line item revisions to semi s8-0308 e, safety...
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Background Statement for SEMI Draft Document #5009A Line Item Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT Delayed Revisions on Multiple Topics
Note 1: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note 2: Recipients of this document are invited to submit, with their comments, notification of any relevant patented
technology or copyrighted items of which they are aware and to provide supporting documentation. In this context,
“patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter
case, only publicly available information on the contents of the patent application is to be provided.
Background Statement
This ballot consists of THREE (3) line items. Each line item is shown as a separate section with subcategories.
Line item 1 – Modify Appendix 1, SESC checklist to expand whole body clearance criteria to include equipment
operation tasks and provide criteria for additional postures. Whole body clearance recommendations are
separated into two categories: walking/crawling and working postures. Existing recommendations specific to
maintenance and service tasks are moved to a new section.
There are four (4) parts to line item 1, each of which is designated by an uppercase letter:
• Part A: Notice of Delayed Revision to be inserted into the beginning of the SEMI S08 document,
• Part B: Notice of Delayed Revision to be inserted into Section 8, Related Documents,
• Part C: Notice of Delayed Revision to be inserted into Appendix 1, SESC Checklist,
• Part D: Delayed Revision materials to be added to Appendix 1, SESC Checklist and Section 8, Related
Documents.
Line item 2 – Modify Appendix 1, SESC checklist to add design criteria for hand and arm clearances which provide
guidance for clearances when a variety of hand tools are used and objects are handled.
There are four (4) parts to line item 2, each of which is designated by an uppercase letter:
• Part A: Notice of Delayed Revision to be inserted into the beginning of the SEMI S08 document,
• Part B: Notice of Delayed Revision to be inserted into Section 8, Related Documents,
• Part C: Notice of Delayed Revision to be inserted into Appendix 1, SESC Checklist,
• Part D: Delayed Revision materials to be added to Appendix 1, SESC Checklist and Section 8, Related
Documents.
Line item 3 – Modify Appendix 1, SESC checklist to add provisions for controls on equipment lower than 838 mm
(33 in.) and placement of controls outside of recommended reach ranges for postures other standing or sitting
adopted during maintenance and service tasks.
There are three (3) parts to line item 3, each of which is designated by an uppercase letter:
• Part A: Notice of Delayed Revision to be inserted into the beginning of the SEMI S08 document,
• Part B: Notice of Delayed Revision to be inserted into Appendix 1, SESC Checklist,
• Part C: Delayed Revision materials to be added to Appendix 1, SESC Checklist.
Some line item sections propose duplicate contents (e.g., Delayed Revision Notices). If more than one line item
passes, only one of these duplicate contents will be incorporated in to the next published version of SEMI S08.
Please forward a courtesy copy of any comments or negatives against the ballot to Paul Schwab at [email protected]
and Ron Macklin at [email protected].
As this is a technical ballot, all votes of reject must be accompanied by reasons (negatives) and also be sent to SEMI
staff before the balloting deadline or they will be considered abstention votes. If you have any comments on the
ballot (suggestions or questions that you do not believe are technical negatives) please clearly indicate them as
COMMENTS to assist us with reducing the administrative overhead in handling them during the task force and
committee meetings.
Review and Adjudication Information
Task Force Review Committee Adjudication
Group: Ergonomics Task Force NA EHS Committee
Date: Tuesday, July 10, 2012 Thursday, July 12, 2012
Time & Timezone: 3:00 PM -5:00 PM (PT) 9:00 AM – 6:00 PM (PT)
Location: San Francisco Marriott San Francisco Marriott
City, State/Country: San Francisco, CA San Francisco, CA
Leaders: Paul Schwab (Texas Instruments, Inc.)
Ron Macklin (R. Macklin & Associates)
Sean Larsen (Lam Research AG)
Eric Sklar (Safety Guru)
Chris Evanston (Salus Engineering)
Standards Staff: Paul Trio (SEMI NA)
408.943.7041
Paul Trio (SEMI NA)
408.943.7041
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact
the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to
interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but
would like to participate by telephone/web, please contact Standards staff.
Additional Background Information for the Document
The proposed changes add design recommendations to fill gaps in the original SEMI-S8 document and are intended
to improve usability of the guidelines. The proposed changes were developed during SEMI-S8 Task Force activities
which have been ongoing since the last revision in March of 2008.
Respectfully,
Paul Schwab and Ron Macklin,
SEMI-S8 Task Force Co-Leaders
Safety Checklist for SEMI Draft Document #5009A Delayed Line Items Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Developing/Revising Body
Name/Type: Ergonomics Task Force
Technical Committee: Environmental, Health, and Safety
Region: North America
Leadership
Position Last First Affiliation
Leader: Schwab Paul Texas Instruments, Inc.
Leader: Macklin Ron R. Macklin & Associates, LLC
Documents, Conflicts, and Consideration
Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each
item was considered by the technical committee
# and Title Manner of Consideration
EN 547-2:2009, Safety of machinery - Human body
measurements - Part 2: Principles for determining the
dimensions required for access openings, European
Committee for Standardization, Vienna, 2009.
Line item 1, body clearance dimensions.
Line item 2, hand/arm clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Gordon, Claire C., 1988. Anthropometric Survey of U.S.
Army Personnel: Summary Statistics, Interim Report. Natick,
Mass: U.S. Army Natick Research, Development and
Engineering Center, 1989.
Line item 1, body clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Harrison, Catherine R., and Kathleen M. Robinette.
CAESAR: Summary Statistics for the Adult Population
(Ages 18-65) of the United States of America. Wright-
Patterson AFB, Ohio: Air Force Research Laboratory,
Human Effectiveness Directorate, Crew System Interface
Division, 2002.
Line item 1, body clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Hertzberg, H., Emanuel, I., Alexander, M., The
Anthropometry of Working Positions. 1. A Preliminary
Study, WADC Technical Report 54-520. Wright-Patterson
Air Force Base, Ohio, 1956.
Line item 1, body clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Kama, W. N., Volumetric Workspace Study: I. Optimum
Workspace Configuration for Using Various Screw Drivers.
Report No. AMRL-TDR-63-68(1), Aerospace Medical
Research Laboratories, WPAFB, Ohio, 1963.
Line item 2, hand/arm clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
# and Title Manner of Consideration
Kennedy, K. W. & Filler, B. E., Aperture sizes and depths of
reach for one- and two-handed tasks. AMRL-TR-66-27.
1966.
Line item 2, hand/arm clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Morgan, C.T., Cook III, J.S., Chapanis, A., Lund, M.W.,
Human Engineering Guide to Equipment Design. McGraw-
Hill, New York, 1963.
Line item 2, hand/arm clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
NASA-STD-3000, Volume I, Man-Systems Integration
Standards, Rev. B, NASA, Johnson Space Center, Houston,
Texas, 1995.
Line item 2, hand/arm clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
NFPA 70E Standard for Electrical Safety in the Workplace
2012 Edition. Quincy, MA: National Fire Protection
Association, 2012, Paragraph 130.6.B.
Line item 2, hand/arm clearance dimensions.
Recommendations for blind reaches.
ISO 14738: Safety of Machinery - Anthropometric
Requirements for the Design of Workstations at Machinery.
International Standards, 14738, Geneva: International
Organization for Standardization, 2002.
Line item 1, Whole body access working height dimension.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Pheasant, Stephen, Bodyspace: Anthropometry, Ergonomics
and Design. London: Taylor & Francis, 1996.
Line item 2, hand/arm clearance dimensions.
Reach dimensions.
Research Institute of Human Engineering for Quality Life.
Dimensions of the Hands of the Japanese Data Collection
2010. Osaka, Japan: Research Institute of Human
Engineering for Quality Life, 2010.
Line item 2, hand/arm clearance dimensions.
Reach dimensions.
SEMI S2- S002-00-0310b Environmental Health and Safety
Guideline for Semiconductor Manufacturing Equipment.
All line items. Reviewed to avoid direct conflicts.
SEMI S8-0308E Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing Equipment.
All line items. Base document for changes.
VanCott, Harold P., and Robert G. Kinkade, Ed., Human
Engineering Guide to Equipment Design, U.S. Department
of Defense. Washington, D.C.: U.S. Government Printing
Office, 1972.
Line item 1, clearance dimensions.
Recommendations within this document were compared to
other documents listed in this section. The task force selected
criteria that meet the majority of the referenced documents,
that are the most conservative, or that are most appropriate
for the semiconductor industry.
Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices
cited in the safety guideline
# and Title Inconsistency with This Safety Guideline # and Title Inconsistency with This Safety Guideline
None known None known
Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles
to the extent practical
# and Title Nature of Conflict with This Safety Guideline
None known None known
Participants and Contributors
Name Affiliation
Lindy Austin Salus Engineering International
Steve Baldwin Lewis Bass
Joe Barsky Intertek – GS3
Ron Birrell TUVSUD America
Stephan Braun TUV Reinland
Steve Brody Brooks Automation
Paul Bueder Estec Solutions
Lauren Crane KLA-Tencor
Alan Crockett KLA-Tencor
Mark D'Agostino Varian
Nigusu Ergete Intertek
Chris Evanston Salus Engineering International
Mark Fessler TEL
Mark Frankfurth Cymer
Rowland Funk Salus Engineering International
Andrew Giles Estec Solutions
Paul Green Ultratech
Cliff Greenberg Nikon
Ed Guild
Mark Harralson Intel
James Hayford AMAT, Semitool
Stan Hughes AMAT
Shigehito Ibuka TEL
Chris Illerhaus CI Industrial Safety Consulting, LLC
Ken Kapur
Andrew Kiley Varian
Mark Krauss System Development-ESH
Alan Krov TEL
Paul Kryska Novellus
Ken Kuwatani TUV-SUD
Sean Larsen Lam Research AG, Cymer
Kyle Leboults Xactix
Ron Macklin R. Macklin & Associates
Supika Mashiro TEL
Raymond McDaid LAM
Ken Mills Estec Solutions
Abraham Nesbitt Intertek
James Oswalt Mattson
Bill Petry IBM Corporation
Bert Planting ASML
Sunny Rai Intertek
Steven Roberge Axcelis Technologies, Inc.
Debbie Sawyer Glacier Export Services
Participants and Contributors
Name Affiliation
Paul Schwab Texas Instruments, Inc.
Kharel Shristi KLA-Tencor
Eric Sklar Safety Guru, LLC
Conrad Tan Lewis Bass
Paul Trio SEMI North America
Stephen Werner Intel Corporation
Carl Wong AKT
Byron Yakimow Cymer
The content requirements of this checklist are documented in § 14.2 of the Regulations Governing SEMI Standards
Committees.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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SEMI Draft Document #5009A Line Item Revisions to SEMI S8-0308E, SAFETY GUIDELINES FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT (Effective July, 2015) Delayed Revisions on Multiple Topics
Delayed Revisions related to Appendix 1 Whole Body Clearances; Hand and Arm Clearances; Maintenance
and Service; and Control Locations.
