is-d - intelligent actuator · weight kg 4.0 4.6 5.3 5.9 6.5 7.2 motor ac servo motor encoder...

IS-DIS Dust Shield Type

IS-DIS Dust Shield Type

P.1

Standard protective stainless sheet prevents particles from generating inside of the actuator.

• Protective stainless sheet prevents particles from generating inside of the actuator, and restricts grease from penetrating outside of the actuator.

• We developed our own components including the AC servo motor, ballscrew, guide and frame.

• Ultra compact, high rigidity and high repeatability.

Repeatability: ±0.02 Maximum Stroke: 1200mm Maximum Velocity: 1000mm/sec Maximum Payload: 80kg

• The sine-wave control method reduces noise and friction.

• Tap is used on the back base to mount onto the main body.

ISD - S - 4 - 60 - 600 - B

Specifications

Features:

S

Model Name

2 3 4 5 6

Tap

1

P.2

Type CapacityLead(mm)

Velocity(mm/s)

Horizontal Payload(Kg)

Moment Stroke(mm)MA MB MC

S(Small Type) 60

4 200 5028.4(2.9)

40.2(4.1)

65.7(6.7)

100~6008 400 25

16 800 12

M(Medium Type)

100

5 250 80

69.6(7.1)

99.0(10.1)

161.7(16.5)

100~1000

10 500 40

20 1000 20

20010 500 80

20 1000 40

L(Large Type)

200 10 500 80104.9(10.7)

149.9(15.3)

248.9(25.4)

100~120020 1000 40

400 20 1000 80

No. Item Content

1 TypeIS-DIS Dust Shield Type

2 SizeS: Small TypeM: Medium TypeL: Large Type

3 Screw LeadSmall Type: 4, 8, 16Medium Type: 5, 10, 20Large Type: 10, 20

4 PowerSmall Type: 60WMedium Type: 100W, 200WLarge Type: 200W, 400W

5 StrokeSmall Type: 100~600Medium Type: 100~1000Large Type: 100~1200

6 Option Brake

ISD-S-60 [ Small 60W type ]

*1) At a speed of 10mm/sec for 5 seconds.*2) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*3) At an acceleration of 0.15G [0.3G] {0.3 G}, and [400mm] {800mm} m/sec speed.

*5) Center of gravity for the mounted object is at the halfway point of the overhang length.

*4) Direction of load moment is:

Specifications in [ ] are for 8mm lead. Specifications for { } are for 16mm lead.

■ Dimensions

Brake (option):

Dimensions • Specifications

P.3

Specifications Electromagnetic brake

Model Type MB36B90-1

Screw Axis Lead mm 4 8 16

Maintainance Power N(Kgf)

251.3(25.6)

125.7(12.8)

62.8(6.4)

Mounting Position Non-motor end

Rated Voltage DC45V (Overexcitation voltage DC90V)

Stroke 100 200 300 400 500 600

A 434 534 634 734 834 934

B 414 514 614 714 814 914

C 100 200 300 400 500 600

D --- --- 1 1 2 2

E 45 145 45 145 45 145

F 10 10 12 12 14 14

Stroke mm 100 200 300 400 500 600

Rated Output W 60

Maximum Velocity mm/sec 200 [400] {800} 190 [380] {760}

Rated Thrust N (kgf) 254.8 (26.0) [127.4 (13.0) ] {63.7 (6.5)}

Repeatability mm ± 0.02

Weight kg 4.0 4.6 5.3 5.9 6.5 7.2

Motor AC Servo Motor

Encoder Single Unit with the motor

Ballscrew φ 12mm, lead 4mm [8mm] {16mm} Rolled thread C10, Backlash 0.05mm or less

Guide Direct recirculating rolling bearing: Carbon hardened steel ground track

Motor/Ballscrew Coupling Motor shaft, Ballscrew shaft integrated in a single unit

Base, Slider Extruded aluminum (A6NO1S-T5 equivalent) White alumite treatment

Protective Stainless Sheet Special stainless copper (SUS430 equivalent) Thickness 0.1mm

Grease Ballscrew: Multi-Temp LRL No.3 Guide: Daphne Colonex No. 2

Maximum Thrust *1 N (Kg) 509.6 (52.0) [254.8 (26.0)] {127.4 (13.0)}

Slider Payload *2 *3 Kgw Horizontal use: 50 [25] {12} Vertical use: 14 [6] {3}

Load Moment *2, *4 N•m(Kgf•m) Ma: 28.4 (2.9) Mb: 40.2 (4.1) Mc: 65.7 (6.7)

Overhang Load Length L *5 mm Ma D irection: Under 450 Mb, Mc Direction: Under 450

77

27 100 E

F-M6 depth 17

100 130 12

192

70

DX200

4-φ6H10 depth 10

95

35 120 F

E-M depth 20

4-φ8H10 depth10

120 165

241

16

90

DX200

ISD-M-100 [ Medium 100 W type ]

*1) At a speed of 10mm/sec for 5 seconds.*2) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*3) At an acceleration of 0.15G [0.3] {0.3 G}, and 250mm [500mm] {1000mm} m/sec speed.

