novel frameworks for the smart next-generation wafer fab...novel frameworks for the smart...

Novel Frameworks for the Smart Next-Generation

Wafer FabPresenter: Steve Blaine, P.E.

Internet of Things….What is it?

• The IoT is a future where computers know all

there is to know about the “things” around them.

• Using data gathered without action by people,

computers will monitor and even control these

“things”.

• We will be alerted to potential problems and be

able to take action before actual errors occur.

• With our increased knowledge, we will

automatically reduce waste and lower costs.

http://kevinjashton.com/2009/06/22/the-internet-of-things/

Internet of Things….What makes it work?

• Smart Ubiquitous Sensors: Inexpensive, easily connected sensors provide more, and more accurate, data.

• Mobile Devices: Provide the ability to monitor and interact with systems and things - located almost anywhere

• Cloud Computing: Providing computer services from multiple redundant offsite locations available on the Internet

• Interoperable Systems: Connectivity between systems enables a level of collaboration that was previously impractical.

• Analytics: Changing data into information to gain insight, improve decision-making and optimize operations

Internet of Things….how does it change factory automation?

Not so new:

• Smart Sensors are already here…and as low cost as possible…

• Mobile Devices is a common control system feature now…

• Cloud Computing is not so different from off site servers and storage…

Really new:

• Interoperable Systems: Connectivity between systems enabling a much higher level of collaboration than has been practical until today.

• Analytics: Applying analytics to this combined set of data to gain insight into operations, improve decision-making and optimize operations

Applications of Analytics

• Pattern recognition– Identification of previous occurrences, combining data

from multiple systems

– Algorithm: Time series data analysis (convolution, blind source separation)

• Anomaly detection– Identification of multivariate data excursions from norm

– Algorithm: Multi-dimensional clustering

• Predictive analysis– Tools that determine the probability of an outcome or

event by identifying cause and effect relationships

– Algorithm: Random forests (trained ‘forest’ of decision trees)

• Visualization– Easily comprehended “dashboards” to convey

information from a variety of sources

What are Analytics?

Analytics

• Exploratory data analysis (EDA), where new features in the data are discovered

• Confirmatory data analysis (CDA), where existing hypotheses are proven true or false

• Uses data visualization (e.g. dashboards) to communicate insight

Example – Predictive Analytics

Iron oxide peak from leaching ductile iron pipe

Early identification of aggressive water problem

saved the utility $20M in early replacement costs

Example – Analytics Visualization

http://www.skyfoundry.com/file/52/Case-Study-SkySpark-in-an-MV-Application.pdf

Example – Analytics Dashboard

http://blogs.msdn.com/cfs-filesystemfile.ashx/__key/communityserver-blogs-components-

weblogfiles/00-00-00-30-07-metablogapi/2251.image_5F00_658322A3.png

Application of Interoperability:

Complex Event Processing

• Makes decisions in real time with continuous streams of data

• Can provide advanced alarm management while suppressing false alarms

• Predicts impacts to scheduling (B2MML links to ERP/MES)

• Can change systems from “automatic” to “autonomous” –reacting appropriately even when faced with a situation never envisioned by the designer

What is Complex Event Processing?

Complex Event Processing

• Event Driven Architecture (EDA): software designed to detect, use, and react to events.

• Time-based, operates on continuous streams of data coming from many sources.

• Understands and manages stream relations. Assumes high event rate.

• Detects patterns in data.

• Produces output event streams or individual events.

Control Systems Today

Semiconductor Facility Management System

`

VFDs

Sensors/Devices

VFDs

Sensors/Devices

Ethernet

(OPC)

Remote IO

Networks

(Ethernet/IP, DDS)

Field Networks

(Profibus, Modbus,

HART…)

Systems Components

FMS System Equipment

• SCADA Workstations

• SCADA Servers

• Large PLCs/Controllers

• Small PLCs/Controllers

• Field Devices

• VFDs

FMS System Connections

• Ethernet

• Remote I/O Networks

• Field Networks

• Field Wiring

Ethernet

`

EXAMPLE: Semiconductor Facility Management System

60,000 ft (~5500 m2)

FMS Example

PLC/Field Equipment

• 15 Large PLCs/Controllers

• 15 Small PLCs/Controllers

• 100 VFDs (non-FFU)

• 2,500 Field Devices

SCADA Equipment

• 10 SCADA Workstations

• 4 SCADA Servers

• 50,000 SCADA points

2,500 “Hard” I/O Points50,000 “Soft” SCADA Points

Semiconductor Facilities – Control Systems Often in Separate “Silos”