NOTICE: Per ¶ 3.4.4.3.1 of the SEMI Standards Procedure Guide, the purpose, scope, limitations, and terminology
sections of SEMI S8 are provided below.
Line Item 1, Part A; Line Item 2, Part A; and Line Item 3, Part A
NOTICE: This document contains material that has been balloted and approved by the global Environmental,
Health and Safety Technical Committee, but is not immediately effective. This material and the date on
which it becomes effective are included in the Delayed Revisions Sections X, Y, and Z. The provisions of this
information are not an authoritative part of the Document until their effective dates. The main body of
SEMI S8-0308E remains the authoritative version. Some or all of the provisions of revisions not yet in effect
may be optionally applied prior to the effective date, providing that they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred change, and
are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a
NOTICE indicating its status.
1 Purpose
1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing
equipment.
1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the
manufacturing environment. The following general principles are integral to the ergonomics design and evaluation
of equipment:
1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among
hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and
hazards. Appropriate distribution of tasks will also optimize performance.
1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’
expectations.
1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size,
strength, and range of motion characteristics of the user population. Such design will also facilitate task performance.
2 Scope
2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing
equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some
guidelines also address general design goals for effective human-machine performance. The guidelines apply to the
design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited
extent, equipment installation (see ¶ 7.3).
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment
meets regulatory requirements.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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3.2 Human factors data compiled in references and specifications are influenced by the population from which they
were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using
few subjects or are context-specific. Ergonomics experts should be consulted where data development or
interpretation is required.
3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as left-
handedness and color blindness. Where feasible the design should also accommodate users with hearing or vision
impairments and/or physical disabilities. It should be understood that although designing for the target user
population will accommodate some users with special needs, these guidelines cannot anticipate and fully
accommodate all such users.
3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines
of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of
the equipment should include conformance to the latest version of SEMI S8 for the redesign.
NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.
3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
4.2 CEN/CENELEC Standards1
4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to
be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and
consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards
are subject to revision prior to adoption.
EN 894-2 — Safety/Ergonomics for Displays
EN 894-3 — Safety/Ergonomics for Control Actuators
EN 60204-1 — Safety of Machinery – Electrical Equipment of Machines, Part 1 – Specification for General
Requirements
4.3 Military Standard2
MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities
4.4 NFPA Standard3
NFPA 79 — Electrical Standard for Industrial Machinery
4.5 ISO Standard4
ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals
4.6 Other Standards and Documents
1 European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue de Stassart 35, B-1050 Brussels, Belgium. http://www.cenelac.org 2 United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone: 215.697.3321 3 National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, USA. http://www.nfpa.org 4 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30; http://www.iso.ch
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974
ANSI/IES RP75 — Practice for industrial lighting
Waters, Thomas, et al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health and
Human Services (NIOSH), Cincinnati, OH, 1994.
A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 MAWL — Maximum Acceptable Weight of Lift
5.1.2 MMH — Manual Material Handling
5.1.3 SESC — Supplier Ergonomics Success Criteria (see Appendix 1)
5.2 Definitions
5.2.1 administrative controls — administrative controls modify the way in which a job is performed without
involving equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-
rest scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative
controls.
5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength)
limitations of user personnel.
5.2.3 anthropometry — description of the physical measurement of humans (e.g., size and strength).
5.2.4 cognitive — relating to human information processing, perception, and attention.
5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate
that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur.
Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical
controls and displays.
5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces,
repetitive movements, etc.) to a body part over a period of time.
5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or
multiple risk factors.
5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown
condition.
5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.
5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that
contributes to the risk of developing either an acute injury or a cumulative trauma disorder.
5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and
human performance limitations in relation to the design of machines, tasks, and other features of the human’s
working environment.
5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and
the equipment operated by the worker.
5.2.13 excessive reach — a reach which may result in biomechanical or other stress to the user.
5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist
greater than 20°, or shoulder flexion or abduction greater than 45°.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static exertions,
which produce no motion but have significant duration; dynamic exertions, which are motions including lifting,
pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.
5.2.16 frequency — how often a task is performed over time.
5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a
single operator should be considered.
5.2.18 human error — errors which include: failure to perform a required function; performing a function that has
an undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect
response to a contingency.
5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.
5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool
operation by a single operator should be considered.
5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.
5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often
referred to as key grip).
5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.
5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials,
used for human factors evaluation.
5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body
in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.
5.2.26 non-neutral (awkward) postures — the position of a joint(s) away from its neutral, or least stressed, posture.
5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the intraocular line and 15° below
the horizontal position of the eye.
5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended
purpose; these may include loading product and setting or manipulating external controls.
5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to
perform its intended function.
5.2.30 override — to take precedence over the current control system state.
5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the
fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).
5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury
from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the
context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal
protective equipment.
5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb
contacts or overlaps the index finger.
5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves,
and blood vessels, or produces pressure on a joint.
5.2.35 primary viewing area — the 30° cone around the normal line of site (15° above, below, and to either side of
the line of sight).
5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are
likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to personnel,
or for damage to equipment, environment, or product.
5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture,
assembly, measurement and test of semiconductors, and associated semiconductor support processes.
5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.
5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.
5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect
position.
5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific
objective.
5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when
operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps
are described in terms of the perception, decision-making, memory storage, posture, and biomechanical
requirements, as well as the expected errors.
5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.
5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel,
and others.
5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the
equipment to perform operation, maintenance, or service tasks.
5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms
of its functional design, specific to SEMI S8.
5.2.48 WIP nest — a storage structure for Work in Process (WIP).
5.2.49 work environment — the location where semiconductor devices and associated support processes are
designed, developed, manufactured, assembled, measured, and tested.
5.2.50 workplace layout — the physical arrangement of equipment in the facility.
5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.
5.2.52 workstation — the location where equipment controls and displays are found or the location of
loading/unloading of material.
5.2.53 work surface — a (typically horizontal) surface provided for the location of input devices, handwriting,
assembly work, etc. that is part of a seated or standing workstation.
(No changes are proposed by this ballot to sections 6 through 7 of SEMI S08. Therefore, they have
been omitted from the ballot in the interest of brevity. If you need a copy of these sections in order
to vote, please contact SEMI Staff.)
8 Related Documents
Line Item 1, Part B and Line Item 2, Part B
(References to be added to § 8 are shown in Delayed Revisions Line Item 1, Part E and Line Item 2, Part E. The current § 8 is provided below for your reference.)
NOTICE: Changes to SEMI S08 section 8 will be inserted, upon July 2015 publication, as shown in Delayed
Revisions Section X, and Y. The global Environmental, Health, and Safety Technical Committee has voted that use
of the new material is optional before the Effective Date.
8.1 SEMI Standard
SEMI S13 — Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing
Equipment
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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8.2 ANSI Standard
ANSI Z535.4 — Product Safety Signs and Labels
8.3 CEN/CENELEC Standards5
EN 614-1 — Safety of Machinery – Ergonomic Design Principles, Part 1 – Terminology and General Principles
EN 894-1 — Safety/Ergonomics for Operator Interaction
EN 50099-2 — Safety/Marking Principles
8.4 NIOSH Documents6
NIOSH Publication No. 81-122 — Work Practices Guide for Manual Lifting, National Institute for Occupational
Safety and Health, 1981.
Revised NIOSH Equation, Ergonomics, Vol. 36, No. 7, 1993.
8.5 SAE Document7
SAE J833 — Human Physical Dimensions
8.6 SEMATECH Documents8
Preventing User-Hostile Interfaces in IC-Fab Equipment — Ergonomic Approaches for Preventing Ten Frequent
Interface Problems, Miller, Dwight P. and Whitehurst, Hugh,
SEMATECH Technology Transfer
#92091299NA-ENG, Nov. 1992.
SEMATECH SCC User interface Style Guide, 1.0. 92061179A-ENG, August 21, 1992.
8.7 Other Documents
8.7.1 Bailey, Robert W., Human Performance Engineering, Prentice Hall, 1989.
8.7.2 Eastman Kodak Company, Ergonomic Design for People at Work, Vols. 1 and 2, Van Nostrand-Reinhold,
1983.
8.7.3 EN ISO 7250 — Basic human body measurements for technological design
8.7.4 EN ISO 14738 — Safety of Machinery, Anthropometric requirements for the design of workstations at
machinery
8.7.5 Grandjean, E., Fitting the Task to the Man: A Textbook of Occupational Ergonomics (4th Ed.), Taylor &
Francis, 1988.
8.7.6 Grether W.F. and Baker C.A., 1972, Visual Presentation of Information in Van Cott and Kincade Human
Engineering to Equipment Design, Washington DC, US Government Printing Office.
8.7.7 Konz, S., Work Design: Industrial Ergonomics (3rd Ed), Publishing Horizons, 1990.
8.7.8 Pheasant, Stephen, Bodyspace — Anthropometry, Ergonomics and Design, Taylor & Francis, 1988.
8.7.9 Salvendy, Gavriel (ed.), Handbook of Human Factors, Wiley, 1987.
8.7.10 Sanders, Mark S. and McCormick, Ernest, Human Factors in Engineering and Design (7th Ed), McGraw-
Hill Book Company, 1993.
8.7.11 Snook, Stover and V. Ciriello, The Design of Manual Handling Tasks — Revised Tables of Maximum
Acceptable Weights and Forces, Ergonomics, Vol. 34, No. 9, 1991.
5 European Committee for Standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat,
rue de Stassart 35, B-1050 Brussels, Belgium; http://www.cenelec.com 6 National Institute for Occupational Safety and Health, Technical Information Branch, 4676 Columbia Pkwy, Cincinnati, OH 45226, USA;
http://www.niosh.com.my
7 Society of Automotive Engineers, 400 Commonwealth Drive, Warrendale, PA 15096 USA; http://www.sae.org 8 International SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, USA. http://www.sematech.org
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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8.7.12 VanCott, Harold P. and Kinkade, Robert (eds.), Human Engineering Guide to Equipment Design, U. S.
Government Printing Office, 1972.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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APPENDIX 1 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
Line Item 1, Part C; Line Item 2, Part C; and Line Item 3, Part B
(The material to be added or changed is shown in Line Item 1, Part C; Line Item 2, Part C; and Line Item 3, Part B. The current Appendix 1 is provided below for your reference.)
NOTICE: Changes to SEMI S08 Appendix 1 will be inserted, upon July 2015 publication, as shown in Delayed
Revision Sections X, Y, and Z. The Environmental, Health, and Safety Technical Committee has voted that use of
the new material is optional before the Effective Date.
NOTICE: The material in this appendix is an official part of SEMI S8 and was approved by full letter ballot procedures on
November 21, 2006.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
1 Manual Material Handling
1.1 Potentially hazardous manual material handling
tasks performed as part of operations,
maintenance, or service are analyzed utilizing
appropriate procedures.
