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1 1 Electronic Supplementary Information 2 3 Wrinkle-induced highly conductive 4 channels in graphene on SiO 2 /Si substrate 5 Rui-Song Ma 1, 2 ‡, Jiajun Ma 1, 2 ‡, Jiahao Yan 1, 2 , Liangmei Wu 1, 2 , Wei Guo 4 , Shuai 6 Wang 4 , Qing Huan 1, 2 , Lihong Bao 1, 2, 3,* , Sokrates T. Pantelides 5, 2 , and Hong-Jun Gao 1, 7 2 8 1 Institute of Physics, Chinese Academy of Sciences, PO Box 603, Beijing 100190, 9 People’s Republic of China 10 2 University of Chinese Academy of Sciences & CAS Center for Excellence in 11 Topological Quantum Computation, Chinese Academy of Sciences, PO Box 603, 12 Beijing 100190, People’s Republic of China 13 3 Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808, People’s 14 Republic of China 15 4 Key Laboratory of Material Chemistry for Energy Conversion and Storage, Ministry 16 of Education School of Chemistry and Chemical Engineering, Huazhong University of 17 Science and Technology, Wuhan, 430074, People’s Republic of China 18 5 Department of Physics and Astronomy and Department of Electrical Engineering and 19 Computer Science, Vanderbilt University, Nashville, Tennessee 37235, United States 20 21 E-mail: [email protected] 22 ‡ These authors contributed equally to this work. Electronic Supplementary Material (ESI) for Nanoscale. This journal is © The Royal Society of Chemistry 2020

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Page 1: channels in graphene on SiO2/Si substrate Wrinkle-induced ... · 1 1 Electronic Supplementary Information 2 3 Wrinkle-induced highly conductive 4 channels in graphene on SiO2/Si substrate

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1 Electronic Supplementary Information2

3 Wrinkle-induced highly conductive 4 channels in graphene on SiO2/Si substrate

5 Rui-Song Ma1, 2 ‡, Jiajun Ma1, 2 ‡, Jiahao Yan1, 2, Liangmei Wu1, 2, Wei Guo4, Shuai

6 Wang4, Qing Huan1, 2, Lihong Bao1, 2, 3,*, Sokrates T. Pantelides5, 2, and Hong-Jun Gao1,

7 2

8 1Institute of Physics, Chinese Academy of Sciences, PO Box 603, Beijing 100190,

9 People’s Republic of China

10 2 University of Chinese Academy of Sciences & CAS Center for Excellence in

11 Topological Quantum Computation, Chinese Academy of Sciences, PO Box 603,

12 Beijing 100190, People’s Republic of China

13 3Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808, People’s

14 Republic of China

15 4Key Laboratory of Material Chemistry for Energy Conversion and Storage, Ministry

16 of Education School of Chemistry and Chemical Engineering, Huazhong University of

17 Science and Technology, Wuhan, 430074, People’s Republic of China

18 5Department of Physics and Astronomy and Department of Electrical Engineering and

19 Computer Science, Vanderbilt University, Nashville, Tennessee 37235, United States

20

21 E-mail: [email protected]

22 ‡ These authors contributed equally to this work.

Electronic Supplementary Material (ESI) for Nanoscale.This journal is © The Royal Society of Chemistry 2020

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1 Spacing-variable four-probe measurement

2 In the four-probe measurement, probe 1 injects electrical current (I1) and probe 4

3 is grounded (G4). Probe 2 and 3 are potential probes which measure the potential

4 difference between them (V23=V2-V3). The measurement configuration is named as

5 I1V23 and the measured resistance RI1V23 is defined as V23/I1 (in unit Ω).1

6 The four-probe resistivity measurements are intrinsically dependent on geometry

7 and dimensionality, and sensitive to the probe positions.1 Therefore, the four-probe

8 measurements can be used to characterize the dimensionality of transport behaviors.2, 3

9 In this paper, rij is defined as the probe distance between probe i and j. Next, the

10 relationship of measured resistance and probe distances for 3D, 2D and 1D case will be

11 introduced in detail.

12 3D case

13 On condition that the current entering via probe 1 is I1, the current density J1 is

14 given by

15 . (S1)11 2( )

2IJ rr

16 The electric field E(r) yielded by J1 is expressed by

17 , (S2)3D 13D 1 2

d ( )( ) ( )2 d

I V rE r J rr r

18 where ρ3D is the resistivity in the 3D case.