*4) Direction of load moment is:*5) Center of gravity for the mounted object is at the halfway point of the overhang length.

Specifications in [ ] are for 10mm lead. Specifications for { } are for 20mm lead.

■ Dimensions

Brake (option):


P.4

Stroke mm 100 200 300 400 500 600 700 800 900 1000

Rated Output W 100

Maximum Velocity N (Kgf) 250 [500] {1000}225[455]{915}

180[365]{735}

150[300]{600}

125[250]{500}

Rated Thrust mm 340.1 (34.7) [169.5 (17.3 ] {84.3 (8.6)}

Repeatability Kg ± 0.02

Weight 7.8 8.9 10.1 11.2 12.3 13.5 14.6 15.7 16.9 18.0


Encoder Single unit with the motor




Base, Slider Extruded aluminum (A6NO1S-T5) White alumite treatment

Protective Stainless Sheet Special stainless copper (SUS430 equivalent) Thickness 0.1mm


Maximum Thrust *1 N (Kg) 680.2 (69.4) [339.0 (34.7)] {168.6 (17.2)}

Slider Payload *2 *3 Kgw Horizontal use: 80 [40] {20} Vertical use: 19 [9] {5}

Load Moment *2, *4 N•m (Kgf•m) Ma: 69.6 (7.1) Mb: 99.0 (10.1) Mc: 161.7 (16.5)

Overhang Load Length L *5 mm Ma Direction: Under 600 Mc, Mc Direction: Under 600


Model Type MCNB3-04


Maintainance Power N (Kgf) 492.6(50.3)

246.3(25.1)

123.2(12.6)



Stroke 100 200 300 400 500 600 700 800 900 1000

A 502 602 702 802 902 1002 1102 1202 1302 1402

B 478 578 678 778 878 978 1078 1178 1278 1378

C 100 200 300 400 500 600 700 800 900 1000

D --- --- 1 1 2 2 3 3 4 4

E 10 10 12 12 14 14 16 16 18 18

F 22 122 22 122 22 122 22 122 22 122

ISD-M-200 [ Medium 200W type ]

*1) At a speed of 10mm/sec for 5 seconds.*2) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*3) At an acceleration of 0.3G and 500mm [1000mm] m/sec speed.

Specifications in [ ] are for 20mm lead.

■ Dimensions

Brake (option):


P.5



95

35 120 F

E-M depth 20

4-φ8H10 depth10

120 165

241

16

90

DX200

Stroke mm 100 200 300 400 500 600 700 800 900 1000

Rated Output W 200

Maximum Velocity N (Kgf) 500 {1000}455

{915}365

{735}300

{600}250

{500}

Rated Thrust mm 340.1 (34.7) [169.5 (17.3)]

Repeatability Kg ± 0.02

Weight 7.8 8.9 10.1 11.2 12.3 13.5 14.6 15.7 16.9 18.0


Encoder Single Unit with the motor




Base, Slider Extruded aluminum (A6NO-1S-T5) White alumite treatment

Protective Stainless Sheet Special stainless copper (SUS430 equivalent) thickness 0.1mm


Maximum Thrust *1 N (Kg) 680.2 (69.4) [339.0 (34.7)]

Slider Payoad *2 *3 Kgw Horizontal use: 80 [40] Vertical use: 19 [9]

Load Moment *2, *4 N•m (Kgf•m) Ma: 69.6 (7.1) Mb: 99.0 (10.1) Mc: 161.7 (16.5)

Overhang Load Length L *5 mm Ma Direction: Under 600 Mb, Mc Direction: Under 600

948066

9469

.5

90125

3415.5

190 C 147.315.2

92

190

120

9015 1570 2525

60 60

4-M6depth 18 4-M8depth 18

2-φ8H10 depth 10

80

Maintain over 40

12B

A

12


Model Type MCNB3-04



492.6(50.3)

246.3(25.1)

123.2(12.6)



Stroke 100 200 300 400 500 600 700 800 900 1000

A 502 602 702 802 902 1002 1102 1202 1302 1402

B 478 578 678 778 878 978 1078 1178 1278 1378

C 100 200 300 400 500 600 700 800 900 1000

D --- --- 1 1 2 2 3 3 4 4

E 10 10 12 12 14 14 16 16 18 18

F 22 122 22 122 22 122 22 122 22 122

4-M6 depth 18 4-M8 depth 18

2φ8H depth 10

4φ8H depth 10

E-M8 depth 20

Maintain over 40

ISD-MX-200 [ Medium 200W Mid-Support Type ]

*1) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*2) At an acceleration of 0.3 G, and 1000mm/sec speed.

