EDWARDS AND THE ENVIRONMENT

INNOVATIVE PRODUCTS GLOBAL STRENGTH LOCAL SUPPORT VACUUM EXPERTISE

Our CommitmentStrong environmental systems in place

• Major sites certified to ISO14001 — International standard for environmental management systems. — European, American and Asian sites.

• Annual survey at all sites — Covers key environmental impacts and controls.

• Member of Electronic Industries Citizenship Coalition (EICC) — An electronics industry scheme to improve the social, economic

and environmental conditions of the industry and it’s supply chain.

• Member of Mayday Network — UK’s largest group of businesses committed to taking action on

climate change.

• Member of SEMI Global Care™ — Semiconductor industry program encouraging improvement and

excellence in environment, safety and product stewardship.

Minimise our impact on the environment

We are committed to constantly improving our environmental systems to improve our performance.

• Climate change — Reduce our products’ energy consumption

▪ Working to SEMI, ITRS & S23 guidelines* — Reduce our emissions — Reduce our customers’ emissions

• Resource Conservation — Reduce/Reuse/Recycle — Reduce hazardous content of our products — Remanufacturing & Service

* SEMI = Semiconductor Equipment & Materials International ITRS = International Technology Roadmap for Semiconductors S23 = Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment

Our Aims

The carbon footprint converts all materials, transport and energy use into an equivalent amount of Carbon Dioxide (CO2) generated.

• Materials • Facilities • Transport • Product use • Abatement

Manufacturing, remanufacturing and product use generates

~2 million tonnes of CO2 equivalent p.a. at Edwards, our supply chain and our customers’ facilities.

Abatement prevents the emission of ~6 million tonnes CO2 equivalent p.a. at our customers’ facilities.

† Scope 1 (Direct emissions) and Scope 2 (emissions from electricity use) carbon emissions as defined by the Greenhouse Gas Protocol. All other data is Scope 3 (Indirect emissions).

“... over our products’ life cycle we are carbon negative”

The graph below shows the results of these calculations over a period of 12 months

To calculate our carbon footprint we need to look at the CO2 generated by our operations and our products in use in the following key areas:

Reducing our customers’ emissions

Semiconductor manufacturing processes use gases, such as perfluorocarbons and sulphur hexafluoride, which are of high environmental concern due to their persistence and high Global Warming Potential (GWP). These substances may have GWP’s 1000’s of times that of carbon dioxide.

Edwards has been helping our customers achieve high levels of destruction removal efficiency of these substances since the mid 1990s using our combustion abatement technology. More recently with plasma technology, our customers have been able to achieve CO2 reductions of >90% across entire fabs - in line with The World Semiconductor Council’s targets.

For production of flat panels and emerging environmental devices such as solar panels and LED lighting, we have developed the Specta Z and G abatement systems to cope with higher gas flows.

In fact we estimate that Edwards abatement products prevent CO2 output equivalent to 1% of the UK’s annual CO2 output.

Reducing our customers’ energy use

The Atlas range of abatement products use up to 50% less fuel than previous ranges. Edwards also offers Atlas technology as an energy efficiency upgrade to previous ranges of abatement products.

By combining pumps and abatement systems we have saved energy as well by applying idle mode technology.

Reducing our customers’ energy use

In the semiconductor industry process pumps are one of the largest energy users on a process tool which in turn can account for over a third of a fab’s energy use (SEMATECH Energy research).

At Edwards, we design in energy saving and reduced utility costs without compromising reliability. Using a platform design process each successive generation of our primary pumps consumes less energy.

And now, with the introduction of Active Utility Control (AUC) we reduce consumption of energy and utilities even further when pumps are idle using signals from the tool.

We make sure that the benefits of our latest generation platform technology are used throughout our pump range. These benefits are made available to customers running older generation pumps through Edwards’ energy efficiency upgrade programmes.

ABATEMENT

PRIMARY PUMPS

Actions on Climate Change

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Organic solvents containing Volatile Organic Compounds are a major source of pollution in the lower atmosphere and especially in built-up areas where respiratory problems can be caused.

Water based cleaning has eliminated the use of solvents in our production and remanufacturing processes.

In addition, the use of closed-loop recirculating water systems in our remanufacturing facilities reduces their water consumption by more than 90%.

Reducing our customers’ energy use

Reducing global energy consumption is key in the fight against global warming. In addition to minimising the energy our production facilities and offices consume, our latest generations of turbomolecular pump ranges enable our customers to meet their energy reduction targets. Edwards offers upgrade programmes enabling customers to switch to energy efficient turbomolecular pump technology.

For example, benefits of switching from oil diffusion pumps to STP turbomolecular pumps:

• Lower utility cost (Power and Water)

• No annual maintenance or oil changes

• Increased pumping performance

• Very low ambient noise and low vibration

• Reduced space requirements

SECONDARY PUMPS

REDUCING OUR EMISSIONS

Actions on Climate Change

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Energy Efficiency UpgradesEdwards latest generation energy efficient products not only offer energy savings, reduced utilities consumption and reduced carbon emissions, but also potentially offer future-proofing against carbon taxes and may qualify for “Green Grants”. We enable customers running older generation pumping and abatement products to benefit from these features with our upgrade programmes, which include the responsible recycling of upgraded products returned to us through our ReManufacturing operations.