NOTE: Two hand lifting or lowering tasks
should be analyzed:
if the object being handled weighs more than
44.5 N (10 lbf);
OR, if the object weighs more than 22.2 N
(5 lbf) and the anticipated frequency is greater
than 1 lift every 5 minutes.
See Appendix 2 for further information.
Analysis and results documentation.
Table A2-2, Appendix 2, or the
equivalent, should be used to
document 2 hand lift/lower analysis.
2 Product Loading in a Standing Posture
(Applicable to all media other than wafer cassettes including JEDEC trays, magazines, and reticle cassettes.)
2.1 Clearance provided for finger thickness. minimum 38 mm (1.5 in.)
2.2 Clearance provided for hand thickness. minimum 76 mm (3 in.)
2.3 Reach distance measured from the leading edge
of the tool or obstruction to the hand/product
coupling point(s).
maximum 330 mm (13 in.)
2.4 Vertical coupling point of hand to product in
load position.
maximum 1010 mm (40 in.)
minimum 890 mm (35 in.)
3 Wafer Cassette Loading
3.1 Wafer cassette loading should not require
greater than 10° cassette rotation in any axis.
NOTE: Unless otherwise specified, you should
assume that 200 mm or smaller wafers are
transported in the vertical orientation and that
300 mm wafers are transported in the horizontal
orientation.
less than 10° rotation in any axis
3.2 Load port height, vertical distance from
standing surface (150–200 mm wafers).
maximum 960 mm (38 in.)
minimum 890 mm (35 in.)
3.3 Maximum lip height in front of cassette load
port over which cassette is lifted (150–200 mm
wafer cassettes only). Measure lip height from
the load surface.
maximum 30 mm (1.2 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
3.4 Reach distance from the leading edge of the tool
or obstruction to the coupling point(s) on
rotation device or the product grasp point.
maximum 330 mm (13 in.)
3.5 Minimum hand clearance on either side of the
cassette, measured from the side of the cassette
to the nearest adjacent object.
minimum 76 mm (3 in.)
4 Work in Process Storage (specific to wafer cassettes)
4.1 Integral wafer cassette/lot box storage shelf
height (150 and 200 mm wafer cassette/lot
boxes only).
maximum (1 box deep) 1520 mm
(60 in.)
maximum (2 boxes deep) 1220 mm
(48 in.)
minimum 460 mm (18 in.)
5 Manual Wafer Cassette Rotation Device Design
5.1 Handle height, couple point for hand(s) from
standing surface.
maximum 1206 mm (47.5 in.)
minimum 838 mm (33 in.)
5.2 Hand grip(s) shall allow for a full “power grip”
similar to grabbing a rung on a ladder or
holding a pistol.
Allows for a full power grip in either
pronated (palm facing down) or
neutral (handshake position) posture.
5.3 Single hand lift force maximum 37.8 N (8.5 lb.) This value
includes a 15% capacity reduction
due to cleanroom glove use.
Wrist deviation reduces further
strength capacity by 15%.
5.4 Two hand lift force maximum 64.5 N (14.5 lb.) This
value includes a 15% capacity
reduction due to cleanroom glove use.
Wrist deviation reduces further
strength capacity by 15%.
6 Handle Design (Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves)
NOTE: See Appendix 3 for depiction of handle types.
6.1 Handle surface finish all edges radiused
6.2 Cylindrical Handle
6.2.1 Cylindrical handle diameter (D) maximum 38 mm (1.5 in.)
minimum 25 mm (1 in.)
6.2.2 Cylindrical handle length (L) minimum 127 mm (5 in.)
6.3 Circular or Triangular Handle
6.3.1 Circular or triangular handle diameter (D) maximum 90 mm (3.5 in.)
minimum 50 mm (2 in.)
6.3.2 Circular or triangular handle height (thickness)
(H)
maximum 25 mm (1 in.)
minimum 19 mm (0.75 in.)
6.4 Ball Handle
6.4.1 Ball handle diameter maximum 63 mm (2.5 in.)
minimum 38 mm (1.5 in.)
6.5 Pliers Handle
6.5.1 Pliers handle grip span (S) maximum 89 mm (3.5 in.) open
minimum 38 mm (1.5 in.) closed
6.5.2 Pliers handle length (L) minimum 127 mm (5 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Conforms/Does
Not Conform/
Not Applicable
6.6 Pistol Grip Handle
6.6.1 Pistol grip handle diameter (D) maximum 63 mm (2.5 in.)
minimum 38 mm (1.5 in.)
6.6.2 Pistol grip handle length (L) minimum 127 mm (5 in.)
6.7 Enclosed Handles
NOTE: Handle diameter refers to the surface of the handle presented to the inside of the curled fingers.
Enclosed handles need not be made solely from cylindrical stock.
6.7.1 Enclosed handle, full hand power grip (suitcase
handle)
Width (W)
Depth (D)
Diameter (d)
minimum 127 mm (5 in.)
minimum 45 mm (1.75 in.)
maximum 25 mm (1 in.)
6.7.1.1 Diameter (d), requiring no greater than 71 N
(16 lbf) force
minimum 6.3 mm (0.25 in.)
6.7.1.2 Diameter (d), requiring no greater than 89 N
(20 lbf) force
minimum 13 mm (0.5 in.)
6.7.1.3 Diameter (d), requiring no greater than 180 N
(40 lbf) force
minimum 19 mm (0.75 in.)
6.7.2 Enclosed handle, three fingers
Width (W)
Depth (D)
Diameter (d)
Force
minimum 90 mm (3.5 in.)
minimum 38 mm (1.5 in.)
minimum 6.3 mm (0.25 in.)
maximum 71 N (16 lbf)
6.7.3 Enclosed handle, two fingers
Width (W)
Depth (D)
Diameter (d)
Force
minimum 60 mm (2.5 in.)
minimum 38 mm (1.5 in.)
minimum 6.3 mm (0.25 in.)
maximum 51 N (11.5 lbf)
6.7.4 Enclosed handle, one finger
Width (W)
Depth (D)
Diameter (d)
Force
minimum 38 mm (1.5 in.)
minimum 38 mm (1.5 in.)
minimum 3.2 mm (0.13 in.)
maximum 27 N (6 lbf)
6.8 Hook Grasp Handle
6.8.1 Hook grasp handle (four fingers)
Opening length (L)
Opening width (W)
Depth (d)
Lip length (l)
minimum 90 mm (3.5 in.)
minimum 38 mm (1.5 in.)
minimum 50 mm (2 in.)
minimum 50 mm (2 in.)
6.8.2 Hook grasp handle pull force (four fingers) maximum 80 N (18 lbf)
6.9 Finger Pull Handle
6.9.1 Finger pull handles (four fingers)
Opening length (L)
Opening width (W)
Depth (d)
Lip length (l)
minimum 90 mm (3.5 in.)
minimum 25 mm (1 in.)
minimum 19 mm (0.75 in.)
minimum 19 mm (0.75 in.)
6.9.2 Finger pull handles pull force (four fingers) maximum 9.8 N (2.2 lbf)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Not Conform/
Not Applicable
7 Maintainability and Serviceability
7.1 Minimum lighting level in routine maintenance
areas is required where the operator has to read
information, use a hand tool, or make a
connection. This provision can be met by
providing integral lighting or portable lighting
which can be temporarily attached such that it
does not have to be hand held.
minimum 300 lux (30 fc)
7.2 Full Body Clearance
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be provided based on
the nature of the tasks performed in the designated area.
7.2.1 Any posture: upper body clearance
(shoulder width)
minimum 610 mm (24 in.)
7.2.2 Standing:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 1980 mm (78 in.)
minimum 690 mm (27 in.)
7.2.3 Sitting-on-Floor:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1000 mm (39 in.)
minimum 690 mm (27 in.)
minimum 280 mm (11 in.)
7.2.4 Squatting:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1220 mm (48 in.)
minimum 790 mm (31 in.)
minimum 460 mm (18.1 in.)
7.2.5 Kneeling:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1220 mm (48 in.)
minimum 640 mm (25.2 in.)
7.2.6 Kneeling Crawl:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 740 mm (29 in.)
minimum 1520 mm (60 in.)
7.2.7 Stooping:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1020 mm (40 in.)
minimum 640 mm (25.2 in.)
7.2.8 Supine (lying on back):
height
length
minimum 430 mm (17 in.)
minimum 1980 mm (78 in.)
7.2.9 Prone or crawl space:
height
length
minimum 510 mm (20 in.)
minimum 2440 mm (96 in.)
7.3 Hand/Arm Clearance (where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves)
7.3.1 Clearance provided for finger access, round
(dia) or square:
one finger
2, 3, or 4 finger twist of small knob
minimum 32 mm (1.25 in.)
minimum object diameter + 58 mm
(2.3 in.)
7.3.2 Clearance provided for flat hand to wrist access:
height, palm thickness
width, palm width
minimum 89 mm (3.5 in.)
minimum 114 mm (4.5 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Not Applicable
7.3.3 Clearance provided for fist to wrist access:
height, palm thickness
width, palm width
minimum height 89 mm (3.5 in.)
minimum width 127 mm (5 in.)
7.3.4 Clearance provided for two hands arm to
shoulders access (does not ensure visual
access):
reach
width
height
maximum 610 mm (24 in.)
minimum 483 mm (19 in.)
minimum 114 mm (4.5 in.)
7.3.5 Clearance provided for two hands, hand to wrist
access (does not ensure visual access):
reach
width
height
maximum 203 mm (8 in.)
minimum 191 mm (7.5 in.)
minimum 114 mm (4.5 in.)
7.3.6 Clearance provided for one arm to shoulder
access, diameter or square area (does not ensure
visual access).
minimum 132 mm (5.2 in.)
7.3.7 Clearance provided for one arm to elbow
access, diameter or square area (does not ensure
visual access).
minimum 119 mm (4.7 in.)
7.4 Maintenance and Service Access
7.4.1 Enclosures or covers must, unless fully
removable, be self-supporting, in the open
position, and not require manual support during
maintenance. Exceptions may be allowed for
self closing doors for fire safety or compliance
reasons.
Supports present
7.4.2 Access covers should be equipped with full-
handed grasp areas or other means for opening
them.
Handles present, refer to § 6 for
design criteria.
7.4.3 Height of access cover handle over the entire
range of motion required for operation or
maintenance. There should be no greater than a
254 mm (10 in.) deep obstruction in front of the
handle.
maximum 1700 mm (67 in.)
7.5 Replaceable Components
7.5.1 Serviceable components are replaceable as
modular packages, and are configured for rapid
removal and replacement.
Serviceable components configured
as described.
7.5.2 Serviceable components should not be stacked
directly on one another (i.e., a lower layer
should not support an upper layer).
Serviceable components
independently accessible.
7.5.3 Heavy components (objects which have a lifting
index of 0.5 or greater, see SESC, § 1.0) or
bulky components (greater than 36 inches in
length) requiring frequent removal/installation
should include guide/locating aids to assist in
positioning.
