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CLEANROOM
FACILITY
HANDBOOK Issue 01
Date: 15 June 2016
Welcome to the Cleanroom. This handbook will hopefully contain enough information to guide you smoothly through your first weeks with the group as well as act as a reference for general information regarding facilities and procedures. It would be impossible to include everything in a document such as this so if you need any further information please ask any member of the Cleanroom Technical Staff who will be happy to help.
©2016 Universiti Putra Malaysia FK Cleanroom
SECTION 1
GENERAL INFORMATION
1.1 Using the cleanroom
Your supervisor should have shown you where you will be based and introduced you to the key members of staff.
1.1.1 Cleanroom form and operation hour
You will need to fill the cleanroom entry form and signed by supervisor and approved by cleanroom management committees.
Cleanroom operation hour
Monday to Friday 9.00 am to 5.00 pm
Saturday, Sunday
& Public Holidays Closed
1.1.2 Cleanroom Access Card
Cleanroom keys are available with Cleanroom Technical Staff. You will need your University ID card.
1.1.3 Cleanroom
If your work will involve processing in the Cleanroom you will need to apply for access to the facility. Details of this are given in section 2.
1.2 Useful contacts
1.2.1 General office
The General office is located in Department of Electrical and Electronic Engineering office. All the staff will be happy to help with any queries you may have.
1.2.2 Cleanroom
Mr. Mohd Shaiful Nizam B. Kamaruzzaman Telephone No. (Office): 03-89471593
Mobile No.: 019-202 6334
1.2.3 Safety advisor
Mr. Mohd Izhwan B. Muhamad Telephone No (Office) : 03 – 8946 4405
Mobile No.: 019-218 4637
1.2.4 Other Technical staff
Mr. Azhareesyah Aman Telephone No. (Office): 03-89466313
Mobile No.: 012-919 3845
1.3 General Facilities / Information
1.3.1 CD’s
CD’s are available, for which you will need a cost code (available from your supervisor).
1.3.2 Telephone system
Internal extension
There is a Universiti Putra Malaysia internal telephone directory for all the departments within the university, which is updated yearly. This contains internal telephone numbers, fax numbers and email addresses for all members of staff on the main campus and on satellite campuses. It
also contains a guide to the telephone system, campus maps and useful information on other services offered on the campus. Also included are Tie lines and short Dial codes for other external numbers e.g. other universities and hospital.
There is also an external Department of Electrical and Electronic Engineering directory that contains internal telephone numbers, fax number and email address for all members of staff in Department of Electrical and Electronic Engineering. This also contains Safety procedure information.
1.3.3 IT support
If you are experiencing any problems with your computer, then call Mr. Mohd Shaiful Nizam B. Kamaruzzaman (03-89471593).
1.3.4 First Aid
The First Aid box is kept in the laboratory. User must be aware the first aid location. Please refer to the map provided in Appendix A for the location of the first aid.
1.3.5 Fire Extinguisher
The Fire Extinguisher is kept in the laboratory. User must be aware the Fire Extinguisher location. Please refer to the map provided in Appendix A for the location of the first aid.
1.4 Computing Facilities
1.4.1 PCs.
There are several PCs available in the laboratory.
1.4.2 Software
There are many software packages generally available via the Department of Electrical and Electronic Engineering. If you feel that you require any other software that is not available through the above service you should discuss it with your supervisor.
1.4.3 Printers
There is a printer available in Microelectronic and Nanoelectronic laboratory. If you feel that you require any help, then call Mr. Mohd Shaiful Nizam B. Kamaruzzaman (03-89471593).
1.4.4 Device design Workstations
IC design Workstations is available in IC Design Laboratory at Level 8, Block A. Support for these are provided as below.
Mr. Mohd Najib B. Yaacob Telephone No. (Office): 03-89466313
1.5 Testing Lab
The testing equipment is located in Microelectronic and Nanoelectronic laboratory. To arrange to use the equipment, you should contact Mr. Azhareensyah Aman or Mr. Mohd Shaiful Nizam B. Kamaruzzaman
Heavily used equipment has an associated booking sheet is kept by Mr. Mohd Shaiful Nizam.
1.6 Externally Based Researchers.
It is always beneficial for researchers to spend time at the facility processing their own batches. Not only do they gain invaluable experience in a processing environment, but they are also hand to quickly deal with any queries that arise.
Section 2
THE CLEANROOM The Cleanroom facility is accessed via the door in the D2.2B building.
2.1. Permission to work in the clean room This area is restricted to authorized personnel only by means of an access card entry system. Before you have gained full authorization you should be accompanied by another member of staff. In order to gain permission to work in the cleanroom you must attend a Safety tour, a Working Practices tour and complete a safety and working practices test.
2.1.1. Safety Tour There are many potential dangerous gasses, chemicals and pieces of equipment used in a cleanroom and it is essential that you are aware of the risk and procedures. The document ‘Cleanroom hazards, safety measures and action in Emergency’ is contained in Appendix A; it gives details of the hazards and describes actions that should be taken under several circumstances. The contents of this document will be reinforced on the Safety tour, which can be arranged by contacting Mr. Mohd Izhwan, Mr. Azhareensyah or Dr. Nizam.
