NA I&C Committee 1 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
North America Information & Control Committee Meeting Summary and Minutes
North America Standards Spring 2012 Meetings
4 April 2012, 0800 – 1630 Pacific Time
SEMI Headquarters in San Jose, California
Committee Announcements
Next Committee Meeting
SEMICON West 2012
Wednesday 11 July 2012, 0800 – 1630 Pacific Time
San Francisco Marriott Marquis Hotel in San Francisco, California
Table 1 Meeting Attendees
Italics indicate virtual participants
Co-Chairs: David Bricker (Applied Materials), Jack Ghiselli (Ghiselli Consulting), Lance Rist (RistTex)
SEMI Staff: Paul Trio
Company Last First Company Last First
Applied Materials Bricker David ISMI Crispieri Gino
Applied Materials Kaplan Frank IT Innovation Kim Wontae
Cimetrix Rubow Brian PEER Group McKenzie Alison
Edwards Czerniak Michael RistTex Rist Lance
Ghiselli Consulting Ghiselli Jack Tokyo Electron Sakamoto Mitch
Hitachi Kokusai Matsuda Mitsuhiro
Intel Maloney Chris SEMI Trio Paul
Table 2 Leadership Changes
Group Previous Leader New Leader
Energy Saving Equipment
Communication TF Tom Huang (SEMATECH) Dan Chlus (SEMATECH)
Gino Crispieri (SEMATECH) Mike Czerniak (Edwards)
Table 3 Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # Document Title Committee Action
5002B New Standard: Specification for EDA Common Metadata Passed with editorial
changes.
5177A Line Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols
in XML
Line Item 1 Improve readability of combined unit symbols Failed and reballoted
Line Item 2 Correct definition in document and XML file for bit and byte units Failed and reballoted
NA I&C Committee 2 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
Table 4 Authorized Activities
# Type SC/TF/WG Details
--- Revised
TFOF
Energy Saving
Equipment
Communication
TF
Revisions to leadership and membership information as well as clarifications to charter
and scope sections.
5411 SNARF Energy Saving
Equipment
Communication
TF
New Standard: Specification for Equipment Energy Saving Mode Capability
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Table 5 Authorized Ballots
# When SC/TF/WG Details
5177B Cycle 4,
2012
DDA TF Revision to SEMI E145, Classification for Measurement Unit Symbols in XML
5274 Cycle 4,
2012
Sensor Bus TF New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON)
5411 Cycle 6,
2012
(or C5-12)
Energy Saving
Equipment
Communication
TF
New Standard: Specification for Equipment Energy Saving Mode Capability
4507Info Cycle 6,
2012
PCS TF [ Informational Ballot ] Revision to SEMI E133.1, Provisional Specification for XML
Messaging for Process Control Systems (PCS). For fault detection enhancements
Table 6 New Action Items
Item # Assigned to Details
2012Apr #01 Paul Trio Post available SEMI Standards committee / task force Google Sites on the SEMI website.
Table 7 Previous Meeting Actions Items
Item # Assigned to Details
None
1 Welcome, Reminders, and Introductions
Jack Ghiselli, committee co-chair, called the meeting to order at 8:08 AM. After welcoming all attendees, a round
of introductions followed. The SEMI meeting reminders on membership requirements, antitrust, patentable
technology, and meeting guidelines were then presented and explained.
Attachment: 01, SEMI Standards Required Meeting Elements
2 Review of Previous Meeting Minutes
The committee reviewed the minutes of the previous meeting held October 26 in conjunction with the NA Standards
Fall 2011 meetings.
Motion: Accept the minutes of the previous meeting as submitted.
By / 2nd: David Bricker (Applied Materials) / Wontae Kim (IT Innovation)
Discussion: None
Vote: 8-0 in favor. Motion passed.
