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Certified DIN EN ISO 9001; TS 16949 conform
31st International Conference on Electronics Manufacturing and Technology - IEMT 2006
8-10 November 2006Sunway Resort Hotel, Petaling Jaya, Malaysia
Laser assisted Soldering and Flip-Chip attach for 3D-Packaging
Thomas Oppert, Elke Zakel, Ghassem Azdasht, Thorsten Teutsch
www.pactech.de
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Certified DIN EN ISO 9001; TS 16949 conform
• Short company profile• Solder Ball Placement & Laser Reflow
– Standard Process– Solder Jetting Process
• LAPLACE - Flip Chip Bonding
Content
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Certified DIN EN ISO 9001; TS 16949 conform
Pac Tech Corporate ProfilePac Tech Corporate Profile
1995 Pac Tech GmbH established, Berlin-Germany
1997 1st Bumping facility in Nauen, Germany
2000 2nd Bumping facility in Fukui, Japan (Alpha Bumping Technologies - ABT, JV with Nagase)
2002, 3rd Bumping facility PacTech USA Inc., CA, USA
2005, Customer Service Center Thailand
2006, Pac Tech Asia (Penang, Malaysia - planned Q4)----------------------------------------------------------------------------------
PT Germany: 125 employees
PT USA, Inc.: 20 employees
Sales Turnover 2005: 14 Million Euro (PT Germany)
Shareholder Structure: NAGASE & CO., Ltd.Founders
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NAGASE PROFILE• HISTORY : Founded 1832, Incorporated 1917• SALES : 5 billion US$• STOCK : Listed TSE-1, OSE-1• TYPE : Trading & Manufacturing• FIELDS : Industrial & Consumer• ITEMS : ・Electronics, ・Chemicals, ・Plastics,
・Pharmaceuticals, ・Beauty Care, Tokyo Head Office
Osaka Head Office
NAGASE & CO.,LTD.
www.nagase.co.jp
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Certified DIN EN ISO 9001; TS 16949 conform
Locations Worldwide
Italy
DenmarkSweden
MalaysiaSingapore
Taiwan
Thailand Philippines
Pac Tech USA IncSanta Clara, CA
Boston
Pac Tech GmbHNauen, Germany
Tokyo
Fukui
Pac Tech facilities Distributor/ Sales Agent
Finland
Korea
Israel
China
France
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Certified DIN EN ISO 9001; TS 16949 conform
Pac Tech EquipmentBumping, Spin Coating, Gang Ball Placement, FC Assembly
- Wafer Bumping- Wafer Level Packaging- CSP, BGA, HDD
NiAu-UBMWafer Bumping
PacLine 200/300
Solder Ball Placement/Reflow
SB²-Jet
Spin Coater
SC 200/300
Flip Chip AssemblyLAPLACE
Gang Ball Placement
GBP 200/300
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Certified DIN EN ISO 9001; TS 16949 conform
SolderSolder Ball Placement & Ball Placement & Laser Laser ReflowReflow
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Certified DIN EN ISO 9001; TS 16949 conform
Technical Needs for 3D-Packaging
• Low mechanical stress• Low thermal stress• Complex 3D-Packaging• Soldering with special solder alloys
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Certified DIN EN ISO 9001; TS 16949 conform
Advantages of Laser Soldering
• Localized heat– No thermal stress on the areas
outside of bonding interface• Short Laser Pulse
– Low thermal stress on thechip/substrate and interconnection
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Certified DIN EN ISO 9001; TS 16949 conform
SB2 - Equipment
SB²-Jet LF
Semiautomatic SB²-SM
Automatic SB²-Jet
300 mmESD version of SB²-JetFor HGA & HSA Assembly
SB²-Jet LF with R2RMore than 200 machines
installed
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Certified DIN EN ISO 9001; TS 16949 conform
SB²-SM Process (standard)
Placement & Reflow of Solder Balls
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Certified DIN EN ISO 9001; TS 16949 conform
Laser Soldering SB2-Jet
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Certified DIN EN ISO 9001; TS 16949 conform
Bondhead of the SB²
Solder Jet and RepairBondhead
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Certified DIN EN ISO 9001; TS 16949 conform
SB2-Jet Advantages
• No tooling• Solder ball diameters from 60µm to 760µm• Solder alloys: SnPb, SnAg, SnAgCu, AuSn• No flux• No mechanical stress/contact• No thermal stress• No additional reflow• No cleaning of flux residues• Fine pitch applications (120µm)
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Certified DIN EN ISO 9001; TS 16949 conform
SB2-Applications
• Wafer Bumping• BGA/ CSP Bumping• Wafer Level CSP Bumping• Rework/ Repair• Optoelectronic Packaging• SAW, BAW• MEMS & 3-D Packaging• Hard Disk Drive (HGA, HSA)• Camera Modules
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Certified DIN EN ISO 9001; TS 16949 conform
5.
