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Aplicaciones con

ANSYS

Presenta:Moiss Vzquez Toledo

26 agosto del 2013, Silao, GtoClase muestra


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Contenido Introduccin

o Interfaz de ANSYS

Modelado con ANSYS

o Anlisis Modal

o Anlisis Harmnicoo Anlisis Estructural

Modelos Analticos

o Anlisis Modal

o Anlisis Harmnicoo Anlisis Estructural

Resultados

Conclusin

Clase muestra 26 agosto del 2013, Silao, Gto


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Introduccin



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Introduccin


Preprocessing

Solution

Postprocessing

Interfaz de ANSYS


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Modelado con ANSYS


Analizar el comportamiento dinmico de un micro-cantilevers, este microresonador es el componentemecnico de un sensor basado en tecnologa MEMS.

Geometra500 28 5

Propiedades de Silicio

= 169.8 = 0.066 = 2330 .


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Modelado con ANSYS


Anlisis Modal


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Numerical Modelo Natural frequency

May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering

tFuKuCuM

0 uKuM

)sin( tUu

02 uMK

Sensor design

(17)

(18)

(19)


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o Harmonic Solution


titiititii

euiueeuu

eFiFeeFF

)(

)(

21max

21max

)())(( 21212

FiFuiuKCiM

Sensor design

(20)

(21)


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IntroductionMEMS technology can allow the development ofmagnetic field sensors.

Advantages:o Small size

o Low power consumption

o High resolution

o Fast responseo Minimum cost

May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering

Fig. 1. Sensor applications. [1]

[1] http://www.diarioelectronicohoy.com/sensor-de-movimiento-mems/


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Introduction Application


a) b)Fig. 2. a) Schematic diagram of the size and speed measure of vehicle , b) Future medical application of magnetic

field sensor for visualing magnetically market diagnostic capsule [2]

[2] Herrera-May AL, Aguilera-Cortes LA. Garca-Ramirez PJ. Resonant Magnetic Field Sensors Based On MEMS Technology. Sensors. 2009; 9(10): 7785-7813. doi:10.3390/s91007785.


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Introduction Application


a)Fig. 3. a) Schematic vies of an inspection platform of oil pipeline wall that consiste of a rotating permanent magneticexciter and an array of magnetic field microsensor[3], b) Effect on the vehicle stability achieved with an ESP system

[3] Herrera-May AL, Aguilera-Corts LA, Garca-Ramrez PJ, Nelly B. Mota-Carrillo, Wendy Y, Padrn-Hernndez, Figueras E. Development of Resonant Magnetic FieldMicrosensors: Challenges and Future Applications. Microsensors. India: INTECH; 2011: 65-84. ISBN 978-953-307-170-1.


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Sensor design SUMMit V process


Fig. 4. SUMMit V fabrication process.


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Sensor design Structural configuration


Fig. 5. Main dimensions of MEMS sensor.

26

28

2

150

20

0

466

30

30

100

100

2


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Sensor design Principle operation


Fig. 6. Operation principle of the MEMS sensor.


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Sensor design Principle operation


Fig. 7. Schematics of the signal conditiong systemfor the magnetics field sensor. [2]

ByMagnetic field

densities

VCSELPhototransistor

PIC

LC

DRegulator 2

Electronic

oscillator

Current

source

Regulator 1

Battery


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Sensor design Analytical Model

o Natural frequency


(05)

(06)

(07)

(08)


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o Damping Models

Viscous damping


(09)

(10)

(11)

(12)


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Support Loss

Thermoelastic damping


(13)

(14)

(15)

=

=

6

6

sinh + sin

cosh + cos

=

=1

2 (16)


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Numerical Modelo Natural frequency


tFuKuCuM

0 uKuM

)sin( tUu

02 uMK

Sensor design

(17)

(18)

(19)


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o Harmonic Solution


titiititii

euiueeuu

eFiFeeFF

)(

)(

21max

21max

)())(( 21212

FiFuiuKCiM

Sensor design

(20)

(21)


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Sensor design Numerical Model


Fig. 8. Element type


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Result


Fig. 8. Initial displacement (Joule effect).

Data Value

Current (mA) 1

Voltage (mV) 5.03

ElectricalResistecial ()

5.03

InitialDeformation (nm)

8.46


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Result


10.66 %

ModelsFrequency (kHz)

Numeric 48.326

Analytic 54.094

Fig. 8. Modal analysis


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Result


Fig. Linear respounse.

0

1

2

3

4

5

6

7

8

100 600 1100 1600 2100 2600

Displacement(m)

Magnetic Field (mT)

Displace

0

1

2

3

4

5

6

7

8

32,320 37,120 41,920 46,720 51,520

OutputDisplacemen

t(m)

Frequency (kHz)

1000 mT

2000 mT

3000 mT

Fig. 8. Maxima displacement in resonans respons.

Atmospheric pressure


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Result


Pressure work 10 Pa

Pressure(Pa)

Resolution (T)

Powerconsumption

(W)

101 325 3000 5.03

10 117 5.03


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Result


0

20

40

60

80

100

120

32,320 37,120 41,920 46,720 51,520

OperationStress(MPa)

Frequency (Hz)

Principal Stress

1000 105.872

= 9.4

= 1000

= 0.5 ()

500 105.872

=4.7


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Conclusions


The sensor consists of two u-shaped beams. These beamsare orthogonally joined between them.

This sensor can work for both atmospheric pressure and10 Pa pressure, respectively.

This sensor has a simple optical sensing system. The FEM and analytical models were made to resonanse

frequency of the sensor. This sensor presented a linear response for cases studied.


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Acknowledgments


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