NA I&C Committee 3 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
Attachment: 02, NA I&CC Fall 2011 meeting (October 26) minutes
3 Liaison Reports
3.1 SEMI Staff Report
Paul Trio (SEMI) gave the SEMI Staff Report. The key items were as follows:
• NA Standards Staff Changes
o New NA Standards Staff: Michael Tran ([email protected])
NA Staff Assigned TCs / Responsibilities
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: NARSC / I&C / ATE / EHS / HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Kevin Nguyen
Manager, NA Standards Committees
Committees: Facilities / Gases / PV / PV Automation /
PV Materials / Silicon Wafer / Traceability
Standards Website
Michael Tran
Senior Standards Engineer
Committees: Compound Semiconductor Materials / FPD /
Liquid Chemicals / MEMS / Metrics /
Microlithography / PIC
Standards Membership
• 2012 Global Calendar of Events
o SEMICON/FPD/SOLARCON China (March 20-22, Shanghai)
o SEMICON Singapore (April 24-26, Marina Bay Sands)
o SEMICON Russia (May 15-16, Moscow)
o Intersolar Europe (June 13-15, Munich, Germany)
o SEMICON West / Intersolar North America (July 10-12, San Francisco)
o SOLARCON India (September 3-5, Bangalore)
o SEMICON Taiwan (September 5-7, Taipei)
o SEMICON Europa (October 9-11, Dresden, Germany)
o SEMICON Japan / PV Japan (December 5-7, Chiba)
• NA Standards Spring 2012 Meetings
o Committees meeting at SEMI Headquarters (San Jose)
� EHS | Facilities & Gases | Information & Control | Liquid Chemicals | MEMS/NEMS |
Metrics | NARSC | PIC | PV Materials | Traceability | HB-LED | 3DS-IC
o SEMI thanks Intel (Santa Clara) for hosting the Silicon Wafer meeting
• SEMI is switching web meeting services from MS Live Meeting to Citrix GoToMeeting
o Teleconferencing services from Arkadin will remain the same
o Live Meeting accounts will be deactivated after SEMICON West (July 2012)
o Training sessions scheduled during NA Spring 2012 meetings. Additional training session will be
scheduled after the NA Standards Spring 2012 meetings and during SEMICON West
• Upcoming NA Meetings
o NA Compound Semiconductor Materials (April 23-26, in conjunction with CS MANTECH in
Boston, MA)
o SEMICON West 2012 (July 9-12, San Francisco Marriott Marquis Hotel in San Francisco, CA)
NA I&C Committee 4 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
o NA Standards Fall 2011 Meetings (October 29 – November 1, SEMI Headquarters in San Jose,
CA)
• Technical Ballot Critical Dates for SEMICON West 2012 Meetings
o Cycle 3: due April 13 / April 27 – May 29
o Cycle 4: due May 16 / May 30 – June 29
• NA Standards Meetings at SEMICON West 2012
o July 9-12, San Francisco Marriott Marquis Hotel
• Proposed Standards STEPs and Workshops at SEMICON West 2012
o STEP (Standards Technical Education Program): PV2 – Tuesday, July 10
o STEP: 450 – Wednesday, July 11
o SEMI/ISMI Present: Equipment Data Acquisition (EDA) Workshop – Wednesday, July 11
• Webinar – STEP: Equipment Productivity and the E10 Standard planned after SEMICON West 2012 (~ end of
July)
• Standards Publications Report
o February 2012 Cycle
� New Standards – 11, Revised Standards – 9, Reapproved Standards – 0, Withdrawn
Standards – 0
o March 2012 Cycle
� New Standards – 2, Revised Standards – 41, Reapproved Standards – 32, Withdrawn
Standards – 5, Total in portfolio – 843 (includes 76 Inactive Standards)
• New Ballot Formatting Templates
o Word 2010 versions published February 2012
o Templates by Document subtypes are available, includes the mandatory sections for each type
Attachment: 03, SEMI Standards Staff Report
3.2 Japan Information & Control Committee
Mitsuhiro Matsuda presented the Japan I&C liaison report. The key items were as follows:
• Leadership Changes
o Takahiko Ishikawa (TEL) stepped down as Japan I&C Committee Vice Chair
• Document Review Summary
o #5194 – Revision to E5 (SECS-II) for error correction. All four (4) line items passed as balloted
o #5227 – Reapproval of E82 (IBSEM) passed superclean
o #5228 – Reapproval of E88 (Stocker SEM) passed superclean
• Approved SNARFs
o #5367 – Line Item Revisions to SEMI E87 (Carrier Management)
o #5368 – Reapproval of E118 (Wafer ID Communication Interface) & E118.1 (SECS-II Protocol)
o #5369 – Revision to E54.17 (Sensor/Actuator Network for A-LINK)
• Ballot Plans
o #5368 and #5369 submitted for Cycle 2 and will be adjudicated at Japan Spring 2012 meetings.
