ICEM2016

A: 2D Materials and Devices Beyond Graphene B: Compound Semiconductor/ Group IV on Silicon

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The International Union of Materials Research Societies (IUMRS) will be organizing the next International Conferenceon Electronic Materials (IUMRS-ICEM 2016) in Singapore. The IUMRS-ICEM 2016 focusing on electronic materials andrelated technologies will be held from 04 to 08 July, 2016. The venue will be at Suntec Singapore.

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ICEM2016

I: Topological Insulators J: Organic Electronics

K: Advanced Applications of Ion Beams for Materials Science L: Stretchable and Wearable Electronics

M: Optical Materials and Devices N: Materials by Theoretical/Computational Design

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2D Materials andDevices BeyondGraphene

CompoundSemiconductor/Group IV onSilicon

PlasmonicsandMetamaterials

AdvancedSpintronic andMagneticMaterials/Devices

Surface andInterfaceEngineeringforElectronics

Materialsfor SolarEnergyConversion

Advances in Smart EnergyStorage for a Sustainable EnergyFuture – Electrochemistry,Mechanics and Applications

Ferroelectric,Piezoelectric andMultiferroicMaterials andDevices

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AdvancedApplications ofIon Beams forMaterials Science

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Materials byTheoretical/Computational Design

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Browse/Print Schedule and AbstractsThis is where you can browse all abstracts and their scheduled presentations as well as download/print your personal copy. Please know that ICEM2016 does not provide abstracts as printed copies or in CD/USBs during the conference.If desired, please print and bring along your own copy to the conference.

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K: Advanced Applications of Ion Beams for Materials ScienceFriday 8 July, 2016

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Friday 8 July, 2016 | Symposium K

Oral PresentationsSession K: Ion beams for the irradiation of diamond.Friday, July 08, 2016 | 11:00 13:00 | 310Chairs: Andreas MARWITZ

K130min

ICEM16A1035 Invited Irradiation Defects in Diamond Studies of Single Crystal Diamond Membranes Using Ion Microbeam Milko JAKSIC1#+, Veljko GRILJ1, Wataru KADA2, Tomihiro KAMIYA3, Takeshi OHSHIMA3, Michal POMORSKI4, Natko SKUKAN1, IvanSUDIĆ11Ruđer Boskovic Institute, Zagreb, Croatia (local name: Hrvatska), 2Gunma University, Japan, 3Japan Atomic Energy Agency, Japan,4French Alternative Energies and Atomic Energy Commission (CEA) LIST, France#Corresponding author: jaksic@irb.hr +Presenter

Recent development of the single crystal CVD diamond membrane radiation detector, serving both as a transmission particle detectorand a vacuum window (1), opened several new exciting application areas and enabled ion microbeam investigation of diamondproperties that could not be studied before.

By the minimisation of polarization effects (charge trapping can be neglected due to short charge drift lengths in membranes), diamondradiation hardness could be reliably compared with silicon for both MeV and GeV energy range of heavy ions. Additionally, the two ionmicroprobe techniques IBIC and channelling STIM, were used as probes for studying the evolution of defect formation process.

Concerning the applications of diamond membrane, irradiation of living cells through the diamond membrane certainly seems to be themost promising since diamond is biocompatible material and detector provides capability of reliable dose measurement. Furthermore,provision of the fast trigger signal associated by each ion transmitted through the membrane, has been also used to study the timeevolution of weak signals in detectors and other semiconductor devices that are otherwise undetectable due to either low carrier mobilityor high trapping probabilities.

1. V. Grilj, N. Skukan, M. Pomorski, W. Kada, N. Iwamoto, T. Kamiya, T. Ohshima, M. Jakšić, Appl. Phys. Lett. 103 (2013) 243106

K230min

ICEM16A1122 Invited MeVIonBeam Lithography in Diamond for Applications in BioSensing and Photonics Paolo OLIVERO1#+1Physics Department, Università di Torino, Italy#Corresponding author: olivero@to.infn.it +Presenter

Diamond is a material with extreme physical properties: high mechanical and radiation hardness, chemical inertness, spectrally widetransparency, high carrier mobility, high dielectric strength, biocompatibility, availability of a range of opticallyactive defects. Such uniquefeatures make this material extremely appealing for many different technological applications. Interestingly, the same properties thatmake diamond so attractive also determine a major challenge in their fabrication.

MeV ion implantation is an effective tool in the microfabrication and functionalization of a vast range of materials, and in particular it canbe effectively adopted to engineer the electrical, optical and structural properties of diamond. The damage density can be controlledover a broad range by varying several implantation parameters, such as ion species and fluence, resulting in the formation of pointdefects, in the amorphization and eventually in the permanent graphitization of the pristine crystal upon thermal annealing when a criticaldamage threshold is reached. In this structural modification process, high spatial resolution in both lateral and depth dimensions isallowed respectively by the availability of focused ion beams and by the peculiar damage density profile of highly energetic ions in matter.

