-532. Each function has its combination limit.*2: The measuring range is 50µm to 2mm when using 544-531, 544-532. For smaller range, contact your local Mitutoyo sales office.Note* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE.Note** Cannot be connected to 544-495, 544-496.Note*** Previous models such as 544-451 cannot be connected.

JSR G

ROUP




K-032

OPTI

ONAL

ACC

ESSO

RIES

อุปกร

ณ์เส

รืม

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


อุปกรณ์เสริมSERIES 544 — Laser Scan Micrometer (Measuring Unit)Optional Accessories

Standard calibration gage set• Standard cylinder gage set suitable for calibration of Laser Scan Micrometers.• Nominal gage diameters (1 to 160mm) are as given in Specifications.

For calibrating modelsLSM-6902H LSM-500S LSM-501S LSM-503S LSM-506S LSM-512S LSM-516S LSM-9506

544-498, 544-499 544-531, 544-532 544-533, 544-534 544-535, 545-536 544-537, 544-538 544-539, 544-540 544-541, 544-542 544-115, 544-116

Set No. 02AGD180 02AGD110 02AGD120 02AGD130 02AGD140 02AGD150 02AGM300 02AGD170

Stand 02AGD181 02AGD111 02AGD121 02AGD131 02AGD141 02AGD151 02AGM320 02AGD171

Configuration (Order No.)

Gagesø1: 02AGD920

ø25: 02AGD963ø0.1: 958200ø2 : 958202

ø0.1: 958200ø10: 229317

ø1: 02AGD920ø30: 02AGD961

ø1: 02AGD920ø60: 02AGD962

ø20: 229730ø120: 234072

ø20: 229730ø160: 02AGM303

ø1: 02AGD920ø60: 02AGD962

Carrying case 02AGD190 958203 958203 02AGD980 02AGD980 02AGD990 02AGM310 02AGD970

Workstage• Easy set-up and height adjustment enables high-precision measurement.

ModelLSM-501SLSM-503S

LSM-6902H

Order No. 02AGD270

Adjustable workstage• Vertical/horizontal slide mechanism enables easy measurement of various workpiece diameters. • Best suited for quality assurance of high precision pin gages.

• Pin gage or plug gage• Roller of copying machine

Measurement Examples

Basic configuration Basic set Order No. Model Standard Accessories Measuring range (mm) Horizontal stroke (mm) Vertical stroke (mm)

02AGD280 LSM-6902HV-block (02AGD420), 2 pcs

0.1 - 25 130 47

(1) Main unit02AGD400 LSM-501S

Stopper (02AGD430), 1 pc0.05 - 10 130 32

(2) V-block02AGD490 LSM-503S 0.3 - 30 200 35

(3) Stop02AGD520 LSM-506S* V-block A (02AGD550), 2 pcs 1 - 60 300 45

02AGD370LSM-9506*

V-block B (02AGD560), 1 pc 0.5 - 60 200 45

02AGD680 V-block C (02AGD570), 1 pc 0.5 - 60 300 45 * The stop is not included in the basic set for these models.Note: Optional part for the adjustable workstage, such as center support, adjustable V-block (up/down) etc., are available.

Guide pulley• Used for supporting measurement of outside diameter of fine wirelike materials such as magnetic wire or fiber.

Model LSM-500S LSM-501S

Order No. 02AGD200 02AGD270 Each measurement range is as follows:LSM-500S: ø5 µm to ø1.6 mmLSM-501S: ø50 µm to ø2 mmFor calibration, the calibration gage set for LSM-500S (02AGD110) is required.

JSR G

ROUP


K-033


OPTI

ONAL

ACC

ESSO

RIES

อุปกร

ณ์เส

รืม

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


Air shield• Air blows from the air outlet installed on the laser section to clear dust adhering to the laser window.

Air supply unit Air shield Applicable models

02AGD220 LSM-500S (544-531, 544-532)

02AGD230 LSM-501S (544-533, 544-534)

957608 02AGD240 LSM-503S (544-535, 544-536)

02AGD250 LSM-506S (544-537, 544-538)

02AGD260 LSM-512S (544-539, 544-540) Note: Air shield is supplied with 5 m air tube (Outside Diameter: 6 mm).