• Equipment Information System Security (EISS) Task Force
o New task force
o Charter: This task force will develop and propose standards that define concept and required
capabilities to maintain security of information system on semiconductor manufacturing
equipment
NA I&C Committee 5 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
o Scope: Develop standards for controllers of semiconductor manufacturing equipment such as
process equipment, metrology equipment, material transfer equipment and so on.
The standard will define;
� Common perception of security problems induced by malware or illegal access
� Concept for protection against those security problems
� Guide for required capabilities for the protection
o SNARF to be proposed at next Japan I&C meeting (April 19)
� Guide for Equipment Information System Security
• Sensor Bus Task Force
o New task force
o Charter: We need to maintain existing Sensor Actuator standards originally proposed by Japan
region, and also need to discuss related issues about Sensor Actuator Bus standard to get along
with NA Sensor Bus TF
o Scope: Maintenance of existing E54 sub-documents. Talking newly required or possibility to
revise Sensor Actuator Bus issues
o #5369 submitted for Cycle 2 and will be adjudicated at Japan Spring 2012 meetings
• GEM300 TF
o Working on #5367, line item revisions to E87 – load port transfer error indication. To be issued as
an informational ballot
o To discuss the issues from AMHS TF (problems when AMHS deliver a carrier and internal buffer
equipment execute CarrierOut)
o SNARF for E40.1 revision (mapping of RecID) to be proposed at next Japan I&C meeting (4/19)
• I&C Committee
o #5368 (E118/E118.1 reapprovals) submitted for Cycle 2 and will be adjudicated at Japan Spring
2012 meetings.
• Next meeting: Japan 2012 Spring Meeting (April 19 at SEMI Japan Office, Tokyo)
Attachment: 04, Japan I&C Liaison Report
3.3 Europe Equipment Automation Committee
No report
3.4 Korea Information & Control Committee
Wontae Kim presented the Korea I&C liaison report. The key items were as follows:
• Leadership Changes
o S.G Jeong (KC-Tech) stepped down as committee co-chair. Hyungsu Kim (Samsung SDS)
appointed as successor
o Sang-Mok Yoo (AMK) stepped down as GEM300 TF leader. Chang Yul Cho (SEMES) appointed
as successor
o Hyungsu Kim appointed as DDA TF leader
• Ballot Review
o 4824 (E5 revision, add 2 new message pairs + bug fixes) passed committee review
• Next meeting: April 13, 2012 at SEMI Korea (Seoul)
• Authorized Ballots
o 4946 (E87 revision, carrier approaching complete) for Cycle 3, 2012
NA I&C Committee 6 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
o 5386 (E94 revision, material redirection mode) for Cycle 3 or 4, 2012
• GEM300 Task Force
o 5320 (E116 revision) will be reworked
• EDA Working Group disbanded
• DDA Task Force
o New task force
o Charter:
� To manage and research the equipment data acquisition (EDA) interface standard suite
and related standards (e.g., E139, E157).
� To develop new SEMI standards regarding to data infrastructure if needed.
� To collaborate with task forces in other regions with EDA and Data Infrastructure.
o Scope:
� The primary focus of the DDA Task Force is to collaborate with task forces in other
regions with EDA and Data Infrastructure.
� The DDA Task Force is also responsible for researching the advanced data infrastructure.
� Teleconferences will be held as necessary and face-to-face meetings will be held.
Attachment: 05, Korea I&C Liaison Report
3.5 Taiwan Information & Control Committee
No report
4 Ballot Review
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
NOTE 1:Committee adjudication on Cycles 1 and 2 ballots are detailed in the Audits & Reviews (A&R) Subcommittee Forms
for procedural review. These A&R forms are available as attachments to these minutes. The attachment number for each
document is provided below the summary tables.