Re-Use through Re-ManufactureAfter use many Edwards products are contaminated with hazardous process by-products, and - if disposed of - would need to be treated as hazardous waste.

However, Edwards enables the reuse of its products through a global network of service and remanufacturing facilities which safely decontaminate and remanufacture over 30,000 vacuum pumps a year.

Most vacuum pumps run 24/7 and are re-used 4-10 times over a 10-20 year lifetime. Remanufacture typically involves the reuse of over 90% by weight of a pump’s components – with a corresponding saving in raw materials and their embodied carbon dioxide.

In Europe we offer a free recycling service for gauges and controllers.

Reduced Hazardous Material ContentThere is a growing amount of legislation around the world (for example EU RoHS Directive*) to eliminate trace levels of heavy metals from electronic products, as these have the potential to leach out of landfill sites.

Although vacuum equipment is outside the scope of the RoHS Directive, we are implementing a voluntary policy to eliminate all ‘RoHS 6’ chemicals from our new product ranges.

Information on RoHS compliance of Edwards products can be found on our website.

Edwards’ Facilities• Reduce/Reuse/Recycle

It is Edwards policy that all major facilities are certified to ISO14001. As part of our ISO14001 management systems, our environmental policy incorporates a number of initiatives to minimise unnecessary waste. For a number of years we have been implementing a successful recycling policy as part of our active company policy on reducing landfill waste.

Actions on Resource Conservation

* EU Directive 2002/95/EC on the Restriction of certain Hazardous Substances controls the levels of lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls and polybrominated diphenyl ethers in certain categories of electrical equipment.

EDWARDS PRODUCTS

SOLID STATE LIGHTINGSolid-state lighting sources, such as light emitting diodes (LEDs), offer energy savings and environmental benefits compared to traditional incandescent or fluorescent lamps. In some cases they can offer a 95% energy saving over conventional lighting systems. LEDs are semiconductor devices manufactured under vacuum using gases that need careful handling – Edwards vacuum and abatement systems enable the process and protect the environment.

STEEL DEGASSINGVacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used in the production of speciality steel alloys to reduce the levels of hydrogen, carbon and other impurities during the secondary steel making process.

Edwards dry mechanical vacuum pumps offer considerable energy savings compared to the traditional multi-stage steam ejector systems, backed with liquid ring pumps.

SOLAR CELLSA photovoltaic solar cell (PV cell) is also a semiconductor device which, in the presence of light, generates electricity. Solar cells provide clean renewable energy, producing zero air pollution, hazardous waste or noise. As economies of scale take effect, the size of the process chambers has increased – again Edwards vacuum and abatement equipment is at the forefront of enabling the development of this environmentally beneficial technology ensuring it is achieved with minimum environmental impact from production.

BIOFUEL PRODUCTIONThe term biofuel applies to any solid, liquid or gaseous fuel produced from organic (once-living) matter. The word biofuel covers a wide range of products, some of which are commercially available today and some of which are still in research and development. Processing this material under vacuum, using Edwards chemical dry pumps, avoids contamination of oil and water that is an integral part of other vacuum technologies.

GLASS COATINGVacuum coated glass is primarily used to control the solar generated thermal energy load on buildings. Multiple layers comprising exotic metal oxides create infrared reflecting properties. Reducing the heat load on buildings reduces the need for electrical power to run air conditioning in hot countries. Conversely in cold countries these same reflective properties are used to retain heat and reduce fuel used for heating. By upgrading the vacuum pumping technology (from diffusion pumps to STP turbomolecular pumps) we have reduced the energy consumption of this process by up to 95%, with a CO2 reduction of 22.6 tonnes per year.

Enabling Environmental Technology

info@edwardsvacuum.com

Edwards — the company you have known and trusted for nearly 100 years – continues to deliver innovative vacuum pumps and related systems. We strive to lower your cost of ownership, increase your productivity and enhance your final product quality. Edwards products are based on a solid foundation of manufacturing excellence, field-proven technologies and are supported by a renowned global services network.

Edwards stands behind each product with exceptional integrity and strength, supporting our customers beyond standard expectations. Edwards is essential to your process.

PRODUCTS:• Dry Vacuum Pumps

• Oil-sealed Vacuum Pumps

• Turbomolecular Pumps

• Exhaust Management

• Integrated Vacuum and Abatement

• Liquid Abatement

• Chillers

• Vacuum System Components

SERVICES:• Equipment Service and Repair

• Product Exchange

• Refurbished Equipment

• Field and On-site Services

• Remote e-Diagnostics

• Product Training

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GLOBAL CONTACTS:

BELGIUMBrussels +32 2 300 0730

BRAZILSao Paulo +55 11 3952 5000

CHINAShanghai +86 21 5866 9618

FRANCEParis +33 1 4121 1256

GERMANYMunich 0800 000 1456

INDIAPune +91 20 4075 2222

ISRAELQiryat Gat +972 8 681 0633

ITALYMilan +39 02 48 4471

JAPANYachiyo +81 47 458 8831

KOREABundang +82 31 716 7070

SINGAPORESingapore +65 6546 8408

TAIWAN R.O.C.Jhunan Town +886 3758 1000

UNITED KINGDOMCrawley +44 1293 528844UK Local Rate (UK Only) 08459 212223

UNITED STATESToll Free (US Only) +1 800 848 9800

— Publication Number: J35000895, Issue A. Rev 01/2010