Advanced Lithography

• Soft lithography• Imprint lithography• SPM lithography • 3D lithography

Douglas B. Weibel, Willow R. DiLuzio and George M. WhitesidesNature Reviews Microbiology 5, 209-218 (March 2007)

Soft Lithography

Contact printing: Patterning of rounded surfaces

http://www.nanoterra.com/soft_lithography.asp

http://www.research.ibm.com/journal/rd/455/michel.html

Article from IBM J. Res. and Dev.

Organic single crystals on substrates patterned by microcontact printing. The printing uses PDMS stamps with relief features that are inked with a thick OTS film and then pressed onto the substrates. Patterned single-crystal arrays of different organic semiconductor materials.

ww

w.nature.com

Patterning organic single-crystal transistor arraysAlejandro L. Briseno, Stefan C. B. Mannsfeld, Mang M. Ling, Shuhong Liu, Ricky J. Tseng, Colin Reese,

Mark E. Roberts, Yang Yang, Fred Wudl and Zhenan Bao Nature 444, 913-917(14 December 2006)

OTS: octadecyltriethoxysilane

Douglas B. Weibel, Willow R. DiLuzio and George M. WhitesidesNature Reviews Microbiology 5, 209-218 (March 2007)

Soft Lithography

Micro-Transfer Molding

http://www.sciencedaily.com/releases/2006/06/060605081758.htm

http://www.ameslab.gov/final/News/Images/12-layer%20structure.jpg

3-D structures using TM

Nano-Imprint Lithography (NIL)

Hot embossing UV-curable

~20 nm holes

Imprint of sub-25 nm vias and trenches in polymersChou, S.Y. (Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA); Krauss, P.R.; Renstrom, P.J. Source: Applied Physics Letters, v 67, n 21, 20 Nov. 1995, 3114-16

Nano-Imprint Lithography - UV curable

Patterned polyset epoxy siloxane using UV-NIL

http://news.rpi.edu/update.do?artcenterkey=2394

Fabrication of NIL template

AFM Lithography - Scratching

• Scratching– Tip is scanned over substrate with strong loading force, leaving behind trenches

– Direct patterning of substrate or patterning of resist

http://www.ntmdt.com/spm-principles/view/afm-lithography-scratching

http://www.asylumresearch.com/Gallery/3d/3d5.shtml

Scratch lithography on polycarbonateScratch lithography on blood cell

AFM Lithography - Dynamic Plowing

• Dynamic Plowing– Indenting of surface with vibrating tip

– Surface is machined in three dimensions www.veeco.com

Poem writtenn in PMMA using dynamic plowing. Storage capacity greater than a compact disk

AFM Lithography - Anodic Oxidation

• Anodic Oxidation– Applying voltage between tip and metallic

surface in wet environment

– Tip and the surface interact electrochemically as anode and cathode correspondingly.

– Oxide will grow on the point right under the tip

Local Anodic Oxidation (LAO) of perovskite oxides

http://www.lamia.infm.it/afm_anodic_oxidation.htm

AFM image of a Ti/TiOx barrier. The image shows the 70nm wide metallic wire(black), defined by AFM induced oxide, and the barrier.

http://www.nano.physik.uni-muenchen.de/

AFM Lithography - STM Lithography

• STM Lithography– Pulsing current causes sample to melt and evaporate under tip

http://www.ntmdt.com/spm-principles/view/afm-lithography-scratching

STM lithography on Langmuir-Blodgett film