cleanroom total solution cleanroom 2 s o l u t i o n cleanroom solution examples・・・・・ p7...

2012-8 Printed in Japan

http://www.fujielectric.co.jp/products/cleanroom/

EK613

2012

Safety notesPrinted on recycled paper.

Use the system properly by reading the Operation Manual and the Specifications carefully or consulting the dealer where you purchased the system.Only qualified personnel with the appropriate expertise and knowledge in the relevant fields should operate the system.

WebsiteURL http://www.fujielectric.co.jp

Gate City Ohsaki East Tower1-11-2, Osaki, Shinagawa, Tokyo 141-0032, JapanPhone :+81-3-5435-7111

Information in this catalog is subject to change without notice.

CLEANROOM TOTAL SOLUTIONTotal support for materializing the ideal cleanroom

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S o l u t i o n

C L E A N R O O M

Solution examples・・・・・・・・・・・・・・・・p7　 FPD　Semi-conductor　Pharmaceutical/Food　Automobile/　Precision components/　Lithium-ion battery

OST PERFORMANCE

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For cleanroom technology, Fuji Electric started development of cleanroom equipment at the beginning of the 1970s and constructed our own semiconductor plant cleanroom in the 1980s.Since then, we have accumulated extensive know-how for clean-room through improvement of the production environment jointly promoted with customers operating large-scale cleanrooms. To solve various problems, we have developed high-performance products based on our wide range of element technologies as an electrical equipment manufacturer and materialized various solutions.

We are capable of offering optimum solutions, such as the state-of-the-art local unit cleanroom, indispensable for cleanness at low cost.

Our FFU materializes the highest efficiency in the industry by diverting the hydroelectric turbine technology that we have developed and improved for many years into air cleaning and by applying our power electronics technology to flexible operation of electricity supply.

We can provide accurate cleanroom design materi-alizing a clean environment by using our engineering capability in airflow analysis as much as possible.

With our comprehensive capability as a manufacturer, we have been improving various state-of-the-art technologies, such as FFU Active Control with the particle sensor, the wind direction/velocity sensor and the ultra-precise temperature control etc.

FFU・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・p11How to choose FFUStandard Type ［WLFA］Large air volume Type ［WLFB］1-phase Type ［WLFC］AC motor Type ［WLFD］Stand-alone Type ［WLFE］Thin Type ［WLFF］Controller SpecificationsHow to choose FFU for manufacturing equipmentF-Stage ［WLFG］F-Cube-N ［WLFH］Heat-resisting FFU ［WLFI WLFJ］Chemical FFU ［WLFK］

FFU Monitoring System・・・・・・・p31How to choose the FFU monitoring systemFunction ListF-SITE-FMR500F-SITE-FMC500F-SITE-FMV300F-SITE-FMC200F-SITE-FMC100LSILCI

Cleanroom materials・・・・・・・・・・・p47LineupsCeiling grid frameLighting panel/Blank panelBypass panel (Filter) Joinery (Doors, Windows) Interior and partion panelMaintenance hatch, Maintenance passageFree access floorPower distribution equipment

Energy saving measures・・・・・・・p57Proposal for energy saving/replacement Materialization of energy saving/replacementHistory of development for the cleanroom at Fuji ElectricEngineering tools

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We can provide prompt support for large-scale cleanroomswith our industry-leading production system and experience.


S o l u t i o n

C L E A N R O O M

What is the cleanroom? Industrial sectors requiring the cleanroom and levels

0.3μm

1

10

100

1,000

10,000

100,000

0.1μm

1

10

100

1,000

10,000

100,000

FS-209D

0.5μm

1

10

100

1,000

10,000

100,000

FS-209E

0.5μm

M1

M1.5

M2

M2.5

M3

M3.5

M4

M4.5

M5

M5.5

M6

M6.5

JIS/ISO

0.1μm

1

1.5

2

2.5

3

3.5

4

4.5

5

5.5

6

6.5

7

7.5

8

Standard

Standardparticle size

Cleanliness conventionallyused (pieces/ft3)

Cleanliness (ISO class) Class 1 Class 2 Class 3 Class 4 Class 5 Class 6 Class 7 Class 8

0.1μmClass 10

0.1μmClass 1

0.3μmClass 1

0.3μmClass 10

0.3μmClass 100

0.5μmClass 100

0.5μmClass 1000

0.5μmClass 10000

Industrial sector

Expression of the cleanliness level

A floor area or space, usually not well defined, operating at a lower airborne contamination level than the general surrounding environment

Cleanroom is a specially constructed enclosed area which is environmentally controlled, with respect to airborne particulates, temperature, humidity, air pressure, air flow patterns, air motion, static charges, and lighting.To secure high-quality and reliability of products, it is very important to prevent adhesion of particles.This technology is applied to prevention of hospital-acquired infection, bacterial contamination in pharmaceutical plants, and food alteration in food plants. The industrial sectors requiring a cleanroom are constantly expanding.

Hospital-acquired infectionBacterial contamination

Foreign material contamination

Food spoilage

Medical and Pharmaceuticalsector

Food sector

Increase of failures and defectivesReduction in yield rate

Various kinds offailures caused by

air pollution

Solve by introducingthe cleanroom

Cleanliness of the cleanroom is generally expressed in the number of particles contained in the unit volume of air.Therefore, the smaller the numbers of the cleanliness class, the higher the grade (less dust) of the cleanroom.For the standard of cleanliness, the U. S. Federal Standards (FS-209D E) were used generally but has been abolished when ISO14644 has been enacted (2000).However, the cleanliness class based on FS 209D is still widely used in actual cleanrooms.This expresses the fine-particulate concentration as the number of particles in 1 cubic foot (pieces/ft3).Although the standard particle size is 0.5 μm in the FS-209D standard, the standard particle sizes are often altered to 0.3 μm or 0.1 μm at the actual sites. Thus, it is necessary to pay attention to the subject particle size and the unit volume (m3/ft3) to confirm the class.

Cleanlinessclass

Milk and milk products

Meat and meat processing

Brew

Confectionery and bakery

Barrier system

Isolator

Mushroom cultivation

Cosmetics

Cleanliness(Conventional expression, piece/ft3)

Sem

iconductor/FP

DP

recision machinery

Medical and

Pharm

aceuticalF

oodsO

thers

LSI manufacturing wafer process

LSI assembly/test process

Silicon single crystal

Photo mask

Photoresist

Printed circuit board

Liquid crystal for display

Organic EL

Semiconductor manufacturing equipment

Chemicals for manufacturing LSI

Solar panel

Precision electronic components

Magnetic head

Disk

Photographic film

Optical fiber

Miniature bearing

Lens

Precision measuring instrument manufacturing

Antibiotic

Injection drug

Preparation packaging line

Medical equipment and disposals

Sterile hospital room

Operating room

Prescription laboratory

FFU-method cleanroom

Recommended method

Clean cooling equipment


S o l u t i o n

C L E A N R O O M

1100

908070605040302010

0

［kW］

78.7

19.3

Flexibility

Cleanliness in an area is adjustable by adding or changing the position of FFUs.It is possible to flexibly handle alteration of pro-duction lines.

32 No leakage

There is no risk of particle leakage to the cleanroom side since the space above the system ceiling achieves nega-tive pressure compared to the inside of the cleanroom.

4 Easy maintenance

With the no-leakage method, there is no risk of cleanliness deterioration in the cleanroom since maintenance service can be executed while operating the cleanroom.

5

P.47

P.7

MeritsEven if several units of FFU fail, performance as a clean-room can be maintained.It can be said that the sys-tem has high resistance to failures.

P.11

Environmental sensor

Components of FFU-method cleanroom

P.31

In response to current requirements and future demand,it is possible to construct an ideal cleanroom.

The FFU-method cleanroom is a method of cleaning a space by constructing a grid-shaped ceilingwith aluminum frames and by installing the necessary number ofFFUs (fan filter units) for materializing the required cleanliness.

This is suitable for a cleanroom requiring high cleanliness with single airflow andadopted widely to large-scale cleanrooms in the semiconductor and flat panel industries.

FFU

A wide range of lineups covering from the large air-volume type for system ceilings to the thin type of stockers with limited spaces is provided.Various kinds of FFUs for manufacturing equipment, which you can select in accordance with functions and air volume, are available.

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Various kinds of environmental sensors such as F-Planet, a cleanroom environmental sensor, a wind direction/velocity sensor are provided, so that you can quickly support trend analysis and environment alteration.

FFU monitoring system

This system provides real-time monitoring capable of stable manufacturing and improvement of yield rate.Our monitoring system, the F-SITE series, is a lineup which can at will materialize the visualization of the cleanroom covering from a large-scale to a small-scale cleanrooms.

System ceiling materials

In order to improve performance and maintenance efficiency of the cleanroom, all materials required such as grid ceiling frames, lighting panels, blank panels and interior panels are provided.

Temperature control equipment

In order to improve quality and shorten the processing time, various kinds of temperature control equipment covering from the highly accurate temperature/humidity environment control to the temperature control for wafers and glass substrates are provided. Custom made production is available upon request.

Cleanroom component equipment

Various kinds of cleanroom component equipment considering high efficiency, power saving and low noise are lined up, covering from an air shower to a garment stocker.

Airflow control equipmentVarious kinds of equipment controlling airflow, such as air curtains, FFU with louvers, draft chambers, and exhaust units, are provided.

Special environment booth

Various kinds of clean booths satisfying wide requirements, such as high cleanliness support, chemical pollution measures, and prevention of radiation exposure, are available.We do custom-made for necessary places, necessary sizes, and necessary performance.

Best choice from Solution examples 　　　　　　　　 for respective purposes and use

Energy saving effects

The equipment consumes less energy than the pressure chamber method requiring a large-sized air conditioner.Furthermore, you can operate the clean-room with economy since ON / OFF switching and air velocity adjustment can be made for each FFU independently.

Difference in Enery Required (estimates of Fuji Electric)

FFU-methodPressure chambermethod

Redundancy Above the system ceiling

Inside of the cleanroom


S o l u t i o n

C L E A N R O O M


Cleaning of inspection areas, dry areas1

Maintenance area

Air curtain

Separate areas having differentlevels of cleanliness2 3

Maintenance/Production area

Chemical FFU

Cleaning of coater/developers1

Photo Process

Heat-resisting FFU

Cleaning of thermal oxidation units2

Deposition process

Cleaning of EFEM3

Transportation

Precise temperature/humidity controlfor the resist-coating part4

Photo Process

FFU for equipment

Cleaning of the cleaning equipment5

Cleaning process

Detecting sensitive difference of pressures betweenthe inside and outside of the manufacturing equipment 6

F-Planet

Real-time monitoring of manufacturing environment7

Production line

Energy saving operation of the cleanroom8

Cleanroom

Cleanroom monitoring system

Wind direction/velocity sensorManufacturing equipment

Solution examples FPD Solution examples Semiconductor

Precise temperature/humidity control unit

Securing air velocity required for a large area

Large air volume FFUMaintenance/Production area P.11 P.12

P.12

P.12

P.31

P.12

Prevention of foreign substanceadhesion in a stocker4

Stocker area

Chemical washer

Removal of chemicalconstituents5 6

External air processingP.11

Quick cooling of glass substrates

Substrate quick cooling unitThin type FFU

Air cooling of glass substrates7

Photo process

Glass substrate temperaturestabilizing equipment

Temperature homogenization of substrate before photo process8 9

Photo process

Large-sized air shower for G10

Large-sized air showerAcceptance

Substrates after being baked are cooled with air at the cassette by the cassette. It is possible to cool the surface tempera-ture uniformly in a short time.

Surface temperature of substrates before entering the stepper is uniform and highly accurate. Dispersion of pattern transfer caused by uneven temperature can be reduced.

This is a large-sized air shower for large glass substrates of G10 size

Large-sized clean booth for G10

Inspection

Cold water coil

Temperature control forentire CR11

Entire cleanroom

Class 10 of G10-sized inspection equip-ment can be materialized in a large-sized clean booth of W8000 x D6000 x H3500.

Temperature of an entire cleanroom is controlled by the cold water coil.