In the present contribution, an overview will be given on our activity in the development of two different classes of diamondbaseddevices by means of deep ion beam lithography:

multielectrodearray (MEA) devices for in vitro sensing of the activity of neuroendocrine and neuronal cells;

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electrically stimulated single photon emitters.

K315min

ICEM16A1094 Contributed The Optimization of Optical Guiding Properties in Ion Implanted Single Crystal CVD Diamond Sudheer Kumar VANGA1, Huining JIN1#+, Shuvan Prashant TURAGA2, Keane HI3, Yu Xuan LIM3, Andrew A. BETTIOL21National University of Singapore, Singapore, 2Physics, National University of Singapore, Singapore, 3Ngee Ann Polytechnic, Singapore#Corresponding author: a0129478@u.nus.edu +Presenter

Ion implantation is a promising technique for modifying the refractive index of diamond and the formation of optical structures anddevices such as waveguides. In this work, we have studied the effects of varying implantation fluences, ion species and annealingtemperatures on the optical guiding properties of diamond. We have applied various optical characterization techniques such asphotoluminescence spectroscopy, Raman spectroscopy and the direct measurement of propagation loss at various wavelengths todetermine the optimal conditions for fabricating waveguides in diamond. Our results show that the optical guiding process in ionimplanted diamonds is not so straight forward. The location of the mode varies according to the experimental conditions such asimplantation fluence and annealing temperature. This seems to suggest that the change in refractive index is not directly proportional tothe induced damage. We have attempted to model the experimental results using finite difference time domain (FDTD) software inorder to correlate the real and imaginary parts of the refractive index with vacancy profile created by ion implantation. We have beenable to achieve a reasonable agreement between experiment and simulation. Furthermore, our annealing studies have shown that wecan significantly reduce the loss in diamond waveguides while still maintaining enough index contrast to obtain good light confinement.

K415min

ICEM16A1087 Contributed Optical Characterization Studies of LowZ Ion Implanted NanoDiamonds Shuvan Prashant TURAGA1#+, Huining JIN2, Zhaohong MI2, Sudheer Kumar VANGA2, Andrew A. BETTIOL11Physics, National University of Singapore, Singapore, 2National University of Singapore, Singapore#Corresponding author: physpt@nus.edu.sg +Presenter

In the recent literature, fluorescent nanodiamonds (FNDs) have gained attention due to their excellent biocompatibility, highfluorescence yields and long lifetimes making them effective and efficient biomarkers without any known cellular toxicity. Thesefavourable properties have led to their applications in high resolution bioimaging, quantum information processing, nanoscopicmagnetometry and long term cellular tracking. The nanodiamonds typically are prepared as fluorescent markers by irradiating themwith low energy (40keV He+) or very high energy (23 MeV He+) particles. Due to ion implantation, different colour centres areproduced in nanodiamonds. Each colour centre has unique fluorescence property and lifetime. Generally, the FNDs prepared by highenergy ions (3 MeV He+) are shown to have higher fluorescence yields. Many studies have been done on functionalizing these nanodiamonds to make them suitable for different cellular environments and reduce the aggregation effects among these nanoparticles. Thebiomarkers are typically followed by annealing(at 800oC) and oxidation steps. However, till date no systematic studies have beenconducted on the cumulative effect of the fluence, energy and annealing. We present a parametric optical characterization study of theeffect of ion implantation on pristine nanodiamonds by varying ion energies and fluences using our singletron accelerator with hydrogen(H+) and helium (He+) ions. For all the irradiated samples, Raman and photoluminescence emission spectroscopies are conducted andanalysed to understand the mechanism behind ion implanted effects on the optical properties of nanodiamonds.

K515min

ICEM16A0328 Contributed Fabrications of 3D Photonic Components on SOI and Bulk Silicon Haidong LIANG1#+, Sudheer Kumar VANGA1, Jianfeng WU1, Chengyuan YANG2, Andrew A. BETTIOL3, Mark BREESE1, Jeroen A.VAN KAN11National University of Singapore, Singapore, 2Agency for Science, Technology and Research (A*STAR), Singapore, 3Physics, NationalUniversity of Singapore, Singapore#Corresponding author: haidong@nus.edu.sg +Presenter

Vertically coupled waveguides have been fabricated on a silicononinsulator (SOI) platform using a combination of reactive ion etching(RIE) to pattern the device layer and highenergy proton beam irradiation followed by electrochemical etching to pattern the substrate.At near infrared range, a typical coupling efficiency of 26% has been achieved. We have also fabricated three dimensional photoniccomponents such as waveguides and beam splitters from bulk crystalline silicon using a process based on one or more ion irradiationsteps with different energies and fluences, followed by electrochemical anodization. The dimensions of the waveguides can be definedwithin a range of 0.5 µm to several micrometers simply by varying the ion beam fluence.

