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SILS School on SR, Duino (Trieste), Italy - September 2007 1 Applications of XAFS to materials science and nanostructures Federico Boscherini Department of Physics University of Bologna, Italy [email protected] www.df.unibo.it/fismat/rad-sinc

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Page 1: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

1

Applications of XAFS tomaterials science and nanostructures

Federico BoscheriniDepartment of Physics

University of Bologna, [email protected]

www.df.unibo.it/fismat/rad-sinc

Page 2: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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Plan

• Why use XAFS as a structural tool in materials science & nanostructure research

• Examples of applications, using both– results which have “stood the test of time”– recent results

Page 3: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

X-Ray Absorption Fine Structure

“XANES”: Absorber symmetry and valence/oxidation state Electronic structure of unoccupied statesMedium range structure

“EXAFS”: Coordination numbersInteratomic distancesDisorder of distances

Ener

gy

1s2s2p ωh

ωh

Page 4: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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EXAFS• Extended X-ray Absorption Fine Structure• Fit fine structure oscillations with

Debye Waller factor-thermal vibration-static disorder

Coordinationnumber

Interatomicdistance

λσδϕχjr

j eekrSinkANSk kjjj

shellsjj

22221

20 ]22[)()( −−

=

++= ∑

Measure:

From ab-initio calculations or from reference compounds

( )h

h BEmk

−=

ω2

Page 5: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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XANES• X-ray Absorption Near Edge Structure

(also NEXAFS)

• “Molecular orbital” approach: 1 electron approximation, constant matrix element: probe site and symmetryprojected density of states of final states

• “Multiple scattering” approach: structural interpretationthrough simulation

)(ˆ422

fEfri ρεωαπσ rh •=

)(,

0,1

sdpps

m

→→

=±=light) pol. (lin.

ll ∆∆

Page 6: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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Characteristics of XAFS• Atomic selectivity

– most elements can bestudied

• High resolution for first few coordination shells– signal from higher shells

is damped• Sensitivity to high dilutions• Equally applicable to ordered

or disordered matter

• Today’s topics– Dopants, defects– Alloys, local distortions– Thin films, interfaces– Amorphous solids– Phase transitions– Vibrational dynamics– Nanostructures

• Ge quantum dots• Metallic clusters• Core-shell nanoparticles

Page 7: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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Role of XAFS in Materials Science

Nakamura et al., Jpn. J. Appl. Phys. 35, L217, 1996

Growth

MBE@TASC

Structure

Physical Properties

XAS

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SILS School on SR, Duino (Trieste), Italy - September 2007

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XAFS and dopants• Only the structure around the photo-

excited atom is probed• Fluorescence detection greatly

enhances sensitivity• Present sensitivity limit

– dopants in the bulk ∼ 1018 at/cm3, – thin films (single layer) ∼ 1014 at/cm2

Page 9: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

SILS School on SR, Duino (Trieste), Italy - September 2007

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Arsenic in a-Si:H• As in a-Si expected to be

3-fold coordinated• But: doping is observed• Doping in c-Si due to 4-fold As• Knights et. al. observe increase

in CN at 1% As concentration– evidence of active As

• Knights, Hayes, and MikkelsenJr.Phys. Rev. Lett. 39, 712 (1977)

As

Coor

dina

tion

Num

ber

(CN

)

1 % 10 %

3.0

2.5

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SILS School on SR, Duino (Trieste), Italy - September 2007

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Si/GaAs δ-doped layers and superlattices

• δ-doping: physical separation of dopants and charge carriers– Si-GaAs a technologically

relevant case• Number of charge carriers

not proportional to numberof dopants above a critical

concentration

Boscherini, Ferretti, Bonanni, Orani, Rubini, Piccin, and Franciosi APL 81, 1639 (2002)

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SILS School on SR, Duino (Trieste), Italy - September 2007

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Si-GaAs: Open issue• What is the structural origin of the

defects which give rise to charge carriersaturation?