2.1.2. Working Practices Many different processes are carried out in the cleanroom, with a maximum of 10 batches being processed at any one time. It is therefore very important that we have procedures in place to prevent cross contamination, and promote the efficient use of the facilities. Several methods of working have been established and this will be described in the Working practices tour, there are also recorded in the document ‘Guide to working practices in the cleanroom’ (Appendix B). There may also be some uncommon or new processes for which guidelines have not been documented or agreed. In this circumstances advice should be sought from a member of the clean room support staff. DO NOT PROCEED WITH NEW PROCESSES THAT HAVE NOT BEEN AGREED
To arrange a Working Practices tour you should contact contacting Mr. Shaiful Nizam Kamaruzzaman.
2.1.3. Safety and Working Practices Test Once you have completed both the Working Practices and the Safety tours, and read the associated documents you should request a safety and working practices test. This can be arranged by contacting Mr. Mohd Izhwan Muhamad or Dr. Nizam Tamchek.
2.1.4. Access Cards Once you have satisfied the requirements of the Safety and Working Practice test the ‘Certificate of Authorisation to work in the Cleanroom’ at the start of Appendix A should be fully completed and shown to contacting Mr. Mohd Shaiful Nizam B. Kamaruzzaman (03-89471593), who will then issue you an access card to allow access to the clean room facility.
2.2. Clean room organization 2.2.1. Clothing
All persons working in the cleaning room are required to wear the provided coveralls in order to reduce contamination and prevent the build-up of electrical charge. A set of cleanroom clothing (jumpsuit, ESD shoes, ESD cap, glove) should be taken from cabinet. You should not enter the changing room wearing your normal outdoor shoes. ESD shoes are available. Alternatively you can have a pair of designated cleanroom shoes.
ENTRY AND EXIT OF PERSONNEL
A) At the office entrance Change street shoes to clean shoes. Visitor must wear shoe cover. Slide the access card at laboratory building door.
B) Pre-changing zone Remove and place all belongings at designated door. Keep the clean shoes inside the locker.
C) At the office entrance Change street shoes to clean shoes. Visitor must wear shoe cover. Slide the access card at laboratory building door.
GOWNING & DEGOWNING PROCEDURES
A. Gowning procedure (Using cleanroom garments)
1. Wash hands thoroughly. Smokers are highly recommended to drink water. 2. Cover all hair with hair cover. 3. Put on face mask. 4. Put on the hood. 5. Wear the jumpsuit carefully. Make sure jumpsuit does not touch any surfaces.
Secure all open ends at the wrists and arms. 6. Put on the booties. Do not touch the underside of the shoes with hands. 7. In front of the mirror, make sure cleanroom garments are tuck in properly. 8. Put on the cleanroom gloves. 9. Step on the sticky mat to remove any contaminants adhering to soles of booties. 10. Enter cleanroom through air shower.
B. Degowning procedure (Removing cleanroom garments)
1. Exit from the cleanroom to changing room through air shower. 2. Remove gloves and throw into the dustbin. 3. Remove booties and keep inside the locker. 4. Remove jumpsuit and hood. Hang properly to the hanger on the rack. 5. Remove hair cover and face mask and dispose to the dustbin. 6. Wear clean shoes.
2.2.2. Equipment and Services Any service problems should be reported to your supervisor and any equipment problems contacting Mr. Mohd Shaiful Nizam B. Kamaruzzaman. Any service and gas modification must be reported to contacting Dr. Nizam Tamchek before being undertaken. Permission to take items into the lab must be obtained from Dr. Nurul Amziah Md Yunus in order to ensure safety and cleanroom compatibility.
GOWNING PROCEDURES
1. Wear jumpsuit 2. Put on hair cover.
3. Wear the jumpsuit properly. 4. Wear booties.
5. Jumpsuit is wear appropriately. 6. Enter cleanroom through air shower.
DEGROWNING PROCEDURES.
1. Exit from air shower. 2. Remove hair cover and gloves
3. Remove jumpsuit and booties. 4. Put the jumpsuit back on it shelf/hang the suit.
*Note: Please throw hair cover and gloves properly into the dustbin.
EQUPMENT AVAILABLE AND PERSON IN CHARGE
Table 1: List of equipment available in cleanroom and person in charge.
No. Description Person in charge E-mail Address
1. Sputter Assoc. Prof. Dr. Mohd. Nizar b. Hamidon
2. Double side vacuum UV unit
Dr. Nurul Amziah Md Yunus
3. Laminator Dr. Nurul Amziah Md Yunus
4. Laminar flow Assoc. Prof. Dr. Mohd. Nizar b. Hamidon
5. Wire bonder Assoc. Prof. Dr. Mohd. Nizar b. Hamidon
6. Probe station Assoc. Prof. Dr. Roslina bt. Mohd. Sidek
7. Keithley characterization & measurement set
Assoc. Prof. Dr. Roslina bt. Mohd. Sidek
8. Pulse Laser Deposition
Assoc. Prof. Dr. Mohd. Nizar b. Hamidon
9 Spin Coater Dr. Nurul Amziah Md Yunus
10. Ultrasonic Bath Dr. Nurul Amziah Md Yunus
APPENDIX A
SAFETY DOCUMENTS
Certificate of Authorisation to work in the Cleanroom. Cleanroom hazards, safety measures and action in an emergency.