4.1 Cycle 1 Ballots
Document # Document Title Committee Action
None
4.2 Cycle 2 Ballots
Document # Document Title Committee Action
5002B New Standard: Specification for EDA Common Metadata Passed with editorial
changes.
5177A Line Item Revisions to SEMI E145-1111, Classification for Measurement Unit Symbols
in XML
Line Item 1 Improve readability of combined unit symbols Failed and reballoted
Line Item 2 Correct definition in document and XML file for bit and byte units Failed and reballoted
Attachment: 06, Ballot Review for Doc. 5002B
07, Ballot Review for Doc. 5177A
NA I&C Committee 7 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
5 Task Force Reports
5.1 Diagnostic Data Acquisition (DDA) Task Force
Brian Rubow (Cimetrix) reported for the DDA Task Force. The key items were as follows:
• Attendance: 11 in person (1 remote)
• Two SNARFs expected at SEMICON West for minor updates to the would-be-published approved 5002B
ballot and to other EDA standards
• Ballot Plans:
o 5177B (E145 revision, XML Unit Symbols) for Cycle 4, 2012
• New issues
o A few issues related to EDA standards were reported and added to the EDA issue spreadsheet.
• DDA TF Google Site
o https://sites.google.com/a/semi.org/ddatf/
o Available materials: minutes, ballot drafts, issues tracking spreadsheets, and other working
materials
Attachment: 08, Diagnostic Data Acquisition Task Force Report
5.2 Energy Saving Equipment Communication Task Force
Gino Crispieri (ISMI) reported for the Energy Saving Equipment Communication Task Force. The key items were
as follows:
• Leadership Changes
o Tom Huang (ISMI) and Gino Crispieri (ISMI) stepped down as TF co-leaders
o Dan Chlus (SEMATECH) and Michael Czerniak (Edwards) appointed as new TF co-leaders
• Task Force Charter
NA I&C Committee 8 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
• Phase I (new standard)
• Phase II (possible E54 Standard revision)
• New SNARF – see section 8.3 of these minutes
Attachment: 09, Energy Saving Equipment Communication Task Force Report
5.3 GEM300 Task Force
David Bricker (Applied Materials) reported for the GEM300 Task Force. The key items were as follows:
• Attendance: 10 (1 on the phone)
• No new ballots, no new SNARFs
• Reviewed documents from other regions
o Japan GEM300 SNARF for E40.1 revision
o Korea GEM300 Draft Document 4946
o Japan GEM300 Draft Document 5367
NA I&C Committee 9 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
Additional Discussion:
• Gino Crispieri (ISMI) asked whether there would be any issues since ballots 4946 and 5367 plan to revise the
same Standard (i.e., E87). Wontae Kim (IT Innovation) clarified that the ballots will be revising different parts
of the standard.
Attachment: 10, GEM300 Task Force Report
5.4 Process Control System (PCS) Task Force
Chris Maloney (Intel) reported for the PCS Task Force. The key items were as follows:
• Attendance: 2
• Ballot Plans:
o 4507A (E133.1 line item revision, alignment of XML with XML style guide) informational ballot
for Cycle 6, 2012 voting period
Attachment: 11, Process Control System Task Force Report
5.5 Sensor Bus Task Force
Chris Maloney (Intel) reported for the Sensor Bus Task Force. The key items were as follows:
• Meeting Attendance: 3
• Ballot Plans:
o 5274 (Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON) to SEMI E54,
Sensor/Actuator Network Standard) for Cycle 4, 2012
Attachment: 12, Sensor Bus Task Force Report
5.6 Sort Map Task Force
No updates.
6 Leadership Changes
Group Previous Leader New Leader
Energy Saving Equipment
Communication TF
Tom Huang (SEMATECH) Dan Chlus (SEMATECH)
Gino Crispieri (SEMATECH) Mike Czerniak (Edwards)
Motion: Approve NA I&C leadership changes [as shown in the table above]
By / 2nd: Jack Ghiselli (Ghiselli Consulting) / David Bricker (Applied Materials)
Discussion: None
Vote: Unanimous in favor. Motion passed.