• Growth conditions optimized for Si/GaAssuperlattice formation: – MBE, 540 °C, 4 nm/h, @TASC

• Si thickness: 0.02 ML – 4 ML; repetitionoptimized for XAS

• Fraction of electrically active Si atoms:2×10–4 – 6× 10-2

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Si-GaAs: data• Si K edge XAS @

LURE• Fluorescence

mode, bulk sensitivity

• Si – Si clusteringapparent in rawdata

2 4 6 8 10 12k (Å-1)

0.5 Å-1

0.2 ML Si

2 ML Si

Bulk Silicon

Si - As theory

k χ(

k) (Å

-1)

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Si-GaAs: results

• Si – Si CN > 2 always

• Presence of Si clusters

• This is the originof lowconcentration of charge carriers

2

2.5

3

3.5

4

10-4

10-3

10-2

10-1

10-2 10-1 100 101

N (Si) R*

Si -

Si C

oord

inat

ion

Num

ber Fraction of active Si atoms

Thickness (ML)

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SILS School on SR, Duino (Trieste), Italy - September 2007

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Low Z dopants and XAS• C, N & O often used as dopants• Experimentally difficult: low fluorescence

yield, soft X-rays, UHV

ALOISA beamline @ ELETTRA10-4

10-3

10-2

10-1

100

5 10 15 20 25 30

Fluo

resc

ence

Yie

ld

Z

K edges LIII

edges

K edge yield

LIII

edge yield

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Dilute nitrides: GaAs1-yNy, InxGa1-xAs1-yNy

0.0 0.5 1.0

3.25 eV

Eg (eV)

GaAs

GaN

y

1.42 eV

Anomalous non-linear optical and electronic proprieties of III-V nitrides

• Red shift of the band gap by adding few % of nitrogen (≈ 0.05-0.1 eVper N atomic percent in InGaAsN )

• Huge and composition dependent optical bowing

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Hydrogen – nitrogencomplexes in dilute nitrides

• Hydrogenation/deuteration leads toreversible changes– compressive strain– opening of band gap

• [1018 ions/cm2, 100 eV]

Ciatto et al, Phys. Rev. B 71, 201301 (2005) Bisognin et al, APL 89, 061904 (2006)

X-ray diffraction photoluminescence

GaAs

GaAsN

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Hydrogen – nitrogen complexesin dilute nitrides

• Which is the hydrogen –nitrogencomplex responsiblefor these changes?

Some candidate low energy structures

Page 18: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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N K edge experiment

• Full multiple scattering XANES simulations

• Good agreement forGaAsN

400 410 420 430 440Energy (eV)

experiment

simulation

GaAsN

Nor

mal

ized

XA

NES

(a)

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Hydrogen – nitrogen complexesin dilute nitrides

• DFT calculations to determinelowest energy geometries

• Full multiple scattering XANES simulations

• Answer: C2v – like complexesare mostly present

• 3-D sensitivity of XANES!!390 400 410 420 430

Abs

orpt

ion

cros

s-se

ctio

nEnergy (eV)

N-HBC

N-H3

C2v

As grown

Hydrogenated

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How many H atoms are there?

• Measurement of D concentration: in as-deuteratedsamples there are 3D atoms per N!– Where is the third

D atom? – What is its effect

on lattice and gap? Nuclear reaction analysis

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Annealing studies

• 250 °C annealing:– 2 H/N– Compressive strain

released– No effect on gap

• 328 °C annealing– 0 H/N– Strain back to tensile– Gap back to that of

GaAsN

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SILS School on SR, Duino (Trieste), Italy - September 2007

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XANES: the optically activecomplex really is the C2v one

GaN

H

Page 23: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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XAFS and alloys• High resolution in probing the local

coordination in first few coordinationshells

• Study, as a function of composition– Deviation of local structure from

average structure– Atomic ordering

Page 24: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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Bimodal distribution of bondlengths in InGaAs

• InxGa1-xAs: tuning of lattice parameter and band gap

• Does the local structure followthe average structuresuggested by Vegard’s law?

• NO! Bond legths stay close tosum of covalent radii

• Mikkelsen Jr., and Boyce, Phys. Rev. Lett. 49, 1412 (1982)

Page 25: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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XAS and amorphous solids

• Sensitivity only to very local coordination isuseful to avoid overlap of RDF peaks

• In alloys, atomic selectivity is further help

Page 26: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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XAFS vs. X-ray scattering

• Comparison between X-ray scattering and Si K-edge XAFS in a-Si1-xCx:H alloys– F. Boscherini,

Mat. Res. Soc. Symp. Proc. 258, 217 (1992)

XRS XAFS

Page 27: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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Amorphous semiconductors: ordering• Different possibilities for relative arrangement

for A1-xBx alloy (A,B equal CNtot = 4 ):– Random: CNA-B = 4x, CNB-A=4(1-x)– Clustering: CNA-B = 0, CNA-A = CNB-B =4– Chemical order: for x < 0.5, CNB-A = 4, CNB-B = 0

• Compare composition (from other method) with CNi-j (from XAFS)

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Amorphous semic.: ordering• Clustering never observed• Degree of chemical

ordering depends on enthalpy of heteroatomicbond, e.g.:– a-Si1-xCx:H, ordered– a-Ge1-xSnx , random

Pascarelli, et al Phys. Rev. B 45, 1650 (1992);Phys. Rev. B 46, 6718 (1992).