Department of Electrical and Electronic Engineering Universiti Putra Malaysia
Certification of Authorisation to use the cleanroom
This is to certify that:
_________________________________________________________
Has passed the clean room safety test and has sufficient knowledge of both:
a) Safety working practices and emergency procedures. b) Standard clean working practices to work in the cleanroom.
Signature & Stamp …………………………………. En. Mohd Izhwan Bin Muhamad Date …………………………………..
UNDERTAKING
I have read the following:
a) The Cleanroom safety policy b) The booklet : Cleanroom practices
I understand my obligations regarding my own safety and the safety of others, having regard to the especially hazardous nature of the clean room’s operations. I understand also that I must introduce no new chemicals, substances or equipment into the clean room without the agreement of En. Mohd Izhwan Bin Muhamad. Signed ……………………… Date ………………………………
UNIVERSITI PUTRA MALAYSIA CLEANROOM
CLEANROOM HAZARDS, SAFETY MEASURES AND ACTION IN EMERGENCY ISSUE: MAY 2014 PART A: HAZARDS 1.0 WET PROCESSES LINE AND RESEARCH WET LINE 1.1 HAZARDS
The chemicals used are generally corrosive and toxic, and several are extremely dangerous. Note especially: 1.1.1 Those containing HF in various concentrations:
Hydrofluoric acid (HF), SiO2 Etchant, Silox Glass Etch, Titanum Etch. HF is particularly dangerous and insidious because it penetrates skin rapidly and without much pain, so that it might go unnoticed until it is too late to avoid serious injury. In larger amounts it will remove vital calcium from the blood and cause death.
1.1.2 Resist Stripper (fuming nitric acid);
Extremely corrosive and powerful oxidising agent. Will consume all organic matter and many plastics rapidly (including gloves!!!), and can cause fire spontaneously.
1.2 PRECAUTIONS
1.2.1 For WET PROCESSING wear: Acid resistant (beige) gloves, PVC overalls, Visor.
1.2.2 Gloves must be tested for leaks before each use by inflating. They must be replaced if there is any sign of damage.
1.2.3 Ensure all wet-bench shields are down/in place.
1.2.4 Check fume exhausts are operating: a) Air downflow into perforated bench surface. b) Exhaust warning light in room not illuminated.
1.3 SAFETY FACILITIES
1.3.1 HF (Hydrofluoric acid) FIRST AID. HF burn cream is special marked box in each wet process area.
1.3.2 Spills kit within and fume clearance button just outside each area. (Spills clear-up
procedure – see ‘Action in Emergency’).
1.4 THICK FILM UNIT
The thick film furnace has HOT SURFACES. The thick film dryer has a moving belt – beware trapping loose tripping clothing.
2.0 ACIDS STORE AND DISPENSARY 2.1 HAZARDS As 1.1 2.2 PRECAUTIONS As 1.2
Also : Bottle carriers must be used to transfer chemicals to and from the store. Use the transfer hatch to move chemicals into the Wet Process Room.
2.3 SAFETY FACILITIES As 1.3 2.3.1 Rubber boots to be worn for spillage mop-up. Spill kit. 2.3.2 Safety shower fitted in each of these areas. 2.4 PPE As 1.2
3.0 SOLVENT STORE AND YELLOW ROOM 3.1 HAZARDS
Solvents are generally harmful and must not be inhaled to contact skin. Most are flammable, some toxic and ACETONE is highly flammable – a particular fire hazard.
3.2 PRECAUTIONS
3.2.1 Chemically protective (beige) gloves and eye protection to be used when dispensing or using solvents.
3.2.2 Use bottle carriers to transfer chemicals to and from the store.
3.3 SAFETY FACILITIES
3.3.1 Fire extinguisher dry powder (suitable for flammable liquid fire) in each of the areas.
3.3.2 Fire blanket in yellow room. 3.3.3 Water shower in dispensary. 3.3.4 WATER OUTLET in each process bench - Eye wash stations are now used for
washing eyes not the water sprays on the benches – be aware of their location while you are processing!
3.3.5 Spills kit within and fume clearance button just outside dispensary.
4.0 GASES
The facility’s gasses present various hazards, listed below. Note their characteristic smells to identify in event of leakage. (Full details of each gas may be found in a folder of SAFETY DATA SHEETS). 4.1 TOXIC AND VERY TOXIC GASES (These are listed in decreasing order of toxicity. ‘OEL’ = ‘Occupational Exposure Limit’ for 8 hours working day. ‘Pyrophoric” = Ignites spontaneously in air.