■ Dimensions

P.6



Stroke 800 900 1000 1100 1200 1300 1400 1500 1600

A 1315 1415 1515 1615 1715 1815 1915 2015 2115

B 1291 1391 1491 1591 1691 1791 1891 1991 2091

C 800 900 1000 1100 1200 1300 1400 1500 1600

D 3 3 4 4 5 5 6 6 7

E 16 16 18 18 20 20 22 22 24

F 122 222 122 222 122 222 122 222 122

Stroke mm 800 900 1000 1100 1200 1300 1400 1500 1600

Rated Output W 200

Maximum Velocity mm/sec 1000 950 800 700

Rated Thrust N (Kgf) 169.5 (17.3)


Weight kg 17.8 18.9 20.1 21.2 22.3 23.5 24.6 25.8 26.9



Ballscrew φ 16mm, lead 20mm, Rolled thread C10, Backlash 0.05mm or less

Guide Unique to ISD Integrated into base





Slider Payload *1 *2 Kgw Horizontal use: 40

Load Moment *1, *3 N•m (Kgf•m) Ma: 69.6 (7.1) Mb:99.0 (10.1) Mc: 161.7 (16.5)


ISD-L-200 [ Large 200 W type ]

*1) At a speed of 10mm/sec for 5 seconds.*2) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*3) At an acceleration of 0.3 G and 500mm [1000mm] m/sec speed.


Specifications in [ ] are for 20mm lead.

■ Dimensions

P.7

Stroke 100 200 300 400 500 600 700 800 900 1000 1100 1200

A 576 676 776 876 976 1076 1176 1276 1376 1476 1576 1676

B 546 646 746 846 946 1046 1146 1246 1346 1446 1546 1646

C 100 200 300 400 500 600 700 800 900 1000 1100 1200

D --- --- 1 1 2 2 3 3 4 4 5 5

E 12 12 14 14 16 16 18 18 20 20 22 22

F 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5


Model Type MCNB3-04



492.6(50.3)

246.3(25.1)

123.2(12.6)



Brake (option):


220150120 151590

75 75

30308-M8 depth20

2-φ8H10 depth 10

105

85.6

112

81.5

12110589

120

15515

36 15 220 15 190C

109.

5

15

Maintain over 40

B

A

4-φ8H10 depth 10

Stroke mm 100 200 300 400 500 600 700 800 900 1000 1100 1200

Rated Output W 200

Maximum Velocity mm/sec 500 [1000]465[930]

380[765]

320[640]

270[545]

230[465]

Rated Thrust N (Kgf) 340.1 (34.7) [169.5 (17.3 ]


Weight Kg 13.2 14.8 16.4 18.0 19.6 21.2 22.8 24.4 26.0 27.6 29.2 30.8



Ballscrew φ 20mm, lead 10mm [20mm] Rolled thread C10, Backlash 0.05mm or less






Maximum Thrust *1 N (Kg) 680.2 (69.4) [339.0 (34.7)]

Slider Payload *2 *3 Kgw Horizontal use: 80 [40] Vertical use: 19 [9]

Load Moment *2, *4 N•m (Kgf•m) Ma: 104.9 (10.7) Mb: 149.9 ( 15.3) Mc: 248.9 (25.4)


ISD-L-400 [ Large 400W type ]

*1) At a speed of 10mm/sec for 5 seconds.*2) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*3) At an acceleration of 0.3 G and 1000 mm/sec speed.


■ Dimensions

Brake (option):


P.8

220150120 151590

75 75

30308-M8 depth20

2-φ8H10 depth 10

105

85.6

112

81.5

12110589

120

15515

36 15 220 15 190C

109.

5

15

Maintain over 40

B

A

4-φ8H10 depth 10

60

Stroke mm 100 200 300 400 500 600 700 800 900 1000 1100 1200

Rated Output W 400

Maximum Velocity mm/sec 1000 930 765 640 545 465

Rated Thrust N (kgf) 340.1 (34.7)


Weight kg 13.2 14.8 16.4 18.0 19.6 21.2 22.8 24.4 26.0 27.6 29.2 30.8



Ballscrew φ 20mm, lead 20mm Rolled thread C10, Backlash 0.05mm or less






Maximum Thrust *1 N (kg) 680.2 (69.4)

Slider *2 *3 kgw Horizontal use: 80 Vertical use: 19

Load Moment *2, *4 N•m (kgf•m) Ma: 104.9 (10.17) Mb: 149.9 (15.3) Mc: 248.9 (25.4)


Stroke 100 200 300 400 500 600 700 800 900 1000

A 502 602 702 802 902 1002 1102 1202 1302 1402

B 478 578 678 778 878 978 1078 1178 1278 1378

C 100 200 300 400 500 600 700 800 900 1000

D --- --- 1 1 2 2 3 3 4 4

E 10 10 12 12 14 14 16 16 18 18

F 22 122 22 122 22 122 22 122 22 122


Model Type MCNB5-18



862.1(88.0)

431.0(44.0)

215.5(22.0)



ISD-LX-200 • 400 [ Medium 200W • 400W Mid-Support Type ]

*1) Load uniformly distributed on the slider. Base affixed to a flat, strong frame.*2) At an acceleration of 0.3 G and 1000mm/sec speed.