NA I&C Committee 10 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
7 Old Business
7.1 Completed action items from previous meeting:
Item # Assigned to Details Status
2011Oct #01 NA I&C Co-chairs Contact James Moyne to inquire about the
usability of E151 and E160 as stand-alone
documents (with the Data Quality TF
disbanded).
Done.
See additional discussion below
(¶ 7.1.1)
2011Jul #02 Paul Trio,
Mitsuhiro Matsuda
Request clarification from the ISC Regulations
Subcommittee on the use of SI units, particularly
whether both SI and non-SI units are allowed in
SEMI Standards as well as preferred
representation.
Closed.
Discussed at Regs SC. Regs SC
currently has no final comment.
Matsuda’s recommendation is to
separate the use of SI and non-SI
units that are currently contained in
one table.
I&CC committee believes that the
standards are OK, but could be
better if the tables were separated.
7.1.1 Committee Discussion on Action Item 2011Oct #01
Paul Trio presented to the committee James Moyne’s response (co-leader of the now disbanded Data Quality TF)
with regard to SEMI E151 and E160:
a) How much work specified in the road map was not completed?
ALL of the work was completed.
• Guide for understanding data quality is E151
• Data quality metrics is E160
• Data quality communication template is in E160
• Application note as guide for defining data quality: here we decided to include instruction in the standard and
felt what was standardized was explained to the point that an application note was not necessary.
• Data quality reporting compliance methods are in E160; they basically refer to filling out the template which is
structured to capture compliance
So in summary, all components of the figure were addressed.
b) Whether E151 & E160 are useful as “stand-alone” documents
YES, they are useful. For example when a supplier wishes to communicate data quality capabilities of a tool or
component, E160 provides metrics, calculation methods and a template for communicating this information. The
consumer of this information can use these same methods to verify compliance. Note that it has always been the
charter of the task force to provide metrics for specifying and verifying compliance of data quality items, not to
specify data quality requirements for tools or components.
c) Whether they should be withdrawn
NO, they should not be.
In summary the data quality task force addressed all of the tasks identified with their TFOF (summarized in the
diagram below). The only thing that might occur in the future is that additional definitions and metrics may be
added. We have structured the standard so that this can easily be done. We sent out a request to the membership
asking if there were any more data quality metrics to develop and the response indicated no new metrics were
required at this time.
NA I&C Committee 11 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
I don’t know what “additional document” Sakamoto-san believes is needed. Perhaps he can provide additional
information.
Additional Discussion:
• Mitch Sakamoto (TEL) thanked the committee for following up on this action item. He explained that, in his
opinion, the existing Data Quality standards are “not good quality from an engineering point of view.” He
believed that they are “rough” and not well-considered. He added that if the industry needs to use these
standards then these should be reexamined with an engineering point of view.
• David Bricker (Applied Materials) suggested for Sakamoto-san to provide additional information as to which
sections of the Data Quality standards that need refining.
8 New Business
8.1 Japan Equipment Information System Security (EISS) Task Force
Mitch Sakamoto (TEL) presented on the Japan EISS TF. The key items were as follows:
• Background
o In the public domain, incidents of violating information security are reported daily as virus or
illegal access to cause failure or leakage of valuable information.
o In semiconductor manufacturing, equipment is also exposed to the threat.
o In fact, virus infection and data leakage have already been experienced in the factory.
o Local negotiation-based-deals of the information security between equipment users and suppliers
are inefficient in cost, quality, and delivery time.
o Furthermore, it is not well confirmed whether those deals are robust and sustainable in the
technologies.
o Guides for agreed concept and technologies of the information security are required for
semiconductor manufacturing equipment.
• Purpose
o Purpose of this standard is to provide guide for the concept and required capabilities to maintain
security of information system on semiconductor manufacturing equipment.
� The guide includes a series of options or suggestions intended to increase the awareness
of the user to applicable measures in the information security.
� Subsequent evaluations and standardization can be derived from the information in this
guide.