NSi

-C/N

Si

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Using SR linear polarization to study thin films

θθσ 2)( Cos∝θ

e-Electron orbit

ε̂

Page 30: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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Hexagonal and cubic GaN

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Cubic and hexagonal GaN• N K-edge XAS to study

relative amounts of cubic and hexagonal GaN

• Exploit– linear polarization of SR– polarization dependence of

cross-section• XAS signal must exhibit (at

least) point group symmetryof the crystal– Td: isotropic signal– C6V: σ tot(E,θ)=σ iso(E)+(3Cos2θ −1)σ1(E)

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GaN

• Katsikini et. al., APL 69, 4206 (1996); JAP 83, 1440 (1998)

CUBIC HEXAGONAL

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The Fe/NiO(001) interface

P. Luches, V. Bellini, S. Colonna, L. Di Giustino, F. Manghi, S. Valeri, and F. Boscherini ,

Phys. Rev. Lett. 96, 106106 (2006)

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FM/AFM systemsFM/AFM systems

AFM

FM

exchange bias

heating up to TN+

cooling in H

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The Fe/The Fe/NiONiO(100) interface(100) interface

NiOAF TN=520 K

aNiO= 4.176 Å

rock-salt

aFe= 2.866 ÅdFe = 4.053 Å

bcc

FeFM TC=1040 K

m=-2.8%

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Fe K-edge XAFS experimentFe local atomic environment

Polarization dependence of XAFS cross section

in-plane local environment

kE

out-of-plane local environment

kE

GILDA beamline @ ESRF

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ex-situ growth @ S3 laboratories

Ag(001)

10 ML NiO

Fe

10 nm Au

samplessamples

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XANESXANES

• deviation frommetallic character

• shift of the white line towards FeO

Page 39: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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XANES: XANES: polarizationpolarization dependencedependence

kE

θ

• planar FeO phase

Page 40: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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EXAFSEXAFSkE

θ

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EXAFSEXAFS--quantitativequantitative analysisanalysis

5.095.014.9688th shell

4.844.87167th shell

4.744.644.75

86th shell

4.074.1745th shell

3.924.044.05

84th shell

2.872.9543rd shell

2.812.772.87

22nd shell

2.502.502.4881st shell

fit results, R (Å)

BCT Fe, R (Å)

BCC Fe, R (Å)

N

the epitaxial strain ispartially released at 10 ML

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2 ML 2 ML samplesample

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The modelThe model

buckledpseudomorphicFeO layer

BCT Fe

• expanded FeO-NiO and FeO-Fe distance

Page 44: Applications of XAFS to materials science and nanostructureswebusers.fis.uniroma3.it/sils/scuole/duino2007/pdf/boscherini-xafs... · Applications of XAFS to materials science and

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XAS and highly correlated oxides• Manganites, HTC’s, perovskites• High resolution in the determination

of local structure• Local distortions couple to physical

properties• Local deviations from average

structure

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Ferroelectric Phase transitions in PbTiO3

• At Tc = 763 K PbTiO3 undergoes tetragonal to cubicphase transition

• T < Tc it is ferroelectric (permanent dipole moment)• Phase transition believed to be purely displacive (no

local distortion for T > Tc)

low temp

Sicron, Ravel, Yacoby, Stern, Dogan and Stern, Phys. Rev. B 50, 13168 (1994)

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Ferroelectric Phase transitions in PbTiO3

• Ti and Pb XAFS data • Local lattice parameters

and local distortionsdo not change at Tc

• The ferroelectrictransition has a largeorder – disordercharacter: the orientationof local distortionschanges at Tc

c

a

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La1-xCaxMnO3 Manganites

• For 0.2 < x < 0.5– Metallic ferromagnet T < Tc

– Insulating paramagnet T > Tc

• Colossal Magneto Resistance• Double exchange model:

hopping conductivity betweenadjacent Mn ions is enhancedif Mn ions are spin aligned Mn3+

Mn4+

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La1-xCaxMnO3 Manganites• Mn(3+)O6 octahedron in

LaMnO3 is Jahn-Tellerdistorted– Mn4+ is not

• Conductivity in the presence of polarons: anelectron + a lattice distortion

• Range of polaronicdistortion?