19 Accordingly, potential at probe 2 can be written as

20 . (S3)12 12

12

3D 1 3D 1 3D 12 2

r 12

d ( )0 d d =d 2 2 2r r

I I IV rV r rr r r r

21 Similarly, the potential at probe 2 yielded by probe 4 can be written as

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1 . (S4)12 12

42

3D 4 3D 4 3D 42 2

r 42

d ( )d d =d 2 2 2r r

I I IV rV r rr r r r

2 Since I1=-I4=I, the final expression of the measured potential at probe 2 is

3 . (S5)3D 1 3D 4 3D 1 3D 12

12 42 12 42

=2 2 2 2

I I I IVr r r r

4 By the same method, the final expression of the measured potential at probe 3 is

5 . (S6)3D 1 3D 4 3D 1 3D 13

13 43 13 43

=2 2 2 2

I I I IVr r r r

6 The potential difference between probe 2 and probe 3 caused by the total diffusing

7 current can be described by

8 . (S7)3 1 3 1 3 1 3 1 3 12 3

12 42 13 43 12 43 42 13

1 1 1 12 2 2 2 2

D D D D DI I I I IV Vr r r r r r r r

()()

9 Therefore, the relationship between the measured resistance V23/I1 and the 3D

10 resistivity is

11 . (S8)2 3 31 23

1 12 43 42 13

1 1 1 12

DI V

V VRI r r r r

()

12 In the case of collinear configuration as shown in Fig. S2(a), the coordinates of each

13 tip are P1[-3 0], P2[-1 0], P3[x 0] and P4[0 0]. And then

14 . (S9)31 23

1 1 112 2 abs( ) abs( 3)

DI VR

x x

()

15 The expression in the bracket above is named as geometry factor for 3D case, the plot

16 of which is shown in Fig. S2(d).

17 2D case

18 On condition that the current entering via probe 1 is I1 and the sample thickness is

19 t, the current density J1 is given by

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1 . (S10)11( )

2IJ r

rt

2 The electric field E(r) yielded by J1 is expressed by

3 , (S11)3D 1 2D 13D 1

d ( )( ) ( )2 2 d

I I V rE r J rrt r r

4 where ρ2D is the resistivity in the 2D case.

5 Accordingly, potential at probe 2 can be written as

6 . (S12)12 12

12

2D 1 2D 1 2D 12 12

r

d ( )0 d d ln( ) = ln( )d 2 2 2r r

I I IV rV r r r rr r

7 Similarly, the potential at probe 2 yielded by probe 4 can be written as

8 . (S13)42 42

42

2D 4 2D 4 2D 42 42

r

d ( )d d ln( ) = ln( )d 2 2 2r r

I I IV rV r r r rr r

9 Since I1=-I4=I, the final expression of the measured potential at probe 2 is

10 . (S14)2D 1 2D 4 2D 1 2D 12 12 42 12 42ln( ) ln( )= ln( ) ln( )

2 2 2 2I I I IV r r r r

11 By the same method, the final expression of the measured potential at probe 3 is

12 . (S15)2D 1 2D 4 2D 1 2D 13 13 43 13 43ln( ) ln( )= ln( ) ln( )

2 2 2 2I I I IV r r r r

13 The potential difference between probe 2 and probe 3 caused by the total diffusing

14 current can be described by

15 . (S16)

2D 1 2D 1 2D 1 2D 12 3 12 42 13 43

13 422 1 2 1

12 43 42 13 12 43

ln( ) ln( ) ( ln( ) ln( ))2 2 2 2

1 1 1 1(ln( ) ln( ) ln( ) ln( )) ln( )2 2

D D

I I I IV V r r r r

r rI Ir r r r r r

=

16 Therefore, the relationship between the measured resistance V23/I1 and the 2D

17 resistivity is

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1 . (S17)2 3 13 4221 23

1 12 43

ln( )2

DI V

V V r rRI r r

2 In the case of collinear configuration as shown in Fig. S2(b), the coordinates of each

3 tip are P1[-3 0], P2[-1 0], P3[x 0] and P4[0 0]. And then

4 . (S18)21 23

( 3)ln( )2 2 ( )

DI V

abs xRabs x

5 The expression in the logarithm function on the right is named as geometry factor for

6 2D case, the plot of which is shown in Fig. S2(e).

7 1D case

8 On condition that the current entering via probe 1 is I1 and the sample cross-section

9 is s, the current density J1 is given by

10 . (S19)11( )

2IJ rs

11 The electric field E(r) yielded by J1 is expressed by

12 , (S20)3D 1 1D 13D 1

d ( )( ) ( )2 2 d

I I V rE r J rs r

13 where ρ1D is the resistivity in the 1D case.