Specifications in [ ] are for when rated output is 400W.

■ Dimensions

P.9



8-M8 depth 20

2-φ8H10 depth 10

4-φ8H10 depth 10

E-M8 depth 20

Maintain over 40

Stroke 1000 1100 1200 1300 1400 1500 1600

A 1588 1688 1788 1888 1988 2088 2188

B 1558 1658 1758 1858 1958 2058 2158

C 1000 1100 1200 1300 1400 1500 1600

D 4 5 5 6 6 7 7

E 20 22 22 24 24 26 26

F 173.5 73.5 173.5 73.5 173.5 73.5 173.5

Stroke mm 1000 1100 1200 1300 1400 1500 1600

Rated Output W 200 [400]

Maximum Velocity mm/sec 1000 950 830

Rated Thrust N (Kgf) 169.5 (17.3) [340.1 (347.1)]


Weight kg 30.8 [31.2] 32.4 [32.8] 34.0 [34.4] 35.6 [36.0] 37.2 [37.6] 38.9 [39.2] 40.5 [40.8]



Ballscrew φ 20mm, lead 20mm, Rolled thread C10, Backlash 0.05mm or less

Guide Unique to ISD Integrated into base





Slider Payload *1 *2 Kgw Horizontal use: 40 [80]

Load Moment *1, *3 N•m (Kgf•m) Ma: 104.9 (10.7) Mb:149.9 (15.3) Mc: 248.9 (25.4)


Notes

P.10

IS-D (2nd edition)IS Dust Shield TypeCatalog No. 122598

Providing quality products since 1986.

IAI America, Inc. (U.S. Headquarters)2360 West 205th Street, Torrance, CA 90501(800) 736-1712 (310) 320-4553 FAX

IAI America, Inc. (Illinois Regional Office)1261 Hamilton Parkway, Itasca, IL 60143(800) 944-0333 (630) 467-9912 FAX

U.S. Sales Offices

www.intelligentactuator.com

ISD CRIS Dust Shield Clean Room Series

Class 10 Compliance

epyT yticapaCdaeL)mm(

yticoleVmumixaM)s/mm(

daolyaPlatnoziroH)gK(

])m•fgK(m•N[tnemoM ekortS)mm(AM BM CM

S)epyTllamS( 06

4 002~091 054.82)9.2(

2.04)1.4(

7.56)7.6(

006~0018 004~083 52

61 008~067 21

M)epyTmuideM(

001

5 052~521 08

6.96)1.7(

0.99)1.01(

7.161)5.61(

0001~001

01 005~052 04

02 0001~005 02

00201 005~052 08

02 0001~005 04

L)epyTegraL(

00201 005~032 08

9.401)7.01(

9.941)3.51(

9.842)4.52(

0021~00102 0001~564 04

004 02 0001~564 08

ISD - S - 4 - 60 - 600 CR - B

Specification

.oN metI tnetnoC

1 epyT I(RCDSI )epyTmooRnaelCdliehStsuDS

2 eziS

epyTllamS:S

epyTmuideM:M

epyTegraL:L

3 daeLwercS

61,8,4:epyTllamS

02,01,5:epyTmuideM

02,01:epyTegraL

4 rewoP

W06:epyTllamS

W002,W001:epyTmuideM

W004,W002:epyTegraL

5 ekortS

006~001:epyTllamS

0001~001:epyTmuideM

0021~001:epyTegraL

6 noitpO

ekarB:BedisthgirehtnognittifmuucaV:R

nosignittifmuucavfonoitisopdradnatsehT*(.)rotautcaehtfoedistfeleht

• Clean Room class 10 (0.1 µm) compliance.

• A protective stainless steel sheet helps to restrict the migration of particles generated from within the actuator, and also reduces the level of vacuum needed to evacuate the actuator.

• Designed for high velocity and high payload, with excellent repeatability of positioning.

Repeatability: ±0.02 Maximum Stroke: 1200mm Maximum Velocity: 1000mm/sec Maximum Payload: 80kg

• Quick-Connect Vacuum Fitting.