Extension signal cable / Extension relay cable• Extension signal cables are necessary when the measuring unit and display unit are separated in operation; Extension relay cables are necessary when the optical section is separated in operation. Extension signal cable

Relay cable, 1.4m

(0.6m for 544-533, 544-534)

Not equipped with 544-531 , 544-532 (and 544-495 , 544-496 )

Extension relay cable

Signal cable (5m) No .02A GN770A

Displayunit

EmissionUnit

ReceptionUnit

Extension signal cable


02AGN780A 5m

02AGN780B 10m

02AGN780C 15m

02AGN780D 20m

Extension relay cable


02AGC150A 5m

02AGC150B 3m

02AGC150C 5m

* For 544-531, 544-532, 544-533, 544-534 the allowable maximum length for signal cable is 20 m; relay cable is 2 m.* For 544-535, 544-536, 544-537, 544-538, 544-539, 544-540, 544-541, 544-542 the allowable maximum length for signal cable is 30 m; relay cable is 5 m.* The maximum extension length of the signal cable and relay cable is 32 m in total.* Cannot be used with 544-498 and 544-499.

Thermal printer DPU-414• Measurement data can be printed.

Order No. 02AGD600A, 02AGD600B, 02AGD600C, 02AGD600D

Printing method Thermal dot matrix

Printing capacity 40 Columns (Normal)

Character configuration 9x8 dot matrix

Printing direction Bidirectional

Interface RS-232C

Power supply AC 100 to 240V 50/60 Hz (AC adapter)

Standard Accessories Printer cable 2m (02AGD620A), Printer paper 1 roll, AC adapter

Printer paper (optional) Order No.223663 (10-roll set)

Foot switch• For LSM-6200 (544-071, 544-072), LSM-6902H (544-498, 544-499) and LSM-9506 (544-115, 544-116).

อุปกรณ์เสริมSERIES 544 — Laser Scan Micrometer (Display Unit)Optional Accessories

JSR G

ROUP




K-034

OPTI

ONAL

ACC

ESSO

RIES

อุปกร

ณ์เส

รืม

Linear Gages


Display Units


LITEMATIC

LITEMATIC

Mu-Checker

Mu-Checker

Laser Scan

Micrometers


Optional

Accessories


อุปกรณ์เสริมSERIES 544 Laser Scan Micrometer (Measuring Unit)Optional Accessories

Interface for LSM6200, 6900BCD Interface• Outputs measurement data in BCD output (7-digit) or HEX output.• Data logic can be switched.• Isolated I/O circuitry• Available for LSM-6200 (544-071, 544-072) and LSM-6902H (544-498, 544-499).

Order No. 02AGC910

Standard Accessories Connector (DDK) 57-30360 (214188)

Digimatic code output unit• 2-channel Digimatic code output• In simultaneous measurement, measurement data are output as follows: Program No. 0 to No. 4 in OUTPUT-1 Program No. 5 to No. 9 in OUTPUT-2 (10 programs operated)• 10 pin MIL type connector.• Output cable is not supplied. Connecting cable (optional) 1 m (936937)• Available for LSM-6200 (544-071, 544-072) and LSM-6902H (544-498, 544-499).* Output is 6 digits of measurement data.* Displaying 6th and 7th digit after the decimal point is not supported.

Order No. 02AGC840

Dual connection unit• Enables second unit connection to LSM-6200 (544-071, 544-072). (both units must be the same model)* Cannot be used for LSM-6902H (544-498, 544-499).• Depending on the layout of the two measuring units, large-diameter measurement, XY measurement, and parallel measurement are possible.• Both of the measuring units and display units can be simultaneously operated.

Order No. 02AGP150

2nd I/O analog I/F• I/O, analog output.• Simultaneous measurement is supported by two pairs of GO/NG judgment outputs.• Available for LSM-6200 (544-071, 544-072) and LSM-6902H (544-498, 544-499).

Order No. 02AGC880

Standard Accessories Connector (DDK) 57-30360 (214188)

Cable for BCD and 2nd I/O simultaneous mount• Both BCD (02AGC910) and 2nd I/O analog I/F (02AGC880) can be mounted on LSM-6200 (544-071, 544-072) and LSM-6902H (544-498, 544-499) using this cable.* If using this cable, the dual connection unit (02AGP150) cannot be used.

Order No. 02AGE060

120±10

47.8

200±10 Unit: mm

X Y

XY Measurement

(X–Y): flatness(X+Y)/2: average* XY requires 10mm-interval.

Parallel Measurement

JSR G

ROUP

measuring tools sensor systems - jsr · 542-172 page p-008 542-173 page p-008 0.001mm (1 ... jsr...

Documents