Cleanroom Suitability Assessment of Equipment according to upcoming ISO standards

Frank Buerger, Fraunhofer IPA, October 10th 2013, Dresden

Technology and Cleanliness Trends

MARKET TECHNOLOGY RESULTING CLEANROOM REQUIREMENTS

Status quo:

manufacturing of 300 mm wafers

line widths of approx. ~ 20 nm

Forecast:

manufacturing of 450 mm wafers

smaller line widths (approx. ~10 nm)

Up to 200 mm fabs:

ISO Class 4, ballroom-fabs / ISO Class 2 SMIF-fabs

300 mm fabs: room-in-room-concepts:

ISO Class 2, FOUP technology, minienvironments: surrounding: ISO Class 5

AMC/ESD-control is highly necessary

trend: higher local air cleanliness

Thin-Film Transistor Liquid Crystal Displays (TFT-LCDs)

Organic Light Emitting Diode (OLED)

flexible panels

Field Emission Displays (FED)

Requirements similar to semiconductor industry:

particles can cause shorts between layers

ESD is critical

AMC is not that critical

sunlight falling on silicon shakes loose electrons and create positive and negative charge

more efficiently cells, e.g. thin film technology or alternative contact methods

status quo at present: ISO Class 6 to greyrooms

more efficient contact methods (e.g. with thousands of tiny metal dots) requires cleanrooms like in chip industry

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What to take care of?

Equipment &Materials

PersonnelBehaviour

Cleanroom Technology

ControlAirborne Particles

LogisticsConcept

AvoidCross-Contamination

AvoidCross-Contamination

ProtectClean Environment

For clarifying “Cleanroom Suitability” task: focus on EQUIPMENT

Typical tool particle specifications

Particles per Wafer and Pass (PWP)

Equipment – overall particle performance on substrates even for vacuum

Testing possible for complete equipment

Localization of particle sources not possible

Airborne particles (ABP)

Equipment – local particle concentrations mostly on the wafer path

Only atmospheric tools with clean air supply

No international specification of the

particle emission behavior of tools/components without own clean air supply (ex. VDI 2083-9.1)

Messpunkt 14

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APB

ISO/TC 209 WG 11 - Assessment of suitability of equipment for cleanrooms

New Work Item Proposal accepted and activated by ISO/TC 209 in

February 2012

The new standard will provide basic requirements and guidance on suitability of equipments for cleanroom use

The scope of WG 11 will be limited to airborne and surface cleanliness for particles and chemicals (including outgassing)

Guidance will be provided for the mechanisms, methods, principles for determining the emissions and cleanliness levels

This equipment guidance will be linked closely to the cleanliness classes within the ISO-family (ISO 14644-1,-8,-9 and -10)

Links between contamination of interest and assessment standard

Contamination of interest

Category Item to be assessed

Applicable assessment

standard

Reference classification

standard Designation

particle airborne equipment 14644-14 14644-1 ISO-ACP

particle airborne materials 14644-xx 14644-1 ISO-ACP

particle surface equipment 14644-15 14644-9 ISO-SCP

particle surface materials 14644-xx 14644-9 ISO-SCP

chemical airborne equipment 14644-xx 14644-8 ISO-ACC

chemical airborne materials 14644-xx 14644-8 ISO-ACC

chemical surface equipment 14644-xx 14644-10 ISO-SCC

chemical surface materials 14644-xx 14644-10 ISO-SCC

Airborne Particle Cleanliness acc. to 14644-1 and NWIP

Particle concentration within air volume of 1 m3 cleanroom classification (acc. to 14644-1)

Particle concentration on single point of an equipment, “emitted into” air volume of 1 m3 equipment classification (acc. to NWIP-proposal)

Particle Emission Test of a Robot System – Interpretation of Measurement Values

ISO CLASS 3

ISO CLASS 5?

ISO CLASS 4 ?

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Test series ABB Robotics - Robots ; IRB 1600 ; Ax is 4 ; full velocity ;

Overv iew measuring points MP17 to MP20

Measuring point MP17

Measuring point MP18

Measuring point MP19

Measuring point MP20

Measurement point 1

Measurement point 2

Measurement point 3

Measurement point 4

Participants by Name and Country

Overall Time Line

© Fraunhofer IPA, Department Ultraclean Technology and Micromanufacturing

page 11

– Standards & Guidelines Compilation 1. NFPA 287: Standard Test Methods for Measurement of Flammability of Materials in Cleanrooms Using a Fire Propagation

Apparatus (FPA)

2. ISO 14644-5: Cleanrooms and associated controlled environments - Part 5: Operations

3. ISO 14644-7: Cleanrooms and associated controlled environments -- Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)

4. UNE-ENV 1631: CLEANROOM TECHNOLOGY. DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES.

5. ASTM E 1731: Standard Test Method for Gravimetric Determination of Nonvolatile Residue from Cleanroom Gloves

6. ASTM E 2312: Standard Practice for Tests of Cleanroom Materials

7. ASTM E 1549: Standard Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for Non-Hazardous and Hazardous Operations

8. JIS B 9917-3: Cleanrooms and associated controlled environments - Part 3: Test methods

9. JIS B 9917-1: Cleanrooms and associated controlled environments - Biocontamination control - Part 1: General principles and methods

10.VDI 2083, Part 17: Compatibility of materials with required cleanliness class and surface cleanliness

11.VDI 2083, Part 9.2: Verbrauchsmaterialien (german working draft, not finalysed yet)

12.VDI 2083, Part 9.1: Compatibility with required cleanliness and surface cleanliness

13.IEST-RP-CC031: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components

14.IEST-RP-CC040: Cleaning of Equipment Surfaces in the Cleanroom and Controlled Environments

15.MIL-HDBK-406: Contamination Control Technology: Cleaning Materials for Precision Pre-Cleaning and Use in Cleanrooms and Clean Work Stations

16.MIL-HDBK-407: Contamination Control Technology: Precision Cleaning Methods and Procedures

17.IEST-RP-CC032.1: Flexible Packaging Materials for Use in Cleanrooms and Other Controlled Environments

18.ASTM E 2090-06: Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy

19.ASTM E 2352: Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments-Cleanroom Operations

20.ASTM E 2217: Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas

Related Documents

Contact Information

Fraunhofer Institute for Manufacturing Engineering and Automation IPA Ultraclean Technology and Micromanufacturing Head of Department Dr. Udo Gommel | Phone +49 711 970-1633 | udo.gommel@ipa.fraunhofer.de Key Account Manager Certification Frank Buerger | Phone +49 711 970-1148 | frank.buerger@ipa.fraunhofer.de

ADDRESS: Nobelstr. 12, 70569 Stuttgart, Germany INTERNET: www.ipa.fraunhofer.de/cleanroom www.ipa-qualification.com www.tested-device.de