ISD CR

P.1

Vacuum Fitting Dimensions (Brake Option):

1

Model Name

CLEAN ROOM TYPE

Class 10 Compliance

2 3 4 5 6

eziSegattaWrotoM

SW06

MW001

MW002

LW002

LW004

A 4.75 9.85 9.85 9.85 9.85

B 9.13 9.13 9.13 9.13 9.13

C 5.52 72 72 72 72

D 83 05 05 05 06

E 5.14 94 94 16 16

F 83 05 05 05 06

Features

ISD-S- - 60 CR [ Small 60W Type ]Specifications in [ ] are for 8mm lead. Specifications for { } are for 16mm lead.

ekortS mm 001 002 003 004 005 006

1*leveLnaelC 1.0(ecnailpmoc01ssalC µ )m

tuptuOdetaR W 06

yticoleVmumixaM ces/mm }008{]004[002091]083[}067{

tsurhTdetaR )fgK(N })5.6(7.36{])0.31(4.721[)0.62(8.452

ytilibataepeR mm 20.0±

thgieW gK 0.4 6.4 3.5 9.5 5.6 2.7

rotoM rotoMovreSCA

redocnE rotomehthtiwtinUelgniS

wercsllaB φ sselromm50.0hsalkcaB,01CdaerhtdelloR}mm61{]mm8[mm4dael,mm21

ediuG tinUelgniSevisulcxEDSI

gnilpuoCwercsllaB/rotoM tinuelgnisanidetargetnitfahswercsllaB,tfahsrotoM

redilS,esaB tnemtaertetimulaetihW)tnelaviuqe5T-S1ON6A(munimuladedurtxE

teehSsselniatSevitcetorP mm1.0ssenkcihT)tnelaviuqe034SUS(leetssselniatslaicepS

esaerG esaerGgnitareneGelcitraP-woL

gnilpuoCepiPnoitcuS retemaiDretuOebuTelbacilppAgnittiFmuucaVtcennoC-kciuQ φ 61

2*tsurhTmumixaM )gK(N })0.31(4.721{])0.62(8.452[)0.25(6.905

4*3*redilS wgK }3{]6[41:esulacitreV}21{]52[05:esulatnoziroH

5*,3*tnemoMdaoL )m•fgK(m•N )7.6(7.56:cM)1.4(2.04:bM)9.2(4.82:aM

6*LhtgneLdaoLgnahrevO mm 054rednU:noitceriDcM,bM054rednU:noitceriDaM

*6) Center of gravity for the mounted object is at thehalfway point of the overhang length.*2) At a speed of 10mm/sec for 5 seconds.

*3) Load uniformly distributed on the slider.Base affixed to a flat, strong frame.

*4) At an acceleration of 0.15G [0.3G] {0.3 G}, and200mm, [400mm] {800mm} mm/sec speed.

*5) Direction of load moment is: *1) Vacuum rate is for when 10~30NL/Min (-3~-13mmAq).

ekortS 001 002 003 004 005 006

A 434 435 436 437 438 439

B 414 415 416 417 418 419

C 001 002 003 004 005 006

D --- --- 1 1 2 2

E 54 541 54 541 54 541

F 01 01 21 21 41 41

G 0.951 5.112 5.162 5.113 0.953 5.114

H 0.552 5.203 5.253 5.204 0.554 5.205

n Dimensions

noitacificepS ekarbcitengamortcelE

mmdaeLsixAwercS 4 8 61

)fgK(NrewoPecnanetniaM3.152)6.52(

7.521)8.21(

8.26)4.6(

noitisoPgnitnuoM dnerotom-noN

egatloVdetaR )V09CDegatlovnoitaticxelaitinI(V54CD

Brake Specification

P.2

ISD-M- -100 CR [ Medium 100 W type ]Specifications in [ ] are for 10mm lead. Specifications for { } are for 20mm lead.



*4) At an acceleration of 0.15G [0.3G] {0.3 G}, and250 [500] {1000} mm/sec speed.