The very toxic hydrides marked with asterisk* are all diluted in either hydrogen or argon; the highest concentration stored of each is indicated).
4.2 FLAMMABLE AND COMBUSTILE CHEMICALS
Flammable and combustible chemicals are the most commonly used hazardous chemicals. The hazard of a flammable or combustible chemical is based on its flash point, and, in the case of a flammable chemical, its boiling point as well. The National Fire Protection Association (NFPA) has identified flammability classes from the flash point and boiling point data of chemicals. The following table lists some common flammable and combustible chemicals, their flash points and boiling points, and associated NFPA flammability classes:
4.2.1 Flammable Liquid
Class IA liquids shall include those liquids that have a flash point below 22.8°C (73°F) and a boiling point below 37.8°C (100°F). Class IB liquids shall include those liquids that have a flash point below 22.8°C (73°F) and a boiling point at or above 37.8°C (100°F). Class IC liquids shall include those liquids that have flash points at or above 22.8°C (73°F) but below 37.8°C (100°F).
4.2.2 Combustible Liquid
Class II shall include those liquids that have a flash point at or above 37.8°C (100°F) and below 60°C (140°F). Class IIIA shall include those liquids that have a flash point at or above 60°C (140°F) and below 93°C (200°F). Class IIIB shall include those liquids with a flash point at or above 93°C (200°F).
Degree of Fire Hazards
Class A Class B Class C Class D
High Moderate Low Minimal
Chemical Flash Point Boiling Point NFPA Class
° F ° C ° F ° C
Acetaldehyde -38 -39 69 21 IA
Dimethyl sulfide -36 -38 99 37 IA
Ethyl ether -49 -45 95 35 IA
Ethylene oxide -20 -29 55 13 IA
Pentane -57 -49 97 36 IA
Propane -157 -105 -44 -42 IA
Benzene 12 -11 176 80 IB
Carbon disulfide -22 -30 115 46 IB
Cyclohexane -4 -20 179 81 IB
Ethyl alcohol 55 13 173 78 IB
n-Hexane -7 -22 156 69 IB
Methyl alcohol 52 11 149 65 IB
Methyl ethyl ketone 16 -9 176 80 IB
Pyridine 68 20 239-241 116 IB
Tetrahydrofuran 6 -14 153 67 IB
Toluene 40 4 231 111 IB
Triethylamine 20 -7 193 89 IB
tert Butyl isocyanate 80 27 185-187 85-86 IC
Chlorobenzene 82 28 270 132 IC
Epichlorohydrin 88 31 239-243 115-117 IC
2-Nitropropane 75 24 248 120 IC
Xylene 81-90 27-32 280-291 138-144 IC
Acetic Acid, glacial 103 39 244 48 II
Bromobenzene 118 48 307-316 153-158 II
Formic Acid 156 69 213 101 II
Morpholine 100 38 263 128 II
Stoddard Solvent 100-140 38-60 300-400 150-200 II
Benzaldehyde 145 63 352 178 IIIA
Cyclohexanol 154 68 322 161 IIIA
Methacrylic Acid 170 77 316 158 IIIA
Nitrobenzene 190 88 412 211 IIIA
Tetrahydronaphthalene 160 71 406 208 IIIA
Benzyl Alcohol 213 101 401 205 IIIB
Caproic Acid 215 102 400 204 IIIB
Ethylene Glycol 232 111 388 198 IIIB
Phenyl Ether 239 115 498 258 IIIB
Stearic Acid 385 196 726 386 IIIB
4.3 IMPLANTATION GASES
Small canister liquid sources in implanter and room (these gases all ‘very toxic’ – OEL’s indicated). Arsenic trichloride 0.05 ppm Phosphorus trichloride 0.2 ppm Boron trifluoride 1.0 ppm Antimony pentachloride 0.5 mg/m3
4.4 GAS SAFETY FACILITIES 4.4.1 ‘MDA’ toxic gas central monitoring system.
Monitors for leakage of the ‘very toxic’ hydrides and flourides including germane and silane at the OEL level from the various equipment use points. Operates personnel EVACUATION ALARM.
4.4.2 Hydrogen and chlorine detectors at use points. These operate personnel EVACUATION ALARM. 4.4.3 Gas extract system
Extracts all cylinder cabinets and equipment gas usage points. In event of fan failure personnel EVACUATION ALARM operates.
4.4.4 Portable toxic hydride monitor. Used to test for pipework leakage.
4.4.5 Personnel EVACUATION ALARM. This may also be operated manually in the event of a strong smell of a recognisable toxic gas (see 4.1, 4.2 & 4.3).
4.4.6 Breathing apparatus (PPE). Must only be used by the trained personnel. Unauthorised use is
potentially lethal! Will be to attempt rescue in emergency.