Large-sized clean booth

Glass substrate cooling equipment

Even in a space with a high ceiling more than 10 m such as a stocker area, high speed flow of 0.8 m/s secures the wind velocity required for pass lines

Areas having different levels of cleanli-ness, which used to be separated with panels, can be separated with high-speed air blowers.

Cleanliness of 1,000 to 100,000 in a wide area can simply be cleaned with-out constructing a system ceiling.

Cleaning a stocker area efficiently with thick body and large air volume

Chemical pollutants that are problem in the FPD manufacturing process, such as NH3, SOx, NOx, are removed

Substrates after being baked can be cooled quickly by applying cold air to the glass efficiently with the special nozzle.

Pressure in the equipment can be controlled properly by detect-ing slight air velocity with the ultrasonic method.Preventing penetration of chemicals and particles.

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External air

Cleaned air

Cleaning inside of the equipment in accordance with the shape and the specifications suitable for the equipment installed.Chemical pollution of wafers can be reduced by applying improved materials/structures and incorporating chemical filters.

The unit can be installed in a small space with increasing tem-perature by employing the small-sized heat-resisting motor. Flexibility of installation positions will be expanded.

Particle adhesion can be reduced on EFEM by adjusting pres-sure between an FFU and FOUP or equipment.

FFU for manufacturing equipment

Atmosphere of some parts requiring precise temperature/humidity management, such as the resist-coating part can be controlled at high accuracy of +/-0.01℃ and +/-0.3% with our unique controlling method. Homogenization of resist film quality can be materialized.

Entire height of the equipment can be minimized by applying design suitable for the equipment structure.

Causes of fluctuation of yield rate can be determined by executing real-time monitoring of cleanliness, temperature and humidity in important processes.

Energy saving operation with eliminating waste can be materi-alized through optimization of the air volume of an FFU in com-bination with the environment sensor.

Photo process

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S o l u t i o n

Radiation shielding1 Sterilization and dehydration of medical equipment 2

Sterilization and dehydration

Stabilizing quality of medical equipment 3

Explosion-proof air shower

Cleanroom equipment supportingthe explosion-proof areas4

Explosion proof

Hot air dehydration booth

Clean dehydration of the pharmaceutical solution5

Dehydration

Air curtain

To prevent food contamination with foreign substances6

Cleanroom

Draft chamber

Safety air conditioning for toxic reagents7

Testing laboratory

Easy construction of a clean area8

Cleanroom


Preventing adhesion of dust in the coating line1

Coating

Highly accurate thermal chamber

Highly accurate temperature control forthe lens inspection process2

Inspection

F-Planet

Environmental management of the production line3

Production line

Local cleaning of the production line4

Solution examples Medicine/Foods Solution examples Automobile, Precision components, Lithium ion battery

Radiation shielding lead boothProduct filling

Dehumidification thermal boothLow humidity

Low dew point dry room

LED, Solar battery, Lithium ion battery5

Electrolyte filling process

Clean boothProduction line

Hot air dehydration sterilization bench FFU with diffuser

Dust collection unit

Dust can be collected efficiently by connecting to the suction hose.

Removal of dust in the cleanroom6

Cleanroom

Human bodies can be protected from the radiation emitted from a reagent, such as cancer drugs with the protective plateincorporating lead.

For the environment of processes being influenced by humidity, such as contact lens production, dehumidification and tempera-ture control can be provided with the freezer method.

Dehydration of solution, which took some time previously, can be executed in a short time by blowing hot air at high speed.

A general area and a clean area in a food factory can be separated without providing a shutter.Dust in a room can be removed quickly by balancing air intake and exhaust.

For hazardous areas requiring the explosion proof structure, such as pharmaceutical facto-ries and chemical factories, we can provide designs considering safety.

It is possible to dry products requiring sterilization such as sy-ringes of injectors efficiently with thermal insulation from outside. Since the heat-resisting filter is incorporated, it is not necessary to worry about contamination due to hot air.

Winding up of dust in the pre-coating line of automobiles can be prevented efficiently with the FFU with the special diffuserexpanding the blast area.

With the trend for monitoring of the respective processes, the production environment such as temperature, humidity and cleanliness can be controlled constantly.

It is possible to clean processes containing a lot of processing dust and problems of dust adhesion easily.

Environmental temperature in processes requiring highly accu-rate temperature control such as lens production of optical equipment can be controlled with accuracy of +/-0.005℃by applying our unique multi-step controlling method.



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Hazardous substances and harmful microorganisms can be cleaned and exhausted without diffusing them in the room.Explosion-proof specifications are supported, too.

It is easy to construct a clean area with Cleanliness Class 100,000 degrees, which is often used in pharmaceutical plants and food plants.

Humidity of environments of processes where humidity in the air must be avoided, such as lithium ion battery production can be reduced with the desiccant method.

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F F U

F F U

F F U

P.18 P.19 P.20

P.15 P.16 P.17 P.25 P.27

P.30P.29 P.29

By use, by functions and features, and by air volume Full lineups you can choose the best from various angles.

C L E A N R O O MC L E A N R O O M

WLFA WLFB WLFC WLFG WLFH

WLFD WLF E WLF F WLF I WL F J WL FK

Various types for the system ceiling are provided for cleaning up the entire room

Standard type■3 Φ 200 V■Full communication functions

Large-air volume type■Large air volume of 50 CMM

1-phase type■1 Φ 200 V

AC motor type■Simple structure■Easy operation

Stand-alone type■Clean booth etc.■Optimum for sole use

Thin type■Optimum for installing on 　the side panel of stockers

As conforming to the global standards, best performance is materialized in a limited installation spaceFFU for manufacturing equipment

F-Stage■1 Φ 200 V / 3 Φ 200 V■Super thin■Supporting RoHS

F-Cube-N■Supporting 1 Φ 100 V ordinary outlet■Filter-integrated type■Communication functions

Heat-resisting FFU (Super thin type) ■The system can be used in high　temperature environment (50℃).■Thin type with height of 105 to 120 mm

Heat-resisting FFU (High air velocity type) ■The system can be used in high 　temperature environment (50℃).■Air volume 0.65 m/s of the high 　static pressure fan

Chemical FFU■Optimum for chemical contamination measures for the manufacturing equipment such as coaters and developers■Easily replaceable chemical filters

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製造中止EN


F F U

Features of Fuji FFU

Type Grid size (the production range is shown in the brackets)

Power supplyspecifications Adaptable controller

DC210W

DC600W

DC210W

AC200W

DC170W

DC100W×2

3Φ200V

3Φ200V

1Φ200V

3Φ200V

3Φ200V

3Φ200V

D750×W1500（D:500～）（W:～1800）

D750×W1500（D:500～）（W:～1800）

D610×W1220（D:500～）（W:～1800）

D610×W1220（D:500～）（W:～1800）

D610×W1220（D:500～）（W:～1800）

D1200×W1500（D:500～）（W:～1800）

SDR3204-2R-TD（4C4M）

BFFU750

BFFU250-1P

－

BDR170T

SDR3204-2R-TD（4C4M）

Motor Upper sidecommunication

RS485

CAN

CAN

CAN

－

－

RS485

Communicationmethod

Number of small-scale systems:10 to several 100 units

For mounting onthe side panel of the stocker

FFU controllerMultiple operation controllerPatentedPatented

SDR3204-2R-TDF-Stage［WLFG］ F-Cube-N［WLFH］

Standard typeWLFA

Thin typeWLFF

Large-air volume typeWLFB

1-phase typeWLFC

AC motor typeWLFD

Stand-alone typeWLFE

Custom type for equipment

WLFI WLFJ WLFK

Standard type for equipment

Standard type WLFA

F F UF i e l d 1

P.15

P.16

P.17

P.18

P.19

P.23

P.23

P.20

BFFU250（1C1M）BFFU1000（1C4M）

BFFU500（1C2M）BFFU1000（4C4M）

Heat-resisting Chemical

F-StageWLFG

F-Cube-NWLFH

FFU specifications

You can accurately select a system suitable for the respective use.

Select for use

Number of large-scale systems:100 to several 10,000 units

Clean booth

Installed on themanufacturing equipment

Power supplyspecifications

3-phase

3-phase

1-phase

1-phaseVariableair volume

Available

Available Available

Available

Not available

Not available

Not availableNot available

Power supplyspecifications

Variableair volume

Dedicateddesign

Dedicateddesign

*It is optionally possible to output abnormal signals externally

Standard typeWLFA

Large-air volume typeWLFB

1-phase typeWLFC

AC motor typeWLFD

Stand-alone typeWLFE

Thin typeWLFF

Available

Available

Available

Not available*

Not available*

Available

Power supplyFilter

Communication functionsThicknessStandard

1Φ200 V / 3Φ200 VHEPA, ULPA selectableNot available115 mm *1

RoHS (Supporting CE optionally) *2

1Φ100 V General outlet / 1Φ200 V (Optional) / DC 24 V (Optional)ULPA is incorporated as standard (HEPA selectable for specific sizes only) The remote air volume adjustment and the failure monitoring are available optionally150 mmRoHS (Optional) /CE (Optional)

*1 Thickness of the main unit when 40 mm filter is used.　*2 F-Stage 61, F-Cube 122 only

Reliable performanceWe have abundant experience for more than 40 years as a supplier of the clean equipment and have supplied more than 500,000 units of FFUs.

Abundant lineupsVarious types of FFUs such as the large air volume type that is the highest in the industry and the thin type optimum for installing on the side panel of the stocker are available.

Selectable materialsThe standard material for casing is the coated steel sheet having superior corrosion resistance and cost performance. However, various kinds of materials such as stainless steel are selectable according to the purpose of use.

Size variationVarious sizes of FFUs can be manufactured according to the grid dimensions and the available installation space.

Reducing the work loadBy using the multiple operation controller, the number of cable connection points can be reduced (1/4 comparison with conventional) and the installation cost can be saved, while the launching time of the cleanroom can be shortened by shortening the installation period.

Improvement of reliabilityOccurrence of communication errors due to defective connection of cables and external noises can be reduced.

Industry highest energy-saving motorThe brushless DC motor having superior efficiency in comparison with the induction motor is adopted as standard.Industry highest energy-saving performance has been materialized.

Feature

1Feature

2

Feature

4Feature

3

Feature

5

Airfoil high efficiency fanThe waterwheel designing know-how of the hydro power generation engi-neering, our traditional business field, is applied to fan designing.By adopting the airfoil section in the fan shape, the effi-ciency has been improved. *In 1980, we had adopted the turbo fan to the FFU for the first time in the world.　The turbo fan type becomes currently the mainstream in the world.

Adjustable air volume to the optimumBy using our core technology, power electronics technology, highly accurate speed control be-comes possible.You can set the optimum air volume for your use environment.The large-air volume type of the industry highest class is also included in our lineups.

Surprising quietnessThe lowest level of noise in the class has been material-ized by implementing the inlet of the fan making smooth flow and the rectifier structure in the unitThe system does not affect to the surrounding environ-ment with the design considering prevention of vibration.

Multiple operation controllerThis is our unique control system capable of operating multiple FFUs with a single controller.Since installation can be simplified, it is optimum for a cleanroom system using many FFUs.

Controller (1C4M) * 1 controller: 4 motors

Sub FFU

Sub FFUSub FFU

Main FFU

Power supply cable Communication cable Connection cable betweenMain FFU and Sub FFU

The controller controlling FFU is our core technology evolved from our inverter technology.

Major features

Various kinds of DC-FFU are equipped with the controller. For details, refer to P. 21 to P. 22.