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La1-xCaxMnO3 Manganites• Presence of

localizedstructuraldistortions at MI transition

Booth, Bridges, Kwei, Lawrence, Cornelius and NeumeierPhys. Rev. Lett. 80, 853 (1998)

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La1-xCaxMnO3 Manganites

• Magnetic field reduces local distortions

Meneghini, Castellano, Mobilio, Kumar, Ray and Sarma, J Phys.: Condens. Matter 14, 1967 (2002)

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Thermal vibrations in crystals• XAFS detects relative atomic motion

– Useful to study of thermal vibrations• In the harmonic approximation the effect of

thermal motion on χ(k) is via( )[ ]20

20

ˆjojj uuR rr

−•=σ

jR0

r

our

jur

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Correlated atomic motion in AgI

• Dalba, Fornasini, Rocca and Mobilio, Phys. Rev. B 41, 9668 (1990)

1st shell2nd shell

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Anharmonic vibrations in AgI• High maximum wave-

number leads to great sensitivity to details of radial distribution function

• Detect asymmetries in RDF connected to deviations from harmonic approximation to interatomic potential

• Dalba, Fornasini, Gotter and Rocca, Phys. Rev. B 52, 149 (1995)

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54

Vibrations parallel & perpendicular to interatomic vector in Ge

• Distance measured in EXAFS is not equal to distance between average position of atoms:

• Perpendicular motion does not contribute to σ2, so that

R

uRC 2

*1

2⊥+=

<u2⊥>

<u2||>

0 600 K2||

2 u∆σ =• Dalba, Grisenti, Fornasini, and Purans,

Phys. Rev. Lett. B 82, 4280 (1999) Å

2

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Nanostructures

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XAS to study nanostructures• XAS is a local, short range, effect

– Origin: core hole lifetime (τhole = 10-16 – 10-15 s) and electron mean free path (5 – 10 Å).

– EXAFS signal is damped by e-(r/λ) where

• Same formalism applies to molecule, cluster or crystallinesolid– insenstive to variations of morphology– sensitive to low thicknesses, high dilutions

• Excellent probe of variations in local environment uponreduction of dimensions and/or dimensionality

( )hole

e

mfp km

τλλ111

h+=

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Local nature of XAS

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58

Semiconductor quantum dots

• The prototypical nanoscience system• Self organized hetero-epitaxial

growth can lead to quantum dots withnarrow size distribution

• Due to small size the quantum dotsexhibit new physical properties

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Ge Quantum Dots

• Need for understanding of local bonding

• Preparation:– Ge/Si(001) by CVD @ 600 °C,

Univ. Roma Tre• Ex-situ AFM used to characterize

degree of relaxation– Ge/Si(111) by MBE @450 - 550

°C, Univ. Roma II• In-situ STM/AFM

Boscherini, Capellini, DiGaspare, Rosei, Motta, and Mobilio, Appl. Phys. Lett. 76, 682 (2000)

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60

Energetics of island formation• Competing energies:

– strain– surface– dislocations

• Contributions from:- wetting layer- islands

Wetting layer WL+Strained island WL+Relaxed island

"Coverage"

WL+2D platelet

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Q. Dots: AFM• Analysis of aspect ratio

provides measurementof relative amount of relaxed islands

• Ge/Si(001): Full rangeof relaxation examined

0

20

40

60

80

100

0 5 10 15 20 25 30 35 40

Rel

axed

vol

ume

(%)

equivalent thickness (nm)

Ge/Si(001)

(1 ML = 0.135 nm, WL = 3 ML)

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Q. Dots: Ge edge data

0 2 4 6

Ge in Si

Ge bulk

dots

interatomic distance (Å)

Ge

Fou

Tra

nsf

0

1

2

3

4

2 4 6 8 10 12 14 16k (Å-1)

k χ(

k) (

Å-1

)

Ge:Si

(111)1 nm

(001)7.8 nm

(001)38 nm

Ge

•Assuming random alloyaverage compositionis Ge0.70Si0.30

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Conventional SK growth

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SK growth with interdiffusion