K615min

ICEM16A0762 Contributed Experimental Evidence of 20 PicoMeter Focusing Effect for Axially Channelled MeV Ions Mallikarjuna RAO MOTAPOTHULA1#+, Srdjan PETROVIĆ2, Nebojša NEŠKOVIĆ2, T. VENKATESAN1, Mark BREESE11National University of Singapore, Singapore, 2Vinča Institute of Nuclear Sciences, Singapore#Corresponding author: malli@nus.edu.sg +Presenter

SubÅngstrom focusing of channelled MeV ion beams within axial crystal channels was predicted in simulations ten years ago butexperimental evidence of this effect has proved elusive. This intriguing concept may provide a means for materials modification andanalysis on an unprecedented lateral scale. We present experimental angular distributions of axially channelled MeV protons passingthrough a 55 nm [001] silicon membrane, in which the transmitted angular distribution displays fine angular structure in the form of anarray of bright dots of angular width 0.06×Yc. These are in excellent agreement with Monte Carlo simulations based on the recentlydeveloped Molièrerainbow potential. This provides evidence of the existence of the superfocusing effect and verification of thesimulation results in which a flux enhancement of up to 800 within a focused beam width of ~21 pm is achieved.

Session K: Applications of ion beamsFriday, July 08, 2016 | 14:30 16:30 | 310Chairs: Milko JAKSIC

K130min

ICEM16A0077 Invited Ion Implantation for Modification of Biomaterials Weihong JIN1+, Paul CHU1#1City University Hong Kong, Hong Kong SAR#Corresponding author: paul.chu@cityu.edu.hk +Presenter

Cationic polymers and biodegradable magnesiumbased alloys are promising in biological applications for gene/drug delivery andbiomedical implants, respectively. However, the mutually conflicting therapeutic effects and cytotoxicity induced by the cationic polymers isthe major problem limiting wider gene/drug delivery applications. Moreover, biomedical applications of magnesiumbased alloys arehampered by the rapid degradation rate in the aggressive physical environment and potential toxicity. The chemical and biological natureof biomaterials dictates the interactions with the surrounding environment and proper tailoring of these properties is important. Ionimplantation offers the unique advantages of altering selected surface properties, introducing a graded surface layer without an abrupt

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interface to minimize the risk of layer delamination, and easy processing of samples with a complex shape. Meanwhile, the desiredelements can be incorporated into the materials with a precisely controlled dose by ion implantation. Therefore, this technique isespecially suitable for functionalization of biomaterials to cater to clinical requirements such as delivery efficiency, degradation resistance,cytocompatibility, antibacterial capability, and so on. In this invited talk, recent research work related to modification of biodegradablepolymers and metals by ion implantation performed in the Plasma Laboratory of City University of Hong Kong is discussed.

K230min

ICEM16A1212 Invited Intense Nanosecond Pulses of 1.2 Mev He+ Ions for Probing Materials and Warm Dense Matter Studies Qing JI1#+, Peter SEIDL1, Arun PERSAUD1, William WALDRON1, Thomas SCHENKEL1, John BARNARD2, Alex FRIEDMAN2, DavidGROTE2, Erik GILSON3, Igor KAGANOVICH31Lawrence Berkeley National Laboratory, United States, 2Lawrence Livermore National Laboratory, United States, 3Princeton PlasmaPhysics Laboratory, United States#Corresponding author: qji@lbl.gov +Presenter

Intense, short pulses of ions in the MeV range can be used to for probing materials and isochoric heating of target materials for highenergy density physics experiments and warm dense matter (WDM) studies. The Neutralized Drift Compression Experiment (NDCXII)at Lawrence Berkeley National Laboratory was designed with this motivation as a pulsed, linear induction accelerator to deliver intense(up to 3x1011 ions/pulse), nanosecond duration pulses of up to 1.2 MeV lithium ions onto millimeter diameter beam spots on targets [1].At kinetic energy of 1.2 MeV, heating a thin target foil near the Bragg peak energy using He+ ions is a better match than Li+ ions [2].Recent results from a plasmabased helium ion source [3] has shown much greater charge delivered to the target [4] than the Li+ ionsfrom a hot plate type ion source [5]. The scientific topics to be explored using this unique ion beam accelerator include driving thin foils toWDM states with peak temperatures of ~ 1 eV, the multiscale dynamics of radiationinduced damage in materials with pumpprobeexperiments, and intense beam and beamplasma physics.