5.0 ELECTRICAL AND RADIATION 5.1 HIGH VOLTAGE 5.1.1 UV Lamp 1 kV 5.1.2 Scanning Electron Microscope 30 kV 5.1.4 Sputter 1 kV
5.2 RADIATION 5.2.1 UV lamp U-V hazard 5.3 ELECTRICAL AND RADIATION SAFETY MEASURES
All electrically powered equipment is monitored for the safety as required by official regulations. Appropriate test labels appear on the various items of equipment. All equipment producing RF power is designed to produce leakage of RF power less than about one tenth the maximum recommended doses into a person situated
adjacent and is factory tested to this criterion. This leakage level is maintained by regular attention to the panel mechanical integrity and to electrical earth bonding.
PART B: ACTION IN EMERGENCY 1.0 GENERAL
1.1 In event of ACCIDENT general course of action. AMBULANCE : Phone 999 University Health Centre : Phone 03-89467332 University Security Division : Phone 0389466116 FIRST AIDERS: Use the First Aider. Report all accidents to Safety Officer. Report immediately any unusual condition – noise, temperature, etc.
1.2 FIRE ALARM BUTTONS
If assistance needed in any area in the any area in the clean room use the FIRE ALARM buttons.
1.3 EVACUATION ALARM
The general evacuation alarm is a very loud sounder which has a continually repeating falling tone. On hearing this: a) Leave IMMEDIATELY by nearest exit or emergency exit. b) Do not stop to remove clean clothing. c) Assemble in foyer - wait to be personally checked out.
2.0 CHEMICALS IN EYE OR ON PERSON
2.1 EYE Chemical in EYE must be treated as FIRST PRIORITY. The rule is: SPRAY WATER INTO EYE AS QUICKLY AS POSSIBLE. - as with other types of burn every moment of the time counts and speed will
reduce the severity of the final damage to body tissue. Before embarking on any chemical processing ensure a water spray is within reach.
Summary of action
a) IMMEDIATELY spray water into eye. b) CALL for help. c) CONTINUE water spray for 15 minutes. d) Subject to be taken to UNIVERSITY HEALTH CENTRE or
SERDANG HOSPITAL. Hospital Serdang: Phone 03-89475555
2.2 CHEMICAL ON PERSON a) IMMEDIATELY wash affected area using water spray or emergency shower,
REMOVE any contaminated clothing. b) CALL for help. c) CONTINUE washing for 15 minutes. d) SEEK medical attention – doctor or hospital.
------------------------------------------------------------------------------- HYDROFLUORIC ACID (HF) BURNS.
ESSENTIAL SPECIAL FIRST AID FOR SKIN. -------------------------------------------------------------------------------
3.0 TOXIC GAS INHALATION
RESCUERS must not expose themselves to gassing. The breathing apparatus must only be used by the trained personnel.
a) REMOVE subject to fresh air. b) If subject is conscious and the breathing: Maintain careful observation of
her/his condition.
c) If subject is, or becomes unconscious: Loosen clothing and place in recovery position. Watch carefully to see if breathing stops, in which case apply artificial resuscitation until breathing restarts.
d) Arrange early removal to hospital. e) Information on the gas responsible and brief details of treatment given must
accompany subject to hospital. Additional special treatment for exposure to AMMONIA gas.
f) Drench eyes or exposed skin with water.
4.0 ELECTRIC SHOCK
a) SWITCH OFF power source if necessary and if possible or remove subject from power using an insulating item (eg lab clothing)
b) Use mouth-to-mouth resuscitation if subject not breathing, and heart massage if necessary (instructions in charging room – look at room)
c) Call ambulance: 5.0 AMBULANCE
5.1 SMALL FIRES
Use either the RED/black or RED/blue fire extinguishers. To find location of fire extinguishers look on safety maps in clean room or changing room.
5.2 SMALL FLAMMABLE LIQUID FIRES Use ONLY the RED/blue dry powder extinguishers.
5.3 LARGER FIRES If any is large or getting out of control:
a) Leave IMMEDIATELY by nearest exit or emergency exit. b) Do not stop to remove cleanroom clothing. c) Sound fire alarm – but do not delay your exit! d) Assemble in the foyer – wait to be checked out.
This fire alarm for the cleanroom is the same. If you hear either a continuous or intermittent BELL the action is the same. Leave the building by the nearest fire exit and assemble in the foyer – wait to be checked out.
6.0 PRESENCE OF DANGEROUS GAS
6.1 FIRE ALARM
This will sound in event of leakage of the ‘toxic’ hyrides, hydrogen or chlorine, and on failure of extracts. On hearing: a) Leave IMMEDIATELY by nearest emergency exit. b) Do not stop to remove clean clothing. c) Assemble in foyer - wait to be checked out.
6.2 SLIGHT SMELLS Various smells from outside occur occasionally; these can be petrol fumes from the filling station smells, etc. if you are concerned about the particular smell INFORM FACULTY STAFF (e.g, a burning smell which could suggest equipment failure). The following smells must be treated seriously: GARLIC, ROTTING FISH, SICKLY SWEET, BLEACH, AMMONIA and PUNGENT/ACID smells (causing eyes and nose to sting).
6.3 STRONG SMELLS
If any chemical smells as above occurs STRONGLY, even if the evacuation alarm has nit sounded, the clean room must be vacated.