•FMS

- Mechanical

- Cleanroom HVAC

- Process

- Vendor Systems

•Electrical

- Power Monitoring

- Generators

- UPS Status

- Auto Transfer Switches

- Substations

•Specialty Gas

- Gas Cabinets

- Pressure Sensors

- Flow Sensors

- EMO Buttons

•Specialty Chemical

- Pumps

- Tank Levels

- Liquid Leak Detectors

•Toxic Gas Detection

- Gas Detectors

- Horns/Strobes

- Tool Shutdown

•Fire Alarm

- Smoke Detectors

- Fire Dampers

- Horns/ Strobes

- Seismic Detectors

•BMS

- AHUs

- VAVs

- CAVs

- CO2 Sensors

Total = 240K Points

OPC BACnet Modbus Proprietary OPC Proprietary

•FFUs

- Fan Status/ Speed

- Zone Alarms

- Power

- EMO Buttons

Proprietary Proprietary

50K

Points

30K

Points50K

Points

10K

Points

20K

Points20K

Points

50K

Points

10K

Points

Reference Example from Data Centers –Data Center Integrated Management

•Mechanical/ HVAC

- Chillers Towers

- Air Handlers

- Exhaust Fans

- Terminal Units

•Electrical

- Power Monitoring

- Generators

- UPS

- Automatic Transfer Switches

- Substations

•Computer Servers

- Temperature

- HDD Usage

- CPU Usage

- Network Usage

Data Center Integrated Management

BACnet ModBUS SNMP

DCIM

Benefits

• Effective in providing a “single seat” monitoring capability

• Dashboards

• Capable of comparing operations at multiple data centers

Challenges

• Computer system centric (i.e. expertise favors one of the three systems – usually computer servers)

• Recreates capabilities already present in the other systems

• Very costly

Semiconductor Facilities –Control Systems Still in Separate “Silos” but with FMS “On Top”

•FMS

- Mechanical

- Cleanroom HVAC

- Process

- Vendor Systems

•Electrical

- Power Monitoring

- Generators

- UPS Status

- Auto Transfer Switches

- Substations

•Specialty Gas

- Gas Cabinets

- Pressure Sensors

- Flow Sensors

- EMO Buttons

•Specialty Chemical

- Pumps

- Tank Levels

- Liquid Leak Detectors

•Toxic Gas Detection

- Gas Detectors

- Horns/Strobes

- Tool Shutdown

•Fire Alarm

- Smoke Detectors

- Fire Dampers

- Horns/ Strobes

- Seismic Detectors

•BMS

- AHUs

- VAVs

- CAVs

- CO2 Sensors

OPC BACnet Modbus Proprietary OPC Proprietary

•FFUs

- Fan Status/ Speed

- Zone Alarms

- Power

- EMO Buttons

Proprietary Proprietary

50K

Points

30K

Points50K

Points

10K

Points

20K

Points20K

Points

50K

Points

10K

Points

Facility Management System

Total = 240K Points

M2M - Machine-to-Machine vs Many-to-Many

• “M2M” exists today – but usually as “Machine-to Machine”

communication

• “M2M” in the IoT is a wider concept - encompassing “Many-to-Many”

communication enabled by Big Data.

Big Data

M2M : Machine-to-Machine M2M : Many-to-Many

IoT = A System of Systems

The IoT is a “System of Systems” with both “horizontal” and “vertical” communication.

Source: http://electronicdesign.com/embedded/understanding-protocols-behind-internet-things

Flow Patterns –How will these systems interact?• Push

is a one-way communication between two parties in which a server sends data to a pre-defined client that receives the data.

• Request/Responseis a synchronous communication between two parties. A client sends a request to a server. The server receives the request and responds with the requested data back to the client. The client must wait for the response until it receives a response or until the request times out.

• Subscribe/Notifyallows asynchronous communication between two parties without the client waiting for the server response. The client indicates interest in a service by sending a “subscribe-call” to the server. The server adds the subscription to the address of other clients and sends notifications when data is ready to be sent.

• Publish/Subscribeallows a loose coupling between communication partners. Services offering information are advertised through a broker. Clients declare their interest in certain information by subscribing to the broker which makes sure the requested information flows between the service and the client. This pattern is most suitable for the IoT.

IoT Solution 1: Message BrokerPublish/Subscribe is fundamental to the IoT for two key advantages:

– Loose Coupling

– Scalability

The implementation of a Publish/Subscribe flow is typically

achieved by a middleware solution based on a Message Broker:

IoT Solution 2: Data Bus

Although Message Brokers will certainly be key elements in S2S and D2S

interaction, no single technology or protocol will monopolize the IoT scene,

and different technologies and protocols will be used for different types and

levels of interaction.

For instance the DDS protocol for D2D interaction implements a broker-less

Pub/Sub communication based on a Data Bus.

Proposed Architecture for Semiconductor Facilities

FMS BMSGases/

ChemicalsPower

MonitoringOther Systems

ComplexEvent

Processor

Analytics Engine

Web-based Query Tool

Feedback to change system operation

Data Bus / Message Broker

Selected Data Streams

NoSQL Database

Web-based Monitor

Computerized Maintenance Management

Production Systems(ERP)

Alarming & Paging System

Similar to Architecture used at STAR:

https://indico.cern.ch/event/258092/session/7/contribution/96/material/slides/0.pdf

Today’s Control Systems vs. IoT

Today’s Control Systems

• More IntegratedOrganized in a pyramidal way with a

single proprietary system on top

performing several common tasks.