References

[1] W. L. Waldron et al, Nucl. Instrum. Methods Phys. Res. Sect. A, 733, 226 (2014).

[2] W. M. Sharp et al, Nucl. Instrum. Methods Phys. Res. Sect. A, 733, 147 (2014).

[3] Q. Ji, et al., Rev. Sci. Inst. 87 02B707 (2016).

[4] P. A. Seidl et al, Proceedings of the 9th International Conference on Inertial Fusion Science andApplications. http://arxiv.org/abs/1601.01732.

[5] P. K. Roy et al., Nucl. Instrum. Methods Phys. Res. Sect. A, 733, 112 (2014).

*This work was performed under the auspices of the U. S. Department of Energy by Lawrence Berkeley National Laboratory undercontract No. DEAC0205CH11231.

K330min

ICEM16A0258 Invited Ion Irradiation of Nanomaterials for New Waveguide Laser Sources Operated in Pulsed Regimes Yang TAN1, Shengqiang ZHOU2, Feng CHEN3#+1Shandong University, China, 2Institute of Ion Beam Physics and Materials Research, Germany, 3School of Physics, ShandongUniversity, China#Corresponding author: drfchen@sdu.edu.cn +Presenter

Lowdimensional nanomaterials like Graphene, MoS2, Bi2Se3, have attracted great attentions in many aspects due to their unique andexcellent properties. In optics, a promising application of these wellknown nanomaterials is that they can serve as broad band saturableabsorbers for pulsed laser generation through Qswitching or modelocking mechanisms. Ion beam irradiation may be a suitabletechnique to modify the properties of the nanomaterials to achieve tailored nonlinearity. In addition, ion irradiation is a wellestablishedsolution to construct waveguide structures in optical materials. In laser crystal substrates, owing to the compact geometries of theguiding structures, enhanced performance of the lasing could be obtained with respect to the bulk systems. With combination of ionirradiated waveguides and nanomaterials, efficient pulsed waveguide lasers have been realized. In this work, we report on our recentprogress on the pulsed waveguide lasers based on ion irradiated laser crystals and nanomaterials through the passive Qswitching. Thetailored features by the ion beam modification play important roles for the performance of the waveguide laser systems.

K415min

ICEM16A0969 Contributed Separation of Magnetic Particles with a Single Channel Ratchet Design Fan LIU1#+, Li JIANG1, Huei Ming TAN1, Ashutosh YADAV1, Johan R. C. Van Der MAAREL1, Christian NIJHUIS1, Jeroen A. VANKAN11National University of Singapore, Singapore#Corresponding author: liufan06@gmail.com +Presenter

In this work, we present a PDMS lab on chip (LOC) devices used for Brownian particle separation. The devices were featured with azigzag ratchet separation channel and two electrode channels besides. Solder electrodes were injected into those two channel and usedto drive magnetic particles. The PDMS devices were fabricated with proton beam writing (PBW) which featured with 500 nm cornerrounding and 27 µm height. PBW shows great advantage in fabricating high aspect ratio nano structures with smooth side walls. Thiswill facilitate the easy injection of solder electrodes and in close proximity to the separation channel. Three different sizes of magneticparticles, 1.51 µm, 2.47 µm and 2.6 µm were tested with this design. Separation results indicate that particles with different dimensioncan be separated due to different interaction with the zigzag ratchet.

K515min

ICEM16A1143 Contributed IonBeamInduced Fluorescence in Upconversion Nanocrystals for HighResolution Bioimaging Zhaohong MI1#+, CeBelle CHEN1, Yuhai ZHANG1, Hong Qi TAN1, Ye TAO1, Frank WATT1, Andrew A. BETTIOL21National University of Singapore, Singapore, 2Physics, National University of Singapore, Singapore#Corresponding author: a0086306@u.nus.edu +Presenter

Fluorescent probes play an important role in biological labeling and targeting for applications such as bioimaging, biodetection andtherapeutics. We report a fluorescent material, lanthanide ions Yb3+/Tm3+ codoped NaYF4 nanocrystal, which can generate intenseemission under the excitation of megaelectronvolt (MeV) helium ions. A systematic spectroscopic study of NaYF4:Yb/Tm nanocrystalsshows that both downconversion and energy transfer upconversion contribute to the fluorescence emission. More importantly, theselanthanidedoped nanocrystals exhibit enhanced resistance to ionobleaching rather than those conventional fluorescent probes, such asquantum dots and organic dyes, allowing for longterm scanning for superresolution imaging purpose. As a demonstration, sufficientbrightness and inconspicuous ionobleaching of the asfabricated 100 nm nanoparticles under 1.6 MeV helium ions’ excitation makes