7.0 CHEMICALS SPILLAGE
a) If fumes are present, push ‘EMERGENCY EXHAUST’ red button located just outside the door of the room. Do not to clear up spillage until fumes have cleared. Always call staff in event of spillage.
b) If clear don PROTECTIVE CLOTHING, chemical-proof gloves, PVC overall, rubber boots, face shield.
c) To clear up spillage, use the ‘3M’ hazardous spill kit - absorbent sheets for smaller volumes, the ‘pillow’ for larger volumes.
d) Place the contaminated material in the poly bag provided. Write the name of the spilt liquid (or best possible description – ‘acid’, ‘alkali’. ‘solvent’, etc) on the identification sheet and attach to the poly bag.
e) Wash down area of spill with water or dilute detergent.
8.0 FLOODING
Call Mr. Mohd Shaiful Nizam B. Kamaruzzaman or your supervisor or any staff.
9.0 ELECTRICAL POWER SUPPLY FAILURE This will sound the fire alarm. In any case VACATE the cleanroom immediately. Dr. Nurul Amziah Md Yunus Mr. Mohd Izhwan Muhamad June 2016
CLEANROOM LAYOUT
Specification:
• Class 100K • Working hours: 8:00a.m. to 5:00p.m. • Built-in size: 70m² Cleanroom 1: Lithography Cleanroom 2: Measurement Cleanroom 3: Chemical
• Temperature: 23 ± 1°C • Room Humidity (RH): 45 ± 5% • Pressure: 12 to 50 Pascal • Maximum capacity: 10 persons
IN CASE OF HAZARDS IN THE CLEANROOM
Fire Extinguisher Entrance Door
CLEANROOM EQUIPMENTS
Fume Hood Double side vacuum UV unit
Probe station Keithley characterization & measurement set
Spin Coater Laminar flow and hot plate
Wire bonder Laminator
UNIVERSITI PUTRA MALAYSIA
ADVANCED MATERIAL SYNTHESIS AND FABRICATION LABORATORY UPM CLEANROOM
FLOW CHART OF CLEANROOM & EQUIPMENT USAGE APPLICATION
FILL UP CLEANROOM & EQUIPMENT USAGE APPLICATION FORM, LABORATORY SAFETY FORM, RISK ASSESSMENT FORM AND COSHH
ASSESSMENT (IF RELATED).
GET ENDORSEMENT FROM SUPERVISOR / PROJECT LEADER
SUBMIT ALL THE FORMS AND WAIT FOR ENDORSEMENT AND APPROVAL TO USE THE CLEANROOM.
OBTAIN ACCESS CARD TO CLEAN ROOM FROM THE CLEANROOM TECHNICAL STAFF
WRITE IN THE CLEANROOM USAGE LOG BOOK WHENEVER ENTER THE CLEANROOM
APPENDIX B
WORKING PRACTICES DOCUMENT
Guide to Working Practices in the Cleanroom.
Guide to Working Practices in the Cleanroom
(To be read in conjunction with ‘Cleanroom Hazards, Safety Measures and Action in Emergency)
Issue: June 2016
1. Why Working Practices?
Silicon/MEMS/NEMS devices may be damaged irreparably by exposure during their processing to particles, chemicals and electrical discharges. It will probably not be apparent that this has happened until the final device testing is done, by which time it is too late. Special equipment and ways of working are therefore necessary during the processing in order to minimize risk and also ensure safety.
1.1. Particles The cleanrooms are supplied with air filtered to various degrees or classes, depending on the sensitivity of the processes in each area. The classifications are defined as the number of particle above 0.5µm in one cubic foot of air. Silicon wafers may only be exposed to Class 100 air or better, this is achieved in most areas by the use of local air polishing units, and in the lithography area by the buildings air handling system.
1.2. Chemical contamination This is derived from a wide variety of substances, in particular from metals, finger grease and substances transferred into lab the lab from outside on lab books, etc. cross contamination is controlled by the use of gloves and careful dedication of processing equipment and work areas.
1.3. Electrostatic charge Some of the processing and ancillary equipment incorporates anti-static protection features.
1.4. Safety The following working practices are all safe practices.
2. General
2.1. Access Access to the clean room is ONLY via the changing room. (For safety reasons ALL personnel must log their presence in the cleanroom into the Cleanroom Usage Logbook before you enter the Cleanroom).
2.1.1. Dressing 1) Outdoor shoes to be changed for indoor shoes at the rack in the north corridor; the indoors shoes must only contact the stacky mat at this point and the clean floor beyond. 2) Don the hoods, coveralls and overboots in the changing room. Hair must be tucked inside hoods, and hoods inside coveralls, fastening under the chin. Coveralls are zipped up fully and fastened at the wrists and neck. 3) Put on facemask and disposable gloves.
2.1.2. Lithography areas Entry to the Direct Write and Yellow rooms are restricted to those actually working in them. General discussion must take place outside these rooms. Wafers for lithography should be passed through the hatches in the wall.
