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La metrología óptica en criogenia: Nuevas técnicas de medida de superficies

LINES: Optical Activities

� Optical Engineering� Optical Metrology

Tomás Belenguer, René Restrepo, Gonzalo Ramos, Daniel Garranzo, Lola Sabau

06/07/2011 AstroMadrid Junio 2011 2

ORGANIZATION

AREA of PAYLOADS & SPACE INSTRUMENTATION

INSTRUMENTATION and SPACE OPTICS

LABORATORY

OPTOELECTRONICSLABORATORY

PAYLOADS ENGINEERING

DROP TOWER (µG)

OPTICAL ENGINEERING

for Space

R&DSPACE OPTIC

INTEGRATION /VERIFICATION /MEASUREMENT

OPTOELECTRONIC& ELECTRONIC

Technologiesfor Space

MAGNETICTechnologies

for Space

THERMAL-MECHANICTechnologies

for space

THERMAL-STRUCTRALAnalysis

R&D inmicro-Gravity

Drop Test Campaign

Area Secretary

Payloads & Test FacilitiesCoordination Unit

RADIATION Sensors& Radiation Effects

on Components

KNOWLEDGEMANAGEMENT

Aerospace & Defence

ENVIROMENTALTesting


ORIGIN:

Created in 1994, it belongs to the Payloads Area, within the Space Programs and Space Sciences Department

OBJECTIVES:

LINES is the qualified laboratory at INTA specialized in optics for space applications.

The three main fields of activity are:

� Optical Engineering

� Research and development in space optics

� Testing and characterization of optical instrumentation (Thermo-vacuum tests)

LINES, Laboratorio de Instrumentación Espacial

LINES support the National industry in the optical design, testing and integration of optical systems


Software� Optical design tool (CodeV, 7 licenses, ZEMAX, 2 li cense)

� Straylight tool (ASAP, 1 license)

� LabView (1 license)

� FRAMES, Holographic interferometry analysis tool

� WBASE, Ellipsometric measurements

� FilmStar ,Optical Coatings

2 Y

X

3 Y

X

5 Y

X

7 8

Y

X

9 YX

11 Y

X

15 16 Y

X

18

Y

X21

Y

X

24 25 Y

X

27

Y

X

VIM Scale: 0.20 TBD 05-Jul-06

125.00 MM

1

2

3

4

5

MTS 3 mirror anastigmat Scale: 0.39 TBD 05-Jul-06

64.10 MM

RESOURCES

1

2 3

4 5 6 7 8

9 10 11 12 13 14 15

16

Cinclus Scale: 0.61 ANA 23-Sep-09

40.98 MM

0 1 2 3 4 5 6

7

8 9 10 11 12 13 14

15

16 17 18 19 20 21

22

23 24 25

26 27

28

lambda=400 FULL SCALEPositions: 1-9

TBD 23-May-08

25.00 MM

+Z +X

+Y


Facilities

� Class 10.000 clean room Lab with humidity, temperature and contamination control (75 m2)

� Mobile area class 100, Laminar air flow cabinet 100 class

• Four specialized laboratories :

� Optical characterization of materials

� Speckel and Holography

� Fibre optics sensors

� Chemistry Lab

• Basic optical shop

� Automatic polishing machine for flat surfaces

� Manual polishing machine,

� Lathe&Milling machine

RESOURCES


Equipment

� MTF test benches (visible, IR 3-5 and IR 8-12 microns)

� High vacuum thermal chamber with high quality optical window

� GPI-XP Zygo Interferometer (100 mm aperture, λ/100 resolution)

� Integrating sphere (Labsphere, 3 inches aperture)

� He-Ne 35 mW and Argon 25 W lasers, Nd:YAG pulsed laser for holography setups. 40W (3 frequencies), high power lamps (Xenon, quartz-tungsten and Globar lamps).

� Alignment telescopes (theodolites and autocollimators)

� Technology for fibre optics setups: monomode, multimode, plastics, etc.

� Abbe refractometer (indexes range from 1.35 to 1.85)

� Spectroradiometer – spectral range 350 to 1700 nm. Res. 0.1 to 5 nm.

� Spectrophotometer – spectral range 190 to 950 nm. Resolution 0.08 nm

� Confocal microscope

� Spectroscopic ellipsometer with variable angle – spectral range 193 to 2200 nm.

RESOURCES

Metrología de alta precisión para las misiones científicas españolas

Optical Activities

� Optical Metrology�GAIA�SENTINEL�SPICA�Photogrammetry

�New Research:�Coded structured light�Speckle Interferometry�Spiral Interferometry

Optical team: Daniel Garranzo, Gonzalo Ramos, René Restrepo, Javier Vargas


SENTINEL (SENER-JENOPTICA)

El FMD (Flip Mirror Device) fast moving mirror to connect two telescopes.

Range: ±9.4ºResolution: ±10 arcminStep: 0.14 arcmin.

Optical Metrology

The main requirements cover, flipping 4 times within a 602 msec period, with a switching period of 20ms and stabilizing period of 15 ms, flipping rotation of 18.8° (+/-9.4°), a small ~14 mm aperture mirror, and tight allocated volume.