• Target in Scope: Semiconductor manufacturing equipment
o This standard applies to information system that operates semiconductor manufacturing equipment
such as process equipment, metrology equipment and material transfer equipment. The
information system is implemented computer system that is connected to network and can be
accessed by operator through the user interface.
• Definitions in Scope: Security policy of Equipment
o This standard defines following views for the security policy for the semiconductor manufacturing
equipment.
� Common perception of security risks induced by malware or illegal access.
� Concept for protection of those security problems.
� Options or suggestions of measure for the protection.
NA I&C Committee 12 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
Threats Risks
Illegal Access
Spoofing or Masquerading
Tampering
Illegal Execution / Use
Malware Execution
DOS
System Malfunction
Performance Degradation
Failure
Breached information
Destroyed information
Disclosed secret information
• Malware Protection and Equipment Performance
• Intellectual Property Protection
o Protection of Process IP
� IP separation among IC makers in Foundry
� IP separation among IC makers sharing process development facility
� IP separation among process generations
o Sharing data with suppliers for troubleshooting; maintaining IP security
o Suppliers IP Security
• Classification / Separation of equipment data for Access Control is needed.
Additional Discussion:
• David Bricker (AMAT) asked whether there are IC makers contributing to this activity. Mitch Sakamoto
responded, “No.” However, he pointed out that the motivation for this activity stemmed from user requests.
Attachment: 13, Japan Equipment Information System Security Task Force
NA I&C Committee 13 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
8.2 Request for a GEM300 Task Force Google Site
Brian Rubow (Cimetrix) asked whether a Google Site can be created for the GEM300 Task Force. With GEM300
activities also taking place in Japan and Korea, it would be helpful to have a common place to share information.
Paul Trio created the Google Site during the meeting (https://sites.google.com/a/semi.org/gem300-task-force/), but
requested for the various TF leaders to assist SEMI staff in uploading and maintaining content as there are already
several Google Sites for various SEMI Standards groups that also needed to be managed.
8.3 New TFOFs & SNARFs
Mike Czerniak (Edwards) presented a new SNARF from the Energy Saving Equipment Communication Task Force:
• New Standard: Specification for Equipment Energy Saving Mode Capability
• Rationale:
o The industry is lacking a standard for factory system communication and control for production
equipment sleep modes. The goal is to gain agreement and enable suppliers to offer end users a
configurable option for communicating and controlling production equipment sleep modes.
o Charter/Objective
� Develop a new standard to specify communications between the factory system and
production equipment to configure the equipment to enable sleep modes as defined in
S23, for the purposes of energy conservation.
• Scope:
o Develop communication protocol and message content between the factory system and production
equipment for the purpose of enabling, confirming, and monitoring sleep modes for reducing
energy consumption on production equipment and support systems. This includes defining states,
transitions, commands, parameters, and protocol for implementation.
o Not in Scope:
� Supplier IP or art
� Equipment, chamber, set-up and process specific implementation of energy saving mode
(e.g., Process and performance monitoring and criteria)
� Supplier Specific Safety: worker and product
Motion: Approve SNARF: New Standard: Specification for Equipment Energy Saving Mode Capability
By / 2nd: David Bricker (Applied Materials) / Gino Crispieri (ISMI)
Discussion: None
Vote: 9-0 in favor. Motion passed.