n Dimensions

ekortS mm 001 002 003 004 005 006 007 008 009 0001


tuptuOdetaR W 001

yticoleVmumixaM ces/mm }0001{]005[052522

]554[}519{

081]563[}537{

051]003[}006{

521]052[}005{

tsurhTdetaR )fgK(N })6.8(3.48{])3.71(5.961[)7.43(1.043


thgieW gK 8.7 9.8 1.01 2.11 3.21 5.31 6.41 7.51 9.61 0.81

rotoM rotoMovreSCA


wercsllaB φ sselromm50.0hsalkcaB,01CdaerhtdelloR}mm02{]mm01[mm5dael,mm61

ediuG tinUelgniSevisulcxEDSI






2*tsurhTmumixaM )gK(N })2.71(6.861{])7.43(0.933[)4.96(2.086

4*3*redilS wgK }5{]9[91:esulacitreV}02{]04[08:esulatnoziroH




mmdaeLsixAwercS 5 01 02


3.642)1.52(

2.321)6.21(



Brake Specification ekortS 001 002 003 004 005 006 007 008 009 0001

A 205 206 207 208 209 2001 2011 2021 2031 2041

B 874 875 876 877 878 879 8701 8711 8721 8731

C 001 002 003 004 005 006 007 008 009 0001

D --- --- 1 1 2 2 3 3 4 4

E 01 01 21 21 41 41 61 61 81 81

F 22 221 22 221 22 221 22 221 22 221

G 191 042 092 043 193 044 094 045 195 046

H 782 833 883 834 784 835 885 836 786 837

P.3

ISD-M- -200 CR [ Medium 200W Type ]Specifications in [ ] are for 8mm lead. Specifications for { } are for 20mm lead.



*4) At an acceleration of 0.3 G, and 500[1000] mm/sec speed.


ekortS mm 001 002 003 004 005 006 007 008 009 0001


tuptuOdetaR W 002


]559[563

]537[003

]006[052

]005[

tsurhTdetaR )fgK(N ])3.71(5.961[)7.43(1.043


thgieW gK 8.7 9.8 1.01 2.11 3.21 5.31 6.41 7.51 9.61 0.81

rotoM rotoMovreSCA


wercsllaB φ sselromm50.0hsalkcaB,01CdaerhtdelloR}mm02{mm01dael,mm61

ediuG kcartdnuorgleetsnobracdenedraH:gniraebgnillorgnitalucricertceriD


redilS,esaB tnemtaertetimulaetihW)5T-S1ON6A(munimuladedurtxE




2*tsurhTmumixaM )gK(N ])7.43(0.933[)4.96(2.086

4*3*redilS wgK ]9[91:esulacitreV]04[08:esulatnoziroH



Brake Specification ekortS 001 002 003 004 005 006 007 008 009 0001

A 205 206 207 208 209 2001 2011 2021 2031 2041

B 874 875 876 877 878 879 8701 8711 8721 8731

C 001 002 003 004 005 006 007 008 009 0001

D --- --- 1 1 2 2 3 3 4 4

E 01 01 21 21 41 41 61 61 81 81

F 22 221 22 221 22 221 22 221 22 221

G 191 042 092 043 193 044 094 045 195 046

H 782 833 883 834 784 835 885 836 786 837

P.4

n Dimensions


mmdaeLsixAwercS 01 02


2.321)6.21(



ISD-L- - 200 CR [ Large 200 W type ]Specifications in [ ] are for 10mm lead. Specifications for { } are for 20mm

*6) Center of gravity for the mounted object is at thehalfway point of the overhang length.


ekortS mm 001 002 003 004 005 006 007 008 009 0001 0011 0021


tuptuOdetaR W 002


]039[083

]567[023

]046[072

]545[032

]564[

tsurhTdetaR )fgK(N ])3.71(5.961[)7.43(1.043


thgieW gK 2.31 8.41 4.61 0.81 6.91 2.12 8.22 4.42 0.62 6.72 2.92 8.03

rotoM rotoMovreSCA


wercsllaB φ sselromm50.0hsalkcaB,01CdaerhtdelloR}mm02{mm01dael,mm61







2*tsurhTmumixaM )gK(N ])7.43(0.933[)4.96(2.086

4*3*redilS wgK ]9[91:esulacitreV]04[08:esulatnoziroH



Brake Specification ekortS 001 002 003 004 005 006 007 008 009 0001 0011 0021

A 675 676 677 678 679 6701 6711 6721 6731 6741 6751 6761

B 645 646 647 648 649 6401 6411 6421 6431 6441 6451 6461

C 001 002 003 004 005 006 007 008 009 0001 0011 0021

D --- --- 1 1 2 2 3 3 4 4 5 5

E 21 21 41 41 61 61 81 81 02 02 22 22

F 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371

G 5.971 0.642 0.692 0.643 5.973 0.644 0.694 0.645 5.975 0.646 0.696 0.647

H 5.663 0.004 0.054 0.005 5.565 0.006 0.056 0.007 5.567 0.008 0.058 0.009


mmdaeLsixAwercS 01 02


2.321)6.21(



P.5

n Dimensions

*2) At a speed of 10mm/sec for 5 seconds.*3) Load uniformly distributed on the slider.

Base affixed to a flat, strong frame.*4) At an acceleration of 0.3 G, and 500mm

[1000mm] m/sec speed.