Highly efficient conversion (AC-DC-AC) Controllability (built-in PWM control circuit)Remote operability (CAN/RS485 communication system) Current limit circuitLow-voltage protection circuitRotational speed detection in BLDC sensorless motor

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Comparison of FFU for equipment


F F U

Control boxOutline dimensional drawing

Outline dimensional drawing

Rating plate

(Including the rivet head 1469.6)

Fan maintenance direction

(Filter size: 1460 x 710)

1464

1467

1464

1467

18

1460 (Filter size)

(1)

(2) (1.5)

Power supply cableVCTF 2.0Sq 4 cores 2 m 2 sets Communication cable

Shield 0.2Sq 2 cores RS485 2 m 2 sets

1464 ±1

1464 ±1Rivet

Filter

1464

120

1.6(1.2)

(1460) (2)

FFU8

② ①

270

365

47.4

2.0

1.5

1.0

0.5

0.0

600

500

400

300

200

100

00 10 20 30 40 50 60 0 10 20 30 40 50 60

1400rpm1300rpm1200rpm1100rpm1000rpm900rpm

1450rpm1400rpm1300rpm1200rpm1100rpm1000rpm900rpm800rpm

1.00.90.80.70.60.50.40.30.20.10.0

300

250

200

150

100

50

00 5 10 15 20 25 30 35 40 50450 5 10 15 20 25 30 35 40 5045

Standard type WLFA Large-air volume type WLFB

Performance curve Performance curveAir volume/Static pressure Air volume/Static pressure

Input power Current Input power Current

Total static pressure (Static pressure of the blow

er) [Pa]

Input power [W

]

Current [A]


er) [Pa]

Input power [W

]

Current [A]

Air volume [m3/min] Air volume [m3/min]

Air volume [m3/min] Air volume [m3/min] Air volume [m3/min] Air volume [m3/min]


714 ±1(30)

22010

22010

91

255245259

714 ±1

21063

Loader connection port (Modular)

Power/Operation/Abnormality indicator lampPower supply Sw

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Rotating direction


450

400

350

300

250

200

150

100

50

00 5 10 15 20 25 30 35 40 5045

600

500

400

300

200

100

00 10 20 30 40 50 60 70

5555 5959 5858 6060 616166dB(A)66dB(A)

4646 4848 5151 5353 5555 5757 58dB(A)58dB(A)

4343


F F U

Performance curvePerformance curve

WLF00単相 WLF0170W

1224 ±1

1224

120(1220) (2)

FFU

Filter

1227

1220 (filter size)

1224

1227

18

(1)

(2) (1.5)

1224

0 5 10 15 20 25 30 35 40 450 5 10 15 20 25 30 35 40 45

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

0.1

0.0

160

140

120

100

80

60

40

20

0

1100rpm1000rpm900rpm800rpm

AC200V60Hz

AC200V50Hz

0.8

0.7

0.6

170160150140130120110100

908070

0 5 10 15 20 25 4030 35 0 5 10 15 20 25 4030 35

1224 ±1

Rivet

M4 terminal block

Rating plate

Terminal block cover

1.6(1.2)

8

1-phase type WLFC AC motor type WLFD

Power supply cableVCTF 2.0Sq 3 cores 2 m 2 sets

Communication cableShield 0.2Sq 2 cores RS485 2 m 2 sets

Electric wire fixture


(Filter size: 1220 x 610)


614 ±1

614

63210

Input power Current


er) [Pa]

Input power [W

]

Current [A]

Air volume [m3/min]


Input power Current


er) [Pa]

Input power [W

]

Current [A]

Air volume [m3/min]


(30)220

22010

(10)

Loader connection port (Modular)

Power/Operation/Abnormality indication lampPower supply Sw

Fi

el

d

1

Outline dimensional drawing Outline dimensional drawing

300

250

200

150

100

50

00 5 10 15 20 25 30 35 40 45

300

250

200

150

100

50

00 5 10 15 20 25 4030 35

47475252

5454

55dB(A)55dB(A) 51dB(A)51dB(A)

4747

Air volume/Static pressure Air volume/Static pressure


F F U

Performance curvePerformance curve

Field

1227

1227

18

1220 (filter size)

(1)

(2) (1.5)

1224

1224

1493

1445

300 300 300 30018 nut sert (for filter connection)

Flange (1.6t)

Handl

FFU fixture (To be provided by the contractor)

900

Sub FFU motor cable 2

Rating plate

Sub FFU motor cable 1

(L＝400)

(L=400)

150

1423

16.5

354

100％90％80％70％60％50％

0.8

0.7

0.6

0.5

0.4

0.3

0.2

0.1

0.0

250

200

150

100

50

00 5 10 15 20 25 30 35 40 45 50 0 5 10 15 20 25 30 35 40 45 50

Stand-alone type WLFE Thin type WLFF

Rating plate

Terminal block cover

614

22010

(30)220

(10)

Input power Current


er) [Pa]


er) [Pa]

Input power [W

]

Current [A]

Air volume [m3/min]


Input power Current

Input power [W

]

Current [A]

Air volume [m3/min]


1193

1145

6120

300300

300

1460 (Filter size)

M4 nut sert

Fi

el

d

1

Outline dimensional drawing Outline dimensional drawing

400

350

300

250

200

150

100

50

00 5 10 15 20 25 30 35 40 45 50

37374343

47475151

5454 55dB(A)55dB(A)

1500rpm

1400rpm

1300rpm

1200rpm

1100rpm

1000rpm

900rpm

800rpm

300

250

200

150

100

50

00 5 10 15 20 25 30 35 40 45

4444 4646 54545454 5656 5757

525259dB(A)59dB(A)

1.0

0.8

0.6

0.4

0.2

0.00 5 10 15 20 25 30 35 40 450 5 10 15 20 25 30 35 40 45

250

200

150

100

50

0

Air volume/Static pressure Air volume/Static pressure


F F U

Controller specifications Controller specifications

Field

Rated electric powerRated voltageRated currentAllowable overload currentMain power supply

Rated input currentLoss

TypeType

Rated voltage

Rated current

Allowable overload current

Main power supply

Voltage/Frequency variation

Unbalance between voltage phases

Rated input current

Required power capacity

Speed control range

Speed accuracy

Carrier frequency

Speed setting method

Speed setting resolution

Controlling method

Rotating direction

Instantaneous voltage drop capacity

Acceleration/Deceleration time

Electrical specifications

Communication method

Synchronization scheme

Communication rate

Number of controllers to be connected

Failure output (External I/O)

Charge lamp (Power supply base board)

Status indication

Communication request

Communication response

Communication established

Processing inspection

Power supply

Operation

Failure reset switch

Applicable motor type

Motor rated output

Number of motors connected

Tolerable motor wire length

Applicable motor type

Number of electric motor connected

Tolerable motor wire length

Protection

Protection

Inrush current control functionOperation information memory functionRoHSCEDimensions (W x D x H) mmWeight

RS485 communication type CAN communication type

3-phase 200 V (Nominal)

0.9 A (per 1 motor)

110%-30s of the rated current

Within 2%

3.1 A (Reference value)

1.1 kVA

500 to 1450 min -1

+/-3% for the set value of the maximum speed

About 15 kHz

Upper side communication command or handy loader

Upper side communication command: 1 min -1

Handy loader: 10 min -1

EIA RS-485

2-wire half-duplex communication

Asynchronous communication

38,400 bps

Max. 31 units (Motor max. 124 units)

-

Green: LED 1 (Receiving: On, No receiving signal: Off)

Green: LED 2 (Transmitting: On, No transmitting signal: Off)

Red: LED 3 (Normal: Off, Abnormal: On)

Orange: LED 9 (Normal: Off, Abnormal: Flashing )

Green: LED 8 (Auto mode: On, Manual mode: Flashing)

SW1 Push switch

GCG21155-TL8FE21

210 W / 1450 min -1

1 - 4 units

Max 12 m

3-phase 200 to 230 V, 50/60 Hz

Voltage: +/-10% Frequency: +/-5%

Only normal rotating direction


0.87 A

130%-30s of the rated current

Within 3%

0.9 A

310 VA

250 to 1350 min -1

+/-4% for the set value of the maximum speed

About 16 kHz

Internal variable resister, external variable resister or the externally set voltage

1/256 for the set value of the maximum speed

Sine wave PWM control

Set with parameters (Factory default: 20 seconds)

-

-

-

-

-

C contact of the relay

Red: LED5 (To be turned on when the DC intermediate voltage is about 50 V or more)

-

-

-

Orange: LED 2 to 4 (Normal: Flashing, Abnormal: On )

Red: LED 5 (Energized: On)

Green: LED 1 (Normal: On, Abnormal: Off)

SW2 Push switch

GCG2954-T8TD17B-c

170 W / 1350 min -1

1 unit

-

Built-in

Support

THD: 35% or less (Power supply voltage 200 V, at the time of the rated output operation, Harmonic order within 40)

95% (Power supply voltage 200 V, at the time of the rated output operation)

SDR3204-2R-TD BDR170-T

UGBTEF-12SKMK07 / GCG21155-TL8FE21 UGBTEF-12MKMK05A UGBTEF-12SKMK07 / GCG21155-TL8FE21

1 unit 1 - 4 units (Switchable)1 unit1 - 2 units (Switchable)

- Max 9 m -

－

--

Max 12 m

750 W500 W (250 W x 2 unit)250 W 1000 W (250 W x 4 units)


1.0 Arms 1.0 Arms 1.0 Arms x 2 unit 3.3 Arms 1.0 Arms x 4 units

150% of the rated current – 1 minute

3-phase 200/220 V, 50/60 Hz1-phase 200/220 V, 50/60 Hz

Voltage: +/-10% Frequency: +/-5%Within 2%

1.07 Arms or less 1.17 Arms or less 2.14 Arms or less 3.51 Arms or less 4.3 Arms or less

6% or less (When rated operation)

Less than 165 V – within 15 msec (Operation continues at 165 V or more)

500 ～ 1100 min -1 500 ～ 1260 min -1 500 ～ 1450 min -1 500 ～ 1300 min -1

1260 min -11450 min -11260 min -11100 min -1

Set speed (Revolution) +/-1% Maximum revolution +/-1% or less

10 kHz

Upper side communications command handy loader

Available (Speed detection with the sensor-less method)

Counterclockwise when viewed from the shaft end

Highest rotational speed: 1 min -1 Rotational speed control: 1%

Not available

Acceleration: 60 sec. to the set value (from the stopping state) Deceleration: Free run

CAN ( ISO 11898) Ver. 2.0B Active

2-wire differential voltage method

Asynchronous

125 kbps

Available (LED: Yellow light)

Available (LED: Green light/Off)

Available (LED: Red light)

ON-OFF switch handy loader

Operation with the communication between upper side devices (CAN)

35% or less

2.0 mA or less (For 4 units of motor)0.5 mA or less (For 1 unit of motor)

3.5 V peak or less (Expected value) 3.5 V peak or less (Expected value)

AC1500V for 1 minuteAC1800V for 1 second

Input: 2 kV Conforming with IEC 61000-4-5Standard: EN 61000-6-2 Table-4, Between line and ground: 2 kV, Between line and line: 1 kV

Time differential start by the base board ID

Power outage >> Automatic restoration to the operating state before the power outage

Supported

-240 x 145 x 50

About 0.8 kg

240 x 145 x 63

About 0.8 kg

260 x 190 x 63

About 1.5 kg

240 x 145 x 50

About 1.9 kg About 1.8 kg

* Separate module components are required

340 x 190 x 65 260 x 220 x 65

Ou

tpu

t ratin

g

Rated

ou

tpu

tR

ated in

pu

tS

peed

con

trol

Operation control

Upper side com

munication

Disp

layO

peratio

nR

eliability

Inp

ut

po

wer su

pp

lyS

peed

con

trol

Op

eration

con

trol

Com

munication

specificationsD

isplay/O

peratio

n

Control base board

Sine wave PWM control, without the magnetic pole position detection sensor, V/F speed constant control, individual operation control for four units

Upper side communications command handy loader speed adjustment volume*

Available (Speed detection with the hall effect sensor)

3-phase 120 degrees energized – Square wave PWM control speed at a constant ratl

Operat ion with the communication between upper side devices (CAN)High/Low speed switch *

5.0 V peak or less (Expected value)

3-phase 120 degrees energized – Square wave PWM control speed constant control Sensor-less method

High/Low speed switch *

ON-OFF switch speed control volume *

The start from the stopping state shall be within 60s (when actual units are combined), while the stop from the operating state shall be free*run stop

Overcurrent, Overvoltage, Low voltage, Controller overheating, Overload, Power open phase, Motor step-out, Communication failure, Memory failure, CPU failure

Overcurrent, Overvoltage, Low voltage, Controller overheating, Overload, Hall effect sensor failure, Abnormal speed, Memory failure, CPU failure

Overcurrent, Overvoltage, Low-voltage, IGBT overheating, IGBT internal short-circuit, Overload, Power open phase, Motor cable disconnection, Abnormal speed , Start-up failure, Motor ground, DSP failure, Set parameter failure

This can be used as the failure indication lamp by connecting LED to the external I/O connector.