8.4 I&C Standards due for 5-Year Review
Paul Trio presented a list of I&C Standards due for 5-Year Review. The following NA I&C task forces will review
the following software Standards due for 5-year review and will recommend the appropriate letter ballot action (e.g.,
reapprove, revise, withdraw, etc.) at the next committee meeting at SEMICON West 2012:
• NA GEM300 Task Force
o SEMI E37.1, High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)
• NA DDA Task Force
o SEMI E139.2, SECS-II Protocol for Recipe and Parameter Management (RaP)
o SEMI E147, Guide for Equipment Data Acquisition (EDA)
• Sensor Bus Task Force
o SEMI E54.1, Standard for Sensor/Actuator Network Common Device Model
NA I&C Committee 14 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
o SEMI E54.9, Specification for Sensor/Actuator Network Communication for Modbus/TCP Over
TCP/IP
o SEMI E54.15, Sensor/Actuator Network Communication Specification for SafetyBUS p
o SEMI E54.20, Standard for Sensor/Actuator Network Communications for EtherCAT
• PCS Task Force
o SEMI E126, Specification for Equipment Quality Information Parameters (EQIP)
• The following documents will be discussed in the NA I&C Committee
o SEMI E30.5, Specification for Metrology Specific Equipment Model (MSEM)
o SEMI E127, Specification for Integrated Measurement Module Communications: Concepts,
Behavior, and Services (IMMC)
o SEMI E127.1, Specification for SECS-II Protocol for Integrated Measurement Module
Communications (IMMC)
8.5 New Ballot Submission Summary
Paul Trio reviewed the TFOFs, SNARFs, and letter ballot submission information presented to the committee for
approval. These can be found in the Authorized Ballots and Authorized Activities tables (Table 4 and Table 5,
respectively) at the beginning of these minutes.
Motion: Approve all SNARFs, TFOFs, and letter ballots (as presented in tables 4 and 5 above)
By / 2nd: David Bricker (Applied Materials) / Gino Crispieri (ISMI)
Discussion: None
Vote: Unanimous in favor. Motion passed.
9 Action Item Review
9.1 Open Action Items
Paul Trio (SEMI) reviewed the open action items. These can be found in the Open Action Items table at the
beginning of these minutes.
9.2 New Action Items
Paul Trio (SEMI) reviewed the new action items. These can be found in the New Action Items table at the
beginning of these minutes.
10 Next Meeting and Adjournment
The next meeting of the North America Information & Control committee is scheduled for Wednesday, July 11 in
conjunction with SEMICON West 2012. The tentative schedule is provided below:
North America Standards Meetings at SEMICON West 2012
July 9-12, 2012
San Francisco Marriott Marquis Hotel
55 Fourth Street
San Francisco, California 94103
NA I&C Committee 15 April 4, 2012 Meeting Minutes SEMI Headquarters in San Jose, California
Monday, July 9
• I&C Leadership (11:00 AM – 12:00 Noon)
• PCS (1:00 PM – 3:00 PM)
• GEM300 (1:00 PM – 5:00 PM)
• I&C GCS (5:00 PM to 6:00 PM)
Tuesday, July 10
• DDA (8:00 AM – 12:00 Noon)
• Sensor Bus (1:00 PM – 3:00 PM)
• Discussion on Japan EISS TF Activity (1:00 PM – 3:00 PM)
• Energy Saving Equipment Communication (3:00 PM – 6:00 PM)
• Sort Map (3:00 PM to 5:00 PM)
Wednesday, July 11
• I&C Committee (8:00 AM – 4:30 PM)
Having no further business, a motion was made to adjourn the NA I&C Committee meeting on April 4 in
conjunction with the NA Standards Spring 2012 meetings in San Jose, CA. Adjournment was at 11:15 AM.
Respectfully submitted by:
Paul Trio
Senior Manager, Standards Operations
SEMI North America
Phone: +1.408.943.7041
Email: [email protected]
Minutes approved by:
David Bricker (Applied Materials), Co-chair May 17, 2012
Jack Ghiselli (Ghiselli Consulting), Co-chair May 18, 2012
Lance Rist (RistTex), Co-chair
Table 8 Index of Available Attachments #1
# Title # Title
1 SEMI Standards Required Meeting Elements 8 Diagnostic Data Acquisition Task Force Report
2 NA I&CC Spring 2011 (March 30) minutes 9 Energy Saving Equipment Task Force Report
3 SEMI Standards Staff Report 10 GEM300 Task Force Report
4 Japan I&C Liaison Report 11 Process Control Systems Task Force Report
5 Korea I&C Liaison Report 12 Sensor Bus Task Force Report
6 Ballot Review for Doc. 5002B 13 Japan Equipment Information System Security
(EISS) Task Force
7 Ballot Review for Doc. 5177A
#1 Due to file size and delivery issues, attachments must be downloaded separately. A .zip file containing all attachments for these minutes is
available at www.semi.org. For additional information or to obtain individual attachments, please contact Paul Trio at the contact information above.