2.2. Permitted ‘standard’ items The following are the permitted items in the clean room complex: Writing Ball-point or fibre pens and clean room paper only Manuals In plastic covers, printed on clean room paper or in cabinets only.
These to be exposed in the cleanroom only during the period required for work.
Wafers/substrates Boxed Class 100K items Outer wrap of double-wrapped class 100K items to be removed in
changing room, inner wrap in class 100K area.
2.3. Non-standard items Equipment, Tools etc Equipment must not be imported into the cleanroom unless
approved and assessed for safety, etc., by Cleanroom Technical Staffs. All items must be cleaned to appropriate standard. Only clean plastic boxes may be used to transfer bulky items into the clean area.
New chemicals, Material Must not be imported into the cleanroom unless approved for use in specified activity and area and assessed for safety by AGRE/PVM
2.4. Benches
There are three categories of bench in the lab, two of which are labelled. The concept of this is to separate clutter and non-clean activities from wafers either in process or storage. WAFER HANDLING ONLY These benches may only contain wafer handling
equipment. Wafer handling is the only activity permitted in them (!)
WAFER STORAGE ONLY For temporary storage of work wafers, checks and dummies in boxes. No other item may be stored in these benches.
OTHER Not labelled: for all other purposes, including writing. Wafers may not be handled or stored in these benches.
2.5. Writing
Only lab books made from clean room paper are permitted. They may not be used or placed on benches marked WAFER HANDLING ONLY or WAFER STORAGE ONLY. You are permitted to remove these cleanroom lab books for work outside the lab. Lab books made from ordinary paper are banned.
3. Wafer handling Wafer boxes may only be opened and the wafers handled at processing equipment and at benches labelled WAFER HANDLING ONLY. These benches MUST be kept clear to prevent dust accumulation. Only water handling equipment may be kept in these benches. Lab books and tools must not be placed down on them. 3.1. Gloves
There are two types, disposable and acid-proof. These are used to protect the work from hand grease and particles, and may be ‘clean’ or ‘dirty’. It is important to know the state of your gloves and change them whenever necessary. All gloves must be changed at least once per week. They are clean when first donned but become dirty when you first touch any surface outside the class 100 areas, particularly doors, one’s face, computer keyboards and other surface which are also handled with ungloved hands. The following may be touched with dirty gloves but not bare hands: Processing machine controls where wafers are exposed Surface inside class 100 areas Microscopes and diagnostic equipment
The outsides of white plastic cassette stands Tweezers/vacuum pencils Lifting forks Wafer boxes (BUT NOT CHUCKS/SURFACES WHERE WAFERS ARE PLACED).
The following may only be touched with the appropriate type of CLEAN glove:
Wet processing equipment Surfaces where wafers are placed e.g. chucks/microscope stages
The following may not be touched AT ALL:
Silicon wafers/Glass wafers/Polymer wafers
Gloves used for collecting chemical bottles from the store or for dirty tasks such as changing pump oil must be labelled as such and NOT used for wafer processing or placed in the wet benches.
All staffs are entitled to dispose of unmarked gloves which they consider are dirty, or which are found outside the correct area.
Note: Pink ‘Marigold’ gloves are neither clean nor non-acid proof and may only be used for dirty maintenance jobs.
3.1.1. Disposable plastic gloves These may be changed as frequently as necessary and are also useful to wear under acid proof gloves to ease removal. The backing papers should be disposed of promptly, without crunching them up, as this generates large amounts of dust. They may not be stored in the clean room in the cardboard boxes in which they are delivered.
3.1.2. Acid Proof Gloves (beige rubber) These gloves when used in the wet process areas must remain ‘clean’ to allow them to be re-used for water processing. Do not use processing gloves for collecting chemicals. They must remain in the wet benches or the glove storage area. They must be labelled with your name. You should not use other people’s gloves for reasons of hygiene. Workers using the Dispensary or Metal room wet benches should have dedicate and labelled gloves for those locations.
3.2. Vacuum Pencils These are more difficult to use than tweezers, but are preferred, and should be used where provided, as tweezers however clean they appear, will contaminate the front surface of the waters. They may not be immersed in chemical solutions or rinse tanks. They should not be left outside class 100K areas. They should remain in the areas to which they are dedicated, be stored on the hooks provided and should be cleaned weekly.
3.3. Tweezers White plastic are the approved type. Stainless steel may only be used where it is essential to handle the wafers hot or for cleaving. Tweezers may not be immersed in chemical solutions or rinse tanks. They should not be left outside class 100 areas. Tweezers should be kept in their boxes when not in use and cleaned weekly. White tweezers with yellow marks are for handling metallised wafers, and those with red markers are dedicated for contaminated wafers.
3.4. Cassettes These are for general wafer handling. The rear surfaces of the wafers should be towards the ‘bar’ end of the cassette to be compatible with automatic loading equipment. These are five types:
3.4.1. White These are made of chemically resistant plastic and are for wet chemical processing and oven baking. They should have a coloured identification bar of they are used in the main wet room.