Red: LED 1 (To be turned on when the DC intermediate voltage is about 50V or more)

Green: LED 4 to 7 (Inverter outputting: On, Inverter stopping: Off, Failure: Flashing)

Orange: LED 2 to 4 (Normal: Indicating the rotation speed, Abnormal: indicating the abnormal contents)

If the voltage drops from the continuous operation rated voltage state 165 V or more to less than 165 V, the operation will continue for 15 ms. (Equivalent to 85% load)

BFFU250-1P (1C1M) Single unitoperation

BFFU250 (1C1M) Single unitoperation

BFFU750 (1C1M) Single unitoperation

BFFU500 (1C2M) 2 units

synchronized operation


synchronized operation


individual operation

100,000 hours or more (at surrounding temperature 30oC)

6A0-peak or less

About 2.1 kg

10 years or more (at surrounding temperature 40oC)

7A0-peak or less

About 0.9 kg

Harmonic contentLeak currentShaft voltageWithstand voltage

Surge breakdown voltage

Insulation resistanceEMCLife expectancy

Controlling method

Rotational directionStopping brake

Communication standardsCommunication methodSynchronization methodCommunication ratePower supply (energized) Operation (Operation/Stop) Failure (Error)

Direct operation

Remote operation

Rated speed (Revolution) Speed control rangeSpeed accuracyCarrier frequency

Speed setting method

Speed setting resolutionSpeed detection

10 MΩ or more (DC500V megger)

Immunity: EN 61800-3: 2004 2nd Env/Emission: EN 61800-3:2004 C3

100,000 hours or more (Electrolytic capacitor life @ 30oC)

Voltage/Frequency tolerable variation

Instantaneous voltage drop capacity

Start-up characteristics (Acceleration and deceleration)

Voltage unbalance Fi

el

d

1

EMC filter

RoHS

Relative harmonic content

Controller efficiency

Controller calculation life

Inrush current

Weight


FFU for equipment

Features of FFU for manufacturing equipment

Select with functions/features You can choose with air volume and air velocity

You can �nd the optimum answer with functions, features, and air volume.

FFU for equipment F i e l d 1

115mm*2

150mm

105mm

190mm

230mm

F-Stage（HEPA t=50mm）

F-Stage（HEPA t=40mm）

F-Cube-N（ULPA）

F-Cube-N（HEPA）

F-Cube-N

F-Stage

Chemical FFU

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

0.1

00 1.2 2.4 3.6 4.4 5.6 6.8 8.0 9.2 10.4 11.6 12.8 14.0 15.2 16.4 17.6 18.8 20 21.2

P.27

P.29

P.29

P.30

WLFG

WLFH

WLFI

WLFJ

WLFK

RoHSCE *3

Feature

1

Feature

2

Feature

3

Feature

4

Feature

5

Energy-saving/air volume variableAs adopting DC brushless motor to all series, energy-saving operation is possible at the optimum air volume with variable speed of the motor. In comparison with the conventional FFU, the power consumption has been reduced by about 30%. (Compared with our conventional type product)

Outgassing measures Outgassing is reduced by strictly selecting constituent materials for the main unit, the outlet, the filter and the sealing materials.

Conformance to RoHS, CE, SEMITo export to overseas, the system conforms to various standards. It is possible to issue the parameter sheet of the export trade control order.

Communication functionTo maximize excellent controllability of brushless DC motor, the air volume can be controlled by varying the motor speed through the communication function.

Since the FFU for equipment is attached to the manufacturing equipment, various functions are required as a part of the manufacturing equipment. Our FFU for equipment is capable of materializing the customersʼ various requirements.

Series StandardsThicknessFunctions/Features

1φ200V・3φ200Vsupporting immediate delivery*1

Filter selectable

1φ100Vsupporting immediate delivery*1

Communication functionRoHS (Optional)

RoHS

RoHS

-

Heat-resisting FFU (Ultra thin type)

Hot environment (50℃)Outgassing measure

Heat-resisting FFU (High air velocity type)

Hot environment (50℃)Outgassing measurewind speed 0.65 m/s

Outgassing measurecommunication function

equipped with thechemical filter

*1 Immediate delivery means about one week after receiving the order.

Thin typeThe highest level of thinness in the industry is materialized in consideration of installation in a limited space (Min 115 mm)

Air velocity [m/s]

Air volume [CMM]

Heat-resisting (Ultra thin)

Heat-resisting (High air velocity)

Chemical

Fi

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Discontinued


FFU for equipment

Field

F-Stage Ultra thin FFU with 115 mm thickness

WLF G2 1 D H61 1 0 0 0 - 0

HEPAH41H42H51H52H61H62H11H12

Size

400×400

500×500

610×610

1220×610

Thickness4050405040504050

ULPA-U42-U52-U62-U12

Size-

400×400-

500×500-

610×610-

1220×610

Thickness-50-50-50-50

F-Stage122G31D□1□□□□0-0

1220610

15.1（122）0.37（0.3）

54（54）77（73）16.5

CE support (Optional)

F-Stage61（CE）G21D□6□□□□1-0

*1 Only F-Stage 61 and F-Stage 122 are supporting*2 Other specifications are same as the above-mentioned standard product.


DWXY

F-Stage40400400370370

F-Stage50500500470470

F-Stage61610610580580

F-Stage12212206105801190

*For F-Stage 40, the control box shall be installed separately.

Standard accessory

Product revision number

CE support

1 ： ZAM2 ： SUS430

Main unit size

Filter

Power supplyAC 200V

Motor typeDC brushless motor

NameType (WLF-)

Dimensions [mm]

Power supplyMotor

Air volume [m3/min] *1Air velocity [m/s]

Main unit materialsSpeed controlling method

Noise [dB (A)] *2

Power consumption [W] *3Weight [kg]

Environmental regulations

Filter

F-Stage40 *4G01D□4□□□□0-0

400400

3.8（2.7） 0.5（0.35）

52（51）38（31）8.5

F-Stage50G11D□5□□□□0-0

500500

6.3（4.4）0.5（0.35）

51（50）44（38）9.6

F-Stage61G21D□6□□□□0-0

610610

9.4（6.6） 0.5（0.35）

53（49）65（45） 11.6

125 (115) * Main unit 75 mm + Filter thickness1Φ200V ／3Φ200VDC brushless motor

RoHS supportedHEPA（t=40mm／50mm）　99.99%（0.3μm）ULPA（t=50mm）　99.999%（0.1μm）

ZAM／SUS430Volume knob (0 to 100%)

3Φ200VSupporting

F-Stage122（CE）G31D□1□□□□1-0

Y

x

4-φ7

35 35

50

50

H（115）（40）

75

25

Optional

WLFG

G0　 400×400×75G1　 500×500×75G2　 610×610×75G3　 1220×610×75

D

W

DWH

Surprising thicknessThe thickness of 115 mm is materialized by combining with the filter newly developed.* When the HEPA filter (Thickness 40 mm) is used

Energy savingIn comparison with the conventional products, the energy consumption has been saved by about 34%(In comparison with our product of the biggest model)

Response to regulationsRoHS command is supported as standardCE marking is supported optionally.

Low noiseIn comparison with the conventional product, the noise has been reduced by about 10 dB. (In comparison with our product of the biggest model)

Type explanation example

Specifications

0 : Not available1 : Available



Casing materials

Abnormality indication lamp

Differential pressure gauge set

*40 mm thickness is HEPA filter only

*4 For F-Stage 40, the control box shall be installed separately. (Attached cable length: 2 m) ●Values in ( ) indicate the case of HEPA (t = 40 mm) .●If the general atmosphere is taken from the suction side, the filter of t = 50 mm of which retaining amount is large shall be selected.

*1 This air volume value is an indication in case of the HEPA filter and the external static pressure of 0 Pa.*2 This noise value is a value in case of the HEPA filter and the external static pressure of 0 Pa at 1.5 m directly under the filter.*3 This power consumption value is in case of the HEPA filter, the external static pressure of 0 Pa and 3Φ200V power supply.

NameType (WLF-) Power supplyCE marking

■ Main unit (with the power supply, Abnormal signal output terminal block, RUN/STOP switch, Speed adjustment volume) ■ Filter■ 2 m connection cable between the main unit and the controller box (F-Stage 40 only) ■ Pre-filter ■Mounting bracket

■ Differential pressure gauge ■ Tube (3 m) ■ Pitot tube

■ 4 m extension cable between the main unit and the controller box (F-Stage 40 only) *The cable length between the main unit and the controller box must be within 6 m in total.

Aperture dimensions

■ Abnormality indication lamp (If the indication lamp is mounted, abnormal signals are not outputted.)

■ CE marking support (F-Stage 61/F-Stage 122)

Fi

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2109463

製造中止EN


FFU for equipment

Field

F-Cube-N Compact FFU available with the ordinary1Φ100V power outlet

WLF H 40 U DStandard accessory

State

Power Off

In case of abnormal

In case of normal

Output

××○

SymbolUH

FilterULPA (Standard)

HEPA *1

Symbol-PDKACHT

Optional *2

Not availablePre-filter

Differential pressure tube + Pitot tubePitot tube only

Abnormal signal outputCeiling bracket (4 pieces)

Horizontal bracketFFU monitoring system *3*1 The HEPA specifications are supported in

Size 61 and 122 only.

Identification30405061122

Size300×300400×400500×500610×610610×1220

F-Cube-N-30UWLFH-30U□

300300

270270

2.20.52450

5


400400

370370

4.10.53755

6.4


500500

470470

6.60.56355

11.5


610610150580580

10.10.58758

13.5

RoHS (optional)


6101220

5801190

DC brushless motor 100 W

16.60.510359

20.5Available (optional)

F-Cube-N-61HWLFH-61H□

610610

580580

10.10.56851

13.5

F-Cube-N-122HWLFH-122H□

6101220

5801190

16.60.57657

20.5

DWHXY

ULPA99.999% or more（0.1μm）

1Φ100V 50/60 Hz/1 Φ200V (Optional)DC brushless motor 87 W

Aluminum (Side panel) ‒ SUS (Inlet part)

Not available

HEPA99.99% or more（0.3μm）

■ Power supply cable (2.0 m)

■ Pre-filter (P) ■ Abnormal signal output (A)

■ Differential pressure gauge + Pitot tube (D)

■ Ceiling bracket (C) ■ Horizontal bracket (H) ■ Pitot tube (K)

■ Main unit

F-Cube-N-30～61 F-Cube-N-122

1507.5

30 30 4040

4-　7

1507.5

●Installation/Aperture dimensions●Installation/Aperture dimensions

40 40

3030 4-　7

CAN

WLFH

D

Y

Y

HH

D

W

X

X

■ FFU monitoring system FMC100/200 (T)

Number of FMC200 to be connected: Max 254 units (4 ports)

Number of FMC100 to be connected: Max 100 units (1 port)

W

Optional Type explanation example

Specifications

Power construction is not requiredThe equipment can be operated with the ordinary power outlet (1φ100V) and any troublesome power construction is not re-quired. Operation is very simple such that connecting to the ordi-nary outlet for power supply and turning on the equipment only. (operatable with 1φ200V)

Filter built-in structureHighly accurate clean environment can be materialized with the built-in high-performance ULPA filter. Since the protective screen is attached to the surface, the filter may not be damaged at the time of installation

Air volume simple adjustmentThe air volume can be adjusted continuously with the adjustment dial. The operating status can be confirmed with the indication lamp. (It is optionally possible to install the adjustment dial externally.)

Communication function (Individual control, Group control, High-speed/low-speed switching, Collective fault output)

By combining the small FFU monitoring systems, the FFU air volume becomes variable and the failure monitoring is available. * The communication function is not available in F-Cube-N-30 and 40.

FFU monitoring systemFMC100/200

Abnormal signal outputFailure signals can be outputted by using the abnormal signal output cable (optional).