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Physical origin of intermixing• Keating potential

– intermixing reduces the number of “stretched”bonds and hence the strain energy

– thermodynamical and kinetic effects– strain enhanced diffusion– intermixing is reproduced by MC simulations which

include “atomic identity flips” (P. Kelires, 2001)• Intermixing must be considered in realistic models of

Stranski-Krastanov growth

V({Rij}, {θ ijk}) = α2 (Rij – Rij

0)2Σij

+β8 Re

2 (Cos θijk + 13)

2Σijk

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66

Metallic nanostructures

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67

Clusters: bond length contraction

• A bond length contraction has beenfound for weakly supported metallicclusters (Ni, Cu, Au……) for d < 100 Å

Apai et. al.Phys. Rev. Lett. 43, 165 (1979) Montano et. al.

Phys. Rev. Lett. 56, 2076 (1986)

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Bond length contraction• A macroscopic surface tension interpretation

(“liquid drop”) can explain the bond lengthcontraction– f surface tension,

κ bulk modulusr radius of spherical particle

– Montano et. al.Phys. Rev. B 30, 672 (1984)Balerna et. al.,Phys. Rev. B 31 5058 (1985)

rf

RR κ

32

−=∆

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69

Dynamic properties of Au clusters• The Mean-Square-Relative-

Displacement, σ2, damps the EXAFS signal with a term

• σ2 :– depends on thermal motion– can have structural

contribution

222 σke−

( ) 2

0020

ˆjjj Ruu •−=

rrσ

Bulk Au

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Dynamic properties of Au clusters• As the cluster dimensions

decrease an enhacement of σ2 is evident

• Surface atoms have lessmotion constraints

• High surface-to-volumeratio for nanoclusters

• Values reproduced bynumerical model for freesphere phonon DOS whichincludes surface modes

• Balerna and Mobilio, Phys. Rev. B 34, 2293 (1986)

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XX--ray absorption ray absorption spectroscopy studies of spectroscopy studies of Fe/FeFe/Fe--oxide granular oxide granular

nanostructuresnanostructures

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72

Granular Granular FeFe//FeFe--oxideoxide nanostructuresnanostructures

• Changes in structure and physical properties induced by reduced dimensions

• Effect of disorder on magnetic properties

• Comparison with 2D systems (surfaces)

• Applications

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SampleSample depositiondeposition: IGC: IGC

Inert Gas Condensation

In situ compacting

• Evaporation in He (133 Pa)• O2 passivation• Cold compacted at 1.5 GPa

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SampleSample morphologymorphology

Core: α-Fe nanoparticles<d> = 5 – 21 nmOxide matrix: ultra-fine grains

(2-3 nm) with spinel structure

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Inverse spinel structure

- Magnetite (Fe3O4)Td: Fe3+; Oh: Fe3+ & Fe2+

- Maghemite (γ-Fe2O3)Fe3+ in both Td and Oh sites

BCC

α-Fe

SampleSample morphologymorphology & & structurestructure

a

b

c

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MatrixMatrix: magnetite or : magnetite or maghemitemaghemite? ? • Two oxides have significantly different

properties (e.g. conductivity)• XRD not sensitive (broad peaks)• Use XAFS

– Element and local sensitivity– Unaffected by morphology changes– Phys. Rev. B 68, 195423 (2003)

Fe K-edgeGILDA @ ESRF

O K-edgeBEAR @ ELETTRA

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O O KK--edgeedge XANESXANES

• O edge: informationonly on the matrix

• Clear variation of edgeposition with core size–7 nm ∼ maghemite

(94%)–21 nm ∼ magnetite

(83%)520 525 530 535

Energy (eV)

21 nm

10 nm

7 nm

γ-Fe2O

3

Fe3O

4

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FeFe and O and O edgeedge EXAFSEXAFS

• Fe edge: core & matrix– Core

• bcc Fe, σ2 decreases with <d>

– matrix• 7nm similar to maghemite

• O edge: matrix– High values of σ2 (~35 × 10-3

Å2)– magnetite → maghemite

transition with decreasing <d>

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SizeSize--dependentdependent magnetite magnetite totomaghemitemaghemite transformationtransformation

• α-Fe core exposed to O2→ formation of Fe3O4

• Further exposure to O2→ formation of γ-Fe2O3 on surface of grains

• Enhanced transformation due to higherdisorder, grain boundaries in smaller particles

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Thanks• Funding: MIUR, INFM, Uni Bo, ESRF, EU

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High resolution XAS @ N edge

• M. Petravic et al., Chem. Phys. Lett.425, 262 (2006)

• Vibrationally split 1s →π* transitionfor N implanted in compoundsemiconductors

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82

M. Malvestuto, R. Carboni, and F. Boscherini F. D’Acapito S. Spiga, M. Fanciulli, A. Dimoulas, G.

Vellianitis, and G. Mavrou, Phys. Rev. B 71, 075318 (2005).

