compact efficient co₂ amplifiers with modular design for high … · 2018-07-15 · modular &...
TRANSCRIPT
2012 Launch of fiber laser processing systems
1995 Launch of laser drilling systems
1986 Commercialization of 3D laser processing systems
1979
1967 Start of CO2 laser research
CO2 2D laser processing system Commercialization of product (First in Japan)
1960 Invention of ruby laser
2017 14 model lineup for fiber laser processing systems
Modular & Compact Design
History of Mitsubishi LaserWelcome to Nagoya Works
CO2 2D laser processing system Commercialization of product (First in Japan)
Advantages of our CO2 laser source #1
Effe
ctiv
e Ex
cita
tion
Den
sity
(a.u
.)
Theoretical calculation to explain electrical input power reduction of 50% compared with other CO2 lasers
Laser Beam Intensity M (I/IS) IS : Saturation Intensity
Advantages of our CO2 laser source #2
Axial flow blower
Mitsubishi's original technology
Transverse -gas flow excitation system oscillator
Heat exchanger
Discharge electrodes
Gas sealed
Technological Advantages
Higher Gain
Lower loss
Better beam shapes
User Advantages
Higher Power > 25kW with better efficiency
Stable Operations
High EUV power with better efficiency
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Transverse Flow Laser
Wall Cooling Laser= 1
Fast Axial Flow Laser
0 500 1,000 1,500 2,000 2,500
High-speed axial flow system(Other company)
Transverse- gas flow system(Mitsubishi Electric)
Electricity (JPY/hr)Operation cost comparison per hour
50% reduction
!""" !"#"#$$"#$%" 2000 201019901980
Conpact Resonator
Parts are developed and manufactured
all in -house
Development
Design
Service
Manufacturing
Mitsubishi Electric Co., Ltd.Nagoya Works
Mitsubishi Electric FA products produced hereTo the world's production field
OSC PA1
OSC Pre-Amp Pre-Amp AMP
MA1
AMP
MA2
AMP
MA3
AMP
OSC PA1
AMP
MA1
AMP
MA2
AMP
OSC PA1
AMP
MA1
AMP
Compact efficient CO₂ amplifiers with modular design for high-efficient EUV power generations
Abstract
CO₂ amplifiers have been developed and the performances are confirmed for EUV generation systems so that they could be adapted for commercial applications. Based on transverse-gas flow design, electrically efficient operation and compact foot space compared with conventional lasers are achieved. At the workshop, we are also going to discuss the modular design for the variety of process conditions. Our basic system generates CO₂ powers of 5-10kW and simply by adding same three amplifiers, the CO₂ powers can be increased at least 10kW per each amplifier so that total powers of more than 35-40kW could be generated. Therefore, today's 250W EUV applications could be generated adapting three amplifiers. However, if the EUV power of 100W is enough for some lithography conditions, it should be selectable by applying one amplifier and the EUV power can be enhanced easily by adding more amplifiers in the near future if higher EUV power is required.
CO₂
30kWm2
20kW
10kW
>300W
>200W
>100W
EUV
OSC Pre-Amp Pre-Amp
OSC Pre-Amp Pre-Amp
1. Koji Yasui Ph.D Head Quarter, Tokyo Japan 2. Kazuo Sugihara Design Section, Nagoya Works, Nagoya Japan 3. Naoya Kishida Marketing Section, Head Quarter, Tokyo Japan
[email protected]@ab.MitsubishiElectric.co.jp
Contact Information
Koji Yasui and Naoya KishidaTatsuya Yamamoto and Jun-ichi NishimaeMasashi Naruse, Sugihara Kazuo, and Masato Matsubara
Mitsubishi Electric Corporation, Head quarter, Factory Automation Systems Group, Tokyo, Japan
Mitsubishi Electric Corporation, Advanced technology R&D center, Hyogo, Japan
Mitsubishi Electric Corporation, Nagoya works, Nagoya, Japan
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