Guide/locating pins present.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Conforms/Does
Not Conform/
Not Applicable
7.5.4 Cables, connectors, plugs, and receptacles
should be labeled, keyed, color coded, or
otherwise configured to make connection easier
and prevent cross connection. This feature is
assessed only if a SEMI S2 assessment is not
being conducted.
Identification present, keyed where
needed.
7.5.5 Circuit boards mounted in a card cage
configuration should have gripping or ejecting
aids for mounting and removal.
Finger access, gripping, or ejecting
aids available.
8 Display Location
8.1 Location for operator primary interface,
standing station.#1
8.1.1 Height of video display terminal (single
monitor). Does not include touchscreens,
measured from floor to center of screen.
maximum 1470 mm (58 in.)
minimum 1320 mm (52 in.)
8.1.2 Height of video display terminal (stacked
monitors). Does not include touchscreens,
measured from floor to top line of the top
monitor.
maximum 1680 mm (66 in.)
The primary monitor in a stacked
configuration is the bottom monitor.
8.1.3 Height of infrequently used video display
terminal (viewed briefly less often than once per
hour) measured to top line of monitor.
maximum 1680 mm (66 in.)
8.1.4 Height of very infrequently used video display
terminal (viewed briefly less often than once per
day) measured to top line of monitor.
maximum 1880 mm (74 in.)
8.1.5 Height of infrequently viewed visual signal
measured to the top of the signal. This guideline
does not apply to light towers.
maximum 2130 mm (84 in.)
8.1.6 Height of touch screen monitor. maximum 1470 mm (58 in.),
measured from floor to uppermost
active pad on screen
minimum 910 mm (36 in.), measured
from floor to lowest active pad on the
screen
See § 9 for horizontal reach criteria.
8.1.7 Tilt angle of touch screen monitor between 41
and 48 inches in height to top of screen.
Upward minimum 30°
8.1.8 Tilt angle of touch screen monitor less than 41
inches in height to top of screen.
Upward minimum 45°
8.2 Location for operator primary interface, seated station.#2
8.2.1 Height of video display terminal (single
monitor), does not include touchscreens,
measured from the underside#4 of the work
surface to the centerline of monitor.
maximum 517 mm (20.5 in.)
minimum 267 mm (10.5 in.)
8.2.2 Height of video display terminal (stacked
monitors), does not include touchscreens,
measured from the underside#4 of the work
surface to the top line of top monitor.
maximum 727 mm (28.5 in.)
minimum 267 mm (10.5 in.)
The primary monitor in a stacked
configuration is the bottom monitor.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Conforms/Does
Not Conform/
Not Applicable
8.2.3 Tilt angle of video display terminal greater than
727 mm (28.5 in.) in height to top of screen
measured from the underside#4 of the work
surface. This criterion applies only if the
maximum height criterion (8.2.2) is not met.
Downward minimum 15°
8.2.4 Height of touch screen monitor. maximum 397 mm (15.5 in.)
measured from the underside#4 of the
work surface to the highest active pad
on the screen
minimum 77 mm (3.5 in.) measured
from the underside#4 of the work
surface to lowest active pad on the
screen
See § 9 of this table for horizontal
reach criteria.
8.3 Display Characteristics
8.3.1 Lateral distance from the centerline of the
display to the centerline of the input device(s).
See MIL-STD-1472 for a depiction of this.
maximum 320 mm (12.6 in.)
8.3.2 Character height (Specific to Chinese, Korean,
and Japanese characters.)
Character height is greater than or
equal to the viewing distance divided
by 143. Recommended viewing
distance is between 457 mm (18 in.)
and 762 mm (30 in.)
8.3.3 Character height (All characters other than
Chinese, Korean, and Japanese.)
Character height is greater than or
equal to the viewing distance divided
by 215. Recommended viewing
distance is between 457 mm (18 in.)
and 762 mm (30 in.)
9 Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production
operation and maintenance.)
9.1 Standing Station#1
9.1.1 Vertical location of very infrequently used
controls (controls used less often than once
every 24 hours) measured from the standing
surface to the centerline of the control.
maximum 1640 mm (64.5 in.)
minimum 0 mm (0 in.)
9.1.2 Location of infrequently used and/or critical
controls. Maximum reaches are indicated for
various heights. Reaches are measured from the
leading edge of the equipment or obstacle.
Controls should not be located above 1638 mm
(64.5 in.) or below 838 mm (33 in.). Interpolate
for intermediate values.
Height of 1638 mm (64.5 in.)
Height of 1524 mm (60 in.)
Height of 1422 mm (56 in.)
Height of 1321 mm (52 in.)
Height of 1219 mm (48 in.)
Height of 1118 mm (44 in.)
Height of 1016 mm (40 in.)
Height of 914 mm (36 in.)
Height of 838 mm (33 in.)
reach 254 mm (10 in.)
reach 368 mm (14.5 in.)
reach 432 mm (17 in.)
reach 470 mm (18.5 in.)
reach 483 mm (19 in.)
reach 470 mm (18.5 in.)
reach 394 mm (15.5 in.)
reach 292 mm (11.5 in.)
reach 178 mm (7 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Conforms/Does
Not Conform/
Not Applicable
9.1.3 Location of frequently used controls. Maximum
reaches are indicated for various heights.
Reaches are measured from the leading edge of
the equipment or obstacle. Controls should not
be located above 1270 mm (50 in.) or below
940 mm (37 in.). Interpolate for intermediate
values.
Height of 1270 mm (50 in.)
Height of 1219 mm (48 in.)
Height of 1168 mm (46 in.)
Height of 1118 mm (44 in.)
Height of 1067 mm (42 in.)
Height of 1016 mm (40 in.)
Height of 940 mm (37 in.)
reach 292 mm (11.5 in.)
reach 330 mm (13 in.)
reach 368 mm (14.5 in.)
reach 394 mm (15.5 in.)
reach 406 mm (16 in.)
reach 394 mm (15.5 in.)
reach 318 mm (12.5 in.)
9.2 Seated Station#2
9.2.1 Location of infrequently used and/or critical
controls. Maximum reaches are indicated for
various heights. Reaches are measured from the
leading edge of the work surface or obstacle.
Heights are measured from the underside#4 of
the work surface. Controls should not be located
above 724 mm (28.5 in.) or below −140 mm
(−5.5 in.). Interpolate for intermediate values.
Height of 724 mm (28.5 in.)
Height of 597 mm (23.5 in.)
Height of 495 mm (19.5 in.)
Height of 394 mm (15.5 in.)
Height of 292 mm (11.5 in.)
Height of 191 mm (7.5 in.)
Height of 89 mm (3.5 in.)
Height of −13 mm (−0.5 in.)
Height of −140 mm (−5.5 in.)
reach 356 mm (14 in.)
reach 432 mm (17 in.)
reach 470 mm (18.5 in.)
reach 483 mm (19 in.)
reach 483 mm (19 in.)
reach 470 mm (18.5 in.)
reach 445 mm (17.5 in.)
reach 381 mm (15 in.)
reach 254 mm (10 in.)
9.2.2 Location of frequently used controls. Maximum
reaches are indicated for various heights.
Reaches are measured from the leading edge of
the work surface or obstacle. Heights are
measured from the underside#4 of the work
surface. Controls should not be located above
394 mm (15.5 in.) or below 89 mm (3.5 in.).
Interpolate for intermediate values.
Height of 394 mm (15.5 in.)
Height of 343 mm (13.5 in.)
Height of 292 mm (11.5 in.)
Height of 241 mm (9.5 in.)
Height of 191 mm (7.5 in.)
Height of 140 mm (5.5 in.)
Height of 89 mm (3.5 in.)
reach 330 mm (13 in.)
reach 368 mm (14.5 in.)
reach 394 mm (15.5 in.)
reach 406 mm (16 in.)
reach 419 mm (16.5 in.)
reach 419 mm (16.5 in.)
reach 419 mm (16.5 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
10 Workstation Design
10.1 Standing station #1
10.1.1 Work surface edge radius where the operator
can assume a static posture in contact with the
edge.
minimum 6.4 mm (0.25 in.) radius
10.1.2 Height of keyboard, trackball, or mouse (to
home row, top of ball/mouse).
NOTE: In applications where input devices
(keyboard, trackball, or mouse) are used more
like machine controls (intermittent one finger
entry on the keyboard, intermittent short term
use of the mouse or trackball) than for standard
typing (continuous use of keyboard for entry of
long character strings, extended use of trackball
or mouse in graphical environment), it is
appropriate to use the height and reach locations
described in § 9, Hand Control Location
(standing station).
maximum 1020 mm (40 in.)
minimum 970 mm (38 in.)
10.1.3 Height of microscope eyepieces. Should be
adjustable through at least this range.
Range includes 1270 mm (50 in.) to
1730 mm (68 in.)
10.2 Seated Station#2
10.2.1 Height of keyboard, trackball, or mouse (to
home row, top of ball/mouse).
NOTE: In applications where input devices
(keyboard, trackball, or mouse) are used more
like machine controls (intermittent one finger
entry on the keyboard, intermittent short term
use of the mouse or trackball) than for standard
typing (continuous use of keyboard for entry of
long character strings, extended use of trackball
or mouse in graphical environment), it is
appropriate to use the height and reach locations
described in § 9 of this table, Hand Control
Location (seated station).
maximum 87 mm (3.5 in.)
Heights are measured from the
underside#4 of the work surface.
10.2.2 Vertical leg clearance. minimum 673 mm (26.5 in.)
10.2.3 Horizontal leg clearance, depth at knee level. minimum 508 mm (20 in.)
10.2.4 Horizontal leg clearance, depth at foot level. minimum 660 mm (26 in.) depth
clearance at a minimum vertical range
of 419 mm (16.5 in.) to 673 mm
(26.5 in.) below the underside#4 of the
work surface.
10.2.5 Horizontal leg clearance, width. minimum 610 mm (24 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
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Conforms/Does
Not Conform/
Not Applicable
10.2.6 Equipment integrated microscope:
Height of microscope eyepiece measured from
underside#4 of work surface to center of
eyepiece. Must be adjustable with the entire
range.
Stand-alone (table top) microscopes:
Height of microscope eyepiece measured from
the top of the work surface to center of
eyepiece. Must be adjustable with the entire
range.
Range includes 495 mm (19.5 in.) to
658 mm (25.9 in.).
Stand-alone microscope:
Range includes 445 mm (17.5 in.) to
607 mm (23.9 in.).
10.2.7 Microscope eyepiece location in relation to
leading edge of workstation.
Eye pieces are flush with or protrude
beyond the leading edge of the
workstation toward the user
(applicable at all eyepiece height
adjustment settings).
10.2.8 Thickness of work surface. maximum 51 mm (2 in.)
10.2.9 Work surface edge radius where the operator
can assume a static posture in contact with the
edge.
minimum 6 mm (0.25 in.) radius
#1 A standing station is one where the operator can assume a standing posture or a seated posture in a tall stool which places the operator at approximately the same stature.