Y2O3 thin films on Si(001)

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83

High-κ oxides

From: G. Lucovsky

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84

XAFS and high-κ’s

• Local atomic and CB electronicstructure of high-k films:– Similarity to bulk oxides?– Disorder, interdiffusion?

• Interfaces with Si:– nature of interface phases

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The bixbyite structure

• Two inequivalentcation sites, bothoctahedral– site I: all O at

same distance– site II: 3

differentdistances

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Y2O3/Si(001): growth

• Dimoulas group, Athens• MBE from ceramic target at 450 °C• 5 samples: 2, 4 and 20 nm• Some annealed 30 min. 500 °C

Malvestuto et al., Phys. Rev. B 71, 075318 (2005)

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Y2O3/Si(001): Y K edge XANES• Probes p-type CB

DOS projected on Y• Overall similarity to

bulk spectrum– 2 nm samples:

broader spectrum

thic

knes

s

Energy (keV)

Yttria

# 5

# 3# 4

# 2# 1

Abs

orpt

ion

coef

ficie

nt Y K-edge

17 17.1

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Y2O3/Si(001): Y XANES simulation• Simulation within

“full multiple scattering “theory (FEFF) for20 nm sample– 150 atom cluster– self consistency up to 4 Å

• Good correspondence with5p PDOS of Y in bixbyitecluster

• Similar PDOS for the twoinequivalent sites

17040 17070

Experiment

PDOS 5p

PDOS 5p

site I

site II

Simulation

Energy (eV)

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Y2O3/Si(001): Y EXAFS• 4 and 20 nm samples

– Sharper 2nd and 3rd shellpeaks with increasingthickness and withannealing

• 2 nm samples– 1st shell peak shifts to

lower energy– a combination of Y – O

and Y – Si bonds

0 1 2 3 4 5 6M

ag. F

ou. T

rans

f. [k

2 χ(k)

]

R (Å)

# 5# 4# 3

# 2# 1

Yttria

Y-O

Y-Y

Y-Y

Y K-edge

2 4 6 8 10 12k (Å-1)

thic

knes

s

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Y2O3/Si(001): O XANES• 4 and 20 nm

samples: similarto bulk yttria

• 2 nm samples: contributionfrom SiOx

• Good agreement with simulations 525 535 545 555

Energy (eV)A

bsor

ptio

n co

effic

ient O K-edge

SiOx# 1# 2

# 4 # 3

# 5Yttria

sim.

PDOS2p

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Y2O3/Si(001): O EXAFS• 20 nm sample• Good agreement with

bulk structure– 4 Y atoms, 2.2 – 2.3 Å– 10 O atoms, 2.9 – 3.7 Å

0 1 2 3 4 5Mag

. Fou

. Tra

nsf.

[k2 χ

(k)]

R(Å)

O K-edge# 5

2 3 4 5 6k (Å-1)

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Y2O3/Si(001) conclusions: films

• For thickness ≥ 4 nm atomic and electronic structure correspond tobixbyite Y2O3

• Decreasing static disorder withincreasing thickness and/or annealing(less defects seen in electron microscopy)

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Y2O3/Si(001) conclusions: interface• Presence of SiOx

• Y – Si bonds with R = 2.09 Å (2.07 Åin YSi2)

• At 610 °C deposition temperature YSi2 seen from XRD

• Y – Si bonds are “precursor bonds”

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“Fingerprint approach” to XANES: Fe oxides

• Change of XANES lineshapewith oxidationstate, localsimmetry

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Evolution of XAFS• XAFS has greatly benefited from

– Improvements in SR sources• high brilliance, polarization, extended energy range,

stability, reliability– full theoretical understanding and reliable

analysis programs

• XAFS a reliable tool,but still interesting as a physical effect

σ = σ 0

3 Sin2δl=10 Im{T 1 −TG( )−1}1m ,1m

0,0

m∑