[○ : Conductive. ×: Nonconductive]

*2 Please list all optionals you need if any.*3 F-Cube-N-30 and 40 do not have communication function.

NameTypeFilter

Dust collection efficiency

Dimensions [mm]

Installation/Aperture dimensions

[mm]Power supply

MotorAir volume [m3/min]

Air verociy [m/s]Power consumption [W]

Noise [dB (A) ]Main unit materials

Weight [kg]Communication functionsEnvironmental regulations

Power supply SWAir volume adjustment knobExternal signal terminalsPower socket Power supply SW

Air volume adjustment knobExternal signal terminals

Power socketCaptive mounting (Floor-installation type or Hanging type)

Captive mounting (Floor-installation type or Hanging type)

■ Fixing bracket (4 pcs.)

(Optional ID numbers are shown in the brackets.)

Fi

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FFU for equipment

Field

Chemical FFU

Ultra thin type High air velocity type (0.65 m/s)

Chemical FFU P-Q properties

Air volume (CMM) 0.00 5.00 10.00 15.00 20.00 25.00

200.00180.00160.00140.00120.00100.0080.0060.0040.0020.000.00

N=1420rpm　　　N=1300rpm　　　N=1200rpm　　　N=1100rpm　　　N=1000rpm　　　N=900rpmN=800rpm　　　　N=700rpm　　　N=600rpm　　　N=500rpm　　　N= Chemical filter pressure loss

DescriptionItem

WLF I WL F J WLFK

CAN

230mm

Specifications Specifications

Heat-resisting FFUThis can be used in hot environments (50℃) Applicable standard RoHS/SEMI (Conformance)

Measures against outgassing

With the variable air volume with the volume knob and the failure output relay

This can be used in hot environmentsDesign withstanding hot environments such as a diffusion furnace (50℃)

Supporting RoHS/SEMI (Conformance) Supporting RoHS standards in consideration of the exports to the EU regionThe manufacturing equipment also conforms to SEMI of the standards for production devices.

Ultra thin typeUltra thin type of 105 to 120 mm is materialized by adopting the high static pressure fan.

Measures against outgassingMain unit: Polyester resin coatingOutlet: SUS 304 BA (Punching board) Filter: Boron-free filter (PTFE) Sealing materials: Low siloxane type

High air velocity typeThe outlet air velocity of 0.65 m/s is material-ized by using multiple units of the high static pressure fan.

NameTypeFilter

Particle collection efficiency

FFU dimensions [mm]

Power supplyAir volume [m3/min]

External static pressure [Pa]Noise [dB (A) ]

Main unit materialsWeight [kg]

Heat-resisting FFU (Ultra thin type)WLFI

ULPA filter Filter element: PTFE99.9999% or more 0.1 μm

1453W × 481D × 105H(Fan part 160 mm)1φ115V 50/60Hz

6.0（0.32m/s）070

Steel plate (Polyester resin coating)38

Heat-resisting FFU (High air velocity type)WLFJ

ULPA filter Filter element: PTFE99.9999% or more 0.1 μm

1000W × 350D × 190H

1φ115V 50/60Hz11.3（0.65m/s)

073

Steel plate (Polyester resin coating)24

DescriptionItemNameTypeFilter

Particle collection efficiencyFFU dimensions [mm]

Power supplyAir volume [m3/min]

Total static pressure [Pa]Maximum power consumption [W]

Noise [dB (A) ]Main unit materials

Weight [kg]

Thin type considering storage in the device (Main unit: H = 230 mm + Chemical H = 150 mm)

Optimum to chemical contamination measures of manufacturing devices such as coaters and developers

Measures against outgassing

Variable air volume and failure monitoring with communication function are available

Thin type 230 mmDevelopment of the thin type fan materialized 230 mm height.

Chemical filterFor the chemical filter removing chemical contaminants, the waffle cooker structure is employed for easy and quick replacement.

Waffle cooker structure

Measures against outgassingMain unit materials: SUS 430BAFilter: Boron-free filter (PTFE) Sealing materials: Low siloxane type

Communication function (Individual control, Group control, High-speed/low-speed switching, Collective fault output)

By combining the small FFU monitoring systems, the FFU air volume becomes variable and the failure monitoring is available.

Number of FMC200 to be connected: Max 254 units (4 ports) Number of FMC100 to be connected: Max 100 units (1 port)

FFU monitoring systemFMC100/200

Chemical FFUWLFK

ULPA filter Filter material: PTFE99.9999% or more 0.1 μm

1050W × 750D × 230H3φ200V 50/60Hz

16.0 (0.45m/s)16014065±2

SUS430BA65

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P.43 P.43

FFU monitoring systemF-SITE series

P.37 P.39 P.41

You can choose any type of the monitoring system as you like, covering from large-scale complex demands to small-scale specific demands.

Clean equipment integratedmonitoring system

Ｆ－ＳＩＴＥ－ＦＭＣ１００Ｆ－ＳＩＴＥ－ＦＭＣ２００Ｆ－ＳＩＴＥ－ＦＭＶ３００Ｆ－ＳＩＴＥ－ＦＭＣ５００Ｆ－ＳＩＴＥ－ＦＭＲ５００

Wide monitoringsystem

(Large scale)

Spot monitoringsystem

(Small scale)

F-SITE seriesSelect the FFU monitoring system from the series

FFU monitoring PC with Windows 7Monitoring of the environmental sensor (F-PLANET) Connection with the wind direction/ wind velocity sensorConnection with the temperature/humidity sensorConnection with PLCSupporting any I /F with various applications

FFU monitoring PC with Windows 7Connection with PLC

FFU monitoring systemFANET

Software-less FFU monitoring unitstandardizing our MONITOUCHRS-485 communication port isprovided as standard

FFU monitoring system withour unique CAN interfaceCAN communication port isprovided as standard

FFU monitoring system with our unique CAN interfaceCAN communication port is provided as standard

Small-scaleFFU monitoring system

S-ICIU

Small-scaleFFU monitoring system

ICIU

Small-scaleFFU display/operation unit

F-MONITOR

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Temperature controller

FFU

Ｆ-SITE-FMR500 Ｆ-SITE-FMC500

Max31

FFUＰＬＣMICREX-SX

Ｆ-SITE-FMV300

LSI・RS-485 communication is converted to LAN.

・The respective types of sensors are monitored through the browser.

LCI

Ｆ-SITE-FMC200

Ｆ－ＰＬＡＮＥＴ

2 FFU monitoring systemF i e l d

P.11

P.11

P.37

P.45 P.46

P.39

P.43

P.41

P.39P.37

Ｆ-SITE-FMC100

Ethernet RS485 CAN

P.43P.43

P.41

Maximum numberof FFU to beconnectedConcept

Wide monitoring systemSpot monitoring systemFMR500FMC500

・Large-scale system ・Custom support

ＣＡＮ＆ＲＳ４８５ＣＡＮ

FMV300FMC200FMC100

ＲＳ４８５ＣＡＮＣＡＮ

60,000 units370 units

Ｆ－ＳＩＴＥ－ＦＭＶ３００Ｆ－ＳＩＴＥ－ＦＭＣ２００

Ｆ－ＳＩＴＥ－ＦＭＣ１００

Ｆ－ＳＩＴＥ－ＦＭＲ５００Ｆ－ＳＩＴＥ－ＦＭＣ５００

Wind direction/velocity sensor

Ethernet

Ethernet

RS485

RS485

RS485

CAN

CAN CAN

http://www.fujielectric.co.jp/products/plc/lineup/sph/index.html

Environmental monitoringsensing system

You can choose the optimum system by connection size and communication type.This is an integrated monitoring system handling measurement values of various kinds of sensors such as the operating status of an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity.Visualization of the cleanroom is materialized so that the optimum manufacturing environment can beproduced as saving energy.

・Supporting temperature control・Supporting F-SITE ・Supporting

temperature control・Supporting F-SITE

31 x 4 x 2 system

・Temperature control・Energy-saving control・Smoke exhasut control・Transmission to other systems

For details, refer to Fuji integrated controllerseries SPH 3000 catalog (LH992a)

・CAN communication is converted to LAN.

Informationacquisition unit

You can choose by the connection size and the communication type

Custom

Simple type

FunctionsWide monitoring

system(Large scale)


(Small scale)

Widemonitoringsystem

(Large scale)


(Small scale)

FFU size (unit)

Communicationtype

Communicationtype

Up to 327 unitsUp to 254 unitsUp to 100 units

Up to 65,000 unitsUp to 65,000 units

RS-485 communication and the direct connection without the CAN communication converter

Cleanroom sensor

31 x 4 x 3 system Max. 254 units (4 ports) Max. 100 units (1 port)

Concept catalog

Concept catalog

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Concept catalog

Environmental monitoring system F-SITEConcept catalog



RS-485

XP/Window

s7XP/W

indows7

RS-485CAN is converted to Ethernet

FFU 372 units/F-M

ON

ITOR

FFU

65,000 units

RS-485 ~ F-M

ON

ITER

CAN

CAN

~ ICIU

FFU 254 units

CAN

CAN

~ S-ICIU

FFU 100 units

RS-485

CAN

CAN

CAN

CAN

FMR500

FMV300

FMC500

FMC200

FMC100

Electric specifications: EIA RS-485Communication method: 2-wire half-duplex communicationSynchronization method: Asynchronous communicationCommunication rate:Between FFU 38400 bpsTransmission distance 300 m (RS-485)

Model No.: SDR3204-2R-TDPower supply voltage: 3φ 200 V to 230 V 50/60 HzMotor rated output: 210 W/330 WApplicable motor: GCG21155-TL8FE21 GCG21155-TL8FE33Controlling method: Sine wave PWM controlProtection circuit

Output short circuitMotor step-outCommunication failureMemory failureCPU failureRetry function

OvercurrentOvervoltageLow voltageController overheatOverloadVoltage open phaseMotor ground

Output short circuitMotor step-outCommunication failureMemory failureCPU failureRetry function

OvercurrentOvervoltageLow voltageController overheatOverloadVoltage open phaseMotor ground

OvercurrentOvervoltageCooling heating valueMemory failureCPU failureMotor sensor disconnectionRevolution failure


Model No.: SDR-3204-2R-TDPower supply voltage: 3φ 200 V to 230 V 50/60 HzMotor rated output: 210 W/330 WApplicable motor: GCG21155-TL8FE21 GCG21155-TL8FE33Contolling method: Sine wave PWM controlProtection circuit:

Model No.: BFFU250* Others (Refer to FFU series controller specifications) Power supply voltage: 3φ 200 V to 230 V 50/60HzPower consumption: 200 W (Max)Motor: GCG2954-T8FFControlling method: PWM controlProtection circuit

Electrical specifications: EIA RS-485Communication method: 2-wire half-duplex communicationSynchronization method: Asynchronous communicationCommunication rate:Between FFU 38400 bpsTransmission distance 300 m (RS-485)

CAN protocol method (ISO11898)Data frame 64-bitVariable speed output: 255 stepsCommunication rate:Between FFU 125 kbpsTransmission distance 300 m (RS-485)



FFU monitoring system functions

Series Specifications

Monitoring Control Logging Security Others

FFU monitoring system functions FFU monitoring system functions

Com

munication m

ethod

Form

AC FFU

Operation speed

RS-485 is converted to Ethernet

FFU 65,000 units

Possible

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

Optional

4 units independent

Not possibleNot possible

Model No.: BFFU250* Refer to FFU series controller specificationsPower supply voltage: 3φ 200 V to 230 V 50/60HzPower consumption: 200 W (Max)Motor: GCG2954-T8FFControlling method: PWM controlProtection circuit


Model No.: BFFU250* Refer to FFU series controller specificationsPower supply voltage: 3φ 200 V to 230 V 50/60HzPower consumption: 200 W (Max)Motor: GCG2954-T8FFControlling method: PWM controlProtection circuit

Not possibleNot possible

Controlling status

FFU m

onitoring

FFU failure

Forced operation

Emergency stop

Smoke exhaust control

Fire control

Alarm history

Operation history

Operating privileges

Log-on

Storage

Trend function

Duplex

Window

s version

Password

Latest alarm indication

PLC failure *1

Com

munication failure

System condition screen

Equipment configurations

Com

munication base board


Num

ber of unit that can be connected

Measurement value indication, FFU base board current, Temperature

Comm

unication equipment

failure (G/W

)

Individual operation/Stop control

Operation/stop control

by group


by area


by floor

Control from

PLC of

other facilities

Electric output such as alarm

s

Transmission to

upper side systems

Parallel system with 2 units

or more is configurable

Multiple-m

otor operation/Independent operation

If you want to connect to the upper side system more easilyIf you want to remember the FFU revolution and use it arbitrarily after adjusting the revolution

It is possible to support for the FFU temperature controlling system for saving energyIf you want to provide integrated monitoring with the control system PC for manufacturing equipment

Connection of the environm

ental sensor etc.