It is required to use a tool:

� Characterize the tooling required at vacuum conditions from -60 to +50 ºC

� Measure the movement at kHz

� All the measurements externally to the vacuum chamber

Optical Metrology


Mechanical Tool:

� Aluminum� Commercial tip-tilt mount� Specially designed and manufactured paralell-plates and mirrors


Optical Metrology



First Characterization at ROOM conditions

Optical Metrology



Characterization at Vacuum conditions

Optical Metrology



The Thermal Cycling of SENTINEL

Optical Metrology


� GAIA (SENER-ASTRIUM) � 5 DoF of a Flat mirror measure at 100K

� lineal range 400 micras, resolution 1 µµµµm

� Angular range 2mrad, resolución 10 µµµµrad

Optical Metrology at Cryo

Fixed Reference

Movement Reference

·Y

Z

X


� GAIA (SENER-ASTRIUM) � It was required the modification of our vacuum

chamber to adapt to the thermal environment



SENER-GAIA

� Very complex system to assure good thermal homogeneity

� Required thermal strap

� Specific Shroud



SENER-GAIA

� For QM

� A new optical tool was designed (2 invar cubes)

� A Getter was required to trap outgassing (home made)



RT1

BS

FM7

Final FP

FM10

M5

RT2

Pup3

M6

BC

iimg3

M7

Pup4FM8FM9

F/N 8.45

M8

F/N 20

Dichroic

INTERFEROMETER

CAMERA OPTICSF/N 8.45

141mm

324mm 324mm153mm 135mm

fM8=280mm fM7=131mm

from input optics


SAFARI-SPICA

Very complex instrument, includes a FTS


SAFARI FTS

� FTS of SAFARI � Focused beam is used.� On axis.� We can change the WFE on Exit Pupil� A spider-obscuration is included (not real)

Results

Optical Trombone

FM2

spider-obscuration


SAFARI FTS (PUPIL IMAGES)

Results: Two wavelengths, on axis ∆λ∆λ∆λ∆λ=2 µµµµm

λλλλ=34 µm

∆∆∆∆x=0 m ∆∆∆∆x=10 mm

∆∆∆∆x=20 mm

∆∆∆∆x=-20 mm

x


SAFARI-SPICA



Differential Interferometer

Differential Interferometer is, in principle a very compact interferometer that allows differential measurements between a specimen mirror (moving mirror) and a reference mirror (Local Measurements).


The measurements performed on SENTINEL and GAIA are Local measurements (one point , two axis ) but the new challenge is toperform a global measurement (deformation of a surface, rotation of body, translation of a mechanism as a whole…)


Optical Metrology :3D Techniques


Photogrammetry (For measuring deformations of surfaces at vacuum conditions, Thermo-elastic behavior of antennas, 20 microns)

It is a special triangulation technique that using cooperative targets and “codeds” can measure the topography or deformation of surfaces.

Optical Metrology (Triangulation)

I-CAN 3


Photogrammetry (For measuring deformations of surfaces at vacuum conditions, Thermo-elastic behavior of antennas, 20 microns)



Photogrammetry (Camera calibration at LINES)



Sistema formado por 2 cámaras, la información 3D se obtiene mediante triangulación

Inconvenientes:

•Correspondiencia entre píxeles en ambas cámaras es (complicado)

•Tiempo de procesado muy alto

•Mala precisión en profundidad

Optical Metrology (Stereo Vision)


Una de la cámaras se reemplaza por un proyector (cámara inversa)

Optical Metrology (Stereo Vision, Luz Codificada)

El problema de la correspondencia se resuelve automáticamente y de forma robusta y rápida


Patrón 1

Patrón 2

Patrón 3

Proyección en el tiempo

Ejemplo: Codificación de 3 bits

Se proyectan una serie de patrones de luz de codificación

Proyección de patrones Gray Code + Phase-Shifting


Inconvenientes:Objetos estáticos Gran cantidad de patrones (~10)

Ventajas:Alta resolución:640x480 puntosAlta precisión en profundidad (1m2 ⇒⇒⇒⇒ 10 µµµµm )Robustez frente al color del objeto a medir.Se puede usar en objetos especulares.


Inspection of an extended surface by an active 3D m ultiresolution technique

3D measurement of a portion of the antenna

Experimental Results: Antenna measurement


Each color corresponds to a 3D measurement of a different antenna region


In-plane Speckle arrangement

Optical Metrology (Speckle,ESPI)

We can measure CTE, Poisson’s ratio

Very high resolution technique (<1 micron)


In-plane Speckle arrangement



Comparison of two techniques for measuring the CTE of the same material.

Aluminum (100 mmx25 mmx2 mm in thickness)

Composite material: carbon fiber 100 mmx25 mmx2 mm in thickness, with a layer sequence (45/-45)2s.


Aluminum Composite material:


Using Differential inteferometry

Optical Metrology (Speckle, ESPI)

The CTE measured with the differential interferometer was: 6.963Χ10−6 ± 4Χ10−6 K−1 (Composite)24.60Χ10−6 ±6Χ10−6 K−1 (Aluminum)


Using In-plane Speckle measurement


The CTE measured with the differential interferometer was: 4.69Χ10−6 ±3Χ10−6 K−1 (Composite)24.03Χ10−6 ±3Χ10−6 K−1 (Aluminum)


Finite Elements Method (FEM) Results


ESPI technique can be excellently correlated with FEM


Vacuum chamber to characterization specimens using ESPI



Very interesting method based on elliptical phase-interferometry (using spatial Light Modulator)

Optical Metrology (Spiral Interferometry)


Thanks….

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