ISD-L - -400 CR [ Large 400W Type ]ekortS mm 001 002 003 004 005 006 007 008 009 0001 0011 0021


tuptuOdetaR W 004

yticoleVmumixaM ces/mm 0001 039 567 046 545 564

tsurhTdetaR )fgK(N )7.43(1.043


thgieW gK 2.31 8.41 4.61 0.81 6.91 2.12 8.22 4.42 0.62 6.72 2.92 8.03

rotoM rotoMovreSCA


wercsllaB φ sselromm50.0hsalkcaB,01CdaerhtdelloRmm02dael,mm02







2*tsurhTmumixaM )gK(N )4.96(2.086

4*3*redilS wgK 91:esulacitreV08:esulatnoziroH





*4) At an acceleration of 0.3 G, and1000mm/sec speed.

*5) Direction of load moment is: *1) Vacuum rate is for when 90NL/Min (-60mmAq).


mmdaeLsixAwercS 02

)fgK(NrewoPecnanetniaM )0.22(5.512



Brake Specification ekortS 001 002 003 004 005 006 007 008 009 0001 0011 0021

A 675 676 677 678 679 6701 6711 6721 6731 6741 6751 6761

B 645 646 647 648 649 6401 6411 6421 6431 6441 6451 6461

C 001 002 003 004 005 006 007 008 009 0001 0011 0021

D --- --- 1 1 2 2 3 3 4 4 5 5

E 21 21 41 41 61 61 81 81 02 02 22 22

F 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371 5.37 5.371

G 5.971 0.642 0.692 0.643 5.973 0.644 0.694 0.645 5.975 0.646 0.696 0.647

H 5.663 0.004 0.054 0.005 5.665 0.006 0.056 0.007 5.667 0.008 0.058 0.009

P.6

n Dimensions

The Intelligent ActuatorTM

ISD-CR Class 10 Cleanroom Actuator broke new ground when it was introduced in early 1999 as a ballscrew-type/AC Servo linear actuator specifically designed for use in Class 10 cleanrooms. Our customers quickly came to appreciate the excellent price/performance ratio and highly compact design of this new series.

The new ESD option brings still another dimension of use for this highly successful actuator series - a standard, off-the-shelf ESD option thatallows these actuators to be used in applications where static electricity must be dissipated and not allowed to be transferred to the customer’sproduct. To achieve this, IAI engineers turned to stainless steel, electroless nickel plating, and the use of modern ESD-rated plastics. Theresult, is a standard actuator that is ready to use straight out of the box for use in a wide variety of single and multi-axis applications.

Standard ISD-CR Actuator Features

� Class 10 (0.1µm) Compliance� Protective stainless steel sheet restricts the migration of particles generated from within the actuator and also reduces the level of

vacuum required to evacuate the actuator.� Desiged for high velocity and high payload, with excellent repeatability of positioning

Repeatability: +/-0.02mmMax. Velocity: 1000mm/secMax. Payload: 80kg (Horizontal Load)

19kg (Vertical Load)

� Small, medium, and large-size frames using 60W, 100W, 200W, and 400W AC servo motors with incremental optical encoders.� Brake option available.

New ESD Option shown above in 2-axis system configuration. Note stainless steel slider and motor housing area. Flexible conduit used is also ESDrated. All metal parts are either made of stainless steel or plated with electroless nickel.

Intelligent Actuator, Inc., 2690 W. 237th St, Torrance, CA 90505, USA. 800-736-1712; 310-891-0815 fax; [email protected]

Intelligent Actuator

ISD-CR Class 10 Cleanroom Robot SystemElectro-static Discharge (ESD) Option

(29)

(27)(28.5)(8.5)

HG

147

110

F Dx200

22089

220150

1512015309030

70

20 100

277.5

150 15035

17.5

105

15 15 190

85

.6

75

A15B15155

120

112

81.5

121105

107.

5

36

8-M8 depth 20

2-o8H10 depth 10 Applicable tube outer diameter o12 (inner diameter 8)Quick-Connect Coupling: KAL12-U03

Maintain over 40

E-M8 depth 20

4-o8H10 depth 10

C

12314.1

(24.

5)

(27.5)

(28.5)(8.5)

Quick-Connect Coupling: KAL12-U03

HG

89

73.5

151

E

Maintain over 40

151 C50

70

77

27 100 130 12

192

7030 16

60

46

4545

90

1070

B 10A

54.5

Dx200

10

74.5

60

7094 10

70.5

2-o6H10 depth 10

4-M6 depth 13

F-M6 depth 17100

4-o6H10 depth 10

Applicable tube outer diameter o12 (inner diameter 8)