14 Accordingly, potential at probe 2 can be written as

15 . (S21)12 12

12

1D 1 1D 1 1D 12 12

r

d ( )0 d d =d 2 2 2r r

I I IV rV r r r rr

16 Similarly, the potential at probe 2 yielded by probe 4 can be written as

17 . (S22)42 42

42

1D 4 1D 4 1D 42 42

r

d ( )d d =d 2 2 2r r

I I IV rV r r r rr

18 Since I1=-I4=I, the final expression of the measured potential at probe 2 is

19 . (S23)1D 1 1D 4 1D 1 1D 12 12 42 12 42=

2 2 2 2I I I IV r r r r

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1 By the same method, the final expression of the measured potential at probe 3 is

2 . (S24)1D 1 1D 4 1D 1 1D 13 13 43 13 43=

2 2 2 2I I I IV r r r r

3 The potential difference between probe 2 and probe 3 caused by the total diffusing

4 current can be described by

5 . (S25)1D 1 1D 1 1D 1 1D 1

2 3 12 42 13 43

1 112 43 42 13

2 2 2 2

2D

I I I IV V r r r r

I r r r r

()

()

6 Therefore, the relationship between the measured resistance V23/I1 and the 2D

7 resistivity is

8 . (S26)2 3 11 23 12 43 42 13

1 2D

I VV VR r r r r

I

()

9 In the case of collinear configuration as shown in Fig. S2(c), the coordinates of each

10 tip are P1[-3 0], P2[-1 0], P3[x 0] and P4[0 0]. And then

11 . (S27)1 1

1 23

1 1

( 2 ( ) 1 ( 3))2

( 1 (3 ) ( ))2

DI V

D

IR abs x abs x

I abs x abs x

=

12 The expression in the brackets on the right is named as geometry factor for 2D case,

13 the plot of which is shown in Fig. S2(f).

14 Traditional four-probe measurements in 2D case

15 As for the 2D case, if the probe distances are much smaller than the lateral

16 dimension of sample, the sheet resistance R□ (in unit Ω/□) of the measured 2D sample

17 can be calculated from RI1V23 by

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1 , (S28)1 2313 42

12 43

2

ln( )I VR Rr r

r r

2 where rij (=rji) is defined as the distance between probe i and probe j.

3 In the collinear case where the four probes are placed in a line with equal spacing

4 (r12=r23=r34), the R□ can be written as

5 . (S29)1 23ln 2 I VR R□

6 As for the square case where the four probes form a square with equal spacing

7 (r12=r23=r34=r41=r13/√2= r24/√2), the R□ can be written as

8 . (S30)1 232ln 2 I VR R

9 Resistor network simulation

10 In order to estimate the conductivity solely within the wrinkled area, we used

11 resistor network simulation to simulate the four-probe collinear measurements along

12 graphene wrinkles, as shown in Fig. S3. Therein, green and light blue resistors represent

13 the 4 μm × 4 μm area for graphene wrinkle and pristine graphene, respectively. By the

14 way, the setting of 4 μm is based on the averaged width of graphene wrinkle in this

15 paper. The four probes are placed with equal spacing of 60 μm according to the

16 experimental setups.

17 In a network composed of linear and bilateral resistors, the potential distribution is

18 merely determined by the relative resistance or conductance with constant current

19 source and fixed contacts applied. For example, under constant current, the potential

20 drop caused by resistors with 1 Ω, 2 Ω and 3 Ω in series is the same as that caused by

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1 2 Ω, 4 Ω and 6 Ω resistors. That is to say, the resistance ratio of wrinkle (Rw, green)

2 and monolayer (Rm, light blue) resistors result in the potential profile in the four-probe

3 case. In other words, σ□inside-w (the conductivity inside the wrinkle) and σ□m (the

4 conductivity of pristine monolayer graphene, 1S/□ with Rm equal to 1 Ω) determines

5 the potential distribution with a constant current injection. For convenience, the current

6 injected by probe 1 and Rm are set to be 1 A and 1 Ω, respectively. The resistance of Rw

7 ranges from 1 Ω to 1E-4 Ω with 100 points selected and for each Rw setting, the

8 calculated conductivity along the wrinkle in the four-probe measurements (σ□along-w)

9 can be obtained from the potential distribution. Accordingly, at each set of Rw, σ□inside-

10 w/σ□m and σ□along-w/σ□m are calculated, which is shown in Fig. 4(b) in the main text.