#2 A seated station is one where a short cylinder office style chair is used.
#3 Distance measured away from the equipment or obstruction for body clearance in the given posture.
#4 The intent of the change of reference from the floor to the underside of the work surface is to allow for higher work surfaces in situations
where there is a specific advantage, and to ensure in those cases that the other design features are located appropriately for the higher work
surface.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Line Item 1, Part D
DELAYED REVISIONS X (Effective July 2015) CHANGES TO APPENDIX 1 SESC CHECKLIST (ADDITIONAL WHOLE BODY CLEARANCE CRITERIA AND NEW MAINTENANCE AND SERVICE SECTION) and SECTION 8, RELATED DOCUMENTS (ADDITIONAL REFERENCES)
NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the SEMI
Environmental, Health and Safety Committee, but is not immediately effective. The provisions of this material are
not an authoritative part of the document until their effective date. The main body of SEMI S08 Appendix 1 remains
the authoritative version. Some or all of the provisions of revisions not yet in effect may optionally be applied prior
to the effective date, providing they do not conflict with portions of the authoritative version other than those that
are to be revised or replaced as part of the deferred revision, and are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall
be struck through.
DX-1 Recommendations for Whole Body Clearances Added to § 7 (OPTIONAL Before Effective Date).
DX-1.1 Delete Appendix 1 SESC ¶¶ 7 to 7.2.9 and ¶¶ 7.5 to 7.5.5 as shown below.
DX-1.2 Replace deleted ¶¶ 7 to 7.2.9 with new material ¶¶ 7 to 7.2.9 as shown below.
DX-1.3 Add a note stating that the provided pictograms are not normative.
APPENDIX 1 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
NOTICE: The material in this appendix is an official part of SEMI-S8 and was approved by full letter ballot
procedures on November 21, 2006.
Note#: Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not normative. Also, the
pictograms are not intended to depict every possible application of the guidelines.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
1 Manual Material Handling {no changes to this section for line Item 1, Part B}
2 Product Loading in a Standing Posture {no changes to this section for line Item 1, Part B}
3 Wafer Cassette Loading {no changes to this section for line Item 1, Part B}
4 Work in Process Storage {no changes to this section for line Item1, Part B}
5 Manual Wafer Cassette Rotation Device Design {no changes to this section for line Item 1, Part B}
6 Handle Design {no changes to this section for line Item 1, Part B}
7 Maintainability and Serviceability
7.1 Minimum lighting level in routine maintenance
areas is required where the operator has to read
information, use a hand tool, or make a
connection. This provision can be met by
providing integral lighting or portable lighting
which can be temporarily attached such that it
does not have to be hand held.
minimum 300 lux (30 fc)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
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Conforms/Does
Not Conform/
Not Applicable
7.2 Full Body Clearance
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be provided based on
the nature of the tasks performed in the designated area.
7.2.1 Any posture: upper body clearance
(shoulder width)
minimum 610 mm (24 in.)
7.2.2 Standing:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 1980 mm (78 in.)
minimum 690 mm (27 in.)
7.2.3 Sitting-on-Floor:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1000 mm (39 in.)
minimum 690 mm (27 in.)
minimum 280 mm (11 in.)
7.2.4 Squatting:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1220 mm (48 in.)
minimum 790 mm (31 in.)
minimum 460 mm (18.1 in.)
7.2.5 Kneeling:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1220 mm (48 in.)
minimum 640 mm (25.2 in.)
7.2.6 Kneeling Crawl:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 740 mm (29 in.)
minimum 1520 mm (60 in.)
7.2.7 Stooping:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1020 mm (40 in.)
minimum 640 mm (25.2 in.)
7.2.8 Supine (lying on back):
height
length
minimum 430 mm (17 in.)
minimum 1980 mm (78 in.)
7.2.9 Prone or crawl space:
height
length
minimum 510 mm (20 in.)
minimum 2440 mm (96 in.)
7.3 Hand/Arm Clearance (where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves)
7.3.1 Clearance provided for finger access, round
(dia) or square:
one finger
2, 3, or 4 finger twist of small knob
minimum 32 mm (1.25 in.)
minimum object diameter + 58 mm
(2.3 in.)
7.3.2 Clearance provided for flat hand to wrist access:
height, palm thickness
width, palm width
minimum 89 mm (3.5 in.)
minimum 114 mm (4.5 in.)
7.3.3 Clearance provided for fist to wrist access:
height, palm thickness
width, palm width
minimum height 89 mm (3.5 in.)
minimum width 127 mm (5 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Conforms/Does
Not Conform/
Not Applicable
7.3.4 Clearance provided for two hands arm to
shoulders access (does not ensure visual
access):
reach
width
height
maximum 610 mm (24 in.)
minimum 483 mm (19 in.)
minimum 114 mm (4.5 in.)
7.3.5 Clearance provided for two hands, hand to wrist
access (does not ensure visual access):
reach
width
height
maximum 203 mm (8 in.)
minimum 191 mm (7.5 in.)
minimum 114 mm (4.5 in.)
7.3.6 Clearance provided for one arm to shoulder
access, diameter or square area (does not ensure
visual access).
minimum 132 mm (5.2 in.)
7.3.7 Clearance provided for one arm to elbow
access, diameter or square area (does not ensure
visual access).
minimum 119 mm (4.7 in.)
7.4 Maintenance and Service Access
7.4.1 Enclosures or covers must, unless fully
removable, be self-supporting, in the open
position, and not require manual support during
maintenance. Exceptions may be allowed for
self closing doors for fire safety or compliance
reasons.
Supports present
7.4.2 Access covers should be equipped with full-
handed grasp areas or other means for opening
them.
Handles present, refer to § 6 for
design criteria.
7.4.3 Height of access cover handle over the entire
range of motion required for operation or
maintenance. There should be no greater than a
254 mm (10 in.) deep obstruction in front of the
handle.
maximum 1700 mm (67 in.)
7.5 Replaceable Components
7.5.1 Serviceable components are replaceable as
modular packages, and are configured for rapid
removal and replacement.
Serviceable components configured
as described.
7.5.2 Serviceable components should not be stacked
directly on one another (i.e., a lower layer
should not support an upper layer).
Serviceable components
independently accessible.
7.5.3 Heavy components (objects which have a lifting
index of 0.5 or greater, see SESC, § 1.0) or
bulky components (greater than 36 inches in
length) requiring frequent removal/installation
should include guide/locating aids to assist in
positioning.
Guide/locating pins present.
7.5.4 Cables, connectors, plugs, and receptacles
should be labeled, keyed, color coded, or
otherwise configured to make connection easier
and prevent cross connection. This feature is
assessed only if a SEMI S2 assessment is not
being conducted.
Identification present, keyed where
needed.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
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Conforms/Does
Not Conform/
Not Applicable
7.5.5 Circuit boards mounted in a card cage
configuration should have gripping or ejecting
aids for mounting and removal.
Finger access, gripping, or ejecting
aids available.
Section 7: Clearance Criteria Applicable to Operations, Service, and Maintenance Tasks
Equipment may extend into the envelope of recommend clearance envelopes provided that the assessor captures in the
assessment report a rationale demonstrating that the impinging object(s) will not interfere with the task or tasks for which
clearance is being evaluated. The rationale should give consideration to at least the following points:
• 95th percentile North American body dimensions,
• Line-of-sight vision required throughout the task(s),
• Anticipated body motions (e.g. turning, reaching) during the task(s).
The following clearance criteria for design and assessment do not include consideration of the tools and materials identified by
the supplier to be moved and used in the course of the task, and personal protective equipment recommended by the supplier to
be worn by workers during the task(s). Additional clearance should be provided for these considerations, as relevant.
These criteria are limited to the equipment (SME) structure as provided, and installed per supplier instructions.
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.1 Full Body Clearance for Walking and Crawling (point-to-point access only and not work activities)
NOTE: Dimensions do not include space for carried items or personal protective equipment.
Additional clearances should be provided for anticipated carrying of items or wearing protective
clothing or equipment.
7.1.1 Walking clearance A. Vertical clearance, minimum
1980 mm (78 in.)
B. Passage width, minimum
610 mm (24 in.)
C. Walking surface width
(maintenance and service
activity only), minimum
381 mm (18 in.)
D. Elbow/hip clearance height,
maximum height of sloped area
1080 mm (42.5 in.)
________
Conforms?
Yes
No
N/A
7.1.2 Moving sideways
(maintenance and service
activity only, walking
clearance criteria should
be used for equipment
operation activity)
A. Overhead clearance, minimum
1980 mm (78 in.)
B. Forward horizontal clearance,
minimum 560 mm (22 in.)
________
Conforms?
Yes
No
N/A
A
C
B
A
D
A
B
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.1.3 Kneeling crawl
(maintenance and service
activity only, walking
clearance criteria should
be used for equipment
operation activity)
A. Overhead clearance measured
from floor, minimum 740 mm
(29 in.)
B. Forward horizontal clearance,
minimum 1520 mm (60 in.)
C. Elbow clearance, minimum
635 mm (25 in.)
________
Conforms?
Yes
No
N/A
7.2 Full Body Clearance for Work Activities
NOTE: Clearances should be provided based on the nature of the tasks performed in the designated
area. Minimum working heights should be used to determine the working postures for a task.
These criteria apply to tasks that are anticipated by the supplier to involve manual and visual activity
lasting longer than 5 minutes, or having multiple occurrences with a total duration of greater than 1
hour per 8-hour shift.
When determining the working space required for a given task, first estimate where the hands, tools and
equipment will be, the line-of-sight needed, and if the body will be supported (for example, sitting on a
stool) for the envisioned task. Once this is done, estimate the posture(s) that will be associated with the
task and use ¶¶ 7.2.1–7.2.9 to determine the various minimum clearance dimensions required for that
posture.
Additional room should be provided for anticipated wearing of protective clothing or equipment.
7.2.1 Any posture: horizontal
clearance for upper body.
Minimum 610 mm (24 in.)
________
Conforms?
Yes
No
N/A
7.2.2 Standing while
performing manual work
A. Overhead clearance,
minimum 1980 mm (78 in.)
B. Forward horizontal clearance at
working height,
minimum 690 mm (27 in.)
C. Working height,
minimum 860 mm (33.8 in.)
D. Lower body clearance,
minimum 560 mm (22 in.)
________
Conforms?
Yes
No
N/A
7.2.3 Stooping
A. Overhead clearance,
minimum 1450 mm (57 in.)
B. Forward horizontal clearance,
minimum 1020 mm (40 in.)
C. Working height, minimum
640 mm (25.2 in.)
________
Conforms?
Yes
No
N/A
A
B C
B
A
D
C
B
A
C
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.2.4 Kneeling
A. Overhead clearance (from
floor),
minimum 1450 mm (57 in.)