1. 2.
3. 4.
3D – Assembly Configurations using SB² – Jet
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Certified DIN EN ISO 9001; TS 16949 conform
A
B
C
3D – AssemblyDesign Considerations
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Certified DIN EN ISO 9001; TS 16949 conform
Glassfiber Attachment
SB2-Applications
3D-BGA-Package (Cube)
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Certified DIN EN ISO 9001; TS 16949 conform
Hard Disk Drive
Fluxless 3D-Ball Placement & Laser Reflow on FlexSuspension for HDD (HGA)
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Certified DIN EN ISO 9001; TS 16949 conform
Source: Seagate
Fluxless 3D-Ball Placement & Laser Reflow on FlexSuspension for HDD (HGA)
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Certified DIN EN ISO 9001; TS 16949 conform354
Fluxless 3D-Ball Placement & Laser Reflow on FlexSuspension for HDD (HGA)
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Certified DIN EN ISO 9001; TS 16949 conform Dateiname.ppt
Silicon stator(non-moving, attached to suspension)
Silicon rotor(moving, holds magnet and slider
Magnet/ buttom keeper
Narrow beam flexure(connects rotor to stator)
Read / write transducer
Electrical connections to read / write sliderElectrical connections to drive coil
Suspension
369
Fluxless 3D-Ball Placement & Laser Reflow on FlexSuspension for HDD (HGA)
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Certified DIN EN ISO 9001; TS 16949 conform
Cross Section of a Flex Suspension
62 SB2
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Certified DIN EN ISO 9001; TS 16949 conform
IVLAPLACE 1
Laser assisted Flip Chip Bonding
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Certified DIN EN ISO 9001; TS 16949 conform
LAPLACEEquipment for FC and wafer to wafer attach
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Certified DIN EN ISO 9001; TS 16949 conform
Flip-Chip-LaserbonderLAPLACE – High Precision
Application: LCD Driver
ACF
NCP
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Certified DIN EN ISO 9001; TS 16949 conform
Flip Chip & Capacitor Attachin Consumer Product
147 REL
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Certified DIN EN ISO 9001; TS 16949 conform
VLAPLACE 2
Laser assisted Wafer to Wafer Bonding & soldering equipment
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Certified DIN EN ISO 9001; TS 16949 conform
-Active wafer
-Wafer to Wafer Interconnection
-Lid wafer
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Certified DIN EN ISO 9001; TS 16949 conform
X
ZY
Gantry X, Y, Z
P-Sensor Dual CameraVacuum Chuck θ
Cycle/process flow
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Certified DIN EN ISO 9001; TS 16949 conform
Laser Line Scanning Concept
Wafer
Active part of Laserline
Laser Line Holder
Passive part of Laserline Scanning
Direction
Scanning Speed: max 4-5 minutes per Wafer
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Certified DIN EN ISO 9001; TS 16949 conform
Contacts:
Contact Telephone Fax E-mail
Dr. Elke Zakel +49-3321-4495-100 +49-3321-4495-110 [email protected]
Thomas Oppert +49-3321-4495-100 +49-3321-4495-110 [email protected]
www.pactech.de
Pac Tech GmbH
Pac Tech USA Inc.Contact Telephone Fax E-mail
Dr. Thorsten Teutsch +1-408-588-1925 +1-408-588-1927 [email protected]
www.pactech-usa.com