11 For the experimental results, since σ□along-w and σ□m can be directly obtained from the

12 four-probe measurements, σ□inside-w/σ□m or σ□inside-w can be estimated based on the ratio

13 relationship shown in Fig. 4(b).

14 Estimation of strain distribution by the vector decomposition

15 method

16 In order to figure out the high conductivity of graphene wrinkle in this paper,

17 Raman characterizations are performed on wrinkled region and monolayer areas near

18 the wrinkle as shown in Fig. 5(a). Figs. 5(b) and (c) show the Raman mapping of 2D

19 and G peak positions of the wrinkled area in (a), respectively. The wrinkled features

20 are clearly shown in the Raman mapping image, especially in the G mode.

21 By the vector decomposition method introduced by Lee et al, the strain can be

22 disentangled from the doping according to the peak positions of Raman 2D (ω2D) and

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1 G (ωG) modes.4, 5 In this method, hole doping and randomly uniaxial strain are assumed

2 for graphene on SiO2/Si substrate. Two vectors showing the changes in G and 2D

3 Raman shift are defined by Δω2D=ω2D-2678 cm-1 and ΔωG=ωG-1587 cm-1, in which

4 2668 and 1587 cm-1 are averaged reference values for the flat region far away from the

5 wrinkled area in this paper (the same as Ref. 5). For the randomly uniaxial strain and

6 hole doping, strain variation (Δɛ, in %) and doping level (Δn, in 1012/cm-2) follow the

7 linear relationship: ΔωG / Δɛ (%) = -23.5, (Δω2D / ΔωG)ɛ, n=0 = 2.2, Δωg / Δn= 1 and

8 (Δω2D / ΔωG)n, ɛ=0 = 0.7. Accordingly, the two vectors (Δω2D, ΔωG) can be calculated

9 by,4, 5

10 . (S31)2 51.7 0.7 23.5

D

G

nn

11 Fig. S7 shows correlation plots of the G and 2D peak positions, based on the Raman

12 characterization in Figs. 5(b-c). The doping vector line with a slope of 0.7 (in blue) and

13 strain vector line with a slope of 2.2 (in red) intersect at point (1587, 2678), which is

14 the averaged peak positions in flat area. The G-2D coordinate space is divided into four

15 quadrants, saying Q1–Q4, by the strain and doping vectors. For any experimental point

16 in Fig. S7, a combination of compressive (tensile) strain and p-doping can be extracted

17 by Equation S31. Q2 and Q3 regions are not allowed because both of n- and p- doping

18 should lead to increasing in ωG.4, 6 In our case, most of the experimental points are

19 located in the forbidden Q2 and Q3 regions, which can be attributed to the affection by

20 strain.4 Based on the vector decomposition method, the strain distribution can be

21 extracted, as shown in Fig. 5(d). As can be seen, the wrinkled regions show compressive

22 strain while the monolayer regions near the wrinkle present tensile strain, so the strain

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1 polarity is reversed in boundary of the wrinkle. Therefore, large strain gradients are

2 mainly distributed in the boundary regions with larger curvatures, as verified in Fig.

3 5(e). Based on the same method, strain distributions of wrinkle-2 can be obtained as

4 shown in Fig. S8.

5

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1 References

2 1. I. Miccoli, F. Edler, H. Pfnur and C. Tegenkamp, J. Phys. Condens. Matter, 2015, 27, 223201.3 2. S. B. Kjeldby, O. M. Evenstad, S. P. Cooil and J. W. Wells, J. Phys. Condens. Matter, 2017, 29, 4 394008.5 3. C. Durand, X. G. Zhang, S. M. Hus, C. Ma, M. A. McGuire, Y. Xu, H. Cao, I. Miotkowski, Y. P. 6 Chen and A.-P. Li, Nano lett., 2016, 16, 2213-2220.7 4. J. E. Lee, G. Ahn, J. Shim, Y. S. Lee and S. Ryu, Nat. Commun., 2012, 3, 1024.8 5. T. Hallam, A. Shakouri, E. Poliani, A. P. Rooney, I. Ivanov, A. Potie, H. K. Taylor, M. Bonn, D. 9 Turchinovich, S. J. Haigh, J. Maultzsch and G. S. Duesberg, Nano lett., 2015, 15, 857-863.