• Tightly Coupled

(Client-Server)The client cannot post messages to

the server unless the server

process is running and available

• Automated SystemsSystems control according to

programmed functions without

human intervention

IoT

• More ModularSubdivided in more modules and skids,

each one performing it’s function and

sharing information with the others

• Loosely Coupled

(Publish-Subscribe)Publishers are loosely coupled to

subscribers, and need not even know

of their existence

• Autonomous SystemsSystems react appropriately even when

the system’s designers did not

anticipate the current system state.

Enabling Technology

Networking

• Wireless

• Mobile Devices

• Converged IT/AT

• IP v6

Devices

• MEMS

• RFID Tags

• Energy

Harvesting

• Geo-location

• SOC Security

All of these things are driving the creation of the IoT…

but more is needed….

Computing

•Cloud Services

•Security

What Else is Needed to Make It Work?

Middleware

• Message Bus / Brokers

Goal: Allow messaging between

applications, for instance

Publish/Subscribe messaging– Example: Apache ActiveMQ

• Enterprise Server Bus

Goal: Implement communication

between mutually interacting software

applications in a SOA– Examples: IBM WebSphere, JBoss, Oracle ESB, WSO2

Concepts

• SOA (Service Oriented Architecture)

• CEP (Complex Event Processing)

• EDA (Event Driven Architecture)

Messaging Protocols

•MQTT

(Message Queue Telemetry Transport)– Simple, lightweight (D2S, S2S)

•AMQP

(Advanced Message Queuing Protocol)– More feature-rich and complex (S2S)

•DDS (Data Distribution Service)– Oriented to real-time applications (D2D)

•OPC UA (OPC Unified Architecture)– Oriented to industrial applications (D2S, D2D,S2S)

Existing Standards and Technologies

Data

• XML

• JSON

• SQL

• NoSQL

Presentation

• HTML 5.0

• CSS

• Javascript

IoT will use many existing standards and technologies.

For instance:

Communication

•OPC/UA

•DDS

•MQTT

•AMQP

Web Services

•SOAP

•REST

Some of these are different from the automation

tools we use today…

Key Challenges: Semantics

Source: http://www.iot-a.eu/public/public-documents/d1.5/view

What Should You Do Today?

Invest in Controls and Networking• IoT is not here yet but the “Intranet” of things exists now.

Invest in Truly Open Systems• Ensure that the data you need is exposed and available

• Avoid the “who’s on top” dilemma

Invest in Information• Information in your systems is valuable

• Information about your systems is also valuable

Think Big! • What would you do if you knew everything about everything?

One last thought: Build it Yourself!

• Vendors can provide the tools – but no one can build an IoT

application without detailed knowledge of your systems

• Become self sufficient or hire a system integrator

Thank you!

steve.blaine@ch2m.com

Special thanks also to:

luca.trogu@ch2m.com

raja.kadiyala@ch2m.com

erika.wong@ch2m.com

AMQP Advanced Message Queuing Protocol = S2S messaging protocol feature

B2MML Business To Manufacturing Markup Language = an XML implementation of the ANSI/ISA-95 family of standards

BACnet Building Automation and Control Network = communication protocol for HVAC and associated equipment

BMS Building Management System = control system for mechanical and electrical HVAC equipment

CDA Confirmatory Data Analysis = type of analytics where existing hypotheses are proven true or false

CEP Complex Event Processing = method of tracking and analyzing data and deriving a conclusion

CPU Central Processing Unit = core computer element that carries out instructions

CSS Cascading Style Sheets = language used for describing look and feel of web pages, separates document content from presentation

D2D Device to Device = communicaiton between devices

D2S Device to Server = communication between devices and servers

DCIM Data Center Integrated Management = system to combine computer, facility and electrical management for data centers

DDS Data Distribution Service = messaging protocol used fro D2D communication for real-time applications

EDA Exploratory Data Analysis = type of analytics for manual querying to dscover new features

ERP Enterprise Resource Planning = business management software for manufacturing

FFU Fan Filter Units

FMS Facility Management System

HDD Hard Disk Drive

HVAC Heating / Ventilation / Air Conditioning

IoT Internet of Things

IP v6 Internet Protocol Version 6

JSON JavaScript Object Notation = open standard format using human-readable text to transmit data objects consisting of attribute–value pairs

M2M Machine to Machine

MES Manufacturing Execution System

ModBUS Serial communication protocol connecting industrial devices

MQTT Message Queue Telemetry Transport = Lightweight D2S or S2S Messaging protocol

NoSQL Non-relational Structure Query Language = mechanism for storage and retrieval of data not using tables as done in relational databases

OPC Open Platform Communication = standard for communication of data between control devices from different manufacturers

OPC UA OPC Unified Architecture = successor to OPC providing cross platform service oriented architecture

PLC Programmable Logic Controller

REST Representational State Transfer = software architecture for building scalable web services

S2S Server to Server = communication between servers

SCADA Supervisory Control and Data Acquisition

SOA Service Oriented Architecture

SOAP Simple Object Access Protocol = protocol for exchanging information via web services

SOC System on a Chip = integration of all computer components on a chip

SQL Structured Query Language = programming language designed for managing data in relational databases

UPS Uninterruptible Power Supply

VFD Variable Frequency Drive

XML Extensible Markup Language = set of rules for encoding documents in human-readable and machine-readable format

Glossary