x ray diffraction
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X Ray Diffraction.pdfTRANSCRIPT
Miller Indices
These figures from:http://en.wikipedia.org/wiki/Miller_indexLook up the site and also read this topicFrom a book for better understanding
Silicon
Cu
passivation
diffusionbarrier
Data: Baker, Kretschmann, Arzt, Acta Mat. 49, 2145 (2001)
-200
-100
0
100
200
300
400
500
0 80 160 240 320 400 480 560 640
Passivated 1.0 µm Cu Film(111) grains(100) grains
Stre
ss (M
Pa)
Temperature (oC)
Stress (MPa)
Cornella et al. Appl. Phys. Lett.71(20), November 1997, p 2949
Kraft and Nix, J. Appl. Phys.,83 (6), March 1998, p 3035
Grazing Incidence X-Ray Scattering
Penetration of x-raysinto the sample is astrong function ofIncidence angle
GIXS measurement (Al film)critical angle = 0.2 degrees
Doerner and Brennan Journal of Applied Physics, 63 p 126 (1988)
PURE AL, 8700 eV
By varying the incident angle, φ, it is possible to sample different depths into thefilm. Thus we can measure the strains at various depths with this technique.