10 6. A. Das, S. Pisana, B. Chakraborty, S. Piscanec, S. K. Saha, U. V. Waghmare, K. S. Novoselov, 11 H. R. Krishnamurthy, A. K. Geim, A. C. Ferrari and A. K. Sood, Nat. Nanotechnol., 2008, 3, 12 210.

13

14

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1

2 Fig. S1 AFM and Raman characterization of the monolayer graphene region. (a)

3 AFM height image of the graphene edge area on Si/SiO2 substrate. The inset line profile

4 reveals the thickness of the monolayer graphene area is ~1.0 nm. (b) Raman spectra

5 collected on four random positions on monolayer area. The spectra are offset vertically

6 for clarity. The relative intensity ratio of 2D and G peaks (>2:1) confirms the monolayer

7 nature of the graphene area near the graphene wrinkle. In addition, the absence of the

8 D peak indicates that no detectable defects are found in the transferred graphene sample

9 on the SiO2/Si substrate.

10

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1

2 Fig. S2. Four-probe collinear measurements on materials from 3D down to 1D

3 with a moving probe. (a-c) Schematics of four-probe collinear measurements on

4 materials from 3D down to 1D, respectively. The four probes are arranged in a collinear

5 arrangement. Probe 1 (I1) injects the current to the materials and probe 4 (G4) is

6 grounded. Probe 2 and 3 are used to measure the potential distribution on the material

7 surface (V2 and V3). The distance between probe 1 and 2 is fixed to 2 (a.u.) while the

8 distance between probe 4 and 2 is fixed to 1 (a.u.). Probe 3 is a moving probe and the

9 distance between probe 4 and 3 is x (a.u.). (d-f) Geometry factor variations in the four-

10 probe collinear measurements on materials from 3D down to 1D, respectively. The

11 black arrows indicate the positions of the fixed probes.

12

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1

2 Fig. S3. Resistor network simulation for the four-probe measurements. (a)

3 Schematics of 75 × 75 resistor network which simulates the four-probe collinear

4 measurements along a graphene wrinkle. The blue and green resistors represent 4 μm

5 × 4 μm area in the pristine graphene and graphene wrinkle, respectively. The distance

6 between two nearest probes is 60 μm according to the experimental setups.

7

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1

2 Fig. S4. Four-probe measurement of gate-tunable conductivity on CVD-grown

3 graphene. (a-b) Gate-tunable conductivity of graphene wrinkle-2 in four-probe square

4 and collinear configurations, respectively. The inset shows the optical micrographs

5 during the four-probe measurements. (c-d) The results from graphene wrinkle-3 by the

6 same method as wrinkle-2. The conductivity across the graphene wrinkle is much lower

7 than the case on monolayer area while the conductivity along the graphene wrinkle is

8 higher than that in the monolayer region.

9

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1

2 Fig. S5. Four-probe collinear measurement of gate-tunable conductivity along and

3 near the graphene wrinkles. (a) Gate-tunable conductivities of graphene wrinkle-4 in

4 four-probe collinear configuration. The inset show the optical micrographs during the

5 four-probe electrical measurements. (b) The conductivity results from graphene

6 wrinkle-5 by the same method as (a). The conductivities along the graphene wrinkle

7 are higher than that in the monolayer region near the wrinkle.

8

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1

2 Fig. S6. Conductivity of five graphene wrinkles at charge neutral point in this

3 paper. The conductivity solely in the wrinkled region are on the order of several mS/□

4

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1

2 Fig. S7. Correlation between the Raman shift of the G and 2D peaks of graphene

3 area with wrinkle on SiO2/Si substrate. The strain and doping vector lines intersect

4 at (1587, 2678), which are averaged reference values for the flat monolayer region far

5 away from the wrinkled area in this paper.

6

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1

2 Fig. S8. Raman characterization of the wrinkle-2 area. (a) Optical image of the

3 characterized graphene wrinkle-2. (b-c) Raman mapping of 2D and G peak positions of

4 the graphene wrinkle-2 shown in (a). (d) Contour map for strain distribution extracted

5 from Raman 2D and G mapping shown in (b-c). The wrinkled areas show compressive

6 strain up to 0.54% while the monolayer regions near the wrinkle show tensile strain up

7 to 0.18%. (e) Mapping of strain gradients along the perpendicular direction relative to

8 the wrinkle.

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1

2 Fig. S9. Strain variations of the wrinkled regions and monolayer regions near the

3 wrinkle for the five wrinkles in this paper. The wrinkled regions show compressive

4 strain up to ~0.5% while the monolayer regions near the wrinkle present tensile strain

5 up to ~0.3%.