B. Forward horizontal clearance,
minimum 1220 mm (48 in.)
C. Working height,
minimum 640 mm (25.2 in.)
________
Conforms?
Yes
No
N/A
7.2.5 Sitting
Horizontal dimension
does not include backrest.
Clearances do not
provide room for
movement of chairs or
other seating devices.
A. Overhead clearance measured
from sitting surface,
minimum 1010 mm (39.8 in.)
B. Forward horizontal clearance
for maintenance and service
tasks,
minimum 914 mm (36 in.)
Forward horizontal clearance
for SME operation tasks,
minimum 1178 mm (46 in.)
C. Working height,
minimum 480 mm (18.9 in.)
D. Seat height,
minimum 355 mm (14 in.)
Seat height,
maximum 530 mm (20.9 in.)
________
Conforms?
Yes
No
N/A
7.2.6 Squatting
A. Overhead clearance,
minimum 1220 mm (48 in.)
B. Forward horizontal clearance,
minimum 790 mm (31 in.)
C. Working height,
minimum 460 mm (18.1 in.)
________
Conforms?
Yes
No
N/A
7.2.7 Sitting-on-floor
A. Overhead clearance,
minimum 1000 mm (39 in.)
B. Forward horizontal clearance,
minimum 690 mm (27 in.)
C. Working height,
minimum 280 mm (11 in.)
________
Conforms?
Yes
No
N/A
7.2.8 Supine, lying on back
If the supplier specifies
the use of a mechanic’s
creeper for a task, they
should supply sufficient
information about the
creeper they intend to be
used so that the body
elevation imposed by the
creeper will not impinge
on the minimum height
criterion.
A. Vertical clearance height,
minimum 430 mm (17 in.)
B. Length
minimum 1980 mm (78 in.)
________
Conforms?
Yes
No
N/A
B
A
C
B
A
C D
B
A
C
B
A
C
B
A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 24 Doc. 5009A SEMI
Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943
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Date: 5/25/2012
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.2.9 Prone or crawl space,
lying on stomach
If the supplier specifies
the use of a mechanic’s
creeper for a task, they
should supply sufficient
information about the
creeper they intend to be
used so that the body
elevation imposed by the
creeper will not impinge
on the minimum height
criterion.
A. Vertical clearance height,
minimum 510 mm (20 in.)
B. Length
minimum 2440 mm (96 in.)
________
Conforms?
Yes
No
N/A
8 Display Location {no changes to this section for line item 1}
9 Hand Control Location {no changes to this section for line item 1}
10 Workstation Design {no changes to this section for line item 1}
DX-2 Recommendations Specific to Equipment Maintainability and Serviceability Moved to a New SESC § 11 (OPTIONAL Before Effective Date).
DX-2.1 Create a new SESC § 11 titled Maintenance and Service.
DX-2.2 Insert former ¶¶ 7.5 to 7.5.5 as shown below.
DX-2.3 Re-number paragraphs as shown below.
Section 11: Equipment Maintainability and Serviceability
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
11.1 Minimum lighting level
in routine maintenance
areas is required where
the operator has to read
information, use a hand
tool, or make a
connection. This
provision can be met by
providing integral
lighting or portable
lighting which can be
temporarily attached
such that it does not
have to be hand held.
Minimum 300 lux (30 fc)
Conforms?
Yes
No
N/A
11.2 Maintenance and Service Access
B
A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 25 Doc. 5009A SEMI
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/ Conforms?
11.2.1 Enclosures or covers
must, unless fully
removable, be self-
supporting, in the open
position, and not require
manual support during
maintenance. Exceptions
may be allowed for self-
closing doors for fire
safety or compliance
reasons.
Supports present
Conforms?
Yes
No
N/A
11.2.3 Access covers should be
equipped with full-
handed grasp areas or
other means for opening
them.
Handles present, refer to § 6 for
design criteria.
Conforms?
Yes
No
N/A
11.2.4 Height of access cover
handle over the entire
range of motion required
for operation or
maintenance. There
should be no greater
than a 254 mm (10 in.)
deep obstruction in front
of the handle.
Maximum 1700 mm (67 in.).
Conforms?
Yes
No
N/A
11.3 Replaceable Components
11.3.1 Serviceable components
are replaceable as
modular packages, and
are configured for rapid
removal and
replacement.
Serviceable components configured
as described.
Conforms?
Yes
No
N/A
11.3.2 Serviceable components
should not be stacked
directly on one another
(i.e., a lower layer
should not support an
upper layer).
Serviceable components
independently accessible.
Conforms?
Yes
No
N/A
11.3.3 Heavy components
(objects which have a
lifting index of 0.5 or
greater, see SESC, §
1.0) or bulky
components (greater
than 36 inches in length)
requiring frequent
removal/installation
should include
guide/locating aids to
assist in positioning.
Guide/locating pins present.
Conforms?
Yes
No
N/A
Locating pins
An example of locating pins
Maximum handle height over entire range of motion
Distance of obstruction in front of handle
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 26 Doc. 5009A SEMI
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/ Conforms?
11.3.4 Cables, connectors,
plugs, and receptacles
should be labeled,
keyed, color coded, or
otherwise configured to
make connection easier
and prevent cross
connection. This feature
is assessed only if a
SEMI-S2 assessment is
not being conducted.
Identification present, keyed where
needed.
Conforms?
Yes
No
N/A
11.3.5 Circuit boards mounted
in a card cage
configuration should
have gripping or
ejecting aids for
mounting and removal.
Finger access, gripping, or ejecting
aids available.
Conforms?
Yes
No
N/A
DX-3 Add references to SEMI S08 § 8.
DX-3.1 Add reference below to the section 8, Related Documents, under Other Documents and re-number
subsequent references appropriately.
Gordon, Claire C. 1988 Anthropometric Survey of U.S. Army Personnel: Summary Statistics, Interim Report. Natick, Mass: U.S.
Army Natick Research, Development and Engineering Center, 1989.
Harrison, Catherine R., and Robinette, Kathleen M. CAESAR: Summary Statistics for the Adult Population (Ages 18-65) of the
United States of America. Wright-Patterson AFB, Ohio: Air Force Research Laboratory, Human Effectiveness Directorate, Crew
System Interface Division, 2002.
Hand- tool
Eject levers
Handgrips
Several examples of circuit board removal devices
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 27 Doc. 5009A SEMI
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Line Item 2, Part C DELAYED REVISIONS Y (Effective July 2015) CHANGES TO APPENDIX 1 SESC CHECKLIST (HAND AND ARM CLEARANCE RECOMMENDATIONS) and SECTION 8, RELATED DOCUMENTS (ADDITIONAL REFERENCE)
NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the SEMI EHS
Committee, but is not immediately effective. The provisions of this material are not an authoritative part of the
document until their effective date. The main body of SEMI S08 Appendix 1 remains the authoritative version.
Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date,
providing they do not conflict with portions of the authoritative version other than those that are to be revised or
replaced as part of the deferred revision, and are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall
be struck through.
DY-1 Additional Design Criteria for Hand and Arm Clearances with a Variety of Hand Tools and Objects added to § 7 (OPTIONAL Before Effective Date).
DY-1.1 Replace deleted ¶¶ 7.3 to 7.3.7 with ¶¶ 7.3 to 7.3.20 as shown below.
DY-1.2 Add a note stating that the provided pictograms are not normative.
APPENDIX 1 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
NOTICE: The material in this appendix is an official part of SEMI S8 and was approved by full letter ballot
procedures on November 21, 2006.
Note#: Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not normative. Also, the
pictograms are not intended to depict every possible application of the guidelines.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
1 Manual Material Handling {no changes to this section for Line Item 2}
2 Product Loading in a Standing Posture {no changes to this section for Line Item 2}
3 Wafer Cassette Loading {no changes to this section for Line Item 2}
4 Work in Process Storage (specific to wafer cassettes) {no changes to this section for Line Item 2}
5 Manual Wafer Cassette Rotation Device Design {no changes to this section for Line Item 2}
6 Handle Design {no changes to this section for Line Item 2}
7 Maintainability and Serviceability
7.1 Minimum lighting level in routine maintenance
areas is required where the operator has to read
information, use a hand tool, or make a
connection. This provision can be met by
providing integral lighting or portable lighting
which can be temporarily attached such that it
does not have to be hand held.
minimum 300 lux (30 fc)
7.2 Full Body Clearance
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be provided based on
the nature of the tasks performed in the designated area.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 28 Doc. 5009A SEMI
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Date: 5/25/2012
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
7.2.1 Any posture: upper body clearance
(shoulder width)
minimum 610 mm (24 in.)
7.2.2 Standing:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 1980 mm (78 in.)
minimum 690 mm (27 in.)
7.2.3 Sitting-on-Floor:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1000 mm (39 in.)
minimum 690 mm (27 in.)
minimum 280 mm (11 in.)
7.2.4 Squatting:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1220 mm (48 in.)
minimum 790 mm (31 in.)
minimum 460 mm (18.1 in.)
7.2.5 Kneeling:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1220 mm (48 in.)
minimum 640 mm (25.2 in.)
7.2.6 Kneeling Crawl:
overhead clearance, measured from the floor
forward horizontal clearance#3
minimum 740 mm (29 in.)
minimum 1520 mm (60 in.)
7.2.7 Stooping:
overhead clearance, measured from the floor
forward horizontal clearance#3
working height
minimum 1450 mm (57 in.)
minimum 1020 mm (40 in.)
minimum 640 mm (25.2 in.)
7.2.8 Supine (lying on back):
height
length
minimum 430 mm (17 in.)
minimum 1980 mm (78 in.)
7.2.9 Prone or crawl space:
height
length
minimum 510 mm (20 in.)
minimum 2440 mm (96 in.)
7.3 Hand/Arm Clearance (where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves)
7.3.1 Clearance provided for finger access, round
(dia) or square:
one finger
2, 3, or 4 finger twist of small knob
minimum 32 mm (1.25 in.)
minimum object diameter + 58 mm
(2.3 in.)
7.3.2 Clearance provided for flat hand to wrist access:
height, palm thickness
width, palm width
minimum 89 mm (3.5 in.)
minimum 114 mm (4.5 in.)
7.3.3 Clearance provided for fist to wrist access:
height, palm thickness
width, palm width
minimum height 89 mm (3.5 in.)
minimum width 127 mm (5 in.)
7.3.4 Clearance provided for two hands arm to
shoulders access (does not ensure visual
access):
reach
width
height
maximum 610 mm (24 in.)
minimum 483 mm (19 in.)
minimum 114 mm (4.5 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 29 Doc. 5009A SEMI
Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone: 408.943.6900, Fax: 408.943.7943
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
7.3.5 Clearance provided for two hands, hand to wrist
access (does not ensure visual access):
reach
width
height
maximum 203 mm (8 in.)
minimum 191 mm (7.5 in.)
minimum 114 mm (4.5 in.)
