Deep Level Spectrometer provides a method with the highest sensitivity for characterization and identification of impurities. It allows automatic control of the experimental parameters, automatic evaluation of impurity concentration, activation energy and capture cross section.

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DLS-83D & DLS-1000Deep LeveL Spectrometer

Influence of annealing on Fe-B pairs Radiation defects in n-type FZ silicon

● Highest sensitivity (below 2x108 atoms/cm3) for detection of trace levels of contaminants

● Complete range of measurement modes including temperature scan, frequency scan, depth profiling, C-V, I-V, capture cross section, optical injections, MOS interface state density distribution measurements

● Controlled by digital or analog settings to allow real ease of operation

● Library database for accurate contamination identification for several semiconductor materials

From 30K to 325K

Closed Cycle He-cryostat

Automatic LN2 cryostat with controlled LN2 flow

Simple bath type LN2 cryostat

From 80K to 550K From 80K to 450K

before heat treatmentafter 30 min heat treatmentat 180 oC

Applications

Features

cryostats

Molybdenium

Fe-interstitial

Fe-B pair