100 200 300 400 500 600

A 434 534 634 734 834 934

B 414 514 614 714 814 914

C 100 200 300 400 500 600

D -- -- 1 1 2 2

E 45 145 45 145 45 145

F 10 10 12 12 14 14

G 159.0 211.5 261.5 311.5 359.0 411.5

H 255.0 302.5 352.5 402.5 455.0 502.5

100 200 300 400 500 600 700 800 900 1000

A 502 602 702 802 902 1002 1102 1202 1302 1402

B 478 578 678 778 878 978 1078 1178 1278 1378

C 100 200 300 400 500 600 700 800 900 1000

D -- -- 1 1 2 2 3 3 4 4

E 10 10 12 12 14 14 16 16 18 18

F 22 122 22 122 22 122 22 122 22 122

G 191 240 290 340 391 440 490 540 591 640

H 287 338 388 438 487 538 588 638 687 738

Lead (mm) (Note 1) 4 8 16

Stroke (mm) 100 ~600

Motor Output (W) 60

Maximum Speed (mm) (Note 2) 200 400 800

Horizontal Payload (kgw) 50 25 12

Vertical Payload (kgw) 14 6 3

Moment {N • m (kgf • m)}

Ma:28.4 (2.9)

Mb:40.2 (4.1)

Mc: 65.7 (6.7)

Overhang Load Length (mm) Under 450

Vacuum Rate(NL/min) (Note 3) 10~30

Lead (mm) (Note 1) 5 10 20

Stroke (mm) 100 ~1000

Motor Output (W) 100 (200)

Maximum Speed (mm) (Note 2) 250 500 1000

Horizontal Payload (kgw) 80 40 (80) 20 (40)

Vertical Payload (kgw) 19 9 (19) 5 (9)


Ma: 69.6 (7.1)

Mb: 99.0 (10.1)

Mc: 161.7 (16.5)



( ) indicates 200W specifications[For lead 5, 100W only].

(Note 1): Stroke is set in 100mm increments.

(Note 2): The maximum speed will reduce once the stroke surpasses 600.

(Note3): This will vary according to speed.




M (Medium) Type (100W/200W)

L (Large) Type (200W/400W)

100 200 300 400 500 600 700 800 900 1000 1100 1200

A 576 676 776 876 976 1076 1176 1276 1376 1476 1576 1676

B 546 646 746 846 946 1046 1146 1246 1346 1446 1546 1646

C 100 200 300 400 500 600 700 800 900 1000 1100 1200

D -- -- 1 1 2 2 3 3 4 4 5 5

E 12 12 14 14 16 16 18 18 20 20 22 22

F 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5 73.5 173.5

G 179.5 246.0 296.0 346.0 379.5 446.0 496.0 546.0 579.5 646.0 696.0 746.0

H 366.5 400.0 450.0 500.0 566.5 600.0 650.0 700.0 766.5 800.0 850.0 900.0

Lead (mm) (Note 1) 10 20

Stroke (mm) 100 ~1200

Motor Output (W) 200 (400)

Maximum Speed (mm) (Note 2) 500 1000

Horizontal Payload (kgw) 80 40 (80)

Vertical Payload (kgw) 19 9 (19)


Ma: 104.9. (10.7)

Mb: 149.9 (15.3)

Mc: 248.9 (25.4)



( ) indicates 400W specifications[For lead 10, 200W only].




15.1147.4

(26)

(27)

H

(28.5)

G

(8.5)

2525

F

90

95

35 120 Dx200

241

120 165 16

70

80

66 3415.5

190 C

A12B12

6060

120159015

12590

9480

69.594 93

119

90.5

190

4-M8 depth 184-M6 depth 18

2-o8H10 depth 10

Quick-Connect Coupling:KAL12-U03Applicable tube outer diameter o12 (inner diameter 8)

Maintain over 40

E-M8 depth 20

4-o8H10 depth 10

ISD-CR ESD Specifications

ISD - S - 4 - 60 - 600 - CR - ESD - N2

S (Small Type) 60W

SizeS: SmallM: MediumL: Large

Screw LeadSmall: 4,8,16Medium: 5,10,20Large: 10,20

Motor OutputSmall: 60Medium: 100,200Large: 200,400

StrokeSmall: 100~600Medium: 100~1000Large: 100~1200

OptionESD:Electro-Static DischargeB: BrakeR: Coupling opposite side

Controller Type(non-entered): S-SEL-E, M-SEL-GN6: S-SEL-ES, M-SEL-GSN2: S-SEL-F, M-SEL-H

ModelType

ISD CR (first edition)IS Dust Shield Clean Room TypeCatalog No. 123098

Providing quality products since 1986.

(U.S. Headquarters)2690 West 237th Street, Torrance, CA 90505(800) 736-1712 (310) 891-0815 FAX

(Midwestern Regional Office)1261 Hamilton Parkway, Itasca, IL 60143(800) 944-0333 (630) 467-9912 FAX

U.S. Regional Offices

www.intelligentactuator.com

(Eastern Regional Office) 7 South Main Street, Suite-F, Marlboro, NJ 07746 (732) 683-9101 (732) 683-9103 FAX

is-d - intelligent actuator · weight kg 4.0 4.6 5.3 5.9 6.5 7.2 motor ac servo motor encoder...

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