7.3.6 Clearance provided for one arm to shoulder
access, diameter or square area (does not ensure
visual access).
minimum 132 mm (5.2 in.)
7.3.7 Clearance provided for one arm to elbow
access, diameter or square area (does not ensure
visual access).
minimum 119 mm (4.7 in.)
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3 Hand/arm clearance
(where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves)
Access openings should have smooth edges. If hinged doors are used, they should not interfere with
access.
Recommended clearance dimensions in this section do not ensure visual access. Workers should not
reach blindly into areas that contain exposed hazards. Viewports should be added or larger openings
provided if visual access is needed for the worker to see potential hazards or perform tasks.
Clearances for clean room, chemical, and insulating gloves have been provided where appropriate.
• Cleanroom gloves with liners: add 3 mm (0.12 in.)
• Chemical resistant gloves over cleanroom gloves and liners: add 6 mm (0.24 in.)
• Insulating gloves: add 13 mm (0.51 in.)
Criteria labeled “bare hand/glove” are not affected by gloved hands.
Arm clearances include lightweight clothing with a cleanroom over-garment. Additional clearance
should be added for heavier clothing where appropriate.
Height and width dimensions are provided when orientation of the long axis of the opening affects the
ability of a large male to perform work in a neutral posture. Major and minor dimensions are provided
when the long axis of the opening can be either horizontal or vertical depending on the needs of the
task.
7.3.1 Clearance provided for
finger access round
(diameter) or square.
Minimum diameter:
Bare hand 32 mm (1.3 in.)
Cleanroom glove 35 mm (1.4 in.)
Chemical glove 38 mm (1.5 in.)
Insulating glove 45 mm (1.8 in.)
Conforms?
Yes
No
N/A Maximum depth of finger
reach.
Maximum depth:
Bare hand/glove 32 mm (1.3 in.)
7.3.2 2, 3, or 4-finger turn of
small, recessed knob.
Minimum opening, object diameter
plus:
Bare hand 58 mm (2.3 in.)
Cleanroom glove 61 mm (2.4 in.)
Chemical glove 64 mm (2.5 in.)
Insulating glove 71 mm (2.8 in.)
Conforms?
Yes
No
N/A
Opening for single finger
Opening for 2-4 fingers
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 30 Doc. 5009A SEMI
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DRAFTDocument Number: 5009A
Date: 5/25/2012
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3.3 Clearance provided for
flat hand wrist access.
Major dimension, minimum:
Bare hand 114 mm (4.5 in.)
Cleanroom glove 117 mm (4.6 in.)
Chemical glove 120 mm (4.7 in.)
Insulating glove 127 mm (5.0 in.)
Minor dimension, minimum:
Bare hand 55 mm (2.2 in.)
Cleanroom glove 58 mm (2.3 in.)
Chemical glove 60 mm (2.4 in.)
Insulating glove 68 mm (2.7 in.)
Conforms?
Yes
No
N/A
7.3.4 Clearance provided for
fist to wrist access with
thumb outside of fist.
Opening may be
circular or rectangular.
Major dimension, minimum:
Bare hand 127 mm (5.0 in.)
Cleanroom glove 130 mm (5.1 in.)
Chemical glove 131 mm (5.2 in.)
Insulating glove 138 mm (5.4 in.)
Minor dimension, minimum:
Bare hand 90 mm (3.5 in.)
Cleanroom glove 93 mm (3.7 in.)
Chemical glove 96 mm (3.8 in.)
Insulating glove 103 mm (4.1 in.)
Diameter, minimum:
Bare hand 125 mm (5.0 in.)
Cleanroom glove 130 mm (5.1 in.)
Chemical glove 132 mm (5.2 in.)
Insulating glove 138 mm (5.4 in.)
Conforms?
Yes
No
N/A
7.3.5 Clearance provided for
one arm to elbow access
(open hand). Opening
may be circular or
rectangular.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 280 mm (11.0 in.)
Width, minimum:
Bare hand 115 mm (4.5 in.)
Cleanroom glove 118 mm (4.6 in.)
Chemical glove 121 mm (4.8 in.)
Insulating glove 128 mm (5.0 in.)
Height, minimum:
Bare hand 102 mm (4.0 in.)
Cleanroom glove 105 mm (4.1 in.)
Chemical glove 108 mm (4.2 in.)
Insulating glove 115 mm (4.5 in.)
Diameter, minimum:
Bare hand/glove 115 mm (4.5 in.)
Conforms?
Yes
No
N/A
7.3.6 Clearance provided for
one arm to shoulder
access. Opening may be
circular or rectangular.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 395 mm (15.6 in.)
Width, minimum:
Bare hand/glove 127 mm (5.0 in.)
Height, minimum:
Bare hand/glove 127 mm (5.0 in.)
Diameter, minimum:
Bare hand/glove 127 mm (5.0 in.)
Conforms?
Yes
No
N/A
Width
Height
Reach
Major
Minor
Diameter
Major
Minor
Width
Height
Horizontal reach
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 31 Doc. 5009A SEMI
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Date: 5/25/2012
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3.7 Using common
screwdriver with
freedom to turn hand
180°.
Width, minimum:
Bare hand 110 mm (4.2 in.)
Cleanroom glove 113 mm (4.4 in.)
Chemical glove 116 mm (4.6 in.)
Insulating glove 123 mm (4.8 in.)
Height, minimum:
Bare hand 120 mm (4.6 in.)
Cleanroom glove 123 mm (4.8 in.)
Chemical glove 126 mm (5.0 in.)
Insulating glove 133 mm (5.2 in.)
Conforms?
Yes
No
N/A
7.3.8 Using pliers and wire
cutting tools.
Width, minimum:
Bare hand 130 mm (5.1 in.)
Cleanroom glove 133 mm (5.2 in.)
Chemical glove 136 mm (5.4 in.)
Insulating glove 143 mm (5.6 in.)
Height, minimum:
Bare hand 115 mm (4.5 in.)
Cleanroom glove 118 mm (4.6 in.)
Chemical glove 121 mm (4.8 in.)
Insulating glove 128 mm (5.0 in.)
Conforms?
Yes
No
N/A
7.3.9 “T” wrench use with
freedom to turn hand
180°.
Width, minimum:
Bare hand 160 mm (6.3 in.)
Cleanroom glove 163 mm (6.4 in.)
Chemical glove 166 mm (6.5 in.)
Insulating glove 173 mm (6.8 in.)
Height, minimum:
Bare hand 140 mm (5.5 in.)
Cleanroom glove 143 mm (5.6 in.)
Chemical glove 146 mm (5.7 in.)
Insulating glove 153 mm (6.0 in.)
Conforms?
Yes
No
N/A
7.3.10 Allen wrench use with
freedom to turn wrench
60°.
Width, minimum:
Bare hand 122 mm (4.8 in.)
Cleanroom glove 125 mm (4.9 in.)
Chemical glove 128 mm (5.0 in.)
Insulating glove 135 mm (5.3 in.)
Height, minimum:
Bare hand 160 mm (6.3 in.)
Cleanroom glove 163 mm (6.4 in.)
Chemical glove 166 mm (6.5 in.)
Insulating glove 173 mm (6.8 in.)
Conforms?
Yes
No
N/A
7.3.11 Using open end wrench
with freedom to turn
wrench through 62° on
a horizontal plane.
Width, minimum:
Bare hand 270 mm (10.6 in.)
Cleanroom glove 273 mm (10.7 in.)
Chemical glove 276 mm (10.8 in.)
Insulating glove 283 mm (11.1 in.)
Height, minimum:
Bare hand 200 mm (7.9 in.)
Cleanroom glove 203 mm (8.0 in.)
Chemical glove 206 mm (8.1 in.)
Insulating glove 213 mm (8.4 in.)
Conforms?
Yes
No
N/A
Width
Height
62°
Width
Height
Width
Height
Width
Height
Width
Height
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 32 Doc. 5009A SEMI
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Date: 5/25/2012
Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3.12 Using test probe. Width, minimum:
Bare hand 90 mm (3.5 in.)
Cleanroom glove 93 mm (3.6 in.)
Chemical glove 95 mm (3.7 in.)
Insulating glove 103 mm (4.1 in.)
Height, minimum:
Bare hand 90 mm (3.5 in.)
Cleanroom glove 93 mm (3.6 in.)
Chemical glove 95 mm (3.7 in.)
Insulating glove 103 mm (4.1 in.)
Conforms?
Yes
No
N/A
7.3.13 Grasping small objects
up to 50 mm wide with
one hand.
Major dimension, minimum:
Bare hand 120 mm (4.7 in)
Cleanroom glove 123 mm (4.8 in.)
Chemical glove 126 mm (5.0 in.)
Insulating glove 133 mm (5.2 in.)
Minor dimension, minimum:
Bare hand 110 mm (4.3 in.)
Cleanroom glove 113 mm (4.4 in.)
Chemical glove 116 mm (4.6 in.)
Insulating glove 123 mm (4.8 in.)
Conforms?
Yes
No
N/A
7.3.14 Grasping objects wider
than 50 mm with one
hand.
Major dimension, object width plus
a minimum clearance of:
Bare hand 45 mm (1.8 in.)
Cleanroom glove 48 mm (1.9 in.)
Chemical glove 51 mm (2.0 in.)
Insulating glove 58 mm (2.3 in.)
Minor dimension, minimum:
Bare hand 125 mm (4.9 in.)
Cleanroom glove 128 mm (5.0 in.)
Chemical glove 131 mm (5.2 in.)
Insulating glove 138 mm (5.4 in.)
Conforms?
Yes
No
N/A
7.3.15 Clearance provided for
two hands, hand to wrist
access.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 96 mm (3.76 in.)
Opening width, minimum:
Bare hand 203 mm (8.0 in.)
Cleanroom glove 206 mm (8.1 in.)
Chemical glove 209 mm (8.2 in.)
Insulating glove 216 mm (8.5 in.)
Opening height, minimum:
Bare hand 127 mm (5.0 in.)
Cleanroom glove 130 mm (5.1 in.)
Chemical glove 133 mm (5.2 in.)
Insulating glove 140 mm (5.5 in.)
Conforms?
Yes
No
N/A
Minor dimension
Major dimension
Minor dimension
Major dimension
Minor dimension
Major dimension
Major dimension
Minor dimension
Width
Height
Width
Height
Horizontal reach
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 33 Doc. 5009A SEMI
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3.16 Clearance provided for
two hands, hand to
elbow access.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 280 mm (11.0 in.)
Opening width, minimum:
Bare hand/glove 483 mm (19.0 in.)
Opening height, minimum:
Bare hand/glove 127 mm (5.0 in.)
Conforms?
Yes
No
N/A
7.3.17 Clearance provided for
two hands arm to
shoulders access.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 395 mm (15.6 in.)
Width, minimum:
Bare hand/glove 500 mm (19.7 in.)
Height, minimum:
Bare hand/glove 127 mm (5.0 in.)
Conforms?