Scheduled operation/stop

DC

BL m

otor controller base board

specifications

Wide m

onitoring systemW

ide monitoring system

Spot monitoring system



From LSI (LAN Serial Interface) to

the monitoring PC

LCI (LAN-CAN-Interface) to S.W.

HUB to Monitoring PC

*1 If PLC is optionally connected

4 units independent4 units independent

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Ｆ-SITE-FMR500

LSI LCI

Features of F-SITE-FMC500

Switchable by floor

Weekly schedule

Manual control group

Ethernet

RS485 CAN

System diagram

Operation historyAlarm history

FFU list indication

To the maintenance system screen

Floor monitoring

To the operationsystem screen

User registration

Password revision

Sound setting

You can search the operation history from max 3,000 items of data with the search criteria of FFU ID or Group etc.

The history can be recorded up to max. 3000 items.If the number of record exceeds 3,000 items, the oldest are deleted.


(Large scale)

Clean equipment integrated monitoring system

FFU monitoring Monitoring the environmental sensor (F-PLANET) Connection with the wind direction/velocity sensorConnection with the temperature/humidity sensorConnection with PLC

System configuration

Cleanroom temperature adjustment control■ This is the system for executing remote monitoring control of the temperature con-troller through the RS485 communication.On the upper side computer, the tempera-ture indicator controller network system is constructed to m o n i t o r a n d configure vari-ous parameters

Four-unitoperating FFU

Temperature controller

Max. 30 unitsThe power for the temperature controller is supplied separately.AC100V～240V

Materializing the visualizationThis is an integrated monitoring system handling measurement values of various kinds of sensors such as the operating status of an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity.Visualization of the cleanroom is materialized so that the optimum manufacturing environment can be produced as saving energy.

Feature

1Feature

2

Feature

3

Feature

5Feature

6

Feature

4

Monitoring screen indicating variousparameters simultaneouslyThe energy can be saved as securing the optimum cleanliness by controlling the revolution of DC-FFU.

FFU floor drawingSince the FFU arrangement is indicated on the construction CAD drawing, it is possible to monitor and operate at the indications of actual positions.

You can zoom in/out from the entire floor display with the zoomed display.You can operate the system as if operating CAD such as vertical and horizontal scrolling.

For the FFU revolution operation, you can operate individually, by group, by floor, for any area range.

The revolution of the FFU is indicated with five colors, and FFU symbols, such as failures, communication failures, are indicated with different colors.

System diagram drawingThis monitors communication status between PC and FFU interface or PC and PLC, and total number of operating FFUs.

The total number of FFUs, the total number of operating FFUs, and the total number of failures are indicated.

The communication status of interfaces of DC-FFU, the number of registered FFU, the number of operating FFU, and the number of failures are indicated.

The communication status of the PLC for control, the number of registered FFUs, the number operating FFUs, the number of failures and contents of PLC failures are indicated.

Schedule functionWith the efficient operation of facilities (CR scheduled operation), it is possible to reduce the power con-sumption to the adequate contracted power level.

You can register with drag & drop operation.

Operation patterns currently applied to the group

The control history of the selected group (Latest 1000 items)

Alarm monitoring screenFailure history of FFUs and communication units is indicated. You can narrow down the relevant data with the search function.

You can search the alarm history from max 10,000 items of data with conditions of FFU ID or Group etc.

Depending on the severity, alarms are classified into Heavy failure , Medium failure , and Light failure . The Serious failure is subject to FFU stop.

Operation history management Operation history of max. 3,000 items can be saved automatically. The history can be searched with conditions, so that maintenance management can be executed easily.

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System stop



FFU monitoring system (FANET)

Ｆ-SITE-FMC500

LCI

Flexible operability

LCI LCI

Ethernet

CAN CANCAN

With this application, you can easily design and revise the screen by yourself.Any complicated knowledge about software and PLC is not required.


(Large scale)


One-unitoperating type FFU

Two-unitoperating type FFU

Four-unitoperating type FFU

Feature

1Feature

2

Feature

3

■Data of FFU (Operation/Stop, revolution set value) is stored on the hard disk.

■ To lock the start/stop and the revolution setting operation of the FFU. If the operation is locked, release the lock. (A password must be entered.)

■ To operate the FFU

■ To stop the FFU

■ In the event of any abnormal conditions on the FFU, recover from the abnormality, and then press the Reset button to make the device ready for operation again.

■ To read the FFU data in the hard disk

■ To Change the revolution of the FFU

■ To display the communication status of LCI (Lan Can Interface). As the contents, the IP number, port, and connection status with PC are displayed.

■ To display the status of the FFU in the area selected with “FFU Parameters” As the contents, the revolution, the control current value, and the status are displayed.

FFU monitoring Connection with PLC

Features of F-SITE-FMC500

FFU layout screenThe FFU layout drawing exactly the same as the actual installation can be provided easily.With this application, you can revise and add layouts by yourself after completion of the layout drawing.(Knowledge of software is not required.)

Floor monitoring screen It is possible to monitor the respective floors of the cleanrooms.

Simple operationYou can operate simply with icons.

If there is any failed FFU, the symbol of the tree indication screen of the applicable floor is displayed in red.

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F-MONITOR

Ｆ-SITE-FMV300

Features of F-SITE-FMV300

Excellent operability

■ Main screen : To move to the respective operation screens

■ Status/setting screen : To move to abnormality list

■ Abnormality list screen : To comprehend abnormal status of the FFU

■ System control screen : To move to the respective systems (circuits)

■ Overall control screen : To operate FFUs of all circuits collectively

■ Operating revolution list screen : To comprehend revolution of the FFU

■ System control screen : To operate FFU of A-circuit collectively

■ Individual control screen : FFUs connected to the respective circuits

■ Individual control screen : To operate a single FFU

RS485 RS485

FFU monitoring

CN1 MJ2 MJ1

ContentsItem

ContentsItem

FFU A-01 FFU A-31

FFU B-31FFU B-01

FFU C-31FFU C-01

ContentsItem

F1

F2

F3

F4

F5

F6

F7

303.8 69

288

231

7

31.47215.2

Field

（max.300m）

（max.300m）

（max.300m）


Specifications

Functions


(Small scale)

RS-485 direct

Each system Main FFU 31 units (31 groups x 4 units = 124 units)Max. 124 units x 3 systems = 372 units

F1: Move to the main screenF2: Move to the state selection screenF3: Move to the overall control screenF4: Move to the system control selection screenF5: Move to the group control selection screenF6: Move to the individual control selection screenF7: Turn off the backlight

2 types (Intermittent single tone, Intermittent long tone)

Automatic turn-off the light 180 sec.

Unit form

Main unit to be used

Applicable FFU

Communication methodCommunication cable lengthSystem

Connection port shape

WLZCNS-SSSType: V810C　10.4-inch TFT color LC touch panel　Power supply AC 100 to 240 V 60 VADCBL-FFU made by Fuji Electric　Controller type: SDR3204-2R-TD　*Address setting is required previously.RS485Max. 300 m/port3 systemA-system connection port: MJ1 (RJ45)B-system connection port: MJ2 (RJ45)C-system connection port: CN1 (D-SUB 9-pin)

Number of units to be connected to the respective systems

Global function switch

BuzzerBacklight

Our POD MONITOUCH series are adopted and the monitoring/operation screen for FFU is mounted.With the touch panel method, it has excellent operability and visibility, and is ready for immediate operation without software.

Abnormal status list

Operating revolution list is displayedMulti-step operation revolution setting

Entire control

System control(by A/B/C systems)

Group control (Main FFU /Sub FFU 1 group)

Individual control

Status list of total number of FFU is displayed Connection (normal): Indication in blue Abnormal: Abnormal items are indicated in orange You can move to the group directive screen by touching on the display Disconnected FFU is not displayed

Numerical values of the revolution of the individual FFU are displayed by system Disconnected FFU is not displayedThe revolution of the five-step operation is set by entering a numerical value With the set value initialization functionOperation command　　　Five-step operation　　　　　　　　　　　　Specified revolution operationStop orderReset command

Operation command　　　Five-step operation　　　　　　　　　　　　Specified revolution operationStop orderReset command

Revolution indicationOperating status indicationOperation command　　　Five-step operation　　　　　　　　　　　　Specified revolution operationStop orderReset command

Revolution indicationOperating status indicationOperation command　　　Specified revolution operationStop order

Entire system System

A System

B System

C System

Individual

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FAULT

POWER

STATE MONITOR

GROUP MONITOR

FAULT MONITORFFU SETTINGGROUP SETTINGSUMMARY

STATE MONITOR

GROUP MONITOR

FAULT MONITORFFU SETTINGGROUP SETTINGHIGH/LOW SWITCH SETSUMMARY

CAN (ISO 11898) Ver. 2.0B Active125 kbps (High Speed)CAN protocolDedicated connectorAWM2919 VW-1 5P * 24AWG (11/0.16TA) is recommended.*1

Standard formatmax. 300 m

WLF-ICIUAC80 ~ 250 V 50/60 Hz

5 W

4

Max. 254 units (Number of FFU to be connected for a single ICIU)

170 x 320 x 62 mm2.5 kg

F-SITE-FMC200WLF-S-ICIU

DC 5V Adapter (AC100 ~ 240V 50/60Hz)2 W

1

Max. 100 units (Number of FFU to be connected for a single ICIU)

147 x 140 x 34 mm1 kg

CAN (ISO 11898) Ver. 2.0B Active125kbps

Dedicated connector

Max. 300 m/portLED-GreenLED-Red

LCD-4Line. 20CharacterPower switch (ON/OFF)

Various operation buttonsPossiblePossible

Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.)0 ~ 40°C

90% RH or less (No condensation)Fixing of the main unit with the side brackets (Screw to be used: M3)

F-SITE-FMC100

XXXXXX XXX XXX

XXXXXX XXXXXX XXXX

300

320

4.05

10

25020

ICIU

S-ICIU

Page Change

FAULT

Independent CANInterface Unit

OFF ON DC IN

POWER

Next RUN

SET / ESC Previous STOP

33.80

140

110

128

Simple LCDVarious kinds of control information of the registered FFU are displayed in the LCD. The FFU can be controlled by selecting the mode.

Simple operation buttonAll operations on this unit (setting of FFU etc.) shall be made with the buttons.

Abnormal LED to be identified at a glance

S-ICIU

S-ICIU

ICIU

ICIU

ICIU S-ICIU

Page ChangeSET/ESC

Next

Previous

RUNSTOP



Item

Mode

Item (main unit indication)

Button name Contents

Conditions for turning on the LED

Contents Mode Contents

Item Contents Remarks

CAN communication port specifications

Functions

Specifications


(Small scale)


(Small scale)

TypeRated inputPower consumptionCommunication I/F

Display

Operation

Speed control

Environment

Others

Communication standardsCommunication rateCommunication protocolConnectorConnection cable

Communication standardCommunication rateNumber of portsForm of portNumber of FFU to be connectedCommunication cable lengthICIU power supply (Energized)FFU abnormality detectionFFU status information

FFU collective controlFFU individual controlOperating environmentOperating temperature rangeOperating humidity rangeFixing methodDimensionsWeight

You can control and monitor the FFU individually or by group with simple operation without software.Furthermore, this is an operating/monitoring unit that can be connected easily through the CAN direct communication.

�is is our lightest FFU operating/monitoring unit.You can control and monitor individually or by group.Furthermore, this is an operating/monitoring unit that can be connected easily through the CAN direct communication.