3.4.2. Black For rinsing non-metallised wafers in the recirculating ‘Super-Q’ tanks and for drying.
3.4.3. Orange For rinsing and drying metallised wafers.
3.4.4. Red For all processing contaminated wafers (i.e. those containing material incompatible with the CMOS process, e.g. Gold).
3.4.5. Blue For transporting wafers.
They may only stand on the inside of their box lid on the special white plastic stands. They must never leave the clean rooms or be exposed to worse than class 100 air. Clean gloves must be used to touch them. Metallised wafers must not be placed in them.
3.5. Cassette Stands The only items permitted to stand on these are blue cassettes. They must remain closed when not in use.
3.6. Boxes There are five types:
3.6.1. White Cassette boxes These are for transporting blue cassettes. When the lid is removed it must be placed inside uppermost. Gloves must be worn when handling white boxes.
3.6.2. Brown water boxes For transporting metallised wafers and for long-term storage of wafers. When the lid is removed it must be placed inside uppermost. Gloves must be worn when handling brown boxes.
3.6.3. Red wafer boxes For transporting contaminated wafers. Once a wafer has been contaminated, it may not be returned to a blue cassette/white box or brown wafer box. When the lid is removed it must be placed inside uppermost. Gloves must be worn when handling red boxes.
3.6.4. Wafer manufacturer’s boxes There are several types of these which may be used for holding check wafers, dummies, etc. they are the preferred boxes for shipping large numbers of wafers (>6) as they are free and purpose designed. When the lid is removed it must be placed inside uppermost.
3.7. Items for handling non-standard and part wafers
There is a range of wafer holders and processing vessels. Those used for metal processing must be marked with a yellow tag and not used for other purposes.
Laminar Flow Cabinet Fume Hoods
Principle
Sterilize air though filter and blow it across work
surface as a particle-free laminar air stream
Discharge chemical vapor outside the building or absorb it with carbon filter
Typical flow velocity
0.3 - 0.5m/s 0.40 - 0.60 m/s
Purpose
-Product protection from room contaminants
- Does not protect operator
- Not suitablefor biohazard agents or chemical fumes
- Handle chemical vapor, including strong acid & base
- Removes toxic chemical - If doesn’t have HEPA filter is not
suitable for biohazard
UPM Cleanroom
Instruction on using the Fume hood
Use a chemical fume hood anytime your work involves: Toxic volatile materials (chloroform, formaldehyde) Flammable chemicals (Isopropyl alcohol (IPA), Methanol, Acetone, Xylene, Chloro-
benzene, Resist Primer, toluene etc.) Carcinogens or particularly hazardous substances. A procedure that may create an aerosol of a toxic substance. Reactive or explosive materials or chemicals that may spatter. Toxic gases (NH3, CO, F2, Cl2, H2S, NO2, etc.) Odorous materials.
The fume hood sash should be closed when you are not actively working at your hood. In cases where you are performing experiments that are suspected to present an explosion
hazard, you should use a portable blast shield inside the hood in addition to a closed sash.
You should strive to maintain the sash at the lowest possible position at all times.
In general only ongoing experiments should be in the hood. If you must store other equipment make sure that it does not block the slots in the back of the hood directly in front of where you will be working. Try to keep equipment along the side walls and away from contaminant generation. Do not store anything that blocks the sash from closing.
Chemicals in the front of the hood are not captured efficiently and can escape into the room. You should keep chemicals at least 6 inches back from the edge of the air foil sill.
All electrical components in fume hood such as lights are sealed and intrinsically safe so
flammable vapors should not be a fire hazard. However, if you use other electrical equipment or heating apparatus in the hood they may not be safe from fire risk. Check to see if they are intrinsically safe or use them outside of the hood. Care should be taken with all heating devices and flammable solvents don’t use open flames and carefully monitor the temperature of other heating elements.
Only exhaust vented cabinets should be used for the storage of flammable or volatile
chemicals. Check to make sure exhaust is provided.
The sash will protect you from some explosions and fires, for that reason you should keep it as low as possible. But if you are working with reactive substances or with pressurized equipment, you should keep your work behind a portable blast shield.
Keep lab doors and windows closed. These extra sources of inlet air can: affect the
performance of the hood, cause turbulent air currents in the room or cause the room to loose its negative pressure.
Limit traffic near hoods when in use. Pedestrian traffic or fast movement in front of hoods
can cause turbulence and can negatively affect the capture ability of the fume hood.
Work at least 6 inches into the hood from the plane of the sash. This will reduce the risk of eddy currents blowing vapors back at you and will maximize capture ability of the hood.
Lower the sash to within an inch or twoif the power goes out while you are working in the
hoodso the chimney effect will keep some air flowing into the hood and contain any vapors.
Small sinks (called cup sinks) can be in a hood, but this adds the risk of chemicals going done the drain. And you will probably be working with open chemical containers next to a drain that needs to be protected from chemical releases. To help keep your chemicals out of the environment, all cup sinks must have a raised edge lip that is at least 3/8” high.