Yes
No
N/A
7.3.18 Clearance provided for
grasping large objects
with 2 hands extended
through opening up to
the fingers.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 75 mm (3.0 in.)
Width, object width plus a
minimum clearance of:
Bare hand 75 mm (3.0 in.)
Cleanroom glove 78 mm (3.1 in.)
Chemical glove 81 mm (3.2 in.)
Insulating glove 88 mm (3.5 in.)
Height, minimum:
Bare hand 125 mm (4.9 in.)
Cleanroom glove 128 mm (5.0 in.)
Chemical glove 131 mm (5.2 in.)
Insulating glove 138 mm (5.4 in.)
Conforms?
Yes
No
N/A
7.3.19 Clearance provided for
grasping large objects
with 2 hands extended
through opening up to
wrists.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 152 mm (6.0 in.)
Width, object width plus a
minimum clearance of :
Bare hand 150 mm (5.9 in.)
Cleanroom glove 153 mm (6.0 in.)
Chemical glove 156 mm (6.1 in.)
Insulating glove 163 mm (6.4 in.)
Height, minimum
Bare hand 125 mm (4.9 in.)
Cleanroom glove 128 mm (5.0 in.)
Chemical glove 131 mm (5.2 in.)
Insulating glove 138 mm (5.4 in.)
Conforms?
Yes
No
N/A
Width
Height
Horizontal reach
Width
Height
Horizontal reach
Width
Height
Horizontal reach
Width
Height
Horizontal reach
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 34 Doc. 5009A SEMI
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
7.3.20 Clearance provided for
grasping large objects
with two hands with
arms extended through
opening up to elbows.
Horizontal reach from opening to
center of grasping area, maximum:
Bare hand/glove 280 mm (11.0 in.)
Width, minimum:
Bare hand/glove 483 mm (19.0 in.)
or object width + 150 mm (5.9 in.),
whichever is greater.
Height, minimum:
Bare hand/glove 125 mm (4.9 in.)
Conforms?
Yes
No
N/A
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
7.4 Maintenance and Service Access
7.4.1 Enclosures or covers must, unless fully
removable, be self-supporting, in the open
position, and not require manual support during
maintenance. Exceptions may be allowed for
self closing doors for fire safety or compliance
reasons.
Supports present
7.4.2 Access covers should be equipped with full-
handed grasp areas or other means for opening
them.
Handles present, refer to § 6 for
design criteria.
7.4.3 Height of access cover handle over the entire
range of motion required for operation or
maintenance. There should be no greater than a
254 mm (10 in.) deep obstruction in front of the
handle.
maximum 1700 mm (67 in.)
7.5 Replaceable Components
7.5.1 Serviceable components are replaceable as
modular packages, and are configured for rapid
removal and replacement.
Serviceable components configured
as described.
7.5.2 Serviceable components should not be stacked
directly on one another (i.e., a lower layer
should not support an upper layer).
Serviceable components
independently accessible.
7.5.3 Heavy components (objects which have a lifting
index of 0.5 or greater, see SESC, § 1.0) or
bulky components (greater than 36 inches in
length) requiring frequent removal/installation
should include guide/locating aids to assist in
positioning.
Guide/locating pins present.
7.5.4 Cables, connectors, plugs, and receptacles
should be labeled, keyed, color coded, or
otherwise configured to make connection easier
and prevent cross connection. This feature is
assessed only if a SEMI S2 assessment is not
being conducted.
Identification present, keyed where
needed.
7.5.5 Circuit boards mounted in a card cage
configuration should have gripping or ejecting
aids for mounting and removal.
Finger access, gripping, or ejecting
aids available.
8 Display Location {no changes to this section for Line Item 2}
9 Hand Control Location {no changes to this section for Line Item 2}
Width
Height
Horizontal reach
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 35 Doc. 5009A SEMI
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
10 Workstation Design {no changes to this section for Line Item 2}
DY-2 Add reference (OPTIONAL Before Effective Date).
DY-2.1 Add reference below to section 8, Related Documents, under Other Documents, and re-number subsequent
references appropriately.
MIL-HDBK-759C:1995, Handbook for Human Engineering Design Guidelines, Department of Defense, Washington, D.C.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Line Item 3, Part C DELAYED REVISIONS Z (Effective July 2015) CHANGES TO APPENDIX 1 SESC CHECKLIST: HAND CONTROL LOCATION
NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the SEMI EHS
Committee, but is not immediately effective. The provisions of this material are not an authoritative part of the
document until their effective date. The main body of SEMI S08 Appendix 1 remains the authoritative version.
Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date,
providing they do not conflict with portions of the authoritative version other than those that are to be revised or
replaced as part of the deferred revision, and are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall
be struck through.
DZ-1 Exceptions to Hand Control Location Recommendations Added to SESC § 9 (OPTIONAL Before Effective Date).
DZ-1.1 Modify text in Appendix 1, SESC Checklist, § 9 header as shown below to exclude equipment lower than
838 mm (33 in.) and postures other than sitting or standing adopted during maintenance and service activities.
DZ-1.2 Add a note stating that the provided pictograms are not normative.
APPENDIX 1 SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC) NOTICE: The material in this appendix is an official part of SEMI S8 and was approved by full letter ballot procedures on
November 21, 2006.
Note#: Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not
normative. Also, the pictograms are not intended to depict every possible application of the guidelines.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
1 Manual Material Handling {no changes to this section for Line Item 3}
2 Product Loading in a Standing {no changes to this section for Line Item 3}
3 Wafer Cassette Loading {no changes to this section for Line Item 3}
4 Work in Process Storage (specific to wafer cassettes) {no changes to this section for Line Item 3}
5 Manual Wafer Cassette Rotation Device Design {no changes to this section for Line Item 3}
6 Handle Design {no changes to this section for Line Item 3}
7 Maintainability and Serviceability {no changes to this section for Line Item 3}
8 Display Location {no changes to this section for Line Item 3}
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls tools, and materials accessed from standing and seated postures
for routine production operation, and maintenance and service tasks).
Exception 1: These criteria do not apply to freestanding ancillary equipment with a height less than 838 mm (33 in.) such as
pumps, power supplies, chillers, and heat exchangers.
Exception 2: Infrequently used or critical controls may be located outside the recommended height ranges if their location
makes them more readily accessible for postures other than standing or sitting (see 9.2.1 and 9.2.2) adopted during service and
maintenance activities anticipated by the supplier.
9.1 Standing Station#1
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
9.1.1 Vertical location of very infrequently used
controls (controls used less often than once
every 24 hours) measured from the standing
surface to the centerline of the control.
maximum 1640 mm (64.5 in.)
minimum 0 mm (0 in.)
9.1.2 Location of infrequently used and/or critical
controls. Maximum reaches are indicated for
various heights. Reaches are measured from the
leading edge of the equipment or obstacle.
Controls should not be located above 1638 mm
(64.5 in.) or below 838 mm (33 in.). Interpolate
for intermediate values.
Height of 1638 mm (64.5 in.)
Height of 1524 mm (60 in.)
Height of 1422 mm (56 in.)
Height of 1321 mm (52 in.)
Height of 1219 mm (48 in.)
Height of 1118 mm (44 in.)
Height of 1016 mm (40 in.)
Height of 914 mm (36 in.)
Height of 838 mm (33 in.)
reach 254 mm (10 in.)
reach 368 mm (14.5 in.)
reach 432 mm (17 in.)
reach 470 mm (18.5 in.)
reach 483 mm (19 in.)
reach 470 mm (18.5 in.)
reach 394 mm (15.5 in.)
reach 292 mm (11.5 in.)
reach 178 mm (7 in.)
9.1.3 Location of frequently used controls. Maximum
reaches are indicated for various heights.
Reaches are measured from the leading edge of
the equipment or obstacle. Controls should not
be located above 1270 mm (50 in.) or below
940 mm (37 in.). Interpolate for intermediate
values.
Height of 1270 mm (50 in.)
Height of 1219 mm (48 in.)
Height of 1168 mm (46 in.)
Height of 1118 mm (44 in.)
Height of 1067 mm (42 in.)
Height of 1016 mm (40 in.)
Height of 940 mm (37 in.)
reach 292 mm (11.5 in.)
reach 330 mm (13 in.)
reach 368 mm (14.5 in.)
reach 394 mm (15.5 in.)
reach 406 mm (16 in.)
reach 394 mm (15.5 in.)
reach 318 mm (12.5 in.)
9.2 Seated Station#2
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Section Indicator Acceptance Criteria
Metric Units (US Customary Units) Actual
Conforms/Does
Not Conform/
Not Applicable
9.2.1 Location of infrequently used and/or critical
controls. Maximum reaches are indicated for
various heights. Reaches are measured from the
leading edge of the work surface or obstacle.
Heights are measured from the underside#4 of
the work surface. Controls should not be located
above 724 mm (28.5 in.) or below −140 mm
(−5.5 in.). Interpolate for intermediate values.
Height of 724 mm (28.5 in.)
Height of 597 mm (23.5 in.)
Height of 495 mm (19.5 in.)
Height of 394 mm (15.5 in.)
Height of 292 mm (11.5 in.)
Height of 191 mm (7.5 in.)
Height of 89 mm (3.5 in.)
Height of −13 mm (−0.5 in.)
Height of −140 mm (−5.5 in.)
reach 356 mm (14 in.)
reach 432 mm (17 in.)
reach 470 mm (18.5 in.)
reach 483 mm (19 in.)
reach 483 mm (19 in.)
reach 470 mm (18.5 in.)
reach 445 mm (17.5 in.)
reach 381 mm (15 in.)
reach 254 mm (10 in.)
9.2.2 Location of frequently used controls. Maximum
reaches are indicated for various heights.
Reaches are measured from the leading edge of
the work surface or obstacle. Heights are
measured from the underside#4 of the work
surface. Controls should not be located above
394 mm (15.5 in.) or below 89 mm (3.5 in.).
Interpolate for intermediate values.
Height of 394 mm (15.5 in.)
Height of 343 mm (13.5 in.)
Height of 292 mm (11.5 in.)
Height of 241 mm (9.5 in.)
Height of 191 mm (7.5 in.)
Height of 140 mm (5.5 in.)
Height of 89 mm (3.5 in.)
reach 330 mm (13 in.)
reach 368 mm (14.5 in.)
reach 394 mm (15.5 in.)
reach 406 mm (16 in.)
reach 419 mm (16.5 in.)
reach 419 mm (16.5 in.)
reach 419 mm (16.5 in.)
10 Workstation Design {no changes to this section for Line Item 3}
NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guideline(s) set forth
herein for any particular application. The determination of the suitability of the safety guideline(s) is solely the
responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data
sheets, and other relevant literature respecting any materials or equipment mentioned herein. These safety guidelines
are subject to change without notice.
By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in
this safety guideline. Users of this safety guideline are expressly advised that determination of any such patent rights
or copyrights, and the risk of infringement of such rights are entirely their own responsibility.