*1: AWM2919 VW-1 80oC 30V 24AWG * 1PR SHIELDED LOW VOLTAGE COMPUTER CABLE: made by KDC (Korea)

This is the function displaying status of the registered FFU and controlling them individually.This is the function displaying status of the respective groups individually and controlling them by group.This function displays the contents of the abnormal conditions in the FFU.This is the function setting for enabling/disabling control of the FFU.This is the function assigning the FFU by group.This is the function setting values of high/low speed operation.This is the function confirming the registered FFU.

When any abnormal conditions generated on the FFU connected to this unit or the registered FFU.When this unit is energized

This is the function displaying status of the registered FFU and controlling them individually.This is the function displaying status of the respective groups individually and controlling them by group.This function displays the contents of the abnormal conditions in the FFU.This is the function setting for enabling/disabling control of the FFU.This is the function assigning the FFU by group.This is the function confirming the registered FFU.

To move the screenTo select the function and finalize the respective set valuesTo move to the next item on the menu screen, while counting up on the screen for setting values such as speedTo move to the previous item on the menu screen, while counting down on the screen for setting values such as speedTo use for starting the FFU operation and othersTo use for stopping the FFU operation and others

120

170

62.50

146.60

140

15

61.2025

1.75×7φ

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TIA 568A category five cables(Cable size: 24AWG 4P single-line Shield)

Specifications: Impedance 100 ohms

RJ45 (shield)

Heat shrinkable tube

Heat shrinkable tube

0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray)

0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray)

8 1

30

171

319

309

45

180

Specification of Pin

140

LSI Lan Sereal Interface LCI Lan Can Interface

Ethernet

CANRS485

LCI1-phase 100/200 V 50/60 HzMax. 200 mA (when 220 V power supply is used)10BASE-T / 100BASE-TX (Auto Detect)10 Mbps / 100 Mbps1RJ-45Max. 254 units (Number of LCI to be connected for a single unit of the monitoring PC)Max. 100mCAN (ISO 11898) Ver. 2.0B Active125 kbps4Dedicated connectorMax. 254 units (Number of FFU to be connected for a single unit of LCI)Max. 300 m/portAvailable (LED)Available (LED)Available (LED)Power supply switch (ON/OFF)Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.)5°C to 40°C85 %RH or less (No condensation)Set by connecting the dedicated PCFixing of the main unit with the side brackets (Screw to be used: M4)319 x 171x 45 [mm]1.6 kg

S.W.HUB

LSI Ethernet

S.W.HUB

LCI

⑧ ： Blown　■　⑦ ： White/Brown　□/■⑥ ： Orange　■⑤ ： White/Blue　□/■④ ： Blue　■　③ ： White/Orange　□/■② ： Green　■　　　　　① ： White/Green　□/■

1st Pair : ④&⑤2nd Pair : ③&⑥3rd Pair : ①&②4th Pair : ⑦&⑧

RJ45 (shield)

Specification of Pin⑧ ： Blown　■　⑦ ： White/Brown　□/■⑥ ： Orange　■⑤ ： White/Blue　□/■④ ： Blue　■　③ ： White/Orange　□/■② ： Green　■　　　　　① ： White/Green　□/■

1st Pair : ④&⑤2nd Pair : ③&⑥3rd Pair : ①&②4th Pair : ⑦&⑧

5051-045159

5051-035159

5557-04R5556

5559-04P5558

1 2 3 4 1 2 3

3

1

4

2

4

2

3

1

5051-04 5557-04R

5559-04P5051-03

FMR500

First circuit First circuit

Second circuit

Second circuit

Third circuit

Fourth circuit

FMC500FMR500

* Made by Molex

FFU FFU

FFU FFU

FFU #1

FFU

FFU

FFU #254FFUFFU

FFU FFU

FFU #31FFU #2

FFU #31FFU #2

FFU #1

FFU #1

LSI outlines LCI outlinesLSI is connected to a PC for the upper side monitoring control through Ethernet, communicates with the FFU controller in the cleanroom through RS-485, controls the speed of the FFU, and monitors the operating status. �is is required as the G/W for FMR500 (FFU monitoring system).

Quick cooperation between the control systems can be executed converting CAN (Controller Area Network) supporting the automotive LAN to Ethernet.�is is required as the G/W of th FMR500/FMC500 (FFU monitoring system)

RS-485 is mounted to two ports at maximum. Each port can be connected to 31 units of the controller, and it can be connected to 62 units of the controller in total.Since the controller can control four FFUs, it is possible to monitor and control a maximum of 248 FFUs.

The equipment can be connected to 254 units in total of the controller handling one to four circuits.

* Terminal resistance: 100 ohms is incorporated at the LSI side. The connector with terminal resister is connected to the final FFU.

System configuration System configuration

Cable specifications Connector specification

Connector specification

Cable specifications

Four-unit operation type 62 IDs in total 1 to 4 units

operation type 254 IDs in total

TIA 568A categoryWith shield

Five cables (Recommended)

Item Contents Item Contents

Item Contents

Specifications of the RS-485 communication part

TypeOperating temperatureOperating humidityStorage temperatureStorage humidityDielectric strength voltageNoise resistance (test conditions)Vibration resistance (test conditions)Shock resistance (test conditions)AtmosphereCooling methodInstallation locationRAMSurrounding I/FOperation indicationPower supply voltageDimensionsWeight

RS-485Half duplex, asynchronous communication38,400 bpsDate bit: 8 bitsParity bit: EvenStop bit: 1 bitFlow control: Not availableImpossibleModular jack RJ-45 type 1 channel

100 ohms resister is incorporated

Communication modeCommunication methodTransfer rate

Character configuration

Flow controlLive-line desorptionConnector

Terminal resistance

ConnectorPin

Connectorlayout

LSI0°C to 50°C (Main unit)20 to 90% RH (Non condensing)-20°C to 70°C20 to 90% RH (Non condensing)AC500 V，1 minute: Ethernet part1500 V rising edge 1 ns, 5 minutes (noise simulator)Conform to JIS C0040Conform to JIS C0041Without corrosive gasNatural air coolingIndoorFlash memory 1 MB system/for applicationRS-485, EthernetIn operation/error indicationLink and transmission/receptionAC 100 ~ 230 V 50 ~ 60 Hz180 x 170 x 36 [mm]735 g

OperationCommunication indication

Communication standardCommunication rateNumber of portsForm of portNumber of units to be connectedCommunication cable lengthCommunication standardCommunication rateNumber of portsForm of portNumber of units to be connectedCommunication cable lengthPower supply (Energized)LAN cable connectionCommunication status indication

Operating environmentOperating temperature rangeOperating humidity rangeMAC address settingFixing methodDimensionsWeight

12345678

N.C.N.C.N.C.RS-RS+N.C.N.C.N.C.

---

Input/outputInput/output

---

Not connected yetNot connected yetNot connected yet

Transmission/reception data (-)Transmission/reception data (+)

Not connected yetNot connected yetNot connected yet

Terminal No. Signal name Direction Function

Specifications

Specifications

170

36

Communication I/F upper side[Monitoring PC]

Communication I/F lower side[FFU]

Indication

OperationEnvironment

Others

TypeRated inputConsumption current

4-

1Blue

2White

3Shield

1Blue

2White

3Shield

4-

1Blue

2White

3Shield

4-

1Blue

2White

3Shield

Blue: Blue base, White: White base






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Cleanroom materials

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Field

Grid ceiling frame Lighting panel / Blank panel Bypass panel (Filter)

Joinery (Door, Window) Maintenance hatchMaintenance passage

Interior panel

Cleanroom materials

P.53 P.55P.54

P.51 P.52 P.53

Power distribution equipment

P.56 P.56

Free access floor

Materials required for providing total solution of the cleanroom are lined up.

Materials improving performance and maintenance efficiency of the cleanroom.

C L E A N R O O MC L E A N R O O M


Cleanroom materials

Lighting panel / Blank panel


Maintenance passage

This panel is dedicated to passages in consideration of safety.

Maintenance hatch

This is the ceiling access panel door to ensure airtightness.

P.56

P.55

FFU P.11

Cleanroom materialsF i e l d 3

P.55

Door / Window P.53

Free access floor P.56

Lighting integrated with ceiling panels.Also, it is possible to access from the ceiling for maintenance.

P.52

Interior panel

Low outgas materials are used for non-seal type airtight materials in consideration of the outgas pollution.

P.54

Dry coil

P.51

P.53Bypass panel (Filter)

Grid ceiling frame

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Concept catalog

High performance equipment functioning in the cleanroom more richly and safely is lined up. With our abundant experience in system construction for large-scale factories, we have commercialized various kinds of building materials under the keywords of outgas-less, short construction period, and safety. We can respond to your requirements with the total solution covering from design to construction of the cleanroom using high performance equipment.

It is possible to manufacture various sizes of FFU in accordance with the grid dimensions and the available installation spaces.

This is a frame having both flexibility and functionality in consideration of the earthquake-resistant structure.

This air volume adjustment panel is designed to have sufficient strength for walking on the panel.

This has excellent aperture ratio adjustment performance and flexibility of layout, and it is easy to make utility connections to devices installed in the upper part.


Cleanroom materials

Item Materials

Standard lengthWithstand load

Main frameAluminum drawing material

6000mm90kg/㎡

Sub frameAluminum drawing material

0～6000mm90kg/㎡

Joint part summary

Blank panel

LED

Hf fluorescent lamp

Type

LED ×48

FHF32EX-N-H*2 units

Light source/Lamp

AC100～240V50/60Hz

AC100～242V50/60Hz

Power supply

4800 lm

7040 lm（9900 lm）

Total flux

64W

65W（88W）

Powerconsumption

* Figures in ( ) are for high-efficiency models.

Grid ceiling frame Lighting panel/Blank panel

100 200 300 400 500 600 700 800

100908070605040302010

0

1798.00±1

748.00±1

1000 10000 100000

110105100

9590858075706560

Features

Features

Specifications

Specifications

Specifications

To prepare against any emergency cases with the frame of which earthquake resistance is enhanced

Joint sleeve

Sub frame

Main frame surface joint Joint sleeve

Main frame

Frame edge

Hanging bolt

Main frame

BracketM6 bolt

Sub frame

This is a frame having both flexibility and functionality in consideration of the earthquake-resistant structure.

Easy maintenance. Providing bright, wide and comfortable spaces

Lighting panel

LED lighting panel

LED lamp fittings details

◆ Lighting time/ luminance

◆ Luminance/number of lamps

* Test condition/current: 0.7 A　Surrounding temperature: 85℃　Semiconductor connection temperature: 125℃

Luminance [%

]

Luminance [%]

Lighting time [Hr]

Hf fluorescent lamp (65W)LED（64W）

Num

ber of lamps [U

nit] * Calculation conditionsW = 25 m　D = 10 ｍ　H = 5 m, Reflectance Ceiling 50％ Wall 30％ Flor 10％, Calculation height H = 0 m

Luminance [lx]

The ceiling can be constructed flatly. For the fluorescent lamp type, it is possible to replace the lamp from the ceiling so that access for maintenance is easy.The environmentally friendly LED type requires no maintenance and does not contain mercury.

System ceiling inside

It is possible to walkon the panel.

Maintenance can be executedfrom the top side.(Securing the room cleanliness.)

Cleanroom inside

Maintenance for the fluorescent lamp type can be executedfrom the inside of the bench.

It has excellent load bearing on the top of the lighting, so that it is possible to walk on it.

You can choose either steel or aluminum composite panel according to the purpose of use.

Steel folding type

Aluminum(Surface resincoating)

Polyethylene core Galvalume steel

Aluminum composite panel type

MaterialsBasic size

Withstand loadWorkability

Composite panel750×1500Ordinary

Good

Steel750×1500

GoodOrdinary

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Cleanroom materials

MaterialsZAM

Weight9kg

Size□750

特　長

Pressure loss characteristics

Surface material specifications

High corrosion-resistant galvanized steel sheet Galvalume Color steel sheet

Air volume of the aperture can be controlled, while the structure is strong and safe.

Bypass panel (Filter)

Thorough measures against outgassing. You can choose any one out of three types.

Interior panel

Furniture (Door, window)

20 40 60 80 100 120 1400.0

201816141210

86420

750

Valid W 3,510

Valid W 810

750

Upper frame (Split type)Aluminum extrusion materials

6063-T5

Aluminum extrusion materials6063-T5


Various kinds

Various kinds

Airtight sealEPDM

TPO

Panel fitting material

Airtight joint sealantPanel frame material


Lower frame

Removable joint sealant

Surface materials

Core materials

Features

Features

Features

Specifications

Specifications

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Air volume can be adjusted by installing the filter.Degrees of freedom for the bench layout can be expanded.

Air volume is secured while it is possible to walk on it.

As maintaining the required air volume, strength of the panel is also secured so that you can walk on it safely.Safety measures shall be provided at low costs.

* Size example

* Size example

* Size example

Pressure loss (Pa)

Air volume(CMM)

You can layout doors and windows as you like according to the aperture size and purpose of use.

For the door of the cleanroom, the single door, the family door, and high airtight specifications are available.

Valid H

2,060

Valid H

4,200

We will provide the optimum size for your layout and purpose of use.

Non-seal specifications in consideration of the outgassing contaminationThe low outgassing material is used for the airtight material.

ItemPanel thickness

Panel widthWall panel maximum length

Surface materialsCore materials

Jointing methodBreaking strength

Heat insulating performance (W/m2・K)Noise barrier performance

Standard40, 50

9008400

Color steel sheet, Hot-dip galvanized steel sheetUrethane foam

Fit angleOrdinary

0.5Ordinary

Heat insulating40, 50

-4000

-Heat insulating urethane resin

-High0.2

High

Non-combustible40, 50

-4000

- Metallic honeycomb

-Ordinary

2.1Ordinary

Fireproof80-

8000-

Rock wool-

High0.5

High

MediumSelf-corrosion-resistant features

Medium Medium

NonOrdinary

Slightly highNon

MediumHighNon

Slightly high

HighHighHigh

MediumExist High

Item

Corrosion-resistanceCorrosion-resistance of the disconnected part

Chemical resistanceAnti-fingerprint property

GassingPrice




Cleanroom materials

特　長

特　長

Maintenance hatch

Power distribution panel

Maintenance passage

Punching type SUS type Slit type

Slit typeDie-cast aluminum□500～□600

LowGoodLight

17～54%

Ni-Cr coatEpoxy coating

Chemical resistance,Whisker measures

Maintenance hatch, Maintenance passage Free access floor

All power to be used in an area is supplied collectively with a single unit.


1798

600

600

1200

600

2890

785 785 785535

3670

18351835

FFU

Lighting

TemperaturecontrollerFlow controlvalve

748

Features

Features

Features

Features

Specifications

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In the design stage, operability is considered. Easier maintenance has been materialized.

The layout plan can be provided easily by setting the appropriate size for the grid dimensions.

Side maintenance hatchCeiling maintenance hatch

Instead of providing the maintenance passage separately with the cost, you can execute maintenance more safely and easily by arranging the blank panels for walking at the time of designing.

Four types of the �oor materials are provided so that you can choose one in accordance with the purpose of use such as aperture ratio, layout, and withstanding load.

This has a high degree of freedom for the aperture ratio adjustment and layout, and it is easy to connect the device installed on it to the utility.

ItemMaterials

SizeWithstanding load

WorkabilityWeight

Aperture ratio

Surface finishing materials

Special specifications

Punching typeDie-cast aluminum□500～□600

MediumBadLight

16～60%Ni-Cr coat

Epoxy coatingSUS plate

Chemical resistance, Whisker measures

Slit typeDie-cast aluminum□500～□600

HighGood

Medium0%

Ni-Cr coatEpoxy coating

Chemical resistance, Whisker measures

SUS typeSUS304

□500～□600HighBad

Heavy50%

Non

-

This is the packaging power supply unit that is capable of supplying the power in an area, such as the FFU, the lighting, the flow control valve of the cooling coil, and the temperature controller, with a single unit.

Powerboard

Powerdistributionpanel

Power distribution panel





R e p l a c e m e n t

Do you have any problems with energy-saving measures?

It is possible to materialize energy savings by replacing the high-e�ciency equipment.

Another proposal / To save energy efficiently with replacement

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* Based on our estimation

Example

You can save the energy of

2,000 MWh equivalent to the cost saving

of 17 million yenannually by replacing 1,000 FFUs.

System flow for the FFU method System flow for the pressure chambermethod system flow

Systemrevision

EquipmentreplacementOA OAFilter High efficiency FFU

Device Device

Large blowerDry coil Dry coil



Replacement

Reason why the energy can be saved with the clean equipment Reasons why the replacement is effective

Ratio is high

The heat load is also reduced

Investment can be divided

If the power consumed in the semiconductor/LCD panel plant is classified by the purpose of use, about 40% of them are consumed in the air conditioning facilities, and it is understandable that implementation of clean equipment must be very effective for saving energy.

It is possible to reduce the exhaust heat by reviewing the cleanroom method and using high efficiency clean equipment. Then the heat load in the entire factory can be reduced and the power consumption of the refrigerating machine can be reduced.

By replacing the FFU partially in several years, you can save the investment budget required for a year and provide flexible energy-saving plans.

Production facility40%

Comparison of the blower heat removing energy by different cleanroom methods

Various piping12%

Pure water/Wastewater4%

Air conditioning facility40%

Lighting and so on4%

[kW/m2]

1

2

3

Another proposal

Three reasons why clean equipment is effective for saving energy

Pressure chamber method FFU method

0.12

0.1

0.08

0.06

0.04

0.02

0

0.089

0.021

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Motor

Fan

Control base board

The life of the clean equipment is about 10 years.A

Configuration of FFU

Life of the equipment

Control base board

Motor

The control base board uses the aluminum electrolytic capacitor as the smoothing filter. Generally, the life of the capacitor decides the life of the entire base board. The life may vary with use conditions, for instance the higher surrounding temperature, the shorter life. It is said that the estimated period for replacement is five years.

Although the life of the motor may be determined with various elements, it depends on the life of the bearing in most cases.Although the life of the bearing can be expressed with the mechanical life and the life of grease, we understand that the life of the motor is determined by the life of the grease since the influences on the life of the grease are significant. In general, the guaranteed life by the motor manufacturer shall be 20,000 hours.

* Reference “Recommendation for periodic inspections for general-purpose inverter” The Japan Electrical Manufacturer’s Association

Since the temperature of the cleanroom is stable approximately at 23oC throughout the year, and it is a good operational environment. The actual available period is longer than the guaranteed life in the most cases. However, the life of electrical components is generally two to five years, and it is ideal to replace the equipment at around ten years.

A

Reasons why the replacement is effective

Use of subsidies

You can use the subsidies for replacing the clean equipment.

2



△ ◎

△ ◎

DC-FFU

DC-FFU

Feedback

DC-FFU

DC-FFU

DC-FFU

Environmental sensor

DC-FFU

DC-FFU

DC-FFU

Old type FFU

13%

The latest type FFU

52%

Fuji Electric can materialize more effective and smooth energy-saving

FFU efficiency comparison

FAN comparison

Cleanroom energy saving operation system

Motor comparison

Induction motor

Sirrocco fan Low pressure inlet

DC brushless motor

Optimization of channel shape

High efficiency turbo fan

FFU monitoring system (F-SITE series)

FFU monitoring system (F-SITE series)

Total efficiency

Fan efficiency

Loss comparison

Motor efficiency

Vanes curved in various rotational directions

The induced current flows in the rotor due to the magnetic field. The resistive losses may occur in the rotor at that time.

Since the permanent magnet is used in the rotor, no copper loss may occur due to induced current in the rotor.

Relatively inexpensive production cost

This can output larger air volume among the centrifugal blowers

Vanes curbed to backward for the rotational direction

Efficiency has been improved by adopting the airfoil section

It has excellent efficiency with stable operation in a wide air volume range

Sirrocco fan

Induction motorDC brushless motor

(using the permanent magnet)

Turbo fan

By using the DC-FFU together with the FFU monitoring system (F-SITE series) developed by us, operation/stop and revolution and alarm history of the FFU can be managed collectively at the center, so that the cleanroom can be operated efficiently from the viewpoint of energy.

Graphical monitoring screen based on the architectural drawings provided with AutoCAD

Operation/Stop/Failure/Speed are indicated in colors

Warning with alarm tone

It is possible to operate, stop and control the revolution from the FFU list collectively.

Max. 10,000 items each of the operation history and the alarm history can be stored.

Temperature/humidityCleanlinessWind direction/wind velocity

Furthermore, the feedback operation can be made in accordance with the temperature, humidity and cleanliness by linking to our environmental sensor, so that energy saving with optimum operation of FFU can be materialized.

Individual air volume control

Environmental information

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step

Outlines

1

step

2

step

3

step

4

Flow of replacement Energy saving effect example

Replacement example

In case of Company-A

Please leave everything such as the energy saving effect estimation, installation, adjustment and test to Fuji Electric.

Site survey

Design

Installation on site

Local adjustment

Confirmation of the system configurationConfirmation of the component equipmentConfirmation of utilities

Operation confirmationCommissioning testCleanliness test

Equipment installationWiring

System optimization designSelection of equipmentEnergy saving effect estimationProvision of drawings

If you replace 1000 units of AC-FFU currently used with the DC-FFU, the following amount of energy can be saved.

In consideration of performance and efficiency, an AC-FFU with power consumption of 280 W can be replaced with a DC-FFU with power consumption of 65 W.(* Our calculation)

(280 W – 65 W) x 24 hours x 365 days x 1,000 units

Annual saving of energy is about 1,900 MWh

Intending the energy saving effect, FFU of the AC motor + Sirrocco fan type is replaced with the DC motor + Turbo fan typeNumber of units to be replaced: About 5,000 units

Energy saving effect

Planed value: 7,100 MWh (FFU saving energy amount)Actual value: 7,150 MWh (FFU saving energy amount)

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Fuji Electric can materialize more effective and smooth energy-saving 2



1970s 1980s 1990s 2000s 2010s

1500nm 800nm 600nm 350nm 250nm 180nm 130nm 90nm 65nm 45nm 32nm 22nm

Fuji Electric’s cleanroom is always next to the state-of-the-art technology

History of development of the cleanroom in Fuji Electric

Fuji Electric has always been the supplier of the most advanced cleanroom system for 40 years and made uninterrupted efforts to innovate technology and safety.

By using the full of unique engineering tools of Fuji Electric having abundant results and experiences, we can solve any kinds of issues that the customers currently faced.

Cleanroom laboratory

Fuji CR technical keyword

Semiconductor process rule

LC mother glass generation

Fuji CR actual results

Start development/manufacturing of clean products

Cleanroom energy saving promotion

Magnetic disk media factory CR system

System ceiling method CR DC brushless FFU Large air volume FFU Environmental monitoring systemNon-seal method interior panel

CR monitoring system Multiple operation FFUAC type FFU

Clean bench PDP factory CR system Organic EL factory clean systemCR system of carrier devices

Semiconductor factory CR system Chemical pollution measure CR system Localized response system

Use of the airflow simulation

LCD factory CR system

The 3rd generation The 10th generationThe 4th generation

The 5th generation

The 6th generationThe 7th and 8th generation

We have the cleanroom laboratory to verify and evaluate the developed products and verify the system design.

Analysis/evaluation technologyWe can analyze and evaluate par-ticles, airflow, temperature/humidity and chemical gases in the customer’s cleanroom, and then provide sugges-tions for improvement.

Airflow simulationWith the computer simulation, airflow status in the equipment and the clean-room, and the temperature distribu-tion are estimated.

Particle behavior simulationIt makes possible to simulate particle behavior in dynamic state.Behavior of dust at the time of equipment operation can be predicted,and the results can be useful for equipment and system design.

Equipment to be evaluatedBy using the wind tunnel test equipment and the anechoic chamber, we can execute various measurements and evaluation such as properties, noises, vibrations and radiated noise.

Fuji Electric can materialize more effective and smooth energy-saving

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Engineering tool

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